Spray head structure and air tightness detection device

Abstract

The utility model provides a spray head structure and an air tightness detection device, the spray head structure comprises a liquid inlet end, a liquid outlet end and a monitoring module, the liquid inlet end is combined with a liquid supply piece through a liquid supply port connected with the liquid supply piece to form the air tightness detection device, and the liquid outlet end is connected with the liquid inlet end and is aligned with an air tightness detection part, so that detection liquid can be supplied to the air tightness detection part. The monitoring module is connected with the liquid outlet end, and in the air tightness detection process, the monitoring module monitors the detection part, so that detection personnel can detect the leakage condition of the detection part without directly observing the part to be detected; therefore, the bubble condition of the detection part can be conveniently detected, and the detection precision of the air tightness of the detection part is improved.

Description

Technical Field

[0001] This application relates to airtightness testing technology, and more particularly to a nozzle structure and an airtightness testing device. Background Technology

[0002] In polysilicon production, the filters in the equipment need to be cleaned frequently. The filter mainly consists of the filter body and the upper flange cover. During the cleaning process, the upper flange cover of the filter needs to be removed first, and then the filter body needs to be cleaned. After cleaning, the upper flange cover is reinstalled.

[0003] To ensure the airtightness of the filter after the upper flange cover is installed, the airtightness between the filter body and the upper flange cover needs to be tested before the filter is put into use. The testing process usually involves inserting the nozzle of a water sprayer between the filter body and the upper flange cover and spraying in a test liquid that easily produces bubbles, such as soapy water. Then, nitrogen gas is introduced into the filter for pressurization. Afterward, the test liquid is observed to see if bubbles are continuously produced. If there are no bubbles, it proves that the filter is well sealed and can be put into use. If bubbles are produced, it indicates that the seal is not tight and needs to be resealed.

[0004] During the observation of the test liquid, it is usually observed directly by human eyes, which results in low observation accuracy and affects the accuracy of airtightness detection. Utility Model Content

[0005] This application provides a nozzle structure and an airtightness testing device to solve the problem that the existing technology requires direct observation by human eyes during the airtightness testing process, resulting in low accuracy of airtightness testing.

[0006] On one hand, this application provides a nozzle structure, including:

[0007] The inlet end is used to connect to the liquid supply component;

[0008] The outlet end, connected to the inlet end, is used to supply liquid to the inlet end through the liquid supply component, thereby supplying the test liquid to the airtightness testing area; and

[0009] A monitoring module, connected to the liquid outlet, is used to monitor the airtightness detection area.

[0010] In some embodiments, the monitoring module includes an imaging element and a display element. The imaging element is connected to the liquid outlet end and is used to form an image of the airtightness detection area. The display element is connected to the imaging element and is used to display the image of the airtightness detection area formed by the imaging element.

[0011] In some embodiments, the imaging element includes a camera.

[0012] In some embodiments, the liquid outlet end is provided with a mounting cavity, and the imaging element is mounted in the mounting cavity.

[0013] In some embodiments, the liquid outlet includes a plurality of spray elements, each of which is connected to the liquid inlet and surrounds the mounting cavity, and each of the spray elements is provided with a liquid outlet.

[0014] In some embodiments, the liquid outlet is located at the end of each of the spray elements away from the liquid inlet.

[0015] In some embodiments, the liquid outlet is located on the side of each spray member near the mounting cavity.

[0016] In some embodiments, a threaded structure is provided on the inner side of the liquid inlet end, the threaded structure being used to thread the liquid inlet end to the liquid supply port of the liquid supply component.

[0017] On the other hand, this application also provides an airtightness detection device, comprising:

[0018] The liquid supply component is provided with a liquid supply port for storing and supplying the test liquid; and a nozzle structure is connected to the liquid supply port through a liquid inlet end.

[0019] In some embodiments, the liquid supply device includes a spray bottle.

[0020] The nozzle structure and airtightness detection device provided in this application include a liquid inlet, a liquid outlet, and a monitoring module. The liquid inlet is connected to the liquid supply port of a liquid supply component, forming an airtightness detection device. The liquid outlet is connected to the liquid inlet and aligned with the airtightness detection area to supply the detection liquid. Then, by inflating the detection component, the airtightness of the component can be detected. The monitoring module is connected to the liquid outlet. During the airtightness detection process, the monitoring module monitors the detection area, allowing the testing personnel to detect leaks without directly observing the area under test. This facilitates the detection of air bubbles at the detection area and improves the accuracy of airtightness detection. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0022] Figure 1 This is a schematic diagram of the structure of the filter provided in an embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the nozzle structure provided in one embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the nozzle structure provided in another embodiment of the present invention;

[0025] Figure 4 This is a front view of the airtightness detection device provided in this embodiment of the utility model.

[0026] Labels for each item in the figure:

[0027] 10—Filter; 11—Filter body; 12—Upper flange cover;

[0028] 20—Inlet end;

[0029] 30—Liquid outlet; 31—Mounting cavity; 32—Spray component; 321—Liquid outlet;

[0030] 40—Monitoring module; 41—Imaging component;

[0031] 50—Liquid supply component; 51—Liquid supply port; 52—Handle; 53—Spray button;

[0032] 60—Nozzle structure.

[0033] The accompanying drawings have illustrated specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to specific embodiments. Detailed Implementation

[0034] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0035] During the production of polysilicon, such as... Figure 1 During the airtightness test of the filter 10 shown, a test liquid that easily generates bubbles, such as soapy water, is usually sprayed between the filter body 11 and the upper flange cover 12 using a spray bottle. Then, nitrogen gas is introduced into the filter 10 for pressurization. The test liquid is then observed by the naked eye to see if it contains continuously generated bubbles. However, because the gap between the filter body and the upper flange cover 12 is small, it is difficult to clearly observe the bubble situation of the test liquid with the naked eye, resulting in low test accuracy of the filter 10.

[0036] To address the issue that the aforementioned testing methods cannot guarantee the accuracy of airtightness testing of filter 10, this utility model embodiment provides a nozzle structure. The nozzle structure monitors the testing area between filter body 11 and upper flange cover 12 through a monitoring module 40 connected to the liquid outlet 30. This allows testing personnel to obtain the bubble status of the test liquid without directly observing the testing area, thereby improving testing accuracy.

[0037] The nozzle structure only needs to be able to supply the test liquid into the part to be tested through the liquid outlet 30 and be able to be monitored by the monitoring module 40. It can be used for, but is not limited to, the air tightness test of the filter 10. It can also be used for the air tightness test of any component with a sealed cavity. When it is applied to the air tightness test of other equipment, its detection principle is the same as the detection principle applied to the filter 10.

[0038] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will be described below with reference to the accompanying drawings.

[0039] The nozzle structure provided in this embodiment is as follows: Figure 1-4 As shown, it includes an inlet end 20, an outlet end 30, and a monitoring module 40. The inlet end 20 is used to connect to the liquid supply component 50. The outlet end 30 is connected to the inlet end 20 and is used to supply liquid to the inlet end 20 through the liquid supply component 50, so as to supply the test liquid into the airtightness testing part. The monitoring module 40 is connected to the outlet end 30 and is used to monitor the airtightness testing part.

[0040] Specifically, the nozzle structure includes an inlet end 20, an outlet end 30, and a monitoring module 40. Before testing the airtightness of the filter 10, the inlet end 20 is connected to the supply port 51 of the supply component 50, and the outlet end 30 is connected to the inlet end 20 and aligned with the airtightness testing area to supply the testing liquid to the airtightness testing area. Then, by inflating the testing component, the airtightness of the testing component can be tested. The monitoring module 40 is connected to the outlet end 30. During the airtightness testing process, the monitoring module 40 monitors the testing area, allowing the testing personnel to detect leaks at the testing area without directly observing it. This facilitates the detection of air bubbles at the testing area and improves the accuracy of the airtightness testing of the testing component.

[0041] Furthermore, in order to clearly observe the bubble situation at the testing site, the testing personnel will bring their faces close to the testing site for observation. Since the polycrystalline silicon filter 10 contains toxic gas, if the filter 10 leaks, the toxic gas can easily be inhaled by the person's face being close to the filter 10, affecting the health of the personnel. This nozzle structure, through the monitoring module 40, allows the person not to be close to the testing site during the testing process, thereby preventing the leaked toxic gas from being inhaled into the human body and ensuring the safety of the personnel.

[0042] Understandably, the detection liquid can be a liquid that can form bubbles under the action of leaked gas. For example, a liquid containing chemicals such as laundry detergent or dish soap; in this embodiment, soap solution is preferred.

[0043] It is understood that the liquid supply component 50 installed on the liquid inlet end 20 in this embodiment can be any liquid storage component that stores the detection liquid and can supply the detection liquid to the liquid inlet end 20, such as a liquid storage bottle, liquid storage tank, liquid pump, etc.

[0044] In this embodiment, as Figure 4 As shown, the liquid supply component 50 is a water sprayer. The water sprayer, together with the nozzle structure, can supply the test liquid to the test area in the form of water spray, thereby making it easy to control the supply amount of test liquid and facilitating the airtightness test of the component.

[0045] Understandably, the inlet end 20 can be any connecting component that allows the test liquid to pass through, such as a hose, water pipe, or valve, which can be connected to the outlet 321 of the liquid supply component 50. The inlet end 20 can be connected to the outlet 321 by welding, interference fit, snap-fit, or other connection methods.

[0046] In one embodiment, the inner side of the inlet end 20 is provided with a threaded structure for threaded connection to the liquid supply port 51 of the liquid supply component 50. Specifically, the nozzle structure can be threadedly connected to the liquid outlet 321 of the liquid supply component 50 through the internal threaded structure of the inlet end 20, thereby fixing the nozzle structure to the liquid outlet 321 of the liquid supply component 50 and facilitating the assembly and disassembly of the nozzle structure. Furthermore, the liquid supply angle of the nozzle structure and the monitoring angle of the monitoring module 40 can be adjusted as needed by rotating the inlet end 20, facilitating the airtightness testing.

[0047] Understandably, the liquid outlet 30 can be one or more liquid outlet pipes, liquid outlet valves, or other connecting components that allow the detection liquid to flow out, which are connected to the liquid inlet 20. The liquid outlet angle and liquid outlet speed of the liquid outlet 30 can be adaptively set according to the characteristics of the spray hole diameter, position, and angle on the liquid outlet 30.

[0048] Understandably, the monitoring module 40 can be an ultrasonic bubble detector, which uses changes in sound wave reflection or attenuation caused by ultrasonic technology to detect bubbles in the liquid, thereby monitoring the bubble situation at the detection site; the monitoring module 40 can also be an optical microscope or magnifying glass, which provides convenience for observing and analyzing the bubble situation at the detection site by magnifying the detection site; the monitoring module 40 can also be a laser scattering instrument, as bubbles cause changes in the laser scattering pattern, and the laser scattering instrument monitors the bubbles by observing the scattering changes in the liquid.

[0049] In one embodiment, such as Figure 2-4 As shown, the monitoring module 40 includes an imaging element 41 and a display element (not shown in the figure). The imaging element 41 is connected to the liquid outlet 30 and is used to form an image of the airtightness detection area. The display element is connected to the imaging element 41 and is used to display the image of the airtightness detection area formed by the imaging element 41. Specifically, during the monitoring of bubbles in the detection area, the imaging element 41 images the detection area, and the display element displays the formed image. The monitoring module 40, by setting the imaging element 41 and the display element, enables the monitoring module 40 to monitor the bubble situation in the detection area in the form of an image. This allows the testing personnel to monitor the bubble situation in the detection area simply by observing the image displayed on the display element. By observing the image, the bubble formation situation in the detection area can be accurately obtained, thereby enabling accurate measurement of the airtightness of the detection area, improving measurement accuracy, and eliminating the need for personnel to be close to the detection area for observation, thus ensuring the health of the testing personnel.

[0050] Understandably, the imaging element 41 can be a CCD (charge-coupled device) sensor, which is a high-quality image sensor that can accurately image the bubble situation at the detection site. The imaging element 41 can also be an infrared sensor, which can image the detection site by forming an infrared spectrum. The imaging element 41 can also be a laser scanner, which can generate a high-precision three-dimensional model by scanning the surface of an object with a laser beam to achieve imaging.

[0051] In one embodiment, the imaging element 41 includes a camera. Specifically, the camera captures light and converts it into electronic signals, which are then transmitted to the display element to achieve imaging of the detected area.

[0052] Understandably, the display device can be a monitor, computer, television, or mobile phone. The monitor, computer, television, and mobile phone are connected to the imaging device 41 via Bluetooth, WiFi, USB interface, or other connection methods to display images. The display device can also be installed on the monitor of the liquid supply device 50. The monitor is directly connected to the imaging device 41 via wires to display images.

[0053] In this embodiment, the display device is a mobile phone.

[0054] It is understandable that the imaging element 41 can be connected to the liquid outlet 30 in the form of sliding connection, rotational connection or fixed connection.

[0055] In one embodiment, such as Figure 2-4 As shown, the liquid outlet 30 is provided with a mounting cavity 31, and the imaging element 41 is mounted in the mounting cavity 31. Specifically, the imaging element 41 is fixed at the liquid outlet 30 by being mounted in the mounting cavity 31. The mounting cavity 31 can stabilize the imaging element 41 while also protecting it.

[0056] Understandably, the mounting cavity 31 can be a cavity opened in the liquid outlet end 30. The mounting cavity 31 can be set at any part of the liquid outlet end 30, as long as it can be used to fix the imaging element 41.

[0057] In one embodiment, such as Figure 2-4 As shown, the liquid outlet 30 includes several spray elements 32, each of which is connected to the liquid inlet 20 and forms an installation cavity 31. Each spray element 32 is provided with an outlet 321. Specifically, the detection liquid is supplied to the liquid inlet 20 via the liquid supply element 50, then enters each spray element 32, and finally sprays out from the outlet 321 of each spray element 32 to the detection site, thus realizing the supply of detection liquid to the detection site. Furthermore, the spray elements 32 form an installation cavity 31, so that the liquid outlet 30 does not need to be provided with a separate installation cavity 31 to install the imaging element 41, thereby simplifying the structure of the liquid outlet 30.

[0058] In this embodiment, as Figure 2-4 As shown, there are two spray elements 32. The two spray elements 32 are connected to the liquid inlet end 20 and are combined with the liquid inlet end 20 to form a "Y" shaped channel structure.

[0059] Understandably, the number of spray components 32 can be any number, more than two.

[0060] Understandably, the outlet 321 can be set at any position of the spray component 32, as long as it can flow out from the outlet 321 and enter the airtightness testing area.

[0061] In one embodiment, such as Figure 2 and 4 As shown, the outlet 321 is located at the end of each spray element 32 away from the inlet end 20. Specifically, by being located at the end of the spray element 32 away from the inlet end 20, the outlet 321 allows the test liquid to be sprayed out through the end of each spray element 32 and finally supplied to the test area.

[0062] In one embodiment, such as Figure 3As shown, the liquid outlet 321 is located on the side of each spray element 32 near the mounting cavity 31. Specifically, by setting the liquid outlet 321 on the side of the spray element 32 near the mounting cavity 31, the test liquid will be sprayed out at an angle towards the mounting cavity 31. With this arrangement, during the airtightness test of the annular part, each spray element 32 can be positioned on both sides of the annular part, and the test liquid can be sprayed out from the inside of the spray element 32, thus supplying the spray liquid into the annular part, thereby facilitating the airtightness test of this part.

[0063] This utility model embodiment also provides an airtightness detection device, such as Figure 4 As shown, the device includes a liquid supply component 50 and a nozzle structure 60. The liquid supply component 50 is provided with a liquid supply port 51 for storing the test liquid and supplying it through the liquid supply port 51. The nozzle structure 60 is connected to the liquid supply port 51 through a liquid inlet end 20. Specifically, by setting up the liquid supply component 50 and the nozzle structure 60, when testing the airtightness of components such as the filter 10, the liquid outlet 321 of the airtightness testing device is aligned with the airtightness testing area. The liquid supply component 50 supplies the test liquid into the nozzle structure 60, and finally enters the testing area through the liquid outlet 321. Then, by inflating the testing component, the airtightness of the testing component can be tested. The monitoring module 40 monitors the testing area, allowing the testing personnel to detect leaks at the testing area without directly observing it. This facilitates the detection of air bubbles at the testing area and improves the accuracy of the airtightness testing of the testing component.

[0064] In some embodiments, the liquid supply unit 50 includes a spray bottle. Specifically, the spray bottle can store the detection liquid and spray the detection liquid into the liquid inlet 20, thereby achieving precise control over the amount of detection liquid supplied.

[0065] In this embodiment, as Figure 4 As shown, the spray bottle has a handle 52 on its side and a spray button 53 on its top. When testing the airtightness of components such as the filter 10, the handle 52 can be held and the spray button 53 on the top can be pressed to drive the test liquid to the inlet end 20. The test liquid is then sprayed from the outlet 321 of the outlet end 30 onto the test area, thus enabling the airtightness test of the test area. After the spray bottle rotates around the test area once, the airtightness of the test area can be tested from all directions, thereby ensuring the accuracy of the airtightness test.

[0066] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the utility models disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.

[0067] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A showerhead structure, comprising: include: The inlet end is used to connect to the liquid supply component; The liquid outlet is connected to the liquid inlet and is used to supply liquid to the liquid inlet through the liquid supply component, so as to supply the test liquid into the airtightness test part. as well as A monitoring module, connected to the liquid outlet, is used to monitor the airtightness detection area.

2. The showerhead structure of claim 1, wherein The monitoring module includes an imaging element and a display element. The imaging element is connected to the liquid outlet end and is used to form an image of the airtightness detection area. The display element is connected to the imaging element and is used to display the image of the airtightness detection area formed by the imaging element.

3. The showerhead structure of claim 2, wherein The imaging device includes a camera.

4. The showerhead structure of claim 2, wherein The liquid outlet end is provided with a mounting cavity, and the imaging element is installed in the mounting cavity.

5. The showerhead structure of claim 4, wherein The liquid outlet includes several spray elements, each of which is connected to the liquid inlet and forms the mounting cavity. Each spray element is provided with a liquid outlet.

6. The showerhead structure of claim 5, wherein The liquid outlet is located at the end of each spray element away from the liquid inlet.

7. The showerhead structure of claim 5, wherein The liquid outlet is located on the side of each spray component near the mounting cavity.

8. The showerhead structure of any of claims 1-7, wherein, The inner side of the liquid inlet end is provided with a threaded structure, which is used to thread the liquid inlet end to the liquid supply port of the liquid supply component.

9. An air tightness detection device characterized by, include: The liquid supply unit is provided with a liquid supply port for storing the test liquid and supplying the liquid through the liquid supply port; as well as The nozzle structure according to any one of claims 1-8, wherein the nozzle structure is connected to the liquid supply port via the liquid inlet end.

10. The air tightness testing apparatus of claim 9, wherein, The liquid supply device includes a spray bottle.

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