Vertical diffusion furnace spray pipe and vertical diffusion furnace

Abstract

The utility model discloses a vertical diffusion furnace spray pipe and a vertical diffusion furnace, and relates to the technical field of vertical diffusion furnaces, the vertical diffusion furnace spray pipe comprises a first pipeline, a buffer pipeline, an air injection pipeline and a communication pipeline, the two ends of the air injection pipeline are respectively communicated with the first pipeline and the buffer pipeline, and the side wall of the air injection pipeline is provided with a plurality of air injection ports; the air nozzles are arranged at intervals in the extending direction of the air injection pipeline. The end, away from the air injection pipeline, of the buffering pipeline is closed. The two ends of the communicating pipeline communicate with the two ends of the air injection pipeline correspondingly and communicate with the first pipeline.

Description

Technical Field

[0001] This utility model relates to the field of vertical diffusion furnace technology, and in particular to a vertical diffusion furnace nozzle and a vertical diffusion furnace. Background Technology

[0002] Vertical diffusion furnaces are applicable to processes in the semiconductor field including dry oxygen oxidation, hydrogen-oxygen synthesis oxidation, DCE (dichloroethylene) oxidation, silicon oxynitride oxidation, and other oxidation processes, as well as thin film growth processes such as silicon dioxide, polycrystalline silicon, silicon nitride, and atomic layer deposition.

[0003] The vertical diffusion furnace features a vertically placed heating furnace body, reaction tubes, and quartz boat supporting the wafers (with the wafers placed horizontally). It boasts excellent intra-wafer uniformity, high automation, and stable system performance, meeting SEMI standards and satisfying the needs of large-scale integrated circuit production lines. Existing vertical diffusion furnaces employ various air intake methods, including top and bottom intake. However, to ensure optimal airflow uniformity, the piping structures for each intake method are specifically designed, resulting in low nozzle versatility. Utility Model Content

[0004] The main purpose of this invention is to propose a vertical diffusion furnace nozzle and a vertical diffusion furnace, aiming to improve the versatility of the vertical diffusion furnace nozzle while ensuring the uniformity of air jetting.

[0005] To achieve the above objectives, the vertical diffusion furnace nozzle proposed in this utility model includes:

[0006] First pipeline;

[0007] Buffer pipes;

[0008] A jet duct, wherein the two ends of the jet duct are respectively connected to the first duct and the buffer duct, and the sidewall of the jet duct is provided with a plurality of jet ports, each of the jet ports being spaced apart along the extension direction of the jet duct, and the end of the buffer duct away from the jet duct is closed;

[0009] A connecting pipe, the two ends of which are respectively connected to the two ends of the jet pipe and connected to the first pipe.

[0010] In one embodiment, the jet pipe includes a first connecting section, a second connecting section, and a transition section. The two ends of the transition section are respectively connected to the first connecting section and the second connecting section. The end of the first connecting section away from the transition section is connected to the first pipe. The end of the second connecting section away from the transition section is connected to the buffer pipe. Each jet outlet is disposed in the first connecting section and the second connecting section.

[0011] In one embodiment, a flow-limiting orifice is formed at the middle position of the transition section, and the cross-sectional area of ​​the flow-limiting orifice is smaller than the cross-sectional area of ​​the structures at both ends of the transition section.

[0012] In one embodiment, the cross-sectional area of ​​the transition section gradually increases along the axial direction from the flow restrictor to both ends of the transition section.

[0013] In one embodiment, the two ends of the connecting pipe have a symmetrical cross-section along the flow restriction port.

[0014] In one embodiment, at least two jet pipes are provided, and both ends of each jet pipe are connected to the first pipe and the buffer pipe, and each jet pipe is evenly distributed along the circumference of the first pipe.

[0015] In one embodiment, the first pipe, the buffer pipe, and the jet pipe are all connected by flanges.

[0016] In one embodiment, the vertical diffusion furnace nozzle further includes a diffusion interface, which has a trumpet-shaped structure and has an axial first end and a second end. The first end is connected to the first pipe, and the second end is used to connect to the air inlet. The cross-sectional area of ​​the inner channel of the first end is larger than the cross-sectional area of ​​the inner channel of the second end.

[0017] This utility model also proposes a vertical diffusion furnace, which includes a vertical diffusion furnace nozzle, and the vertical diffusion furnace nozzle includes:

[0018] First pipeline;

[0019] Buffer pipes;

[0020] A jet duct, wherein the two ends of the jet duct are respectively connected to the first duct and the buffer duct, and the sidewall of the jet duct is provided with a plurality of jet ports, each of the jet ports being spaced apart along the extension direction of the jet duct, and the end of the buffer duct away from the jet duct is closed;

[0021] A connecting pipe, the two ends of which are respectively connected to the two ends of the jet pipe and connected to the first pipe.

[0022] This invention provides a vertical diffusion furnace nozzle, comprising a first pipe, a buffer pipe, a jet pipe, and a connecting pipe. The jet pipe connects the first pipe and the buffer pipe, and its sidewall is provided with multiple jet nozzles spaced apart along the extension direction. This allows gas to be ejected from multiple locations on the sidewall of the jet pipe, achieving a more uniform gas distribution compared to a single nozzle, improving the diffusion effect, and thus enhancing the uniformity of the reaction within the vertical diffusion furnace, ensuring consistent product quality. The buffer pipe creates a buffer zone within the pipe, reducing the possibility of gas converging at both ends and causing turbulence. In semiconductor manufacturing, this uniform gas distribution helps the chemical reaction on the wafer surface to proceed more evenly, avoiding problems such as film thickness differences caused by uneven gas distribution. Furthermore, the connecting pipe, connected to the sidewall of the jet pipe, ensures that the gas pressure at both ends of the jet pipe remains as consistent as possible. This ensures that the gas pressure at the jet nozzles at both ends of the jet pipe remains relatively uniform regardless of which end the reaction gas is introduced from, thereby guaranteeing the uniformity of the jet flow from the vertical diffusion furnace nozzle and contributing to improved wafer processing quality. Moreover, this method ensures uniformity of gas flow from all nozzles, whether the gas is introduced from the top or bottom of the vertical diffusion furnace, thus improving the adaptability of the vertical diffusion furnace nozzles. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0024] Figure 1 A schematic diagram of the structure of an embodiment of the vertical diffusion furnace nozzle provided by this utility model;

[0025] Figure 2 for Figure 1 Cross-sectional view of the nozzle of a neutral diffusion furnace.

[0026] Explanation of icon numbers:

[0027] 100. Vertical diffusion furnace nozzle; 1. First pipe; 2. Buffer pipe; 3. Air jet pipe; 3a. Air jet port; 31. First connecting section; 32. Second connecting section; 33. Transition section; 33a. Flow restriction port; 4. Connecting pipe; 5. Flange; 6. Diffusion interface.

[0028] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0030] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0031] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0032] Vertical diffusion furnaces are applicable to processes in the semiconductor field including dry oxygen oxidation, hydrogen-oxygen synthesis oxidation, DCE (dichloroethylene) oxidation, silicon oxynitride oxidation, and other oxidation processes, as well as thin film growth processes such as silicon dioxide, polycrystalline silicon, silicon nitride, and atomic layer deposition.

[0033] The vertical diffusion furnace features a vertically placed heating furnace body, reaction tubes, and quartz boat supporting the wafers (with the wafers placed horizontally). It boasts excellent intra-wafer uniformity, high automation, and stable system performance, meeting SEMI standards and satisfying the needs of large-scale integrated circuit production lines. Existing vertical diffusion furnaces employ various air intake methods, including top and bottom intake. However, to ensure optimal airflow uniformity, the piping structures for each intake method are specifically designed, resulting in low nozzle versatility.

[0034] To solve the above problems, please refer to... Figure 1 and Figure 2This utility model proposes a vertical diffusion furnace nozzle 100, including a first pipe 1, a buffer pipe 2, a jet pipe 3, and a connecting pipe 4. The two ends of the jet pipe 3 are respectively connected to the first pipe 1 and the buffer pipe 2. The side wall of the jet pipe 3 is provided with a plurality of jet ports 3a, and each jet port 3a is spaced apart along the extension direction of the jet pipe 3. The end of the buffer pipe 2 away from the jet pipe 3 is closed. The two ends of the connecting pipe 4 are respectively connected to the two ends of the jet pipe 3 and connected to the first pipe 1.

[0035] This invention provides a vertical diffusion furnace nozzle 100, comprising a first pipe 1, a buffer pipe 2, a jet pipe 3, and a connecting pipe 4. The jet pipe 3 connects the first pipe 1 and the buffer pipe 2, and its sidewall is provided with multiple jet nozzles 3a spaced apart along the extension direction. This allows gas to be ejected from multiple locations on the sidewall of the jet pipe 3, achieving a more uniform gas distribution compared to a single nozzle, improving the diffusion effect, and thus enhancing the uniformity of the reaction within the vertical diffusion furnace, ensuring consistent product quality. The buffer pipe 2 forms a buffer zone inside the pipe, reducing the possibility of gas converging at both ends and causing turbulence. In semiconductor manufacturing, this uniform gas distribution helps the chemical reaction on the wafer surface to proceed more evenly, avoiding problems such as film thickness differences caused by uneven gas distribution. Furthermore, by connecting the jet pipe 3 to the connecting pipe 4 through the side wall of the jet pipe 3, the gas pressure at both ends of the jet pipe 3 is kept as consistent as possible. This ensures that regardless of which end of the jet pipe 3 from which the reactive gas is introduced, the gas pressure at the jet nozzles 3a at both axial ends of the jet pipe 3 remains relatively uniform, thus guaranteeing the uniformity of the gas jet from the vertical diffusion furnace nozzle 100 and contributing to improved wafer processing quality. Moreover, this method ensures uniformity of gas jet from all jet nozzles 3a, whether the gas is introduced from the top or bottom of the vertical diffusion furnace, improving the adaptability of the vertical diffusion furnace nozzle 100.

[0036] In an optional embodiment, to improve the uniformity of the reactant gas ejected from the vertical diffusion furnace nozzle 100, please refer to... Figure 1 and Figure 2 The jet pipe 3 includes a first connecting section 31, a second connecting section 32, and a transition section 33. The two ends of the transition section 33 are respectively connected to the first connecting section 31 and the second connecting section 32 in the axial direction. The end of the first connecting section 31 away from the transition section 33 is connected to the first pipe 1, and the end of the second connecting section 32 away from the transition section 33 is connected to the buffer pipe 2.

[0037] The first connecting section 31 and the second connecting section 32 are connected to the first pipe 1 and the buffer pipe 2, respectively, while the transition section 33 serves as an intermediate connection. This structural division facilitates separate design and optimization based on the connection requirements and gas flow characteristics of different pipes. For example, suitable connection interfaces can be designed in the first connecting section 31 and the second connecting section 32 to ensure a tight connection with the first pipe 1 and the buffer pipe 2, preventing gas leakage. The transition section 33 can guide and buffer the gas flow from the first pipe 1 to the buffer pipe 2, reducing turbulence and resistance during the flow process, making the gas flow more stable. This, in turn, is beneficial to the uniformity and stability of the gas ejected from the subsequent jet nozzle 3a, providing a more reliable structural guarantee for improving the uniformity of the reaction environment within the vertical diffusion furnace.

[0038] In an alternative embodiment, please refer to Figure 1 and Figure 2 A flow-limiting port 33a is formed at the middle position of the transition section 33. The cross-sectional area of ​​the flow-limiting port 33a is smaller than the cross-sectional area of ​​the structures at both ends of the transition section 33.

[0039] When gas flows from the first connecting section 31 to the transition section 33, it encounters the narrow section of the flow-limiting port 33a. According to fluid mechanics principles, the gas velocity will increase accordingly, while the pressure will decrease. This is because when gas passes through a region with a reduced cross-sectional area, the velocity must increase to maintain the continuity of the mass flow rate. This phenomenon can be explained using Bernoulli's equation: during gas flow, an increase in velocity is accompanied by a decrease in pressure. First, the presence of the flow-limiting port 33a can limit and regulate the gas flow rate to a certain extent, preventing excessive gas flow and resulting in excessive turbulence in the furnace airflow. Second, the increased velocity allows the gas to enter the second connecting section 32 more quickly after passing through the flow-limiting port 33a and exit from the jet port 3a into the furnace, which helps improve the gas diffusion efficiency. Furthermore, by setting up the connecting pipe 4, a portion of the gas is transported to the second connecting section 32 through the connecting pipe 4. This further reduces the pressure difference between the gas ejected from the jet nozzle 3a on the first connecting section 31 and the second connecting section 32, ensuring the uniformity of the jet ejection at both ends of the jet pipe, and further improving the uniformity of gas distribution in the diffusion furnace, thereby better meeting the process requirements.

[0040] In an alternative embodiment, the cross-sectional area of ​​the transition section 33 gradually increases along the axial direction from the flow restrictor 33a to both ends of the transition section 33.

[0041] This design facilitates smooth gas diffusion and deceleration. After passing through the flow restrictor 33a, the gas enters the transition section 33, whose cross-sectional area gradually increases. The gas velocity gradually decreases, and the pressure gradually recovers, preventing violent impacts and turbulence caused by excessively high velocity when the gas enters the jet pipe 3. For example, during gas transport, this gradually expanding transition section 33 effectively reduces kinetic energy loss, allowing the gas to flow more evenly and stably towards the jet pipe 3. This ensures consistency in the velocity and flow rate of the gas ejected from each jet port 3a, contributing to improved uniformity and stability of the reaction within the vertical diffusion furnace. Furthermore, this gradual structural design aligns better with fluid mechanics principles, helping to optimize gas flow, reduce energy consumption, and enhance the performance and efficiency of the entire nozzle system.

[0042] In an alternative embodiment, the cross-sections of the two ends of the connecting pipe 4 along the flow restriction port 33a are symmetrical.

[0043] The symmetrical design of the connecting pipe 4 ensures a more balanced role in the gas flow process. Due to the symmetry at both ends, the resistance and influence on the gas entering and exiting the connecting pipe 4 are relatively balanced, preventing problems such as gas flow deviation or excessively high or low local pressure caused by structural asymmetry. For example, during gas circulation, the symmetrical connecting pipe 4 ensures that the flow state of gas entering the connecting pipe 4 from the first pipe 1 is similar to that entering the buffer pipe 2 from the connecting pipe 4, helping to maintain a uniform distribution and stable flow of gas throughout the entire pipeline system. This symmetry also simplifies the design and manufacturing process of the pipeline, improves production efficiency and the stability of quality control, and facilitates easier docking and coordination with other pipeline components during actual installation and use, ensuring the normal operation and performance of the entire nozzle system.

[0044] In an alternative embodiment, please refer to Figure 1 and Figure 2 At least two jet pipes 3 are provided, and both ends of each jet pipe 3 are connected to the first pipe 1 and the buffer pipe 2. Each jet pipe 3 is evenly distributed along the circumference of the first pipe 1.

[0045] The design of multiple jet pipes 3 significantly increases the number of gas ejection channels, further improving the uniformity of gas distribution. The circumferentially distributed layout ensures that gas is ejected from jet pipes 3 in all directions around the first pipe 1, avoiding one-sided gas ejection and enabling comprehensive gas coverage of the reaction area within the diffusion furnace. For example, in large vertical diffusion furnaces, uniform gas diffusion is required in a large reaction space. Multiple circumferentially distributed jet pipes 3 effectively meet this requirement, ensuring that reactant gases reach every corner of the reaction area evenly, improving reaction efficiency and product quality. Simultaneously, the multiple jet pipes 3 can be grouped or individually adjusted according to actual process requirements to adapt to different reaction conditions and requirements, enhancing the flexibility and adaptability of the nozzle system and providing a more precise gas supply solution for complex processes. In this embodiment, there are two jet pipes 3, symmetrically distributed at 180° along the axial direction of the first pipe 1. In other embodiments, the number of jet pipes 3 can be three, four, or more, all evenly distributed circumferentially along the first pipe 1; the specific selection can be based on actual needs.

[0046] In an alternative embodiment, please refer to Figure 1 and Figure 2 The first pipe 1, the buffer pipe 2, and the jet pipe 3 are all connected by flange 5.

[0047] The use of flange 5 facilitates maintenance, repair, and component replacement of the nozzle system during actual use. When wear or blockage occurs in the jet pipe 3, the damaged jet pipe 3 can be quickly replaced by removing flange 5 without large-scale disassembly and reconstruction of the entire nozzle system, significantly saving maintenance time and costs. Simultaneously, flange 5 provides excellent sealing performance, ensuring no gas leakage at the pipe connections and guaranteeing the stability and safety of the reaction environment within the vertical diffusion furnace. Furthermore, flange 5 offers a degree of versatility and interchangeability, facilitating connection and combination with other standard-compliant pipe components, improving the nozzle system's compatibility and scalability, and enabling system upgrades or functional expansions based on actual production needs. In addition, the first connecting section 31, the second connecting section 32, and the transition section 33 on the jet pipe 3 are also connected via flange 5, facilitating both the assembly of the jet pipe 3 and subsequent cleaning and maintenance.

[0048] In an alternative embodiment, please refer to Figure 1 and Figure 2The vertical diffusion furnace nozzle 100 also includes a diffusion interface 6, which has a trumpet-shaped structure. The diffusion interface 6 has a first end and a second end in the axial direction. The first end is connected to the first pipe 1, and the second end is used to connect to the air inlet. The cross-sectional area of ​​the inner channel of the first end is larger than the cross-sectional area of ​​the inner channel of the second end.

[0049] First, the trumpet-shaped structure of the diffuser 6 plays a crucial role. This trumpet shape causes the cross-sectional area of ​​its inner channel to gradually increase from the second end to the first end. When gas enters the diffuser 6 from the inlet through the second end, the gradually increasing cross-sectional area helps to gradually reduce the gas velocity while slightly increasing the pressure. This helps to initially stabilize and buffer the gas entering the nozzle system, ensuring a relatively stable state before it enters the first pipe 1, thus reducing the impact of inlet airflow fluctuations on the entire nozzle system. Second, the larger cross-sectional area of ​​the inner channel at the first end can accommodate more gas, allowing for a more uniform gas distribution upon entering the first pipe 1. This prevents concentrated gas impact at the inlet of the first pipe 1, thereby reducing airflow unevenness and turbulence. In practical applications, when gas enters the second end of the diffuser 6 from the external inlet system at a high velocity and pressure, the gradually expanding inner channel of the trumpet-shaped diffuser 6 gradually reduces the gas velocity and stabilizes the pressure before entering the first pipe 1. This allows for a smooth transition to the flow state inside the nozzle, reducing airflow impact and fluctuations, and improving the overall operational stability of the nozzle system. Furthermore, the presence of diffuser interface 6 facilitates the connection between the nozzle and the external air intake system. Its second end, serving as the connection to the air intake, can be designed according to different air intake specifications and interface requirements, achieving seamless integration with various external air intake devices. Simultaneously, the flared structure provides guidance during connection, facilitating installation and positioning, and reducing issues such as misalignment or poor connection during installation.

[0050] This utility model also proposes a vertical diffusion furnace, which includes a vertical diffusion furnace nozzle 100. The specific structure of the vertical diffusion furnace nozzle 100 is as described in the above embodiments. Since this vertical diffusion furnace adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be elaborated here. Vertical diffusion furnaces typically have a large reaction space and specific airflow organization requirements. The multi-nozzle, segmented structure, and connecting pipe 4 design features of the above-mentioned vertical diffusion furnace nozzle 100 can precisely meet the requirements of uniform gas distribution and stable flow inside. By installing such a vertical diffusion furnace nozzle 100 inside the vertical diffusion furnace, it helps to improve the gas diffusion effect inside the furnace, improve reaction uniformity and product quality stability. At the same time, the reliable connection method and structural design of the vertical diffusion furnace nozzle 100 also helps to ensure the long-term stable operation of the vertical diffusion furnace, reduce production interruptions or product quality defects caused by gas supply problems, and improve the efficiency and effectiveness of the entire production line.

[0051] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A vertical diffusion furnace nozzle, characterized in that, include: First pipeline; Buffer pipes; A jet duct, wherein the two ends of the jet duct are respectively connected to the first duct and the buffer duct, and the sidewall of the jet duct is provided with a plurality of jet ports, each of the jet ports being spaced apart along the extension direction of the jet duct, and the end of the buffer duct away from the jet duct is closed; A connecting pipe, the two ends of which are respectively connected to the two ends of the jet pipe and connected to the first pipe.

2. The vertical diffusion furnace nozzle as described in claim 1, characterized in that, The jet pipe includes a first connecting section, a second connecting section, and a transition section. The two ends of the transition section are respectively connected to the first connecting section and the second connecting section. The end of the first connecting section away from the transition section is connected to the first pipe. The end of the second connecting section away from the transition section is connected to the buffer pipe. Each jet outlet is located in the first connecting section and the second connecting section.

3. The vertical diffusion furnace nozzle as described in claim 2, characterized in that, A flow-limiting orifice is formed at the middle position of the transition section, and the cross-sectional area of ​​the flow-limiting orifice is smaller than the cross-sectional area of ​​the structures at both ends of the transition section.

4. The vertical diffusion furnace nozzle as described in claim 3, characterized in that, Along the axial direction from the flow-limiting port to both ends of the transition section, the cross-sectional area of ​​the transition section gradually increases.

5. The vertical diffusion furnace nozzle as described in claim 3, characterized in that, The two ends of the connecting pipe are symmetrical along the cross-section at the flow restriction port.

6. The vertical diffusion furnace nozzle as described in any one of claims 1 to 5, characterized in that, The jet pipes are provided in at least two sections, and both ends of each jet pipe are connected to the first pipe and the buffer pipe. The jet pipes are evenly distributed along the circumference of the first pipe.

7. The vertical diffusion furnace nozzle as described in claim 6, characterized in that, The first pipe, the buffer pipe, and the jet pipe are all connected by flanges.

8. The vertical diffusion furnace nozzle as described in claim 6, characterized in that, The vertical diffusion furnace nozzle also includes a diffusion interface, which has a trumpet-shaped structure. The diffusion interface has a first end and a second end in the axial direction. The first end is connected to the first pipe, and the second end is used to connect to the air inlet. The cross-sectional area of ​​the inner channel of the first end is larger than the cross-sectional area of ​​the inner channel of the second end.

9. A vertical diffusion furnace, characterized in that, Includes the vertical diffusion furnace nozzle as described in any one of claims 1 to 8.

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