Five-surface detection device for chip

Abstract

The utility model provides a five-surface detection device for a chip, and relates to the technical field of chip detection. The five-surface detection device comprises a mounting platform, a visual mechanism, four prisms and four adjusting mechanisms, the mounting platform is provided with a vertically arranged through hole, a detected chip is placed at the through hole, the visual mechanism is mounted below the mounting platform, and the visual field of the visual mechanism is aligned with the through hole so as to perform visual detection on the detected chip. Each adjusting mechanism is mounted on the mounting platform and is correspondingly connected with one prism, and each adjusting mechanism is arranged to controllably drive the prism to move in the preset direction and / or drive the prism to rotate around the side edge direction of the tested chip so as to adjust the position of the prism. Therefore, the visual mechanism obtains the image of the corresponding side edge of the tested chip through the prism. According to the technical scheme, the position of the prism can be adjusted through the visual mechanism, so that the side edge image of the detected chip can be clearly obtained, and the accuracy of appearance detection of the detected chip is improved.

Description

A five-sided inspection device for chips Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a five-sided inspection device for chips. Background Technology

[0002] In chip testing, visual inspection devices are typically used to inspect the chip's appearance. To improve the efficiency of chip appearance inspection, a five-sided inspection device is usually employed. This device works by having a camera directly aimed at the bottom of the chip to inspect its lower surface, while four prisms are positioned around the chip to allow the camera to inspect the appearance of each of the four sides. However, the position of these prisms can affect the inspection of the four sides, leading to unclear or incomplete images and impacting the accuracy of the chip appearance inspection. Therefore, there is a pressing need to design a five-sided inspection device capable of calibrating the positions of the four prisms. Summary of the Invention

[0003] One objective of this invention is to provide a five-sided inspection device for chips, which solves the technical problem in the prior art where the inaccurate position of the prism affects the appearance inspection of chips.

[0004] A further objective of this invention is to improve the efficiency of prism assembly and disassembly.

[0005] Specifically, this utility model provides a five-sided inspection device for chips, comprising:

[0006] The mounting platform has through holes arranged vertically, and the chip under test is placed at the through holes;

[0007] A vision mechanism is installed below the mounting platform, with its field of view aligned with the through hole, to perform visual inspection of the chip under test.

[0008] Four prisms, each of which is mounted on the side of the through hole and aligned with the side of one of the chips under test;

[0009] Four adjustment mechanisms are provided, each of which is mounted on the mounting platform and connected to a corresponding prism. Each adjustment mechanism is configured to controllably move the prism along a preset direction and / or rotate the prism around the side of the chip under test to adjust the position of the prism, thereby enabling the vision mechanism to acquire an image of the side of the chip under test through the prism. The preset direction is perpendicular to the side of the chip under test.

[0010] Optionally, each of the adjustment mechanisms includes:

[0011] A first base is mounted on the mounting platform;

[0012] A movable stage, which is movably mounted on the first base along the preset direction, and the prism is mounted on the movable stage;

[0013] An adjusting screw is mounted on the first base and configured to move in a controlled manner along the preset direction to push the moving stage, thereby adjusting the position of the prism.

[0014] Optionally, the first base has a first mounting cavity inside, and each of the adjustment mechanisms further includes:

[0015] A first elastic element is installed in the first mounting cavity along the preset direction and is connected or snapped with the movable stage. The first elastic element is configured to be in a compressed state when the adjusting screw pushes the movable stage, so as to drive the movable stage to reset when the adjusting screw removes the force applied to the movable stage.

[0016] Optionally, the moving platform is provided with at least one limiting groove extending along the preset direction, and each of the adjustment mechanisms further includes:

[0017] A pressure spring is mounted above the movable platform and connected to the first base. The pressure spring has at least one limiting hole extending along the preset direction. Each limiting hole is aligned with a limiting groove so that a limiting rod passes through the limiting hole and the limiting groove to guide the movable platform.

[0018] Optionally, each of the moving stages has two supports extending vertically and arranged opposite each other, the prism is mounted between the two supports and is rotatable relative to the two supports; each of the adjustment mechanisms further includes:

[0019] A set screw is movably mounted on the moving platform along the preset direction, with one end abutting against the prism. The set screw is configured to move in a controlled manner to push the prism to rotate around the support, thereby adjusting the angle of the prism.

[0020] Optionally, the moving stage has a second mounting cavity extending vertically, the prism has a third mounting cavity extending vertically and aligned with the second mounting cavity, and each of the adjustment mechanisms further includes:

[0021] The second elastic element has one end located in the second mounting cavity and the other end located in the third mounting cavity. The second elastic element is configured to drive the moving stage to reset when the force applied to the moving stage by the set screw is removed.

[0022] Optionally, the installation platform includes:

[0023] First installation platform;

[0024] A second mounting platform is installed above the first mounting platform, and the adjustment mechanism and the prism are installed on the second mounting platform;

[0025] Multiple leveling nuts are installed on the second mounting platform to adjust the flatness of the second mounting platform;

[0026] A plurality of first locking screws are provided, which are configured to pass through the second mounting platform and the first mounting platform after the leveling nut adjusts the flatness of the second mounting platform, so as to connect the second mounting platform and the first mounting platform.

[0027] Optionally, it also includes:

[0028] Columns, the columns being arranged vertically;

[0029] An XY adjustment slide is installed on the top of the column and connected to the mounting platform. The XY adjustment slide is configured to controllably adjust the position of the mounting platform along the X and Y directions.

[0030] Optionally, it also includes:

[0031] A quick-release mechanism is provided, which is connected to the XY adjustment slide and the mounting platform, for quick assembly and disassembly of the XY adjustment slide and the mounting platform.

[0032] Optionally, it also includes:

[0033] The second base, on which the column is mounted;

[0034] At least one angle adjustment component, each of which is mounted on the second base and connected to the column, is used to adjust the rotation angle of the column along the Z-axis.

[0035] This utility model's five-sided inspection device includes a mounting platform, a vision mechanism, four prisms, and four adjustment mechanisms. The mounting platform has vertically arranged through holes, and the chip under test is placed at one of these holes. The vision mechanism is mounted below the mounting platform, with its field of view aligned with the through holes, for visual inspection of the chip. Each adjustment mechanism is mounted on the mounting platform and connected to a corresponding prism. Each adjustment mechanism is configured to controllably move the prism along a preset direction and / or rotate the prism around the side of the chip under test, adjusting the prism's position so that the vision mechanism can acquire an image of the corresponding side of the chip under test through the prism. This technical solution, through the vision mechanism's ability to adjust the prism's position, allows for clear acquisition of the side image of the chip under test, improving the accuracy of the chip's appearance inspection.

[0036] Furthermore, the five-sided inspection device of this utility model also includes a quick-release mechanism, which is connected to the XY adjustment slide and the mounting platform for quick assembly and disassembly of the XY adjustment slide and the mounting platform, thereby improving the assembly and disassembly efficiency of the prism.

[0037] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0038] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0039] Figure 1 is a schematic structural diagram of a five-sided inspection device according to an embodiment of the present invention from one angle;

[0040] Figure 2 is a schematic structural diagram of a five-sided inspection device according to an embodiment of the present invention from another angle;

[0041] Figure 3 is a schematic enlarged view of an adjustment mechanism according to an embodiment of the present invention;

[0042] Figure 4 is a schematic cross-sectional view of the adjustment mechanism and prism according to an embodiment of the present invention.

[0043] Figure label:

[0044] 100-Five-sided inspection device, 200-Chip under test, 10-Mounting platform, 20-Vision mechanism, 30-Prism, 40-Adjustment mechanism, 50-Column, 60-Quick release mechanism, 70-XY adjustment slide, 11-First locking screw, 12-First mounting platform, 13-Second mounting platform, 14-Through hole, 31-Third mounting cavity, 41-First base, 411-First mounting cavity, 42-Moving stage, 43- Adjusting screw, 44-compression spring, 45-second locking screw, 46-first elastic element, 47-second elastic element, 48-set screw, 421-first protruding rod, 422-limiting groove, 423-bracket, 424-rotating shaft, 425-second protruding rod, 426-second mounting cavity, 427-limiting rod, 441-limiting hole, 80-leveling nut, 91-second base, 92-angle adjustment assembly, 921-adjusting element. Detailed Implementation

[0045] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0046] In the description of this utility model, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0047] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0048] Unless otherwise expressly specified and limited, the terms "connection," "installation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0049] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0050] Figure 1 is a schematic structural diagram of a five-sided inspection device 100 according to an embodiment of the present invention from one angle; Figure 2 is a schematic structural diagram of a five-sided inspection device 100 according to an embodiment of the present invention from another angle; and Figure 3 is a schematic enlarged view of an adjustment mechanism 40 according to an embodiment of the present invention. As shown in Figures 1 to 3, in a preferred embodiment, the five-sided inspection device 100 for chips includes a mounting platform 10, a vision mechanism 20, four prisms 30, and four adjustment mechanisms 40. The mounting platform 10 has vertically arranged through holes 14, and the chip 200 to be tested is placed at the through holes 14. The vision mechanism 20 is mounted below the mounting platform 10, and its field of view is aligned with the through holes 14, performing visual inspection of the chip 200 to be tested through the through holes 14. Each prism 30 is mounted on the side of the through hole 14 and is aligned with the side of one of the chips 200 to be tested. Each adjustment mechanism 40 is mounted on the mounting platform 10 and is connected to a corresponding prism 30. Each adjustment mechanism 40 is configured to controllably move the prism 30 along a preset direction and / or rotate the prism 30 around the side of the chip under test 200 to adjust the position of the prism 30. This allows the vision mechanism 20 to acquire an image of the corresponding side of the chip under test 200 through the prism 30. The preset direction is perpendicular to the side of the chip under test 200. In other words, the direction of movement of the prism 30 is perpendicular to the side of the chip under test 200, and the distance between the prism 30 and the chip under test 200 can be adjusted.

[0051] This embodiment can adjust the position of the prism 30 through the vision mechanism 20, thereby clearly acquiring the side image of the chip under test 200 and improving the accuracy of the appearance inspection of the chip under test 200.

[0052] In some embodiments, the through hole 14 is square, and four prisms 30 are respectively installed at the four sides of the through hole 14. The vision mechanism 20 can directly inspect the lower surface of the chip under test 200. In addition, the vision mechanism 20 performs visual inspection on the four sides of the chip under test 200 through the four prisms 30, thereby realizing five-sided inspection of the chip under test 200. In this embodiment, the chip under test 200 is simply adsorbed onto the mounting platform 10 above the through hole 14 by an adsorption mechanism. At this time, the chip under test 200 is in the center of the field of view of the vision mechanism 20.

[0053] In some embodiments, each adjustment mechanism 40 includes a first base 41, a movable stage 42, and an adjustment screw 43. The first base 41 is mounted on the mounting platform 10, and the movable stage 42 is movably mounted on the first base 41 along a preset direction. A prism 30 is mounted on the movable stage 42. The adjustment screw 43 is mounted on the first base 41 and is configured to move in a controlled manner along the preset direction to push the movable stage 42, thereby adjusting the position of the prism 30. Referring to FIG3, the movable stage 42 has a protruding first protrusion 421, which abuts against the adjustment screw 43. When it is necessary to push the prism 30 toward the chip under test 200, the operator can turn the adjusting screw 43, so that the adjusting screw 43 pushes the first protrusion 421, that is, pushes the moving stage 42. Since the prism 30 is mounted on the moving stage 42, it will push the prism 30 to move toward the preset direction, so that the prism 30 is closer to the chip under test 200, so that the vision mechanism 20 can obtain the side image of the chip under test 200 more clearly through the prism 30.

[0054] Figure 4 is a schematic cross-sectional view of the adjustment mechanism 40 and the prism 30 according to an embodiment of the present invention. As shown in Figure 4, in some embodiments, the first base 41 has a first mounting cavity 411 inside. Each adjustment mechanism 40 also includes a first elastic element 46. The first elastic element 46 is installed in the first mounting cavity 411 along a preset direction and is connected or engaged with the moving stage 42. The first elastic element 46 is configured to be in a compressed state when the adjustment screw 43 pushes the moving stage 42, so as to drive the moving stage 42 to reset when the force applied to the moving stage 42 by the adjustment screw 43 is removed. It can be understood that the adjustment screw 43 can only drive the prism 30 closer to the chip under test 200, and cannot drive the moving stage 42 and the prism 30 to reset. When the adjustment screw 43 moves away from the chip under test 200, the elastic force of the first elastic element 46 drives the moving stage 42 and the prism 30 to reset. Here, the first elastic element 46 can be a spring or other components with the same elastic properties as a spring. The moving stage 42 has a downwardly protruding second protrusion 425, which engages with the first elastic member 46.

[0055] In some embodiments, the movable stage 42 is provided with at least one limiting groove 422 extending along a preset direction. Each adjustment mechanism 40 further includes a pressure spring 44, which is mounted above the movable stage 42 and connected to the first base 41. The pressure spring 44 is provided with at least one limiting hole 441 extending along a preset direction. Each limiting hole 441 is aligned with a limiting groove 422, so that the limiting rod 427 passes through the limiting hole 441 and the limiting groove 422, thereby guiding the movable stage 42. Here, the pressure spring 44 is located partly above the first base 41 and partly above the movable stage 42. However, the pressure spring 44 does not restrict the movement of the movable stage 42; it only guides the movable stage 42 through the limiting rod 427. The pressure spring 44 can prevent the movable stage 42 from tilting forward during movement. In this embodiment, there are two limiting grooves 422 and two limiting holes 441. In other embodiments, the number of limiting grooves 422 and limiting holes 441 can be determined according to specific design requirements.

[0056] In some embodiments, each moving stage 42 has two supports 423 extending vertically and arranged opposite to each other. A prism 30 is mounted between the two supports 423 and is rotatable relative to the two supports 423. Here, the prism 30 is rotatably connected to the supports 423 via a pivot 424. Each adjustment mechanism 40 also includes a set screw 48, which is movably mounted on the moving stage 42 in a preset direction and has one end abutting against the prism 30. The set screw 48 is configured to move in a controlled manner to push the prism 30 to rotate around the support 423, thereby adjusting the angle of the prism 30. It can be understood that in this embodiment, the set screw 48 can drive the prism 30 to rotate in order to adjust the angle of the prism 30, which can further improve the accuracy of acquiring images of the chip under test 200.

[0057] In some embodiments, the moving stage 42 has a vertically extending second mounting cavity 426, and the prism 30 has a vertically extending third mounting cavity 31 aligned with the second mounting cavity 426. Each adjustment mechanism 40 further includes a second elastic member 47, one end of which is located within the second mounting cavity 426, and the other end within the third mounting cavity 31. The second elastic member 47 is configured to reset the moving stage 42 when the force applied to the moving stage 42 by the set screw 48 is removed. It can be understood that the set screw 48 can only drive the prism 30 to rotate in one direction and cannot reset the prism 30. When the set screw 48 moves away from the chip under test 200, the elastic force of the second elastic member 47 resets the prism 30. Here, the second elastic member 47 can be a spring or other components with the same elastic properties as a spring.

[0058] In some embodiments, the adjustment mechanism 40 further includes a second locking screw 45, which passes through the prism 30 and the bracket 423. After the angle of the prism 30 is adjusted by the set screw 48, the prism 30 and the bracket 423 are locked by the second locking screw 45 to prevent the prism 30 from rotating.

[0059] In some embodiments, the mounting platform includes a first mounting platform 12, a second mounting platform 13, a plurality of leveling nuts 80, and a plurality of first locking screws 11. The second mounting platform 13 is mounted above the first mounting platform 12, and the adjustment mechanism and prism are mounted on the second mounting platform 13. The plurality of leveling nuts 80 are mounted on the second mounting platform 13 for adjusting the flatness of the second mounting platform 13. The plurality of first locking screws 11 are configured to pass through the second mounting platform 13 and the first mounting platform 12 after the leveling nuts 80 have adjusted the flatness of the second mounting platform 13, thereby connecting the second mounting platform 13 and the first mounting platform 12. Here, after the leveling nuts 80 have adjusted the flatness of the second mounting platform 13, there will inevitably be a gap between them and the first mounting platform 12, so the gap is eliminated by locking with the first locking screws 11. In this embodiment, there are two leveling nuts 80, which are symmetrically arranged on the second mounting platform 13. There are four first locking screws 11, which are evenly arranged on the second mounting platform 13. In other embodiments, the number of leveling nuts 80 and first locking screws 11 can be determined according to specific design requirements.

[0060] In some embodiments, the five-sided inspection device 100 further includes a column 50 and an XY adjustment slide 70, with the column 50 arranged vertically. The XY adjustment slide 70 is mounted on top of the column 50 and connected to the mounting platform 10, and is configured to controllably adjust the position of the mounting platform 10 along the X and Y directions. Here, the column 50 is arranged parallel to the vision mechanism 20. In this embodiment, the positions of all prisms 30 can be adjusted simultaneously using the XY adjustment slide 70, or the positions of corresponding prisms 30 can be adjusted separately using the corresponding adjustment mechanisms 40. The XY adjustment slide 70 can provide coarse adjustments to the positions of the prisms 30, while the adjustment mechanisms 40 can provide precise adjustments.

[0061] In some embodiments, the five-sided inspection device 100 further includes a quick-release mechanism 60, which is connected to the XY adjustment slide 70 and the mounting platform 10 for quick assembly and disassembly of the XY adjustment slide 70 and the mounting platform 10. The quick-release mechanism 60 has a knob, which allows the mounting platform 10 to be assembled and disassembled by turning the knob. The quick-release mechanism 60 is prior art and will not be described in detail here.

[0062] In some embodiments, the five-sided inspection device 100 further includes a second base 91 and at least one angle adjustment assembly 92, with the column 50 mounted on the second base 91. Each angle adjustment assembly 92 is mounted on the column 50 and is used to adjust the rotation angle of the column 50 along the Z-axis. In this embodiment, there are two angle adjustment assemblies 92, one of which is mounted on the side of the column 50 away from the vision mechanism 20, i.e., the side of the column 50 in the left-right direction, and the other angle adjustment assembly 92 is mounted on the front side of the column 50 as a spare. The angle adjustment assembly 92 includes two spaced-apart adjusting members 921, which pass through the column 50. By rotating the adjusting members 921, the rotation angle of the column 50 along the Z-axis can be adjusted. Here, the Z-axis is the height direction of the column 50. By adjusting the rotation angle of the column 50 along the Z-axis, the rotation angle of the four prisms 30 along the Z-axis can be adjusted.

[0063] This embodiment adjusts the positions of all prisms 30 along the X and Y directions using the XY adjustment slide 70 and the rotation angle of all prisms 30 along the Z axis using the angle adjustment component 92, thus synchronously adjusting the positions of all prisms 30. Alternatively, the positions of the four prisms 30 can be adjusted separately using the four vision mechanisms 20, allowing for individual adjustment of the position of each prism 30. This enables clear acquisition of the side image of the chip under test 200, improving the accuracy of the appearance inspection of the chip under test 200.

[0064] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A five-sided inspection device for chips, characterized in that, include: A mounting platform is provided with a vertically arranged through hole, and the chip under test is placed in the through hole; a vision mechanism is installed below the mounting platform and its field of view is aligned with the through hole to perform visual inspection on the chip under test; four prisms are installed on the side of the through hole and are respectively aligned with the side of one of the chips under test. Four adjustment mechanisms are provided, each of which is mounted on the mounting platform and connected to a corresponding prism. Each adjustment mechanism is configured to controllably move the prism along a preset direction and / or rotate the prism around the side of the chip under test to adjust the position of the prism, thereby enabling the vision mechanism to acquire an image of the side of the chip under test through the prism. The preset direction is perpendicular to the side of the chip under test.

2. The five-sided inspection device according to claim 1, characterized in that, Each of the adjustment mechanisms includes: a first base mounted on the mounting platform; a movable stage movably mounted on the first base along the preset direction, on which the prism is mounted; and an adjustment screw mounted on the first base and configured to move in a controlled manner along the preset direction to push the movable stage, thereby adjusting the position of the prism.

3. The five-sided inspection device according to claim 2, characterized in that, The first base has a first mounting cavity inside, and each of the adjustment mechanisms further includes a first elastic element. The first elastic element is installed in the first mounting cavity along the preset direction and is connected or snapped with the moving platform. The first elastic element is configured to be in a compressed state when the adjustment screw pushes the moving platform, so as to drive the moving platform to reset when the adjustment screw removes the force applied to the moving platform.

4. The five-sided inspection device according to claim 2, characterized in that, The movable platform is provided with at least one limiting groove extending along the preset direction. Each adjustment mechanism further includes a pressure spring plate, which is installed above the movable platform and connected to the first base. The pressure spring plate is provided with at least one limiting hole extending along the preset direction. Each limiting hole is aligned with a limiting groove so that the limiting rod passes through the limiting hole and the limiting groove, thereby guiding the movable platform.

5. The five-sided inspection device according to claim 2, characterized in that, Each of the mobile stages has two supports that extend vertically and are arranged opposite to each other, and the prism is mounted between the two supports and is rotatable relative to the two supports; Each of the adjustment mechanisms further includes a set screw, which is movably mounted on the moving platform along the preset direction and has one end abutting against the prism. The set screw is configured to move in a controlled manner to push the prism to rotate around the support, thereby adjusting the angle of the prism.

6. The five-sided inspection device according to claim 5, characterized in that, The moving stage has a second mounting cavity extending vertically, and the prism has a third mounting cavity extending vertically and aligned with the second mounting cavity. Each of the adjustment mechanisms further includes a second elastic member, one end of which is located in the second mounting cavity and the other end of which is located in the third mounting cavity. The second elastic member is configured to drive the moving stage to reset when the force applied to the moving stage by the set screw is removed.

7. The five-sided inspection device according to claim 1, characterized in that, The mounting platform includes: a first mounting platform; a second mounting platform, the second mounting platform being mounted above the first mounting platform, the adjusting mechanism and the prism being mounted on the second mounting platform; a plurality of leveling nuts, the plurality of leveling nuts being mounted on the second mounting platform for adjusting the flatness of the second mounting platform; and a plurality of first locking screws, the plurality of first locking screws being configured to pass through the second mounting platform and the first mounting platform after the leveling nuts have adjusted the flatness of the second mounting platform, so as to connect the second mounting platform and the first mounting platform.

8. The five-sided inspection device according to any one of claims 1-7, characterized in that, Also includes: Columns, the columns being arranged vertically; An XY adjustment slide is installed on the top of the column and connected to the mounting platform. The XY adjustment slide is configured to controllably adjust the position of the mounting platform along the X and Y directions.

9. The five-sided inspection device according to claim 8, characterized in that, Also includes: A quick-release mechanism is provided, which is connected to the XY adjustment slide and the mounting platform, for quick assembly and disassembly of the XY adjustment slide and the mounting platform.

10. The five-sided inspection device according to claim 8, characterized in that, Also includes: A second base, on which the column is mounted; at least one angle adjustment component, each of which is mounted on the second base and connected to the column, for adjusting the rotation angle of the column along the Z-axis.

Images