Wastewater treatment system
By introducing an acid-base controller into the wastewater treatment system, the on/off state of the reagent valves is automatically controlled, solving the problem of reagent waste and achieving a reduction in reagent costs and stability of the effluent pH value.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD
- Filing Date
- 2025-03-25
- Publication Date
- 2026-04-21
AI Technical Summary
The cost of acid-base neutralization agents in existing wastewater treatment systems is relatively high, mainly due to the delay in manually controlling the opening and closing of agent valves, leading to excessive waste of agents.
An acid-base controller is used to automatically control the opening and closing of the chemical valves in the neutralization tank, and the amount of chemical added is adjusted in real time according to the detection results of the pH meter to reduce delays and over-addition.
By automatically controlling the dosage of chemicals, the cost of chemicals is reduced, the accuracy of chemical use and the efficiency of wastewater treatment are improved, and the stability of the effluent pH value is ensured.
Smart Images

Figure CN224147823U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wastewater treatment technology, and specifically to a wastewater treatment system. Background Technology
[0002] The semiconductor manufacturing process generates various types of wastewater. Based on the nature of the pollutants they contain, semiconductor manufacturing wastewater can be categorized into organic wastewater and inorganic wastewater. Organic wastewater contains organic matter, such as carbohydrates, proteins, fats, and oils. Inorganic wastewater contains inorganic matter, such as heavy metals, acids, alkalis, salts, and minerals.
[0003] To reduce environmental pollution, wastewater generated during semiconductor manufacturing processes must be treated by a wastewater treatment system before being discharged. The wastewater treatment process typically includes acid-base neutralization. Acid-base neutralization usually involves placing the wastewater in a neutralization tank and adding acidic or alkaline agents to adjust the pH level to meet environmental protection requirements.
[0004] However, the acid-base neutralization process in existing wastewater treatment systems requires expensive reagents. Utility Model Content
[0005] The problem this invention aims to solve is: how to reduce the cost of reagents for acid-base neutralization in wastewater treatment systems.
[0006] To address the aforementioned problems, this utility model provides a wastewater treatment system, comprising: two or more neutralization tanks and a chemical acid / base controller; each neutralization tank is connected to a chemical tank via a chemical pipeline; each chemical pipeline is equipped with a chemical valve; and each neutralization tank is equipped with a pH meter.
[0007] The acid-base controller is connected to each of the pH meters and each of the reagent valves, and the acid-base controller automatically controls the opening and closing of the corresponding reagent valves based on the detection results of the pH meters.
[0008] In one possible embodiment, the acid-base controller includes:
[0009] The first control module is adapted to acquire the detection result of the pH meter, and when the detection result of the pH meter is higher than the corresponding upper limit of pH, control the corresponding acidic agent valve to open until the detection result of the pH meter is equal to the first intermediate pH value.
[0010] The second control module is adapted to acquire the detection result of the pH meter. When the detection result of the pH meter is lower than the corresponding lower pH limit, it controls the corresponding alkaline agent valve to open until the detection result of the pH meter is equal to the second intermediate pH value.
[0011] Wherein, the lower limit of pH is less than the second intermediate pH value, the second intermediate pH value is less than the first intermediate pH value, and the first intermediate pH value is less than the upper limit of pH.
[0012] In one possible embodiment, the acid-base controller includes:
[0013] The first control module is adapted to acquire the detection result of the pH meter, and when the detection result of the pH meter is higher than the corresponding upper limit of pH, control the corresponding acidic agent valve to open until the detection result of the pH meter is equal to the first intermediate pH value.
[0014] The second control module is adapted to acquire the detection result of the pH meter. When the detection result of the pH meter is lower than the corresponding lower pH limit, it controls the corresponding alkaline agent valve to open until the detection result of the pH meter is equal to the second intermediate pH value.
[0015] Wherein, the lower limit of pH is less than the second intermediate pH value, the second intermediate pH value is equal to the first intermediate pH value, and the first intermediate pH value is less than the upper limit of pH.
[0016] In one possible embodiment, the first control module includes:
[0017] The first comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding upper limit value of pH, and when the detection result of the pH meter is higher than the corresponding upper limit value of pH, output a first control signal to the corresponding acidic agent valve to control the corresponding acidic agent valve to be turned on.
[0018] The second comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding first intermediate pH value, and when the detection result of the pH meter is equal to the corresponding first intermediate pH value, output a second control signal to the corresponding acidic agent valve to control the corresponding acidic agent valve to open.
[0019] In one possible embodiment, the second control module includes:
[0020] The third comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding pH lower limit value, and when the detection result of the pH meter is lower than the corresponding pH lower limit value, output a third control signal to the corresponding alkaline agent valve to control the corresponding alkaline agent valve to be turned on.
[0021] The fourth comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding second intermediate pH value, and when the detection result of the pH meter is equal to the corresponding second intermediate pH value, output a fourth control signal to the corresponding alkaline agent valve to control the corresponding alkaline agent valve to open.
[0022] In one possible embodiment, the two or more neutralization tanks sequentially include a first neutralization tank, a second neutralization tank, a third neutralization tank, and a fourth neutralization tank, according to the flow direction of the wastewater.
[0023] In one possible embodiment, the system further includes: an organic wastewater emergency tank; the output end of the organic wastewater emergency tank is connected to the first neutralization tank via an organic wastewater pipeline.
[0024] In one possible embodiment, the system further includes: an inorganic wastewater emergency tank and an acid-base wastewater equalization tank; wherein:
[0025] The inorganic wastewater emergency tank is suitable for receiving inorganic wastewater; the output end of the inorganic wastewater emergency tank is connected to the acid-base wastewater equalization tank through an inorganic wastewater pipeline;
[0026] The output end of the acid-base wastewater equalization tank is connected to the first neutralization tank via a pipeline.
[0027] In one possible embodiment, the system further includes: a discharge pool and a metering tank; wherein:
[0028] The output end of the discharge pool is connected to the metering tank through the first discharge water pipeline, and to the inorganic wastewater emergency pool through the second discharge water pipeline;
[0029] The acid-base controller is adapted to acquire the pH measurement result in the metering tank, and control the discharge of wastewater in the metering tank when the pH measurement result meets the discharge requirements, and control the wastewater in the metering tank to be transported to the inorganic wastewater emergency pool when the pH measurement result does not meet the discharge requirements.
[0030] In one possible embodiment, the system further includes a wastewater collection tank for collecting wastewater and conveying it to the acid-base wastewater equalization tank.
[0031] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:
[0032] By applying the solution of this utility model, an acid-base controller is set up. The acid-base controller automatically controls the opening and closing of the corresponding chemical valves based on the detection results of the pH meter in each neutralization tank. Compared with manual control of the chemical valves, the delay in the control process can be reduced, thereby avoiding the situation of excessive chemical addition and reducing chemical costs. Attached Figure Description
[0033] Figure 1 This is a schematic diagram of the structure of a wastewater treatment system according to an embodiment of the present invention;
[0034] Figure 2 This is a schematic diagram of the structure of an acid-base controller according to an embodiment of the present invention. Detailed Implementation
[0035] Currently, wastewater treatment systems typically consist of multiple neutralization tanks. The wastewater to be treated passes through each neutralization tank sequentially before being stored in an outflow tank. Each neutralization tank is equipped with a pH meter that displays the pH value in real time. Manual intervention is used to control the flow of acidic or alkaline reagents based on the pH readings.
[0036] The wastewater treatment system described above relies on manual control of the flow of acidic or alkaline reagents based on pH meter readings. This process is subject to delays, which often leads to overdosing of reagents, resulting in waste and increased treatment costs.
[0037] To address this problem, this invention provides a wastewater treatment system equipped with an acid-base controller. This controller can automatically control the opening and closing of corresponding reagent valves based on the pH test results in the neutralization tank, thereby reducing the time delay in the control process, minimizing the possibility of excessive reagent addition, and reducing reagent costs.
[0038] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.
[0039] This utility model provides a wastewater treatment system, which may include: two or more neutralization tanks and a chemical acid-base controller. Each neutralization tank is connected to a chemical tank via a chemical pipeline; each chemical pipeline is equipped with a chemical valve; and each neutralization tank is equipped with a pH meter.
[0040] The acid-base controller is connected to each of the pH meters and each of the reagent valves, and the acid-base controller automatically controls the opening and closing of the corresponding reagent valves based on the detection results of the pH meters.
[0041] Specifically, the acid-base controller generates a control signal when the pH meter reading in the neutralization tank reaches a set condition, thereby controlling the opening and closing of the corresponding reagent valves. This allows for the automatic addition of acidic or alkaline reagents to the neutralization tank based on the current pH value, neutralizing neutral or alkaline ions in the wastewater. Compared to manual control of the reagent valves, this method allows for more precise control of the reagent dosage, preventing over-addition of either acidic or alkaline reagents, thus reducing reagent waste and lowering reagent costs.
[0042] In practice, the number of neutralization tanks can be set according to actual needs. Two or more neutralization tanks are connected sequentially. After the wastewater in the previous neutralization tank reaches its maximum capacity, it overflows into the next neutralization tank for further neutralization. The more neutralization tanks there are, the more times the wastewater is neutralized, and the more the pH value of the wastewater output from the last neutralization tank meets the discharge requirements.
[0043] In practice, the acidic reagent tank is connected to each neutralization tank via acidic reagent pipelines. The alkaline reagent tank is connected to each neutralization tank via alkaline reagent pipelines. The acidic reagent in the acidic reagent tank can be sulfuric acid, etc., while the alkaline reagent in the alkaline reagent tank can be sodium hydroxide, etc. The acid-base controller can be connected to the acidic reagent valves on the acidic reagent pipelines and the alkaline reagent valves on the alkaline reagent pipelines. Each neutralization tank has independent acidic and alkaline reagent valves, allowing for independent control of the reagent addition to each neutralization tank.
[0044] Figure 1 This is a schematic diagram of the wastewater treatment system in an embodiment of the present invention. (Refer to...) Figure 1 In accordance with the flow direction of the wastewater, the two or more neutralization tanks sequentially include: a first neutralization tank C1, a second neutralization tank C2, a third neutralization tank C3, and a fourth neutralization tank C4. An acidic reagent tank is connected to the first neutralization tank C1 through the fourth neutralization tank C4 via an acidic reagent pipeline. An alkaline reagent tank is connected to the first neutralization tank C1 through the fourth neutralization tank C4 via an alkaline reagent pipeline.
[0045] A first acidic agent valve T1 is installed on the acidic agent pipeline connecting to the first neutralization tank C1, and a first alkaline agent valve P1 is installed on the alkaline agent pipeline connecting to the first neutralization tank C1. A second acidic agent valve T2 is installed on the acidic agent pipeline connecting to the second neutralization tank C2, and a second alkaline agent valve P2 is installed on the alkaline agent pipeline connecting to the second neutralization tank C2. A third acidic agent valve T3 is installed on the acidic agent pipeline connecting to the third neutralization tank C3, and a third alkaline agent valve P3 is installed on the alkaline agent pipeline connecting to the third neutralization tank C3. A fourth acidic agent valve T4 is installed on the acidic agent pipeline connecting to the fourth neutralization tank C4, and a fourth alkaline agent valve P4 is installed on the alkaline agent pipeline connecting to the fourth neutralization tank C4.
[0046] The acid-base controller can be connected to the first acidic agent valve T1 through the fourth acidic agent valve T4, and the first alkaline agent valve P1 through the fourth alkaline agent valve P4. By controlling the agent valves connecting each neutralization tank, acidic or alkaline agents can be added to that neutralization tank. For example, controlling the first acidic agent valve T1 to open allows acidic agents to be added to the first neutralization tank C1. Controlling the fourth alkaline agent valve P4 to open allows alkaline agents to be added to the fourth neutralization tank C4. At any given time, only one of the acidic and alkaline agent valves connecting to the same neutralization tank can be open.
[0047] In practice, wastewater requiring acid-base neutralization first enters the first neutralization tank C1 for neutralization, then overflows from C1 into the second neutralization tank C2 for further neutralization. After neutralization in C2, it overflows into the third neutralization tank C for neutralization. Finally, after neutralization in the third neutralization tank C, it overflows into the fourth neutralization tank C4 for further neutralization.
[0048] In practice, a pH meter can be placed in each neutralization tank. The acid-base controller can obtain the detection results of each pH meter and use various methods to control the addition of reagents in each neutralization tank.
[0049] In one embodiment, reference is made to Figure 2 The acid-base controller 20 may include: a first control module 21 and a second control module 22. Wherein:
[0050] The first control module 21 is adapted to acquire the detection result of the pH meter, and when the detection result of the pH meter is higher than the corresponding upper limit of pH, control the corresponding acidic agent valve to open until the detection result of the pH meter is equal to the first intermediate pH value.
[0051] The second control module 22 is adapted to acquire the detection result of the pH meter, and when the detection result of the pH meter is lower than the corresponding lower pH limit, control the corresponding alkaline agent valve to open until the detection result of the pH meter is equal to the second intermediate pH value.
[0052] Wherein, the lower limit of pH is less than the second intermediate pH value, the second intermediate pH value is equal to the first intermediate pH value, and the first intermediate pH value is less than the upper limit of pH.
[0053] In practice, each neutralization tank has its own upper pH limit, lower pH limit, first intermediate pH value, and second intermediate pH value. The upper pH limit, lower pH limit, first intermediate pH value, and second intermediate pH value of any two neutralization tanks can be the same or different; this is not restricted here. The first control module 21 and the second control module 22 can control whether and how much reagent is added to each neutralization tank based on its corresponding upper pH limit, lower pH limit, first intermediate pH value, and second intermediate pH value.
[0054] For example, the upper limit of pH can be set to 8, the lower limit to 7.3, and the second intermediate pH value equal to the first intermediate pH value of 7.6. Both the first control module 21 and the second control module 22 can obtain the detection results from the pH meters in each neutralization tank. (Refer to...) Figure 1 Taking the first neutralization tank C1 as an example, when the pH value of the wastewater in the first neutralization tank C1 exceeds 8, the first control module 21 can control the first acidic agent valve T1 to open, adding acidic agent to the first neutralization tank C1, thus decreasing the pH value. When the pH value in the first neutralization tank C1 is 7.6, the first control module 21 can control the first acidic agent valve to close, stopping the addition of agent to the first neutralization tank C1. When the pH value of the wastewater in the first neutralization tank C1 is lower than 7.3, the second control module 22 can control the first alkaline agent valve P1 to open, adding alkaline agent to the first neutralization tank C1, thus increasing the pH value. When the pH value in the first neutralization tank C1 is 7.6, the first control module 21 can control the first alkaline agent valve P1 to close, stopping the addition of agent to the first neutralization tank C1.
[0055] The inventors discovered that when the second intermediate pH value is set equal to the first intermediate pH value, the stopping point for adding acidic and alkaline reagents to the neutralization tank corresponds to the same pH value, which is usually the target pH value for discharge requirements. If reagent addition is stopped when the wastewater in the neutralization tank reaches this intermediate pH value, the pH value of the fully mixed wastewater often exceeds or falls below this intermediate pH value as the mixing time between the reagent and wastewater increases. To meet discharge requirements, reagents need to be added again, ultimately leading to an increase in the amount of reagents required and thus an increase in reagent costs.
[0056] Therefore, in one embodiment of this utility model, the second intermediate pH value is less than the first intermediate pH value. At this time, the stopping time of adding acidic and alkaline agents to the neutralization tank corresponds to different pH values. Thus, by adjusting the first and second intermediate pH values, the amount of agent added can be reduced. In this way, even after the agent and wastewater are fully mixed, the discharge requirements can be met, thereby reducing the cost of the agent.
[0057] For example, the upper limit of pH can be set to 8, the lower limit to 7.3, the first intermediate pH value to be 7.8, and the second intermediate pH value to be 7.4. Taking the second neutralization tank C2 as an example, when the pH value of the wastewater in the second neutralization tank C2 exceeds 8, the first control module 21 can control the second acidic agent valve T2 to open, adding acidic agent to the second neutralization tank C2, thus reducing the pH value in the second neutralization tank C2. When the pH value in the second neutralization tank C2 is 7.4, the first control module 21 can control the second acidic agent valve to close, stopping the addition of agent to the second neutralization tank C2. When the pH value of the wastewater in the second neutralization tank C2 is lower than 7.3, the second control module 21 can control the second alkaline agent valve P2 to open, adding alkaline agent to the second neutralization tank C2, thus increasing the pH value in the second neutralization tank C2. When the pH value in the second neutralization tank C2 is 7.4, the second control module 22 can control the second alkaline agent valve P2 to open, stopping the addition of agents to the second neutralization tank C2.
[0058] In practical implementation, the first and second control modules can be implemented using corresponding hardware devices. Within the acid-base controller, a first and second control module can be set up for each neutralization tank, with each module controlling the addition of reagents to its respective neutralization tank. Alternatively, a shared first and second control module can be set up for all neutralization tanks, controlling the addition of reagents to all tanks.
[0059] In practice, regardless of whether the second intermediate pH value is equal to or less than the first intermediate pH value, both the first control module and the second control module can be implemented using hardware circuits.
[0060] Specifically, in one embodiment, reference is made to Figure 2 The first control module 21 may include: a first comparison circuit 211 and a second comparison circuit 212. Wherein:
[0061] The first comparison circuit 211 is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding upper limit value of pH, and when the detection result of the pH meter is higher than the corresponding upper limit value of pH, output a first control signal to the corresponding acidic agent valve to control the corresponding acidic agent valve to be turned on.
[0062] The second comparison circuit 212 is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding first intermediate pH value, and when the detection result of the pH meter is equal to the corresponding first intermediate pH value, output a second control signal to the corresponding acidic agent valve to control the corresponding acidic agent valve to open.
[0063] In practical implementation, both the first comparison circuit 211 and the second comparison circuit 212 can be implemented using comparators or logic circuits capable of comparison. The first comparison circuit 211 and the second comparison circuit 212 monitor the detection result of the pH meter in real time and output corresponding control signals based on the detection result of the pH meter.
[0064] In one embodiment, reference is made to Figure 2 The second control module 22 may include: a third comparison circuit 221 and a fourth comparison circuit 222. Wherein:
[0065] The third comparison circuit 221 is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding pH lower limit value, and when the detection result of the pH meter is lower than the corresponding pH lower limit value, output a third control signal to the corresponding alkaline agent valve to control the corresponding alkaline agent valve to be turned on.
[0066] The fourth comparison circuit 222 is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding second intermediate pH value, and when the detection result of the pH meter is equal to the corresponding second intermediate pH value, output a fourth control signal to the corresponding alkaline agent valve to control the corresponding alkaline agent valve to open.
[0067] In practical implementation, both the third comparison circuit 221 and the fourth comparison circuit 222 can be implemented using comparators or logic circuits capable of comparison. The third comparison circuit 221 and the fourth comparison circuit 222 monitor the detection results of the pH meter in real time and output corresponding control signals based on the detection results of the pH meter.
[0068] Taking the third neutralization tank C3 as an example, when the pH value of the wastewater in the third neutralization tank C3 exceeds 8, the first comparison circuit 211 can control the third acidic agent valve T3 to open, adding acidic agent to the third neutralization tank C3, thereby reducing the pH value in the third neutralization tank C3. When the pH value in the third neutralization tank C3 is 7.4, the second comparison circuit 212 can control the third acidic agent valve T3 to close, stopping the addition of agent to the third neutralization tank C3.
[0069] When the pH value of the wastewater in the third neutralization tank C3 is lower than 7.3, the third comparator circuit 221 can control the third alkaline agent valve P3 to open, adding alkaline agent to the third neutralization tank C3, thereby increasing the pH value in the third neutralization tank C3. When the pH value in the third neutralization tank C3 is 7.4, the fourth comparator circuit 222 can control the third alkaline agent valve P3 to close, stopping the addition of agent to the third neutralization tank C3.
[0070] In some embodiments, refer to Figure 1 The wastewater treatment system may also include an emergency organic wastewater tank. An emergency organic wastewater tank is a facility used to collect and store accidental organic wastewater during sudden environmental incidents. Its main purpose is to prevent high-concentration organic wastewater from directly entering the neutralization tank, thus avoiding serious environmental pollution.
[0071] In existing technologies, wastewater that meets the output requirements in the emergency organic wastewater tank is directly fed into the third neutralization tank C3 for acid-base neutralization treatment.
[0072] The inventors discovered that directly inputting wastewater from the emergency organic wastewater tank into the third neutralization tank C3 for acid-base neutralization treatment, and then having the neutralized wastewater overflow into the fourth neutralization tank C4 for acid-base neutralization treatment before being discharged, would result in insufficient mixing of the wastewater and the reagents in the emergency organic wastewater tank, thus affecting the stability of the effluent pH value.
[0073] Therefore, in one embodiment of this utility model, unlike the prior art, the output end of the organic wastewater emergency tank is connected to the first neutralization tank via an organic wastewater pipeline. That is, wastewater from the organic wastewater emergency tank is input into the first neutralization tank, thereby allowing the wastewater in the organic wastewater emergency tank to be treated sequentially through multiple neutralization tanks before being discharged. The wastewater in the organic wastewater emergency tank is thoroughly mixed with the reagents, thereby improving the stability of the effluent pH value.
[0074] In specific implementations, the wastewater treatment system may further include an organic wastewater equalization tank. Wastewater that does not meet the output requirements in the organic wastewater emergency tank can be discharged to the organic wastewater equalization tank, and then discharged from the organic wastewater equalization tank to the organic wastewater emergency tank. The organic wastewater equalization tank is used to regulate the quantity, quality, and temperature of the organic wastewater to ensure the stable operation of subsequent treatment processes.
[0075] In some embodiments, the wastewater treatment system may further include an inorganic wastewater emergency tank and an acid-base wastewater equalization tank. The inorganic wastewater emergency tank is a facility used to collect and store accidental inorganic wastewater during sudden environmental incidents. Its main purpose is to prevent high-concentration inorganic wastewater from directly entering the neutralization tank, thus avoiding serious environmental pollution. Inorganic wastewater input to the inorganic wastewater emergency tank may include: copper-containing wastewater, ammonia-containing wastewater, fluoride-containing wastewater, grinding wastewater, etc. Wastewater meeting the output standards in the inorganic wastewater emergency tank is discharged to the acid-base wastewater equalization tank.
[0076] The acid-base wastewater equalization tank is used to receive wastewater that requires acid-base neutralization treatment. Except for wastewater output from the inorganic wastewater emergency tank, plant wastewater and wastewater collected in the wastewater collection tank can all be fed into the acid-base wastewater equalization tank. The acid-base wastewater equalization tank is connected to the first neutralization tank C1 via a pipeline. A booster pump can be installed on this pipeline, and this booster pump can be connected to an acid-base controller, thereby adjusting the amount of wastewater output to the first neutralization tank C1 under the control of the acid-base controller.
[0077] In some embodiments, the wastewater treatment system may further include an outlet tank and a metering tank. The outlet tank is used to temporarily store treated, compliant water, providing a buffer zone for the effluent and allowing the water to settle briefly before discharge, further stabilizing the water quality. The metering tank can be implemented using a Parshall flume. The Parshall flume can be used to monitor wastewater flow and evaluate wastewater treatment effectiveness. By evaluating the treatment effect of the wastewater in the Parshall flume, a decision is made as to whether to discharge water from the outlet tank.
[0078] In practice, water overflows from the last of two or more neutralization tanks and is temporarily stored in a discharge tank. The discharge tank is connected to a metering tank via a first discharge pipe and to the inorganic wastewater emergency tank via a second discharge pipe. For example, refer to... Figure 1 The fourth neutralization tank C4 is connected to the metering tank via the first discharge pipe L1 and to the inorganic wastewater emergency tank via the second discharge pipe L2. A first discharge valve is installed on the first discharge pipe L1, and a second discharge valve is installed on the second discharge pipe L2. Both the first and second discharge valves are connected to an acid-base controller.
[0079] In specific implementation, the acid-base controller is adapted to obtain the pH measurement result in the metering tank, and when the pH measurement result meets the discharge requirements, control the discharge of wastewater in the metering tank, and when the pH measurement result does not meet the discharge requirements, control the wastewater in the metering tank to be transported to the inorganic wastewater emergency pool.
[0080] For example, refer to Figure 1 The acid-base controller can open the first discharge valve, allowing a small portion of the wastewater in the discharge tank to be discharged into the metering tank for treatment effect evaluation. The acid-base controller acquires the evaluation results of the wastewater treatment effect in the metering tank. If the wastewater treatment effect in the metering tank meets the discharge requirements, the controller controls the metering tank to discharge the wastewater to the municipal sewage outlet in the plant area. If the wastewater treatment effect in the metering tank does not meet the discharge requirements, the controller opens the second discharge valve, causing the wastewater in the discharge tank to be discharged into the inorganic wastewater emergency tank.
[0081] An acid-base controller can be used to control the flow of wastewater in the metering tank and discharge pool, ensuring that the discharged wastewater meets discharge requirements.
[0082] In some embodiments, refer to Figure 1 The wastewater treatment system may further include a wastewater collection tank. The wastewater collection tank can be used to collect wastewater generated during semiconductor manufacturing. The wastewater collection tank may include acid / alkali wastewater collection tanks and general wastewater collection tanks. If the wastewater collected in any wastewater collection tank requires acid / alkali neutralization treatment, the wastewater can be fed into an acid / alkali wastewater equalization tank.
[0083] It should be noted that the corresponding invention can be installed on the connecting pipelines between the wastewater collection tank, the inorganic wastewater emergency pool, the acid and alkali wastewater regulating pool, the organic wastewater emergency pool, the discharge pool, and the metering tank. The valve is connected to the acid and alkali controller, so that the acid and alkali controller can automatically control the entire wastewater treatment system.
[0084] As can be seen from the above, the wastewater treatment system in this embodiment of the invention can accurately control the amount of reagent added by setting an acid-base controller, thereby reducing reagent costs. Furthermore, by setting the second intermediate pH value to be lower than the first intermediate pH value, the accuracy of reagent addition can be further improved, thus further reducing reagent costs. Moreover, by adjusting the connection between the organic wastewater emergency tank and the first neutralization tank, the stability of the pH value of the effluent from the wastewater treatment system can be effectively improved.
[0085] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.
Claims
1. A wastewater treatment system, characterized by, include: Two or more neutralization tanks, and a reagent acid-base controller; each neutralization tank is connected to the reagent tank via reagent pipelines; each reagent pipeline is equipped with a reagent valve; each neutralization tank is equipped with a pH meter; The acid-base controller is connected to each of the pH meters and each of the reagent valves, and the acid-base controller automatically controls the opening and closing of the corresponding reagent valves based on the detection results of the pH meters.
2. The wastewater treatment system of claim 1, wherein, The acid-base controller includes: The first control module is adapted to acquire the detection result of the pH meter, and when the detection result of the pH meter is higher than the corresponding upper limit of pH, control the corresponding acidic agent valve to open until the detection result of the pH meter is equal to the first intermediate pH value. The second control module is adapted to acquire the detection result of the pH meter. When the detection result of the pH meter is lower than the corresponding lower pH limit, it controls the corresponding alkaline agent valve to open until the detection result of the pH meter is equal to the second intermediate pH value. Wherein, the lower limit of pH is less than the second intermediate pH value, the second intermediate pH value is less than the first intermediate pH value, and the first intermediate pH value is less than the upper limit of pH.
3. The wastewater treatment system of claim 1, wherein, The acid-base controller includes: The first control module is adapted to acquire the detection result of the pH meter, and when the detection result of the pH meter is higher than the corresponding upper limit of pH, control the corresponding acidic agent valve to open until the detection result of the pH meter is equal to the first intermediate pH value. The second control module is adapted to acquire the detection result of the pH meter. When the detection result of the pH meter is lower than the corresponding lower pH limit, it controls the corresponding alkaline agent valve to open until the detection result of the pH meter is equal to the second intermediate pH value. Wherein, the lower limit of pH is less than the second intermediate pH value, the second intermediate pH value is equal to the first intermediate pH value, and the first intermediate pH value is less than the upper limit of pH.
4. The wastewater treatment system of claim 2 or 3, wherein The first control module includes: The first comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding upper limit value of pH, and when the detection result of the pH meter is higher than the corresponding upper limit value of pH, output a first control signal to the corresponding acidic agent valve to control the corresponding acidic agent valve to be turned on. The second comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding first intermediate pH value, and when the detection result of the pH meter is equal to the corresponding first intermediate pH value, output a second control signal to the corresponding acidic agent valve to control the corresponding acidic agent valve to open.
5. The wastewater treatment system of claim 2 or 3, wherein The second control module includes: The third comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding pH lower limit value, and when the detection result of the pH meter is lower than the corresponding pH lower limit value, output a third control signal to the corresponding alkaline agent valve to control the corresponding alkaline agent valve to be turned on. The fourth comparison circuit is adapted to acquire the detection result of the pH meter, compare the detection result of the pH meter with the corresponding second intermediate pH value, and when the detection result of the pH meter is equal to the corresponding second intermediate pH value, output a fourth control signal to the corresponding alkaline agent valve to control the corresponding alkaline agent valve to open.
6. The wastewater treatment system of claim 2, wherein, According to the flow direction of the wastewater, the two or more neutralization tanks sequentially include: a first neutralization tank, a second neutralization tank, a third neutralization tank, and a fourth neutralization tank.
7. The wastewater treatment system of claim 6, wherein Also includes: An emergency organic wastewater tank; the output end of the emergency organic wastewater tank is connected to the first neutralization tank via an organic wastewater pipeline.
8. The wastewater treatment system of claim 6, wherein, Also includes: Inorganic wastewater emergency tank and acid / alkali wastewater equalization tank; among which: The inorganic wastewater emergency tank is suitable for receiving inorganic wastewater; the output end of the inorganic wastewater emergency tank is connected to the acid-base wastewater equalization tank through an inorganic wastewater pipeline; The output end of the acid-base wastewater equalization tank is connected to the first neutralization tank via a pipeline.
9. The wastewater treatment system of claim 8, wherein, Also includes: The discharge pool and metering tank; among which: The output end of the discharge pool is connected to the metering tank through the first discharge water pipeline, and to the inorganic wastewater emergency pool through the second discharge water pipeline; The acid-base controller is adapted to acquire the pH measurement result in the metering tank, and control the discharge of wastewater in the metering tank when the pH measurement result meets the discharge requirements, and control the wastewater in the metering tank to be transported to the inorganic wastewater emergency pool when the pH measurement result does not meet the discharge requirements.
10. The wastewater treatment system of claim 6, wherein, Also includes: Wastewater collection tank is used to collect wastewater and transport it to the acid-base wastewater equalization tank.