Air floatation direct drive motor
By adopting a new structural layout of stator, mover, sleeve and air-bearing platform in the air-bearing DD motor, and using the extension to connect and form an air-bearing channel, the problem of insufficient space for air-bearing platform limit is solved, and the driving accuracy and stability are improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN CRONUS TECHNOLOGY CO LTD
- Filing Date
- 2025-04-24
- Publication Date
- 2026-04-21
AI Technical Summary
The air-bearing platform cannot obtain a long distance of limiting space, which makes the rotation axis prone to tilting and affects the driving accuracy of the air-bearing DD motor.
The stator, mover, sleeve and air float are arranged sequentially from the outside to the inside. The air float and mover are fixedly connected by the extension, and an air float channel is formed between the sleeve and the air float. The axial setting is changed to a radial setting, and the size of the sleeve is increased to obtain a larger limiting space.
This improves the driving accuracy of the air-float DD motor, prevents the rotation axis from tilting, and ensures that normal operation is not affected.
Smart Images
Figure CN224154146U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of drive equipment technology, and in particular to an air flotation direct drive motor. Background Technology
[0002] DD motors are high-precision, high-rigidity direct-drive motors primarily used in the semiconductor industry, precision testing and machining, medical device manufacturing, aerospace, photovoltaic and lithium battery manufacturing, CNC machine tools, and automotive manufacturing. In semiconductor dicing machines, DD motors are typically used as the workpiece drive, rotating the clamping device holding the workpiece at a fixed angle to meet machining requirements.
[0003] An air-float DD motor is a type of DD motor that reduces or eliminates mechanical friction during the drive process through air-float technology. Compared to ordinary DD motors, air-float DD motors require the mover to first drive the air-float platform to rotate, and then the air-float platform drives the coupling or other transmission mechanism to rotate for output.
[0004] The driving accuracy of traditional air-bearing DD motors is limited by the loading method of the air-bearing platform. The conventional practice is to install the air-bearing platform inside a sleeve, with the sleeve and the motor (mover and stator) arranged axially along the rotation axis. Therefore, the air-bearing platform cannot obtain a long range of limiting space, making the rotation axis prone to tilting, which affects the driving accuracy of the air-bearing DD motor. Utility Model Content
[0005] To address the issue that the air-bearing platform cannot achieve a long limiting space, which makes the rotation axis prone to tilting and affects the driving accuracy of the air-bearing DD motor, this utility model proposes an air-bearing direct drive motor.
[0006] The technical solution adopted by this utility model is an air-float direct drive motor, which includes a stator, a mover, a sleeve and an air-float platform arranged sequentially from the outside to the inside. The stator is fixedly connected to the housing and the sleeve. The end of the air-float platform has an extension extending towards the mover. The air-float platform is fixedly connected to the mover through the extension. An air-float channel is formed between the sleeve and the air-float platform.
[0007] In some embodiments, the mover has a stepped first loading surface and a second loading surface, the first loading surface and the outer wall of the sleeve are disposed close together, and the second loading surface and the extension abut against each other.
[0008] In some embodiments, the first loading surface and the second loading surface are connected by a third loading surface, and the second loading surface and the third loading surface abut against the two adjacent surfaces of the extension, respectively. The extension is connected to the third loading surface by bolt thread.
[0009] In some embodiments, the mover includes an inner ring tube, an annular plate, and an outer ring tube that are fixedly connected in sequence. The outer ring tube is driven to cooperate with the stator, and the inner ring tube and the extension are fixedly connected.
[0010] In some embodiments, the annular plate is provided with at least two through holes at equal angular intervals around its circumference.
[0011] In some embodiments, a cavity is formed between the housing and the sleeve, the housing has a mounting beam that divides the cavity into an upper cavity and a lower cavity, the sleeve has a protruding structure extending into the upper cavity, the protruding structure and the mounting beam are fixedly connected, the stator and the mover are located in the lower cavity, and the stator and the housing are fixedly connected.
[0012] In some embodiments, the two adjacent sides of the mounting beam abut against the sleeve, and the protruding structure is connected to the mounting beam by bolt threads.
[0013] In some embodiments, the upper end face, lower end face, and inner wall of the sleeve all form an air flotation channel with the air flotation platform.
[0014] In some embodiments, the air flotation platform includes an upper air flotation plate, an air flotation cylinder, and a lower air flotation plate connected in sequence. Washers are provided at the connection positions between the upper air flotation plate and the air flotation cylinder, and between the lower air flotation plate and the air flotation cylinder, and all are fixedly connected by bolts.
[0015] In some embodiments, air flotation channels are formed between the upper surface of the upper air flotation plate and the upper end face of the sleeve, between the outer wall of the air flotation cylinder and the inner wall of the sleeve, and between the lower surface of the lower air flotation plate and the lower end face of the sleeve.
[0016] Compared with the prior art, the present invention has the following beneficial effects:
[0017] This application discloses an air-bearing direct drive motor, comprising a stator, a mover, a sleeve, and an air-bearing platform arranged sequentially from the outside to the inside. The stator is fixedly connected to the sleeve via a housing. The end of the air-bearing platform has an extension extending towards the mover, and the air-bearing platform is fixedly connected to the mover via the extension. An air-bearing channel is formed between the sleeve and the air-bearing platform. By positioning the mover and stator on the outside of the sleeve and connecting the air-bearing platform and the mover via the extension, the axial arrangement is changed to a radial arrangement. This allows for a longer sleeve, provides greater limiting space for the air-bearing platform when it is placed within the sleeve, and does not affect the normal operation of the air-bearing direct drive motor.
[0018] Compared with the prior art, the air-bearing direct drive motor disclosed in this application can enable the air-bearing platform to obtain a longer limiting space, making it less likely for the rotation axis to tilt, thereby improving the driving accuracy. Attached Figure Description
[0019] The present invention will now be described in detail with reference to the embodiments and accompanying drawings, wherein:
[0020] Figure 1 A schematic diagram of the structure of an air-float direct drive motor according to an embodiment of the present invention is shown;
[0021] Figure 2 It shows that according to Figure 1 A cross-sectional view of a direct-drive air-float motor is provided.
[0022] Figure 3 It shows that according to Figure 2 An enlarged view of region A in a direct-drive air flotation motor is provided.
[0023] Label Explanation:
[0024] 10. Stator;
[0025] 20. Moving element; 21. First loading surface; 22. Second loading surface; 23. Third loading surface; 24. Inner ring tube; 25. Annular plate; 26. Outer ring tube;
[0026] 30. Sleeve; 31. Protruding structure;
[0027] 40. Air flotation platform; 41. Extension section; 42. Upper air flotation plate; 43. Air flotation cylinder; 44. Lower air flotation plate; 45. Washer;
[0028] 50. Shell; 51. Upper cavity; 52. Lower cavity; 53. Mounting beam. Detailed Implementation
[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. Examples of embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0030] This utility model discloses an air flotation direct drive motor. Please refer to [reference needed]. Figure 1 and Figure 2 It includes a stator 10, a mover 20, a sleeve 30 and an air float 40 arranged sequentially from the outside to the inside. The stator 10 is fixedly connected to the sleeve 30 through the housing 50. The end of the air float 40 has an extension 41 extending toward the mover 20. The air float 40 is fixedly connected to the mover 20 through the extension 41. An air float channel is formed between the sleeve 30 and the air float 40.
[0031] The mover 20 and stator 10 are positioned on the outside of the sleeve 30, and the air float 40 and mover 20 are connected by the extension 41. This changes the axial arrangement to a radial arrangement, allowing the sleeve 30 to be longer. When the air float 40 is placed within the sleeve 30, it gains a larger limiting space without affecting the normal operation of the air-float direct drive motor. Compared to existing technologies, the air-float direct drive motor disclosed in this application allows the air float 40 to achieve a longer limiting space, making the rotation axis less prone to tilting and thus improving drive accuracy.
[0032] It should be noted that the air flotation channel formed between the sleeve 30 and the air flotation platform 40 can be formed on all contact surfaces or on only part of the contact surfaces, thereby achieving air flotation. The air flotation channel is used to allow airflow to pass through so that the air flotation platform 40 is suspended on all or part of the contact surfaces.
[0033] This application does not limit the housing 50 to be located outside the stator 10, mover 20, sleeve 30, and air-bearing platform 40. The location of the housing 50 does not affect the driving function and air-bearing function of this application. In addition, the stator 10 is fixedly connected to the sleeve 30 through the housing 50. Unlike the extension 41, the structure of the housing 50 is not limited. This is because both the stator 10 and the sleeve 30 are non-moving structures. Technicians can use housings of various shapes to achieve a fixed connection between the stator 10 and the sleeve 30 as needed. For example, shapes that adapt to the installation position of the stator 10 and the sleeve 30, or ring structures, portal structures, beam structures, etc. The fixing method can also be threaded connection, snap-fit connection, adhesive, etc.
[0034] Regarding the extension 41 of the air-bearing platform 40 extending toward the mover 20, the extension 41 may extend beyond the sleeve 30 and be located below the mover 20, or it may not extend beyond the sleeve 30 and be located below the sleeve 30.
[0035] In some embodiments, please refer to Figure 2 and Figure 3 The mover 20 has a stepped first loading surface 21 and a second loading surface 22. The first loading surface 21 is close to the outer wall of the sleeve 30, and the second loading surface 22 abuts against the extension 41.
[0036] Specifically, since the positions of the mover 20 and the stator 10 have changed, how to achieve a stable fixed connection between the mover 20 and the air-bearing platform 40 is also a problem that urgently needs to be solved. Furthermore, the mover 20 and the air-bearing platform 40 need to rotate simultaneously, so limiting the movement of the mover 20 will also affect the air-bearing platform 40. For these reasons, this application provides the mover 20 with a stepped first loading surface 21 and a second loading surface 22. The first loading surface 21 is close to the outer wall of the sleeve 30, thereby limiting the movement of the mover 20. The second loading surface 22 abuts against the extension 41, thus limiting the extension 41. Specifically, this can be achieved through an interference fit.
[0037] In some embodiments, please refer to Figure 2 and Figure 3 The first loading surface 21 and the second loading surface 22 are connected by the third loading surface 23. The second loading surface 22 and the third loading surface 23 respectively abut against the two adjacent surfaces of the extension 41. The extension 41 is connected to the third loading surface 23 by bolt thread.
[0038] It should be noted that, in order to further ensure a stable fixed connection between the mover 20 and the air-bearing platform 40, both the second loading surface 22 and the third loading surface 23 abut against the extension 41, and the mover 20 and the air-bearing platform 40 are fixed by means of bolt thread connection.
[0039] In some embodiments, please refer to Figure 2 The mover 20 includes an inner ring tube 24, an annular plate 25 and an outer ring tube 26 that are fixedly connected in sequence. The outer ring tube 26 and the stator 10 are driven to cooperate, and the inner ring and the extension 41 are fixedly connected.
[0040] To accommodate a specific diameter air-bearing direct-drive motor and other structures such as the extension 41 and sleeve 30, this application features a targeted design for the mover 20, achieving both lightweighting and rigidity. When the diameter needs to be increased or decreased, the manufacturer can enlarge or reduce the diameter of the annular plate 25. Furthermore, both the inner tube 24 and the outer tube 26 are arranged in the same direction as the sleeve 30, resulting in a larger contact area and improved stability.
[0041] In some embodiments, the annular plate 25 is provided with at least two through holes at equal angular intervals around its circumference.
[0042] To further reduce the weight of the air-float direct drive motor, this application makes uniform openings on the annular plate 25. The uniform openings will not cause the rotor 20 to rotate unbalanced, and at the same time, they can also reduce the weight of the motor.
[0043] In some embodiments, please refer to Figure 2A cavity is formed between the housing 50 and the sleeve 30. The housing 50 has a mounting beam 53 that divides the cavity into an upper cavity 51 and a lower cavity 52. The sleeve 30 has a protruding structure 31 that extends into the upper cavity 51. The protruding structure 31 and the mounting beam 53 are fixedly connected. The stator 10 and the mover 20 are located in the lower cavity 52. The stator 10 and the housing 50 are fixedly connected.
[0044] It should be noted that, in addition to the structural design at the end of the sleeve 30 near the extension 41, this application also includes a structural design at the end of the sleeve 30 away from the extension 41. Regarding the extension 41, to achieve vertical balance of the air-bearing platform 40 and meet its own fixation requirements, this application provides a protruding structure 31 on the sleeve 30 that extends into the upper cavity 51. Furthermore, due to the separation provided by the mounting beam 53, dust present in the upper cavity 51 will not enter the lower cavity 52, thereby affecting the electromagnetic induction of the stator 10 and the mover 20.
[0045] In some embodiments, please refer to Figure 2 The two adjacent sides of the mounting beam 53 abut against the sleeve 30, and the protruding structure 31 is connected to the mounting beam 53 by bolt threads.
[0046] This embodiment proposes a preferred fixing method, in which the two adjacent sides of the mounting beam 53 are abutted against the sleeve 30 to limit their position, and at the same time, they are locked by bolts through threaded connection.
[0047] In some embodiments, the upper end face, lower end face, and inner wall of the sleeve 30 form an air flotation channel with the air flotation platform 40.
[0048] It should be noted that, in order to obtain the most balanced air flotation effect, the upper end face, lower end face and inner wall of the sleeve 30 are all connected with the air flotation platform 40 to form air flotation channels. Compared with the conventional method of only making the upper end face air flotation, the driving process is more stable and the rotation axis is less prone to shaking.
[0049] In some embodiments, please refer to Figure 2 The air flotation platform 40 includes an upper air flotation plate 42, an air flotation cylinder 43, and a lower air flotation plate 44 connected in sequence. Washers 45 are provided at the connection positions between the upper air flotation plate 42 and the air flotation cylinder 43, and between the lower air flotation plate 44 and the air flotation cylinder 43, and are fixedly connected by bolts.
[0050] For ease of installation, the air flotation platform 40 comprises three parts: an upper air flotation plate 42, an air flotation cylinder 43, and a lower air flotation plate 44. The gaskets 45 ensure a good seal between the three parts, preventing air leakage and thus affecting the air flotation effect.
[0051] In some embodiments, air flotation channels are formed between the upper surface of the upper air flotation plate 42 and the upper end face of the sleeve 30, between the outer wall of the air flotation cylinder 43 and the inner wall of the sleeve 30, and between the lower air flotation plate 44 and the lower end face of the sleeve 30.
[0052] In this embodiment, the air flotation cylinder 43 and the sleeve 30 have the same axial length. When the upper air flotation plate 42 and the lower air flotation plate 44 are respectively set on the upper end face and the lower section of the sleeve 30 to form an air flotation channel, the upper end face and the lower end face of the sleeve 30 can also limit the air flotation cylinder 43, thus obtaining stable driving accuracy.
[0053] The above embodiments can be used in combination with each other.
[0054] In the description of this specification, the terms "Embodiment 1," "this embodiment," or "in one embodiment," etc., indicate that the specific features, structures, materials, or characteristics described in connection with that embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example; moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in one or more embodiments or examples.
[0055] In the description of this specification, the terms "connection," "installation," "fixing," "setting," and "having" are interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0056] In the description of this specification, relational terms such as “first” and “second” are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase “comprising one…” does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0057] The above description of the embodiments is intended to enable those skilled in the art to understand and apply the technology of this invention. Those skilled in the art can readily make various modifications to these examples and apply the general principles described herein to other embodiments without creative effort. Therefore, this invention is not limited to the above embodiments. Modifications in the following situations should be within the scope of protection of this invention: ① New technical solutions implemented based on the technical solution of this utility model and combined with existing common knowledge, where the technical effects of the new technical solution do not exceed the technical effects of this utility model; ② Equivalent substitutions of some features of the technical solution of this utility model using known technology, resulting in the same technical effects as those of this utility model; ③ Extendable technical solutions based on the technical solution of this utility model, where the substantive content of the extended technical solution does not exceed the technical solution of this utility model; ④ Equivalent transformations made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields.
Claims
1. An air floating direct drive motor characterized by, The device includes a stator, a mover, a sleeve, and an air-float platform arranged sequentially from the outside to the inside. The stator is fixedly connected to the sleeve through a housing. The end of the air-float platform has an extension extending toward the mover. The air-float platform is fixedly connected to the mover through the extension. An air-float channel is formed between the sleeve and the air-float platform.
2. A gas-float direct-drive motor according to claim 1, wherein The moving part has a stepped first loading surface and a second loading surface, the first loading surface and the outer wall of the sleeve are close to each other, and the second loading surface and the extension abut against each other.
3. A gas-float direct-drive motor according to claim 2, wherein The first loading surface and the second loading surface are connected by a third loading surface. The second loading surface and the third loading surface respectively abut against the two adjacent surfaces of the extension. The extension is connected to the third loading surface by bolts.
4. A gas-float direct-drive motor according to claim 3, wherein The moving element includes an inner ring tube, an annular plate, and an outer ring tube that are fixedly connected in sequence. The outer ring tube is driven to cooperate with the stator, and the inner ring tube is fixedly connected to the extension.
5. A gas-float direct-drive motor according to claim 4, wherein The annular plate has at least two through holes evenly spaced at the same angle around its circumference.
6. A gas-float direct drive motor according to claim 1, wherein A cavity is formed between the housing and the sleeve. The housing has a mounting beam that divides the cavity into an upper cavity and a lower cavity. The sleeve has a protruding structure that extends into the upper cavity. The protruding structure is fixedly connected to the mounting beam. The stator and the mover are located in the lower cavity. The stator is fixedly connected to the housing.
7. A gas-float direct drive motor according to claim 6, wherein The two adjacent sides of the mounting beam abut against the sleeve, and the protruding structure is connected to the mounting beam by bolts.
8. A gas-float direct-drive motor according to any one of claims 1 to 7, characterized in that The upper end face, lower end face, and inner wall of the sleeve all form the air flotation channel with the air flotation platform.
9. A gas-float direct drive motor according to claim 8, wherein The air flotation platform includes an upper air flotation plate, an air flotation cylinder, and a lower air flotation plate connected in sequence. Washers are provided at the connection positions between the upper air flotation plate and the air flotation cylinder, and between the lower air flotation plate and the air flotation cylinder, and all are fixedly connected by bolts.
10. A gas-float direct-drive motor according to claim 9, wherein The air flotation channel is formed between the upper air flotation plate and the upper end face of the sleeve, between the outer wall of the air flotation cylinder and the inner wall of the sleeve, and between the lower air flotation plate and the lower end face of the sleeve.