Deviation correcting device

Abstract

A deviation rectifying device has a first direction, a second direction and a third direction which are intersected pairwise and comprises a base assembly, a first direction displacement assembly and a suction nozzle assembly. The first direction displacement assembly comprises a motor mounting base arranged on the base assembly, a first motor arranged on the motor mounting base, a cam, a supporting plate, a cam follower, a top plate and an elastic piece. An output shaft of the first motor extends in the third direction away from the base assembly. The cam is rotationally connected to the output shaft; the supporting plate is slidably connected to the side, back on to the base assembly, of the motor mounting base in the first direction. The cam follower is arranged on the side, facing the cam, of the supporting plate and abuts against the cam. The top plate is located on the side, back to the base assembly, of the motor mounting base, and the plate face faces the supporting plate. The elastic piece is connected between the top plate and the supporting plate and can generate elastic force enabling the cam follower to be connected with the peripheral face of the cam. The suction nozzle assembly is arranged on the supporting plate. Compared with the prior art, the deviation rectifying device can simplify the structure.

Description

Technical Field

[0001] This utility model relates to the field of chip processing equipment, and in particular to a correction device. Background Technology

[0002] Current chip manufacturing involves multiple processes. To enable simultaneous operation of multiple workstations, save equipment space, and reduce time wasted due to idle travel, turret-based processing is becoming increasingly popular. Existing turrets can perform chip mounting, inspection, cleaning, and other processes.

[0003] However, chips processed on the turret need to be transferred to different equipment for further processing, such as high-precision processing like photolithography, etching, and packaging. These high-precision processes often require precise chip positioning. Therefore, before transferring the chips from the turret to the high-precision processing equipment, their position and orientation need to be precisely adjusted to reduce the generation of defective products.

[0004] Therefore, it is usually necessary to add a device for correcting the chip between the turret and the subsequent processing equipment. However, since the correction of the chip involves displacement and rotation in multiple directions of motion, and the existing technology generally uses a motor to achieve displacement and rotation, the output shaft of the motor extends in a straight line, and the transmission components connected to the motor output are also arranged in a straight line accordingly. The transmission components are concentrated on the same straight line, which makes the existing correction device often complex in structure and large in space. Utility Model Content

[0005] Therefore, the purpose of this utility model is to provide a simplified structure for existing correction devices.

[0006] The technical solution adopted by this utility model is as follows:

[0007] A correction device has three intersecting directions: a first direction, a second direction, and a third direction. It includes a base assembly, a first direction displacement assembly, and a nozzle assembly. The first direction displacement assembly includes a motor mounting base on the base assembly, a first motor on the motor mounting base, a cam, a support plate, a cam follower, a top plate, and an elastic element. The output axis of the first motor extends in the third direction away from the base assembly. The cam is rotatably connected to the output shaft. The support plate is slidably connected along the first direction to the side of the motor mounting base facing away from the base assembly. The cam follower is located on the side of the support plate facing the cam and abuts against the cam. The top plate is located on the side of the motor mounting base facing away from the base assembly, with its surface facing the support plate. The elastic element connects the top plate and the support plate and generates a spring force that keeps the cam follower in contact with the outer peripheral surface of the cam. The nozzle assembly is located on the support plate.

[0008] Compared with the prior art, in the correction device of this utility model, the motor axis extends along a third direction, while the cam and cam follower are arranged along the first direction. This avoids the transmission components being concentrated in the same straight line direction, making full use of the space in the correction device, thus compacting the size of the correction device and reducing its space occupation. Moreover, the cam pushes the cam follower, which in turn pushes the nozzle assembly to move in the first direction, thereby realizing the correction of the nozzle assembly in the first direction. During this process, the close connection between the top plate and the elastic element cam and cam follower ensures the accuracy of the correction in the first direction. Furthermore, the connection method between the cam, cam follower, top plate and elastic element is direct and simple, thereby simplifying the structure of the correction device and also reducing the size of the correction device.

[0009] In another embodiment, the output shaft of the first motor passes through the motor mounting base in a third direction, and a cam is mounted on the end of the first motor's output shaft away from the base assembly. This structure allows for a further compact design.

[0010] In another embodiment, a second-direction displacement assembly is also included. This assembly comprises a mounting plate, a lead screw mounting base, a second motor, and a lead screw. The mounting plate is slidably connected to the side of the support plate facing away from the motor mounting base along the second direction. The lead screw extends parallel to the second direction. The lead screw mounting base is disposed on the mounting plate and threadedly connected to the lead screw. The second motor drives the lead screw to rotate. The nozzle assembly can move along the mounting plate in the second direction. This structure achieves high-precision correction of the nozzle assembly in the second direction.

[0011] In another embodiment, the second-direction displacement assembly further includes a connector protruding from the motor mounting base. A connecting plate and a lead screw mounting base are positioned opposite each other on opposite sides of the mounting plate in the second direction, and the lead screw is connected between the connector and the lead screw mounting base. The second motor is mounted on the mounting plate and located on the side furthest from the nozzle assembly. This structure provides sufficient support for the lead screw, improves the smoothness of its movement, and makes efficient use of the mounting space in the second direction.

[0012] In another embodiment, in the second direction, the side of the mounting plate away from the lead screw mounting seat extends to the outside of the motor mounting seat, the nozzle assembly is mounted on the side of the mounting plate away from the lead screw mounting seat, and the second motor is located on the opposite side of the mounting plate opposite the nozzle assembly. This structure reduces the space occupied by the nozzle assembly in the third direction, making the structure more compact. Furthermore, the nozzle assembly and the second motor are located on opposite sides, balancing the force distribution in the correction device and reducing the possibility of the correction structure tipping over.

[0013] In another embodiment, the suction nozzle assembly includes a third motor, a suction nozzle base, a suction nozzle, and a solenoid valve; the third motor is mounted on a mounting plate, and its output shaft is parallel to a third direction; the suction nozzle base rotates with the third motor; the suction nozzle is mounted on the suction nozzle base; and the suction nozzle is connected to the solenoid valve. With the above structure, the correction device can rotate the material and adjust its angle.

[0014] In another embodiment, projected along the first direction, the mounting plate includes a vertical portion and two horizontal portions, the two horizontal portions being separated by a certain distance in the third direction. One horizontal portion is located outside the support plate and is closer to the base assembly in the third direction than the other horizontal portion. The suction nozzle assembly is mounted on the horizontal portion located outside the support plate. The vertical portion protrudes from the horizontal portion away from the suction nozzle assembly, and the second motor is located on the side of the vertical portion opposite to the suction nozzle assembly. This structure allows for efficient use of the mounting space in the third direction, further refining the structure.

[0015] In another embodiment, a detection component is also included. This component comprises a detector and an amplifier. The detector is a through-beam fiber optic sensor, comprising several transmitters and receivers arranged around the suction nozzle at intervals, with each transmitter positioned opposite to each receiver. The amplifier is electrically connected to the detector. This structure enables the detection of whether material is near the suction nozzle without obstructing material transport.

[0016] In another embodiment, the detection assembly further includes an origin sensor, an pole sensor, an origin trigger, and a pole trigger. The origin sensor and the pole sensor are disposed on one of the mounting plate or tray and are located on opposite sides in the second direction. The origin trigger and the pole trigger are disposed on the other of the mounting plate or tray, with the origin sensor and the pole sensor opposite to each other. With this structure, the movement distance of the nozzle assembly in the second direction can be controlled, preventing the second-direction displacement assembly from falling off the first displacement assembly, thus improving safety.

[0017] In another embodiment, the base assembly includes a base plate, a sliding plate, a positioning block, and an adjusting handle; the sliding plate is slidably disposed on the base plate; the positioning block is fixed on the base plate and located on one side of the sliding direction of the sliding plate; the adjusting handle is rotatably connected to the base plate and located on the other side of the sliding direction of the sliding plate, and when the adjusting handle is turned towards the base plate, the sliding plate is clamped between the positioning block and the adjusting handle. With the above structure, the alignment device can be quickly assembled and disassembled.

[0018] To better understand and implement this invention, the following detailed description is provided in conjunction with the accompanying drawings. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the correction device of this utility model from one viewing angle.

[0020] Figure 2 This is a schematic diagram of the overall structure of the correction device of this utility model in the state of top plate disassembly, from another perspective.

[0021] Figure 3 This is a front view of the correction device of this utility model;

[0022] Figure 4 For along Figure 3 Sectional projection of the section cut along the centerline AA;

[0023] Figure 5 This is a partial exploded view of the second displacement component of this utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 10. Base assembly; 11. Base plate; 12. Sliding plate; 13. Positioning block; 14. Adjusting handle; 20. First direction displacement assembly; 21. Motor mounting base; 22. First motor; 23. Cam; 24. First linear guide rail; 25. Support plate; 26. Cam follower; 27. Elastic element; 28. Top plate; 30. Second direction displacement assembly; 31. Second linear guide rail; 32. Mounting plate; 321. Horizontal part; 322. Vertical part; 33. Connector; 34. Lead screw mounting base; 35. Second motor; 36. Lead screw; 40. Nozzle assembly; 41. Third motor; 42. Nozzle base; 43. Nozzle; 44. Solenoid valve; 50. Detection assembly; 51. Origin sensor; 52. Pole sensor; 53. Origin trigger; 54. Pole trigger; 55. Detector; 56. Amplifier. Detailed Implementation

[0026] Addressing the shortcomings of existing correction devices, such as complex structure and large space occupation, the applicant of this utility model proposes a correction device that, through the arrangement of a cam and cam follower, enables the first motor controlling the movement in the first direction, and the cam and cam follower, among other transmission components, to be arranged in different directions. This fully utilizes the space extending in different directions within the correction device, thereby reducing the space occupied by the correction device. Furthermore, the cooperation between the cam and cam follower simplifies the structure of the correction device while ensuring high-precision displacement of the material in the linear direction during correction. Moreover, this utility model's correction device can simultaneously displace the material in two different linear directions and rotate it around its axis, improving the efficiency of the correction work. The following are some specific embodiments of this utility model:

[0027] Please refer to the following: Figures 1 to 5A deviation correction device includes a base assembly 10, a first direction displacement assembly 20, a second direction displacement assembly 30, a nozzle assembly 40, and a detection assembly 50. The base assembly 10 is mounted on a worktable to support the entire deviation correction device. The first direction displacement assembly 20 is mounted on the base assembly 10 and can slide along a first direction. The second direction displacement assembly 30 is mounted on the first direction displacement assembly 20 and can slide along a second direction. The first and second directions are not parallel to each other. The nozzle assembly 40 is mounted on the second direction displacement assembly 40 and can rotate about a third direction that is perpendicular to both the first and second directions. The detection assembly 50 detects whether material has moved onto the nozzle assembly 40 and the position of the material.

[0028] In this embodiment, the worktable surface is parallel to the horizontal plane, the first direction is parallel to the X-axis, the second direction is parallel to the Y-axis, and the third direction is parallel to the R-axis. The first direction displacement component 20 moves along the X-axis, the second direction displacement component 30 moves along the Y-axis which is perpendicular to the X-axis, and the suction nozzle component 40 rotates around the R-axis which is perpendicular to the horizontal plane.

[0029] Specifically, the base assembly 10 includes a base plate 11, a sliding plate 12, a positioning block 13, and an adjusting handle 14. The base plate 11 is mounted on the worktable, with its surface parallel to the worktable surface. The sliding plate 12 is engaged with the upper surface of the base plate 11 and can slide on the surface of the base plate 11, with its sliding direction parallel to the X-axis or Y-axis. One engagement method between the sliding plate 12 and the base plate 11 is to have a linear guide rail (not shown) protruding from the upper surface of the base plate 11, and correspondingly, a groove (not shown) is provided on the sliding plate 12 to engage with the linear guide rail, but this method is not limited to this. The positioning block 13 is mounted on the upper surface of the base plate 11 and is located on one side of the sliding direction of the sliding plate 12. The adjusting handle 14 is rotatably connected to the base plate 11 and is located on the opposite side of the positioning block 13 in the sliding direction of the sliding plate 12, projected along a direction perpendicular to the surface of the sliding plate 12, with the axis of rotation of the adjusting handle 14 perpendicular to the sliding direction of the sliding plate 12. Rotating the adjusting handle 14 towards the base plate 11 allows it to abut against the end of the sliding plate 12 furthest from the positioning block 13, pushing the sliding plate 12 towards the positioning block 13 and positioning it between the positioning block 13 and the adjusting handle 14. Rotating the adjusting handle 14 away from the base plate 11 allows the sliding plate 12 to slide relative to the base plate 11. This enables quick assembly and disassembly of the sliding plate 12. In this embodiment, the sliding plate 12 slides along the Y-axis, and the adjusting handle 14 is approximately U-shaped, with both ends rotatably connected to the two sides of the base plate 11 along the X-axis. Preferably, the sliding plate 12 has inclined surfaces on both sides in its sliding direction, making the thickness of the middle part of the sliding plate 12 greater than the thickness of its ends. The sliding plate 12 abuts against the positioning block 13 and the adjusting handle 14 through the inclined surfaces on both sides, thereby increasing the contact area.

[0030] The first directional displacement assembly 20 is mounted above the sliding plate 12 and includes a motor mounting base 21, a first motor 22, a cam 23, a first linear guide rail 24, a support plate 25, a cam follower 26, an elastic element 27, and a top plate 28. The motor mounting base 21 is fixedly mounted on the sliding plate 12 and moves with it. The first motor 22 is mounted on the motor mounting base 21, and its output shaft passes through the motor mounting base 21 and extends in a third direction away from the sliding plate 12, perpendicular to the surface of the bottom plate 11. The cam 23 is fitted onto the end of the first motor 22's output shaft away from the sliding plate 12 and rotates with it. The first linear guide rail 24 is mounted on the side of the motor mounting base 21 facing away from the sliding plate 12 and extends in a straight line. In this embodiment, the first linear guide rail 24 extends along the X-axis. The support plate 25 is engaged with the first linear guide rail 24 and can slide along it. The cam 23 is mounted on the motor mounting base 21 and is located between the support plate 25 and the motor mounting base 21. In this embodiment, there are two first linear guides 24, spaced apart along the Y-axis, and the cam 23 is located in the gap between the two first linear guides 24. A cam follower 26 is rotatably connected to the side of the support plate 25 facing the motor mounting base 21, its axis parallel to the output shaft axis of the first motor 22, and its outer peripheral surface abutting against the outer peripheral surface of the cam 23. The cam follower 26 can be a cylindrical component such as a bearing, as is common in the prior art. The top plate 28 is mounted on the motor mounting base 21, located on one side of the support plate 25 along the X-axis, with one side facing the support plate 25. An elastic element 27 is mounted on the support plate 25, with its two ends abutting against the support plate 25 and the top plate 28, respectively. Preferably, there are two or more elastic elements 27, arranged along the X-axis to increase the elastic force. In this embodiment, the elastic element 27 is a tension spring, but torsion springs, U-shaped spring sheets, etc., can also be used as needed.

[0031] When the first motor 22 drives the cam 23 to rotate, the cam 23 pushes the cam follower 26, causing the support plate 25 to slide along the first linear guide rail 24, that is, along the X-axis. During this process, when the highest point of the cam 23 contacts the cam follower 26, the cam 23 pushes the cam follower 26 towards the top plate 28, the elastic element 27 is compressed, and a spring force is generated pointing towards the cam 23; as the highest point of the cam 23 leaves the cam follower 26, the compressed elastic element 27 pushes the cam follower 26 towards the cam 23, keeping the two in contact.

[0032] It is understood that in this embodiment, the cam follower 26 is located between the cam 23 and the top plate 28, and the elastic element 27 is located between the support plate 25 and the top plate 28, generating a thrust to push the support plate 25 toward the cam 23, so that the cam 23 remains in contact with the cam follower 26. However, according to actual needs, the cam 23 can also be set between the cam follower 26 and the top plate 28, and the elastic element 27 generates a pulling force to pull the support plate 25 toward the cam 23, which can also ensure that the cam 23 and the cam follower 26 remain in contact.

[0033] The second directional displacement assembly 30 is mounted on the tray 25 and includes a second linear guide rail 31, a mounting plate 32, a connector 33, a lead screw mounting seat 34, a second motor 35, and a lead screw 36. The second linear guide rail 31 is mounted on the side of the tray 25 facing away from the base plate 11 and extends along the Y-axis perpendicular to the X-axis; the mounting plate 32 engages with the second linear guide rail 31 and is slidable along the second linear guide rail 31. One end of the mounting plate 32 on the Y-axis extends to the outside of the tray 25 to mount the nozzle assembly 40. In this embodiment, projected along the X-axis, the mounting plate 32 is approximately Z-shaped, consisting of two horizontal portions 321 and a vertical portion 322 extending horizontally. The two horizontal portions 321 are separated by a certain distance in the vertical direction, with one horizontal portion 321 located outside the support plate 25 and lower in height than the other. The suction nozzle assembly 40 is mounted on the horizontal portion 321 located outside the support plate 25, and the vertical portion 322 protrudes from the horizontal portion 321 away from the suction nozzle assembly 40, allowing the suction nozzle assembly 40 to be close to the base plate 11 for a compact structure and to save installation space. The connector 33 is mounted on the support plate 25 and extends through the mounting plate 32 away from the base plate 11. The lead screw mounting seat 34 is mounted on the side of the mounting plate 32 facing away from the support plate 25, and is separated from the connector 33 by a certain distance in the extension direction of the second linear guide rail 31. The second motor 35 is mounted on the side of the vertical part 322 opposite to the nozzle assembly 40. Its output shaft is parallel to the Y-axis, driving the lead screw 36 to rotate around an axis parallel to the Y-axis. The lead screw 36 extends parallel to the Y-axis, connecting between the connector 33 and the lead screw mounting base 34, and is threadedly connected to the connector 33. Furthermore, the output shaft of the second motor 35 is connected to the lead screw 36 via a coupling 37. Preferably, the second motor 35 is a servo motor, and the lead screw 36 is a ball screw to improve rotational accuracy. It is understood that in this embodiment, the function of the second motor 35 is to drive the lead screw mounting base 34, which is threadedly connected to it, to perform linear motion, thereby driving the mounting plate 32 to move. Therefore, the second motor 35 is not limited to being mounted on the mounting plate 32, but can also be mounted on the motor mounting base 21 or other equipment.

[0034] When the second motor 35 rotates, the lead screw 36 rotates accordingly, the lead screw mounting seat 34 moves away from or closer to the connector 33, and the mounting plate 32 slides along the second linear guide rail 31, driving the nozzle assembly 40 to move along the Y-axis.

[0035] The suction nozzle assembly 40 includes a third motor 41, a suction nozzle base 42, a suction nozzle 43, and a solenoid valve 44. The third motor 41 is mounted on the side of the mounting plate 32 away from the second motor 35, with its output shaft parallel to the output shaft of the first motor 22 and perpendicular to both the X and Y axes. The suction nozzle base 42 is connected to and rotates with the third motor 41. The suction nozzle 43 is a conventional suction nozzle with an adsorption function, mounted on the suction nozzle base 42, with its adsorption port facing away from the base plate 11. The solenoid valve 44 can be mounted on the motor mounting base 21 to reduce the weight borne by the suction nozzle base 42. The side of the suction nozzle 43 away from its adsorption port and the solenoid valve 44 are connected via an air tube. Furthermore, the solenoid valve 44 can also be connected to a sealed container to increase negative pressure. Preferably, the third motor 41 is a servo motor to improve the accuracy of angle adjustment.

[0036] When the material approaches the suction nozzle 43, the solenoid valve 44 is activated to adsorb the material. When the third motor 41 rotates, the suction nozzle base 42 drives the suction nozzle 43 to rotate around the axis to adjust the angle of the material.

[0037] The detection assembly 50 includes a home sensor 51, a pole sensor 52, a home trigger 53, a pole trigger 54, a detector 55, and an amplifier 56. The home sensor 51 and the pole sensor 52 are fixed on the mounting plate 32 and are located on opposite sides in the Y-axis direction. The home trigger 53 and the pole trigger 54 are respectively mounted on the support plate 25 and are opposite to the home sensor 51 and the pole sensor 52. As the mounting plate 32 slides along the second linear guide rail 31, the home trigger 53 moves away from or closer to the home sensor 51, and the pole trigger 54 moves closer to or further away from the pole sensor 52, thereby detecting the distance the mounting plate 32 slides in the Y-axis direction. In this embodiment, the home trigger 53 and the pole trigger 54 are located between the home sensor 51 and the pole sensor 52, and the home sensor 51 and the pole sensor 52 are slot-type photoelectric sensors in the prior art. A detector 55 is mounted on the nozzle base 42 and close to the nozzle 43 to detect whether material is near the nozzle 43. In this embodiment, the detector 55 is a through-beam fiber optic sensor that determines whether material is near the nozzle 43 by detecting whether the light path is blocked. It includes several transmitters and receivers, which are arranged around the nozzle 43 at intervals. Each transmitter is positioned opposite to each receiver to reduce the impact on material rotation. An amplifier 56 is electrically connected to the detector 55 to amplify the detection signal from the detector 55, improving detection accuracy. In this embodiment, the amplifier 56 is a fiber optic amplifier that can directly amplify the light signal from the detector 55. It is mounted on the sliding plate 12. Furthermore, the detection assembly 50 also includes an imager (not shown) positioned opposite the nozzle 43. Based on the image captured by the imager showing the material being adsorbed by the nozzle 43, it automatically determines whether correction is needed. In this embodiment, the imager is located directly above the nozzle 43.

[0038] During operation, when detector 55 detects material approaching nozzle 43, it activates solenoid valve 44 to adsorb the material onto nozzle 43, and the camera takes a picture. Based on the image, the first motor 22 is activated, causing the support plate 25 to slide along the first linear guide rail 24 to correct the material's deviation along the X-axis; and / or, the second motor 35 is activated, causing the mounting plate 32 to slide along the second linear guide rail 31 to correct the material's deviation along the Y-axis; and / or, the third motor 41 is activated, causing nozzle base 42 to drive nozzle 43 to rotate around an axis, allowing the material to rotate around a third axis for angular correction.

[0039] Furthermore, it is understood that the structure of setting a first linear guide rail 24 on the motor mounting base 21 and a second linear guide rail 31 on the support plate 25 in this embodiment is to achieve a locking structure for guiding the support plate 25 and the mounting plate 32 respectively. Therefore, other guiding structures can also be used, such as setting the first linear guide rail 24 and the second linear guide rail 31 on the support plate 25 and the mounting plate 32, to achieve the sliding of the support plate 25 relative to the motor mounting base 21 along the X-axis and the sliding of the mounting plate 32 relative to the support plate 25 along the Y-axis, and is not limited to this embodiment.

[0040] Compared with existing technologies, the correction device of this invention has the following advantages:

[0041] 1. It can make full use of space, resulting in a simple and compact structure, small footprint, good stability, and high correction accuracy;

[0042] 2. The motion in the first direction, the motion in the second direction, and the rotation about the third direction are independent of each other and can be carried out simultaneously or separately, resulting in high correction efficiency.

[0043] 3. It can perform automatic identification and detection, with a high degree of automation and good security;

[0044] 4. It can be quickly assembled and disassembled.

[0045] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "left," "right," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be understood as limiting this invention.

[0046] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A deviation correcting device having a first direction, a second direction and a third direction which intersect each other two by two, characterized in that: It includes a base assembly (10), a first direction displacement assembly (20), and a suction nozzle assembly (40); the first direction displacement assembly (20) includes: Motor mounting bracket (21) is provided on the base assembly (10); A first motor (22) is provided on the motor mounting base (21), and the output axis of the first motor (22) extends away from the third direction of the base assembly (10); A cam (23) is mounted on one end of the output shaft of the first motor (22) away from the base assembly (10) and rotates with the output shaft of the first motor (22); The support plate (25) is slidably connected to the side of the motor mounting base (21) facing away from the base assembly (10) along the first direction; A cam follower (26) is provided on the side of the support plate (25) facing the cam (23) and abuts against the cam (23); The top plate (28) is located on the side of the motor mounting base 921 facing away from the base assembly (10), with its plate surface facing the support plate (25). And an elastic element (27) is connected between the top plate (28) and the support plate (25) and is capable of generating an elastic force that keeps the outer peripheral surface of the cam follower (26) in contact with the cam (23); The suction nozzle assembly (40) is disposed on the tray.

2. The correction device of claim 1, wherein: The output shaft of the first motor (22) passes through the motor mounting base (21) along the third direction, and the cam (23) is mounted on the end of the output shaft of the first motor (22) away from the base assembly (10).

3. The correction device of claim 1, wherein: It also includes a second direction displacement assembly (30), which includes a mounting plate (32), a lead screw mounting seat (34), a second motor (35), and a lead screw (36); the mounting plate (32) is slidably connected to the side of the support plate (25) facing away from the motor mounting seat (21) along the second direction; the extension direction of the lead screw (36) is parallel to the second direction; the lead screw mounting seat (34) is disposed on the mounting plate (32) and threadedly connected to the lead screw (36); the second motor (35) drives the lead screw (36) to rotate; the suction nozzle assembly (40) can move with the mounting plate (32) in the second direction.

4. The correction device according to claim 3, characterized in that: The second directional displacement assembly (30) further includes a connector (33) protruding from the motor mounting base (21). The connector (33) and the lead screw mounting base (34) are disposed opposite to each other on opposite sides of the mounting plate (32) in the second direction, and the lead screw (36) is connected between the connector (33) and the lead screw mounting base (34). The second motor (35) is disposed on the mounting plate (32) and located on the side away from the nozzle assembly (40).

5. The correction device of claim 3, wherein: In the second direction, the mounting plate (32) extends to the outside of the motor mounting base (21) on the side away from the lead screw mounting base (34), the nozzle assembly (40) is mounted on the side of the mounting plate (32) away from the lead screw mounting base (34), and the second motor (35) is disposed on the other side of the mounting plate (32) opposite to the nozzle assembly (40).

6. The correction device of claim 3, wherein: The suction nozzle assembly (40) includes a third motor (41), a suction nozzle base (42), a suction nozzle (43), and a solenoid valve (44); the third motor (41) is mounted on the mounting plate (32), and its output shaft is parallel to the third direction; the suction nozzle base (42) rotates with the third motor (41); the suction nozzle (43) is mounted on the suction nozzle base (42); the suction nozzle (43) is connected to the solenoid valve (44).

7. The correction device of claim 6, wherein: Projected along the first direction, the mounting plate (32) includes a vertical portion (322) and two horizontal portions (321). The two horizontal portions (321) are spaced apart in the third direction. One of the horizontal portions (321) is located outside the tray (25) and is closer to the base assembly (10) in the third direction than the other horizontal portion (321). The suction nozzle assembly (40) is mounted on the horizontal portion (321) located outside the tray (25). The vertical portion (322) protrudes from the horizontal portion (321) away from the suction nozzle assembly (40). The second motor (35) is located on the side of the vertical portion (322) away from the suction nozzle assembly (40).

8. The correction device of claim 6, wherein: It also includes a detection component (50), which includes a detector (55) and an amplifier (56). The detector (55) is a through-beam fiber optic sensor, which includes several transmitters and receivers. The several transmitters and receivers are arranged around the nozzle and spaced apart. Each transmitter is arranged opposite to each receiver. The amplifier (56) is electrically connected to the detector (55).

9. The correction device of claim 8, wherein: The detection assembly further includes an origin sensor (51), an pole sensor (52), an origin trigger (53), and a pole trigger (54); the origin sensor (51) and the pole sensor (52) are disposed on one of the mounting plate (32) or the tray (25) and are respectively located on opposite sides in the second direction; the origin trigger (53) and the pole trigger (54) are disposed on the other of the mounting plate (32) or the tray (25), and the origin sensor (51) is disposed opposite to the origin trigger (53), and the pole sensor (52) is disposed opposite to the pole trigger (54).

10. The correction device of claim 1, wherein: The base assembly (10) includes a base plate (11), a sliding plate (12), a positioning block (13), and an adjusting handle (14); the sliding plate (12) is slidably disposed on the base plate (11); the positioning block (13) is fixed on the base plate (11) and located on one side of the sliding direction of the sliding plate (12); the adjusting handle (14) is rotatably connected to the base plate (11) and located on the other side of the sliding direction of the sliding plate (12); when the adjusting handle (14) turns to the base plate (11), the sliding plate (12) is sandwiched between the positioning block (13) and the adjusting handle (14).

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