Magnetron cathode carbonization tank

Abstract

The utility model discloses a magnetron cathode carbonization tank which comprises a tank shell, a clamp assembly and a fixed electrode used for being attached to one side of an input terminal of a magnetron cathode assembly are arranged in the tank shell, the clamp assembly comprises a sliding plate and a clamping piece used for clamping the other side corresponding to the input terminal of the magnetron cathode assembly, and the clamping piece is arranged on the sliding plate. The sliding plate is connected with the groove shell in a sliding mode, a clamping and pressing air cylinder is arranged outside the groove shell and drives the sliding plate to slide left and right, a supporting plate used for supporting a side pipe of the magnetron cathode assembly is arranged in the groove shell, and the supporting plate is located above the sliding plate. According to the magnetron cathode carbonization tank disclosed by the utility model, the bending deformation of the input terminal can be avoided, so that the stability of the product quality of the magnetron is facilitated.

Description

Technical Field

[0001] This utility model relates to the field of carbonization tanks, specifically to a magnetron cathode carbonization tank. Background Technology

[0002] Currently, microwave ovens are equipped with magnetrons, which include a magnetron cathode assembly and a filament. During manufacturing, the filament needs to undergo carbonization. Existing technology involves setting up a carbonization tank, placing the magnetron cathode assembly into the tank, evacuating the air from the tank, and then injecting carbonization gas (such as methane) to energize the filament, thereby carbonizing the filament surface. For example, Chinese invention patent publication number CN113701500B, "A Cathode Assembly Carbonization Furnace," currently uses electrode clips in the carbonization tank to clamp the input terminal of the magnetron cathode assembly, thus energizing the filament. However, when using a robotic arm to move the magnetron cathode assembly downwards and insert the input terminal into the electrode clips, the input terminal needs to push open the clips, meaning the input terminal experiences significant upward resistance. Due to load eccentricity, the input terminal may have initial bending or uneven material properties, which can easily lead to bending and deformation of the input terminal, resulting in unstable magnetron product quality. Therefore, the existing carbonization tank technology needs improvement. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a magnetron cathode carbonization tank, which is beneficial to stabilizing the product quality of magnetrons.

[0004] The objective of this utility model is achieved through the following technical solution.

[0005] The present invention discloses a magnetron cathode carbonization tank, comprising a tank shell, wherein a clamping assembly and a fixed electrode for abutting one side of the input terminal of the magnetron cathode assembly are provided inside the tank shell. The clamping assembly includes a sliding plate and a clamping member for clamping the other side corresponding to the input terminal of the magnetron cathode assembly. The clamping member is disposed on the sliding plate, and the sliding plate is slidably connected to the tank shell. A clamping cylinder is provided outside the tank shell, and the clamping cylinder drives the sliding plate to slide left and right. A support plate for supporting the side tube of the magnetron cathode assembly is provided inside the tank shell, and the support plate is located above the sliding plate.

[0006] Preferably, the clamp assembly includes a support mounted on the slide plate, the clamp is slidably connected to the support from left to right, and the support is provided with a buffer spring, one end of which is connected to the corresponding clamp.

[0007] Preferably, the tank shell includes a tank bottom plate, an insulating support base is installed on the tank bottom plate, the fixed electrode is installed on the insulating support base, an avoidance groove is formed on the slide plate, and the insulating support base is disposed in the avoidance groove.

[0008] Preferably, a groove is formed in the tray, and a hole is formed in the groove for inserting the magnetron cathode assembly downward.

[0009] Preferably, the front side of the tank shell is provided with a vent, and the upper front end of the support plate is equipped with a uniform air mesh plate, the position of which corresponds to the vent.

[0010] Preferably, the piston rod of the clamping cylinder is equipped with a connecting plate, the connecting plate is equipped with two push-pull rods in total, the slot shell includes a left side plate, the push-pull rods pass through the left side plate, the right end of the push-pull rods is engaged with the slide plate, and the clamping cylinder is arranged between the two push-pull rods.

[0011] Preferably, the push-pull rod is fitted with a corrugated sealing tube, the left end of which is fixed to the push-pull rod, and the right end of which is mounted on the left side plate.

[0012] Preferably, the carbonization tank of this utility model further includes a frame, the frame being screwed with a first stroke adjusting screw and a second stroke adjusting screw, and the connecting plate being disposed between the first stroke adjusting screw and the second stroke adjusting screw.

[0013] Preferably, observation windows are provided on the front and rear sides of the tank shell.

[0014] Preferably, the upper end of the groove shell has a circumferentially arranged groove II, and a sealing strip is provided in the groove II.

[0015] Compared with the prior art, the advantages of this utility model are as follows: by setting a clamping assembly and a fixed electrode for abutting the input terminal of the magnetron cathode assembly on one side inside the tank shell, the clamping assembly includes a sliding plate and a clamping member for clamping the input terminal of the magnetron cathode assembly on the other side. The clamping member is set on the sliding plate, which is slidably connected to the tank shell. A clamping cylinder is provided outside the tank shell, which drives the sliding plate to slide left and right. A support plate for supporting the side tube of the magnetron cathode assembly is provided inside the tank shell. The support plate is located above the sliding plate, which can prevent the input terminal from bending and deforming, thereby helping to stabilize the product quality of the magnetron. Attached Figure Description

[0016] Figure 1 This is a top-view three-dimensional structural diagram of the magnetron cathode carbonization tank and magnetron cathode assembly of this utility model.

[0017] Figure 2This is a partial cross-sectional view of the magnetron cathode carbonization tank of this utility model from the front view direction.

[0018] Figure 3 This is a schematic diagram showing the state of the fixed electrode and clamping member pressing the input terminal of this utility model.

[0019] Figure 4 This is an exploded view of the fixed electrode and clamp assembly of this utility model.

[0020] Figure 5 This is an exploded view of the magnetron cathode carbonization tank of this utility model, with the clamps and fixed electrodes removed.

[0021] Figure 6 This is a three-dimensional structural diagram of the combination of the sliding plate, clamping cylinder and push-pull rod of this utility model.

[0022] Figure 7 This is a top-view cross-sectional schematic diagram of the magnetron cathode carbonization tank of this utility model.

[0023] Figure 8 This is a bottom-view three-dimensional structural diagram of the magnetron cathode assembly.

[0024] Figure 9 This is a left-side cross-sectional view of the magnetron cathode carbonization tank and magnetron cathode assembly of this utility model.

[0025] Labeling: Tank shell 1; Support column 101; Vent 102; Observation window 103; Groove II 104; Sealing strip 105; Tank bottom plate 11; Left side plate 12; Fixed electrode 13; Insulating support base 131; Conductor 132; Clamp assembly 2; Slide plate 21; Clearance groove 2101; Locking block 221; Clamp 22; Support 221; Buffer spring 222; Sliding guide block 23; Support plate 3; Groove I 31; Hole 311; Air distribution mesh plate 32; Clamping cylinder 4; Push-pull rod 5; Annular groove 501; Connecting plate 51; Corrugated sealing pipe 6; Frame 7; First stroke adjusting screw 71; Second stroke adjusting screw 72; Suction pipe 8; Inlet pipe 9; Magnetron cathode assembly 99; Filament 991; Input terminal 992; Side pipe 993; Flange 9931. Detailed Implementation

[0026] The present invention will now be further described with reference to the accompanying drawings.

[0027] The magnetron cathode carbonization tank of this utility model, such as Figure 1 and Figure 5 As shown, it includes the tank shell 1, as... Figure 2As shown, the tank housing 1 is equipped with a clamping assembly 2 and a fixed electrode 13 for abutting one side of the input terminal 992 of the magnetron cathode assembly 99. The clamping assembly 2 includes a sliding plate 21 and a clamping member 22 for clamping the other side corresponding to the input terminal 992 of the magnetron cathode assembly 99. The clamping member 22 is disposed on the sliding plate 21, and the sliding plate 21 is slidably connected to the tank housing 1. Specifically, the tank housing 1 includes a tank bottom plate 11, on which a sliding guide block 23 is installed. A groove is formed on one side of the sliding guide block 23. The front edge and rear edge of the sliding plate 21 are respectively slidably disposed in the grooves of the corresponding sliding guide blocks 23, and the sliding guide blocks 23 are spaced apart in the left and right direction, so that the sliding guide blocks 23 guide the sliding plate 21 to move linearly left and right. Figure 1 As shown, a clamping cylinder 4 is provided on the outside of the tank shell 1. The clamping cylinder 4 drives the slide plate 21 to slide left and right. Since the clamping cylinder 4 is located outside the tank shell 1, the air pipe connected to the clamping cylinder 4 does not need to be introduced into the tank shell 1. The tank shell 1 is provided with a support plate 3 for supporting the side tube 993 of the magnetron cathode assembly 99, such as... Figure 2 As shown, the tray 3 is located above the slide plate 21, specifically, as... Figure 8 As shown, the side tube 993 of the magnetron cathode assembly 99 has a flange 9931, and the support plate 3 contacts and supports the flange 9931, which is beneficial to the stable placement of the magnetron cathode assembly 99.

[0028] like Figure 1 and Figure 2 As shown, the robotic arm lowers the magnetron cathode assembly 99 into the tank 1. The fixed electrode 13 is located to the left below the input terminal 992 of the magnetron cathode assembly 99. As the magnetron cathode assembly 99 descends, as... Figure 2 and Figure 3 As shown, the two input terminals 992 of the magnetron cathode assembly 99 move downwards against the right side of the corresponding fixed electrode 13. The robot releases the magnetron cathode assembly 99, and the support plate 3 supports the side tube 993, stopping the input terminals 992 from moving downwards. Then, the clamping cylinder 4 drives the slide plate 21 to move to the left, causing the clamp 22 on the slide plate 21 to move to the left, that is, the clamp 22 moves towards the corresponding input terminal 992. Subsequently, as... Figure 3As shown, clamp 22 presses the corresponding input terminal 992 against the right side of the corresponding fixed electrode 13, thereby ensuring good conductive contact between the input terminal 992 and the corresponding fixed electrode 13. The carbonization tank also includes a tank cover (note that the tank cover is not shown in any of the attached figures). The tank cover is placed on the upper side of the tank shell 1, thereby closing the upper opening of the tank shell 1. Then, the inner cavity of the tank shell 1 is evacuated, and carbonization gas is injected into the inner cavity of the tank shell 1. The fixed electrode 13 is powered on, allowing current to flow through the filament 991 of the magnetron cathode assembly 99, thereby forming a carburized layer on the surface of the filament 991. As mentioned above, since the input terminal 992 of the magnetron cathode assembly 99 does not need to be squeezed open during the downward movement, This design avoids bending and deformation of the input terminal 992. Furthermore, since the fixed electrode 13 is stationary, it prevents the input terminal 992 from moving significantly to the right or left. When the input terminal 992 is positioned downwards, there is only a small gap (e.g., 0.3 mm to 0.7 mm) between the input terminal 992 and the right side of the fixed electrode 13. Therefore, when the clamp 22 moves to the left, the input terminal 992 will only move a small distance to the left to complete the clamping action, thus preventing the magnetron cathode assembly 99 from being significantly pushed left or right, and reducing the possibility of the input terminal 992 being bent horizontally. As can be seen from the above, compared with the prior art, the carbonization tank of this invention helps to stabilize the product quality of the magnetron.

[0029] Furthermore, such as Figure 3 As shown, the clamp assembly 2 includes a support 221, such as Figure 2 As shown, the support 221 is mounted on the slide plate 21 by corresponding screws, as... Figure 4As shown, the clamp 22 is slidably connected to the support 221. The support 221 is provided with a buffer spring 222. One end of the buffer spring 222 is connected to the corresponding clamp 22. More specifically, the clamp 22 is cylindrical. The support 221 has a circular hole extending in the left and right direction. The clamp 22 is slidably disposed in the corresponding circular hole. A groove is formed in the middle of the support 221 in the left and right direction. The left end of the buffer spring 222 contacts the shoulder of the clamp 22. The right end of the buffer spring 222 contacts the right inner wall of the groove. A corresponding external hexagonal bolt is coaxially installed on the right end of the clamp 22. The external hexagonal bolt is located on the right outer side of the support 221. Thus, the elastic restoring force of the buffer spring 222 pushes the clamp 22 to the left to the extreme position relative to the support 221, so that the head of the external hexagonal bolt abuts against the right side of the support 221. When the clamping cylinder 4 moves the slide plate 21 to the left, the support 221 moves to the left along with the slide plate 21, causing the clamp 22 to move to the left. When the left end face of the clamp 22 contacts the right side of the input terminal 992, the buffer spring 222 acts as a buffer, allowing the clamp 22 to shift to the right relative to the support 221 (further compressing and deforming the buffer spring 222). When the slide plate 21 moves to its leftmost position, the clamp 22 actually clamps the input terminal 992 through the elastic restoring force of the corresponding buffer spring 222. Figure 1 and Figure 5 As shown, the rectangular array of magnetron cathode assemblies 99 is placed inside the tank 1. That is, the two fixed electrodes 13 are arranged in a rectangular array as a group. Each support 221 is equipped with two clamps 22 and two buffer springs 222. The rectangular array of supports 221 is distributed on the same slide plate 21. Therefore, when the clamping cylinder 4 moves the slide plate 21, it can simultaneously move multiple clamps 22 to the left to clamp the corresponding input terminals 992. When the slide plate 21 moves to the right, it can simultaneously release each input terminal 992. The combination structure of the buffer springs 222 and the clamps 22 can compensate for the installation position error of the fixed electrodes 13 in the left and right directions. The support 221 is made of ceramic.

[0030] Furthermore, such as Figure 2 As shown, the tank shell 1 includes a tank bottom plate 11, such as Figure 2 Combination Figure 3 As shown, an insulating support base 131 is installed on the bottom plate 11 of the tank. The insulating support base 131 can be made of ceramic. The fixed electrodes 13 are installed on the insulating support base 131, that is, two fixed electrodes 13 are installed on each insulating support base 131. Figure 6 As shown, the slide plate 21 has clearance slots 2101 formed on it. The clearance slots 2101 are arranged in a rectangular array, as shown in the figure. Figure 2 As shown, the insulating support 131 is disposed within the clearance groove 2101. Therefore, when the slide plate 21 moves left and right, the insulating support 131 moves relative to the clearance groove 2101, as... Figure 3 As shown, a conductor 132 is connected to the fixed electrode 13. A conductive block is integrally connected to the lower end of the fixed electrode 13. The upper end of the conductor 132 is inserted into the conductive block. A clamping screw is screwed onto the conductive block. The end of the clamping screw contacts one side of the upper end of the conductor 132, thereby forming a reliable conductive connection. Figure 2 As shown, the lower part of conductor 132 passes through the bottom plate 11 of the tank, and a corresponding sealing ring is provided between the lower part of conductor 132 and the bottom plate 11 of the tank. Figure 1 and Figure 5 As shown, a support column 101 is installed on the bottom plate 11 of the trough, and a support plate 3 is installed on the upper end of the support column 101.

[0031] Furthermore, such as Figure 5 As shown, a groove 31 is formed on the support plate 3, and a hole 311 for the downward insertion of the magnetron cathode assembly 99 is formed in the groove 31. Specifically, the groove 31 extends through the support plate 3 in the left-right direction, and the grooves 31 are arranged in the front-back direction. The bottom of the groove 31 forms holes 311 at equal intervals in the left-right direction. Figure 1 and Figure 2 As shown, when the magnetron cathode assembly 99 is placed on the tray 3, the lower part of the magnetron cathode assembly 99 extends into the lower side of the hole 311. There is a large gap between the hole 311 and the side tube 993, so the magnetron cathode assembly 99 will not touch the edge of the hole 311 during the downward movement. When the magnetron cathode assembly 99 is placed in the downward position, specifically, the front and rear ends of the flange portion 9931 of the side tube 993 of the magnetron cathode assembly 99 are respectively attached to the upper side of the edge of the groove 31. Thus, the gripper of the robot can extend into the groove 31, so that the gripper of the robot can easily and firmly grip the side tube 993. For example, the gripper can form a latch, and the horizontal movement of the latch can lock the edge of the flange portion 9931. Thus, when the gripper moves upward, the magnetron cathode assembly 99 can be picked up relatively stably.

[0032] Furthermore, such as Figure 5 As shown, the front side of the tank shell 1 is provided with a vent 102, and the upper front end of the support plate 3 is equipped with a uniform air distribution mesh plate 32. That is to say, the uniform air distribution mesh plate 32 has an array of through holes, such as... Figure 9 As shown, the position of the uniform air distribution mesh plate 32 corresponds to the air vent 102. Specifically, the upper part of the air vent 102 is higher than the support plate 3. Therefore, the gas on the upper side of the support plate 3 flows to the air vent 102, or the gas output from the air vent 102 flows to the upper side of the support plate 3. The gas will pass through the uniform air distribution mesh plate 32, as shown. Figure 1As shown, there are two vents 102. One vent 102 is connected to the exhaust pipe 8, and the other vent 102 is connected to the inlet pipe 9. When carbonized gas is introduced into the inner cavity of the tank shell 1 through the inlet pipe 9, the carbonized gas is obstructed by the uniform airflow mesh plate 32, thereby preventing the carbonized gas from flowing only to the filament 991 directly opposite the vent 102.

[0033] Furthermore, such as Figure 2 and Figure 7 As shown, a connecting plate 51 is mounted on the left end of the piston rod of the clamping cylinder 4 via corresponding screws. Two push-pull rods 5 are mounted on the connecting plate 51, one in front and one behind. Specifically, the left end of the push-pull rod 5 is fixed to the connecting plate 51 via corresponding screws. The push-pull rod 5 is slidably connected to the frame 7 via a linear bearing. The slotted housing 1 includes a left side plate 12, through which the push-pull rod 5 passes. The right end of the push-pull rod 5 is engaged with a sliding plate 21. Specifically, as shown... Figure 6 As shown, a locking block 221 is installed on the slide plate 21. A locking slot is formed at the upper end of the locking block 221, and an annular groove 501 is formed at the right end of the push-pull rod 5. The locking slot of the locking block 221 is adapted to engage with the annular groove 501, as shown. Figure 7 As shown, the clamping cylinder 4 is arranged between the two push-pull rods 5, so that the front part of the slide plate 21 can be subjected to the force of the push-pull rod 5 located in the forward position, and the rear part of the slide plate 21 can be subjected to the force of the push-pull rod 5 located in the rear position, which is beneficial to the force balance of the slide plate 21. Moreover, the push-pull rod 5 is provided so that the piston rod of the clamping cylinder 4 is also located outside the slot shell 1.

[0034] Furthermore, such as Figure 2 As shown, the push-pull rod 5 is fitted with a corrugated sealing tube 6 (it should be noted that only...). Figure 2 The bellows body structure of the bellows sealing pipe 6 is schematically shown. The left end of the bellows sealing pipe 6 is fixed to the push-pull rod 5. Specifically, the left end of the bellows sealing pipe 6 has a collar, which is fixed to the push-pull rod 5 by a set screw. A corresponding sealing ring is provided between the collar and the outer wall of the push-pull rod 5. The right end of the bellows sealing pipe 6 is installed on the left side plate 12. Specifically, the right end of the bellows sealing pipe 6 has a flange, which is installed against the left side of the left side plate 12. A sealing ring is provided on the right end of the flange. Thus, when the push-pull rod 5 moves axially left and right, the bellows body of the bellows sealing pipe 6 expands and contracts, preventing carbonized gas from leaking through the hole in the left side plate 12 that allows it to pass through the push-pull rod 5. The bellows body of the bellows sealing pipe 6 can be made of stainless steel, and the bellows body of the bellows sealing pipe 6 can be welded to the flange and collar.

[0035] Furthermore, such as Figure 1 As shown, the carbonization tank of this utility model also includes a frame 7, such as... Figure 7As shown, the frame 7 is screwed with a first stroke adjusting screw 71 and a second stroke adjusting screw 72. The connecting plate 51 is located between the first stroke adjusting screw 71 and the second stroke adjusting screw 72. For example, the second stroke adjusting screw 72 is located on the right side of the connecting plate 51, that is, the frame 7 is located on the left outside of the slot shell 1. The axes of the first stroke adjusting screw 71 and the second stroke adjusting screw 72 are both along the left and right direction. Therefore, the connecting plate 51 is restricted to move between the right end face of the first stroke adjusting screw 71 and the left end face of the second stroke adjusting screw 72. When the first stroke adjusting screw 71 is rotated and moved to the left, the slide plate 21 can move to the left. With a greater range of motion, when the clamp 22 presses the input terminal 992 against the right side of the corresponding fixed electrode 13, the buffer spring 222 generates greater elastic compression deformation. As a result, the clamping force of the clamp 22 on the input terminal 992 is greater, which also enables some fixed electrodes 13 with large installation position errors (such as those that are significantly to the left) to reliably hold the input terminal 992, which is beneficial for forming reliable conductive contact. However, if the clamping force on the input terminal 992 is too great, the clamp 22 and the fixed electrode 13 will easily dent and deform (after long-term use). Therefore, the clamping force on the input terminal 992 can be easily adjusted by adjusting the first stroke adjusting screw 71.

[0036] Furthermore, such as Figure 5 As shown, observation windows 103 are provided on the front and rear sides of the tank shell 1. Specifically, observation holes are formed on the front and rear sides of the tank shell 1, and glass plates are provided on the outer side of the observation holes. A cover is placed on the glass plate, and the outer periphery of the cover is connected to the tank shell 1 by corresponding screws. Thus, during the operation of the carbonization tank, the operator can observe the internal condition of the tank shell 1 through the observation windows 103.

[0037] Furthermore, such as Figure 5 As shown, the upper end of the slot shell 1 has a circumferentially arranged groove 104, meaning that the opening of the slot shell 1 is located within the range of the groove 104. Figure 1 As shown, a sealing strip 105 is provided in the groove 2 104. In other words, the sealing strip 105 is arranged around the entire circumference (it should be noted that...). Figure 1 (Only a portion of the sealing strip 105 is shown schematically.) Therefore, when the aforementioned groove cover is placed on the groove shell 1, the sealing strip 105 contacts the underside of the groove cover, achieving a better sealing effect.

Claims

1. A magnetron cathode carbonization tank, comprising a tank shell (1), characterized in that: The tank (1) is provided with a clamping assembly (2) and a fixed electrode (13) for abutting one side of the input terminal (992) of the magnetron cathode assembly (99). The clamping assembly (2) includes a sliding plate (21) and a clamp (22) for clamping the other side of the input terminal (992) of the magnetron cathode assembly (99). The clamp (22) is provided on the sliding plate (21). The sliding plate (21) is slidably connected to the tank (1). The outside of the tank (1) is provided with a clamping cylinder (4). The clamping cylinder (4) drives the sliding plate (21) to slide left and right. The tank (1) is provided with a support plate (3) for supporting the side tube (993) of the magnetron cathode assembly (99). The support plate (3) is located above the sliding plate (21).

2. The magnetron cathode carbonization tank according to claim 1, characterized in that: The clamp assembly (2) includes a support (221) which is mounted on the slide plate (21). The clamp (22) is slidably connected to the support (221) from left to right. A buffer spring (222) is provided on the support (221), and one end of the buffer spring (222) is connected to the corresponding clamp (22).

3. The magnetron cathode carbonization tank according to claim 1, characterized in that: The tank shell (1) includes a tank bottom plate (11), an insulating support base (131) is installed on the tank bottom plate (11), the fixed electrode (13) is installed on the insulating support base (131), and an avoidance groove (2101) is formed on the sliding plate (21), and the insulating support base (131) is located in the avoidance groove (2101).

4. The magnetron cathode carbonization tank according to claim 1, characterized in that: A groove (31) is formed on the tray (3), and a hole (311) is formed in the groove (31) for the downward insertion of the magnetron cathode assembly (99).

5. The magnetron cathode carbonization tank according to claim 1, characterized in that: The front side of the tank shell (1) is provided with an air vent (102), and the upper front side of the support plate (3) is equipped with a uniform air mesh plate (32), the position of which corresponds to the air vent (102).

6. The magnetron cathode carbonization tank according to claim 2, characterized in that: The piston rod of the clamping cylinder (4) is equipped with a connecting plate (51), and the connecting plate (51) is equipped with two push-pull rods (5) in total. The slot shell (1) includes a left side plate (12), the push-pull rod (5) passes through the left side plate (12), and the right end of the push-pull rod (5) is engaged with the slide plate (21). The clamping cylinder (4) is arranged between the two push-pull rods (5).

7. The magnetron cathode carbonization tank according to claim 6, characterized in that: The push-pull rod (5) is fitted with a corrugated sealing tube (6). The left end of the corrugated sealing tube (6) is fixed to the push-pull rod (5), and the right end of the corrugated sealing tube (6) is installed on the left side plate (12).

8. The magnetron cathode carbonization tank according to claim 6, characterized in that: It also includes a frame (7), which is screwed with a first stroke adjusting screw (71) and a second stroke adjusting screw (72), and the connecting plate (51) is disposed between the first stroke adjusting screw (71) and the second stroke adjusting screw (72).

9. The magnetron cathode carbonization tank according to claim 1, characterized in that: The tank shell (1) is provided with observation windows (103) on the front and rear sides respectively.

10. The magnetron cathode carbonization tank according to claim 1, characterized in that: The upper end of the groove shell (1) is formed with a circumferentially arranged groove II (104), and a sealing strip (105) is provided in the groove II (104).

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