Photomask plate jig

Abstract

The utility model provides a photomask plate jig. The photomask plate jig comprises a base, a cutter assembly and two roller assemblies. The base is provided with an inlet, an outlet and a channel, wherein the light cover plate passes through the inlet and the outlet, and the inlet and the outlet are communicated through the channel. A first groove is formed in the base; and the first groove is communicated with the channel. The two roller assemblies are arranged at one end of the inlet and arranged on the two sides of the base correspondingly. And each roller assembly is used for arranging a protective film. The cutter assembly is arranged on the base and located at one end of the outlet. According to the photomask plate jig, the protective films can be quickly attached to the two sides of the photomask plate, and the photomask plate can be well protected.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a photomask fixture. Background Technology

[0002] With the rapid development of the semiconductor industry, photolithography is typically used in wafer fabrication to transfer the designed circuit pattern layer completely and accurately onto the wafer. The method generally involves forming a pattern layer on a photomask and then projecting the pattern layer onto the wafer using optical imaging principles. After use, the photomask needs to be stored. Generally, after use, the photomask is covered with a protective film to protect it from contamination and damage.

[0003] Traditional protective films only cover one side of the photomask, so damage to the other side of the photomask will also affect its performance. Utility Model Content

[0004] The purpose of this utility model is to provide a photomask fixture that can cover both sides of the photomask with a protective film, thereby better protecting the photomask and preventing it from being contaminated or damaged.

[0005] This utility model provides a photomask fixture, comprising:

[0006] A base, wherein the base is provided with an inlet and an outlet for the photomask to pass through, and a channel connecting the inlet and the outlet; the base is provided with a first groove; the first groove communicates with the channel;

[0007] Two roller assemblies are provided, each located at one end of the inlet and on opposite sides of the base; each roller assembly is used to install a protective film.

[0008] A cutter assembly is disposed on the base and located at one end of the outlet.

[0009] In an optional embodiment, the roller assembly includes a roller and a first bracket, the first bracket being connected to the base, and the roller being rotatably disposed on the first bracket; the roller is used to mount the protective film.

[0010] In an optional embodiment, the cutter assembly includes a second bracket, a guide rail, and a cutter; the second bracket is disposed on the base; the guide rail is movably connected to the second bracket; and the guide rail is movable relative to the second bracket along a first direction; the cutter is movably connected to the guide rail; and the cutter is movable relative to the guide rail along a second direction; the first direction and the second direction are perpendicular.

[0011] In an optional embodiment, the base is provided with a second groove, which communicates with the channel; the cutter can pass through the second groove.

[0012] In an optional embodiment, the base is provided with two cutting blade assemblies, which are respectively disposed on both sides of the base.

[0013] In an optional embodiment, the cutter includes a mounting portion and a cutting portion connected together, the mounting portion being slidably disposed on the guide rail; the cutting portion being disposed in the second groove.

[0014] In an optional embodiment, the cutting section may be a cone or a blade.

[0015] In an optional implementation, a guide block is provided within the channel.

[0016] In an optional embodiment, the base is provided with support feet.

[0017] In an optional embodiment, a protective film is also included, which is wound around the roller assembly and extends through the first groove and along the channel.

[0018] The photomask fixture provided in this embodiment of the utility model has the following beneficial effects:

[0019] The photomask fixture provided in this embodiment of the invention has roller assemblies on both sides of the base. Each roller assembly has a protective film that passes through a first groove into a channel. When the photomask enters the channel of the base, the protective films on the roller assemblies on both sides of the base cover both sides of the photomask, achieving double-sided protection. When the photomask exits the channel, a cutting assembly cuts the protective film, thus completing the protection of one photomask. This photomask fixture can quickly and effectively apply protective films to both sides of the photomask, preventing contamination or damage. Attached Figure Description

[0020] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 A first-view structural schematic diagram of the photomask fixture provided in an embodiment of this utility model;

[0022] Figure 2A second-view structural schematic diagram of the photomask fixture provided in an embodiment of this utility model;

[0023] Figure 3 A schematic diagram of the cutting blade of the photomask fixture provided in this embodiment of the utility model;

[0024] Figure 4 This is a third-view structural schematic diagram of the photomask fixture provided in an embodiment of the present invention.

[0025] Icons: 100-Photomask fixture; 110-Base; 111-Inlet; 112-Outlet; 113-First groove; 114-Second groove; 115-Support foot; 120-Roller assembly; 121-Roller; 122-First bracket; 130-Cutter assembly; 131-Second bracket; 132-Guide rail; 133-Cutter; 134-Mounting part; 135-Cutting part; 136-Through hole; 140-Guide block; 200-Photomask. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0028] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0030] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0031] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0033] Please combine Figure 1 and Figure 2 The present invention provides a photomask fixture 100 for covering both sides of a photomask 200 with a protective film, which provides better protection for the photomask 200 and prevents it from being contaminated and damaged.

[0034] The photomask fixture 100 includes a base 110, a cutter assembly 130, and two roller assemblies 120. The base 110 has an inlet 111 and an outlet 112 through which the photomask 200 passes, and a channel connecting the inlet 111 and the outlet 112. The base 110 has a first groove 113; the first groove 113 communicates with the channel. The two roller assemblies 120 are each located at one end of the inlet 111 and on opposite sides of the base 110; each roller assembly 120 is used to set a protective film. The cutter assembly 130 is located on the base 110 and at one end of the outlet 112. The first groove 113 is positioned close to the two roller assemblies 120 to allow the protective film to pass through the first groove 113 and enter the channel.

[0035] After the photomask 200 enters the channel of the base 110, the protective films on the roller assemblies 120 on both sides of the base 110 cover both sides of the photomask 200, achieving double-sided protection for the photomask 200. When the photomask 200 exits the channel, the cutter assembly 130 cuts off the protective film, thus completing the protection of one photomask 200. This photomask fixture 100 can quickly and effectively apply protective films to both sides of the photomask 200, preventing the photomask 200 from being contaminated or damaged.

[0036] The two roller assemblies 120 have identical structures. Each roller assembly 120 includes a roller 121 and a first support 122. The first support 122 is connected to the base 110, and the roller 121 is rotatably mounted on the first support 122. The roller 121 is used to mount the protective film. The first support 122 and the base 110 are fixedly connected, including but not limited to connection methods such as snap-fit, bolt connection, adhesive bonding, plug-in connection, riveting, or welding. The protective film is wound on the roller 121, and the rotation of the roller 121 can protect the unwinding or rewinding of the film.

[0037] It is understood that the first groove 113 is formed below the roller 121, and the length of the first groove 113 is approximately equal to the length of the roller 121, ensuring that the protective film, after being prevented from rolling, can pass through the first groove 113 into the channel of the base 110, thereby covering the surface of the photomask 200. In the two roller assemblies 120, the protective film on one roller 121 covers one side surface of the photomask 200, and the protective film on the other roller 121 covers the other side surface of the photomask 200, thereby achieving double-sided coverage of the photomask 200 with a protective film.

[0038] Optionally, the cutter assembly 130 includes a second bracket 131, a guide rail 132, and a cutter 133. The second bracket 131 is disposed on the base 110; the guide rail 132 is movably connected to the second bracket 131; and the guide rail 132 is movable relative to the second bracket 131 along a first direction; the cutter 133 is movably connected to the guide rail 132; and the cutter 133 is movable relative to the guide rail 132 along a second direction; the first direction and the second direction are perpendicular.

[0039] In this embodiment, the second support 131 and the base 110 are fixedly connected. The guide rail 132 can move along the second support 131 in a first direction, which is the height direction, i.e., the direction perpendicular to the axis of the channel. The extending direction of the guide rail 132 is parallel to the axis of the roller 121, which is the second direction. The cutter 133 can slide on the guide rail 132 to cut the protective film.

[0040] Of course, in some embodiments, the second bracket 131 can also be movably mounted on the base 110, that is, the second bracket 131 can move relative to the base 110 along the first direction. The guide rail 132 and the second bracket 131 are fixedly connected. In this way, the cutter 133 can also move along the first direction and the second direction respectively, which can cut the protective film.

[0041] Optionally, the base 110 is provided with a second groove 114, which communicates with the channel; the cutter 133 can pass through the second groove 114. It can be understood that the second groove 114 is located at one end of the outlet 112 of the base 110. When the cutter 133 cuts the protective film, it will pass through the second groove 114 and extend into the channel to achieve the cutting of the protective film.

[0042] It should be noted that there can be one or two cutter assemblies 130. If there is only one, the cutter assembly 130 has a larger stroke in the first direction, which is necessary to cut the protective film on both sides of the photomask 200.

[0043] Optionally, in this embodiment, the base 110 is provided with two cutting assemblies 130, which are respectively disposed on both sides of the base 110. One cutting assembly 130 is used to cut the protective film on one side of the photomask 200, and the other cutting assembly 130 is used to cut the protective film on the other side of the photomask 200. The two cutting assemblies 130 have the same structure.

[0044] Please combine Figure 3 Optionally, the cutter 133 includes a connected mounting portion 134 and a cutting portion 135. The mounting portion 134 is slidably disposed on the guide rail 132; the cutting portion 135 is disposed in the second groove 114. The mounting portion 134 has a through hole 136, which is fitted onto the guide rail 132, allowing the cutter 133 to move along the guide rail 132. The cutting portion 135 is either a cone or a blade. In this embodiment, the cutting portion 135 is a cone with a pointed tip for cutting through the protective film.

[0045] In other embodiments, the cutting part 135 may be a blade or any other cross-sectional shape, as long as it can cut the protective film; no specific limitation is made here.

[0046] Please combine Figure 4 Optionally, a guide block 140 is provided within the channel. The guide block 140 supports and guides the photomask 200. This facilitates the smooth passage of the photomask 200 through the channel within the base 110, resulting in smoother movement. It also promotes more precise positioning of the protective film during application, and provides better edge protection for the photomask 200. Currently, some manual film application methods are prone to causing misalignment of the protective film, resulting in some edges of the photomask 200 not being covered, which can easily lead to edge contamination.

[0047] Optionally, the base 110 is provided with support feet 115. The support feet 115 support the base 110 and also facilitate the handling, positioning and moving of the base 110.

[0048] Optionally, the photomask fixture 100 may also include a protective film wrapped around the roller assembly 120, the protective film being able to pass through the first groove 113 and extend along the channel so as to cover both sides of the photomask 200 as the photomask 200 passes through the channel.

[0049] The photomask fixture 100 provided in this embodiment of the invention operates on the following principle:

[0050] The photomask 200, to which the protective film needs to be applied, is inserted into the base 110 from one end of the inlet 111. The photomask 200 moves along the channel towards the outlet 112. A protective film is installed on the roller assembly 120. The protective film is anti-rolling. The protective film on one side of the base 110 passes through the first groove 113 and extends along the channel towards the outlet 112, covering one side of the photomask 200. At the same time, the protective film on the other side of the base 110 passes through the first groove 113 on the other side and extends along the channel towards the outlet 112, covering the other side of the photomask 200. In this way, after the photomask 200 enters the channel of the base 110, the protective film can be applied to both sides of the photomask 200. When the tail end of the photomask 200 passes through the second groove 114, the cutter 133 moves into the channel to cut the protective film, ensuring that the photomask 200 is separated from the protective film.

[0051] The photomask fixture 100 provided in this embodiment of the utility model has the following beneficial effects, including:

[0052] The photomask fixture 100 provided in this embodiment of the invention has roller assemblies 120 on both sides of a base 110. A protective film is provided on each roller assembly 120, which can pass through a first groove 113 into a channel. When the photomask 200 enters the channel of the base 110, the protective film on the roller assemblies 120 on both sides of the base 110 covers both sides of the photomask 200, achieving double-sided protection. When the photomask 200 exits the channel, a cutter assembly 130 cuts the protective film, thus completing the protection of one photomask 200. This photomask fixture 100 can quickly and effectively apply protective films to both sides of the photomask 200, preventing contamination or damage. Furthermore, the protective film has high coverage efficiency and precise positioning, completely covering the edges of the photomask 200, providing better protection.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. Any modifications, equivalent substitutions, improvements, etc., should be included within the protection scope of this utility model.

Claims

1. A photomask fixture, characterized in that, include: A base, wherein the base is provided with an inlet and an outlet for the photomask to pass through, and a channel connecting the inlet and the outlet; The base is provided with a first groove; the first groove is in communication with the channel; Two roller assemblies are provided, each located at one end of the inlet and on opposite sides of the base; each roller assembly is used to install a protective film. A cutter assembly is disposed on the base and located at one end of the outlet.

2. The photomask fixture according to claim 1, characterized in that, The roller assembly includes a roller and a first bracket, the first bracket being connected to the base, and the roller being rotatably mounted on the first bracket; the roller is used to mount the protective film.

3. The photomask fixture according to claim 1, characterized in that, The cutting blade assembly includes a second bracket, a guide rail, and a cutting blade; the second bracket is disposed on the base; the guide rail is movably connected to the second bracket; and the guide rail is movable relative to the second bracket along a first direction; the cutting blade is movably connected to the guide rail; and the cutting blade is movable relative to the guide rail along a second direction; the first direction and the second direction are perpendicular.

4. The photomask fixture according to claim 3, characterized in that, The base is provided with a second groove, which communicates with the channel; the cutter can pass through the second groove.

5. The photomask fixture according to claim 1, characterized in that, The base is provided with two cutting blade assemblies, which are respectively located on both sides of the base.

6. The photomask fixture according to claim 4, characterized in that, The cutter includes a mounting part and a cutting part connected together. The mounting part is slidably disposed on the guide rail; the cutting part is disposed in the second groove.

7. The photomask fixture according to claim 6, characterized in that, The cutting section uses a cone or a blade.

8. The photomask fixture according to claim 1, characterized in that, The channel is equipped with guide blocks.

9. The photomask fixture according to claim 1, characterized in that, The base is equipped with support feet.

10. The photomask fixture according to any one of claims 1 to 9, characterized in that, It also includes a protective film wrapped around the roller assembly, the protective film being able to pass through the first groove and extend along the channel.

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