Small-sized rapid sampling device
By designing a small, rapid sample introduction device, including a sample introduction chamber assembly, an isolation valve, and a sample delivery rod assembly, the problem of existing devices being complex in structure and unsuitable for small-scale process equipment is solved. This achieves rapid sample transfer and compatibility under vacuum conditions, making it suitable for compact process equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TRUTH EQUIP CO LTD
- Filing Date
- 2025-05-19
- Publication Date
- 2026-04-28
AI Technical Summary
Existing rapid sample introduction devices are complex in structure and large in footprint, making them unsuitable for small, compact process equipment and incompatible with the transport of various complex samples.
A small, rapid sample injection device was designed, including a sample injection chamber assembly, an isolation valve, and a sample delivery rod assembly. The isolation valve isolates the sample from the process chamber, and the opening and closing degree of the valve plate is controlled by a telescopic mechanism to meet the requirement of rapid sample injection without disrupting the vacuum level.
It enables rapid sample transfer without compromising the vacuum level of the process chamber. It has a simple structure, small size, and is suitable for compact process equipment. Furthermore, the parts are easy to manufacture and the maintenance is convenient.
Smart Images
Figure CN224178579U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum transmission technology, and more specifically, to a small rapid sample introduction device. Background Technology
[0002] It is known that in semiconductor, integrated circuit and other related fields, core processes are generally carried out under vacuum conditions. It is necessary to achieve rapid transfer of samples within the process chamber without disrupting the vacuum. Therefore, rapid sample transfer devices need to have both vacuum isolation and sample transfer capabilities.
[0003] However, in practical use, existing rapid sample introduction devices are often applied to larger process equipment, resulting in a large footprint and complex structure. As a result, existing rapid sample introduction devices are not suitable for small, compact process equipment and are not compatible with the transfer of various complex samples. Therefore, this utility model proposes a small rapid sample introduction device as a further improvement. Utility Model Content
[0004] In order to overcome the above-mentioned defects of the prior art, the embodiments of this utility model provide a small rapid sample introduction device to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a small rapid sample injection device, comprising: a sample injection chamber assembly, an isolation valve, and a sample delivery rod assembly;
[0006] The isolation valve includes: a guide device, a first valve body and a second valve body, wherein the first valve body and the sample delivery rod assembly are respectively sealed and fixedly connected to both sides of the sample inlet chamber assembly;
[0007] The two sides of one end of the guide device are respectively sealed and fixedly connected to the first valve body and the second valve body. The first valve body and the second valve body are sealed and fixedly connected. A valve cavity for transferring samples is provided between the guide device, the first valve body and the second valve body. A valve plate for sealing the valve cavity is provided inside the valve cavity.
[0008] A telescopic mechanism is provided between the valve plate and the guide device.
[0009] Furthermore, the sample inlet chamber assembly includes: a sample outlet chamber and a sealing door;
[0010] The first valve body and the sample delivery rod assembly are respectively sealed and fixedly connected to both sides of the sample dispensing chamber;
[0011] The top of the lofting chamber is rotatably connected to the sealing door via a hinge, and the end of the sealing door away from the hinge is threadedly connected to the top of the lofting chamber via a threaded handle; a rubber ring for sealing is provided between the sealing door and the top of the lofting chamber.
[0012] Furthermore, the sample delivery rod assembly includes: a guide cylinder and a straight rod;
[0013] The guide cylinder is movably sleeved on the outer surface of the straight rod, and one end of the guide cylinder and the first valve body are respectively sealed and fixedly connected to both sides of the lofting cavity; the guide cylinder and the straight rod are concentrically arranged.
[0014] Furthermore, the telescopic mechanism includes: a lead screw and a transmission block;
[0015] The guiding device is connected to the lead screw threadedly via a lead screw nut fixed to the inner wall. One end of the lead screw located inside the valve cavity is rotatably connected to the transmission block, and the end of the transmission block away from the lead screw is fixedly connected to the valve plate. A handwheel is fixedly installed at the end of the lead screw located outside the valve cavity.
[0016] Furthermore, the lead screw is configured as a trapezoidal lead screw.
[0017] Furthermore, the end faces of the first valve body and the second valve body that are close to each other are both set as inclined surfaces, and both inclined surfaces are located inside the valve cavity. The cross-section of the valve plate is set as an elongated trapezoid, and the plane located on the inclined side of the elongated trapezoid is set as the sealing surface of the valve plate. The two inclined surfaces are in contact with the corresponding sealing surfaces respectively.
[0018] Furthermore, the first valve body and the second valve body, the guide device and the first valve body, the guide device and the second valve body, and the inclined surface and the sealing surface are all sealed and connected by sealing grooves and rubber rings.
[0019] Furthermore, the lofting cavity is provided with several flange ports for connecting a vacuum generating device.
[0020] The technical effects and advantages of this utility model are as follows:
[0021] Compared with the prior art, this utility model sets up a sample injection chamber assembly, an isolation valve, and a sample delivery rod assembly. By equipping the sample injection chamber assembly and using the isolation valve to isolate it from the process chamber, it meets the requirement of sample loading and unloading without damaging the vacuum of the process chamber. By setting up a telescopic mechanism, the opening and closing degree of the valve plate is controlled by the rotation of the lead screw, which meets the rapid sample injection requirements of different samples. The overall structure is simple and compact, suitable for process devices with compact requirements. The parts are easy to process and easy to maintain. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model.
[0023] Figure 2 This is a schematic diagram of the sample delivery rod assembly of this utility model.
[0024] Figure 3 This is a cross-sectional structural diagram of the isolation valve of this utility model.
[0025] The attached figures are labeled as follows:
[0026] 1. Sample inlet chamber assembly;
[0027] 11. Lofting cavity; 111. Flange; 12. Sealing door; 13. Hinge; 14. Threaded handle;
[0028] 2. Isolation valve;
[0029] 21. Guide device; 22. First valve body; 23. Second valve body; 24. Valve cavity; 25. Valve plate;
[0030] 3. Sample feeding rod assembly; 31. Guide cylinder; 32. Straight rod;
[0031] 4. Telescopic mechanism; 41. Lead screw; 42. Transmission block; 43. Handwheel;
[0032] a. Inclined surface; b. Sealing surface. Detailed Implementation
[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.
[0034] As attached Figure 1 Appendix Figure 2 and attached Figure 3 The small rapid sample injection device shown includes: a sample injection chamber assembly 1, an isolation valve 2, and a sample delivery rod assembly 3;
[0035] The isolation valve 2 includes: a guide device 21, a first valve body 22 and a second valve body 23. The first valve body 22 and the sample delivery rod assembly 3 are respectively sealed and fixedly connected to both sides of the sample inlet chamber assembly 1.
[0036] The two sides of one end of the guide device 21 are respectively sealed and fixedly connected to the first valve body 22 and the second valve body 23. The first valve body 22 and the second valve body 23 are sealed and fixedly connected. A valve cavity 24 for transferring samples is provided between the guide device 21, the first valve body 22 and the second valve body 23. A valve plate 25 for sealing the valve cavity 24 is provided inside the valve cavity 24.
[0037] The right side of the injection chamber assembly 1 is sealed and connected to the first valve body 22 of the isolation valve 2, and the left side of the injection chamber assembly 1 is sealed and connected to the sample delivery rod assembly 3, forming a rapid injection device that integrates sample delivery, sample release and isolation.
[0038] The second valve body 23 of the isolation valve 2 is fastened to the process chamber, and the end faces of the first valve body 22 and the second valve body 23 are both provided with sealing grooves, which are fastened to the rubber ring to form a vacuum seal.
[0039] A telescopic mechanism 4 is provided between the valve plate 25 and the guide device 21.
[0040] The first valve body 22 and the second valve body 23 are fastened and sealed on the left and right sides of the valve cavity 24, respectively, while the guide device 21 is fastened to the front side of the valve cavity 24, so that the valve plate 25 can extend and retract in the valve cavity 24 through the telescopic mechanism 4 provided on the guide device 21.
[0041] In a preferred embodiment, as shown in the appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the sample injection chamber assembly 1 includes: a sample release chamber 11 and a sealing door 12;
[0042] The first valve body 22 and the sample delivery rod assembly 3 are respectively sealed and fixedly connected to both sides of the sample release chamber 11;
[0043] The top of the lofting chamber 11 is rotatably connected to the sealing door 12 via a hinge 13. The end of the sealing door 12 away from the hinge 13 is threadedly connected to the top of the lofting chamber 11 via a threaded handle 14. A rubber ring for sealing is provided between the sealing door 12 and the top of the lofting chamber 11.
[0044] In a more specific embodiment: the sealing door 12 is connected to the lofting cavity 11 by a hinge 13 and sealed with a rubber ring, and the sealing door 12 is provided with a threaded handle 14 on the opposite side of the hinge 13; the threaded handle 14 is fastened to the sealing door 12 and the lofting cavity 11 by a threaded connection, and the rubber ring is pressed to achieve sealing and quick opening and closing of the sealing door 12.
[0045] The screw handle 14 and the hinge 13 allow the sealing door 12 and the sample placement chamber 11 to be opened and closed quickly, enabling rapid sample loading and unloading.
[0046] The sealing door 12 can be opened through the slot and the glass is sealed and fixed at the slot to facilitate observation of the sample condition inside the sample placement chamber 11.
[0047] In a preferred embodiment, as shown in the appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the sample delivery rod assembly 3 includes: a guide cylinder 31 and a straight rod 32;
[0048] The guide cylinder 31 is movably sleeved on the outer surface of the straight rod 32, and one end of the guide cylinder 31 and the first valve body 22 are respectively sealed and fixedly connected to both sides of the lofting cavity 11.
[0049] Among them, the sample delivery rod assembly 3 is sealed and fixed to the sample inlet chamber assembly 1;
[0050] The guide cylinder 31 and the straight rod 32 are concentrically arranged;
[0051] Among them, the straight rod 32 can freely extend and retract within the guide cylinder 31;
[0052] The straight rod 32 has a threaded hole at its end, which facilitates quick assembly and disassembly of the sample tray and enables compatibility between different types of sample trays.
[0053] The guide cylinder 31 and the straight rod 32 are provided with a conventional driving mechanism, while the part that needs to be sealed to form a vacuum environment can be dynamically sealed using double rubber rings.
[0054] In a preferred embodiment, as shown in the appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the telescopic mechanism 4 includes: a lead screw 41 and a transmission block 42;
[0055] The guide device 21 is threadedly connected to the lead screw 41 via a lead screw nut fixed to the inner wall. One end of the lead screw 41 located inside the valve cavity 24 is rotatably connected to the transmission block 42. The end of the transmission block 42 away from the lead screw 41 is fixedly connected to the valve plate 25. A handwheel 43 is fixedly installed on the end of the lead screw 41 located outside the valve cavity 24.
[0056] Since the guide device 21 has a built-in screw nut, the screw 41 is threadedly engaged with the guide device 21. Therefore, by rotating the screw 41 with the handwheel 43, the screw 41 can be driven to move telescopically within the guide device 21. The other end of the screw 41 is connected to the valve plate 25 through the transmission block 42. The transmission block 42 hinders the rotation of the screw 41 and moves with the end of the screw 41. Thus, the telescopic movement of the screw 41 pushes the valve plate 25 connected to the transmission block 42 to move telescopically within the valve cavity 24.
[0057] When the valve plate 25 extends forward, the valve plate 25 fits tightly against the end faces of the first valve body 22 and the second valve body 23, thereby isolating the channel formed by the first valve body 22 and the second valve body 23.
[0058] When the valve plate 25 retracts, the valve plate 25 disengages from the end face of the first valve body 22 and the second valve body 23, thereby opening the channel formed by the first valve body 22 and the second valve body 23.
[0059] The specific working principle is as follows: the rotation of the handwheel 43 drives the lead screw 41 to rotate, so that the lead screw 41 moves telescopically within the guide device 21. The telescopic movement of the lead screw 41 pushes the valve plate 25 connected to the transmission block 42 to move telescopically within the valve cavity 24; thereby realizing the isolation or connection of the channel constructed by the first valve body 22 and the second valve body 23.
[0060] One end of the transmission block 42 is concave, which meshes with the end of the lead screw 41, so that the transmission block 42 can counteract the rotation of the lead screw 41 and push the valve plate 25 to perform telescopic movement.
[0061] In a preferred embodiment, as shown in the appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the lead screw 41 is configured as a trapezoidal lead screw so that the lead screw 41 can cooperate with the lead screw nut installed in the guide device 21, and utilize the self-locking capability of the lead screw 41 to provide a clamping force to the valve plate 25 that is tightly pressed against the end face.
[0062] In a preferred embodiment, as shown in the appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the end faces of the first valve body 22 and the second valve body 23 that are close to each other are both set as inclined surfaces a. Both inclined surfaces a are located inside the valve cavity 24. The cross-section of the valve plate 25 is set as a long trapezoid. The plane located on the inclined side of the long trapezoid is set as the sealing surface b of the valve plate 25. The two inclined surfaces a are in contact with the corresponding sealing surfaces b respectively.
[0063] Among them, the end faces of the first valve body 22 and the second valve body 23 in the valve cavity 24 are inclined surfaces a at a certain angle. The first valve body 22 and the second valve body 23 are arranged to be distributed on opposite sides with the guide device 21 as the center, so that the inclined surfaces a of the two form a concave shape.
[0064] In this configuration, the sealing surface b of the valve plate 25 is parallel to the inclined surface a on the first valve body 22 and the second valve body 23. The valve plate 25 extends forward via a guide device and fits tightly against the left and right end faces of the valve body to form a seal.
[0065] In a preferred embodiment, as shown in the appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the first valve body 22 and the second valve body 23, the guide device 21 and the first valve body 22, the guide device 21 and the second valve body 23, and the inclined surface a and the sealing surface b are all sealed and connected by sealing grooves and rubber rings.
[0066] A sealing groove is provided at the edge of the end face between the first valve body 22 and the second valve body 23 for embedding a sealing ring.
[0067] In a preferred embodiment, as shown in the appendix Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the sample loading chamber 11 is provided with several flange ports 111 for connecting to a vacuum generating device, so that the sample loading chamber assembly 1 can be evacuated.
[0068] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0069] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A small, rapid sample introduction device, characterized in that: include: The sample inlet chamber assembly (1), the isolation valve (2), and the sample delivery rod assembly (3); The isolation valve (2) includes: a guide device (21), a first valve body (22) and a second valve body (23), wherein the first valve body (22) and the sample delivery rod assembly (3) are respectively sealed and fixedly connected to both sides of the sample inlet chamber assembly (1); The two sides of one end of the guide device (21) are respectively sealed and fixedly connected to the first valve body (22) and the second valve body (23). The first valve body (22) and the second valve body (23) are sealed and fixedly connected. A valve cavity (24) for transferring samples is provided between the guide device (21), the first valve body (22) and the second valve body (23). A valve plate (25) for sealing the valve cavity (24) is provided inside the valve cavity (24). A telescopic mechanism (4) is provided between the valve plate (25) and the guide device (21).
2. The small rapid sample introduction device according to claim 1, characterized in that: The sample inlet chamber assembly (1) includes: a sample outlet chamber (11) and a sealing door (12); The first valve body (22) and the sample delivery rod assembly (3) are respectively sealed and fixedly connected to both sides of the sample release chamber (11); The top of the lofting cavity (11) is rotatably connected to the sealing door (12) via a hinge (13). The end of the sealing door (12) away from the hinge (13) is threadedly connected to the top of the lofting cavity (11) via a threaded handle (14). A rubber ring for sealing is provided between the sealing door (12) and the top of the lofting cavity (11).
3. The small rapid sample introduction device according to claim 2, characterized in that: The sample delivery rod assembly (3) includes: a guide tube (31) and a straight rod (32); The guide cylinder (31) is movably sleeved on the outer surface of the straight rod (32). One end of the guide cylinder (31) and the first valve body (22) are respectively sealed and fixedly connected to both sides of the lofting cavity (11). The guide cylinder (31) and the straight rod (32) are concentrically arranged.
4. A small rapid sample introduction device according to claim 2, characterized in that: The telescopic mechanism (4) includes: a lead screw (41) and a transmission block (42); The guide device (21) is threadedly connected to the lead screw (41) via a lead screw nut fixed to the inner wall. One end of the lead screw (41) located inside the valve cavity (24) is rotatably connected to the transmission block (42). The end of the transmission block (42) away from the lead screw (41) is fixedly connected to the valve plate (25). A handwheel (43) is fixedly installed on the end of the lead screw (41) located outside the valve cavity (24).
5. A small rapid sample introduction device according to claim 4, characterized in that: The lead screw (41) is configured as a trapezoidal lead screw.
6. A small rapid sample introduction device according to claim 1, characterized in that: The end faces of the first valve body (22) and the second valve body (23) that are close to each other are both set as inclined surfaces (a). Both inclined surfaces (a) are located in the valve cavity (24). The cross-section of the valve plate (25) is set as a long trapezoid. The plane located on the inclined side of the long trapezoid is set as the sealing surface (b) of the valve plate (25). The two inclined surfaces (a) are in contact with the corresponding sealing surface (b) respectively.
7. A small rapid sample introduction device according to claim 6, characterized in that: The first valve body (22) and the second valve body (23), the guide device (21) and the first valve body (22), the guide device (21) and the second valve body (23), and the inclined surface (a) and the sealing surface (b) are all sealed and connected by sealing grooves and rubber rings.
8. A small rapid sample introduction device according to claim 2, characterized in that: The lofting chamber (11) is provided with several flange ports (111) for connecting to the vacuum generating device.