Novel cantilever type white light interferometer

Abstract

The utility model discloses a novel cantilever type white light interferometer, which comprises a damping base, a displacement device, a cantilever beam and a probe assembly, and is characterized in that the upper surface of the damping base is fixedly provided with the displacement device, and the displacement device comprises a bottom table, a carrying surface, an X-axis linear motor, a Y-axis linear motor, an encoder and a controller; the upper surface of the bottom table is provided with a carrier surface in sliding connection, an X-axis linear motor and a Y-axis linear motor are arranged between the bottom table and the carrier surface, the side wall of the bottom table is fixedly connected with an encoder and a controller, the rear side edge of the damping base is fixedly connected with a cantilever beam, and the end of the cantilever beam is fixedly connected with a probe assembly. The probe assembly is located over the displacement device. According to the utility model, the damping base is made of a natural marble material and is matched with the rubber vibration isolation pad fixedly connected with the lower surface, so that a marble-rubber-concrete three-layer structure is conveniently formed, low-frequency vibration is further inhibited, and the stability and the detection precision during detection are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical precision measurement technical field, concretely to a novel cantilever formula white light interferometer. BACKGROUND

[0002] White light interferometer has the advantage that the detection precision is high, so that it has been widely applied in detecting pressure, temperature and displacement etc., it uses monochromatic or quasi-monochromatic light source illumination with long coherence length, the intensity of zero-order interference fringe is very small with the intensity of its two side fringes, but it cannot make accurate judgement to zero-order fringe position, so it cannot carry out absolute measurement, in order to improve the contrast of zero-order fringe and two side fringes, multi-band high-power light source can be used, the method of combined light source is used to change light source spectrum, and light source parameters are optimized to improve fringe visibility.

[0003] At present, the existing white light interferometer adopts metal base, which is easy to conduct vibration in the measurement process, resulting in the decrease of measurement precision, the large space occupation of support frame and the exposure of cable, so that it is necessary to re-connect during the dismounting and maintenance process, thereby increasing the difficulty of maintenance. Therefore, a novel cantilever formula white light interferometer is provided. UTILITY MODEL CONTENT

[0004] (I) technical problem solved

[0005] In view of the deficiencies in the prior art, the utility model provides a novel cantilever formula white light interferometer, which solves the problems of large vibration conduction, large space occupation and difficult maintenance of cable exposure of the existing white light interferometer base, the utility model is made of natural marble material shock-absorbing base, cooperates with the rubber vibration isolation pad fixedly connected to the lower surface, further suppresses low-frequency vibration, improves the stability and detection precision during detection, the surface of the probe assembly is provided with a protective cover, so that the cable is not exposed, the aesthetic appearance is improved, and the difficulty of wiring during the maintenance process is greatly reduced by using the magnetic interface for connection.

[0006] (II) technical scheme

[0007] In order to achieve the above object, the utility model realizes the following technical scheme: a novel cantilever formula white light interferometer, including shock-absorbing base, displacement device, cantilever beam and probe assembly, the upper surface of the shock-absorbing base is fixedly installed with displacement device, the displacement device includes bottom table, load surface, X-axis linear motor, Y-axis linear motor, encoder and controller, the upper surface of the bottom table is provided with slidingly connected load surface, X-axis linear motor and Y-axis linear motor are arranged between the bottom table and the load surface, the sidewall of the bottom table is fixedly connected with the encoder and the controller, the rear side edge of the shock-absorbing base is fixedly connected with the cantilever beam, the end of the cantilever beam is fixedly connected with the probe assembly, the probe assembly is located directly above the displacement device, and the sidewall of the cantilever beam is provided with the concave wiring board.

[0008] As the improvement of the above technical scheme, the shock-absorbing base is made of marble, and the lower surface of the shock-absorbing base is fixedly connected with a rubber shock insulation pad.

[0009] As the improvement of the above technical scheme, the cross section of the cantilever beam is in a hollow trapezoidal shape, the inside of the cantilever beam is provided with a reinforcing rib, and the inside of the cantilever beam is further fixedly connected with a temperature compensation sensor.

[0010] As the improvement of the above technical scheme, the optical axis of the probe assembly is vertically aligned with the working surface of the displacement device, and the surface of the probe assembly is provided with a buckling connected protective cover.

[0011] As the improvement of the above technical scheme, the end of the cantilever beam is fixedly connected with a buckle, the surface of the buckle is provided with a mounting bolt, and the protective cover and the buckle are buckled and connected with each other.

[0012] As the improvement of the above technical scheme, the surface of the terminal block is fixedly connected with a plurality of magnetic interfaces, and the connecting lines of the probe assembly and the controller are respectively adsorbed and connected with the magnetic interfaces.

[0013] (Three) beneficial effects

[0014] The utility model provides a novel cantilever white light interferometer. Have the following beneficial effects:

[0015] 1. The utility model discloses a shock-absorbing base made of natural marble material, and cooperates with the rubber shock insulation pad fixedly connected to the lower surface, so that a "marble-rubber-concrete" three-layer structure is formed, low-frequency vibration is further inhibited, and the stability and detection accuracy during detection are improved.

[0016] 2. The utility model utilizes a base, a loading surface, an X-axis linear motor, a Y-axis linear motor, an encoder and a controller to form a displacement device, utilizes the high-precision X-axis linear motor and Y-axis linear motor to control the displacement of the loading surface, cooperates with the encoder and the controller, effectively improves the stability and precision of the displacement device operation, and improves the scanning precision of the sample.

[0017] 3. The utility model discloses a hollow trapezoidal shape with an embedded reinforcing rib, which improves the bending stiffness under the same weight, cooperates with the embedded temperature compensation sensor, facilitates real-time correction of thermal deformation error, improves the detection accuracy through the algorithm, and improves the convenience and aesthetics of wiring through the terminal block with magnetic interfaces on the side wall. BRIEF DESCRIPTION OF DRAWINGS

[0018] Fig. 1 It is the structure schematic view of the utility model cantilever white light interferometer whole;

[0019] Fig. 2 It is the structure schematic view of the cantilever beam end surface of the utility model;

[0020] Fig. 3 It is the structure schematic view of the protective cover and the cantilever beam side view of the utility model.

[0021] In the drawing: shock absorbing base-1, displacement device-2, cantilever beam-3, probe assembly-4, base-5, load surface-6, X-axis linear motor-7, Y-axis linear motor-8, encoder-9, controller-10, wiring board-11, rubber shock isolation pad-12, reinforcing rib-13, temperature compensation sensor-14, protective cover-15, buckle-16, mounting bolt-17, magnetic attraction interface-18. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0023] Please refer to Figs. 1-3 The utility model embodiment provides a kind of technical scheme: a new cantilever white light interferometer, including shock absorbing base 1, displacement device 2, cantilever beam 3 and probe assembly 4, the upper surface of the shock absorbing base 1 is fixedly installed with displacement device 2, the displacement device 2 includes base 5, load surface 6, X-axis linear motor 7, Y-axis linear motor 8, encoder 9 and controller 10, the upper surface of the base 5 is equipped with the sliding connection load surface 6, X-axis linear motor 7 and Y-axis linear motor 8 are equipped between the base 5 and load surface 6, the sidewall of the base 5 is fixedly connected with encoder 9 and controller 10, the rear side edge of the shock absorbing base 1 is fixedly connected with cantilever beam 3, the end of the cantilever beam 3 is fixedly connected with probe assembly 4, the probe assembly 4 is located directly above displacement device 2, the sidewall of the cantilever beam 3 is equipped with concave wiring board 11.

[0024] Further improvement, the shock absorbing base 1 is made of marble, the lower surface of the shock absorbing base 1 is fixedly connected with rubber shock isolation pad 12, by being made of marble shock absorbing base 1, cooperate with the rubber shock isolation pad of lower surface fixed connection, it is convenient to form "marble-rubber-concrete" three-layer structure, further inhibit low-frequency vibration, improve the precision of detection.

[0025] Further improved, the cross section of the cantilever beam 3 is in the shape of a hollow trapezoid, the inside of the cantilever beam 3 is provided with a reinforcing rib 13, and the inside of the cantilever beam 3 is also fixedly connected with a temperature compensation sensor 14; by adopting the design of the hollow trapezoidal shape matched with the built-in reinforcing rib 13, the bending stiffness is improved under the same weight, and the internal pre-buried temperature compensation sensor 14 facilitates real-time correction of thermal deformation error and improves detection accuracy through algorithm.

[0026] Further improved, the optical axis of the probe assembly 4 is vertically aligned with the working surface of the displacement device 2, and the surface of the probe assembly 4 is provided with a buckling connection protective cover 15; by making the optical axis of the probe assembly 4 perpendicular to the displacement device 2, the detection accuracy of the measured object is improved, and detection error is avoided; by providing the surface of the probe assembly 4 with a buckling connection protective cover 15, the probe assembly 4 is protected and covered, and the appearance is improved.

[0027] Further improved, the end of the cantilever beam 3 is fixedly connected with a buckle 16, the surface of the buckle 16 is provided with a mounting bolt 17, and the protective cover 15 and the buckle 16 are buckled and connected with each other; by providing the end of the cantilever beam 3 with the buckle 16 fixed by the mounting bolt 17, the protective cover 15 is conveniently installed, and the convenience of disassembly and assembly is improved.

[0028] Specifically improved, the surface of the terminal block 11 is fixedly connected with a plurality of magnetic interfaces 18, and the connecting lines of the probe assembly 4 and the controller 10 are respectively adsorbed and connected with the magnetic interfaces 18; by providing the surface of the terminal block 11 with the magnetic interfaces 18, the disassembly and assembly of the connecting lines are facilitated, and the cables are more integrated, and the scattered distribution of the cables is effectively avoided.

[0029] In use, the upper computer is connected through the magnetic interface 18 by using a cable, the upper computer is connected and calibrated to the displacement device 2 and the probe assembly 4 through software, the sample is placed on the surface of the loading surface 6, the probe assembly 4 automatically focuses under the adjustment of the software, the controller 10 controls the X-axis linear motor 7 and the Y-axis linear motor 8 to move, so that the loading surface 6 drives the sample to move, the probe assembly 4 scans the surface of the sample and communicates data with the upper computer, and the measurement of the sample is completed.

[0030] The utility model solves the problem that the existing white light interferometer adopts metal base, and vibration is easily conducted in the measuring process, leading to the decline of measuring accuracy, the large space occupied by the support frame and the exposure of cable, leading to the need for reconnection in the process of disassembly and maintenance, and the difficulty of maintenance is increased, the utility model discloses a shock absorbing base 1 made of natural marble material is adopted, cooperate with the rubber vibration isolation pad fixedly connected to the lower surface, the formation of "marble-rubber-concrete" three layer structure is convenient, further restrain low frequency vibration, improve the stability and detection accuracy when detecting, utilize the base 5, load surface 6, X axis linear motor 7, Y axis linear motor 8, encoder 9 and controller 10 constitute displacement device 2, utilize high-precision X axis linear motor 7, Y axis linear motor 8 carries out displacement control to load surface 6, cooperate with encoder 9 and controller 10, effectively improve the stability and precision of displacement device 2 operation, improve the precision of sample scanning, through the design of hollow trapezoidal shape cooperation built-in reinforcing rib 13 under the same weight, the bending stiffness is improved, cooperate with the temperature compensation sensor 14 pre-buried inside, it is convenient to correct thermal deformation error in real time, cooperate with the algorithm to improve the detection accuracy, through the wiring board 11 with magnetic interface 18 on the side wall, the convenience and the degree of beauty of wiring are improved.

[0031] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "central", "both ends" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a specific orientation, structure and operation, therefore, it cannot be understood as a limitation on the utility model.

[0032] In addition, the terms "first", "second", "third", "fourth" are only for description purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features, therefore, the features limited by "first", "second", "third", "fourth" can be explicitly or implicitly included at least one feature.

[0033] In the utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection" and the like should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, it can be the communication or interaction relationship between two elements, unless otherwise explicitly limited, the specific meaning of the above terms in the utility model can be understood according to the specific situation by those skilled in the art.

[0034] It should be pointed out finally that: the above only for the preferred embodiments of the utility model have, and do not for limiting the utility model, although the utility model has been described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can modify the technical scheme recorded in the foregoing each embodiment, or equivalent replacement to part of technical features. Any modification, equivalent replacement, improvement etc. that is made within the spirit and principle of the utility model, should be included in the protection scope of the utility model.

Claims

1. A novel cantilevered white light interferometer comprising a shock absorbing base (1), a displacement device (2), a cantilevered beam (3) and a probe assembly (4), characterized in that: The upper surface of the damping base (1) is fixedly installed with a displacement device (2), the displacement device (2) comprises a base table (5), a load surface (6), an X-axis linear motor (7), a Y-axis linear motor (8), an encoder (9) and a controller (10), the upper surface of the base table (5) is provided with a slidingly connected load surface (6), the base table (5) and the load surface (6) are provided with an X-axis linear motor (7) and a Y-axis linear motor (8), the side wall of the base table (5) is fixedly connected with an encoder (9) and a controller (10), the rear edge of the damping base (1) is fixedly connected with a cantilever beam (3), the end of the cantilever beam (3) is fixedly connected with a probe assembly (4), the probe assembly (4) is located directly above the displacement device (2), and the side wall of the cantilever beam (3) is provided with a concave terminal block (11).

2. A novel cantilevered white light interferometer according to claim 1, characterized in that: The damping base (1) is made of marble, and the lower surface of the damping base (1) is fixedly connected with a rubber shock isolation pad (12).

3. A novel cantilevered white light interferometer according to claim 1, characterized in that: The cross section of the cantilever beam (3) is in the shape of a hollow trapezoid, the inside of the cantilever beam (3) is provided with a reinforcing rib (13), and the inside of the cantilever beam (3) is also fixedly connected with a temperature compensation sensor (14).

4. A novel cantilevered white light interferometer according to claim 1, characterized in that: The optical axis of the probe assembly (4) is vertically aligned with the working surface of the displacement device (2), and the surface of the probe assembly (4) is provided with a snap-fit connected protective cover (15).

5. A novel cantilevered white light interferometer according to claim 4, characterized in that: The end of the cantilever beam (3) is fixedly connected with a buckle (16), the surface of the buckle (16) is provided with a mounting bolt (17), and the protective cover (15) and the buckle (16) are snap-fit connected with each other.

6. A novel cantilevered white light interferometer according to claim 1, characterized in that: The surface of the terminal block (11) is fixedly connected with a plurality of magnetic interfaces (18), and the connecting lines of the probe assembly (4) and the controller (10) are respectively adsorbed and connected with the magnetic interfaces (18).

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