Cleaning device for aluminum disc of etching machine

Abstract

The utility model provides an etching machine aluminum disc cleaning device which comprises a cleaning tank, a bearing mechanism and a rolling shaft set, the bearing mechanism is detachably connected with a piece box, the piece box is used for bearing a plurality of aluminum discs, the rolling shaft set comprises a first rolling shaft and a second rolling shaft, and the first rolling shaft and the second rolling shaft are rotationally connected in the cleaning tank. The first rolling shaft and the second rolling shaft abut against the aluminum disc, a motor is arranged on the side wall of the cleaning tank, the output end of the motor is connected with the first rolling shaft and the second rolling shaft, and a side brush and a plurality of washing rollers are detachably connected into the cleaning tank. The first rolling shaft and the second rolling shaft are arranged to abut against and drive the aluminum disc to rotate, the aluminum disc rotates in the cleaning tank and rubs with the side brush so that the side wall of the aluminum disc can be cleaned more thoroughly, the brushing rollers are arranged to brush the two faces of the aluminum disc in the rotating process of the multiple aluminum discs, the brushing efficiency is high, and brushing is more thorough and comprehensive.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production, especially relates to a kind of etching machine aluminum disc cleaning device. BACKGROUND

[0002] Dry etching is a kind of thin film etching technology using plasma, is completed by dry etching machine, and etching uniformity and etching rate in etching process are important process production indexes.

[0003] The cleaning process of the aluminum disc used in the existing etching machine usually adopts a large amount of manual work, the aluminum disc is placed in the cleaning tank by manual work, and the process of soaking, heating and ultrasonic is carried out after water is injected into the cleaning tank to cover the aluminum disc, and manual brushing is carried out.

[0004] However, the process of manual operation is not only low in efficiency, but also prone to incomplete cleaning. If the small holes on the aluminum disc are blocked due to incomplete cleaning, He leakage abnormal alarm problem may occur during normal operation of the etching machine. In the case of serious blockage, the etching rate and uniformity of the etching wafer source will be affected. UTILITY MODEL CONTENT

[0005] In view of the deficiencies of the prior art, the purpose of the utility model is to provide an etching machine aluminum disc cleaning device, which aims to solve the problem of insufficient cleaning of the etching machine aluminum disc in the prior art and insufficient efficiency.

[0006] In order to achieve the above purpose, the utility model is realized by the following technical scheme:

[0007] An etching machine aluminum disc cleaning device, comprising a cleaning tank, a bearing mechanism and a roller shaft group, the bearing mechanism is detachably connected with a piece box, the bearing mechanism is used for putting the piece box into the cleaning tank or taking it out from the cleaning tank, the piece box is used for bearing a plurality of aluminum discs, the roller shaft group comprises a first roller shaft and a second roller shaft, the first roller shaft and the second roller shaft are rotatably connected in the cleaning tank, so that when the piece box is put into the cleaning tank, the first roller shaft and the second roller shaft abut against the aluminum disc, a motor is arranged on the side wall of the cleaning tank, the output end of the motor is connected with the first roller shaft and the second roller shaft, and a side brush and a plurality of washing rollers are detachably connected in the cleaning tank.

[0008] Compared with the prior art, the utility model discloses the beneficial effect lies in: through setting up first roller and second roller, abut and drive the rotation of aluminium dish, the aluminium dish rotates in the cleaning tank and is rubbed with side brush, to make the side wall cleaning of aluminium dish be more clean, through setting up a plurality of washing roller, washes the both sides of aluminium dish in the process that a plurality of aluminium dish rotates, and washing efficiency is high and washes more completely, comprehensively, prevents the etching machine platform processing anomaly caused by not cleaning in place, reduces the maintenance cost, and further improves the production capacity and product yield.

[0009] Further, the roller group further comprises an auxiliary roller, both ends of the film cassette are detachably connected to the fixing seat, both ends of the auxiliary roller are rotatably connected to the fixing seat, and the side wall of the auxiliary roller abuts against the side wall of the aluminium dish.

[0010] Further, the plurality of washing rollers are uniformly and spacedly distributed.

[0011] Further, a plurality of heating plates are arranged on the side wall of the cleaning tank.

[0012] Further, a plurality of ultrasonic transducers are arranged on the bottom of the cleaning tank.

[0013] Further, a spraying and air blowing pipe is arranged on each of the opposite inner side walls of the cleaning tank.

[0014] Further, the bearing mechanism comprises a first connecting portion and a second connecting portion, the first connecting portion is annular, and is adapted to the shape of the film cassette, one side of the first connecting portion is connected to the second connecting portion, when the first connecting portion and the film cassette are located in the cleaning tank, the second connecting portion is partially arranged outside the cleaning tank to connect an external driving mechanism.

[0015] Further, a rubber sleeve is sleeved on each of the first roller and the second roller. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is a structure schematic view of the etching machine aluminium dish cleaning device in the utility model embodiment;

[0017] Fig. 2 It is a partial structure schematic view of the etching machine aluminium dish cleaning device in the utility model embodiment;

[0018] Fig. 3 It is a schematic view of the film cassette being put into the cleaning tank in the utility model embodiment;

[0019] MAIN ELEMENT SYMBOL EXPLANATION

[0020]

[0021]

[0022] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0023] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0024] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0026] Please see Figs. 1 to 3The etching machine aluminum disc cleaning device in this embodiment includes a cleaning tank 100, a supporting mechanism 200, and a roller assembly. The supporting mechanism 200 is detachably connected to a disc cassette 300. The supporting mechanism 200 is used to place the disc cassette 300 into or remove it from the cleaning tank 100. The disc cassette 300 is used to support a plurality of aluminum discs 400. The supporting mechanism 200 includes a first connecting part 210 and a second connecting part 220. The first connecting part 210 is annular and adapted to the shape of the disc cassette 300. One side of the first connecting part 210 is connected to the second connecting part 220. When the first connecting part 210 and the disc cassette 300 are located inside the cleaning tank 100, the second connecting part 220 is partially placed outside the cleaning tank 100 to connect to an external drive mechanism. Preferably, several aluminum discs 400 are inserted into and placed in the film cassette 300 in a direction perpendicular to the horizontal plane. The first connecting part 210 is in the shape of a square ring, and the second connecting part 220 includes two U-shaped rods and a connecting plate 230. The connecting plate 230 can increase the structural stability of the bearing mechanism 200. When the bearing mechanism 200 carries the film cassette 300 into the cleaning tank, a part of the U-shaped rod and the connecting plate 230 are located outside the cleaning tank 100. The connecting plate 230 can play a certain role in counterweight and balance. It can be understood that the position of the film cassette 300 can be easily operated through the bearing mechanism 200. While the first connecting part 210 fixes the film cassette 300, it does not affect the soaking process of the bottom of the film cassette 300, that is, it does not affect the soaking process of the aluminum discs 400 in the cleaning tank 100.

[0027] The roller assembly includes a first roller 111, a second roller 112, and an auxiliary roller 320. The first roller 111 and the second roller 112 are rotatably connected within the cleaning tank 100, so that when the tablet cassette 300 is placed in the cleaning tank 100, the first roller 111 and the second roller 112 abut against the aluminum disc 400. Both the first roller 111 and the second roller 112 are fitted with rubber sleeves. Both ends of the tablet cassette 300 are detachably connected to fixing seats 310. Both ends of the auxiliary roller 320 are rotatably connected to the fixing seats 310, and the sidewall of the auxiliary roller 320 abuts against the sidewall of the aluminum disc 400. Preferably, the first roller 111 and the second roller 112 are arranged opposite each other via a bearing seat, parallel to the horizontal plane, and located on both sides of the aluminum disc 400 when the aluminum disc 400 is immersed in the cleaning tank 100. The rubber sleeve is a fluororubber sleeve. When the disc cassette 300 is full of the aluminum disc 400, the fixing seat 310 can be connected to the disc cassette 300, so that the side wall of the auxiliary roller 320 is in close contact with the side wall of the aluminum disc 400. It can be understood that the top of the aluminum disc 400 is pressed by the auxiliary roller 320, and the bottom abuts against the first roller 111 and the second roller 112. This not only fixes the position of the aluminum disc 400 in the cleaning tank 100, but also facilitates the rotation of the aluminum disc 400 and maintains stability during rotation.

[0028] A motor 170 is mounted on the side wall of the cleaning tank 100. The output end of the motor 170 is connected to the first roller 111 and the second roller 112. A side brush 120 and several washing rollers 130 are detachably connected inside the cleaning tank 100, and the washing rollers 130 are evenly spaced. Preferably, a transmission cavity is provided inside the end of the cleaning tank 100 connected to the motor 170. One end of the first roller 111 and one end of the second roller 112 pass through the side wall of the cleaning tank 100 and are placed in the transmission cavity, and are respectively connected to gears. The output end of the motor 170 meshes with the gears on the first roller 111 and the second roller 112 via a transmission belt, so as to drive the first roller 111 and the second roller 112 to rotate. The friction of the rubber sleeve drives the aluminum disc 400 to rotate, facilitating the cleaning process. The aluminum disc 400 is brushed inside the tank 100, with both sides of the aluminum disc 400 contacting the washing rollers 130. The washing rollers 130 are rotatably connected to the cleaning tank 100 via PTFE screws, which facilitates disassembly and assembly. Understandably, the motor 170 can cause multiple aluminum discs 400 to rotate stably in the cleaning tank 100 simultaneously. The side walls of the aluminum disc 400 are brushed by the side brush 120, and both sides of the aluminum disc 400 are brushed by several washing rollers 130. The brushing process of the aluminum disc 400 is more efficient and the brushing is more thorough.

[0029] Several heating plates 150 are arranged on the side wall of the cleaning tank 100, and several ultrasonic transducers 160 are arranged at the bottom of the cleaning tank 100. Spray air pipes 140 are arranged on the two opposite inner side walls of the cleaning tank 100. Preferably, after the spray air pipes 140 spray DIW water, the ultrasonic transducers 160 are turned on for ultrasonic brushing. A drain valve is provided at the bottom of the cleaning tank 100. After the ultrasonic brushing is completed, the drain valve is opened, and the spray air pipes 140 continue to spray and brush. After brushing is completed, the spray air pipes 140 spray nitrogen gas, and the supporting mechanism 200 slowly raises the height. The moisture on the surface of the aluminum disc 400 is dried by the nitrogen gas. When the supporting mechanism 200 is raised to the position, the disc box 300 is manually disassembled to complete the brushing process. Understandably, the etching machine aluminum disk cleaning device can effectively prevent abnormalities in the etching machine process caused by inadequate or unclean cleaning of the aluminum disk 400, thereby reducing maintenance costs and improving product yield and production capacity.

[0030] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0031] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A cleaning device for an etching machine aluminum disc, characterized in that, The device includes a cleaning tank, a support mechanism, and a roller assembly. The support mechanism is detachably connected to a tray, and is used to place or remove the tray from the cleaning tank. The tray carries several aluminum trays. The roller assembly includes a first roller and a second roller, which are rotatably connected within the cleaning tank so that when the tray is placed in the cleaning tank, the first roller and the second roller abut against the aluminum tray. A motor is installed on the side wall of the cleaning tank, and the output end of the motor is connected to the first roller and the second roller. A side brush and several washing rollers are detachably connected within the cleaning tank.

2. The etching machine aluminum disc cleaning device according to claim 1, characterized in that, The roller assembly also includes an auxiliary roller. Both ends of the disc box are detachably connected to a fixing seat. Both ends of the auxiliary roller are rotatably connected to the fixing seat. The side wall of the auxiliary roller abuts against the side wall of the aluminum disc.

3. The etching machine aluminum disc cleaning device according to claim 1, characterized in that, Several of the aforementioned washing rollers are evenly spaced.

4. The etching machine aluminum disc cleaning device according to claim 1, characterized in that, Several heating plates are installed on the side wall of the cleaning tank.

5. The etching machine aluminum disc cleaning device according to claim 1, characterized in that, Several ultrasonic transducers are installed at the bottom of the cleaning tank.

6. The etching machine aluminum disc cleaning device according to claim 1, characterized in that, Spray air pipes are installed on the two opposite inner side walls of the cleaning tank.

7. The etching machine aluminum disc cleaning device according to claim 1, characterized in that, The supporting mechanism includes a first connecting part and a second connecting part. The first connecting part is annular and adapted to the shape of the film box. One side of the first connecting part is connected to the second connecting part. When the first connecting part and the film box are located in the cleaning tank, the second connecting part is partially placed outside the cleaning tank to connect to an external driving mechanism.

8. The etching machine aluminum disc cleaning device according to claim 1, characterized in that, Both the first roller and the second roller are fitted with rubber sleeves.

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