Gas mixing device

Abstract

The utility model provides a gas mixing device which comprises a mixing tank and a mixing channel, one end of the mixing channel is provided with a pipe joint, one end of the mixing tank is provided with two gas conveying pipes, one end, far away from the pipe joint, of the mixing channel is connected with one end, far away from the gas conveying pipes, of the mixing tank through a contraction pipe, and a supporting shaft is coaxially arranged in the mixing channel. The surface of the supporting shaft is provided with at least one spiral blade, and the surface of the spiral blade is provided with a plurality of vents. When the gas mixing device is used, hydrogen and nitrogen can be preliminarily mixed through the mixing tank, the volume of mixed gas is suddenly increased when the mixed gas enters the contraction pipe and then enters the mixing channel, the gas mixing degree is increased, and the mixed gas can be further mixed in the mixing channel; and hydrogen and nitrogen can be fully mixed when flowing out of the pipe joint.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas mixing technical field, concretely is a gas mixing device. BACKGROUND

[0002] The application of hydrogen in semiconductor welding is mainly due to its unique physical and chemical properties, which play an important role in the welding process. First, hydrogen can be used as a protective gas in the welding process to prevent oxidation in the welding area. When welding semiconductor devices, hydrogen can provide a reducing environment to reduce the occurrence of oxidation reactions, thereby ensuring the welding quality. Second, hydrogen can also be used to clean the welding area. Before welding, using hydrogen can effectively remove impurities and oxides in the welding area to ensure the purity of the welding surface, thereby improving the reliability and stability of the welding. In addition, hydrogen can also play a role in annealing during the welding process. After welding is completed, annealing treatment with hydrogen can help to eliminate stress in the welding area and improve the crystal structure, further improving the welding quality.

[0003] In actual production, hydrogen needs to be mixed with inert gas to dilute the hydrogen as a protective gas. The key step is to mix different gases in a certain proportion to obtain process gas with different concentrations and multiple components to better meet the process performance requirements and ensure the control and optimization of the semiconductor device manufacturing process. The existing hydrogen and nitrogen mixing device mixes hydrogen and nitrogen into a closed chamber during use, such as the hydrogen and nitrogen gas mixing control device disclosed in document No. "CN206295829U", which is described in the specification at

[0029] and

[0030] . Nitrogen is introduced through the nitrogen inlet, and hydrogen is introduced through the hydrogen inlet. In this way, hydrogen and nitrogen can be mixed in the gas container, so that hydrogen and nitrogen are mixed. This mixing method only relies on the flow of hydrogen and nitrogen to mix, and there is no further component to stir the mixed gas in the gas container, which may cause insufficient mixing of hydrogen and nitrogen. Therefore, we propose a gas mixing device. SUMMARY

[0004] The utility model provides a kind of gas mixing device, with the advantage that hydrogen and nitrogen can be intensified to roll, and clean nitrogen is fully mixed, solve the problem proposed in the above background art.

[0005] The utility model discloses a technical scheme is as follows: design a kind of gas mixing device, including mixing tank and mixing channel, and one end of mixing channel is equipped with pipe joint, and one end of mixing tank is equipped with two gas pipes, and the end, away from gas pipe of mixing tank, is connected with the end, away from gas pipe of mixing tank, by contraction pipe, and coaxial support shaft is equipped in mixing channel, and at least one helical blade is equipped on the surface of support shaft, and a plurality of air vents are equipped on the surface of helical blade.

[0006] Preferably, the base is further provided with a support frame on the top surface, a connecting beam is installed in the middle of the support frame, a plurality of stop seats are arranged at intervals on both sides of the connecting beam, and a placing space is formed between every two adjacent stop seats for placing a gas cylinder.

[0007] Preferably, a plurality of connecting pipes are installed on each gas pipe, and the free ends of the connecting pipes are connected with connecting valves, which are detachably installed on the bottle mouths of the gas cylinders.

[0008] Preferably, a clamping plate is arranged on the side surface of each gas cylinder, and the clamping plate is detachably connected with the stop seats at both ends, and the clamping plate presses the gas cylinder in the placing space.

[0009] Preferably, a flow valve is installed on the end of each gas pipe close to the mixing tank, and the flow valve is connected with a controller, which is arranged in a control box, and the surface of the control box is provided with a display and operation buttons connected with the controller.

[0010] Preferably, walking wheels are arranged at the four corners of the base.

[0011] Preferably, a gas pressure sensor is further arranged on each gas pipe, and the gas pressure sensor is connected with the controller.

[0012] Preferably, connecting seats are arranged on the side surfaces of the mixing tank and the mixing channel, and the connecting seats are detachably arranged on the side surface of the support frame.

[0013] Preferably, knobs are movably arranged at both ends of the clamping plate, and the free ends of the knobs are screwedly installed in fixing seats, which are respectively installed on the stop seats.

[0014] Preferably, a valve is arranged on each connecting pipe.

[0015] Compared with the prior art, in use, hydrogen and nitrogen can be preliminarily mixed in the mixing tank, the volume of the mixed gas suddenly increases when entering the contraction pipe and then entering the mixing channel, the degree of gas mixing is increased, and the mixed gas can be further mixed in the mixing channel, so that the hydrogen and oxygen can be fully mixed when flowing out of the pipe joint. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings described below are only some of the embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0017] Figure 1 It is a structural schematic view of one side of the present application.

[0018] Figure 2 It is a structural schematic view of the other side of the present application.

[0019] Figure 3 It is a front view of the present application.

[0020] Figure 4 It is a structural schematic view of the support shaft of the present application Figure 1 .

[0021] Figure 5 It is a structural schematic view of the support shaft of the present application Figure 2 .

[0022] Figure 6 It is a structural schematic view in the mixing channel of the present application.

[0023] In the figure: 1, base; 2, walking wheel; 3, control box; 4, support frame body; 5, connecting pipe; 6, gas pipe; 7, clamping plate; 8, gas cylinder; 9, connecting valve; 10, flow valve; 11, mixing tank; 12, contraction pipe; 13, mixing channel; 14, connecting beam; 15, blocking seat; 16, fixed seat; 17, pipe joint; 18, support shaft; 19, spiral blade; 20, air vent; 21, connecting seat; 22, knob. DETAILED DESCRIPTION

[0024] The technical solutions of the present application will be described clearly and completely below by combining the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0025] Refer to Figures 1 to 6The utility model provides a technical scheme: a gas mixing device, including base 1, the top surface of base 1 is equipped with support frame body 4, the shape of support frame body 4 is specifically the U type structure of opening downward, and it is vertically installed in the top surface middle part of base 1, in order to facilitate the position transfer of base 1, and in the four corners of base 1 are equipped with walking wheel 2, walking wheel 2 is brake universal wheel, and it is convenient for positioning and moving.

[0026] The middle part of support frame body 4 is installed with connecting beam 14, a plurality of stop seats 15 are arranged at the both sides of connecting beam 14, and the placing space (not marked in the drawing) is formed between the adjacent two stop seats 15, the size of the placing space is consistent with the size of gas cylinder 8, and each placing space is used for placing gas cylinder 8, and gas cylinder 8 can be positioned after being placed in the placing space, so that unnecessary sliding of gas cylinder 8 is prevented.

[0027] Then, in order to keep each gas cylinder 8 stable during gas release, clamping plate 7 is arranged at the side of each gas cylinder 8, the shape of clamping plate 7 is consistent with the shape of the side of gas cylinder 8, clamping plate 7 is clamped on the side of gas cylinder 8 during use, then the both ends of clamping plate 7 are detachably installed on stop seat 15, and clamping plate 7 presses gas cylinder 8 in the placing space at this time. Figure 2 As shown in the drawing, knob 22 is arranged movably at the both ends of clamping plate 7, knob 22 is plum-blossom knob, convenient to hold by hand, the bolt part of knob 22 is movably arranged in the both ends of clamping plate 7 during use, then the free end of knob 22 is screw-threadedly installed in fixed seat 16, and fixed seat 16 is installed on stop seat 15, so that clamping plate 7 can be conveniently detached and conveniently installed, and gas cylinder 8 can also be quickly fixed and replaced.

[0028] Further, the application also includes mixing tank 11 and mixing channel 13, mixing tank 11 is used for preliminary mixing of gas, and the length of mixing channel 13 is relatively large, so that the gas after passing through mixing tank 11 continues to mix in mixing channel 13.

[0029] As shown in the drawing, two gas conveying pipes 6 are installed at one end of mixing tank 11, pipe joint 17 is arranged at one end of mixing channel 13, and the end, away from pipe joint 17, of mixing channel 13 is connected with the end, away from gas conveying pipe 6, of mixing tank 11 through contraction pipe 12, wherein the diameter of contraction pipe 12 is smaller than the diameter of mixing tank 11 and mixing channel 13, so that the channel with thin middle and thick both ends is formed. Figure 1 And Figure 2As shown, a plurality of connecting pipes 5 are arranged on each gas conveying pipe 6, and the free ends of the connecting pipes 5 are connected with connecting valves 9, which are detachably arranged on the bottle mouths of the gas cylinders 8. The connecting valves 9 are pressure reducing valves, which have the same function as the pressure reducing valves arranged on the gas cylinders, i.e. to regulate the pressure and avoid the large amount of gas flowing out.

[0030] In order to increase the rolling degree of the gas passing through the mixing channel 13, a supporting shaft 18 is coaxially arranged in the mixing channel 13, and at least one helical blade 19 is arranged on the surface of the supporting shaft 18. In actual use, the number of the helical blades 19 is at least two and they are arranged at equal intervals on the surface of the supporting shaft 18. A plurality of air vents 20 are arranged on the surface of the helical blade 19. It should be noted that the air vents 20 are arranged at the middle part of the helical blade 19. When the gas enters the mixing channel 13, the gas will contact with the helical blade 19. Therefore, the gas will rotate along the helical blade 19 and flow through the air vents 20 at the same time. In this way, the gas can quickly roll and mix when passing through the inside of the mixing channel 13.

[0031] Further, in order to enable the mixing tank 11 and the mixing channel 13 to operate stably, the side surfaces of the mixing tank 11 and the mixing channel 13 are provided with connecting seats 21, which are detachably arranged on the side surfaces of the supporting frame body 4. Specifically, the connecting seats 21 are bolted on the side surfaces of the supporting frame body 4.

[0032] The specific mixing method of the hydrogen and the nitrogen will be described below. There are two specific methods.

[0033] The first method is to connect one of the gas conveying pipes 6 with a hydrogen preparation device, such as an electrolytic cell or a hydrogen generator. In use, one of the connecting pipes 5 on the gas conveying pipe 6 is connected with the hydrogen preparation device, and the remaining connecting pipes 5 are in a closed state. Because a valve is arranged on each connecting pipe 5, the valve can be closed. Alternatively, a plurality of connecting pipes 5 can be respectively connected with a hydrogen preparation device, so that more hydrogen can be introduced. The other gas conveying pipe 6 is connected with the gas cylinder 8. At this time, the gas stored in the gas cylinder 8 is nitrogen. In this way, the nitrogen and the hydrogen can be introduced into the mixing tank 11 to be mixed.

[0034] The second method is that a plurality of gas cylinders 8 store both hydrogen and nitrogen. In this way, the use is simple. In use, the gas cylinders 8 are placed on the base 1, and the corresponding gas cylinders 8 are connected with the connecting pipes 5. When the gas cylinders storing hydrogen and the gas cylinders storing nitrogen are opened, the hydrogen and the nitrogen can be mixed.

[0035] Based on the above embodiment, the application further comprises a control part, that is, a flow valve 10 is installed on one end of each gas conveying pipe 6 close to the mixing tank 11, the flow valve 10 can accurately measure the flow of hydrogen and nitrogen, and a gas pressure sensor is further arranged on each gas conveying pipe 6, the gas pressure sensor is connected with the controller, and it should be noted that the gas pressure sensor should be installed close to the flow valve 10 to avoid interference of the single connecting pipe 5 on the gas pressure sensor and the flow valve 10;

[0036] The gas pressure sensor and the flow valve 10 are respectively connected with the controller, the controller is a host, a PLC logic controller or a control mainboard, when installed, the controller is arranged in the control box 3, the surface of the control box 3 is provided with a display and operation buttons connected with the controller, the control box 3 is arranged on the side surface of the support frame body 4, and an operator can directly adjust the gas flow and other operations through the operation buttons, that is, the flow of the flow valve 10 can be accurately controlled through the operation buttons to realize the mixing ratio of hydrogen and nitrogen, and the gas pressure sensor arranged can respectively monitor the gas pressure of the gas conveying pipe 6.

[0037] Based on the above embodiment, the application works as follows, no matter whether the hydrogen is produced by a hydrogen production device or stored in the gas cylinder 8, when the hydrogen and nitrogen enter the inside of the mixing tank 11, the hydrogen and nitrogen collide together to preliminarily mix the nitrogen and hydrogen. At this time, the mixed gas enters the contraction pipe 12, and it should be noted that the mixing tank 11, the contraction pipe 12 and the mixing channel 13 constitute a mixing structure similar to a Venturi mixer, when the mixed gas enters the mixing channel 13 from the contraction pipe 12, the volume suddenly increases, the gas rolling degree is further intensified, and then the gas further mixes between the spiral blades 19.

[0038] Therefore, in the actual application process, the pipe joint 17 is connected with the gas conveying pipeline through a pipeline, at this time, the gas passing through the pipe joint 17 is the mixed nitrogen and hydrogen.

[0039] Based on the above embodiment, further optimization can be made, the control box 3 is externally provided with an alarm, the alarm is connected with the controller, and the alarm can immediately alarm when the gas pressure in the gas conveying pipe 6 changes by more than a preset value.

[0040] Based on the above embodiment, further optimization can be made, the bottom of the mixing channel 13 is provided with an end cover (as indicated by an arrow A), and the pipe joint 17 is installed in the middle of the end cover, the edge of the end cover is detachably connected with the bottom of the mixing channel 13 through a flange, so that the support shaft 18 can be taken out after the end cover is opened. Figure 6

[0041] ​Based on the above embodiment, it needs to be further explained that although the application is described by mixing hydrogen and nitrogen, the device can also mix any two gases, and only needs to connect the gas-filled starting pipe with the connecting pipe 5 during mixing.

[0042] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A gas mixing device comprising a mixing tank (11) and a mixing channel (13), the mixing channel (13) being provided with a pipe joint (17) at one end, and the mixing tank (11) being provided with two gas supply pipes (6) at one end, characterized in that The mixing channel (13) is connected with the mixing tank (11) far from the end of the gas pipe (6) through a contraction pipe (12). The mixing channel (13) is coaxially provided with a supporting shaft (18), the surface of the supporting shaft (18) is provided with at least one spiral blade (19), and the surface of the spiral blade (19) is provided with a plurality of air vents (20).

2. The gas mixing device of claim 1, wherein The base (1) is further provided with a support frame (4) on the top surface, and a connecting beam (14) is installed in the middle of the support frame (4). A plurality of stop seats (15) are arranged on both sides of the connecting beam (14) at intervals, and a placing space is formed between adjacent two stop seats (15), and each placing space is used for placing a gas cylinder (8).

3. The gas mixing device of claim 2, wherein A plurality of connecting pipes (5) are installed on each gas pipe (6), and the free end of the connecting pipe (5) is connected with a connecting valve (9), and the connecting valve (9) is detachably installed on the bottle mouth of the gas cylinder (8).

4. The gas mixing device of claim 3, wherein A clamping plate (7) is arranged on the side surface of each gas cylinder (8), the two ends of the clamping plate (7) are detachably connected with the stop seat (15), and the clamping plate (7) tightly presses the gas cylinder (8) in the placing space.

5. The gas mixing device of claim 3, wherein A flow valve (10) is installed on the end of the gas pipe (6) close to the mixing tank (11), and the flow valve (10) is connected with a controller; the controller is arranged in a control box (3), and the surface of the control box (3) is provided with a display and operation buttons connected with the controller.

6. The gas mixing device of claim 1, wherein The base (1) is provided with a walking wheel (2) at each corner.

7. The gas mixing device of claim 5, wherein A gas pressure sensor is further arranged on each gas pipe (6), and the gas pressure sensor is connected with the controller.

8. The gas mixing device of claim 2, wherein The mixing tank (11) and the mixing channel (13) are provided with a connecting seat (21) on the side surface, and the connecting seat (21) is detachably arranged on the side surface of the support frame (4).

9. The gas mixing device of claim 4, wherein The two ends of the clamping plate (7) are movably provided with knobs (22), the free end of the knob (22) is screwedly installed in a fixing seat (16), and the fixing seat (16) is installed on the stop seat (15).

10. The gas mixing device of claim 3, wherein A valve is arranged on each connecting pipe (5).

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