Gantry type dual-drive control device

Abstract

The utility model discloses a gantry type dual-drive control device, which comprises a controller used for outputting a control instruction; the pulse output source is connected with the controller and used for generating consistent pulse signals; the first servo driver and the second servo driver respectively receive the pulse signals from the pulse output source; the first servo motor and the second servo motor respond to the pulse signal for driving; the first servo motor encoder and the second servo motor encoder feed back the speed information of the first servo motor and the speed information of the second servo motor to the corresponding servo drivers respectively; a first absolute encoder and a second absolute encoder; and the first pulse feedback and the second pulse feedback are used for receiving feedback signals of the servo driver analog encoder to form a control closed loop. Under the condition that the same control effect is achieved, compared with a cross coupling control method, the method is simpler in model and lower in cost, synchronous control over a complex gantry structure can be achieved, and the precision and safety of gantry equipment are guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to industrial equipment manufacturing field especially, relate to a double -drive control device of portal type. BACKGROUND

[0002] The double -drive synchronous control technology of portal is widely used in the precision manufacturing field such as semiconductor, wafer detection and large machine tool. At present, the double -axis portal drive method mainly has three kinds: master-slave control method, the trajectory instruction of direct execution input is followed to the main shaft, and the position feedback signal is used as the input trajectory instruction of the slave shaft motor, that is, the slave shaft motor follows the main shaft motor movement. Master parallel control method, two motors are combined into an axle, two motors receive the same trajectory instruction, each motor has its own independent servo loop, and the independent loop is used to make the respective motion trajectory as far as possible to adhere to the command trajectory. Cross-coupled control method, on the basis of master parallel control method, through the compensation of double -axis motor position error controller, the motor position error is controlled within a certain threshold, and the disturbance caused by the load position change on the portal can be further compensated by the model.

[0003] In the control method of the current double -axis drive, the cross-coupled control method is better than the master parallel control method, and the master parallel control method is better than the master-slave control method. The cross-coupled control method considers the coupling between the double axes, and can keep high precision and motion state under high speed and high acceleration state, however, an additional controller is needed to control the error of the two axes and compensate into the next controller, the model is complex, and the loop gain is difficult to adjust. The master parallel control method only needs to adjust the single loop gain, and the other road is reused, the model is simple and easy to adjust, however, the mutual influence between the two axes is ignored.

[0004] In the control method of the current double -axis drive, when facing simple portal structure, the control demand can be basically met, but when facing multiple transmission, load pressure mutation in the motion process between the control system and the actual running direction of the portal, the above-mentioned method still has certain limitations. Master-slave control method: the slave motor is passive response, and load disturbance and mechanical parameter difference are easy to cause synchronization error accumulation. Master parallel control method: in the case of fixed load, the operation can meet the requirements after debugging, but when facing load disturbance, the operation is unstable. Cross-coupled control method: the model load loop gain is difficult to adjust, and the use difficulty is increased.

[0005] In addition, in the complex application system, due to the differences of the structure (parallelism and straightness) and the driving part (hardware and transmission structure) of the double axes, the existing technology is difficult to keep the portal structure perpendicular to the guide rail in the motion process. UTILITY MODEL CONTENTS

[0006] The utility model discloses a double -drive control device of portal type, thereby solve the foregoing problems in prior art.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0008] A gantry-type dual-drive control device, comprising:

[0009] The controller is used to output control commands;

[0010] A pulse output source, connected to the controller, is used to generate a consistent pulse signal;

[0011] The first servo driver and the second servo driver respectively receive pulse signals from the pulse output source;

[0012] The first servo motor and the second servo motor are connected to the first servo driver and the second servo driver, respectively, and are driven in response to pulse signals.

[0013] The first servo motor encoder and the second servo motor encoder respectively feed back the speed information of the first servo motor and the second servo motor to the corresponding servo driver;

[0014] The first absolute encoder and the second absolute encoder are respectively installed on both sides of the gantry structure to feed back absolute position information to the corresponding servo drive;

[0015] The first pulse feedback and the second pulse feedback are used to receive the feedback signal from the servo drive's analog encoder and feed it back to the controller to form a control closed loop.

[0016] Preferably, the controller provides consistent pulse signals to the first servo driver and the second servo driver through the same pulse output source, ensuring that the drive commands received by the two axes are synchronized.

[0017] Preferably, the first servo driver and the second servo driver independently control the first servo motor and the second servo motor, respectively, to ensure the independence of each servo motor when receiving control commands.

[0018] Preferably, it also includes a first servo drive analog encoder and a second servo drive analog encoder, used to feed back the internal position signal to the controller to achieve real-time monitoring of the dual-axis position deviation.

[0019] Preferably, the controller adjusts the parameters of the first servo driver and the second servo driver to ensure that the first servo motor and the second servo motor can reach a stable state when running independently, and that the operating accuracy meets the requirements.

[0020] The beneficial effects of this utility model are as follows: This utility model discloses a gantry-type dual-drive control device, including a controller for outputting control commands; a pulse output source connected to the controller for generating consistent pulse signals; a first servo driver and a second servo driver, respectively receiving pulse signals from the pulse output source; a first servo motor and a second servo motor, respectively connected to the first servo driver and the second servo driver, driving in response to the pulse signals; a first servo motor encoder and a second servo motor encoder, respectively feeding back speed information of the first servo motor and the second servo motor to their corresponding servo drivers; a first absolute encoder and a second absolute encoder, respectively installed on both sides of the gantry structure, for feeding back absolute position information to their corresponding servo drivers; and a first pulse feedback and a second pulse feedback, for receiving feedback signals from the servo driver's analog encoder and feeding them back to the controller, forming a control closed loop. Under the condition of achieving the same control effect, this utility model has a simpler model and lower cost compared to the cross-coupling control method. It can achieve synchronous control of complex gantry structures, ensuring the accuracy and safety of gantry equipment; the dual feedback system can control the gantry structure to maintain the accuracy and stability of equipment operation even at high speeds; it improves dynamic performance, with dual motors sharing the load, which can output greater driving force and improve equipment operating efficiency. Attached Figure Description

[0021] Figure 1 This is a connection diagram of a gantry-type dual-drive control device according to this utility model;

[0022] Figure 2 This is the debugging process for the gantry dual-drive control system of this utility model;

[0023] Figure 3 This is a schematic diagram of the real-time position difference fluctuation of the two axes during a period of motion according to this utility model.

[0024] Figure 4 This is a schematic diagram of the operation process of the gantry dual-drive control system of this utility model;

[0025] Figure 5 This is a schematic diagram of the functions of each component of the gantry dual-drive control system of this utility model. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the scope of the present utility model.

[0027] Reference Figures 1 to 5 The gantry-type dual-drive control device shown includes:

[0028] The controller, used to output control commands, is the core of the entire dual-drive control system, responsible for generating and sending control signals. It is directly connected to the pulse output source to control the generation and transmission of pulse signals.

[0029] A pulse output source, connected to the controller, generates consistent pulse signals to ensure synchronization of commands received by the two servo drives. The pulse output source receives commands from the controller and generates corresponding pulse signals. These pulse signals act simultaneously on both the first and second servo drives.

[0030] The first servo driver and the second servo driver respectively receive pulse signals from the pulse output source;

[0031] The first servo motor and the second servo motor are connected to the first servo driver and the second servo driver, respectively, and are driven in response to pulse signals; the first servo driver and the second servo driver have built-in anti-disturbance algorithms, including:

[0032] Friction torque compensation: The compensation amount is dynamically adjusted based on an exponential function of the motor speed;

[0033] Inertial feedforward compensation: The feedforward coefficient is proportional to the mass of the gantry moving load, and ranges from 0.8 to 1.5.

[0034] The ratio of the rotor inertia of the servo motor to the inertia of the gantry moving parts is 1:3 to 1:5, and the rated speed of the motor is ≤3000rpm. The reduction ratio of the compatible reducer is 5:1 to 10:1.

[0035] The controller and servo driver communicate using the CANopen protocol, with a synchronization period of ≤500μs and a redundancy verification mechanism.

[0036] It should be noted that these two formulas play a crucial role in achieving the synchronization and accuracy of the gantry-type dual-drive control device. Through dynamic synchronization compensation and temperature drift compensation, the operating efficiency and safety of the gantry structure can be effectively improved.

[0037] The first servo motor encoder and the second servo motor encoder respectively feed back the speed information of the first servo motor and the second servo motor to the corresponding servo driver;

[0038] First servo motor encoder:

[0039] Function: Feeds back the speed information of the first servo motor to the first servo driver to form a speed closed-loop control.

[0040] Second servo motor encoder:

[0041] Function: Feeds back the speed information of the second servo motor to the second servo driver, thus forming a speed closed-loop control.

[0042] The first absolute encoder and the second absolute encoder are respectively installed on both sides of the gantry structure to feed back absolute position information to the corresponding servo drive;

[0043] First absolute encoder:

[0044] Installation location: Installed on one side of the gantry structure.

[0045] Function: Feeds back the absolute position information of this side to the first servo driver to form a position closed-loop control and improve positioning accuracy.

[0046] Second absolute encoder:

[0047] Installation location: Installed on the other side of the gantry structure, symmetrical to the first absolute encoder.

[0048] Function: Feeds back the absolute position information of this side to the second servo drive, thus forming a position closed-loop control.

[0049] The first pulse feedback and the second pulse feedback are used to receive the feedback signal from the servo drive's analog encoder and feed it back to the controller to form a control closed loop.

[0050] In this embodiment, the first pulse feedback has the following function: receiving the feedback signal from the analog encoder of the first servo drive and feeding the signal back to the controller. Its purpose is to monitor the internal position signal of the first servo drive in real time, helping the controller adjust the control strategy.

[0051] Second pulse feedback: Function: Receives the feedback signal from the analog encoder of the second servo drive and feeds it back to the controller. Role: Similar to the first pulse feedback, it is used to monitor the internal position signal of the second servo drive in real time, ensuring the accuracy of dual-axis synchronous motion.

[0052] In this embodiment, the controller command pulse output is applied to the command pulse receiving terminals of the first servo driver and the second servo driver respectively, thereby ensuring that the pulse signals received by the two drivers are completely consistent.

[0053] Preferably, the controller provides consistent pulse signals to the first and second servo drives through the same pulse output source, ensuring synchronization of the drive commands received by both axes. The controller provides consistent pulse signals to both servo drives through the same pulse output source, ensuring complete synchronization of the drive commands received by both axes.

[0054] Preferably, the first servo driver and the second servo driver independently control the first servo motor and the second servo motor, respectively, ensuring the independence of each servo motor when receiving control commands. The two servo drivers independently control their respective servo motors, ensuring the independence and response speed of each motor when receiving control commands.

[0055] Preferably, it also includes a first servo drive analog encoder and a second servo drive analog encoder, used to feed back the internal position signal to the controller to achieve real-time monitoring of the dual-axis position deviation. Dual-axis position deviation monitoring: By feeding back the internal position signal to the controller in real time through the first servo drive analog encoder and the second servo drive analog encoder, real-time monitoring and adjustment of the dual-axis position deviation can be achieved, further improving synchronization accuracy and stability.

[0056] To solve the above-mentioned technical problems, this utility model also provides a gantry-type dual-drive control method, including the following steps:

[0057] S1. Control the first servo system independently under load and debug it to a stable operating state;

[0058] S2. Independently control the second servo system to run under load and debug it to a stable operating state;

[0059] S3. Compare the position curves of the two servo systems and adjust the PID parameters to make the position curves of the two axes basically the same. When the position curves of the two axes are basically the same, the risk of excessive position deviation and structural damage during the synchronous motion of the two axes can be minimized.

[0060] S4. Use the master parallel control method to drive the dual axes, observe and adjust the position error until it meets the allowable range of the equipment.

[0061] S5 determines whether the position curves during dual-axis operation match, and whether the position deviation at any given time exceeds the equipment's allowable deviation range. Assume the spindle position is H1, the slave axis position is H2, and the allowable deviation is All Low Difference.

[0062] It is necessary to satisfy |H1-H2|>All LowDifference;

[0063] If not, the gantry dual-drive control system has been successfully debugged.

[0064] If so, it is necessary to adjust the PID parameters of one of the servo drive systems and fine-tune the position curve during operation until the dual-axis deviation is within the allowable deviation range of the equipment during operation.

[0065] Preferably, in step S3, the PID parameters (kp, ki, kd, kvff, kaff) are adjusted so that the position curves of the two axes are consistent when the motion distance, speed, acceleration or deceleration parameters are consistent.

[0066] Preferably, in step S4, a dual closed-loop feedback system is adopted, including an inner loop velocity closed loop and an outer loop position closed loop, to ensure the stability and position accuracy of the gantry structure during operation.

[0067] In this embodiment, the gantry dual-drive control system operates as follows: Figure 4 As shown

[0068] Step 1: Before running, obtain the absolute position values ​​of the two axes and calculate the position deviation of the two axes. If the position difference of the two axes is not within the allowable error range, control the operation of the single axis to compensate for the deviation value until the requirements are met.

[0069] Step 2: Control the dual-axis synchronous motion and set the synchronous motion parameters;

[0070] Step 3: Determine whether the absolute value of the dual-axis position deviation is greater than the allowable position deviation of the dual axes;

[0071] If so, stop the dual-axis operation and control the single-axis compensation deviation value; then re-execute the dual-axis synchronous motion.

[0072] If not, the two axes continue to run without interference until the operation ends;

[0073] A third aspect of this utility model provides a control system for a dual-drive gantry system.

[0074] like Figure 5 As shown, a dual closed-loop feedback system.

[0075] Inner loop (velocity closed loop)

[0076] Feedback element: The servo motor has a built-in incremental encoder;

[0077] Signal interface: The encoder is connected to the first feedback port of the servo driver via differential signal lines (A+ / A-, B+ / B-, Z+ / Z-).

[0078] Outer ring (location closed loop)

[0079] Feedback element: High-precision absolute encoder, directly mounted at the end of the gantry rail.

[0080] Signal interface: The encoder is connected to the second feedback port of the servo drive via SSI (Synchronous Serial Interface).

[0081] Controller communicates with driver

[0082] Pulse command:

[0083] Analog encoder feedback: The driver feeds back the internal position signal (via the analog encoder interface) to the value controller in real time for dual-axis position deviation monitoring.

[0084] The inner loop velocity ensures dynamic response, while the outer loop position closure guarantees steady-state accuracy. The dual-loop collaboration reduces model complexity.

[0085] To solve the above-mentioned technical problems, this utility model also provides a gantry-type dual-drive control system, comprising:

[0086] The inner loop speed is closed, and the speed signal is fed back to the servo driver in real time through the incremental encoder built into the servo motor;

[0087] The outer loop position is closed, and the position signal is fed back to the servo driver through a high-precision absolute encoder;

[0088] The controller receives internal position signals from the encoder via a driver and monitors the position deviation of the two axes in real time.

[0089] Preferably, the inner loop velocity closed loop ensures dynamic response, and the outer loop position closed loop ensures steady-state accuracy. The two loops work together to reduce model complexity and improve control accuracy.

[0090] Preferably, it also includes a fault diagnosis and early warning module, which is used to monitor the operating status of the gantry structure and its drive system in real time, predict and warn of potential faults, and improve the reliability and safety of the equipment.

[0091] The above embodiments are only used to illustrate the present utility model, and do not limit the present utility model. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, all equivalent technical solutions also fall within the scope of the present utility model. The patent protection scope of the present utility model should be defined by the claims.

[0092] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A gantry-type dual-drive control device, characterized in that, include: The controller is used to output control commands; A pulse output source, connected to the controller, is used to generate a consistent pulse signal; The first servo driver and the second servo driver respectively receive pulse signals from the pulse output source; The first servo motor and the second servo motor are connected to the first servo driver and the second servo driver, respectively, and are driven in response to pulse signals. The first servo motor encoder and the second servo motor encoder respectively feed back the speed information of the first servo motor and the second servo motor to the corresponding servo driver; The first absolute encoder and the second absolute encoder are respectively installed on both sides of the gantry structure to feed back absolute position information to the corresponding servo drive; The first pulse feedback and the second pulse feedback are used to receive the feedback signal from the servo drive's analog encoder and feed it back to the controller to form a control closed loop.

2. The apparatus according to claim 1, characterized in that, The controller provides consistent pulse signals to the first and second servo drivers through the same pulse output source, ensuring that the drive commands received by the two axes are synchronized.

3. The apparatus according to claim 1, characterized in that, The first servo driver and the second servo driver independently control the first servo motor and the second servo motor, respectively, to ensure the independence of each servo motor when receiving control commands.

4. The apparatus according to claim 1, characterized in that, It also includes a first servo drive analog encoder and a second servo drive analog encoder, which are used to feed back the internal position signal to the controller to achieve real-time monitoring of the dual-axis position deviation.

5. The apparatus according to claim 1, characterized in that, The controller adjusts the parameters of the first servo driver and the second servo driver to ensure that the first servo motor and the second servo motor can reach a stable state when running independently, and that the operating accuracy meets the requirements.

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