Automatic cleaning device for large-size probe station

Abstract

The utility model discloses an automatic cleaning device for a large-size probe station, which comprises a fixed seat, a plurality of groups of probe assemblies are arranged at the upper part of the fixed seat, the probe assemblies are circumferentially distributed at equal intervals, a fixed station is arranged at the center of the fixed seat, and a placement table is arranged on the surface of the fixed station; a stand column is arranged on the upper portion of the fixing base, an adjusting block is arranged on the surface of the stand column, and a supporting rod is arranged on one side of the adjusting block. The motor drives the screw rod to rotate, the telescopic rod in threaded connection with the screw rod can stretch out and draw back in the fixing base, and therefore the fixing frame and the supporting plate are driven to move towards the inner side of the containing table, and after the fixing frame and the supporting plate move to the designated position, the driver drives the driving shaft to rotate, and therefore the cleaning scraping plate conducts rotary cleaning on the containing table. The cleaning scraping plate is made of a flexible material, has certain adsorption and attaching force and can repeatedly clean the placing table, and meanwhile, the air pump is started to blow the placing table again through the spray head, so that the table top is kept dry and clean.

Description

TECHNICAL FIELD

[0001] The utility model relates to probe station automatic cleaning technical field more specifically, a kind of large size probe station automatic cleaning device. BACKGROUND

[0002] Probe station is one of important detection equipment in semiconductor industry. It is widely used in the precise electrical measurement of complex, high-speed device research and development, aims to ensure quality and reliability, and reduce research and development time and device manufacturing process cost, probe station is mainly used in wafer detection, chip research and development and fault analysis etc. in wafer manufacturing link.

[0003] The existing probe station needs manual cleaning before wafer detection, to avoid causing wafer contamination, manual cleaning efficiency is low. Therefore, a new technical scheme needs to be provided to solve it. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of large size probe station automatic cleaning device, solve the existing probe station needs manual cleaning before wafer detection, to avoid causing wafer contamination, manual cleaning efficiency is low.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a kind of large size probe station automatic cleaning device, comprising: fixed seat, the upper portion of the fixed seat is provided with several groups of probe components and probe components are distributed in circle equidistantly, the center of the fixed seat is provided with fixed platform and the surface of fixed platform is provided with placement platform, the upper portion of the fixed seat is provided with stand and the surface of stand is provided with adjusting block, the side of adjusting block is provided with support rod and the side of support rod is fixedly installed with observation mechanism, the inside of the fixed seat is provided with telescopic link and the telescopic link is connected between fixed seat, the inside of the fixed seat is provided with motor and the power output end of motor is provided with screw rod, the inside of telescopic link is provided with screw hole and screw rod extends to screw hole inside and is connected with its screw thread, the side of telescopic link is provided with fixed frame and the surface of fixed frame is provided with air pump, the side of fixed frame is provided with support plate and support plate extends to the inside of fixed seat, the output end of air pump is provided with delivery pipe and delivery pipe extends to the lower portion of support plate and is installed with spray head, the surface of support plate is provided with driver and the power output end of driver is provided with driving shaft, the surface of driving shaft is provided with mounting bracket and the inside of mounting bracket is provided with cleaning scraper.

[0006] As a preferred embodiment of the utility model, the inside of the adjusting block is provided with locking piece and locking piece penetrates the mutual contact between adjusting block and stand.

[0007] As a preferred embodiment of the utility model, the side of the adjusting block is provided with connecting rod and connecting rod is located between the fixed block of adjusting block side.

[0008] As a preferred embodiment of the utility model, the surface of the support plate is provided with a controller, and the controller is electrically connected between the air pump and the driver through wires.

[0009] As a preferred embodiment of the utility model, the cleaning scraper is installed between the mounting frame through a clamping groove and is fixed through a fixing bolt.

[0010] As a preferred embodiment of the utility model, a limiting mechanism is arranged between the telescopic rod and the fixing seat.

[0011] Compared with the prior art, the utility model has the beneficial effects as follows:

[0012] The utility model discloses a plurality of probe assemblies are arranged on the upper portion of the fixing seat and are distributed at equal intervals in a circle, a fixing table is arranged at the center of the fixing seat, the surface of the fixing table is provided with a placing table, a stand is arranged on the upper portion of the fixing seat, the surface of the stand is provided with an adjusting block, a supporting rod is arranged on one side of the adjusting block, and observation mechanisms are fixedly installed on the side surface of the supporting rod, a telescopic rod is arranged in the fixing seat and is telescopically connected between the telescopic rod and the fixing seat, a motor is arranged in the fixing seat, and a screw rod is arranged on the power output end of the motor, a threaded hole is arranged in the telescopic rod, the screw rod extends into the threaded hole and is screw-connected with the threaded hole, a fixing frame is arranged on the side surface of the fixing frame, the surface of the fixing frame is provided with an air pump, a support plate extends to the inner side of the fixing seat, a conveying pipe is arranged on the output end of the air pump, the conveying pipe extends to the lower portion of the support plate and is provided with a spray head, a driver is arranged on the surface of the support plate, a driving shaft is arranged on the power output end of the driver, a mounting frame is arranged on the surface of the driving shaft, and a cleaning scraper is arranged in the mounting frame, the motor drives the screw rod to rotate, the telescopic rod telescopically moves in the fixing seat, the fixing frame and the support plate move to the inner side of the placing table, the driver drives the driving shaft to rotate, the cleaning scraper rotates and cleans on the placing table, the cleaning scraper is made of flexible material and has certain adsorption and adhesion, can repeatedly clean the placing table, and the air pump opens and blows the placing table through the spray head, so that the table surface is kept dry and clean. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is overall structure schematic view of the utility model;

[0014] Figure 2 It is side view structure schematic view of the utility model;

[0015] Figure 3 It is cross section structure schematic view of the utility model.

[0016] In the diagram: 1. Fixing base; 2. Probe assembly; 3. Fixing platform; 4. Placement platform; 5. Telescopic rod; 6. Air pump; 7. Upright pole; 8. Adjusting block; 9. Connecting rod; 10. Support rod; 11. Observation mechanism; 12. Locking element; 13. Motor; 14. Screw; 15. Threaded hole; 16. Fixing plate; 17. Delivery pipe; 18. Controller; 19. Nozzle; 20. Support plate; 21. Driver; 22. Drive shaft; 23. Mounting bracket; 24. Cleaning scraper. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figures 1-3This utility model provides a technical solution: an automatic cleaning device for a large-size probe station, comprising: a fixed base 1, wherein a plurality of probe assemblies 2 are arranged on the upper part of the fixed base 1 and the probe assemblies 2 are distributed at equal intervals around the circumference; a fixed platform 3 is arranged at the center of the fixed base 1 and a placement platform 4 is arranged on the surface of the fixed platform 3; a column 7 is arranged on the upper part of the fixed base 1 and an adjusting block 8 is arranged on the surface of the column 7; a support rod 10 is arranged on one side of the adjusting block 8 and an observation mechanism 11 is fixedly installed on the side of the support rod 10; a telescopic rod 5 is arranged inside the fixed base 1 and is telescopically connected to the fixed base 1; a motor 13 is arranged inside the fixed base 1 and a screw 14 is arranged at the power output end of the motor 13; the telescopic rod 5... The telescopic rod 5 has a threaded hole 15 inside, and the screw 14 extends into the threaded hole 15 and is threadedly connected to it. A fixing frame 16 is provided on the side of the telescopic rod 5, and an air pump 6 is provided on the surface of the fixing frame 16. A support plate 20 is provided on the side of the fixing frame 16 and extends inward towards the fixing seat 1. A delivery pipe 17 is provided at the output end of the air pump 6 and extends to the lower part of the support plate 20, where a nozzle 19 is installed. A driver 21 is provided on the surface of the support plate 20, and a drive shaft 22 is provided at the power output end of the driver 21. A mounting bracket 23 is provided on the surface of the drive shaft 22, and a cleaning scraper 24 is provided inside the mounting bracket 23. Several sets of probe assemblies 2 are provided on the upper part of the fixing seat 1, and the probe assemblies 2 are circumferentially arranged. The spacing is distributed as follows: a fixed platform 3 is set at the center of the fixed base 1, and a placement platform 4 is set on the surface of the fixed platform 3; a column 7 is set on the upper part of the fixed base 1, and an adjusting block 8 is set on the surface of the column 7; a support rod 10 is set on one side of the adjusting block 8, and an observation mechanism 11 is fixedly installed on the side of the support rod 10; a telescopic rod 5 is set inside the fixed base 1, and the telescopic rod 5 is telescopically connected to the fixed base 1; a motor 13 is set inside the fixed base 1, and a screw 14 is set at the power output end of the motor 13; a threaded hole 15 is set inside the telescopic rod 5, and the screw 14 extends into the threaded hole 15 and is threadedly connected to it; a fixing frame 16 is set on the side of the telescopic rod 5, and an air pump 6 is set on the surface of the fixing frame 16; and a fixing frame 16 is set on the side of the fixing frame 16. A support plate 20 is provided, extending inward to the fixed base 1. A delivery pipe 17 is provided at the output end of the air pump 6, extending to the lower part of the support plate 20 and fitted with a nozzle 19. A driver 21 is provided on the surface of the support plate 20, and a drive shaft 22 is provided at the power output end of the driver 21. A mounting bracket 23 is provided on the surface of the drive shaft 22, and a cleaning scraper 24 is provided inside the mounting bracket 23. The screw 14 is rotated by the motor 13, allowing the telescopic rod 5 threadedly connected to it to extend and retract within the fixed base 1. This causes the fixed bracket 16 and the support plate 20 to move inward to the placement platform 4. After moving to the designated position, the driver 21 drives the drive shaft 22 to rotate, causing the cleaning scraper 24 to rotate and clean on the placement platform 4.The cleaning scraper 24 is made of flexible material and has a certain degree of adsorption and adhesion, allowing for repeated cleaning of the placement table 4. Simultaneously, the air pump 6 activates, using nozzle 19 to blow air through the placement table 4 again, keeping the surface dry and clean.

[0019] Further improvements, such as Figure 2 As shown: The adjusting block 8 is provided with a locking member 12 inside, and the locking member 12 penetrates the adjusting block 8 and contacts the column 7. By the locking member 12 penetrating the adjusting block 8 and contacting the column 7, the position of the adjusting block 8 on the column 7 can be kept stable.

[0020] Further improvements, such as Figure 2 As shown: The side of the adjusting block 8 is provided with a connecting rod 9 and the connecting rod 9 is located between the fixed blocks on the side of the adjusting block 8. This arrangement forms a handle structure, which facilitates its rotation and adjustment.

[0021] Further improvements, such as Figure 3 As shown: The surface of the support plate 20 is provided with a controller 18, and the controller 18 is electrically connected to the air pump 6 and the driver 21 through wires. The controller can conveniently control the switching of the air pump 6 and the driver 21.

[0022] Further improvements, such as Figure 3 As shown: The cleaning scraper 24 and the mounting bracket 23 are installed through a slot and fixed with fixing bolts. This installation method allows for quick and convenient replacement of the cleaning scraper. When the cleaning scraper 24 is worn or damaged, it is not necessary to disassemble the entire mounting bracket 23. Simply loosen the fixing bolts, remove the old scraper, install the new scraper and tighten the fixing bolts.

[0023] Further improvements, such as Figure 3 As shown: A limiting mechanism is provided between the telescopic rod 5 and the fixed base 1. The limiting mechanism can limit the telescopic range of the telescopic rod 5 in the fixed base 1.

[0024] Working Principle: This utility model has several sets of probe assemblies 2 arranged on the upper part of the fixed base 1, and the probe assemblies 2 are distributed in a circumferentially evenly spaced manner. A fixed platform 3 is set at the center of the fixed base 1, and a placement platform 4 is set on the surface of the fixed platform 3. A column 7 is set on the upper part of the fixed base 1, and an adjusting block 8 is set on the surface of the column 7. A support rod 10 is set on one side of the adjusting block 8, and an observation mechanism 11 is fixedly installed on the side of the support rod 10. A telescopic rod 5 is set inside the fixed base 1, and the telescopic rod 5 is telescopically connected to the fixed base 1. A motor 13 is set inside the fixed base 1, and a screw 14 is set at the power output end of the motor 13. A threaded hole 15 is set inside the telescopic rod 5, and the screw 14 extends into the threaded hole 15 and is threadedly connected to it. A fixing frame 16 is set on the side of the telescopic rod 5, and an air pump 6 is set on the surface of the fixing frame 16. A support plate 20 is set on the side of the fixing frame 16, and the support plate 20 extends towards the fixed base 1. Extending inwards, a delivery pipe 17 is provided at the output end of the air pump 6, and the delivery pipe 17 extends to the lower part of the support plate 20 and is equipped with a nozzle 19. A driver 21 is provided on the surface of the support plate 20, and a drive shaft 22 is provided at the power output end of the driver 21. A mounting bracket 23 is provided on the surface of the drive shaft 22, and a cleaning scraper 24 is provided inside the mounting bracket 23. The motor 13 drives the screw 14 to rotate, so that the telescopic rod 5 threaded to it can extend and retract in the fixed seat 1, thereby driving the fixed bracket 16 and the support plate 20 to move inwards towards the placement table 4. After moving to the designated position, the driver 21 drives the drive shaft 22 to rotate, so that the cleaning scraper 24 rotates and cleans on the placement table 4. The cleaning scraper 24 is made of flexible material and has a certain adsorption and adhesion force, which can repeatedly clean the placement table 4. At the same time, the air pump 6 is turned on to blow the placement table 4 again through the nozzle 19 to keep the table surface dry and clean.

[0025] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0026] Finally, the following points should be noted: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installation", "connection", and "linkage" should be interpreted broadly, and can refer to mechanical or electrical connections, or internal connections between two components, or direct connections. "Up", "down", "left", "right", etc., are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may change.

[0027] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An automatic cleaning device for a large-size probe station, characterized in that: include: A fixed base (1) is provided with several sets of probe assemblies (2) on its upper part, and the probe assemblies (2) are distributed in a circular pattern at equal intervals. A fixed platform (3) is provided at the center of the fixed base (1), and a placement platform (4) is provided on the surface of the fixed platform (3). A column (7) is provided on the upper part of the fixed base (1), and an adjusting block (8) is provided on the surface of the column (7). A support rod (10) is provided on one side of the adjusting block (8), and an observation mechanism (11) is fixedly installed on the side of the support rod (10). A telescopic rod (5) is provided inside the fixed base (1), and the telescopic rod (5) is telescopically connected to the fixed base (1). A motor (13) is provided inside the fixed base (1), and a screw (14) is provided at the power output end of the motor (13). The telescopic rod (5) The telescopic rod (5) has a threaded hole (15) inside and a screw (14) extends into the threaded hole (15) and is threadedly connected to it. A fixing frame (16) is provided on the side of the telescopic rod (5) and an air pump (6) is provided on the surface of the fixing frame (16). A support plate (20) is provided on the side of the fixing frame (16) and the support plate (20) extends into the fixing seat (1). A delivery pipe (17) is provided at the output end of the air pump (6) and the delivery pipe (17) extends to the lower part of the support plate (20) and is equipped with a nozzle (19). A driver (21) is provided on the surface of the support plate (20) and a drive shaft (22) is provided at the power output end of the driver (21). A mounting frame (23) is provided on the surface of the drive shaft (22) and a cleaning scraper (24) is provided inside the mounting frame (23).

2. The automatic cleaning device for a large-size probe station according to claim 1, characterized in that: The adjusting block (8) is provided with a locking element (12) inside, and the locking element (12) passes through the adjusting block (8) and contacts the column (7).

3. The automatic cleaning device for a large-size probe station according to claim 1, characterized in that: The side of the adjusting block (8) is provided with a connecting rod (9) and the connecting rod (9) is located between the fixing blocks on the side of the adjusting block (8).

4. The automatic cleaning device for a large-size probe station according to claim 1, characterized in that: The surface of the support plate (20) is provided with a controller (18), and the controller (18) is electrically connected to the air pump (6) and the driver (21) via wires.

5. The automatic cleaning device for a large-size probe station according to claim 1, characterized in that: The cleaning scraper (24) is installed with the mounting bracket (23) through a slot and fixed with fixing bolts.

6. The automatic cleaning device for a large-size probe station according to claim 1, characterized in that: A limit mechanism is provided between the telescopic rod (5) and the fixed seat (1).

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