Wafer boat clamping and carrying device

Abstract

The utility model discloses a wafer boat clamping and carrying device which comprises an installation plate and at least two clamping assemblies installed on the installation plate, and the at least two clamping assemblies are arranged up and down at intervals and operate independently. The clamping assembly comprises a first linear module, two clamping plates installed at the output end of the first linear module, and clamping pieces installed on the clamping plates. The first linear module can drive the two clamping plates to get close to each other so that the clamping piece can clamp the wafer boat. According to the wafer boat holding, clamping and carrying device, the wafer boat is clamped and fixed through the at least two clamping assemblies, the clamping range and the clamping force of the wafer boat can be adjusted in a self-adaptive mode in cooperation with the elastic buffering effect of the clamping pieces, and therefore the wafer boat holding, clamping and carrying device can be compatible with special-shaped wafer boats of different sizes, and the carrying efficiency of the special-shaped wafer boats is improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, specifically relating to a crystal boat clamping and transporting device. Background Technology

[0002] A crystal boat is a tool used to carry and transport chips in the semiconductor manufacturing process. Due to the characteristics of packaging and testing, and the uncertainty of incoming crystal boat materials, the shapes and sizes of incoming crystal boats vary greatly from customer to customer. Therefore, the storage and transportation of incoming crystal boats can only rely on manual labor, making automated handling and management impossible.

[0003] Therefore, in order to address the aforementioned technical problems, it is necessary to provide a crystal boat clamping and transporting device. Utility Model Content

[0004] The purpose of this invention is to provide a crystal boat clamping and handling device, which can solve the problem of poor adaptability of automated storage and transfer of crystal boats due to the large differences in shape and size of crystal boats.

[0005] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0006] A crystal boat clamping and handling device includes a mounting plate and at least two sets of clamping components mounted on the mounting plate, wherein the at least two sets of clamping components are arranged vertically at intervals and operate independently.

[0007] The clamping assembly includes a first linear module, two clamping plates mounted on the output end of the first linear module, and clamping members mounted on the clamping plates; the first linear module can drive the two clamping plates to move closer to each other so that the clamping members clamp the crystal boat.

[0008] In one or more embodiments of the present invention, the clamping member includes a housing and a plurality of elastic members installed in the housing. The elastic members are provided with abutting surfaces for abutting the crystal boat. The elastic members can be deformed by action so that the plurality of abutting surfaces adaptively abut against the outer periphery of the crystal boat.

[0009] In one or more embodiments of this utility model, the abutting surface of the elastic member extends outside the housing.

[0010] In one or more embodiments of this utility model, the elastic element is a columnar element, the extending direction of the elastic element is parallel to the sliding direction of the clamping element, and the end face of the columnar elastic element is the abutting surface.

[0011] In one or more embodiments of the present invention, the clamping assembly further includes a torque sensor that is installed in conjunction with the first linear module.

[0012] In one or more embodiments of the present invention, the crystal boat clamping and transporting device further includes a first base plate and a second base plate, the mounting plate is mounted on the second base plate, and a second linear module is provided between the first base plate and the second base plate for driving the second base plate to slide relative to the first base plate.

[0013] In one or more embodiments of the present invention, the crystal boat clamping and transporting device further includes a protective shell that cooperates with the clamping assembly, the protective shell having at least one opening in the sliding direction of the mounting plate.

[0014] In one or more embodiments of the present invention, the clamping plate includes a first body segment and a second body segment bent relative to each other, the first body segment being fixedly connected to the first linear module, and the clamping member being installed on the second body segment.

[0015] In one or more embodiments of this utility model, the crystal boat clamping and transporting device further includes a scanning and identification component that is installed in conjunction with the mounting plate for scanning and identifying the QR code of the crystal boat.

[0016] In one or more embodiments of this utility model, an electrical installation cabinet and a communication module are provided at one end of the clamping plate near the clamping assembly.

[0017] Compared with the prior art, the crystal boat clamping and transporting device of this utility model clamps and fixes the crystal boat with at least two clamping components. With the elastic buffering effect of the clamping components, the clamping range and clamping force can be adaptively adjusted, thus it can be compatible with irregularly shaped crystal boats of different sizes and improves the efficiency of transporting irregularly shaped crystal boats. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of a crystal boat clamping and transporting device according to one embodiment of the present invention;

[0020] Figure 2 This is an exploded view of a crystal boat clamping and transporting device according to an embodiment of the present invention;

[0021] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0022] Figure 4 This is a top view of a crystal boat clamping and transporting device according to an embodiment of the present invention.

[0023] Explanation of key figure labels:

[0024] 1. Mounting plate; 2. Clamping assembly; 21. First linear module; 22. Clamping plate; 221. First body section; 222. Second body section; 23. Clamping component; 231. Housing; 232. Elastic component; 233. Abutment surface; 24. Torque sensor; 3. First base plate; 4. Second base plate; 5. Second linear module; 6. Protective shell; 7. Electrical mounting cabinet; 8. Communication module. Detailed Implementation

[0025] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0026] Reference Figure 1 One embodiment of the present invention provides a crystal boat clamping and transporting device, comprising a mounting plate 1 and at least two sets of clamping components 2 mounted on the mounting plate 1. The at least two sets of clamping components 2 are arranged vertically at intervals and operate independently. In this embodiment, two sets of clamping components 2 are used as an example for illustrative purposes, namely an upper clamping component and a lower clamping component. This is not a limitation on the number of clamping components 2 in this application. In other embodiments, the number of clamping components 2 can also be adjusted, and can be three, four, or even more.

[0027] Reference Figure 1 and Figure 2 The clamping assembly 2 includes a first linear module 21, two clamping plates 22 mounted on the output end of the first linear module 21, and clamping members 23 mounted on the clamping plates 22. The first linear module 21 can drive the two clamping plates 22 to move closer to each other so that the clamping members 23 clamp the crystal boat. Therefore, when clamping irregularly shaped crystal boats, different clamping assemblies 2 can adaptively clamp at different positions on the crystal boat, thereby ensuring the adaptability to the shape of the irregular crystal boat and effectively ensuring the clamping effect, preventing the irregular crystal boat from falling off and being damaged.

[0028] Reference Figure 2 and Figure 3The clamping member 23 includes a housing 231 and a plurality of elastic members 232 installed within the housing 231. Each elastic member 232 has a bearing surface 233 for bearing against the crystal boat. The elastic member 232 can be deformed by action to allow the plurality of bearing surfaces 233 to adaptively bear against the outer periphery of the crystal boat. The bearing surfaces 233 of the elastic member 232 extend outside the housing 231. Therefore, when the first linear module 21 drives the two clamping plates 22 to approach each other, the elastic member 232 can elastically deform according to the shape of the crystal boat, ultimately causing the plurality of bearing surfaces 233 to bear against different positions on the crystal boat, ensuring the clamping effect. Simultaneously, the elastic member 232 also has a certain buffering effect; compared to a rigid clamping member 23, the elastically configured clamping member 23 in this embodiment can prevent damage to the crystal boat.

[0029] Reference Figure 3 In this embodiment, the elastic element 232 is a columnar element, and the extending direction of the elastic element 232 is parallel to the sliding direction of the clamping element 23. The end face of the columnar elastic element 232 is the abutment surface 233. In other embodiments, the elastic element 232 can also be configured with other shapes. The shape of the elastic element 232 in this embodiment facilitates its arrangement and fixation within the housing 231. It is understood that in this embodiment, the housing 231 is provided with a clearance opening through which the elastic element 231 can extend.

[0030] In this embodiment, two sets of clamping members 23 are provided on a clamping plate 22. In other embodiments, the number and position of the clamping members 23 installed on the clamping plate 22 can also be adjusted according to actual needs to ensure the clamping effect of the clamping assembly 2 on the crystal boat.

[0031] Reference Figure 2 The clamping assembly 2 also includes a torque sensor 24 that is installed in conjunction with the first linear module 21. The torque sensor 24 provides real-time feedback on changes in clamping force, thereby ensuring the clamping effect of the clamping component 23. In this embodiment, torque feedback enables closed-loop control of the clamping force at the 0.5 N·m level, effectively preventing possible vibration of the crystal boat during clamping and handling, ensuring the clamping effect, and preventing it from detaching from the clamping assembly 2 and being damaged. In this embodiment, both clamping assemblies 2 are equipped with torque sensors 24 to ensure that the two clamping assemblies 2 operate independently to clamp and fix the crystal boat.

[0032] Reference Figure 2One embodiment of the crystal boat clamping and transporting device of this utility model further includes a first base plate 3 and a second base plate 4. A mounting plate 1 is installed on the second base plate 4. A second linear module 5 is disposed between the first base plate 3 and the second base plate 4 for driving the second base plate 4 to slide relative to the first base plate 3. Therefore, by the relative sliding arrangement of the second base plate 4 and the first base plate 3, the transporting and loading / unloading of the crystal boat can be further completed, thereby improving the automation level of the crystal boat clamping device of this application. The first linear module 21 and the second linear module 5 are conventional assembly components in the art, and will not be specifically described in this embodiment.

[0033] Reference Figure 1 and Figure 2 One embodiment of the crystal boat clamping and transporting device of this utility model further includes a protective shell 6 that cooperates with the clamping assembly 2. The protective shell 6 has at least one opening in the sliding direction of the mounting plate 1. In this embodiment, the protective shell 6 is illustrated by having three protective plates on one side, and the other side has the aforementioned opening to allow the crystal boat to pass through. In other embodiments, the number and position of the protective surfaces can be specifically set and adjusted according to the actual situation.

[0034] Reference Figure 2 The clamping plate 22 includes a first body segment 221 and a second body segment 222 bent relative to each other. The first body segment 221 is fixedly connected to the first linear module 21, and the clamping member 23 is installed on the second body segment 222. In this embodiment, the first body segment 221 and the second body segment 222 are integrally formed, and the first body segment 221 and the second body segment 222 are arranged perpendicularly to facilitate the connection between the clamping plate 22 and the first linear module 21 and the clamping member 23. In other embodiments, the bending angle and shape of the clamping plate 22 can be specifically set according to actual needs; this embodiment does not impose any restrictions on this.

[0035] Reference Figure 1 In one optional embodiment, the crystal boat clamping and transporting device further includes a scanning and identification component that is installed in conjunction with the mounting plate 1 for scanning and identifying the QR code on the crystal boat. By using the scanning and identification component to achieve real-time data binding of the crystal boat's ID, location, and status, a complete material traceability system can be established for semiconductor packaging and testing companies.

[0036] Reference Figure 4 An electrical installation cabinet 7 and a communication module 8 are provided at one end of the clamping plate 22 near the clamping assembly 2 to ensure the orderly operation of each structure of the crystal boat clamping and handling device.

[0037] Therefore, the crystal boat clamping and transporting device of this utility model clamps and fixes the crystal boat with at least two clamping components 2, and with the elastic buffering effect of the clamping component 23, it can adaptively adjust its clamping range and clamping force, thus it can be compatible with irregularly shaped crystal boats of different sizes and improve the efficiency of transporting irregularly shaped crystal boats.

[0038] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0039] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A boat gripper handling device, characterized by It includes a mounting plate (1) and at least two sets of clamping assemblies (2) mounted on the mounting plate (1), wherein the at least two sets of clamping assemblies (2) are arranged vertically at intervals and operate independently; The clamping assembly (2) includes a first linear module (21), two clamping plates (22) mounted on the output end of the first linear module (21), and a clamping member (23) mounted on the clamping plate (22); the first linear module (21) can drive the two clamping plates (22) to move closer to each other so that the clamping member (23) clamps the crystal boat.

2. The boat gripper handling apparatus of claim 1, wherein, The clamping member (23) includes a housing (231) and a plurality of elastic members (232) installed in the housing (231). The elastic members (232) are provided with abutting surfaces (233) for abutting the crystal boat. The elastic members (232) can be deformed by action so that the plurality of abutting surfaces (233) adaptively abut against the outer periphery of the crystal boat.

3. The boat gripper handling apparatus of claim 2, wherein, The abutting surface (233) of the elastic element (232) extends outside the housing (231).

4. The boat gripper handling apparatus of claim 2, wherein, The elastic element (232) is a columnar element, and the extending direction of the elastic element (232) is parallel to the sliding direction of the clamping element (23). The end face of the columnar elastic element (232) is the abutting surface (233).

5. The boat gripper handling apparatus of claim 1, wherein, The clamping assembly (2) also includes a torque sensor (24) that is installed in conjunction with the first linear module (21).

6. The boat gripper handling apparatus of claim 1, wherein, It also includes a first base plate (3) and a second base plate (4), the mounting plate (1) is mounted on the second base plate (4), and a second linear module (5) is provided between the first base plate (3) and the second base plate (4) for driving the second base plate (4) to slide relative to the first base plate (3).

7. The boat gripper handling apparatus of claim 6, wherein, It also includes a protective shell (6) that cooperates with the clamping assembly (2), the protective shell (6) having at least one opening in the sliding direction of the mounting plate (1).

8. The boat gripper handling apparatus of claim 1, wherein, The clamping plate (22) includes a first body segment (221) and a second body segment (222) that are bent relative to each other. The first body segment (221) is fixedly connected to the first linear module (21), and the clamping member (23) is installed on the second body segment (222).

9. The boat gripper handling apparatus of claim 1, wherein, It also includes a scanning and identification component that is installed in conjunction with the mounting plate (1) for scanning and identifying the QR code on the crystal boat.

10. The boat gripper handling apparatus of claim 1, wherein, An electrical installation cabinet (7) and a communication module (8) are provided at one end of the clamping plate (22) near the clamping assembly (2).

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