Light shield of integrated probe station

Abstract

The utility model relates to the technical field of shading protection of integrated probe stations, in particular to a shading cover of an integrated probe station. Comprising an integrated sealing cabinet, an operation table is arranged in the integrated sealing cabinet, a PVC automatic lifting door is installed on the surface of the integrated sealing cabinet, a detachable stable pull rod is installed at the position, corresponding to the PVC automatic lifting door, of the surface of the integrated sealing cabinet, and a four-axis movement module is installed at the upper end of the inner wall of the integrated sealing cabinet; an equipment interaction signal wire port is formed in the surface of one side of the integrated sealing cabinet, an equipment man-machine operation interface display support is fixedly connected to one side of the surface of the integrated sealing cabinet, and a PC display is fixedly connected to the surface of the upper end of the equipment man-machine operation interface display support. And one side of the equipment man-machine operation interface display bracket is fixedly connected with an operation keyboard hanging bracket. The integrated probe station light shield provided by the utility model has the advantage that the integrated probe station can be conveniently subjected to operation protection.

Description

Technical Field

[0001] This utility model relates to the field of integrated probe station light shield technology, and in particular to an integrated probe station light shield. Background Technology

[0002] An integrated probe station light shield is a protective device designed specifically for high-precision measurement equipment such as semiconductor testing and electronic testing. It aims to prevent external light from interfering with the testing process and is commonly used in integrated circuit (IC) testing, wafer probing, and packaging testing to ensure the accuracy and reliability of the test. It is frequently used in the manufacturing process of electronic products.

[0003] Existing technologies, such as the utility model patent with publication number CN217334008U, disclose a light shield. This patent discloses two light shields, detachably connected to both ends of a focusing cavity. The xenon lamp electrode is located inside the focusing cavity, and both ends of the focusing cavity have external ends for sealing. The external ends have terminals for the xenon lamp electrode and a crystal light-transmitting hole. The light shield covers the terminals. An isolation channel is provided inside the light shield, located between the terminals and the crystal light-transmitting hole. The light shield is made of polytetrafluoroethylene (PTFE). This utility model discloses two light shields, each covering one end of the focusing cavity. The light shields are made of PTFE, effectively shielding the xenon lamp from light radiation outside the focusing cavity, preventing damage to the eyes and accelerated aging of non-metallic materials inside the laser. The isolation channel between the terminals and the crystal light-transmitting hole prevents the heat from the xenon lamp electrode from affecting the laser beam path.

[0004] During the operation of integrated probes, it was found that the integrated probes could not completely block external light when shielding, resulting in interference light during the test and affecting the accuracy of the test results. In addition, some light shields are too heavy or bulky, increasing the burden on the probe station and negatively affecting the portability and flexibility of the operators. Furthermore, the installation process of the light shielding mechanism is relatively cumbersome, requiring professional personnel or specific tools for installation and debugging. As a result, the existing technology has problems such as complex and bulky structure, large size, inaccurate positioning, poor rigidity, and poor ability to eliminate stray light. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of existing technologies, such as complex and bulky structure, large size, inaccurate positioning, poor rigidity, and poor ability to eliminate stray light.

[0006] To solve the above technical problems, this utility model provides an integrated probe station light shield, comprising: an integrated sealed cabinet, an operating table inside the integrated sealed cabinet, a PVC automatic lifting door installed on the surface of the integrated sealed cabinet, a detachable stabilizing rod installed on the surface of the integrated sealed cabinet corresponding to the position of the PVC automatic lifting door, a four-axis motion module installed on the upper end of the inner wall of the integrated sealed cabinet, a device interaction signal cable port opened on one side surface of the integrated sealed cabinet, a device human-machine interface display bracket fixedly connected to one side surface of the integrated sealed cabinet, a PC monitor fixedly connected to the upper surface of the device human-machine interface display bracket, an operation keyboard mounting bracket fixedly connected to one side of the device human-machine interface display bracket, and an electrical control box fixedly connected to the end surface of the integrated sealed cabinet away from the PC monitor.

[0007] The effects achieved by the above components are as follows: the combination of the integrated sealed cabinet and the PVC automatic lifting door reduces the interference of external light on the internal equipment or work area, while the quick opening and closing function of the PVC automatic lifting door can further ensure that light is quickly isolated when needed, while keeping the equipment operating environment clean. The four-axis motion module in the inner shell of the integrated sealed cabinet may be used to drive the internal components of the light shield for precise motion control, ensuring that they can move according to the preset program.

[0008] Preferably, the PVC automatic lifting door includes two tracks, a sliding mechanism, a baffle, and a mounting frame. The two tracks are fixedly connected to both sides of the surface of the integrated sealing cabinet. The sliding mechanism is set on the surface of the integrated sealing cabinet at the position corresponding to the tracks. The sliding mechanism includes a servo motor, a chain, and a sprocket. The servo motor is fixedly connected to one side of the inner wall of the mounting frame. The output end of the servo motor is fixedly connected to the sprocket. One side of the baffle is fixedly connected to the side wall of the chain. The chain and the sprocket are connected in a driving connection.

[0009] The effects achieved by the above components are as follows: the automatic lifting door uses a servo motor to drive one-button opening and closing. The servo motor is responsible for driving, and the door movement is precisely controlled by the control algorithm and encoder feedback. At the same time, the user can easily operate the door opening and closing through the control panel or remote control. It is convenient to operate and achieves precise control, high reliability and intelligent control.

[0010] Preferably, the four-axis motion module includes a mounting plate, one side of which is fixedly connected to the upper inner wall of the integrated sealed cabinet. A Y-axis moving module is fixedly connected to the surface of the mounting plate, and X-axis moving modules are fixedly connected to both ends of the mounting plate. A Z-axis moving module is fixedly connected to one side of the mounting plate at a position corresponding to the Y-axis moving module. A connecting plate is fixedly connected to the moving end of the Z-axis moving module, and an A-axis rotating module is fixedly connected to the surface of the connecting plate. The four-axis motion module is electrically connected to the electrical control box.

[0011] The effects achieved by the above components are as follows: the four-axis motion module adopts a design combining servo motors and ball screws, which has high repeatability and thus achieves precise positioning and motion control; its load capacity is strong, ensuring that the four-axis motion mechanism can still maintain stable motion performance when subjected to heavy loads; in addition, the mechanism also has the characteristics of high efficiency, stability and easy maintenance.

[0012] Preferably, an equipment status indicator light is fixedly connected to the upper corner surface of the integrated sealed cabinet, and the equipment status indicator light is electrically connected to the electrical control box.

[0013] The aforementioned components achieve the following effect: the device status indicator lights can be used to intuitively display the working status of the light shield, making it convenient for users to make quick judgments and operate.

[0014] Preferably, the bottom four corners of the integrated sealing cabinet are rotatably connected to casters, and the bottom of the integrated sealing cabinet is fixedly connected to a locking foot cup corresponding to the position of the casters.

[0015] The aforementioned components achieve the following effects: the caster wheel and the locking feet, as auxiliary components of the sunshade, provide the functions of movement and fixation, respectively. The caster wheel allows the entire sunshade mechanism to be easily moved and adjusted between different positions; while the locking feet can fix the position of the sunshade mechanism when needed, preventing it from moving accidentally.

[0016] Preferably, the integrated sealed cabinet is an aluminum alloy cabinet, and the inner wall dimensions of the integrated sealed cabinet are adapted to the three-dimensional dimensions of the operating table.

[0017] The effects achieved by the above components are as follows: the aluminum alloy sealed cabinet can be used for a long time, and the bottom of the integrated sealed cabinet is covered with a black nylon cloth cover for all-round light blocking, which effectively prevents stray light from affecting the accuracy of test results.

[0018] Compared with related technologies, the integrated probe station light shield provided by this utility model has the following beneficial effects:

[0019] This utility model provides an integrated probe station light shield, which forms a closed space by combining an integrated sealed cabinet and a PVC automatic lifting door to reduce the interference of external light on internal equipment or work areas. The quick opening and closing function of the PVC automatic lifting door can further ensure that light is quickly isolated when needed, while keeping the equipment operating environment clean. The four-axis motion module in the inner shell of the integrated sealed cabinet may be used to drive the internal components of the light shield for precise motion control, ensuring that they can move according to the preset program. Attached Figure Description

[0020] Figure 1 A schematic diagram of the structure of an integrated probe station light shield provided by this utility model;

[0021] Figure 2 for Figure 1 The diagram shows the internal structure of the three-dimensional structure shown.

[0022] Figure 3 for Figure 1 A schematic diagram of the bottom part of the three-dimensional structure shown;

[0023] Figure 4 for Figure 1 A schematic diagram of the upper part of the three-dimensional structure shown;

[0024] Figure 5 for Figure 2 A partial structural schematic diagram of the four-axis motion module shown.

[0025] The diagram is labeled as follows: 1. Integrated sealed cabinet; 2. PVC automatic lifting door; 21. Baffle; 22. Track; 23. Mounting frame; 24. Sliding mechanism; 3. Four-axis motion module; 31. X-axis movement module; 32. Y-axis movement module; 33. Z-axis movement module; 34. A-axis rotation module; 35. Connecting plate; 36. Mounting plate; 4. Equipment interaction signal cable port; 5. PC monitor; 6. Operation keyboard mounting bracket; 7. Equipment human-machine interface monitor bracket; 8. Fuma wheel; 9. Locking feet; 10. Equipment status indicator light; 11. Operating console; 12. Electrical control box; 13. Detachable stabilizing rod. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0027] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0028] Please see Figures 1 to 5This utility model provides an integrated probe station light shield, comprising: an integrated sealed cabinet 1, an operating table 11 inside the integrated sealed cabinet 1, a PVC automatic lifting door 2 installed on the surface of the integrated sealed cabinet 1, a detachable stabilizing rod 13 installed on the surface of the integrated sealed cabinet 1 corresponding to the position of the PVC automatic lifting door 2, a four-axis motion module 3 installed on the upper end of the inner wall of the integrated sealed cabinet 1, a device interaction signal cable port 4 opened on one side surface of the integrated sealed cabinet 1, a device human-machine interface display bracket 7 fixedly connected to one side surface of the integrated sealed cabinet 1, a PC display 5 fixedly connected to the upper surface of the device human-machine interface display bracket 7, an operation keyboard mounting bracket 6 fixedly connected to one side of the device human-machine interface display bracket 7, and an electrical control box 12 fixedly connected to the end surface of the integrated sealed cabinet 1 away from the PC display 5.

[0029] In the embodiments of this utility model, please refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 The PVC automatic lifting door 2 includes two tracks 22, a sliding mechanism 24, a baffle 21, and a mounting frame 23. The two tracks 22 are fixedly connected to both sides of the surface of the integrated sealing cabinet 1. The sliding mechanism 24 is set on the surface of the integrated sealing cabinet 1 at the position corresponding to the tracks 22. The sliding mechanism 24 includes a servo motor, a chain, and a sprocket. The servo motor is fixedly connected to one side of the inner wall of the mounting frame 23, and the output end of the servo motor is fixedly connected to the sprocket. One side of the baffle 21 is fixedly connected to the side wall of the chain, and the chain and sprocket are connected for transmission. The four-axis motion module 3 includes a mounting plate 36. One side of the mounting plate 36 is fixedly connected to the upper side wall of the inner wall of the integrated sealing cabinet 1. A Y-axis moving module 32 is fixedly connected to the surface of the mounting plate 36, and two ends of the mounting plate 36 are fixedly connected to... X-axis moving module 31, Z-axis moving module 33 is fixedly connected to one side surface of mounting plate 36 at the position corresponding to Y-axis moving module 32, Z-axis moving module 33 is fixedly connected to the moving end of Z-axis moving module 33, A-axis rotating module 34 is fixedly connected to the surface of connecting plate 35, four-axis motion module 3 is electrically connected to electrical control box 12, equipment status indicator light 10 is fixedly connected to the upper corner surface of integrated sealing cabinet 1, equipment status indicator light 10 is electrically connected to electrical control box 12, four corners of the bottom of integrated sealing cabinet 1 are rotatably connected to casters 8, lock-locking cups 9 are fixedly connected to the bottom of integrated sealing cabinet 1 at the position corresponding to casters 8, integrated sealing cabinet 1 is an aluminum alloy cabinet, and the inner wall dimensions of integrated sealing cabinet 1 are adapted to the three-dimensional dimensions of operating table 11;

[0030] The working principle of the integrated probe station light shield provided by this utility model is as follows: During the operation and use of the integrated probe station, it is impossible to completely block the external light, resulting in interference light during the test and affecting the accuracy of the test results. At this time, the light shield mechanism is used for protection. The integrated sealed cabinet 1 serves as the main structure of the light shield. The integrated sealed cabinet 1 fixes other components inside or outside by welding or screws. The reserved holes and mounting brackets on the outer shell are used to install other components, such as the PC monitor 5, the operation keyboard mounting bracket 6, and the equipment human-machine interface display bracket 7. The PVC automatic lifting door 2 is connected to the outer shell through the track 22 and the sliding mechanism 24. At the same time, the door motor and sensor are connected to the electrical control box 12 through signal lines. The four-axis motion module 3 is connected to the internal structure of the integrated sealed cabinet 1 through the mounting plate 36. Meanwhile, the electrical control box 12 is connected to the four-axis motor through wires or signal lines. The motion module 3 is connected, and the electrical control box 12 is fixed to the appropriate position of the integrated sealed cabinet 1 with screws. The equipment interaction signal cable port 4 is a reserved channel for placing the wires and signal lines connecting various components. The wires and signal lines are connected to the electrical control box 12, the four-axis motion module 3, the PC display 5, the operation keyboard, and other components through the equipment interaction signal cable port 4. The PC display 5 and the operation keyboard are connected to the electrical control box 12 through wires or signal lines to display the equipment status and receive user input. These components may be fixed to the appropriate position of the housing through mounting brackets and display brackets. The equipment status indicator light 10 is connected to the electrical control box 12 through wires. The equipment status indicator light 10 is usually fixed to the top or side of the housing for user observation. The fuma wheel 8 is fixed to the bottom of the housing through mounting brackets or bolts. The locking foot cup 9 is also fixed to the bottom of the housing to provide additional stability and support when the sunshade is placed.

[0031] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0032] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. An integrated probe station light shield, characterized in that, include: An integrated sealed cabinet (1) is provided with an operating table (11) inside. A PVC automatic lifting door (2) is installed on the surface of the integrated sealed cabinet (1). A detachable stabilizing rod (13) is installed on the surface of the integrated sealed cabinet (1) corresponding to the position of the PVC automatic lifting door (2). A four-axis motion module (3) is installed on the upper end of the inner wall of the integrated sealed cabinet (1). An equipment interaction signal cable port (4) is opened on one side of the surface of the integrated sealed cabinet (1). A human-machine interface display bracket (7) is fixedly connected to one side of the surface of the integrated sealed cabinet (1). A PC monitor (5) is fixedly connected to the upper surface of the human-machine interface display bracket (7). An operation keyboard mounting bracket (6) is fixedly connected to one side of the human-machine interface display bracket (7). An electrical control box (12) is fixedly connected to the end of the integrated sealed cabinet (1) away from the PC monitor (5).

2. The integrated probe station light shield according to claim 1, characterized in that, The PVC automatic lifting door (2) includes two tracks (22), a sliding mechanism (24), a baffle (21), and a mounting frame (23). The two tracks (22) are fixedly connected to both sides of the surface of the integrated sealing cabinet (1). The sliding mechanism (24) is set on the surface of the integrated sealing cabinet (1) at the position corresponding to the tracks (22). The sliding mechanism (24) includes a servo motor, a chain, and a sprocket. The servo motor is fixedly connected to one side of the inner wall of the mounting frame (23). The output end of the servo motor is fixedly connected to the sprocket. One side of the baffle (21) is fixedly connected to the side wall of the chain. The chain and the sprocket are connected in a drive connection.

3. The integrated probe station light shield according to claim 1, characterized in that, The four-axis motion module (3) includes a mounting plate (36). One side of the mounting plate (36) is fixedly connected to the upper side wall of the inner wall of the integrated sealed cabinet (1). A Y-axis moving module (32) is fixedly connected to the surface of the mounting plate (36). An X-axis moving module (31) is fixedly connected to both ends of the mounting plate (36). A Z-axis moving module (33) is fixedly connected to one side of the mounting plate (36) at the position corresponding to the Y-axis moving module (32). A connecting plate (35) is fixedly connected to the moving end of the Z-axis moving module (33). An A-axis rotating module (34) is fixedly connected to the surface of the connecting plate (35). The four-axis motion module (3) is electrically connected to the electrical control box (12).

4. The integrated probe station light shield according to claim 1, characterized in that, The upper corner surface of the integrated sealed cabinet (1) is fixedly connected to an equipment status indicator (10), which is electrically connected to the electrical control box (12).

5. The integrated probe station light shield according to claim 1, characterized in that, The bottom four corners of the integrated sealing cabinet (1) are rotatably connected with casters (8), and the bottom of the integrated sealing cabinet (1) is fixedly connected with a locking foot cup (9) corresponding to the position of the casters (8).

6. The integrated probe station light shield according to claim 1, characterized in that, The integrated sealed cabinet (1) is an aluminum alloy cabinet, and the inner wall dimensions of the integrated sealed cabinet (1) are adapted to the three-dimensional dimensions of the operating table (11).

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