Spacing-adjustable positioning clamp of chip test probe card

Abstract

The utility model discloses an adjustable spacing positioning fixture of chip test probe card relates to probe card test technical field, including placing frame and clamping fixing mechanism, the inside of placing frame is provided with the clamping fixing mechanism, and the clamping fixing mechanism includes the threaded rod of threaded connection in placing frame position, and the threaded rod is in threaded connection with the inside of placing frame. Clamping plates are rotationally connected to one ends of the threaded rods, elastic pressing strips are fixedly connected to one sides of the clamping plates, a stable supporting mechanism is fixedly connected to the top of the containing frame, two sets of symmetrical clamping and fixing mechanisms are arranged on the left side and the right side of the containing frame, and the threaded rods are rotated to drive the corresponding clamping plates to move in the middle. The probe cards of different sizes are fixed and clamped, and the elastic pressing strips are made of rubber materials. Compared with an existing common positioning clamp, the distance-adjustable positioning clamp of the chip test probe card solves the problems of accurate positioning and flexible adjustment of the distance between the probe card and the chip in the chip test process, and improves the accuracy and efficiency of chip test.

Description

Technical Field

[0001] This utility model relates to the field of probe card testing technology, specifically an adjustable spacing positioning fixture for a chip testing probe card. Background Technology

[0002] Probe cards are a key component in semiconductor manufacturing, used in the wafer testing process. Serving as the interface between the tester and the chip under test, they are primarily responsible for the preliminary electrical performance measurement stage before chip slab packaging, as well as screening for potentially defective chips to facilitate subsequent packaging. A probe card mainly consists of a printed circuit board, probes, and functional components, sometimes including electronic components and reinforcing plates. In chip testing, the probe card, as a crucial component connecting the test equipment and the chip, directly affects the accuracy and reliability of the test results due to its positioning accuracy and spacing adjustment capability. Existing probe card positioning fixtures have many shortcomings.

[0003] A probe card testing device, as described in application number CN202021564311.8, includes a testing chamber, a probe card unit, a chip unit, and a testing unit. The testing unit is connected to the probe card unit. The probe card unit is equipped with an adjustment and positioning mechanism and a probe card clamp. The chip unit is equipped with a support platform, a chip receiving slot at the top of the support platform, and a telescopic support member. A set of corresponding limiting structures is provided within the chip receiving slot. Each limiting structure includes a return spring, a clamping block, and a protrusion. The telescopic support member is connected to the bottom of the support platform and the bottom of the inner wall of the testing chamber. This invention has a simple structure and reasonable design. The relative position of the probe card clamp and the chip under test is adjustable, making it convenient to use. Simultaneously, the limiting structure can limit the position of the chip under test, preventing displacement within the receiving slot and ensuring testing reliability. However, the positioning clamp spacing is inconvenient to adjust, making it unable to quickly adapt to the testing requirements of chips of different specifications. The clamp stability is poor, easily causing shaking during testing, affecting test results. Furthermore, it lacks effective protection for the probe card, easily leading to probe card damage.

[0004] Therefore, in view of this, we have studied and improved the existing structure to address its shortcomings, and proposed an adjustable spacing positioning fixture for chip test probe cards. Utility Model Content

[0005] The purpose of this invention is to provide an adjustable spacing positioning fixture for a chip test probe card, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an adjustable spacing positioning fixture for a chip test probe card, comprising a placement frame and a clamping and fixing mechanism. The clamping and fixing mechanism is provided inside the placement frame, and the clamping and fixing mechanism includes a threaded rod threadedly connected to the inside of the placement frame. One end of the threaded rod is rotatably connected to a clamping plate, and one side of the clamping plate is fixedly connected to an elastic pressure strip. The top of the placement frame is fixedly connected to a stable support mechanism.

[0007] Preferably, the stabilizing support mechanism includes a support column fixedly connected to the top of the placement frame, and a shock-absorbing spring damper is fixedly connected to the top of the support column, and a support plate is fixedly connected to the top of the shock-absorbing spring damper.

[0008] Preferably, the bottom of the placement frame is fixedly connected to a base, and the base has mounting holes inside.

[0009] Preferably, a rubber buffer pad is fixedly connected to the outer surface of the placement frame, and a lifting frame is fixedly connected to the top of the placement frame.

[0010] Preferably, the lifting frame has a lifting groove inside, and a lead screw is rotatably connected to the inner surface of the lifting groove.

[0011] Preferably, the outer surface of the lead screw is threaded with a nut seat, and a detection platform is fixedly connected to one side of the nut seat.

[0012] Preferably, the detection platform has a guide rail inside, and a slider is slidably connected inside the guide rail. A chip placement slot is fixedly connected to one side of the slider.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model, through the setting of a clamping and fixing mechanism, enables the two clamping plates to move synchronously towards the center along the preset slide rail when the operator rotates the threaded rod, based on the principle of thread transmission, thereby achieving precise clamping of the probe card. An elastic pressure strip is embedded in the inner edge of the clamping plate. The pressure strip is made of highly elastic rubber material, which is soft and has good resilience. As the clamping plate moves, the elastic pressure strip can closely fit the edge contour of the probe card. Whether it is a standard size or a special specification probe card, it can be firmly fixed under its action. This close fit not only eliminates the gap between the probe card and the clamping plate, but also effectively buffers external vibration and slight collisions, preventing the probe card from shaking or shifting during the test, and ensuring the stability and accuracy of the test work.

[0015] 2. This utility model ensures that no displacement or loosening occurs during the load-bearing process through the setting of a stable support mechanism. Each support column is equipped with a shock-absorbing spring damper. The shock-absorbing spring damper is specially designed and is composed of a high-strength spring and a damping material. While having good elasticity, it can effectively suppress excessive vibration of the spring. The support plate is horizontally mounted above the shock-absorbing spring damper and is firmly fixed to the top of the shock-absorbing spring damper by welding to form a stable load-bearing plane for supporting the testing platform. When the testing equipment vibrates during operation, the vibration energy is first transmitted to the support column. Then, the shock-absorbing spring damper quickly takes effect, using the elastic deformation of the spring to absorb part of the energy. At the same time, the damping material consumes the remaining energy, effectively reducing the upward transmission of vibration. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the overall front view structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the detection platform 11 of this utility model;

[0019] Figure 4 This is a schematic diagram of the clamping and fixing mechanism 2 and the stabilizing support mechanism of this utility model.

[0020] In the diagram: 1. Placement frame; 2. Clamping and fixing mechanism; 201. Threaded rod; 202. Clamping plate; 203. Elastic pressure strip; 3. Stable support mechanism; 301. Support column; 302. Shock-absorbing spring damping; 303. Support plate; 4. Base; 5. Mounting hole; 6. Rubber buffer pad; 7. Lifting frame; 8. Lifting groove; 9. Lead screw; 10. Nut seat; 11. Detection platform; 12. Guide rail; 13. Slider; 14. Chip placement slot. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] like Figures 1-4As shown, an adjustable spacing positioning fixture for chip test probe cards includes a placement frame 1 and a clamping and fixing mechanism 2. The clamping and fixing mechanism 2 is characterized in that the placement frame 1 has a clamping and fixing mechanism 2 inside, and the clamping and fixing mechanism 2 includes a threaded rod 201 threadedly connected to the inside of the placement frame 1. One end of the threaded rod 201 is rotatably connected to a clamping plate 202, and one side of the clamping plate 202 is fixedly connected to an elastic pressure strip 203. A stable support mechanism 3 is fixedly connected to the top of the placement frame 1. Two sets of symmetrical clamping and fixing mechanisms 2 are arranged on the left and right sides of the placement frame 1. Rotating the threaded rod 201 causes the corresponding clamping plate 202 to move centrally, thus fixing and clamping probe cards of different sizes. The elastic pressure strip 203 is made of rubber and, as the clamping plate 202 moves, can tightly fit the edge of the probe card to prevent the probe card from shaking.

[0023] like Figure 3 As shown, the stabilizing support mechanism 3 includes a support column 301 fixedly connected to the top of the placement frame 1, and a shock-absorbing spring damper 302 fixedly connected to the top of the support column 301. A support plate 303 is fixedly connected to the top of the shock-absorbing spring damper 302. The support column 301 is vertically installed at the four corners of the placement frame 1, the shock-absorbing spring damper 302 is on the support column 301, and the support plate 303 is horizontally fixed above the shock-absorbing spring damper 302 to support the testing platform 11. When the testing equipment vibrates during operation, the shock-absorbing spring damper 302 can effectively absorb the vibration energy and reduce the impact of vibration on chip testing. At the same time, the support column 301 and the support plate 303 ensure the structural stability of the fixture.

[0024] Furthermore, a base 4 is fixedly connected to the bottom of the placement frame 1, and an installation hole 5 is provided inside the base 4. A rubber buffer pad 6 is fixedly connected to the outer surface of the placement frame 1, and a lifting frame 7 is fixedly connected to the top of the placement frame 1. The base 4 is made of high-strength aluminum alloy and the surface is anodized, which has good wear resistance and corrosion resistance. The installation hole 5 is used to fix the fixture on the test equipment, and its top provides an installation base for other mechanisms. The rubber buffer pad 6 absorbs the vibration transmitted from the outside.

[0025] Furthermore, the lifting frame 7 has a lifting groove 8 inside, and a lead screw 9 is rotatably connected to the inner surface of the lifting groove 8. A nut seat 10 is threadedly connected to the outer surface of the lead screw 9, and a detection platform 11 is fixedly connected to one side of the nut seat 10. Rotating the lead screw 9 causes the nut seat 10 to rise and fall inside the lifting groove 8, thereby causing the detection platform 11 to rise and fall, and thus adjusting the distance between the probe card and the chip to adapt to the testing requirements of chips of different specifications.

[0026] Furthermore, the testing platform 11 has a guide rail 12 inside, and a slider 13 is slidably connected inside the guide rail 12. A chip placement slot 14 is fixedly connected to one side of the slider 13. The chip placement slot 14 is slidably connected to the guide rail 12 through the slider 13. The chip placement slot 14 can hold the test chip. By moving the slider 13 inside the guide rail 12, the chip placement slot 14 can be moved, enabling a slight horizontal movement of the chip testing platform, thereby achieving precise chip positioning.

[0027] Working principle: When using the adjustable spacing positioning fixture for the chip test probe card, first fix the fixture to the test equipment through the mounting hole 5 at the bottom of the base 4. Place the probe card inside the placement frame 1, rotate the threaded rod 201 of the clamping and fixing mechanism 2 to drive the clamping plate 202, and use the elastic pressure strip 203 to firmly fix it. Place the chip inside the chip placement slot 14 inside the detection platform 11, move the slider 13 to the appropriate position inside the guide rail 12, and then rotate the lead screw 9 inside the lifting frame 7 to drive the nut seat 10 to rise and fall along the lifting slot 8. The detection platform 11 on one side of the nut seat 10 moves up and down accordingly, adjusting the spacing between the probe card and the chip. Finally, when the test equipment is running, the support column 301, the shock-absorbing spring damping 302, and the support plate 303 of the stabilizing support mechanism 3 work together to reduce the impact of vibration on the test. At the same time, the rubber buffer pad 6 protects the base 4. This is the working principle of the adjustable spacing positioning fixture for the chip test probe card.

Claims

1. An adjustable spacing positioning fixture for a chip test probe card, comprising a placement frame (1) and a clamping and fixing mechanism (2), characterized in that, The placement frame (1) is provided with a clamping and fixing mechanism (2), and the clamping and fixing mechanism (2) includes a threaded rod (201) threadedly connected to the inside of the placement frame (1). One end of the threaded rod (201) is rotatably connected to a clamping plate (202), and one side of the clamping plate (202) is fixedly connected to an elastic pressure strip (203). The top of the placement frame (1) is fixedly connected to a stable support mechanism (3).

2. The adjustable spacing positioning fixture for a chip test probe card according to claim 1, characterized in that, The stabilizing support mechanism (3) includes a support column (301) fixedly connected to the top of the placement frame (1), and a shock-absorbing spring damper (302) is fixedly connected to the top of the support column (301), and a support plate (303) is fixedly connected to the top of the shock-absorbing spring damper (302).

3. The adjustable pitch positioning fixture for a chip test probe card of claim 1, wherein, The bottom of the placement frame (1) is fixedly connected to a base (4), and the base (4) has an installation hole (5) inside.

4. The adjustable pitch positioning fixture for a chip test probe card of claim 1, wherein, A rubber buffer pad (6) is fixedly connected to the outer surface of the placement frame (1), and a lifting frame (7) is fixedly connected to the top of the placement frame (1).

5. The adjustable spacing positioning fixture for a chip test probe card according to claim 4, characterized in that, The lifting frame (7) has a lifting groove (8) inside, and a lead screw (9) is rotatably connected to the inner surface of the lifting groove (8).

6. The adjustable pitch positioning fixture for a chip test probe card of claim 5, wherein, The outer surface of the lead screw (9) is threaded with a nut seat (10), and a detection platform (11) is fixedly connected to one side of the nut seat (10).

7. The adjustable pitch positioning fixture for a chip test probe card of claim 6, wherein, The detection platform (11) has a guide rail (12) inside, and a slider (13) is slidably connected inside the guide rail (12). A chip placement slot (14) is fixedly connected to one side of the slider (13).

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