CVD (Chemical Vapor Deposition) back plate cleaning gas pipeline structure

Abstract

The utility model discloses a CVD (Chemical Vapor Deposition) back plate cleaning gas pipeline structure which comprises a gas outlet adjusting mechanism which is arranged in a back plate body and is used for enabling cleaning gas to enter an angle adjusting mechanism one by one to clean different corners in a cavity, and the inner side of the back plate body is provided with the cavity. The angle adjusting mechanism comprises a fixed pipeline, a telescopic hose and a movable hard pipe, the movable hard pipe is movably connected to one end of the fixed pipeline through the telescopic hose, the upper surface of the movable hard pipe is rotationally connected with a telescopic rod through a connecting block, and the telescopic end of the telescopic rod is rotationally connected with a handle through a rotating shaft. Fixing blocks are fixedly connected to the surfaces of the two sides of the movable hard pipe correspondingly, and a rotating rod is rotationally connected to the lower surface of the interior of the cavity. By means of the angle adjusting mechanism, flexible swinging and automatic resetting of the cleaning gas nozzle are achieved, and the cleaning efficiency and convenience of corners in the cavity are remarkably improved.

Description

Technical Field

[0001] This utility model relates to the field of CVD backplane technology, and in particular to a CVD backplane cleaning gas pipeline structure. Background Technology

[0002] CVD backsheets are backsheet materials prepared using Chemical Vapor Deposition (CVD) technology, commonly used in electronic devices such as solar panels and displays. CVD technology is a method of depositing a thin film on a substrate surface through a gaseous chemical reaction under high temperature and low pressure conditions. CVD backsheets possess excellent insulation properties, heat resistance, weather resistance, and mechanical strength, effectively protecting sensitive components in electronic devices from the intrusion of external environmental factors such as moisture, dust, and chemicals. Furthermore, CVD backsheets can improve the heat dissipation performance of equipment and extend its service life. Due to their outstanding performance, CVD backsheets have been widely used in the photovoltaic industry, display technology, and other fields. With technological advancements, the manufacturing process and performance of CVD backsheets are continuously optimized to meet the demands for higher performance and wider applications.

[0003] Traditional piping designs typically employ fixed connections, guiding cleaning gas to various corners of the chamber via pre-defined pipes to clean these areas. However, this fixed design has limitations: because the piping cannot be manually adjusted, the spray angle and direction of the cleaning gas remain constant, resulting in a lack of flexibility when dealing with different chamber structures or specific cleaning needs. Therefore, developing a CVD backplate cleaning gas piping structure that allows manual adjustment of the cleaning angle within the chamber to improve cleaning efficiency and convenience has become a pressing technical challenge for the industry. Utility Model Content

[0004] One objective of this invention is to provide a CVD backplane cleaning gas pipeline structure. This invention addresses the problem mentioned in the background that the fixed injection angle and direction of the cleaning gas, which cannot be manually adjusted, leads to a lack of flexibility in dealing with different chamber structures or specific cleaning needs.

[0005] A CVD backplate cleaning gas pipeline structure according to an embodiment of the present invention includes an outlet adjustment mechanism installed inside the backplate body for cleaning gas to enter the angle adjustment mechanism one by one to clean different corners inside the chamber. The backplate body has a chamber on its inner side. The angle adjustment mechanism includes a fixed pipe, a telescopic hose, and a movable rigid pipe. The movable rigid pipe is movably connected to one end of the fixed pipe through the telescopic hose. A telescopic rod is rotatably connected to the upper surface of the movable rigid pipe through a connecting block. A handle is rotatably connected to the telescopic end of the telescopic rod through a rotating shaft. Fixed blocks are fixedly connected to both sides of the movable rigid pipe. A rotating rod is rotatably connected to the lower surface inside the chamber. A second spring structure is installed between the rotating rod and the fixed blocks.

[0006] Preferably, a nozzle is fixedly connected to the end of the movable rigid tube away from the telescopic flexible tube.

[0007] Preferably, the nozzles are provided in four sets, and the four sets of nozzles are respectively oriented towards the four corners of the cavity inside the back plate body.

[0008] Preferably, an air intake pipe is fixedly connected through the inner upper surface of the back plate body, and the air outlet adjustment mechanism includes an adjustment ring and a sealing baffle, with the sealing baffle movably connected to the side surface of the adjustment ring.

[0009] Preferably, the side surface of the adjusting ring is provided with an air outlet, and the sealing baffle is hinged to the inside of the air outlet.

[0010] Preferably, a drive motor is fixedly connected to the middle part of the lower surface of the back plate body, and the adjusting ring is drivenly connected to the output end of the drive motor.

[0011] Preferably, a stop block is fixedly connected to the inner surface of the adjusting ring, and a first spring structure is installed between one side surface of the sealing baffle and the stop block.

[0012] Preferably, the adjusting ring is rotatably connected to the lower inner part of the intake pipe, and the adjusting ring is rotatably connected to the inner side of the fixed pipe.

[0013] The beneficial effects of this utility model are:

[0014] This invention, through its angle adjustment mechanism, allows the nozzle to spray cleaning gas to clean the corners inside the chamber. By rotating the telescopic rod with the handle, the movable rigid tube can be swung left and right, thus allowing the nozzle to spray cleaning gas to different positions inside the chamber. After cleaning, releasing the handle allows the nozzle to return to the center position through the reset force of the second spring structure on both sides. This achieves flexible swinging and automatic reset of the cleaning gas nozzle, significantly improving the cleaning efficiency and convenience of cleaning the corners inside the chamber.

[0015] This invention utilizes an exhaust adjustment mechanism. After the cleaning gas enters the chamber through the intake pipe, the drive motor rotates the adjustment ring inside the lower part of the intake pipe. When the outlet of the adjustment ring aligns with the opening of the fixed pipe, the cleaning gas pushes the sealing baffle outward, stretching the first spring structure. The cleaning gas then enters the corresponding fixed pipe, cleaning one corner of the chamber. As the drive motor continues to rotate the adjustment ring, when it rotates between two fixed pipes, the sealing baffle is squeezed by the inner wall between the fixed pipes, closing the outlet. This continues until the outlet aligns with the next fixed pipe, allowing the cleaning gas to enter the next angle adjustment mechanism to clean the next corner. This exhaust adjustment mechanism enables each nozzle to clean corners one by one, ensuring a stable gas pressure and significantly improving the accuracy and effectiveness of corner cleaning within the chamber. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0017] Figure 1 This is a schematic diagram of a CVD backplane cleaning gas pipeline structure proposed in this utility model;

[0018] Figure 2 This is a perspective view of the internal structure of the backplate body of a CVD backplate cleaning gas pipeline structure proposed in this utility model.

[0019] Figure 3 This utility model proposes a CVD backplane cleaning gas pipeline structure. Figure 2 Enlarged view of point A in the middle;

[0020] Figure 4 This is a schematic diagram of the gas outlet regulating mechanism in a CVD backplate cleaning gas pipeline structure proposed in this utility model.

[0021] In the diagram: 1. Backplate body; 2. Air inlet pipe; 3. Air outlet adjustment mechanism; 31. Drive motor; 32. Adjustment ring; 33. Air outlet; 34. Sealing baffle; 35. First spring structure; 4. Angle adjustment mechanism; 41. Fixed pipe; 42. Telescopic hose; 43. Movable rigid pipe; 44. Nozzle; 45. Fixing block; 46. Second spring structure; 47. Rotating rod; 48. Connecting block; 49. Telescopic rod; 410. Rotating shaft; 411. Handle. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0023] refer to Figure 1-4 A CVD backplane cleaning gas pipeline structure includes an outlet regulating mechanism 3 installed inside the backplane body 1 to allow cleaning gas to enter the angle regulating mechanism 4 one by one for cleaning different corners inside the chamber. The backplane body 1 has a chamber on its inner side. The angle regulating mechanism 4 includes a fixed pipe 41, a telescopic hose 42, and a movable rigid pipe 43. The movable rigid pipe 43 is movably connected to one end of the fixed pipe 41 via the telescopic hose 42. A telescopic rod 49 is rotatably connected to the upper surface of the movable rigid pipe 43 via a connecting block 48. A handle 411 is rotatably connected to the telescopic end of the telescopic rod 49 via a rotating shaft 410. Fixing blocks 45 are fixedly connected to both sides of the movable rigid pipe 43. The interior of the chamber is shown in the lower table. A rotating rod 47 is rotatably connected to the surface. A second spring structure 46 is installed between the rotating rod 47 and the fixed block 45. With the angle adjustment mechanism 4, when the cleaning gas sprayed through the nozzle 44 cleans the corners inside the chamber, the telescopic rod 49 can be rotated by the handle 411. The telescopic rod 49 pulls the movable rigid tube 43 to swing left and right, so that the nozzle sprays cleaning gas to different positions inside the chamber corners. After cleaning, the handle 411 is released, and the return force of the second spring structure 46 on both sides makes the nozzle return to the middle position. This realizes the flexible swing and automatic return of the cleaning gas nozzle 44, which significantly improves the cleaning efficiency and convenience of the corners inside the chamber.

[0024] Example 1: A nozzle 44 is fixedly connected to one end of the movable rigid tube 43 away from the telescopic flexible tube 42. There are four sets of nozzles 44, and the four sets of nozzles 44 are respectively facing the four corners of the cavity inside the back plate body 1. By setting the nozzles 44 with a pointed shape, the air pressure of the cleaning gas sprayed through the nozzles 44 can be further increased, thereby effectively enhancing the cleaning effect.

[0025] Example 2: An air inlet pipe 2 is fixedly connected through the upper inner surface of the back panel body 1. The air outlet regulating mechanism 3 includes an regulating ring 32 and a sealing baffle 34. The sealing baffle 34 is movably connected to the side surface of the regulating ring 32. An air outlet 33 is opened on the side surface of the regulating ring 32. The sealing baffle 34 is hinged to the inner side of the air outlet 33. A drive motor 31 is fixedly connected to the middle part of the lower surface of the back panel body 1. The regulating ring 32 is drivenly connected to the output end of the drive motor 31. A stop block is fixedly connected to the inner surface of the regulating ring 32. A first spring structure 35 is installed between one side surface of the sealing baffle 34 and the stop block. The regulating ring 32 is rotatably connected to the lower inner part of the air inlet pipe 2 and rotatably connected to the inner side of the fixed pipe 41. Through the air outlet regulating mechanism 3, after the clean gas enters the chamber through the air inlet pipe 2, the driving motor 31 drives the regulating ring. The adjusting ring 32 rotates inside the lower part of the air inlet pipe 2. When the air outlet 33 of the adjusting ring 32 rotates to align with the opening of the fixed pipe 41, the cleaning gas pushes the sealing baffle 34 outward, stretching the first spring structure 35. The cleaning gas enters the corresponding fixed pipe 41 and cleans one corner of the chamber. As the drive motor 31 drives the adjusting ring 32 to rotate continuously, when the adjusting ring 32 rotates between two fixed pipes 41, the sealing baffle 34 is squeezed by the inner wall between the fixed pipes 41, causing the air outlet 33 to close. Until the air outlet 33 aligns with the next fixed pipe 41, the cleaning gas enters the next angle adjusting mechanism 4 to clean the next corner. Through this air outlet adjusting mechanism 3, each nozzle cleans the corner one by one, ensuring a stable air pressure for the cleaning gas and significantly improving the accuracy and effectiveness of cleaning the corners inside the chamber.

[0026] In use, the cleaning gas first enters the chamber inside the back panel body 1 through the air inlet pipe 2, and the drive motor 31 starts, causing the adjusting ring 32 to rotate in the lower part of the air inlet pipe 2. When the air outlet 33 of the adjusting ring 32 is aligned with the opening of the fixed pipe 41, the cleaning gas pushes the sealing baffle 34 outward, the first spring structure 35 is stretched, the gas enters the corresponding fixed pipe 41, reaches the movable rigid pipe 43 through the telescopic hose 42, and is then sprayed out by the nozzle 44 to clean specific corners in the chamber. At this time, the operator can rotate the telescopic rod 49 through the handle 411 to drive the movable rigid pipe 43 and the nozzle 44 on it to swing left and right, achieving precise cleaning of different corners. After cleaning is completed, the handle 411 is released, and the second spring structures 46 on both sides provide a reset force, causing the nozzle 44 to automatically return to the middle position. As the drive motor 31 continuously rotates the adjusting ring 32, when the air outlet 33 of the adjusting ring 32 rotates between the two fixed pipes 41, the sealing baffle 34 is squeezed by the inner wall, and the air outlet 33 closes until it is aligned with the next fixed pipe 41. The above process is repeated to achieve cleaning of the four corners by a single nozzle. The pointed nozzle 44 design further increases the gas pressure and enhances the cleaning effect. Throughout the process, the air outlet adjustment mechanism 3 ensures a stable gas pressure for cleaning, and the angle adjustment mechanism 4 enables the nozzle 44 to swing flexibly and automatically reset, significantly improving the accuracy, effectiveness, and convenience of cleaning the corners inside the chamber.

[0027] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A CVD backplane cleaning gas pipeline structure, characterized in that, The backplate body (1) includes an exhaust gas adjustment mechanism (3) installed inside the backplate body (1) for cleaning gas to enter the angle adjustment mechanism (4) one by one to clean different corners inside the chamber. The backplate body (1) has a chamber on its inner side. The angle adjustment mechanism (4) includes a fixed pipe (41), a telescopic hose (42) and a movable rigid pipe (43). The movable rigid pipe (43) is movably connected to one end of the fixed pipe (41) through the telescopic hose (42). The upper surface of the movable rigid pipe (43) is rotatably connected to a telescopic rod (49) through a connecting block (48). The telescopic end of the telescopic rod (49) is rotatably connected to a handle (411) through a rotating shaft (410). Fixed blocks (45) are fixedly connected to both sides of the movable rigid pipe (43). A rotating rod (47) is rotatably connected to the lower surface inside the chamber. A second spring structure (46) is installed between the rotating rod (47) and the fixed block (45).

2. The CVD backplane cleaning gas pipeline structure according to claim 1, characterized in that, A nozzle (44) is fixedly connected to the end of the movable rigid tube (43) away from the telescopic flexible tube (42).

3. The CVD backplane cleaning gas pipeline structure according to claim 2, characterized in that, The nozzles (44) are provided in four sets, and the four sets of nozzles (44) are respectively facing the four corners of the cavity inside the back plate body (1).

4. The CVD backplane cleaning gas pipeline structure according to claim 1, characterized in that, An air inlet pipe (2) is fixedly connected through the upper inner surface of the back plate body (1). The air outlet adjustment mechanism (3) includes an adjustment ring (32) and a sealing baffle (34). The sealing baffle (34) is movably connected to the side surface of the adjustment ring (32).

5. The CVD backplane cleaning gas pipeline structure according to claim 4, characterized in that, The side surface of the adjusting ring (32) is provided with an air outlet (33), and the sealing baffle (34) is hinged to the inside of the air outlet (33).

6. The CVD backplane cleaning gas pipeline structure according to claim 4, characterized in that, A drive motor (31) is fixedly connected to the middle part of the lower surface of the back plate body (1), and the adjustment ring (32) is driven to the output end of the drive motor (31).

7. The CVD backplane cleaning gas pipeline structure according to claim 4, characterized in that, A stop block is fixedly connected to the inner surface of the adjusting ring (32), and a first spring structure (35) is installed between one side surface of the sealing baffle (34) and the stop block.

8. The CVD backplane cleaning gas pipeline structure according to claim 4, characterized in that, The adjusting ring (32) is rotatably connected to the lower inner part of the air intake pipe (2), and the adjusting ring (32) is rotatably connected to the inner side of the fixed pipe (41).

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