Measuring device based on atomic force microscope

Abstract

The utility model relates to the technical field of application of atomic force microscopes, and discloses a measuring device based on an atomic force microscope, which comprises a piezoelectric detection table, an atomic force microscope measuring assembly is mounted at the rear end of the top of the piezoelectric detection table, and a laser monitor is mounted at the bottom end of the atomic force microscope measuring assembly. A controller is arranged on the right side of the atomic force microscope measuring assembly, a fixed sliding rail is fixedly connected to the top end of the piezoelectric detection table, a first lead screw is movably connected to the interior of the fixed sliding rail, and a lead screw sliding sleeve is installed outside the first lead screw. According to the measuring device based on the atomic force microscope, a laser monitor on the atomic force microscope measuring assembly keeps stable, a first motor can drive a first lead screw to rotate to drive an object to move left and right for adjustment, a second motor can drive a second lead screw to rotate to drive the object to move up and down for adjustment, and object movement can reduce measuring errors. The problem that flexible and stable measurement is inconvenient is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to atomic force microscope application technical field, concretely is a kind of measuring device based on atomic force microscope. BACKGROUND

[0002] Atomic force microscope can be used to study the analysis instrument of solid material surface structure including insulator, the extremely weak interatomic interaction force between the detection sample surface and a micro force sensitive element is detected to study the surface structure and nature of matter.

[0003] Atomic force microscope measuring equipment needs to adjust the measuring assembly on atomic force microscope when using, to realize flexible measurement to various specifications of goods, but the measurement mode is prone to unstable measurement and increase measurement error, part atomic force microscope measuring equipment still has the problem of inconvenient adjustment probe.

[0004] It is urgent to provide a measuring device based on atomic force microscope to solve the technical defects in the above technical problems. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of measuring device based on atomic force microscope to solve the problem of inconvenient flexible and stable measurement in the above background technology.

[0006] To achieve the above object, the utility model provides the following technical scheme: a kind of measuring device based on atomic force microscope, including piezoelectric detection table, the rear end of the top of piezoelectric detection table is installed with atomic force microscope measuring assembly, the bottom of atomic force microscope measuring assembly is installed with laser monitor, the right side of atomic force microscope measuring assembly is provided with controller, the top of piezoelectric detection table is fixedly connected with fixed slide rail, the inside of fixed slide rail is movably connected with first screw rod, the outside of first screw rod is installed with screw rod sliding sleeve, the top of screw rod sliding sleeve is fixedly connected with object table, the left side of object table is installed with movable shaft, the top of movable shaft is installed with probe by connecting arm, the right side in the inside of fixed slide rail is installed with first motor, the bottom in the inside of piezoelectric detection table is installed with second motor, the output of second motor is installed with second screw rod, the outside of second screw rod is installed with driving sleeve, the both sides of driving sleeve are fixedly connected with connecting rod, the end of connecting rod is provided with support rod, support rod is installed at the both sides of the bottom of fixed slide rail.

[0007] For the further technical scheme of the utility model, the output of first motor is connected with first screw rod.

[0008] For the further technical scheme of the utility model, the top of both sides of piezoelectric detection table is provided with reserved hole, the top of support rod is penetrated through reserved hole.

[0009] For the further technical scheme of the utility model, the controller is connected with the atomic force microscope measuring assembly, the first motor, the second motor and the micro motor respectively.

[0010] For the further technical scheme of the utility model, the laser monitor comprises a laser and a monitor, and the object table is arranged below the laser monitor.

[0011] For the further technical scheme of the utility model, the front end of the movable shaft is provided with a micro motor, and the probe is arranged above the object table.

[0012] For the further technical scheme of the utility model, the end of the connecting rod is fixedly connected with a mounting flange, mounting bolts are arranged on the mounting flange, and a mounting hole is arranged in the inside of the supporting rod.

[0013] For the further technical scheme of the utility model, the mounting flange is attached to the supporting rod, and the mounting bolts are embedded in the mounting hole in the supporting rod.

[0014] Compared with the prior art, the measurement device based on the atomic force microscope has the advantages that the device not only realizes the functions of flexible and stable measurement, flexible feeding and discharging and convenient disassembly and maintenance.

[0015] (1) The atomic force microscope measuring assembly can measure the object by being provided with the fixed sliding rail, the first screw rod, the object table, the screw rod sliding sleeve, the first motor, the second screw rod and the second motor. During the measurement, the laser monitor on the atomic force microscope measuring assembly remains stable and immobile, the first motor can drive the first screw rod to rotate and move the object left and right for adjustment, the second motor can drive the second screw rod to rotate and move the object up and down for adjustment, and the movement of the object can reduce the measurement error. The structure realizes the functions of flexible and stable measurement.

[0016] (2) The object to be measured is placed on the object table by being provided with the object table, the probe, the movable shaft and the micro motor. The probe can limit the object to improve the stability of the measurement. When feeding, the micro motor drives the movable shaft to rotate, the movable shaft rotates by a certain angle to lift the probe, the staff can conveniently place the object on the object table, the micro motor drives the movable shaft to reverse after stable placement, and the probe can be pressed on the object to limit the object. The structure realizes the function of flexible feeding.

[0017] (3) through the setting has support rod, connecting rod, mounting flange and mounting bolt, fixed slide rail is installed on piezoelectric detection platform and uses, fixed slide rail and object table can be detached from the equipment and taken down maintenance, when maintenance, the mounting bolt on the mounting flange is screwed down and makes support rod and connecting rod separate, then again lift fixed slide rail upwards and make support rod completely move out from piezoelectric detection platform inside, which realizes the function of easy disassembly and maintenance. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the front view sectional structure schematic diagram of the utility model;

[0019] Figure 2 It is the front view structure schematic diagram of the utility model's object table;

[0020] Figure 3 It is the Figure 1 It is the enlarged structure schematic diagram of A place in the middle;

[0021] Figure 4 It is the second screw rod front view sectional structure schematic diagram of the utility model.

[0022] In the drawing: 1, piezoelectric detection platform; 2, support rod; 3, connecting rod; 4, drive sleeve; 5, fixed slide rail; 6, first screw rod; 7, object table; 8, probe; 9, atomic force microscope measurement assembly; 10, controller; 11, screw rod sliding sleeve; 12, laser monitor; 13, first motor; 14, second screw rod; 15, second motor; 16, reserved hole; 17, movable shaft; 18, micro motor; 19, mounting flange; 20, mounting bolt. DETAILED DESCRIPTION

[0023] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0024] Embodiment 1: please refer to Figures 1-4The utility model provides an atomic force microscope based measuring device, including piezoelectric detection platform 1, the rear end of piezoelectric detection platform 1 top is equipped with atomic force microscope measuring assembly 9, the bottom of atomic force microscope measuring assembly 9 is equipped with laser monitor 12, the right side of atomic force microscope measuring assembly 9 is provided with controller 10, the top of piezoelectric detection platform 1 is fixedly connected with fixed slide rail 5, the inside movable joint of fixed slide rail 5 is equipped with first screw rod 6, the outside of first screw rod 6 is equipped with screw rod sliding sleeve 11, the top of screw rod sliding sleeve 11 is fixedly connected with objective table 7, the left side of objective table 7 is equipped with movable shaft 17, the top of movable shaft 17 is equipped with probe 8 through connecting arm, the right side in the inside of fixed slide rail 5 is equipped with first motor 13, the bottom in the inside of piezoelectric detection platform 1 is equipped with second motor 15, the output of second motor 15 is equipped with second screw rod 14, the outside of second screw rod 14 is equipped with drive sleeve 4, the both sides of drive sleeve 4 are fixedly connected with connecting rod 3, the end of connecting rod 3 is provided with support rod 2, and support rod 2 is installed at the both sides of the bottom of fixed slide rail 5,

[0025] The output of first motor 13 is connected with first screw rod 6, the both sides of the top of piezoelectric detection platform 1 are equipped with reserved hole 16, the top of support rod 2 penetrates reserved hole 16, controller 10 is connected with atomic force microscope measuring assembly 9, first motor 13, second motor 15 and micro motor 18 respectively,

[0026] Specifically, as shown in Figure 1 And Figure 3 Atomic force microscope measuring assembly 9 can measure the article, and in the process of measurement, laser monitor 12 on atomic force microscope measuring assembly 9 remains stable and does not move, first motor 13 can drive first screw rod 6 to rotate and move the article left and right for adjustment, second motor 15 can drive second screw rod 14 to rotate and move the article up and down for adjustment, the article moves to reduce the measurement error, and the principle that controller 10 can control the motor and measuring equipment is prior art, so it will not be repeated here.

[0027] Laser monitor 12 includes a laser and a monitor, objective table 7 is arranged below laser monitor 12, micro motor 18 is installed at the front end of movable shaft 17, and probe 8 is arranged above objective table 7;

[0028] Specifically, as shown in Figure 1 And Figure 2 When feeding, micro motor 18 drives movable shaft 17 to rotate, movable shaft 17 rotates by a certain angle to lift probe 8, so that the staff can place the article on objective table 7, after stable placement, micro motor 18 drives movable shaft 17 to reverse to press probe 8 on the article to limit, and the staff does not need to adjust probe 8 during the placement process.

[0029] The end of the connecting rod 3 is fixedly connected with a mounting flange 19, the mounting flange 19 is provided with mounting bolts 20, the inside of the supporting rod 2 is provided with mounting holes, the mounting flange 19 is attached to the supporting rod 2, and the mounting bolts 20 are embedded in the mounting holes in the supporting rod 2;

[0030] Specifically, as shown in Figure 1 and Figure 4 shown, the fixed slide rail 5 and the object table 7 can be detached from the equipment for maintenance, the mounting bolts 20 on the mounting flange 19 are unscrewed to separate the supporting rod 2 from the connecting rod 3, and then the fixed slide rail 5 is lifted upwards to completely remove the supporting rod 2 from the inside of the piezoelectric detection table 1.

[0031] Working principle: when the utility model is in use, the object to be measured is placed on the object table 7, the probe 8 can limit the object to improve the stability of measurement, when discharging, the micro motor 18 drives the movable shaft 17 to rotate, the movable shaft 17 rotates by a certain angle to lift the probe 8, the staff can conveniently place the object on the object table 7, after stable placement, the micro motor 18 drives the movable shaft 17 to reverse to press the probe 8 on the object to limit, the atomic force microscope measurement assembly 9 can measure the object, in the process of measurement, the laser monitor 12 on the atomic force microscope measurement assembly 9 remains stable and immobile, the first motor 13 can drive the first lead screw 6 to rotate to move and adjust the object left and right, the second motor 15 can drive the second lead screw 14 to rotate to move and adjust the object up and down, the movement of the object can reduce the measurement error, the fixed slide rail 5 and the object table 7 can be detached from the equipment for maintenance, the mounting bolts 20 on the mounting flange 19 are unscrewed to separate the supporting rod 2 from the connecting rod 3, and then the fixed slide rail 5 is lifted upwards to completely remove the supporting rod 2 from the inside of the piezoelectric detection table 1, the structure realizes the functions of convenient stable measurement and overhaul and maintenance.

[0032] It is apparent for those skilled in the art that the utility model is not limited to the details of the above-mentioned exemplary embodiments, and can be realized in other specific forms without departing from the spirit or essential characteristics of the utility model. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the involved claims.

Claims

1. A measuring device based on an atomic force microscope, comprising a piezoelectric detection stage (1), characterized in that: An atomic force microscope (AFM) measuring component (9) is installed at the rear end of the top of the piezoelectric testing stage (1). A laser monitor (12) is installed at the bottom of the AFM measuring component (9). A controller (10) is provided on the right side of the AFM measuring component (9). A fixed slide rail (5) is fixedly connected to the top of the piezoelectric testing stage (1). A first lead screw (6) is movably connected inside the fixed slide rail (5). A lead screw sleeve (11) is installed outside the first lead screw (6). A stage (7) is fixedly connected to the top of the lead screw sleeve (11). A laser monitor (12) is installed on the left side of the stage (7). There is a movable shaft (17), and a probe (8) is installed at the top of the movable shaft (17) via a connecting arm. A first motor (13) is installed on the right side inside the fixed slide rail (5). A second motor (15) is installed at the bottom inside the piezoelectric testing platform (1). A second lead screw (14) is installed at the output end of the second motor (15). A drive sleeve (4) is installed on the outside of the second lead screw (14). A connecting rod (3) is fixedly connected to both sides of the drive sleeve (4). A support rod (2) is provided at the end of the connecting rod (3). The support rod (2) is installed on both sides of the bottom end of the fixed slide rail (5).

2. The measuring device based on an atomic force microscope according to claim 1, characterized in that: The output end of the first motor (13) is connected to the first lead screw (6).

3. The measuring device based on an atomic force microscope according to claim 1, characterized in that: The piezoelectric testing platform (1) has reserved holes (16) on both sides of its top, and the top of the support rod (2) passes through the reserved holes (16).

4. The measuring device based on an atomic force microscope according to claim 1, characterized in that: The controller (10) is connected to the atomic force microscope measurement component (9), the first motor (13), the second motor (15) and the micro motor (18), respectively.

5. The measuring device based on an atomic force microscope according to claim 1, characterized in that: The laser monitor (12) includes a laser and a monitor, and the stage (7) is located below the laser monitor (12).

6. The measuring device based on an atomic force microscope according to claim 1, characterized in that: A micro motor (18) is installed at the front end of the movable shaft (17), and the probe (8) is positioned above the stage (7).

7. The measuring device based on an atomic force microscope according to claim 1, characterized in that: The end of the connecting rod (3) is fixedly connected to a mounting flange (19), and the mounting flange (19) is provided with mounting bolts (20). The support rod (2) is provided with mounting holes inside.

8. The measuring device based on an atomic force microscope according to claim 7, characterized in that: The mounting flange (19) fits against the support rod (2), and the mounting bolt (20) is embedded in the mounting hole of the support rod (2).

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