Displacement amplifying part, flat-plate scanner and scanning system

Abstract

The utility model provides a displacement amplifying part, a flat-panel scanner and a scanning system. The displacement amplifying part comprises a base body and a bridge type amplifying structure connected to the base body. The bridge amplification structure is provided with a first input part, a second input part and a first output part; in the first direction, an accommodating space for accommodating piezoelectric ceramics is formed between the first input part and the second input part; the bridge type amplification structure is configured in the mode that the piezoelectric ceramic in the containing space expands in the first direction so that the first output part can move in the direction close to or away from the containing space. According to the technical scheme, the piezoelectric ceramic can be installed in the displacement amplifying piece, the threaded fastening piece screwed into the first threaded hole can push the piezoelectric ceramic in the containing space to make contact with the second input part, the effect of pre-tightening the piezoelectric ceramic is achieved, and the service life of the piezoelectric ceramic can be prolonged.

Description

A displacement amplifier, a flat panel scanner, and a scanning system Technical Field

[0001] This application relates to the field of atomic force microscopy, and more specifically, to a displacement magnifier, a flatbed scanner, and a scanning system. Background Technology

[0002] The flatbed scanner is a key component of atomic force microscopy, used to move the sample horizontally in the X and Y directions. Existing flatbed scanners mostly use piezoelectric ceramics for driving, and these ceramics are often mounted using adhesive bonding. During the shrinkage process after power is cut off, the reliability of the connections between the piezoelectric ceramic layers may decrease, thus affecting the lifespan of the ceramic. Summary of the Invention

[0003] The purpose of this application is to provide a displacement amplifier, a flatbed scanner, and a scanning system to improve the service life of piezoelectric ceramics.

[0004] The embodiments of this application are implemented as follows:

[0005] In a first aspect, embodiments of this application provide a displacement amplification component, including a substrate and a bridge amplification structure connected to the substrate; the bridge amplification structure has a first input portion, a second input portion, and a first output portion; in a first direction, a receiving space for accommodating a piezoelectric ceramic is provided between the first input portion and the second input portion; the bridge amplification structure is configured such that the piezoelectric ceramic within the receiving space expands along the first direction, causing the first output portion to move towards or away from the receiving space. The first input portion is provided with a first threaded hole facing the receiving space, and the first threaded hole is configured to allow a screw-in threaded fastener to push the piezoelectric ceramic within the receiving space into contact with the second input portion.

[0006] The displacement amplification component provided by the above technical solution can be fitted with piezoelectric ceramics. Through a bridge amplification structure, the expansion of the piezoelectric ceramics is converted into motion of the first output section, which is then used to drive the movement of the flatbed scanner. Since the accommodating space for mounting the piezoelectric ceramics is located between the first input section and the second input section, and the first input section has a first threaded hole facing the accommodating space, a threaded fastener screwed into the first threaded hole can push the piezoelectric ceramics in the accommodating space to contact the second input section. Therefore, by screwing the threaded fastener into the first threaded hole, a force opposite to the expansion direction of the piezoelectric ceramics can be applied to the piezoelectric ceramics installed in the accommodating space, thus pre-tightening the piezoelectric ceramics. Due to the presence of this pre-tightening force, the connection reliability between the layers of the piezoelectric ceramics remains high during the shrinkage process after power is cut off, making it less prone to failure and improving the service life of the piezoelectric ceramics.

[0007] In some optional embodiments, the substrate is a U-shaped structure, the bridge amplification structure is located within the U-shaped structure, and the first output portion is located on the open side of the U-shaped structure. The displacement amplification element further includes a rod-shaped guide structure that extends along the first direction and sequentially connects one end of the substrate, the first output portion, and the other end of the substrate.

[0008] In the above technical solution, by setting a guide structure to connect the first output part to both ends of the substrate, the rigidity of the displacement amplifier can be improved, providing a stable guide for the movement of the first output part, thereby reducing parasitic movement caused by the large flexibility of the displacement amplifier and reducing parasitic movement caused by the tilting of the piezoelectric ceramic installation; in addition, setting a guide structure can also increase the natural frequency of the displacement amplifier, reduce vibration, and make the displacement amplifier more resistant to interference.

[0009] In some alternative implementations, the substrate, the bridge-type amplification structure, and the guide structure are integral structural components.

[0010] In the above technical solution, since the substrate, bridge-type amplification structure and guide structure are integral structural components, the displacement amplification component has high rigidity and is not prone to parasitic movement.

[0011] In some alternative implementations, the structure of the substrate is mirror-symmetrical, the structure of the second input portion is mirror-symmetrical to the structure of the first input portion, and the plane of symmetry is perpendicular to the first direction.

[0012] In the above technical solution, the structure of the substrate is mirror-symmetrical, and the structure of the first input part is mirror-symmetrical with the structure of the second input part, so that the force on the output part in the first direction is relatively balanced, which can reduce parasitic movement.

[0013] In some optional embodiments, the bridge amplification structure further has a second output section disposed opposite to the first output section, and in a first direction, the first input section is connected to one side of the second output section and the second input section is connected to the other side of the second output section; the bridge amplification structure is configured such that: the piezoelectric ceramic in the receiving space expands along the first direction, so that the first output section and the second output section move toward each other in a direction closer to the receiving space; the second output section is connected to the substrate to traction the deformation of the substrate, and a second threaded hole is provided on the side of the substrate facing away from the second output section.

[0014] In the displacement amplification component provided by the above technical solution, the second threaded hole can be used to screw in a threaded fastener to pull the base and the second output part to move away from the receiving space, thereby causing the first input part and the second input part to move toward the receiving space to pre-tighten the piezoelectric ceramic and thus improve the service life of the piezoelectric ceramic.

[0015] In some alternative implementations, the first output section has a first segment and a second segment, the first segment being connected to the first input section, and one end of the first segment away from the receiving space being connected between the two ends of the second segment in the first direction.

[0016] In the above technical solution, the first and second sections of the first output unit are connected to form a T-shaped structure. When the displacement amplification component provided by the above technical solution is used in a flatbed scanner, due to the T-shaped structure of the first output unit, it is possible to pull the motion platform of the flatbed scanner into the receiving space.

[0017] In some optional embodiments, the bridge amplification structure further includes a first connecting portion and a second connecting portion; in the first direction, one end of the first connecting portion is connected to the first input portion near the receiving space, and the other end is connected to the first output portion away from the receiving space; one end of the second connecting portion is connected to the first input portion near the receiving space, and the other end is connected to the second output portion away from the receiving space; so as to realize that the piezoelectric ceramic in the receiving space expands along the first direction, and the first output portion and the second output portion move towards each other in the direction closer to the receiving space.

[0018] The technical solution provided above can realize that when the piezoelectric ceramic expands along the first direction, the first connecting part pulls the first output part to move towards the receiving space, and the second connecting part pulls the second output part to move towards the receiving space.

[0019] Secondly, embodiments of this application provide a flatbed scanner, including a positioning platform body and a motion platform, wherein the positioning platform body and the motion platform are connected by a deformable weak area; it also includes a displacement amplification component provided in the first aspect, wherein the base of the bridge amplification structure is mounted on the positioning platform body and the first output part is connected to the motion platform.

[0020] The bridge-type amplification structure contains a piezoelectric ceramic. The first end of the piezoelectric ceramic faces the first input part, and the second end of the piezoelectric ceramic contacts the second input part. A bolt is provided in the first threaded hole, and the tail of the bolt contacts the end of the piezoelectric ceramic. The piezoelectric ceramic is configured to expand along the first direction when energized.

[0021] In the above technical solution, the piezoelectric ceramic is located between the first input part and the second input part in the first direction, with one end in contact with the bolt provided in the first threaded hole and the other end in contact with the second input part. The piezoelectric ceramic can be pre-tightened by tightening the bolt, which makes it easier to install the piezoelectric ceramic in the receiving space. Since the piezoelectric ceramic expands in the first direction after being energized, pre-tightening the piezoelectric ceramic can increase its service life.

[0022] Thirdly, embodiments of this application provide a flatbed scanner, including a positioning platform body and a motion platform, wherein the positioning platform body and the motion platform are connected by a deformable weak area; it also includes a displacement amplification component, wherein the base of the bridge amplification structure is mounted on the positioning platform body and the first output part is connected to the motion platform.

[0023] The bridge-type amplification structure contains a piezoelectric ceramic, which is configured to expand along the first direction when energized.

[0024] The second threaded hole is connected to a bolt, and an elastic element is provided between the bolt and the positioning platform body. The elastic element causes the bolt to apply a force away from the piezoelectric ceramic to the substrate, so that the bridge amplification structure deforms and the first input part and the second input part move towards each other.

[0025] In the above technical solution, after the displacement amplification component is installed on the positioning platform body, the base can be pre-deformed away from the accommodating space by the elastic component and the bolt connected to the second threaded hole. After the pre-deformation passes through the second output part and the second connecting part, the first input part and the second input part move towards the accommodating space, thereby pre-tightening the piezoelectric ceramic installed in the accommodating space to improve the service life of the piezoelectric ceramic.

[0026] Fourthly, embodiments of this application provide a scanning system, including a flatbed scanner provided in the second or third aspect. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 is a schematic diagram of a flatbed scanner provided in an embodiment of this application;

[0029] Figure 2 is a top view of the flatbed scanner provided in an embodiment of this application;

[0030] Figure 3 is a schematic diagram of the weak area of ​​the flatbed scanner provided in the embodiment of this application;

[0031] Figure 4 is a schematic diagram of the displacement amplification component provided in an embodiment of this application;

[0032] Figure 5 is a schematic diagram of the force and deformation of the displacement amplification component provided in the embodiment of this application;

[0033] Figure 6 is a schematic diagram of the displacement amplifier provided in the embodiment of this application installed on a flatbed scanner;

[0034] Figure 7 is a partial schematic diagram of the scanning system provided in an embodiment of this application.

[0035] Icons: 100-Flatbed Scanner; 110-Positioning Platform Body; 120-Motion Platform; 130-Weak Area; 140-Groove; 150-Elastic Component; 160-Bolt; 200-Displacement Amplifier; 210-Base; 211-Second Threaded Hole; 221-First Input Section; 2211-First Threaded Hole; 222-Second Input Section; 223-First Output Section; 2231-First Segment; 2232-Second Segment; 224-Second Output Section; 225-Accommodation Space; 226-First Connecting Section; 227-Second Connecting Section; 228-Third Connecting Section; 229-Guiding Structure; 300-Piezoelectric Ceramic; 400-Adapter Plate; Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0038] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0039] In the description of this application, it should be noted that the terms "center," "upper," "lower," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0040] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0041] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0042] This application provides a scanning system for providing minute displacements in the field of atomic force microscopy to detect samples.

[0043] The scanning system includes a flatbed scanner 100. Referring to Figures 1 to 3, the flatbed scanner 100 includes a positioning platform body 110 and a motion platform 120. The positioning platform body 110 and the motion platform 120 are connected by a deformable weak point 130, allowing relative movement between them. The motion platform 120 is used to mount the sample stage. The slight movement of the motion platform 120 relative to the positioning platform body 110 drives the movement of the sample stage and the sample placed on it.

[0044] The flatbed scanner 100 also includes a displacement amplifier 200 and a piezoelectric ceramic 300 disposed within the displacement amplifier 200. The piezoelectric ceramic 300 can expand when energized, and the displacement amplifier 200 can amplify the minute expansion deformation of the piezoelectric ceramic 300 to drive the motion platform 120.

[0045] Referring to Figures 4 and 5, the displacement amplification component 200 includes a base 210 and a bridge amplification structure connected to the base 210. The bridge amplification structure has a first input section 221, a second input section 222, and a first output section 223. In a first direction (i.e., the direction indicated by arrow B in Figure 4), there is a receiving space 225 between the first input section 221 and the second input section 222 for accommodating the piezoelectric ceramic 300. The bridge amplification structure can amplify the minute expansion and deformation of the piezoelectric ceramic 300 and convert it into the displacement of the first output section 223, which drives the motion platform 120 to move. The substrate 210 is a structure used to connect with other components. During the expansion of the piezoelectric ceramic 300, the substrate 210 hardly deforms, or the amount of deformation is much smaller than the displacement of the first output part 223. In some embodiments, a through hole can be provided on the substrate 210 to connect with other components through the through hole by threaded fasteners. In other embodiments, other methods can be used to connect the substrate 210 with other components.

[0046] The piezoelectric ceramic 300 has a layered structure, that is, the piezoelectric ceramic 300 is composed of multiple layers of piezoelectric ceramic sheets stacked together. When the piezoelectric ceramic 300 is energized, it can expand in the stacking direction. After the power is turned off, the size of the piezoelectric ceramic 300 in the first direction decreases.

[0047] The bridge amplification structure is configured such that the piezoelectric ceramic 300 within the receiving space 225 expands along a first direction, causing the first output portion 223 to move towards or away from the receiving space 225. That is, in some embodiments, the expansion of the piezoelectric ceramic 300 when energized causes the first output portion 223 to move towards the receiving space 225 and the piezoelectric ceramic 300; in other embodiments, the expansion of the piezoelectric ceramic 300 when energized causes the first output portion 223 to move away from the receiving space 225 and the piezoelectric ceramic 300.

[0048] Since the piezoelectric ceramic 300 needs to expand and contract during the operation of the flatbed scanner 100, the connection between the stacked ceramic sheets in the piezoelectric ceramic 300 may fail. In particular, in some existing embodiments, the piezoelectric ceramic 300 is bonded to the bridge amplification structure by adhesive bonding. This means that the piezoelectric ceramic 300 may also be subjected to shear force perpendicular to the stacking direction during the expansion or contraction process, which increases the possibility of connection failure between the stacked ceramic sheets and results in a relatively short service life for the piezoelectric ceramic 300.

[0049] Therefore, in the embodiments of this application, the first input portion 221 is provided with a first threaded hole 2211 facing the receiving space 225. The first threaded hole 2211 is configured to allow a screw-in threaded fastener to push the piezoelectric ceramic 300 in the receiving space 225 to contact the second input portion 222. Furthermore, a threaded hole can also be provided in the second input portion 222 to allow a screw-in threaded fastener to contact the piezoelectric ceramic 300. As shown in Figures 4 and 6, by screwing a bolt into the first threaded hole 2211, the tail of the bolt can abut against one end of the piezoelectric ceramic 300, and the other opposite end of the piezoelectric ceramic 300 can contact the second input portion 222. The base 210 of the displacement amplification component 200 is mounted on the positioning platform body 110, and the first output portion 223 is connected to the motion platform 120. It is easy to understand that the arrangement of the piezoelectric ceramic 300 should satisfy the following: when energized, the expansion direction of the piezoelectric ceramic 300 is parallel to the first direction, that is, the stacking direction of the multilayer piezoelectric ceramic sheets within the piezoelectric ceramic 300 is parallel to the first direction, so that when the piezoelectric ceramic 300 expands, it can push the first input part 221 and the second input part 222 away from each other. Furthermore, the positioning platform body 110 is provided with a groove 140 to accommodate the displacement amplification component 200.

[0050] In the technical solution provided in this application, a preload can be applied to the piezoelectric ceramic 300 from its end via a bolt located in the first threaded hole 2211. This ensures that the multilayer piezoelectric ceramic sheets in the piezoelectric ceramic 300 are always subjected to pressure along the stacking direction. Therefore, it is less likely to fail due to shear force during the expansion or contraction of the piezoelectric ceramic 300, thereby improving the service life of the piezoelectric ceramic 300. Furthermore, it facilitates maintaining the positional stability of the piezoelectric ceramic 300 and reduces the possibility of parasitic motion in the motion platform 120. Parasitic motion refers to motion that occurs in another direction while an object is moving in one direction; for example, the motion along the first direction that occurs when the motion platform 120 or the first output unit 223 moves in a direction perpendicular to the first direction is parasitic motion. Furthermore, by using a bolt located in the first threaded hole 2211 to apply a preload to the piezoelectric ceramic 300 from its end, the piezoelectric ceramic 300 can also be fixed during the bonding process between the piezoelectric ceramic 300 and the displacement amplification component 200, thus preventing displacement of the piezoelectric ceramic 300 before the adhesive has cured.

[0051] In some embodiments, the positioning platform body 110 and the motion platform 120 in the flatbed scanner 100 can be obtained by machining a weak area 130 into the overall structure. As shown in FIG1, the flatbed scanner 100 can be machined from a single piece of steel by wire cutting. The inner motion platform 120 and the outer positioning platform body 110 are obtained by wire cutting, and the positioning platform body 110 and the motion platform 120 are connected through the uncut weak area 130. Further, as shown in FIG3, the weak area 130 includes a U-shaped structure formed by cutting.

[0052] In some embodiments, as shown in Figures 4 and 5, the base 210 has a U-shaped structure, the bridge-type amplification structure is located within the U-shaped structure, and the first output portion 223 is located on the open side of the U-shaped structure. The displacement amplification component 200 also includes a rod-shaped guide structure 229, which extends along a first direction and sequentially connects one end of the base 210, the first output portion 223, and the other end of the base 210. As shown in Figure 4, both sides of the first output portion 223 are connected to the base 210 via the guide structure 229 in the first direction, which improves the rigidity of the displacement amplification component 200 and reduces the parasitic motion along the first direction generated by the first output portion 223 during movement.

[0053] Furthermore, in some embodiments, the substrate 210, the bridge-type amplification structure, and the guide structure 229 are integral structural components. That is, the substrate 210, the bridge-type amplification structure, and the guide structure 229 are processed from a single piece of material, for example, by wire cutting to create the interconnected substrate 210, bridge-type amplification structure, and guide structure 229.

[0054] As shown in Figures 4 and 5, in some embodiments, the structure of the substrate 210 is mirror-symmetrical, the structure of the first input section 221 is mirror-symmetrical with the structure of the second input section 222, and the plane of symmetry is perpendicular to the first direction. In this embodiment, because the substrate 210 has a symmetrical structure and the first input section 221 and the second input section 222 are mirror-symmetrical, the parasitic movement along the first direction generated by the first output section 223 connecting the first input section 221 and the second input section 222 during its movement away from or towards the receiving space 225 is relatively small.

[0055] In some embodiments, as shown in Figures 4 and 5, the bridge amplification structure further includes a second output section 224, which is disposed opposite to the first output section 223, i.e., the first output section 223 and the second output section 224 are located on opposite sides of the receiving space 225. Furthermore, in a first direction, the first input section 221 is connected to one side of the second output section 224, and the second input section 222 is connected to the other side of the second output section 224; similarly, during the expansion of the piezoelectric ceramic 300, the second output section 224 will also move towards or away from the receiving space 225.

[0056] In an embodiment where the piezoelectric ceramic 300 expands and both the first output portion 223 and the second output portion 224 move toward the receiving space 225, the second output portion 224 is connected to the substrate 210 to traction the substrate 210 to deform, and a second threaded hole 211 is provided on the side of the substrate 210 facing away from the second output portion 224; as shown in FIG5, the opening end of the second threaded hole 211 is located on the side of the substrate 210 facing away from the receiving space 225 and the first output portion 223 and the second output portion 224; the other end of the second threaded hole 211 can penetrate the substrate 210 or not penetrate the substrate 210, that is, the second threaded hole 211 can be a blind hole. In this embodiment, as shown in FIG6, after the base 210 of the displacement amplification component 200 is installed on the positioning platform body 110 of the flatbed scanner 100 and the first output part 223 is connected to the motion platform 120, a bolt 160 can be set in the second threaded hole 211, and an elastic element 150 can be set between the bolt 160 and the positioning platform body 110. The elastic element 150 applies a force away from the piezoelectric ceramic 300 to the bolt 160, so that the base 210 is slightly deformed away from the receiving space 225, thereby driving the second output part 224 to move away from the receiving space 225. Then, the deformation of the bridge amplification structure causes the first input part 221 and the second input part 222 to move towards each other, so as to apply a force to both ends of the piezoelectric ceramic 300 in the receiving space 225. Since the piezoelectric ceramic 300 expands along the first direction after being energized in this embodiment, and the bridge amplification structure causes the second output portion 224 to move towards the receiving space 225 during the expansion process of the piezoelectric ceramic 300, correspondingly, when the second output portion 224 moves away from the receiving space 225 through the bolt 160 in the second threaded hole 211 and the elastic member 150, a force along the expansion direction can be applied to the piezoelectric ceramic 300 in the receiving space 225, thereby achieving pre-tightening of the piezoelectric ceramic 300 and improving the service life of the piezoelectric ceramic 300. In this embodiment, even after the piezoelectric ceramic 300 is connected to the displacement amplification member 200 by bonding, the piezoelectric ceramic 300 can still be pre-tightened by rotating the bolt 160 in the second threaded hole 211.

[0057] In some embodiments where the piezoelectric ceramic 300 expands and both the first output portion 223 and the second output portion 224 move toward the receiving space 225, the first output portion 223 pulls the motion platform 120 to move the motion platform 120. Further, as shown in Figures 4 and 5, the first output portion 223 has a first segment 2231 and a second segment 2232. The first segment 2231 is connected to the first input portion 221, and one end of the first segment 2231 away from the receiving space 225 is connected between the two ends of the second segment 2232 in a first direction. In this embodiment, the first segment 2231 and the second segment 2232 of the first output section 223 are connected to form a T-shaped structure. Correspondingly, a T-shaped groove can be provided on the motion platform 120. Through the cooperation between the first output section 223 and the T-shaped groove, the first output section 223 pulls the motion platform 120 to move during the expansion of the piezoelectric ceramic 300. After the piezoelectric ceramic 300 is de-energized, the deformation of the weak area 130 between the motion platform 120 and the positioning platform body 110 is automatically restored, so that the motion platform 120 can automatically reset. Furthermore, the guide structure 229 can be connected to the first segment 2231.

[0058] In some embodiments of this application, as shown in FIG4, the bridge amplification structure further includes a first connecting portion 226 and a second connecting portion 227. In a first direction, one end of the first connecting portion 226 is connected to the first input portion 221 near the receiving space 225, and the other opposite end is connected to the first output portion 223 away from the receiving space 225. One end of the second connecting portion 227 is connected to the first input portion 221 near the receiving space 225, and the other opposite end is connected to the second output portion 224 away from the receiving space 225. This allows the piezoelectric ceramic 300 within the receiving space 225 to expand along the first direction, and the first output portion 223 and the second output portion 224 to move towards each other in the direction closer to the receiving space 225. Specifically, as shown in Figures 4 and 5, the first input portion 221 has a T-shaped structure, and both the first connecting portion 226 and the second connecting portion 227 have cuboid structures. During the expansion of the piezoelectric ceramic 300, the first input portion 221 is subjected to a force in the direction indicated by arrow C. Due to the forces from the first input portion 221 and the first output portion 223, the first connecting portion 226 rotates clockwise as indicated by arrow D, thereby causing the first output portion 223 to move towards the receiving space 225. In other embodiments, the first input portion 221, the first connecting portion 226, and the second connecting portion 227 may also adopt other structures.

[0059] Furthermore, in some embodiments, a third connecting part 228 is connected between the second input part 222 and the first output part 223, and a fourth connecting part is connected between the second input part 222 and the second output part 224; furthermore, as shown in FIG5, the displacement amplification component 200 has a symmetrical structure as a whole.

[0060] Furthermore, the displacement amplification component 200 can be manufactured from a single piece of steel using wire cutting to achieve high structural strength.

[0061] In one embodiment of this application, as shown in FIG7, the scanning system includes two flatbed scanners 100, referred to as the first flatbed scanner and the second flatbed scanner, and the movement direction of the motion platform 120 in the first flatbed scanner is perpendicular to the movement direction of the motion platform 120 in the second flatbed scanner. The first flatbed scanner and the second flatbed scanner are respectively disposed on both sides of the adapter plate 400. The motion platform 120 of the first flatbed scanner is connected to the adapter plate 400, and the positioning platform body 110 of the second flatbed scanner is fixedly connected to the adapter plate 400. The motion platform 120 is connected to a sample stage for placing the sample. During the process of detecting the sample using the scanning system provided in this embodiment, the position of the adapter plate 400 and the second flatbed scanner can be changed by the movement of the motion platform 120 in the first flatbed scanner, thereby changing the position of the sample in the X direction. Then, the position of the sample in the Y direction can be changed by the movement of the motion platform 120 in the second flatbed scanner; wherein, the X direction and the Y direction are two orthogonal directions on the horizontal plane.

[0062] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A displacement amplification component, characterized in that, The device includes a substrate and a bridge amplification structure connected to the substrate; the bridge amplification structure has a first input section, a second input section, and a first output section; in a first direction, there is a receiving space between the first input section and the second input section for accommodating a piezoelectric ceramic; the bridge amplification structure is configured such that the piezoelectric ceramic in the receiving space expands along the first direction, causing the first output section to move toward or away from the receiving space; the first input section is provided with a first threaded hole facing the receiving space, the first threaded hole being configured to allow a screw-in threaded fastener to push the piezoelectric ceramic in the receiving space to contact the second input section.

2. The displacement amplification component according to claim 1, characterized in that, The substrate is a U-shaped structure, the bridge amplification structure is located inside the U-shaped structure, and the first output part is located on the opening side of the U-shaped structure; it also includes a rod-shaped guide structure, the guide structure extends along the first direction, and the guide structure is sequentially connected to one end of the substrate, the first output part and the other end of the substrate.

3. The displacement amplification component according to claim 2, characterized in that, The substrate, the bridge-type amplification structure, and the guide structure are integral structural components.

4. The displacement amplification component according to claim 1, characterized in that, The structure of the substrate is mirror-symmetrical, and the structure of the second input part is mirror-symmetrical to the structure of the first input part, with the plane of symmetry perpendicular to the first direction.

5. The displacement amplification element according to any one of claims 1-4, characterized in that, The bridge amplification structure further has a second output section disposed opposite to the first output section, and in a first direction, the first input section is connected to one side of the second output section and the second input section is connected to the other side of the second output section; the bridge amplification structure is configured such that: the piezoelectric ceramic in the accommodating space expands along the first direction, so that the first output section and the second output section move toward each other in a direction closer to the accommodating space; the second output section is connected to the substrate to traction the deformation of the substrate, and a second threaded hole is provided on the side of the substrate facing away from the second output section.

6. The displacement amplification component according to claim 5, characterized in that, The first output section has a first segment and a second segment, the first segment being connected to the first input section, and the end of the first segment away from the receiving space being connected between the two ends of the second segment in the first direction.

7. The displacement amplification component according to claim 5, characterized in that, The bridge-type amplification structure also has a first connecting part and a second connecting part; in the first direction, one end of the first connecting part is connected to the first input part near the receiving space, and the other opposite end is connected to the first output part away from the receiving space; one end of the second connecting part is connected to the first input part near the receiving space, and the other opposite end is connected to the second output part away from the receiving space; so as to realize that the piezoelectric ceramic in the receiving space expands along the first direction, and the first output part and the second output part move towards each other in the direction closer to the receiving space.

8. A flatbed scanner, characterized in that, The device includes a positioning platform body and a motion platform, wherein the positioning platform body and the motion platform are connected by a deformable weak area; it also includes a displacement amplification component as described in any one of claims 1-7, wherein the base of the bridge amplification structure is mounted on the positioning platform body, and the first output part is connected to the motion platform; a piezoelectric ceramic is disposed within the accommodating space of the bridge amplification structure, wherein the first end of the piezoelectric ceramic faces the first input part, the second end of the piezoelectric ceramic contacts the second input part, a bolt is disposed in the first threaded hole, and the tail of the bolt contacts the end of the piezoelectric ceramic; the piezoelectric ceramic is configured to expand along the first direction after being energized.

9. A flatbed scanner, characterized in that, The system includes a positioning platform body and a motion platform, wherein the positioning platform body and the motion platform are connected by a deformable weak zone; it also includes a displacement amplification component as described in any one of claims 5-7, wherein the base of the bridge amplification structure is mounted on the positioning platform body, and the first output part is connected to the motion platform; a piezoelectric ceramic is disposed within the accommodating space of the bridge amplification structure, and the piezoelectric ceramic is configured to expand along the first direction after being energized; a bolt is connected to the second threaded hole, and an elastic element is disposed between the bolt and the positioning platform body, the elastic element causing the bolt to exert a force on the base away from the piezoelectric ceramic, thereby deforming the bridge amplification structure and causing the first input part and the second input part to move towards each other.

10. A scanning system, characterized in that, Includes the flatbed scanner as described in claim 8 or 9.

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