Deposition equipment

Abstract

The utility model provides deposition equipment which comprises a furnace tube body, a gas inlet system located at the gas inlet end of the furnace tube body, a gas outlet system located at the gas outlet end of the furnace tube body and a protection system located on the inner wall of the furnace tube body, the gas inlet system is used for introducing process gas into the furnace tube body, and the gas outlet system is used for extracting gas in the furnace tube body. The gas inlet system is used for providing process gas required by deposition, and the gas outlet system is used for extracting gas to ensure the purity of the process gas and the pressure of the reaction cavity. The protection system comprises a gas inlet pipeline and a gas extraction pipeline, the gas inlet pipeline is used for outputting protection gas, the gas extraction pipeline is used for extracting gas of the furnace tube body from the gas inlet pipeline side, the protection gas flows from the gas inlet pipeline to the gas extraction pipeline, and the gas inlet pipeline and the gas extraction pipeline are arranged on the inner wall of the furnace tube body. Therefore, the protective gas forms an isolation air curtain on the inner wall of the furnace tube main body to isolate the process gas from the inner wall of the furnace tube main body, thereby avoiding the fragmentation problem caused by coating of the inner wall of the furnace tube main body.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic or semiconductor manufacturing, and in particular to a deposition device. Background Technology

[0002] A deposition apparatus is used to perform deposition processes. It may include a furnace tube body, which is a tubular structure with a hollow interior serving as a reaction chamber. A substrate can be placed within the reaction chamber for deposition processes to be performed on the substrate. Examples of deposition apparatus include low-pressure chemical vapor deposition (LPCVD) equipment, atmospheric pressure chemical vapor deposition (APCVD) equipment, and plasma-enhanced chemical vapor deposition (PECVD).

[0003] However, in this structure, a thin film easily forms on the inner wall of the furnace tube, making it prone to breakage. This is especially true when a heating device is installed around the furnace tube; this device heats the interior of the furnace tube during deposition, bringing the reaction chamber inside to the required reaction temperature for deposition. (Reference) Figure 1 The diagram shows the relative positions of the furnace tube body 11 and the internal substrate. The furnace tube body 11 has a circular cross-section, and the substrate 100 can be placed parallel to this cross-section (see reference). Figure 1 1A in the figure), or it can be set perpendicular to this section (see reference). Figure 1 (1B in the text). However, in this structure, heat is gradually conducted from the outside of the furnace tube body 11 to the substrate 100 in the middle of the furnace tube body 11, as shown in the reference. Figure 1 As indicated by the arrow pointing from the outside to the inside of the circle, the temperature of the furnace tube body 11 is much higher than that of the substrate 100. This results in a higher deposition rate of the film on the inner wall of the furnace tube body 11 compared to the deposition rate on the substrate 100. The large amount of film deposition can easily lead to cracking of the furnace tube body 11.

[0004] Currently, the lifespan of the furnace tube body 11 is extended by setting an inner tube inside the furnace tube body 11 to form a double-tube structure or by coating the inside of the furnace tube body 11, but the effect is not ideal. Utility Model Content

[0005] In view of this, the purpose of this disclosure is to provide a deposition apparatus that forms a gas barrier on the inner wall of the furnace tube body, thereby isolating the process gas from the inner wall of the furnace tube body and avoiding the problem of cracking caused by the coating on the inner wall of the furnace tube body.

[0006] This disclosure provides a deposition apparatus, including:

[0007] Furnace tube body;

[0008] The gas inlet system located at the gas inlet end of the furnace tube body is used to introduce process gas into the furnace tube body.

[0009] The gas outlet system located at the gas outlet end of the furnace tube body is used to extract gas from inside the furnace tube body;

[0010] The protective system installed on the inner wall of the furnace tube body includes an inlet pipe and an extraction pipe. The inlet pipe is used to output protective gas, and the extraction pipe is used to extract gas from the furnace tube body from the inlet pipe side.

[0011] Optionally, the air intake pipe extends along the inner wall of the furnace tube body and includes a main air intake pipe and multiple branch air intake pipes. The main air intake pipe extends along the axial direction of the furnace tube body, and the multiple branch air intake pipes extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the main air intake pipe.

[0012] The exhaust pipe extends along the inner wall of the furnace tube body and includes a main exhaust pipe and multiple exhaust branch pipes. The main exhaust pipe extends along the axial direction of the furnace tube body, and the multiple exhaust branch pipes extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the main exhaust pipe.

[0013] The air inlet branch line and the air extraction branch line are arranged at intervals along the axial direction of the furnace tube body.

[0014] Optionally, the angle between the extended plane of the air intake branch pipe and the axial direction of the furnace tube body is greater than 80°, and the angle between the extended plane of the air extraction branch pipe and the axial direction of the furnace tube body is greater than 80°.

[0015] Optionally, if the first pipe among the plurality of intake pipes has an exhaust pipe on both the intake end side and the exhaust end side, then the first pipe has a first air hole on both the intake end side and the exhaust end side; if the second pipe among the plurality of exhaust pipes has an intake pipe on both the intake end side and the exhaust end side, then the second pipe has a second air hole on both the intake end side and the exhaust end side.

[0016] Optionally, the interval between the intake manifold and the adjacent exhaust manifold is 100-500 mm, and the gas flow rate between the intake manifold and the adjacent exhaust manifold is 5 L / min to 50 L / min.

[0017] Optionally, both the air inlet pipe and the air extraction pipe extend spirally along the inner wall of the furnace tube body and are spaced apart along the axial direction of the furnace tube body.

[0018] Optionally, the air intake pipe has a first air hole on both the air intake side and the air extraction side; the air extraction pipe has a second air hole on both the air intake side and the air extraction side.

[0019] Optionally, the size range of the first pore and the second pore is 0.5-3mm, the distance between two adjacent first pores is 10-100mm, and the distance between two adjacent second pores is 10-100mm.

[0020] Optionally, the air inlet pipe is connected to the protective gas passage of the furnace inlet flange at the air inlet end; the exhaust pipe is connected to the exhaust passage of the furnace tail flange at the air outlet end.

[0021] Optionally, the furnace tube body is a quartz tube, and a heating device 1 is provided around the quartz tube for heating the interior of the furnace tube body during the deposition process.

[0022] This disclosure provides a deposition apparatus. The protection system includes an inlet pipe and an extraction pipe. The inlet pipe is used to output protective gas, and the extraction pipe is used to extract gas from the furnace tube body from the inlet pipe side. Thus, the protective gas flows from the inlet pipe to the extraction pipe. Since the inlet pipe and the extraction pipe are located on the inner wall of the furnace tube body, the protective gas forms an isolation gas curtain on the inner wall of the furnace tube body, thereby isolating the process gas from the inner wall of the furnace tube body and avoiding the problem of cracking caused by the coating on the inner wall of the furnace tube body.

[0023] This disclosure provides a deposition apparatus, including:

[0024] Furnace tube body;

[0025] An air intake system located at the air inlet end of the furnace tube body is used to introduce process gas into the furnace tube body. The air intake system includes an air intake plate and a furnace door. The furnace door is connected to the air inlet end of the furnace tube body through a furnace port flange. The air intake plate is located on the side of the furnace door away from the furnace tube body. The air intake plate includes multiple air inlet connectors and multiple first gas passages that are connected to the multiple air inlet connectors and are independent of each other. The furnace door includes multiple second gas passages corresponding to the first gas passages. The first ends of the multiple second gas passages are respectively connected to the multiple first gas passages, and the second ends extend into the interior of the furnace tube body.

[0026] The gas outlet system located at the gas outlet end of the furnace tube body is used to extract gas from inside the furnace tube body.

[0027] Optionally, the furnace door includes a plurality of first air inlets located at a first end and a plurality of air outlet slots located at a second end; the plurality of first air inlets are respectively connected to the plurality of first air passages.

[0028] The furnace door also includes multiple gas distribution passages between the multiple first air inlets and the multiple air outlets; the multiple gas distribution passages are connected to the first air inlets on the side facing the first air inlets, and are connected to the air outlets on the side facing the air outlets; the area of ​​the gas distribution passages in a plane parallel to the surface of the furnace door is greater than the area of ​​the air outlets in a plane parallel to the surface of the furnace door.

[0029] Optionally, the plurality of gas outlet slots extend radially in a plane parallel to the surface of the furnace door, with a first center point as the center, and are arranged circumferentially; the plurality of gas distribution passages extend radially in a plane parallel to the surface of the furnace door, with a second center point as the center, and are distributed circumferentially.

[0030] Optionally, the plurality of gas outlet slots include multiple sets of gas outlet slots. The gas outlet slots of the same set are arranged radially at intervals in a plane parallel to the surface of the furnace door, with the first center point as the center, and the gas outlet slots of the same set are connected to the same gas distribution passage.

[0031] Optionally, the gas distribution passage forms a fan-shaped region centered on the second center point in a plane parallel to the surface of the furnace door.

[0032] Optionally, the furnace door further includes the plurality of guide grooves and the plurality of first vent holes; the side of the plurality of guide grooves facing the plurality of first vent holes is connected to the plurality of first vent holes respectively, the side of the plurality of guide grooves facing the plurality of first vent holes is connected to the inlet of the plurality of first vent holes, and the outlet of the plurality of first vent holes is connected to the inlet of the plurality of gas distribution passages.

[0033] The plurality of guide grooves extend radially in a plane parallel to the surface of the furnace door with a third center point as the center, and are distributed circumferentially; the plurality of first vent holes form a circular trajectory in a plane parallel to the surface of the furnace door with a fourth center point as the center.

[0034] Optionally, at least one of the second air passages includes multiple third sub-passes, each of which has one first air inlet, one air distribution passage, one guide groove, and one first vent hole, and each of the third sub-passes has one or more air outlet grooves.

[0035] Optionally, multiple first air inlets belonging to the same second air passage form a circular trajectory with the fifth center point as the center in a plane parallel to the surface of the furnace door. The distance between the first air inlets of different second air passages and the fifth center point is different.

[0036] In a plane parallel to the surface of the furnace door, guide grooves belonging to the same second gas passage have the same radial dimension, while guide grooves in different second gas passages have different radial dimensions.

[0037] Optionally, the first center point, the second center point, the third center point, and the fourth center point are located on the center line of the furnace door, and the center line is perpendicular to the surface of the furnace door and passes through the center point of the surface of the furnace door.

[0038] Optionally, the first air inlet, the air distribution passage, the guide groove, the first vent, and the air outlet are all arranged at periodic intervals according to their respective second air passages.

[0039] Optionally, the air intake plate includes a plurality of second air intake holes located at a first end and a plurality of first air outlet holes located at a second end; the plurality of second air intake holes are respectively connected to the plurality of air intake connectors, and the plurality of first air outlet holes are connected to the second air passage.

[0040] The air intake plate also includes multiple air distribution slots. Each air distribution slot has a third air intake hole on the side facing the second air intake hole, which is used to connect to the second air intake hole. Each air distribution slot also has a second air outlet hole on the side facing the first air outlet hole, which is used to connect to the first air outlet hole. At least one of the multiple air distribution slots is a target air distribution slot. The number of second air outlet holes connected to the target air distribution slot is greater than the number of third air intake holes, so that the number of first air outlet holes is greater than the number of second air intake holes.

[0041] Optionally, at least one of the first air passages includes multiple first sub-passes and multiple second sub-passes, each first sub-passe having one second air inlet and each second sub-passe having one first air outlet, and multiple first sub-passes and multiple second sub-passes belonging to the same first air passage are all connected to the same air distribution slot.

[0042] Optionally, multiple second air inlets belonging to the same first air passage form a circular trajectory with the sixth center point as the center in a plane parallel to the surface of the furnace door. The distance between the second air inlets of different first air passages and the sixth center point is different.

[0043] Multiple first air outlets belonging to the same first air passage form a circular trajectory with the seventh center point as the center in a plane parallel to the surface of the furnace door. The distance between the first air outlet of different first air passages and the seventh center point is different.

[0044] The plurality of gas distribution slots extend radially in a plane parallel to the surface of the furnace door with the eighth center point as the center, and are distributed circumferentially; in a plane parallel to the surface of the furnace door, gas distribution slots belonging to the same first gas passage have the same radial dimension, and gas distribution slots in different first gas passages have different radial dimensions.

[0045] Optionally, the air intake plate further includes a heating groove, in which a heating wire is disposed, and the heating groove is located on the periphery of the plurality of first air passages.

[0046] Optionally, the heating groove is located around the plurality of first air inlets.

[0047] Optionally, the air intake system further includes a flow equalization cylinder on the side of the furnace door away from the air intake plate, the flow equalization cylinder comprising a multi-layer flow equalization structure stacked on top of each other, the flow equalization structure including vent holes.

[0048] This disclosure provides a deposition apparatus. The gas intake system may include a gas intake plate and a furnace door. The furnace door is connected to the gas intake end of the furnace tube body via a furnace port flange. The gas intake plate is located on the side of the furnace door away from the furnace tube body. The gas intake plate includes multiple gas intake connectors and multiple independent first gas passages connected to the multiple gas intake connectors. The furnace door includes multiple second gas passages corresponding to the first gas passages. The first ends of the multiple second gas passages are respectively connected to the multiple first gas passages, and the second ends extend into the interior of the furnace tube body. In this way, the gas intake plate and the furnace door can be set independently, which is convenient for maintenance. The multiple first gas passages and the multiple second gas passages are set independently. Different gas passages can be used to circulate different process gases, isolating the gas passages of different process gases and avoiding cross-contamination of various process gases.

[0049] This disclosure provides a deposition apparatus, including:

[0050] Furnace tube body;

[0051] The gas inlet system located at the gas inlet end of the furnace tube body is used to introduce process gas into the furnace tube body; the gas inlet system includes a gas passage and a heating structure, the heating structure being located around the gas passage and used to heat the gas in the gas passage;

[0052] The gas outlet system located at the gas outlet end of the furnace tube body is used to extract gas from inside the furnace tube body.

[0053] Optionally, the air intake system includes an air intake plate and a furnace door. The furnace door is connected to the air intake end of the furnace tube body via a furnace port flange. The air intake plate is located on the side of the furnace door away from the furnace tube body. The air intake plate includes multiple air intake connectors and multiple first air passages that are connected to the multiple air intake connectors and are independent of each other. The furnace door includes multiple second air passages that correspond one-to-one with the first air passages. The first ends of the multiple second air passages are respectively connected to the multiple first air passages, and the second ends extend into the interior of the furnace tube body.

[0054] The air intake plate also includes a heating groove, in which a heating wire is provided, and the heating groove is located on the periphery of multiple first air passages.

[0055] Some embodiments of this disclosure provide a deposition apparatus. The air intake system may include an air passage and a heating structure. The heating structure is located around the air passage and is used to heat the gas in the air passage to prevent the gas from being blocked by powder in the first air passage.

[0056] In summary, some embodiments of this disclosure have the following beneficial effects:

[0057] 1. Set up a protection system: The protective gas forms an isolation gas curtain on the inner wall of the furnace tube body, thereby isolating the process gas from the inner wall of the furnace tube body and avoiding the cracking problem caused by the coating on the inner wall of the furnace tube body; at the same time, it improves the utilization rate of the process gas, so that the process gas is mainly concentrated in the coating area inside the cavity.

[0058] 2. An air intake system including an air intake plate and a furnace door is set up: the air intake plate and the furnace door can be set up independently, which is convenient for disassembly and maintenance; multiple first air passages in the air intake plate are set up independently, and multiple second air passages in the furnace door are set up independently. Different air passages can be used to circulate different process gases, thus isolating the air passages of different process gases and avoiding cross-contamination of various process gases.

[0059] 3. An air intake system including an air passage and a heating structure is set up: the gas in the air passage is heated to avoid the gas from being blocked by powder in the first air passage. Attached Figure Description

[0060] To more clearly illustrate the technical solutions in some embodiments of this disclosure, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0061] Figure 1 This is a schematic diagram showing the relative positions of the furnace tube body and the internal substrate;

[0062] Figure 2 and Figure 3 This is a schematic diagram of the structure of a deposition apparatus provided in some embodiments of this disclosure;

[0063] Figure 4 A schematic diagram of another deposition apparatus provided by some embodiments of this disclosure is shown;

[0064] Figure 5 This is a schematic diagram of the air intake system in a deposition apparatus provided in some embodiments of the present disclosure;

[0065] Figure 6 and Figure 7 This is a schematic diagram of the structure of an air intake disc provided in some embodiments of this disclosure;

[0066] Figure 8 and Figure 9 A cross-sectional structural schematic diagram of a furnace door provided for some embodiments of this disclosure;

[0067] Figure 10 This is a schematic diagram of the structure of a flow uniform cylinder provided in some embodiments of this disclosure. Detailed Implementation

[0068] To enable those skilled in the art to better understand the present disclosure, the technical solutions in some embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, and not all of them. All other embodiments obtained by those skilled in the art based on some embodiments of the present disclosure without creative effort are within the scope of protection of the present disclosure.

[0069] Numerous specific details are set forth in the following description in order to provide a full understanding of this disclosure. However, this disclosure may also be implemented in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of this disclosure. Therefore, this disclosure is not limited to the specific embodiments disclosed below.

[0070] This disclosure is described in detail with reference to the schematic diagrams. In the detailed description of the embodiments of this disclosure, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not to scale. Furthermore, the schematic diagrams are merely examples and should not be construed as limiting the scope of protection of this disclosure. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0071] To better understand the technical solutions and effects of this disclosure, the specific embodiments will be described in detail below with reference to the accompanying drawings.

[0072] In some embodiments of this disclosure, see Figure 2 and Figure 3 As shown in the figure, this figure is a schematic diagram of the structure of a deposition apparatus provided in some embodiments of this disclosure, wherein... Figure 2 This is a 3D schematic diagram. Figure 3 This is a side view diagram.

[0073] The deposition equipment includes a furnace tube body 11, an inlet system 20 located at the inlet end of the furnace tube body 11, and an outlet system located at the outlet end of the furnace tube body 11. The inlet system 20 is used to introduce process gas into the furnace tube body 11, and the outlet system is used to extract gas from the furnace tube body 11. In this way, the inlet system 20 provides the process gas required for deposition, and the outlet system extracts gas to ensure the purity of the process gas and the pressure of the reaction chamber, so that the reaction chamber meets the deposition requirements.

[0074] The deposition equipment can be a horizontal closed-tube structure. The air intake system includes a furnace door 21, which fits into a furnace opening flange 14, located at the air intake end of the furnace tube body 11. The exhaust system also includes a rear sealing plate with an exhaust port, which fits into a furnace tail flange 15, located at the air outlet end of the furnace tube body 11. The furnace door 21 at the air intake end and the rear sealing plate at the air outlet end provide a vacuum environment for the cavity inside the furnace tube body 11. Both the furnace door and the rear sealing plate can be made of metal. The air intake system 20 can be located at the furnace door of the furnace opening flange 14; the protection system 10 can be located on the inner wall of the furnace tube body 11.

[0075] The furnace tube body 11 may contain a substrate fixing device for placing substrates. This device may include, for example, a paddle 18 and a carrier 19. The paddle 18 is connected to the furnace door at the gas inlet. During the process, the carrier 19 is placed on the paddle 18 to hold the substrate. The paddle 18 carries the carrier 19 and the substrate onto it into the cavity for deposition. The paddle 18 is fixed and sealed by a paddle barrel 17 to ensure a vacuum environment within the cavity. The paddle 18 can be made of materials such as SiC, quartz glass, alumina ceramic, silicon nitride ceramic, or high-temperature alloys, including alloys containing elements such as nickel, chromium, and molybdenum. The carrier 19 may include a first carrier 192 and a second carrier 191 on the first carrier 192. The second carrier 191 is used to hold the substrate.

[0076] Process gases are gases required during the processing and can include thin film deposition gases, doping gases, and purge gases. Examples of thin film deposition gases include SiH4 and O2, examples of doping gases include BCl3 and PH3, and examples of purge gases include N2.

[0077] In Example 1, the deposition equipment also includes a protection system 10 located on the inner wall of the furnace tube body 11. The protection system 10 in some embodiments of this disclosure is described below.

[0078] The protection system 10 includes an inlet pipe 12 and an extraction pipe 13. The inlet pipe 12 outputs protective gas, and the extraction pipe 13 extracts gas from the furnace tube body 11 from the inlet pipe 12 side. Thus, the protective gas flows from the inlet pipe 12 to the extraction pipe 13. Since the inlet pipe 12 and the extraction pipe 13 are located on the inner wall of the furnace tube body 11, the protective gas forms an isolation curtain on the inner wall of the furnace tube body 11, thereby isolating the process gas from the inner wall of the furnace tube body 11 and preventing cracking caused by coating on the inner wall of the furnace tube body 11. Furthermore, the presence of this isolation curtain concentrates the process gas in the central region inside the furnace tube body 11, primarily for depositing a film layer on the substrate inside the furnace tube body 11, improving the utilization rate of the process gas. The protective gas can be a non-reactive gas, such as helium or nitrogen.

[0079] In some embodiments of this disclosure, reference is made to Figure 2 As shown, the air inlet pipe 12 extends along the inner wall of the furnace tube body 11, including a main air inlet pipe 121 and multiple branch air inlet pipes 122. The main air inlet pipe 121 extends axially along the furnace tube body 11, and the multiple branch air inlet pipes 122 extend circumferentially along the furnace tube body 11, and are respectively connected to different positions of the main air inlet pipe 121, that is, the multiple branch air inlet pipes 122 can each be a ring structure. In this way, the protective gas in the main air inlet pipe 121 can be connected to each branch air inlet pipe 122 through different connection positions, thereby utilizing at least one of the main air inlet pipe 121 and branch air inlet pipes 122 to output protective gas, making the output range of protective gas wider and the protective effect on the inner wall of the furnace tube body 11 stronger.

[0080] refer to Figure 2 As shown, the extraction pipe 13 extends along the inner wall of the furnace tube body 11, including a main extraction pipe 131 and multiple extraction branch pipes 132. The main extraction pipe 131 extends axially along the furnace tube body 11, and the multiple extraction branch pipes 132 extend circumferentially along the furnace tube body 11, and are respectively connected to different positions of the main extraction pipe 131. That is, each of the multiple extraction branch pipes 132 can be a ring structure. The axial direction of the furnace tube body 11 is the direction between the air inlet end and the air outlet end of the furnace tube body 11, and the circumferential direction refers to the circumferential direction in a plane that forms a certain angle with the cross section of the furnace tube body 11 perpendicular to the airflow direction, and this angle is greater than or equal to 0°. In this way, the gas extracted by each extraction branch pipe 132 can be connected to the main extraction branch pipe 131 through different connection points, thereby using at least one of the main extraction branch pipe 131 and extraction branch pipe 132 to extract the protective gas, so that the extraction range of the protective gas is wider, avoiding the large-scale diffusion of the protective gas into the furnace tube body 11 and affecting the reaction, while providing strong protection for the inner wall of the furnace tube body 11.

[0081] The intake branch pipe 122 and the exhaust branch pipe 132 are spaced apart along the axial direction of the furnace tube body 11. In this way, the intake branch pipe 122 and the adjacent exhaust branch pipe 132 form an isolation air curtain. When there are a large number of intake branch pipes 122 and exhaust branch pipes 132, multiple isolation air curtains can be formed on the inner wall of the furnace tube body 11, realizing regional isolation of the inner wall of the furnace tube body 11, which has a good isolation effect and prevents the fragmentation caused by the film formation on the inner wall of the furnace tube body 11.

[0082] Specifically, the extension plane of the inlet branch pipe 122 and the axial direction of the furnace tube body 11 can be perpendicular or not perpendicular; for example, the included angle between them can be greater than 80°, i.e., they are in a near-perpendicular state. Similarly, the extension plane of the exhaust branch pipe 132 and the axial direction of the furnace tube body 11 can be perpendicular or not perpendicular; for example, the included angle between them can be greater than 80°, i.e., they are in a near-perpendicular state. This ensures that the flow direction of the protective gas in the isolation gas curtain is close to the axial direction of the furnace tube body 11, reducing excessive diffusion of the protective gas into the central area of ​​the furnace tube body 11 caused by circumferential flow. This facilitates the entry and extraction of the protective gas, forming an gas curtain close to the inner wall of the furnace tube body 11.

[0083] If a first pipeline exists among multiple inlet branch pipelines 122, and the first pipeline has an extraction branch pipeline 132 on both the inlet and extraction ends, then the first pipeline has a first vent on both the inlet and extraction ends. This allows the first pipeline to output protective gas to both the inlet and extraction ends, which is beneficial for forming a continuous gas curtain within the entire cavity and thus providing a wider protection range. Conversely, if the first pipeline only has an extraction branch pipeline 132 on either the inlet or extraction end, it indicates that the first pipeline is located at the end of the furnace tube body 11. In this case, the first pipeline can have a first vent on the side with the extraction branch pipeline 132 to avoid wasting protective gas. The first vents can be evenly distributed on the inlet branch pipeline 122.

[0084] If the second pipeline among the plurality of extraction branch pipelines 132 has an intake branch pipeline 122 on both the intake end side and the extraction end side, then the second pipeline has a second vent hole on both the intake end side and the extraction end side, allowing the second pipeline to extract gas from both sides, resulting in a wider gas extraction range. Conversely, if the second pipeline only has an intake branch pipeline 122 on either the intake end side or the extraction end side, it indicates that the second pipeline is located at the end of the furnace tube body 11. In this case, the second pipeline can have a second vent hole on the side where the intake branch pipeline 122 is located to avoid unnecessary gas extraction. The second vent holes can be evenly distributed on the extraction branch pipeline 132.

[0085] The first and second vents can be arranged opposite each other or evenly distributed. Protective gas is uniformly ejected from the first vents of multiple annular inlet pipes 122 and drawn away through the second vents of multiple annular exhaust pipes 132, forming an annular isolation air curtain between adjacent inlet pipes 122 and exhaust pipes 132 (protective gas flow direction reference). Figure 2 (In the direction of the thick arrow), the process gas in the cavity is isolated from the inner wall of the furnace tube body 11, reducing the film deposition on the inner wall of the furnace tube body 11 and preventing the furnace tube body from breaking.

[0086] In specific implementation, the dimensions of the first and second pores range from 0.5 to 3 mm. When the first and second pores are circular, the dimension is the diameter of the circle; when the first and second pores are polygonal, the dimension is the side length of the polygon. The depth of the first and second pores is determined based on the thickness of the inlet pipe 122 and the extraction pipe 132. This avoids the problems of excessive gas flow due to overly large pores, which leads to gas waste and affects the deposition effect after diffusion, and insufficient gas flow due to overly small pores, which leads to insufficient protection. This is conducive to forming a uniform air curtain.

[0087] The spacing between two adjacent first pores is 10-100mm, and the spacing between two adjacent second pores is 10-100mm. This avoids the problem of excessive gas flow due to overly dense pores, which leads to gas waste and affects the deposition effect after diffusion, as well as the problem of insufficient gas flow due to overly sparse pores, which leads to insufficient protection. This is conducive to forming a uniform gas curtain.

[0088] In specific implementation, the interval between the inlet branch pipe 122 and the adjacent exhaust branch pipe 132 is 100-500mm. The number of inlet branch pipes 122 and exhaust branch pipes 132 can be determined according to this interval range and the axial dimension of the furnace tube body 11. This ensures the uniformity of airflow and avoids problems such as low extraction efficiency of protective gas due to excessively large intervals, which would prevent the formation of a continuous and uniform gas curtain on the inner wall of the furnace tube body 11, or gas diffusion affecting the deposition process in the cavity. It also avoids gas waste due to excessively small intervals. The gas flow rate between the inlet branch pipe 122 and the adjacent exhaust branch pipe 132 is 5L / min to 50L / min. This ensures a suitable gas flow rate and avoids problems such as gas waste due to excessive gas flow, inability to form a continuous and uniform gas curtain on the inner wall of the furnace tube body 11, and diffusion affecting the deposition effect. It also avoids problems such as insufficient gas flow leading to insufficient protection due to the inability to form a continuous and uniform gas curtain on the inner wall of the furnace tube body 11.

[0089] In practical implementation, the number of intake main lines 121 and exhaust main lines 131 can be determined according to the actual situation. There can be one or more intake main lines 121, for example, two or more. There can also be one or more exhaust main lines 131, for example, two or more. Multiple intake main lines 121 and multiple exhaust main lines 131 are arranged in parallel. One intake branch line 122 can connect to multiple intake main lines 121 to make the airflow at different positions of the intake branch line 122 more uniform. One exhaust branch line 132 can connect to multiple exhaust main lines 131 to make the airflow at different positions of the exhaust branch line 132 more uniform.

[0090] When there are multiple main inlet pipes 121 and multiple exhaust pipes 131, they can be spaced apart around the furnace tube body 11 to balance the air flow at each position of the main inlet pipes 122 and the exhaust pipes 132. For example, the two main inlet pipes 121 can be located on the upper and lower sides of the furnace tube body 11, respectively, and the two exhaust pipes 131 can be located on the side walls of different sides of the furnace tube body 11. Here, the side wall refers to the side wall between the inlet end and the outlet end.

[0091] When the intake pipe 12 includes an intake main pipe 121 and an intake branch pipe 122, the intake main pipe 121 is connected to the protective gas passage, which means that the intake main pipe 121 serves as a passage between the protective gas passage and the intake branch pipe 122. The intake main pipe 121 may or may not have air holes. The size of the air holes on the intake main pipe 121 ranges from 0.5 to 3 mm, and the distance between two adjacent air holes ranges from 10 to 100 mm. When the exhaust pipe 13 includes an exhaust main pipe 131 and an exhaust branch pipe 132, the exhaust main pipe 131 is connected to the exhaust passage, which means that the exhaust main pipe 131 serves as a passage between the exhaust passage and the exhaust branch pipe 132. The exhaust main pipe 131 may or may not have air holes. The size of the air holes on the exhaust main pipe 131 ranges from 0.5 to 3 mm, and the distance between two adjacent air holes ranges from 10 to 100 mm.

[0092] In some embodiments of this disclosure, reference is made to Figure 4 The diagram shows a structural schematic of another deposition apparatus provided in some embodiments of this disclosure. Both the inlet pipe 12 and the extraction pipe 13 extend spirally along the inner wall of the furnace tube body 11 and are spaced apart axially along the furnace tube body 11. That is, the inlet pipe 12 and the extraction pipe 13 form a double-helix structure, extending in parallel directions and spaced apart, thus forming a segmented isolation gas curtain. In this structure, both the inlet pipe 12 and the extraction pipe 13 are a single, complete structure, resulting in a simple design.

[0093] Specifically, the air inlet pipe 12 has a first air hole on both the air inlet side and the air extraction side; the air extraction pipe 13 has a second air hole on both the air inlet side and the air extraction side. The first and second air holes can be evenly distributed. This ensures good gas output and gas extraction effects, and facilitates the formation of a continuous air curtain on the inner wall of the furnace tube body 11, achieving a better isolation effect.

[0094] Alternatively, the portion of the inlet pipe 12 located at the end of the furnace tube body 11 may have a first vent on the side facing the interior of the cavity to avoid wasting protective gas. The portion of the exhaust pipe 13 located at the end of the furnace tube body 11 may have a second vent on the side facing the interior of the cavity to avoid wasting protective gas. The dimensions of the first and second vents range from 0.5 to 3 mm. When the first and second vents are circular, the dimension is the diameter of the circle; when they are polygonal, the dimension is the side length of the polygon. The depth of the first and second vents is determined based on the thickness of the inlet branch pipe 122 and the exhaust branch pipe 132. The spacing between two adjacent first vents ranges from 10 to 100 mm, and the spacing between two adjacent second vents also ranges from 10 to 100 mm, which is beneficial for forming a uniform air curtain. The spacing between the intake manifold 122 and the adjacent exhaust manifold 132 is 100-500 mm, and the gas flow rate between the intake manifold 122 and the adjacent exhaust manifold 132 is 5 L / min to 50 L / min, which is beneficial for forming a uniform air curtain. The effect of this device can be seen from the foregoing description.

[0095] In some embodiments of this disclosure, the inlet pipe 12 can be connected to the protective gas passage of the furnace port flange 14 at the inlet end, thus connecting the inlet pipe 12 to the outside through the furnace port flange, enabling the output of protective gas to the inlet pipe 12. The extraction pipe 13 can be connected to the extraction passage of the furnace tail flange 15 at the outlet end, thus connecting the extraction pipe 13 to the outside through the furnace tail flange, enabling gas extraction without the need for additional extraction equipment. The protective gas passage on the furnace port flange 14 may include a welded joint provided on the outer ring of the furnace port flange 14, and the protective gas passage may not pass through the furnace door on the inlet side. The extraction passage of the furnace tail flange 15 is finally connected to the pump pipe 16, which is connected to the outlet system on the outlet side, thus allowing the protective gas and the exhaust gas from the cavity to be extracted together.

[0096] In some embodiments of this disclosure, the furnace tube body 11 can be a quartz tube. A heating device 111 can be provided around the quartz tube to heat the interior of the furnace tube body 11 during the deposition process, forming a heating cavity, thereby providing a high-temperature reaction environment for the deposition process. During the deposition process, the formed isolation gas curtain can isolate the process gas from the inner wall of the furnace tube body 11. Even if the temperature of the furnace tube body 11 is high, it is not easy for a film layer to form on the inner wall of the furnace tube body 11, avoiding the problem of easy breakage of the furnace tube body 11 due to the deposition of film layer on the inner wall. For example, the deposition process of polycrystalline silicon thin film is a purely thermal reaction, which requires heating device 111 for heating.

[0097] This disclosure provides a deposition apparatus. The protection system includes an inlet pipe and an extraction pipe. The inlet pipe is used to output protective gas, and the extraction pipe is used to extract gas from the furnace tube body from the inlet pipe side. Thus, the protective gas flows from the inlet pipe to the extraction pipe. Since the inlet pipe and the extraction pipe are located on the inner wall of the furnace tube body, the protective gas forms an isolation gas curtain on the inner wall of the furnace tube body, thereby isolating the process gas from the inner wall of the furnace tube body and avoiding the problem of cracking caused by the coating on the inner wall of the furnace tube body.

[0098] In the second embodiment, the air intake system 20 includes an air intake plate 22 and an oven door 21. An intake system 20 according to some embodiments of this disclosure is described below.

[0099] refer to Figure 5 The diagram shows a schematic of the gas intake system in a deposition apparatus provided in some embodiments of this disclosure. The gas intake system 20 is located at the gas intake end of the furnace tube body 11 and is used to introduce process gas into the furnace tube body 11. The furnace door 21 is connected to the gas intake end of the furnace tube body 11 via a furnace port flange 14. The gas intake plate 22 is located on the side of the furnace door 21 away from the furnace tube body 11. The gas intake plate 22 includes multiple gas intake connectors 220 and multiple first gas passages that are respectively connected to the multiple gas intake connectors 220 and are independent of each other. The furnace door 21 includes multiple second gas passages corresponding to the first gas passages. The first ends of the multiple second gas passages are respectively connected to the multiple first gas passages, and the second ends extend into the interior of the furnace tube body 11.

[0100] This multiple primary gas path channels can be used to circulate different process gases, isolating the gas paths of different process gases and avoiding cross-contamination. The gas intake system is divided into an intake plate 22 and a furnace door 21, which can be set independently and fixed with screws for easy disassembly and maintenance. During later maintenance, the intake plate 22 and furnace door 21 can be separated and purged individually, which is convenient and quick.

[0101] refer to Figure 6 and Figure 7The diagram shown is a structural schematic of an air intake plate provided in some embodiments of this disclosure. The air intake plate 22 is an integral structure with a first air passage inside, through which gas flows in its thickness direction. The air intake plate 22 has a cavity in the thickness direction, thereby forming the first air passage. Figure 7 This is a cross-sectional schematic diagram of the overall structure of the intake disc 22 in the thickness direction. The gas entering the intake disc 22 flows from one side (left side in the figure) to the other side (right side in the figure) of the intake disc 22 along the direction of the arrow. The gas in the intake disc 22 passes through... Figure 6 The airflow passes through the channels in the plane where AA, BB, CC, DD, and EE are located on the intake disc 22, and flows to the other side of the intake disc 22. See the planar structure diagrams for each location. Figure 7 7A, 7B, 7C, 7D and 7E are denoted as AA view, BB view, CC view, DD view and EE view, respectively.

[0102] In some embodiments of this disclosure, the number of both the first gas passage and the second gas passage is three. The same first gas passage is used to flow the same gas, and different first gas passages are used to flow different gases. In other embodiments, depending on the type of gas required by the process, the number of the first gas passage and the second gas passage can be more than three. More first gas passages and second gas passages have the same structure as existing gas passages, so no further examples will be given.

[0103] The diagram shows three first gas channels for flowing different process gases, and three corresponding second gas channels for flowing the same process gases. Process gases are gases required during the process and can include thin film deposition gases, doping gases, purge gases, etc. Different gas channels are represented by lines or areas of varying gray levels. For example, the first gas channel flows through the thin film deposition gas SiH4, the second through O2, and the third through N2, with the second gas channels following the same logic.

[0104] The air intake plate 22 includes a plurality of second air intake holes 221 located at a first end and a plurality of first air outlet holes 226 located at a second end; the plurality of second air intake holes 221 are respectively connected to the plurality of air intake connectors 220, and the plurality of first air outlet holes 226 are connected to the second air passage. The first end is the air intake end (i.e., the front) of the air intake plate 22, and the second end is the air outlet end (i.e., the back) of the air intake plate 22.

[0105] Structural reference of the plane containing the first end of the intake disc 22 Figure 7View A (AA) shows gas flowing from multiple intake connectors 220 through a 1 / 4-inch pipe into multiple second intake holes 221, and then into the intake disc 22. The intake connectors 220 may include face-sealing connectors, such as VCR connectors.

[0106] Multiple second air inlets 221 can correspond to the same first air passage, thus improving air intake efficiency and uniformity. Multiple second air inlets 221 can be symmetrically arranged in the plane of the first end, allowing the same gas to be symmetrically introduced through multiple second air inlets 221 of the same first air passage. The same first air passage can include multiple first sub-passages, each with one second air inlet 221. That is, multiple second air inlets 221 of the same air passage can belong to different first sub-passages. The number of first sub-passages is denoted as m, meaning the number of second air inlets 221 belonging to the same first air passage is m. This provides more flexibility in the arrangement of the passage for the same gas, improving air intake uniformity. The size of the second air inlet 221 can be set according to actual conditions, for example, a diameter of 4mm; the number of second air inlets 221 in the same air passage can also be set according to actual conditions, for example, m can be 2. Figure 7 In the diagram, 7A and 7B are arrows pointing to the second air inlet 221 in the two first sub-channels of the same first air passage.

[0107] For details, please refer to Figure 7 As shown in Figure A, multiple second air inlets 221 belonging to the same first air passage form a circular trajectory centered on a sixth center point in a plane parallel to the surface of the furnace door 21. The distances between the second air inlets 221 of different first air passages and the sixth center point are different, thus forming multiple circular trajectories, each corresponding to a different first air passage. This achieves a staggered arrangement of the second air inlets 221 in space, utilizing radial space.

[0108] Structural reference of the plane where the second end of the intake disc 22 is located Figure 7 In the EE view of E, gas flows out from multiple first vent holes 226 and then into the furnace door 21. The multiple first vent holes 226 may be provided with sealing ring grooves, together with the sealing ring of the outer ring of the air inlet plate 22, for sealing between the air inlet plate 22 and the furnace door 21, preventing gas from overflowing at the connection surface.

[0109] Multiple first air outlets 226 can correspond to the same gas passage, thus improving air intake efficiency and uniformity. Multiple first air outlets 226 can be symmetrically arranged in the plane of the second end, allowing the same gas to symmetrically enter the furnace door 21 through multiple first air outlets 226 within the same gas passage. The same gas passage can include multiple second sub-passages, each with one first air outlet 226. That is, multiple first air outlets 226 within the same gas passage can belong to different second sub-passages. The number of second sub-passages is denoted as n, meaning the number of first air outlets 226 belonging to the same first gas passage is n, providing more flexibility in the arrangement of the passages for the same gas, such as improving air intake uniformity. The size of the first air outlet 226 can be set according to actual conditions, for example, a diameter of 4mm. The number of first air outlets 226 within the same gas passage can also be set according to actual conditions. The number of first air outlets 226 is usually greater than the number of second air inlets 221, for example, n can be 10. Figure 7 In 7E, the ten arrows point to the ten first air outlets 226 in the ten second sub-channels of the same first air passage.

[0110] For details, please refer to Figure 7 As shown in E, multiple first air outlets 226 belonging to the same first air passage form a circular trajectory with the seventh center point as the center in a plane parallel to the surface of the furnace door 21. The distance between the first air outlets 226 of different first air passages and the seventh center point is different, thus forming multiple circular trajectories, each corresponding to a different first air passage.

[0111] In some embodiments of this disclosure, the air intake plate 22 further includes a plurality of air distribution grooves 223. Each air distribution groove 223 has a third air intake hole 224 on the side facing the second air intake hole 221, for corresponding connection to the second air intake hole 221. Each air distribution groove 223 also has a second air outlet hole 225 on the side facing the first air outlet hole 226, for corresponding connection to the first air outlet hole 226. At least one target air distribution groove exists among the plurality of air distribution grooves 223. The number of second air outlet holes 225 connected to the target air distribution groove is greater than the number of third air intake holes 224, making the number of first air outlet holes 226 greater than the number of second air intake holes 221. That is, gas can be obtained from a smaller number of second air intake holes 221 through the air distribution grooves 223 and introduced into a larger number of first air outlet holes 226, increasing the number of air holes in the passage. Since each first air outlet hole 226 is located in a different position, this helps to improve the uniformity of the gas flow.

[0112] Reference to the side of multiple air distribution slots 223 facing the second air inlet 221 Figure 7In the C-view diagram, this plane has multiple third air inlets 224, which are connected to the second air inlets 221, and the gas then converges in the gas distribution groove 223. The size and number of the third air inlets 224 correspond to the size and number of the first air outlets 226. Of course, the corresponding third air inlets 224 and second air inlets 221 can actually constitute the same air inlet, and there may be no clear dividing line between them. The third air inlet 224 can be a part of the structure of the second air inlet 221 near the gas distribution groove 223. That is to say, one first sub-channel can include one third air inlet 224, see reference. Figure 7 As shown in 7C, the two third air inlets 224 corresponding to the two first sub-channels are indicated by two arrows.

[0113] Reference to the side of multiple air distribution slots 223 facing the first air outlet 226 Figure 7 In the DD view of 7D, this plane has multiple second vents 225, which are connected to the first vents 226. These vents divert gas from the gas distribution channel 223 to the respective second vents 225, and then transfer it to the first vents 226 for exit. The size and number of the first vents 226 correspond to the size and number of the second vents 225. Of course, the corresponding second vents 225 and the first vents 226 can actually constitute the same vent, and there may be no clear boundary between them. The second vent 225 can be a portion of the first vent 226 near the gas distribution channel 223. In other words, one second sub-channel can include one second vent 225. (Refer to...) Figure 7 As shown in 7D, the 10 second air outlets 225 corresponding to the 10 second sub-channels are indicated by 10 arrows.

[0114] The same gas passage can correspond to one or more gas distribution slots 223. Taking a gas passage including one gas distribution slot 223 as an example, at least one first gas passage includes multiple first sub-channels (e.g., m) and multiple second sub-channels (e.g., n). Each first sub-channel has one second air inlet 221, and each second sub-channel has one first air outlet 226. Multiple first sub-channels and multiple second sub-channels belonging to the same first gas passage are all connected to the same gas distribution slot 223. That is, the gas in multiple first sub-channels (e.g., m) converges into the gas distribution slot 223 and is distributed into multiple second sub-channels (e.g., n). In this way, the connection through the gas distribution slots, when n is greater than m, achieves the effect of increasing the number of holes from fewer holes. In the plane parallel to the surface of the furnace door 21, the width of the gas distribution slot 223 can be, for example, 5 mm, and the length ranges from 300 to 400 mm; the depth of the gas distribution slot 223 in the direction perpendicular to the surface of the furnace door 21 is, for example, 6 mm.

[0115] Specifically, the plurality of gas distribution grooves 223 extend radially in a plane parallel to the surface of the furnace door 21, with the eighth center point as the center, and are distributed circumferentially. In the plane parallel to the surface of the furnace door 21, the gas distribution grooves 223 belonging to the same first gas passage have the same radial dimension, forming the same annular gas distribution groove. The gas distribution grooves 223 in different first gas passages have different radial dimensions and are arranged radially. In this way, the radial dimensions are utilized as much as possible, so that the plurality of gas distribution grooves 223 in different first gas passages are set independently and do not affect each other, so that each first gas passage is set independently.

[0116] In some embodiments of this disclosure, the air intake plate 22 further includes a heating groove 222, in which a heating wire is disposed. The heating groove 222 is located on the periphery of the plurality of first air passages, but it is not necessarily located on the periphery of the overall structure composed of the first air passages. For example, it can be located on the periphery of each of the plurality of first air passages, at least partially surrounding the first air passages, for heating the gas passing through the plurality of first air passages. The heating temperature can be set as needed, thereby avoiding the phenomenon of gas clogging in the first air passages. Moreover, the heating groove 222 is set independently from the air passages and does not affect each other. For example, SiH4 is prone to clogging problems, so the heating wire and the heating groove 222 can be set on the periphery of the first air passage corresponding to SiH4, or on the periphery of each of the first air passages. In this way, the heating groove 222 is set independently from the air passages and does not affect each other. The temperature range of the heating wire can be 20-250℃.

[0117] Specifically, the heating groove 222 is located around the plurality of first air inlets 211. (See reference) Figure 7 In view BB of 7B, the plane is located between view AA and view CC. The heating groove 222 can be an annular structure, and the cross-section in the extension direction of the annulus forms a rectangular structure.

[0118] refer to Figure 8 and Figure 9 The diagram shown is a cross-sectional view of a furnace door provided in some embodiments of this disclosure. The furnace door 21 is an integral structure with a second gas passage inside, through which gas flows in the thickness direction. The structure of the furnace door 21 can be different at different positions in the thickness direction, thereby forming the second gas passage. Figure 8 This is a cross-sectional schematic diagram of the overall structure of the furnace door 21 in the thickness direction. The gas entering the furnace door 21 flows from one side (left side in the figure) to the other side (right side in the figure) of the inlet plate 22 along the direction of the arrow. The gas in the furnace door 21 passes through... Figure 8The channels in the plane where AA, BB, CC, DD, and EE are located in the furnace door 21 flow to the other side of the furnace door 21. See the planar structural diagrams for each location. Figure 9 9A, 9B, 9C, 9D and 9E are denoted as AA view, BB view, CC view, DD view and EE view, respectively.

[0119] The furnace door 21 may include a plurality of first air inlets 211 located at a first end and a plurality of air outlet slots 215 located at a second end; the plurality of first air inlets 211 are respectively connected to the plurality of first air passages. The first end is the air inlet end (i.e., the front) of the furnace door 21, and the second end is the air outlet end (i.e., the back) of the furnace door 21.

[0120] Structural reference of the plane containing the first end of furnace door 21 Figure 9 In view AA of diagram A, the gas flowing from the first outlet 226 enters the furnace door 21 through multiple first inlets 211. The multiple first outlets 226 and multiple first inlets 211 are arranged in a one-to-one correspondence. The multiple first inlets 211 can be symmetrically arranged in the plane of the first end, so that the same gas can be symmetrically introduced through multiple first inlets 211 in the same second gas path channel. The same second gas path channel can include multiple third sub-channels (e.g., n), each third sub-channel having one first inlet 211, resulting in n first inlets 211. This allows one third sub-channel to correspond to the same second sub-channel, providing more flexibility in the arrangement of the gas path and improving the uniformity of gas intake. The size of the first inlet 211 can be, for example, 3mm, and the number can be, for example, 10. (Refer to...) Figure 9 As shown in 9A, the 10 third sub-channels in the same second air passage, which include 10 first air inlets 211, form a circular trajectory, and different circular trajectories indicate different second air passages.

[0121] For details, please refer to Figure 9 As shown in Figure A, multiple first air inlets 211 belonging to the same second air passage form a circular trajectory with the fifth center point as the center in a plane parallel to the surface of the furnace door 21. The distance between the first air inlets 211 of different second air passages and the fifth center point is different, thus forming multiple circular trajectories, each corresponding to a different second air passage. This allows them to be arranged in a staggered manner in space, utilizing radial space.

[0122] Structural reference of the plane where the second end of the furnace door 21 is located Figure 9In the EE view of section E, gas flows out from multiple outlet slots 215. These outlet slots 215 can be symmetrically arranged in the plane containing the second end, allowing the same gas to be symmetrically introduced through multiple outlet slots 215 in the same second gas path channel. The same second gas path channel can include multiple third sub-channels, each with one or more outlet slots 215, providing greater flexibility in the arrangement of the gas path and improving gas intake uniformity. The width of the outlet slot 215 in the plane parallel to the surface of the furnace door 21 can be, for example, 2 mm, and its length can range from 10 to 30 mm.

[0123] Specifically, the plurality of gas outlet slots 215 extend radially with a first center point as the center in a plane parallel to the surface of the furnace door 21, and are arranged circumferentially; the plurality of gas outlet slots 215 extend radially with a second center point as the center in a plane parallel to the surface of the furnace door 21, and are distributed circumferentially. Gas can flow out within the circumferential plane, increasing the outflow area and uniformity.

[0124] In some embodiments of this disclosure, the furnace door 21 further includes a plurality of gas distribution passages 214 between the plurality of first air inlets 211 and the plurality of air outlet slots 215; the side of the plurality of gas distribution passages 214 facing the first air inlets 211 is connected to the first air inlets 211, and the side of the plurality of gas distribution passages 214 facing the air outlet slots 215 is connected to the air outlet slots 215; the area of ​​the gas distribution passages 214 in a plane parallel to the surface of the furnace door 21 is larger than the area of ​​the air outlet slots 215 in a plane parallel to the surface of the furnace door 21. The area in the plane of the surface of the furnace door 21, specifically, the length of the gas distribution passage 214 in the plane parallel to the surface of the furnace door 21 can be greater than or equal to the length of the gas outlet groove 215 in the plane parallel to the surface of the furnace door 21, the width of the gas distribution passage 214 in the plane parallel to the surface of the furnace door 21 is greater than the width of the gas outlet groove 215 in the plane parallel to the surface of the furnace door 21, and when the width of the gas distribution passage 214 is not uniform, its average width is greater than the average width of the gas outlet groove 215.

[0125] Gas distribution passage 214 (reference) Figure 9 In the DD view of D, each gas distribution passage 214 is independently set, isolating the process gases from each other and preventing cross-contamination. In this way, the gas entering through the furnace door 21 from the first inlet 211 is diverted to the outlet trough 215 via the gas distribution passage 214, effectively expanding the outlet area and improving the uniformity of gas flow. The metal furnace door 21 serves both as a cavity seal and, in this system, as a gas distribution and flow equalization mechanism.

[0126] In specific implementation, the plurality of air outlet slots 215 include multiple sets of air outlet slots. The air outlet slots of the same set are arranged radially at intervals in a plane parallel to the surface of the furnace door 21, with the first center point as the center. Furthermore, the air outlet slots of the same set are connected to the same gas distribution passage 214, ensuring that the number of air outlet slots in each third sub-channel is greater than one. The radially arranged plurality of air outlet slots can increase the air intake range and make the air intake more uniform. (Reference) Figure 9 E, a set of air outlet slots may include three air outlet slots, which are arranged radially. In the radial outward direction, the length of the three air outlet slots increases sequentially, so that the airflow flows out in a spray pattern and enters the cavity more evenly. This is equivalent to a total number of air outlet slots of 3n.

[0127] Specifically, the gas distribution passage 214 forms a fan-shaped region centered on the second center point in a plane parallel to the surface of the furnace door 21. The gas distribution passage 214 can also be called a fan-shaped gas distribution plate, with the outer area larger than the inner area. This results in more gas existing on the outer periphery, providing a larger storage space for the gas and thus increasing the airflow on the periphery, improving the uniformity of the gas in each region. Multiple gas distribution passages 214 can be symmetrically arranged in a plane parallel to the surface of the furnace door 21. The number of outlet slots 215 in each third sub-channel can be one or more, allowing for greater freedom in the arrangement of the passages for the same gas, which is beneficial for improving the uniformity of the incoming gas. The gas distribution passages 214 can be arranged in a one-to-one correspondence with the outlet slots 215, or one gas distribution passage 214 can correspond to multiple outlet slots 215.

[0128] In some embodiments of this disclosure, the furnace door 21 further includes the plurality of guide grooves 212 and the plurality of first vent holes 213; the side of the plurality of guide grooves 212 facing the plurality of first vent holes 211 is respectively connected to the plurality of first vent holes 211, the side of the plurality of guide grooves 212 facing the plurality of first vent holes 213 is connected to the inlet of the plurality of first vent holes 213, and the outlet of the plurality of first vent holes 213 is connected to the inlet of the plurality of gas distribution passages 214.

[0129] Multiple guide channels 212 reference Figure 9 In view BB of B, multiple guide channels 212 are connected one-to-one with multiple first air inlets 211, allowing gas to be introduced into the multiple guide channels 212 through the multiple first air inlets 211. Multiple first vents 213 are shown in the reference diagram. Figure 9In the CC view of C, multiple first air inlets 211 are connected one-to-one with multiple guide channels 212, allowing gas from the multiple guide channels 212 to flow into multiple first vents 213. The number of guide channels 212 and first vents 213 in each third sub-channel can be 1, that is, the total number of guide channels 212 and first vents 213 is n, which gives more freedom in the arrangement of the passage for the same gas and helps to improve the uniformity of air intake.

[0130] Specifically, the plurality of guide grooves 212 extend radially in a plane parallel to the surface of the furnace door 21, with a third center point as the center, and are distributed circumferentially; the plurality of first vent holes 213 form a circular trajectory in a plane parallel to the surface of the furnace door 21, with a fourth center point as the center. This allows the air inlet pipe to be arranged within the thickness space of the furnace door 21. The distance between the plurality of first vent holes 213 and the fourth center point can be the same, meaning all the first vent holes 213 can form a circular trajectory. This allows different gases located on different circular trajectories and introduced into the first air inlet holes 211 to be introduced into the first vent holes 213 on the same circular trajectory, resulting in a roughly similar distribution of different gases and improving overall uniformity.

[0131] Furthermore, the distance between the multiple first vent holes 213 and the fourth center point can be less than the distance between the multiple first air inlets 211 and the fifth center point. This is because, considering the hardware dimensions of the processing and connectors, the first air inlets 211 are far from the geometric center of the furnace door 21. Through the guide groove 212 and the multiple first vent holes 213, the gas can be guided to a position closer to the geometric center of the furnace door 21 and dispersed outward in a unified manner, thereby increasing the gas flow area and promoting airflow uniformity.

[0132] In a plane parallel to the surface of the furnace door 21, guide grooves 212 belonging to the same second air passage have the same radial dimension, while guide grooves 212 in different second air passages have different radial dimensions. The radial dimension of the guide groove 212 is related to the position of the corresponding first air inlet 211, such that the guide groove 212 is at least connected to the corresponding first air inlet 211. The guide groove 212 has a width of 3 mm, a length ranging from 20 to 40 mm, and a depth of 5 mm in the direction perpendicular to the surface of the furnace door 21. The first vent 213 has a size of 3 mm.

[0133] In specific implementation, the first center point, the second center point, the third center point, and the fourth center point are located on the center line of the furnace door 21. The center line is perpendicular to the surface of the furnace door 21 and passes through the center point of the surface of the furnace door 21. That is, each center point is located on the geometric center line of the furnace door 21, allowing gas to flow out within a circular plane, increasing the outflow area and uniformity. Furthermore, having multiple center points on the center line facilitates unified reference and convenient processing.

[0134] In specific implementation, the first air inlet 211, the air distribution passage 214, the guide groove 212, the first air vent 213 and the air outlet groove 215 are all arranged periodically according to their respective second air passages, so that the arrangement of each gas is more uniform.

[0135] In summary, at least one second air passage includes multiple third sub-passes. Each third sub-passe contains one first air inlet 211, one air distribution passage 214, one guide groove 212, and one first vent 213. The total number of each can be denoted as n. Each third sub-passe contains one or more air outlet grooves 215, ensuring more uniform air intake in the circumferential direction. The first air inlet 211, air distribution passage 214, guide groove 212, and first vent 213, as well as the air outlet groove, belonging to the same third sub-passe can have the same circumferential position, allowing these components to be arranged sequentially facing each other. As described above, the air intake plate includes multiple first air passages (e.g., 3). In each first air passage, gas enters from m first sub-channels (including m corresponding second air inlets 221 and m third air inlets 224), mixes in the air distribution groove 223, and then flows to n second sub-channels (including n corresponding second air outlets 225 and n first air outlets 226). The gas flows out of the air intake plate from the n first air outlets 226 of the second sub-channels and enters the furnace door. n is usually greater than m. The air intake plate realizes the conversion from fewer holes to more holes.

[0136] The furnace door 21 includes multiple second gas passages (e.g., three), each of which includes n third sub-passages. These n second and n third sub-passages correspond one-to-one. Each third sub-passage includes a first air inlet 211, a gas distribution passage 214, a guide groove 212, a first vent 213, and one or more outlet grooves 215. Thus, the gas flowing from the n first outlets 226 of the second sub-passages enters each third sub-passage through the first air inlet 211 corresponding to each of the n first outlets 226, then flows independently within each third sub-passage, and finally exits the furnace door through the outlet grooves 215 in each third sub-passage.

[0137] In some embodiments of this disclosure, the air intake system 20 further includes a flow equalizer 23 on the side of the furnace door 21 away from the air intake plate 22. In this way, the gas passes through the air intake plate 22, the furnace door 21 and the flow equalizer 23 in sequence, and finally flows to the substrate surface inside the cavity that needs to be processed. This is beneficial for the gas coming out of the furnace door 21 to be more evenly dispersed into the cavity after passing through the flow equalizer 23.

[0138] refer to Figure 10 The diagram shown is a schematic representation of a flow equalization cylinder according to some embodiments of this disclosure. The flow equalization cylinder 23 includes a multi-layered flow equalization structure, each including vents. Thus, gas passing through the multi-layered flow equalization structure undergoes multi-stage flow equalization processing, allowing it to flow into the cavity from the side of the flow equalization cylinder 23 away from the furnace door 21 in a uniform and stable airflow state. The size of the vents can be, for example, 5 mm, and the spacing between the vents can range from 10 to 30 mm.

[0139] This disclosure provides a deposition apparatus. The gas intake system may include a gas intake plate and a furnace door. The furnace door is connected to the gas intake end of the furnace tube body via a furnace port flange. The gas intake plate is located on the side of the furnace door away from the furnace tube body. The gas intake plate includes multiple gas intake connectors and multiple independent first gas passages connected to the multiple gas intake connectors. The furnace door includes multiple second gas passages corresponding to the first gas passages. The first ends of the multiple second gas passages are respectively connected to the multiple first gas passages, and the second ends extend into the interior of the furnace tube body. In this way, the gas intake plate and the furnace door can be set independently, which is convenient for maintenance. The multiple first gas passages and the multiple second gas passages are set independently. Different gas passages can be used to circulate different process gases, isolating the gas passages of different process gases and avoiding cross-contamination of various process gases.

[0140] In embodiment 3, the intake system 20 may include an air passage and a heating structure. Another intake system 20 in some embodiments of this disclosure will now be described.

[0141] The air intake system 20 includes an air passage and a heating structure. The heating structure is located around the air passage and is used to heat the gas in the air passage.

[0142] In some embodiments of this disclosure, the air intake system 20 includes an air intake plate 22 and a furnace door 21. The furnace door 21 is connected to the air intake end of the furnace tube body 11 via a furnace port flange 14. The air intake plate 22 is located on the side of the furnace door 21 away from the furnace tube body 11. The air intake plate 22 includes a plurality of air intake connectors 220 and a plurality of first air passages that are respectively connected to the plurality of air intake connectors 220 and are independent of each other. The furnace door 21 includes a plurality of second air passages that correspond one-to-one with the first air passages. The first ends of the plurality of second air passages are respectively connected to the plurality of first air passages, and the second ends extend into the interior of the furnace tube body 11.

[0143] The air intake plate 22 also includes a heating groove 222, in which a heating wire is disposed. The heating groove 222 is located on the periphery of the plurality of first air passages, but it is not necessarily located on the periphery of the overall structure composed of the first air passages. For example, it can be located on the periphery of each of the plurality of first air passages, at least partially surrounding the first air passages, for heating the gas passing through the plurality of first air passages. The heating temperature can be set as needed, thereby avoiding the phenomenon of powder blockage in the first air passages. For example, SiH4 is prone to blockage problems, so the heating wire and the heating groove 222 can be set on the periphery of the first air passage corresponding to SiH4, or on the periphery of each of the first air passages. The temperature range of the heating wire can be 20-250℃. Specifically, the heating groove 222 is located on the periphery of the plurality of first air inlets 211.

[0144] Some embodiments of this disclosure provide a deposition apparatus. The air intake system may include an air passage and a heating structure. The heating structure is located around the air passage and is used to heat the gas in the air passage to prevent the gas from being blocked by powder in the first air passage.

[0145] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on its differences from other embodiments. In particular, for structural embodiments, each embodiment emphasizes a part of the structure, so other structures are described relatively simply; relevant parts can be referred to the descriptions of the corresponding embodiments of other structures. Those skilled in the art can understand and implement this without any creative effort.

[0146] The above description is merely a preferred embodiment of this disclosure. Although this disclosure has been presented with reference to preferred embodiments, it is not intended to limit this disclosure. Any person skilled in the art can make many possible variations and modifications to the technical solutions disclosed above, or modify them into equivalent embodiments, without departing from the scope of this disclosure. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this disclosure, without departing from the content of this disclosure, shall still fall within the protection scope of this disclosure.

Claims

1. A deposition apparatus, characterized by, include: Furnace tube body; The gas inlet system located at the gas inlet end of the furnace tube body is used to introduce process gas into the furnace tube body. The gas outlet system located at the gas outlet end of the furnace tube body is used to extract gas from inside the furnace tube body; The protective system installed on the inner wall of the furnace tube body includes an inlet pipe and an extraction pipe. The inlet pipe is used to output protective gas, and the extraction pipe is used to extract gas from the furnace tube body from the inlet pipe side.

2. The deposition apparatus of claim 1, wherein The air intake pipe extends along the inner wall of the furnace tube body and includes a main air intake pipe and multiple branch air intake pipes. The main air intake pipe extends along the axial direction of the furnace tube body, and the multiple branch air intake pipes extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the main air intake pipe. The exhaust pipe extends along the inner wall of the furnace tube body and includes a main exhaust pipe and multiple exhaust branch pipes. The main exhaust pipe extends along the axial direction of the furnace tube body, and the multiple exhaust branch pipes extend along the circumferential direction of the furnace tube body and are respectively connected to different positions of the main exhaust pipe. The air inlet branch line and the air extraction branch line are arranged at intervals along the axial direction of the furnace tube body.

3. The deposition apparatus of claim 2, wherein The angle between the extended plane of the air intake branch pipe and the axial direction of the furnace tube body is greater than 80°, and the angle between the extended plane of the air extraction branch pipe and the axial direction of the furnace tube body is greater than 80°.

4. The deposition apparatus of claim 2, wherein If the first pipe among the plurality of intake pipes has an exhaust pipe on both the intake end side and the outlet end side, then the first pipe has a first air hole on both the intake end side and the outlet end side; if the second pipe among the plurality of exhaust pipes has an intake pipe on both the intake end side and the outlet end side, then the second pipe has a second air hole on both the intake end side and the outlet end side.

5. The deposition apparatus of claim 2, wherein The interval between the intake manifold and the adjacent exhaust manifold is 100-500mm, and the gas flow rate between the intake manifold and the adjacent exhaust manifold is 5L / min to 50L / min.

6. The deposition apparatus of claim 1, wherein, Both the air inlet pipe and the air extraction pipe extend spirally along the inner wall of the furnace tube body and are spaced apart along the axial direction of the furnace tube body.

7. The deposition apparatus of claim 6, wherein The air intake pipe has a first air hole on both the air intake side and the air outlet side; the air extraction pipe has a second air hole on both the air intake side and the air outlet side.

8. The deposition apparatus according to claim 4 or 7, wherein The size range of the first pore and the second pore is 0.5-3mm, the distance between two adjacent first pores is 10-100mm, and the distance between two adjacent second pores is 10-100mm.

9. The deposition apparatus according to any one of claims 1 to 7, wherein The air inlet pipe is connected to the protective gas passage of the furnace inlet flange at the air inlet end; the exhaust pipe is connected to the exhaust passage of the furnace tail flange at the air outlet end.

10. The deposition apparatus according to any one of claims 1 to 7, wherein The furnace tube body is a quartz tube, and a heating device is provided around the quartz tube to heat the inside of the furnace tube body during the deposition process.

11. A deposition apparatus, characterized in that, include: Furnace tube body; The gas inlet system located at the gas inlet end of the furnace tube body is used to introduce process gas into the furnace tube body. The air intake system includes an air intake plate and a furnace door. The furnace door is connected to the air intake end of the furnace tube body through a furnace port flange. The air intake plate is located on the side of the furnace door away from the furnace tube body. The air intake plate includes multiple air intake connectors and multiple first air passages that are connected to the multiple air intake connectors and are independent of each other. The furnace door includes multiple second air passages that correspond to the first air passages. The first ends of the multiple second air passages are respectively connected to the multiple first air passages, and the second ends extend into the interior of the furnace tube body. The gas outlet system located at the gas outlet end of the furnace tube body is used to extract gas from inside the furnace tube body.

12. The deposition apparatus of claim 11, wherein, The furnace door includes a plurality of first air inlets located at a first end and a plurality of air outlets located at a second end; the plurality of first air inlets are respectively connected to the plurality of first air passages. The furnace door also includes multiple gas distribution passages between the multiple first air inlets and the multiple air outlets; the multiple gas distribution passages are connected to the first air inlets on the side facing the first air inlets, and are connected to the air outlets on the side facing the air outlets; the area of ​​the gas distribution passages in a plane parallel to the surface of the furnace door is greater than the area of ​​the air outlets in a plane parallel to the surface of the furnace door.

13. The deposition apparatus of claim 12, wherein, The plurality of gas outlet slots extend radially with a first center point as the center in a plane parallel to the surface of the furnace door, and are arranged circumferentially; the plurality of gas distribution passages extend radially with a second center point as the center in a plane parallel to the surface of the furnace door, and are distributed circumferentially.

14. The deposition apparatus of claim 13, wherein, The plurality of gas outlet slots include multiple sets of gas outlet slots. The gas outlet slots of the same set are arranged radially at intervals in a plane parallel to the surface of the furnace door, with the first center point as the center. The gas outlet slots of the same set are connected to the same gas distribution passage.

15. The deposition apparatus of claim 13, wherein, The gas distribution passage forms a fan-shaped region centered on the second center point in a plane parallel to the surface of the furnace door.

16. The deposition apparatus of claim 13, wherein, The furnace door also includes multiple guide grooves and multiple first vent holes; the side of the multiple guide grooves facing the multiple first vent holes is connected to the multiple first vent holes respectively, the side of the multiple guide grooves facing the multiple first vent holes is connected to the inlet of the multiple first vent holes, and the outlet of the multiple first vent holes is connected to the inlet of the multiple gas distribution passages. The plurality of guide grooves extend radially in a plane parallel to the surface of the furnace door with a third center point as the center, and are distributed circumferentially; the plurality of first vent holes form a circular trajectory in a plane parallel to the surface of the furnace door with a fourth center point as the center.

17. The deposition apparatus of claim 16, wherein At least one of the second air passages includes multiple third sub-passes, each of which has one first air inlet, one air distribution passage, one guide groove and one first vent hole, and each of the third sub-passes has one or more air outlet grooves.

18. The deposition apparatus of claim 17, wherein, Multiple first air inlets belonging to the same second air passage form a circular trajectory with the fifth center point as the center in a plane parallel to the surface of the furnace door. The distance between the first air inlets of different second air passages and the fifth center point is different. In a plane parallel to the surface of the furnace door, guide grooves belonging to the same second gas passage have the same radial dimension, while guide grooves in different second gas passages have different radial dimensions.

19. The deposition apparatus of claim 17, wherein, The first center point, the second center point, the third center point, and the fourth center point are located on the center line of the furnace door, and the center line is perpendicular to the surface of the furnace door and passes through the center point of the surface of the furnace door.

20. The deposition apparatus of claim 17, wherein, The first air inlet, the air distribution passage, the guide groove, the first vent, and the air outlet are all arranged at periodic intervals according to their respective second air passages.

21. The deposition apparatus of any of claims 11-20, wherein, The air intake plate includes a plurality of second air intake holes located at the first end and a plurality of first air outlet holes located at the second end; the plurality of second air intake holes are respectively connected to the plurality of air intake connectors, and the plurality of first air outlet holes are connected to the second air passage. The air intake plate also includes multiple air distribution slots. Each air distribution slot has a third air intake hole on the side facing the second air intake hole, which is used to connect to the second air intake hole. Each air distribution slot also has a second air outlet hole on the side facing the first air outlet hole, which is used to connect to the first air outlet hole. At least one of the multiple air distribution slots is a target air distribution slot. The number of second air outlet holes connected to the target air distribution slot is greater than the number of third air intake holes, so that the number of first air outlet holes is greater than the number of second air intake holes.

22. The deposition apparatus of claim 21, wherein, At least one of the first air passages includes multiple first sub-passes and multiple second sub-passes. Each first sub-passe has one second air inlet, and each second sub-passe has one first air outlet. Multiple first sub-passes and multiple second sub-passes belonging to the same first air passage are all connected to the same air distribution slot.

23. The deposition apparatus of claim 22, wherein, Multiple second air inlets belonging to the same first air passage form a circular trajectory with the sixth center point as the center in a plane parallel to the surface of the furnace door. The distance between the second air inlets of different first air passages and the sixth center point is different. Multiple first air outlets belonging to the same first air passage form a circular trajectory with the seventh center point as the center in a plane parallel to the surface of the furnace door. The distance between the first air outlet of different first air passages and the seventh center point is different. The plurality of gas distribution slots extend radially in a plane parallel to the surface of the furnace door with the eighth center point as the center, and are distributed circumferentially; in a plane parallel to the surface of the furnace door, the gas distribution slots belonging to the same first gas passage have the same radial dimension, and the gas distribution slots in different first gas passages have different radial dimensions.

24. The deposition apparatus of any of claims 12-20, wherein, The air intake plate also includes a heating groove, in which a heating wire is provided, and the heating groove is located on the periphery of multiple first air passages.

25. The deposition apparatus of claim 24, wherein, The heating slot is located around the plurality of first air inlets.

26. The deposition apparatus of any of claims 11-20, wherein, The air intake system also includes a flow equalization cylinder on the side of the furnace door away from the air intake plate. The flow equalization cylinder includes a multi-layer flow equalization structure stacked on top of each other, and the flow equalization structure includes vent holes.

27. A deposition apparatus, characterized by, include: Furnace tube body; The gas inlet system located at the gas inlet end of the furnace tube body is used to introduce process gas into the furnace tube body. The air intake system includes an air passage and a heating structure. The heating structure is located around the air passage and is used to heat the gas in the air passage. The gas outlet system located at the gas outlet end of the furnace tube body is used to extract gas from inside the furnace tube body.

28. The deposition apparatus of claim 27, wherein, The air intake system includes an air intake plate and a furnace door. The furnace door is connected to the air intake end of the furnace tube body through a furnace port flange. The air intake plate is located on the side of the furnace door away from the furnace tube body. The air intake plate includes multiple air intake connectors and multiple first air passages that are connected to the multiple air intake connectors and are independent of each other. The furnace door includes multiple second air passages that correspond one-to-one with the first air passages. The first ends of the multiple second air passages are respectively connected to the multiple first air passages, and the second ends extend into the interior of the furnace tube body. The air intake plate also includes a heating groove, in which a heating wire is provided, and the heating groove is located on the periphery of multiple first air passages.

Images