Chassis junction silicon cleaning tool

Abstract

The utility model belongs to the technical field of reduction furnace chassis cleaning, and particularly relates to a chassis junction silicon cleaning tool which comprises a supporting cover, handles are fixedly connected to the front side and the rear side of the supporting cover respectively, a rotating pipe is installed on the inner wall of the supporting cover through a bearing, and a spray pipe is fixedly connected to the lower side of a cross pipe of the rotating pipe. And the cross pipe of the rotating pipe and the supporting cover are jointly provided with a guide mechanism. According to the scheme, through the arrangement of the air supercharger, the spray pipe and other structures, air can be sprayed in a pressurized mode, under the action of the second belt wheel, the servo motor and other structures, the spray pipe can rotationally spray high-pressure air, then silicon attached to the surface of an electrode tip of the reduction furnace chassis is efficiently cleaned, and under the action of a negative pressure dust collector, the cleaning efficiency is improved. And silica fume and the like can be absorbed and treated in time, and the rotating pipe can be rotationally guided under the action of a guide ring groove, a guide ball and the like, so that stable rotation of components such as a spray pipe and the like is ensured.

Description

A chassis silicon cleaning tool Technical Field

[0001] This utility model belongs to the field of reduction furnace chassis cleaning technology, specifically relating to a chassis silicon cleaning tool. Background Technology

[0002] Silicon deposition on the furnace bottom is a common problem in semiconductor or polysilicon production. It is mainly caused by silicon depositing on the furnace bottom or chassis to form hard agglomerates, which affects the heat transfer efficiency of the equipment, increases energy consumption, and may even lead to production interruption. Therefore, it is necessary to clean the silicon deposition on the furnace bottom.

[0003] A utility model patent with patent authorization announcement number CN211385961U discloses a cleaning device for the chassis of a polycrystalline silicon reduction furnace, including a cylindrical cover and multiple blowing heads fixedly installed inside the cylindrical cover, all of which have their openings facing downwards; a dust collector is also fixedly installed on the cylindrical cover.

[0004] However, existing chassis silicon deposit cleaning tools also have certain drawbacks. Although existing chassis silicon deposit cleaning tools use components such as nozzles and delivery pipes to spray air to clean the silicon deposits on the chassis electrode heads, the fixed installation direction of the nozzles easily leads to problems with poor cleaning range and cleaning efficiency. Summary of the Invention

[0005] The purpose of this utility model is to provide a chassis silicon deposit cleaning tool, which solves the problem that existing chassis silicon deposit cleaning tools, although using nozzles, delivery pipes and other structural components to spray air to clean silicon deposits on chassis electrode heads, are prone to poor cleaning range and cleaning efficiency due to the fixed installation direction of the nozzles.

[0006] To achieve the above objectives, this utility model provides a chassis silica cleaning tool, including a support cover. Handles are fixedly connected to both the front and rear sides of the support cover. A rotating tube is mounted on the inner wall of the support cover via bearings. A spray pipe is fixedly connected to the lower side of the cross tube of the rotating tube. A guide mechanism is provided on both the cross tube of the rotating tube and the support cover. Support plates are fixedly connected to both the left and right sides of the support cover. A pulley is fixedly sleeved on the outer side of the vertical part of the rotating tube. A mounting plate is fixedly connected to the rear part of the support cover. A servo motor contacts the upper end of the mounting plate. A pulley is fixedly sleeved on the outer side of the output shaft of the servo motor. A V-belt is provided on the surface of pulley two and pulley one. A tensioning mechanism is provided on the mounting plate.

[0007] The principle of this utility model is as follows: by setting up an air booster, the air can be pressurized for use. Under the action of the output pipe, rotating pipe, and nozzle, high-pressure air can be sprayed out. When the servo motor drives the output shaft to rotate, it can drive the second pulley to rotate. Under the transmission of the V-belt, it can drive the first pulley to rotate, thereby driving the rotating pipe to rotate, and finally driving the nozzle to rotate, so as to spray high-pressure air in a rotating manner, thereby improving the cleaning effect on the silicon deposits on the electrode head surface of the reduction furnace chassis. Under the action of the negative pressure dust collector and dust collection pipe, the silicon ash and other materials can be absorbed and used in a timely manner.

[0008] When the rotating tube rotates, it can drive the mounting bracket to rotate, which in turn drives the telescopic plate to rotate, and then drives the guide ball to slide along the inner wall of the guide ring groove. This provides rotational guidance for components such as the rotating tube and nozzle, avoiding centrifugal polarization and vibration problems of the rotating tube and nozzle. Under the deformation of the elastic block, the telescopic plate can be pushed to keep the guide ball in contact with the guide ring groove, thus ensuring a good guiding effect.

[0009] By driving the rotating disk to rotate, the screw is driven to rotate. With the threaded connection, the slider can be driven to slide along the inner wall of the mounting plate, and the auxiliary plate can be driven to slide along the lower end of the mounting plate to ensure the sliding stability of the slider. This, in turn, drives the servo motor to move, causing the servo motor to drive the second pulley to move away from the first pulley, thus tensioning the V-belt to ensure good transmission effect of the V-belt.

[0010] The beneficial effects of this utility model are as follows: This solution, through the setting of air booster, nozzle and other structures, can pressurize and spray air. Under the action of pulley two, servo motor and other structures, the nozzle can rotate and spray high-pressure air, thereby efficiently cleaning the silicon adhering to the electrode head surface of the reduction furnace chassis. With the action of negative pressure dust collector, silicon ash can be absorbed and treated in time. Under the action of guide ring groove, guide ball and other structures, the rotating tube can be rotated and guided to ensure the rotational stability of the nozzle and other components. The setting of the rotating disk facilitates the movement of the screw, which drives the slider to move, and then drives the servo motor to move. The servo motor drives pulley two to move away from pulley one, and tensions the V-belt to ensure good transmission effect of the V-belt.

[0011] Furthermore, an air booster is provided at the upper end of the support plate on the left side. The output pipe of the air booster is rotatably connected to the rotating pipe. By setting the air booster, the air can be pressurized for use, thereby improving the subsequent air injection effect.

[0012] Furthermore, a negative pressure vacuum cleaner is provided at the upper end of the support plate on the right side. The suction pipe of the negative pressure vacuum cleaner is fixedly connected to the support cover. Through the setting of the negative pressure vacuum cleaner, silica fume and other materials can be absorbed and used in a timely manner.

[0013] Furthermore, the guiding mechanism includes a guide ring groove, the inner wall of the support cover is provided with a guide ring groove, the cross tube of the rotating tube is fixedly connected to a mounting bracket, the inner wall of the mounting bracket is slidably connected to a telescopic plate, the horizontal part of the telescopic plate is fixedly connected to a guide ball, the guide ball is slidably connected to the guide ring groove, the vertical part of the telescopic plate is bonded with an elastic block, and the other end of the elastic block is bonded to the cross tube of the rotating tube. Through the action of the guide ring groove, guide ball, elastic block and other structures, the rotating tube can be rotated and guided to ensure the rotational stability of the rotating tube, nozzle and other components.

[0014] Furthermore, four guide balls are provided, and the four guide balls are arranged in a circular array on the guide ring groove. Through the arrangement of the guide balls and the guide ring groove, the rotating tube can be rotated and guided.

[0015] Furthermore, the tensioning mechanism includes a screw, which is rotatably connected to the inner wall of the mounting plate. A slider is threadedly connected to the outer side of the screw, and the slider is fixedly mounted to a servo motor. An auxiliary plate is fixedly connected to the lower end of the slider, and the auxiliary plate is slidably connected to the mounting plate. A first limiting ear is fixedly connected to the outer side of the screw, and the first limiting ear contacts the inner wall of the mounting plate. A second limiting ear is fixedly connected to the outer side of the screw, and the second limiting ear contacts the mounting plate. Through the action of the screw, the slider can be driven to move, thereby driving the servo motor to move and tensioning the V-belt.

[0016] Furthermore, a rotating disk is fixedly connected to the end face of the screw. The rotating disk is made of hard rubber. The rotating disk facilitates the rotation of the screw, and the hard rubber material has good durability and skin-friendliness. Attached Figure Description

[0017] Figure 1 is a perspective view of the overall structure of the chassis silicon cleaning tool according to an embodiment of the present invention;

[0018] Figure 2 is a bottom view of the chassis silicon cleaning tool of the present invention as shown in Figure 1;

[0019] Figure 3 is a bottom view of the chassis silicon cleaning tool according to an embodiment of the present invention, as shown in Figure 1.

[0020] Figure 4 is an enlarged view of the guide ball in Figure 2 of the chassis silicon cleaning tool according to an embodiment of the present invention;

[0021] Figure 5 is an enlarged view of the tensioning mechanism of the chassis silicon cleaning tool of the present invention as shown in Figure 3.

[0022] The following detailed description illustrates the specific implementation method:

[0023] The reference numerals in the accompanying drawings include: support cover 1, handle 2, rotating tube 3, nozzle 4, guide mechanism 5, support plate 6, air booster 7, negative pressure vacuum cleaner 8, pulley one 9, mounting plate 10, servo motor 11, pulley two 12, V-belt 13, tensioning mechanism 14, guide ring groove 51, mounting bracket 52, telescopic plate 53, guide ball 54, elastic block 55, screw 141, slider 142, auxiliary plate 143, limit ear one 144, limit ear two 145, rotating disk 146. Detailed Implementation

[0024] The embodiment is basically shown in Figures 1, 2, 3, 4, and 5. This embodiment provides a chassis silicon cleaning tool, including a support cover 1. Handles 2 are fixedly connected to the front and rear sides of the support cover 1. A rotating tube 3 is installed on the inner wall of the support cover 1 through bearings. A spray pipe 4 is fixedly connected to the lower side of the cross tube of the rotating tube 3. A guide mechanism 5 is provided on the cross tube of the rotating tube 3 and the support cover 1. Support plates 6 are fixedly connected to the left and right sides of the support cover 1. A pulley 9 is fixedly sleeved on the outer side of the vertical part of the rotating tube 3. A mounting plate 10 is fixedly connected to the rear part of the support cover 1. A servo motor 11 is contacted at the upper end of the mounting plate 10. A pulley 12 is fixedly sleeved on the outer side of the output shaft of the servo motor 11. A V-belt 13 is provided on the surface of the pulley 12 and the pulley 9. A tensioning mechanism 14 is provided on the mounting plate 10.

[0025] As shown in Figures 1, 2, 3, 4, and 5, an air booster 7 is installed at the upper end of the left support plate 6. The output pipe of the air booster 7 is rotatably connected to the rotating pipe 3. The air booster 7 can be used to pressurize the air and improve the subsequent air jet effect. A negative pressure vacuum cleaner 8 is installed at the upper end of the right support plate 6. The suction pipe of the negative pressure vacuum cleaner 8 is fixedly connected to the support cover 1. The negative pressure vacuum cleaner 8 can absorb silica fume and other materials in a timely manner.

[0026] As shown in Figures 1, 2, 3, 4, and 5, the guiding mechanism 5 includes a guide ring groove 51. The inner wall of the support cover 1 has a guide ring groove 51. The cross tube of the rotating pipe 3 is fixedly connected to a mounting bracket 52. The inner wall of the mounting bracket 52 is slidably connected to a telescopic plate 53. The horizontal part of the telescopic plate 53 is fixedly connected to a guide ball 54. The guide ball 54 is slidably connected to the guide ring groove 51. Four guide balls 54 are arranged in a ring array on the guide ring groove 51. Through the arrangement of the guide balls 54 and the guide ring groove 51, the rotating pipe 3 can be rotated and guided. The vertical part of the telescopic plate 53 is bonded with an elastic block 55. The other end of the elastic block 55 is bonded to the cross tube of the rotating pipe 3. Through the function of the guide ring groove 51, guide balls 54, elastic blocks 55, etc., the rotating pipe 3 can be rotated and guided to ensure the rotational stability of the rotating pipe 3, nozzle 4, and other components.

[0027] As shown in Figures 1, 2, 3, 4, and 5, the tensioning mechanism 14 includes a screw 141. The screw 141 is rotatably connected to the inner wall of the mounting plate 10. A slider 142 is threadedly connected to the outer side of the screw 141. The slider 142 is fixedly mounted to the servo motor 11. An auxiliary plate 143 is fixedly connected to the lower end of the slider 142. The auxiliary plate 143 is slidably connected to the mounting plate 10. A limit ear 144 is fixedly connected to the outer side of the screw 141. The limit ear 144 contacts the inner wall of the mounting plate 10. The outer side of the screw 141 is fixedly connected to the limiting ear 145, which contacts the mounting plate 10. The end face of the screw 141 is fixedly connected to the rotating disk 146, which is made of hard rubber. The rotating disk 146 facilitates the rotation of the screw 141. The hard rubber material has good durability and skin-friendliness. Through the action of the screw 141, the slider 142 can be driven to move, which in turn drives the servo motor 11 to move and tension the V-belt 13.

[0028] The specific implementation process of this utility model is as follows: By setting the air booster 7, the air can be pressurized for use. Under the action of the output pipe, rotating pipe 3, and nozzle 4, high-pressure air can be sprayed out. When the servo motor 11 drives the output shaft to rotate, it can drive the pulley 12 to rotate. Under the transmission of the V-belt 13, it can drive the pulley 9 to rotate, thereby driving the rotating pipe 3 to rotate, and finally driving the nozzle 4 to rotate, so as to spray the high-pressure air in a rotating manner, thereby improving the cleaning effect on the silicon deposits on the electrode head surface of the reduction furnace chassis. Under the action of the negative pressure dust collector 8 and the dust collection pipe, the silicon ash and other materials can be absorbed and used in a timely manner.

[0029] When the rotating tube 3 rotates, it can drive the mounting bracket 52 to rotate, which in turn drives the telescopic plate 53 to rotate, thereby driving the guide ball 54 to slide along the inner wall of the guide ring groove 51, and guide the rotating tube 3, nozzle 4 and other components to rotate and avoid centrifugal polarization and vibration problems of the rotating tube 3 and nozzle 4. Under the deformation of the elastic block 55, the telescopic plate 53 can be pushed to drive the guide ball 54 to always be in contact with the guide ring groove 51 to ensure a good guiding effect.

[0030] By driving the rotating disk 146 to rotate, the screw 141 is driven to rotate. Under the threaded connection, the slider 142 can be driven to slide along the inner wall of the mounting plate 10, and the auxiliary plate 143 can be driven to slide along the lower end of the mounting plate 10 to ensure the sliding stability of the slider 142. This, in turn, drives the servo motor 11 to move, so that the servo motor 11 drives the pulley 12 to move away from the pulley 9, and tensions the V-belt 13 to ensure good transmission effect of the V-belt 13.

[0031] This design utilizes the air booster 7 and nozzle 4 to pressurize and inject air. With the assistance of pulley 12 and servo motor 11, the nozzle 4 rotates and injects high-pressure air, efficiently cleaning the silicon adhering to the electrode head surface of the reduction furnace chassis. Combined with the negative pressure vacuum cleaner 8, it can promptly absorb and treat silicon ash. The guide ring groove 51 and guide ball 54 guide the rotation of the rotating tube 3, ensuring the rotational stability of the nozzle 4 and other components. The rotating disk 146 facilitates the movement of the screw 141, which in turn moves the slider 142, thereby moving the servo motor 11. The servo motor 11 then moves pulley 12 away from pulley 9, tensioning the V-belt 13 to ensure good transmission performance.

[0032] It should be noted in advance that, in this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0033] The above descriptions are merely embodiments of the present invention, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of the present invention, and these should also be considered within the scope of protection of the present invention. These modifications and improvements will not affect the effectiveness of the present invention or the practicality of the patent. The scope of protection claimed in this application should be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A chassis silicon deposit cleaning tool, comprising a support cover, characterized in that: Handles are fixedly connected to both the front and rear sides of the support cover. A rotating tube is installed on the inner wall of the support cover via bearings. A nozzle is fixedly connected to the lower side of the cross tube of the rotating tube. A guide mechanism is provided on both the cross tube of the rotating tube and the support cover. Support plates are fixedly connected to both the left and right sides of the support cover. A pulley is fixedly sleeved on the outer side of the vertical part of the rotating tube. A mounting plate is fixedly connected to the rear part of the support cover. A servo motor is contacted at the upper end of the mounting plate. A pulley is fixedly sleeved on the outer side of the output shaft of the servo motor. A V-belt is provided on the surface of pulley two and pulley one. A tensioning mechanism is provided on the mounting plate.

2. The chassis silicon removal tool according to claim 1, characterized in that: An air booster is provided at the upper end of the support plate on the left side, and the output pipe of the air booster is rotatably connected to the rotating pipe.

3. The tool of claim 1, wherein: A negative pressure vacuum cleaner is installed at the upper end of the support plate on the right side, and the suction pipe of the negative pressure vacuum cleaner is fixedly connected to the support cover.

4. The tool of claim 1, wherein: The guiding mechanism includes a guide ring groove. The inner side wall of the support cover is provided with a guide ring groove. The cross tube of the rotating tube is fixedly connected to a mounting bracket. The inner wall of the mounting bracket is slidably connected to a telescopic plate. The horizontal part of the telescopic plate is fixedly connected to a guide ball. The guide ball is slidably connected to the guide ring groove. The vertical part of the telescopic plate is bonded with an elastic block. The other end of the elastic block is bonded to the cross tube of the rotating tube.

5. The tool of claim 4, wherein: Four guide balls are provided, and the four guide balls are arranged in a ring array on the guide ring groove.

6. The chassis silicon removal tool according to claim 1, characterized in that: The tensioning mechanism includes a screw, which is rotatably connected to the inner wall of the mounting plate. A slider is threadedly connected to the outer side of the screw, and the slider is fixedly installed with a servo motor. An auxiliary plate is fixedly connected to the lower end of the slider, and the auxiliary plate is slidably connected to the mounting plate. A first limiting ear is fixedly connected to the outer side of the screw, and the first limiting ear contacts the inner wall of the mounting plate. A second limiting ear is fixedly connected to the outer side of the screw, and the second limiting ear contacts the mounting plate.

7. The chassis silicon removal tool according to claim 6, characterized in that: A rotating disk is fixedly connected to the end face of the screw, and the rotating disk is made of hard rubber.

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