Parylene coating device with cleaning function

Abstract

The utility model relates to the field of coating devices, in particular to a parylene coating device with a cleaning function, which comprises a coating chamber, a liquid injection header pipe is arranged in the middle of the upper portion of the coating chamber, and a liquid supply box used for providing cleaning liquid is arranged on one side of the coating chamber. After a product is coated, the coating chamber is opened, the product is taken out, and the bracket in the coating chamber is taken out for cleaning, so that cleaning dead angles in the coating chamber are reduced, then the upper coating chamber is closed, the liquid injection header pipe is in threaded connection with the water outlet pipe on the liquid supply box, and then the liquid supply box is started; by means of the method, impurities on the cavity, gas and the surface of a product can be effectively removed, the cavity is clean, the impurities can be prevented from being mixed into a coating material, and the defects of pinholes, hard spots and the like of a coating film are prevented; and moreover, the parylene film can be tightly attached to the product, and the adhesive force and uniformity of the film layer are improved, so that the film coating quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating device field, especially a parylene coating device with cleaning function. BACKGROUND

[0002] The parylene coating device is a kind of equipment using chemical vapor deposition process, which coats parylene material on the surface of an object to form a protective film. First, solid parylene raw material (such as p-xylene dimer) is heated to about 150°C to sublimate into gaseous p-xylene dimer. Then, the gaseous p-xylene dimer enters the cracking chamber and is cracked into active monomers at a high temperature of 650-700°C. The active monomers are then adsorbed onto the surface of the object to be coated under vacuum and room temperature conditions, and instantly polymerize into a film to form a uniform, dense and pinhole-free parylene film.

[0003] In the existing coating device, dust, residual parylene raw material and other impurities may accumulate on the inner wall of the chamber. If it is not cleaned in time, these impurities may mix into the film during coating, causing defects such as pinholes, bubbles and unevenness in the film, affecting the density and integrity of the film and reducing its protective performance.

[0004] Therefore, in view of the above-mentioned problem that the existing coating device chamber inner wall may accumulate impurities, if not cleaned in time, it will affect the density and integrity of the film and reduce its protective performance, a parylene coating device with cleaning function can be designed to avoid impurity residue by cleaning the chamber inner wall in time and improve product quality. SUMMARY

[0005] In order to overcome the problem that the existing coating device chamber inner wall may accumulate impurities, if not cleaned in time, it will affect the density and integrity of the film and reduce its protective performance, a parylene coating device with cleaning function is proposed.

[0006] The technical solution of the utility model is as follows: a parylene coating device with cleaning function, comprising a coating chamber; characterized in that: an injection main pipe is arranged at the upper middle part of the coating chamber, a liquid supply tank for providing cleaning liquid is arranged on one side of the coating chamber, a round cover is arranged above the coating chamber, the lower end of the injection main pipe is fixedly connected to the upper end of the round cover, a plurality of injection hoses are fixedly connected around the outer wall of the lower part of the injection main pipe, a fixed ring sleeve is fixedly connected to the outer wall of the injection hose, a support plate is arranged on one side of the injection hose, the upper end of the support plate is fixedly connected to the lower end of the round cover, a guide plate is arranged below the support plate, a rotating shaft is arranged through the connection part of the guide plate and the support plate, the guide plate is rotatably connected to the support plate through the rotating shaft, and the fixed ring sleeve is fixedly connected to the guide plate.

[0007] Further, a discharge pipe is fixedly connected to the lower part of one side of the outer wall of the coating chamber, a sealing cover is threadedly connected to the outer wall of the end of the discharge pipe away from the coating chamber, and handles are symmetrically fixedly connected to the two sides of the round cover.

[0008] Further, the inner side of the coating chamber is provided with a support, the lower end of the support is fixedly connected with a rectangular clamping block, and the bottom of the inner side of the coating chamber is provided with a rectangular clamping groove matched with the rectangular clamping block.

[0009] Further, the end of the liquid injection hose penetrating through the circular cover is fixedly connected with a spray head.

[0010] Further, a servo motor is installed on one side below the supporting plate, and the output end of the servo motor is fixedly connected with the rotating shaft.

[0011] Further, a first threaded groove is formed on the upper inner wall of the liquid injection main pipe, a liquid inlet pipe is fixedly connected with the corner of the upper end of the liquid supply tank, a water pump is installed on the side of the liquid supply tank close to the coating chamber, the liquid suction end of the water pump is connected with the water outlet pipe of the liquid supply tank, and the liquid outlet end of the water pump is fixedly connected with a water outlet pipe.

[0012] Further, a connecting pipe is fixedly connected with the end of the water outlet pipe away from the water pump, a second threaded groove is formed on the outer wall of the connecting pipe, and the connecting pipe is threadedly connected with the liquid injection main pipe along the first threaded groove through the second threaded groove.

[0013] The beneficial effects of the utility model are as follows: by opening the coating chamber, taking out the product, taking out the support in the coating chamber for cleaning, and cleaning the coating chamber in a targeted manner, impurities in the chamber and on the surface of the product can be effectively removed, so that the impurities are prevented from being mixed into the coating material in the subsequent coating process, thereby preventing defects such as pinholes and pockmarks from occurring in the coating, and the parylene film is facilitated to be closely attached, the adhesion and uniformity of the film layer are significantly improved, the coating quality is improved, the internal cleaning dead angle of the coating chamber can be effectively reduced after the product and the support are taken out, compared with the traditional cleaning method, the coating chamber is cleaned in an all-round and non-missing manner, the coating environment is highly clean, a high-quality environment basis is provided for the subsequent coating process, the coating chamber is cleaned regularly, residual coating materials and corrosive gases can be cleaned in time, the corrosion degree of the key equipment components such as the chamber wall and the heating element is reduced, the component loss is reduced, the overall service life of the equipment is effectively prolonged, and the equipment maintenance and replacement costs are reduced. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a whole structure schematic view of the utility model;

[0015] Figure 2 It is a lead-out pipe structure schematic view of the utility model;

[0016] Figure 3The utility model discloses a support structure schematic view.

[0017] Figure 4 The utility model discloses a liquid injection hose structure schematic view.

[0018] Figure 5 The utility model discloses a liquid supply tank structure schematic view.

[0019] The utility model discloses a liquid injection hose structure schematic view. Specific implementation

[0020] The utility model further is explained below in combination with the drawings and examples.

[0021] As Figures 1-5 The utility model provides a kind of example of parylene plating device with cleaning function, including plating chamber 1;It is characterized in that: plating chamber 1 upper middle part is equipped with liquid injection main pipe 2, plating chamber 1 one side is equipped with the liquid supply tank 3 for providing cleaning fluid, plating chamber 1 upper side is equipped with round cover 103, liquid injection main pipe 2 lower end is fixedly connected with the upper end of round cover 103, liquid injection main pipe 2 outer wall lower side is fixedly connected with multiple groups of liquid injection hose 202, liquid injection hose 202 outer wall is fixedly connected with fixed ring 204, liquid injection hose 202 one side is equipped with support plate 205, support plate 205 upper end is fixedly connected with the lower end of round cover 103, support plate 205 lower side is equipped with guide plate 206, guide plate 206 and support plate 205 junction are equipped with rotating shaft 207, guide plate 206 is rotatably connected with support plate 205 by rotating shaft 207, fixed ring 204 is fixedly connected with guide plate 206, when product plating is finished, open plating chamber 1, take out product, and plating chamber 1 in the support 105 is taken out and cleaned, to this reduces the cleaning dead angle in plating chamber 1 inside, then close on plating chamber 1, the water outlet pipe 303 of liquid injection main pipe 2 and liquid supply tank 3 is screwed, then start liquid supply tank 3, so that cleaning fluid is finally sprayed through the liquid injection hose 202 of liquid injection main pipe 2 outer wall, and plating chamber 1 inside is cleaned.

[0022] Please refer to Figures 2-3In this embodiment, the outer wall of the coating chamber 1 is fixed with a discharge pipe 101 below one side, the outer wall of the discharge pipe 101 is threadedly connected with a sealing cover 102 away from the coating chamber 1, the two sides of the round cover 103 are symmetrically fixed with handles 104, the inner side of the coating chamber 1 is provided with a support 105, the lower end of the support 105 is fixed with a rectangular clamping block 106, the inner bottom of the coating chamber 1 is provided with a rectangular clamping groove 107, the rectangular clamping block 106 is matched with the rectangular clamping groove 107, the round cover 103 is opened, the cleaned support 105 is placed in the coating chamber 1, and then the rectangular clamping block 106 is positioned and clamped along the rectangular clamping groove 107 and the coating chamber 1.

[0023] Please refer to Figure 4 In this embodiment, the injection hose 202 is fixed with a spray head 203 through one end of the round cover 103, a servo motor 208 is installed below one side of the supporting plate 205, the output end of the servo motor 208 is fixedly connected with the rotating shaft 207, the guiding plate 206 drives the fixed ring sleeve 204 to rotate through the rotating shaft 207 and the supporting plate 205 through the driving of the servo motor 208, so as to expand the cleaning area of the cleaning liquid.

[0024] Please refer to Figure 5 In this embodiment, the first threaded groove 201 is formed in the inner wall of the injection main pipe 2, the liquid inlet pipe 301 is fixedly connected to the upper end of the corner of the liquid supply tank 3, the water pump 302 is installed on the side close to the coating chamber 1 of the liquid supply tank 3, the liquid outlet end of the water pump 302 is connected with the water outlet pipe of the liquid supply tank 3, the liquid outlet end of the water pump 302 is fixedly connected with the water outlet pipe 303, the water outlet pipe 303 is fixedly connected with the connecting pipe 304 away from the water pump 302, the second threaded groove 305 is formed in the outer wall of the connecting pipe 304, the connecting pipe 304 is threadedly connected with the injection main pipe 2 along the first threaded groove 201 through the second threaded groove 305, the cleaning liquid is poured into the liquid supply tank 3 through the liquid inlet pipe 301, finally the water outlet pipe 303 away from the water pump 302 is lifted, so that the connecting pipe 304 is threadedly connected with the injection main pipe 2 along the first threaded groove 201 through the second threaded groove 305, when the assembly is completed, the water pump 302 is started, so that the cleaning liquid enters the water pump 302, and then enters the water outlet pipe 303 through the water pump 302 to reach the injection main pipe 2, and then sprays the cleaning work through the spray head 203 from the injection main pipe 2 to the injection hose 202.

[0025] When the product is coated, open the coating chamber 1, take out the product, and take out the support 105 in the coating chamber 1 for cleaning, so as to reduce the cleaning dead angle in the coating chamber 1, then lift the handle 104, close the round cover 103, then pour the cleaning liquid into the liquid supply tank 3 through the liquid inlet pipe 301, finally hold the water outlet pipe 303 away from the end of the water pump 302, so that the connecting pipe 304 is screwed with the liquid injection main pipe 2 along the first threaded groove 201 through the second threaded groove 305, when the assembly is completed, start the water pump 302, so that the cleaning liquid enters the water pump 302, and then enters the water outlet pipe 303 through the water pump 302 to reach the liquid injection main pipe 2, then from the liquid injection main pipe 2 to the liquid injection hose 202 through the nozzle 203 for spraying cleaning work, in the process, through the driving of the servo motor 208, the guide plate 206 drives the fixed ring sleeve 204 to rotate through the rotating shaft 207 and the support plate 205, so as to expand the cleaning area of the cleaning liquid, after a period of time, loosen the sealing cover 102, so that the cleaning liquid carries the impurities and pollutants out through the outlet pipe 101, then open the round cover 103, place the cleaned support 105 in the coating chamber 1, then the rectangular clamping block 106 is positioned and clamped with the coating chamber 1 along the rectangular clamping groove 107, and after confirmation, it can be used continuously.

Claims

1. A parylene coating device with cleaning function, comprising a coating chamber (1); characterized in that: The upper middle part of the coating chamber (1) is provided with a liquid injection main pipe (2), one side of the coating chamber (1) is provided with a liquid supply tank (3) for providing cleaning liquid, the upper part of the coating chamber (1) is provided with a round cover (103), the lower end of the liquid injection main pipe (2) is fixedly connected with the upper end of the round cover (103), a plurality of groups of liquid injection hoses (202) are fixedly connected around the lower part of the outer wall of the liquid injection main pipe (2), a fixed ring sleeve (204) is fixedly connected to the outer wall of the liquid injection hose (202), a support plate (205) is arranged on one side of the liquid injection hose (202), the upper end of the support plate (205) is fixedly connected with the lower end of the round cover (103), a guide plate (206) is arranged below the support plate (205), a rotating shaft (207) is arranged at the connecting part of the guide plate (206) and the support plate (205), the guide plate (206) is rotatably connected with the support plate (205) through the rotating shaft (207), and the fixed ring sleeve (204) is fixedly connected with the guide plate (206).

2. The parylene coating device with cleaning function according to claim 1, characterized in that: A lead-out pipe (101) is fixedly connected to one side of the lower part of the outer wall of the coating chamber (1), a sealing cover (102) is threadedly connected to the outer wall of the end of the lead-out pipe (101) away from the coating chamber (1), and handles (104) are symmetrically fixedly connected to the two sides of the round cover (103).

3. The parylene coating device with cleaning function according to claim 1, characterized in that: A support (105) is arranged on the inner side of the coating chamber (1), a rectangular clamping block (106) is fixedly connected to the lower end of the support (105), and a rectangular clamping groove (107) is arranged at the bottom of the inner side of the coating chamber (1), the rectangular clamping block (106) is matched with the rectangular clamping groove (107).

4. The parylene coating device with cleaning function according to claim 2, characterized in that: The end of the liquid injection hose (202) penetrating through the round cover (103) is fixedly connected with a spray head (203).

5. The parylene-coated device with cleaning function according to claim 1, wherein: A servo motor (208) is mounted on one side below the support plate (205), and the output end of the servo motor (208) is fixedly connected with the rotating shaft (207).

6. The parylene-coated device with cleaning functionality of claim 1, wherein: A first threaded groove (201) is arranged on the inner wall of the upper part of the liquid injection main pipe (2), a liquid inlet pipe (301) is fixedly connected to the upper end of the corner of the liquid supply tank (3), a water pump (302) is mounted on the side of the liquid supply tank (3) close to the coating chamber (1), the liquid suction end of the water pump (302) is connected with the water outlet pipe of the liquid supply tank (3), and a water outlet pipe (303) is fixedly connected to the liquid outlet end of the water pump (302).

7. The parylene coating device with cleaning function according to claim 6, characterized in that: A connecting pipe (304) is fixedly connected to the end of the water outlet pipe (303) away from the water pump (302), a second threaded groove (305) is arranged on the outer wall of the connecting pipe (304), and the connecting pipe (304) is threadedly connected with the liquid injection main pipe (2) along the first threaded groove (201) through the second threaded groove (305).

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