Flexible exposure machine laminating equipment applied to curved surface exposure

Abstract

The utility model discloses a flexible exposure machine laminating device applied to curved surface exposure, which relates to the technical field of exposure machine laminating, and comprises a placing box and a mounting shell arranged on the placing box, and also comprises a fixing mechanism arranged on the mounting shell, the fixing mechanism comprises an electric sliding block, a driving mechanism and a driving mechanism, the motor is arranged in the mounting shell; the processing plate is arranged on the electric sliding block; the sliding groove is formed in the machining plate; the electric sliding block is arranged in the sliding groove; the mounting piece is arranged on the sliding block; the mounting groove is formed in the mounting piece; the moving part is arranged in the mounting groove; the mounting plate is arranged on the moving part; and the fixing piece is arranged on the mounting plate. According to the device, by arranging the fixing mechanism, curved surface materials and flexible materials can be supported, the materials are further stabilized, and it is guaranteed that the materials cannot move or deform during machining.

Description

Technical Field

[0001] This utility model relates to the field of bonding technology for exposure machines, and in particular to a flexible bonding device for exposure machines applied to curved surfaces. Background Technology

[0002] An exposure machine is a piece of equipment used in photolithography processes, widely applied in semiconductor manufacturing, printed circuit board manufacturing, and flat panel displays. The exposure machine projects a pattern from a mask onto a wafer or substrate coated with photoresist using an optical system. Ultraviolet light or other light causes a photochemical reaction in the photoresist, transferring the pattern from the mask onto the photoresist. Subsequent processes such as development and etching then form the desired circuit pattern or microstructure on the wafer or substrate. Current exposure machines have limitations in handling curved and flexible materials due to their inability to hold them in place, hindering the processing of such materials. Therefore, improvements are needed. Utility Model Content

[0003] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a flexible exposure machine bonding device for curved surface exposure, which aims to solve the technical problem that the above-mentioned exposure machine is not convenient for processing curved and flexible materials.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A flexible exposure machine bonding device for curved surface exposure includes a placement box and a mounting housing, the mounting housing being disposed on the placement box, and further includes:

[0006] A fixing mechanism, disposed on the mounting housing, is used to fix the parts, and the fixing mechanism includes:

[0007] Two electric sliders are disposed inside the mounting housing and slidably connected to the mounting housing.

[0008] A processing plate is mounted on the electric slider and is fixedly connected to the electric slider.

[0009] The component has two sliding grooves, which are disposed on the processing plate for sliding.

[0010] The electric slider is provided in multiples, and the multiple electric sliders are disposed in the sliding groove and slidably connected to the sliding groove;

[0011] The mounting components are multiple, and the multiple mounting components are disposed on the sliding slider and fixedly connected to the electric slider;

[0012] A mounting slot is provided on the mounting component for mounting parts;

[0013] The movable component has multiple components, and the multiple movable components are disposed in the mounting groove and slidably connected to the mounting groove;

[0014] The mounting plate is multiple, and the multiple mounting plates are disposed on the movable part and fixedly connected to the movable part;

[0015] The fasteners are multiple in number and are disposed on the mounting plate and fixedly connected to the mounting plate.

[0016] Preferably, the fixing mechanism further includes:

[0017] The drive device has multiple drives, and the multiple drive devices are disposed on the mounting member for moving the moving member;

[0018] The support device has multiple components, and the multiple support devices are disposed on the mounting component for supporting the parts.

[0019] Preferably, the driving device includes:

[0020] A mounting base is disposed on the mounting component and is fixedly connected to the mounting component;

[0021] A drive motor is mounted on the mounting base and fixedly connected to the mounting base;

[0022] A bidirectional threaded rod is disposed at the output end of the drive motor and is fixedly connected to the output end of the drive motor.

[0023] Preferably, the support device includes:

[0024] A drive unit, mounted on the mounting component, is used to provide power;

[0025] A support portion is disposed on the drive portion and is used to support the parts.

[0026] Preferably, the driving unit includes:

[0027] The mounting bracket has multiple mounting slots, which are disposed on the mounting component for fixing the component.

[0028] The cylinder has multiple cylinders, and the multiple cylinders are disposed in the fixed groove and fixedly connected to the fixed groove.

[0029] Preferably, the support portion includes:

[0030] The connecting piece has two parts, and the two connecting pieces are disposed on the cylinder and fixedly connected to the cylinder;

[0031] The connector has multiple connectors, and the multiple connectors are disposed on the connector and fixedly connected to the connector.

[0032] Preferably, the support portion further includes:

[0033] The device has two rotating shafts, which are mounted on the connecting seat and fixedly connected to the connecting seat.

[0034] The support has two members, and the two support members are disposed on the rotating shaft and rotatably connected to the rotating shaft.

[0035] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0036] 1. This device, by setting a fixing mechanism, can clamp and fix curved and flexible materials, and can also support curved and flexible materials to further stabilize the materials and ensure that the materials will not move or deform during processing.

[0037] 2. This device is equipped with multiple sets of fixing mechanisms, which are movable, thus improving the flexibility of the device and enabling stable clamping of different materials, thereby enhancing its practicality. Attached Figure Description

[0038] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0039] Figure 1 A three-dimensional structural schematic diagram of a bonding device for a flexible exposure machine applied to curved surface exposure is shown.

[0040] Figure 2 A partial cross-sectional view of a bonding device for a flexible exposure machine applied to curved surface exposure is shown.

[0041] Figure 3 It shows Figure 2 A magnified schematic diagram of the structure at point A in the middle.

[0042] Figure 4 A three-dimensional structural diagram of a partial fixing mechanism of a flexible exposure machine bonding device applied to curved surface exposure is shown.

[0043] Figure 5 An exploded three-dimensional structural diagram of a portion of the fixing mechanism of a bonding device for a flexible exposure machine applied to curved surface exposure is shown.

[0044] Legend:

[0045] 1. Placement box; 2. Mounting shell; 3. Electric slider; 4. Processing plate; 5. Sliding groove; 6. Electric slider; 7. Mounting groove; 8. Moving part; 9. Mounting plate; 10. Fixing part; 11. Mounting seat; 12. Drive motor; 13. Double threaded rod; 14. Fixing groove; 15. Cylinder; 16. Connecting part; 17. Connecting seat; 18. Rotating shaft; 19. Supporting part; 20. Mounting part. Detailed Implementation

[0046] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0047] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0048] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0049] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0050] Reference Figures 1 to 5The present invention provides a further description of an embodiment of a flexible exposure machine bonding device applied to curved surface exposure.

[0051] A flexible exposure machine bonding device for curved surface exposure includes a placement box 1 and a mounting shell 2, the mounting shell 2 being disposed on the placement box 1. It further includes a fixing mechanism disposed on the mounting shell 2 for fixing parts. The fixing mechanism includes: two electric sliders 3, both disposed within the mounting shell 2 and slidably connected to it; a processing plate 4, disposed on the electric sliders 3 and fixedly connected to them; two sliding grooves 5, both disposed on the processing plate 4 for part sliding; and multiple electric sliders 6. The following components are provided: a mounting plate 3, a mounting plate 4, a mounting groove 5, a mounting member 20, a mounting member 20, a mounting member 20, a mounting member 20, a mounting member 20, a mounting member 7, a mounting member 20, a mounting member 7, a mounting member 8, a mounting member 8, a mounting member 8, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 9, a mounting plate 10 ...

[0052] refer to Figure 1 and Figure 2 In a preferred embodiment, the fixing mechanism further includes: a plurality of driving devices, which are disposed on the mounting member 20 for moving the movable member 8; and a plurality of supporting devices, which are disposed on the mounting member 20 for supporting the parts.

[0053] refer to Figure 5 In a preferred embodiment, the driving device includes: a mounting base 11, which is disposed on the mounting member 20 and fixedly connected to the mounting member 20; a drive motor 12, which is disposed on the mounting base 11 and fixedly connected to the mounting base 11; and a bidirectional threaded rod 13, which is disposed at the output end of the drive motor 12 and fixedly connected to the output end of the drive motor 12.

[0054] refer to Figure 1 In a preferred embodiment, the support device includes: a drive unit disposed on the mounting member 20 for providing power; and a support unit disposed on the drive unit for supporting the parts.

[0055] Reference 2 and Figure 3In a preferred embodiment, the drive unit includes: a plurality of fixing slots 14, which are disposed on the mounting member 20 for fixing the component; and a plurality of cylinders 15, which are disposed in the fixing slots 14 and fixedly connected to the fixing slots 14.

[0056] refer to Figure 4 In a preferred embodiment, the support includes: two connectors 16, which are disposed on the cylinder 15 and fixedly connected to the cylinder 15; and multiple connecting seats 17, which are disposed on the connectors 16 and fixedly connected to the connectors 16.

[0057] refer to Figure 4 In a preferred embodiment, the support further includes: two rotating shafts 18, which are disposed on the connecting seat 17 and fixedly connected to the connecting seat 17; and two support members 19, which are disposed on the rotating shafts 18 and rotatably connected to the rotating shafts 18.

[0058] In this configuration, the housing 2 also houses a lifting door, an exposure assembly, and a slide rail for the electric slider 3; the moving part 8 is mounted on the bidirectional threaded rod 13 and is threadedly connected to the bidirectional threaded rod 13; the fixing part 10 contains a sensor that stops the cylinder 15 after the fixing part 10 contacts the surface of the part; both the electric slider 3 and the electric slider 6 contain drive components that provide power.

[0059] This device, through its fixing mechanism, can clamp and secure curved and flexible materials, and also provide support to further stabilize them, ensuring that the materials do not move or deform during processing. The device features multiple sets of movable fixing mechanisms, enhancing its flexibility and enabling stable clamping of various materials, thus improving its practicality.

[0060] Working Principle: When this device is in operation, the part is placed on the support 19, and the drive motor 12 is started. The drive motor 12 drives the bidirectional threaded rod 13 to rotate. The rotation of the bidirectional threaded rod 13 causes the moving part 8 to move. The moving part 8 moves the fixing part 10 closer to both sides of the part, clamping both sides of the part. Multiple sets of fixing mechanisms provide stable clamping for the part. For curved surfaces or flexible materials, a cylinder 15 is selected at a suitable position, causing the connecting part 16 to rise. The connecting part 16 then drags the connecting seat 17, the rotating shaft 18, and the support 19 to rise until the support 19 contacts the surface of the part. A sensor inside the support 19 stops the cylinder 15. When the support 19 contacts the part, it rotates on the rotating shaft 18 to ensure close contact with the part surface, guaranteeing support for the part.

[0061] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A bonding device for a flexible exposure machine applied to curved surface exposure, comprising a placement box (1) and a mounting shell (2), wherein the mounting shell (2) is disposed on the placement box (1), characterized in that, Also includes: A fixing mechanism, disposed on the mounting housing (2), is used to fix the parts, the fixing mechanism comprising: Two electric sliders (3) are provided, and the two electric sliders (3) are disposed inside the mounting housing (2) and are slidably connected to the mounting housing (2); The processing plate (4) is disposed on the electric slider (3) and is fixedly connected to the electric slider (3); Two sliding grooves (5) are provided on the processing plate (4) for component sliding; Multiple electric sliders (6) are provided, and multiple electric sliders (6) are disposed in the sliding groove (5) and slidably connected to the sliding groove (5); Mounting member (20) has multiple mounting members (20) and multiple mounting members (20) are disposed on the electric slider (6) and fixedly connected to the electric slider (6); Mounting slot (7) is provided on the mounting part (20) for mounting components; Multiple movable parts (8) are provided in the mounting groove (7) and are slidably connected to the mounting groove (7); Mounting plates (9) are provided in multiples, and multiple mounting plates (9) are disposed on the movable member (8) and fixedly connected to the movable member (8); The fasteners (10) are multiple, and the multiple fasteners (10) are disposed on the mounting plate (9) and fixedly connected to the mounting plate (9).

2. The flexible exposure machine bonding device for curved surface exposure according to claim 1, characterized in that, The fixing mechanism also includes: The drive device has multiple drive devices, and the multiple drive devices are disposed on the mounting member (20) for moving the moving member (8); The support device has multiple supports, and the multiple supports are disposed on the mounting member (20) for supporting the parts.

3. The flexible exposure machine bonding device for curved surface exposure according to claim 2, characterized in that, The driving device includes: The mounting base (11) is disposed on the mounting component (20) and is fixedly connected to the mounting component (20); A drive motor (12) is mounted on the mounting base (11) and fixedly connected to the mounting base (11); A bidirectional threaded rod (13) is disposed at the output end of the drive motor (12) and is fixedly connected to the output end of the drive motor (12).

4. The flexible exposure machine bonding device for curved surface exposure according to claim 3, characterized in that, The support device includes: A drive unit, disposed on the mounting member (20), is used to provide power; A support portion is disposed on the drive portion and is used to support the parts.

5. A flexible exposure machine bonding device for curved surface exposure according to claim 4, characterized in that, The drive unit includes: The mounting slots (14) are multiple, and the multiple mounting slots (14) are disposed on the mounting member (20) for fixing the component; The cylinder (15) has multiple cylinders, and the multiple cylinders (15) are disposed in the fixed groove (14) and fixedly connected to the fixed groove (14).

6. The flexible exposure machine bonding device for curved surface exposure according to claim 5, characterized in that, The support portion includes: Two connectors (16) are provided on the cylinder (15) and are fixedly connected to the cylinder (15); A plurality of connectors (17) are provided on the connector (16) and are fixedly connected to the connector (16).

7. The flexible exposure machine bonding device for curved surface exposure according to claim 6, characterized in that, The support portion further includes: Two rotating shafts (18) are provided, and the two rotating shafts (18) are disposed on the connecting seat (17) and fixedly connected to the connecting seat (17); There are two support members (19), and the two support members (19) are disposed on the rotating shaft (18) and rotatably connected to the rotating shaft (18).

Images