Window lens device and laser
By designing a detachable window lens device in the laser, the problem of window lens damage in high-energy environments is solved, enabling automatic lens replacement and extending laser lifespan, while reducing operation and maintenance costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHUNYI TECHNOLOGY (SHANDONG) CO LTD
- Filing Date
- 2025-05-28
- Publication Date
- 2026-05-01
AI Technical Summary
Existing laser window lenses are severely damaged and contaminated in high-energy gas molecules, excimers, or ions, leading to decreased light transmittance and attenuation of laser output power. They cannot be replaced individually, resulting in resource waste and increased maintenance costs.
Design a window lens device, including an inner first window lens and an outer second window lens, connected by a support structure. When the internal stress reaches a stress threshold, the support structure disconnects, causing the first window lens to automatically detach, while the outer lens continues to be used, thus extending the replacement cycle.
This extends the replacement cycle of the window lens, reduces resource waste, lowers maintenance costs, and extends the lifespan of the laser discharge tube.
Smart Images
Figure CN224191437U_ABST
Abstract
Description
Window lens device and laser Technical Field
[0001] This application relates to the field of laser technology, and more specifically, to a window lens device and a laser. Background Technology
[0002] A laser is a laser-emitting device widely used in various fields of life. Lasers have high requirements for environmental cleanliness; therefore, strict sealing must be ensured during laser design. An output port with a window lens is provided in the laser's output direction to allow the beam to be output normally and to isolate and prevent dust.
[0003] In highly reactive environments such as those with high-energy gas molecules, excimers, or ions, the window lenses of gas laser discharge tubes are continuously subjected to particle bombardment and chemical erosion, resulting in irreversible damage and contamination on the surface. With increasing usage time, the lens transmittance decreases and scattering losses intensify, directly leading to a decrease in laser output power and affecting the stability of equipment operation.
[0004] In existing technologies, gas laser discharge tubes generally use an integrated window lens, which is fixed to the light outlet by bonding or welding. This permanent connection structure makes it impossible to replace the damaged lens individually. Once the performance of the window lens deteriorates, even if the other components of the discharge tube are still in good working order, the entire tube must be scrapped. This not only wastes resources but also significantly shortens the actual service life of the discharge tube, greatly increasing equipment maintenance costs and replacement cycles. Summary of the Invention
[0005] The purpose of this application is to provide a window lens device and a laser that can extend the replacement cycle of the window lens, thereby extending the service life of the laser discharge tube and saving maintenance costs.
[0006] The embodiments of this application are implemented as follows:
[0007] A first aspect of this application provides a window lens device, including a first window lens and a second window lens arranged sequentially along the light emission direction of a light source. The first window lens is located inside a laser, and the second window lens is mounted on the light emission port of the laser. The first window lens and the second window lens are connected by a support structure. When the internal stress of the support structure reaches a stress threshold, it breaks, causing the first window lens to detach and separate from the main optical path of the laser. This window lens device can extend the replacement cycle of the window lens, thereby extending the service life of the laser discharge tube and saving maintenance costs.
[0008] In one possible implementation, the support structure is subjected to erosion by high-energy plasma, excimers, or ions located inside the laser, causing the internal stress of the support structure to reach a stress threshold, thereby causing the support structure to break.
[0009] As one possible implementation, the material loss rate of the support structure per unit time under erosion is V, the initial diameter of the support structure is d, the gravity of the second window lens is G, the stress threshold is σ1, the break diameter of the support structure is d1, and the following relationship is satisfied: The duration for the internal stress of the supporting structure to reach the stress threshold is T, and it satisfies the following relationship:
[0010]
[0011] In one possible implementation, the support structure includes at least two support members, which are arranged circumferentially along the first window lens. One end of each support member is fixedly connected to the first window lens, and the other end is fixedly connected to the second window lens.
[0012] As one possible implementation, the cross-sectional shape of the support structure is circular or rectangular, and the material of the support structure is nickel-based metal or quartz material.
[0013] As one possible implementation, a third window lens is also included, located between the first window lens and the second window lens. The first window lens and the third window lens, as well as the third window lens and the second window lens, are connected by the support structure. When the support structure between the first window lens and the third window lens is broken and the first window lens falls off, the support structure between the third window lens and the second window lens breaks off when its internal stress reaches a stress threshold, thereby causing the third window lens to fall off.
[0014] In one possible implementation, there are multiple third window lenses, which are arranged sequentially along the light emission direction. Adjacent third window lenses are connected by the support structure. Whenever the support structure between two adjacent third window lenses is broken, the multiple third window lenses fall off sequentially.
[0015] As one possible implementation, the first window lens, the second window lens, and the third window lens are endoscopic lenses or Brewster lenses.
[0016] A second aspect of this application provides a laser, including a laser body, a fixed bracket disposed within the laser body, and the aforementioned window lens device, wherein the second window lens is mounted on the fixed bracket at one end near the light outlet of the laser body. This window lens device can extend the replacement cycle of the window lens, thereby extending the service life of the laser discharge tube and saving maintenance costs.
[0017] As one possible implementation, the fixing bracket is made of quartz glass, alumina ceramic, or beryllium oxide ceramic.
[0018] The beneficial effects of the embodiments of this application include:
[0019] The window lens device includes a first window lens and a second window lens arranged sequentially along the light emission direction of the light source. The first window lens is located inside the laser, and the second window lens is installed at the laser's output port. The first and second window lenses are connected by a support structure. When the internal stress of the support structure reaches a stress threshold, it breaks, causing the first window lens to detach and separate from the main optical path of the laser. Compared to the integrated window lens used in existing laser discharge tubes, the window lens device provided in this application allows the internal first window lens to automatically detach after reaching its service life, while the external second window lens can continue to be used. Therefore, it can extend the replacement cycle of the window lenses, thereby extending the service life of the laser discharge tube, avoiding resource waste, and saving maintenance costs. Attached Figure Description
[0020] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 is a schematic diagram of one of the window lens devices provided in the embodiments of this application;
[0022] Figure 2 is a second schematic diagram of the window lens device provided in an embodiment of this application;
[0023] Figure 3 is a schematic diagram of the structure of the laser provided in the embodiment of this application.
[0024] Icons: 1-Second window lens; 2-First window lens; 3-Support structure; 4-Fixed bracket; 5-Light emission direction. Detailed Implementation
[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0026] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. These terms are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "horizontal," "vertical," etc., do not indicate that the component must be absolutely horizontal or suspended, but can be slightly tilted. The terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0027] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0028] Referring to Figures 1 to 3, this application provides a window lens device, including a first window lens 2 and a second window lens 1 sequentially arranged along the light emission direction 5 of the light source. The first window lens 2 is located inside the laser, and the second window lens 1 is installed on the light emission port of the laser. The first window lens 2 and the second window lens 1 are connected by a support structure 3. When the internal stress of the support structure 3 reaches a stress threshold, it disconnects, causing the first window lens 2 to detach and separate from the main optical path of the laser. This window lens device can extend the replacement cycle of the window lens, thereby extending the service life of the laser discharge tube and saving maintenance costs.
[0029] It should be noted that the window lens device includes a first window lens 2 and a second window lens 1. The first window lens 2 and the second window lens 1 are arranged sequentially along the light output direction 5 of the light source. The first window lens 2 is located inside the laser, and the second window lens 1 is installed on the light output port of the laser so that the light beam can be output normally through the first window lens 2 and the second window lens 1.
[0030] Since the first window lens 2 is closer to the light source, compared with the second window lens 1, the first window lens 2 will bear the high temperature, high pressure and optical loss inside the laser first, and will play a certain role in protecting the second window lens 1. The second window lens 1 can seal the laser to prevent the laser from being damaged by dust, water vapor, mechanical impact and other factors.
[0031] The first window lens 2 and the second window lens 1 are fixedly connected by a support structure 3 (e.g., by welding, using AgCu welding). When the performance of the first window lens 2 deteriorates due to long-term use, the internal stress of the support structure 3 reaches the stress threshold, causing the support structure 3 to break. This separates the first window lens 2 from the second window lens 1, with the first window lens 2 falling into a safe area inside the laser (such as a collection slot) to detach from the main optical path of the laser and ensure that it does not affect the laser's output. The second window lens 1 remains relatively intact and can continue to operate.
[0032] Traditional integrated window lens devices, once their performance deteriorates, require the entire device to be scrapped even if other components of the discharge tube remain in good working order. This not only wastes resources but also significantly shortens the actual lifespan of the discharge tube, greatly increasing equipment maintenance costs and replacement cycles. The window lens device provided in this application, however, allows the inner first window lens 2 to automatically detach after reaching its lifespan, while the outer second window lens 1 continues to be used. Before the first window lens 2 detaches, the outer second window lens 1 is protected from the high temperature, high pressure, and optical losses inside the laser by the first window lens 2. Therefore, the second window lens 1 can be considered to be in (nearly) brand new condition before the first window lens 2 detaches. Thus, it can continue to function as an output window lens after the first window lens 2 detaches, extending the replacement cycle of the window lenses, thereby extending the lifespan of the laser discharge tube, avoiding resource waste, and saving maintenance costs.
[0033] As one possible implementation, the support structure 3 is subjected to erosion by high-energy plasma, excimers, or ions located inside the laser, causing the internal stress of the support structure 3 to reach a stress threshold, thereby causing the support structure 3 to break.
[0034] It should be noted that the triggering mechanism for the automatic detachment of the first window lens 2 utilizes the fact that the support structure 3 (such as a metal support, ceramic support, or elastic support) is exposed to the plasma, excimer, or ion environment inside the laser. Because these high-energy particles are extremely corrosive, they will continuously bombard the surface of the support structure 3, causing the material of the support structure 3 to gradually wear down, increase its brittleness, and reduce its cross-sectional area, resulting in a decrease in its load-bearing capacity. As a result, it will automatically break when it reaches its life limit, and the first window lens 2 can then automatically detach under the action of gravity.
[0035] As one possible implementation, the material loss rate of the support structure 3 per unit time under erosion is V, the initial diameter of the support structure 3 is d, the gravity of the second window lens 1 is G, the stress threshold is σ1, the break diameter of the support structure 3 is d1, and the following relationship is satisfied: The time it takes for the internal stress of supporting structure 3 to reach the stress threshold is T, and it satisfies the following relationship: The unit for the material loss rate can be m. 3 / h, those skilled in the art can make reasonable selections and designs for the service life of the support structure 3 (i.e., the time it takes for the internal stress of the support structure 3 to reach the stress threshold) based on the service life of the first window lens 2, without making specific restrictions here.
[0036] As one possible implementation, as shown in Figures 1 and 2, the support structure 3 includes at least two support members arranged circumferentially along the first window lens 2. One end of each support member is fixedly connected to the first window lens 2, and the other end is fixedly connected to the second window lens 1. For example, when there are two support members, they can be located at opposite ends of the diameter of the first window lens 2. When there are three support members, they can be located at positions corresponding to 0°, 120°, and 240° circumferentially on the first window lens 2, respectively, to ensure uniform force distribution on the first window lens 2. The layout design of multiple support members follows the same principle when there are four or more support members, which will not be elaborated further here.
[0037] As one possible implementation, the cross-sectional shape of the support structure 3 is circular or rectangular, and the material of the support structure 3 is nickel-based metal or quartz material. Those skilled in the art can make reasonable selections and designs for the cross-sectional shape and material of the support structure 3 according to actual needs, and no specific limitations are made here.
[0038] In one possible implementation, the window lens device further includes a third window lens located between the first window lens 2 and the second window lens 1. The first window lens 2 and the third window lens, as well as the third window lens and the second window lens 1, are connected by a support structure 3. When the support structure 3 between the first window lens 2 and the third window lens is disconnected and the first window lens 2 falls off, the support structure 3 between the third window lens and the second window lens 1 will disconnect when its internal stress reaches a stress threshold, thereby causing the third window lens to fall off.
[0039] In this way, the first window lens 2 (i.e., the innermost lens) directly faces the high-energy plasma, excimers, or ions inside the laser, and bears the strongest particle bombardment and thermal load, making it the first lens to be sacrificed. The third window lens (i.e., the middle layer lens) is located between the first and second lenses. After the first lens falls off, it becomes the new innermost lens, continuing to isolate the cavity from contamination and withstand erosion. The second window lens 1 (i.e., the outermost lens) is fixed to the laser's output port, always serving as the outermost barrier for laser beam output, resisting damage from the external environment (such as dust and moisture), and continuing to isolate the cavity from contamination and withstand erosion after the first window lens 2 and the third window lens fall off in sequence.
[0040] For example, there can be multiple third window lenses, which are arranged sequentially along the light-emitting direction 5. Adjacent third window lenses are connected by a support structure 3. Whenever the support structure 3 between two adjacent third window lenses is broken, the multiple third window lenses detach sequentially. The principle behind the sequential detachment of multiple third window lenses is the same as above and will not be repeated here.
[0041] As one possible implementation, the first window lens 2, the second window lens 1, and the third window lens are endoscopic lenses or Brewster lenses. Those skilled in the art can rationally select and design the cross-sectional shape and material of the support structure 3 according to actual needs; no specific limitations are imposed here.
[0042] As shown in Figure 3, this application embodiment also provides a laser, including a laser body, a fixed bracket 4 disposed within the laser body, and the aforementioned window lens device. The second window lens 1 is installed on the fixed bracket 4 near the light outlet end of the laser body. Since the structure and beneficial effects of the window lens device have been described in detail in the foregoing embodiments, they will not be repeated here. For example, the laser can be a gas laser, such as an atomic gas laser, an ion gas laser, a molecular gas laser, or an excimer laser.
[0043] As one possible implementation, the fixing bracket 4 is made of ceramic material, including quartz glass, alumina ceramic, or beryllium oxide ceramic. Those skilled in the art can reasonably select and design the cross-sectional shape and material of the support structure 3 according to actual needs; no specific limitations are imposed here.
[0044] The above description is merely an optional embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
[0045] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this application will not describe the various possible combinations separately.
Claims
1. A window lens device, characterized in that, The laser includes a first window lens and a second window lens arranged sequentially along the light emission direction of the light source. The first window lens is located inside the laser, and the second window lens is installed on the light emission port of the laser. The first window lens and the second window lens are connected by a support structure. When the internal stress of the support structure reaches a stress threshold, it breaks, causing the first window lens to detach and separate from the main optical path of the laser.
2. The window lens device according to claim 1, characterized in that, The support structure is subjected to erosion by high-energy plasma, excimers, or ions located inside the laser, causing the internal stress of the support structure to reach a stress threshold, thereby causing the support structure to break.
3. The window lens device according to claim 2, characterized in that, The material loss rate of the support structure per unit time under erosion is V, the initial diameter of the support structure is d, the gravity of the second window lens is G, the stress threshold is σ1, the break diameter of the support structure is d1, and the following relationship is satisfied: The duration for the internal stress of the supporting structure to reach the stress threshold is T, and it satisfies the following relationship:
4. The window lens device according to claim 1, characterized in that, The support structure includes at least two support members, which are arranged circumferentially along the first window lens. One end of each support member is fixedly connected to the first window lens, and the other end is fixedly connected to the second window lens.
5. The window lens device according to claim 1, characterized in that, The cross-sectional shape of the support structure is circular or rectangular, and the material of the support structure is nickel-based metal or quartz material.
6. The window lens device according to claim 1, characterized in that, It also includes a third window lens located between the first window lens and the second window lens. The first window lens and the third window lens, as well as the third window lens and the second window lens, are connected by the support structure. When the support structure between the first window lens and the third window lens is broken and the first window lens falls off, the support structure between the third window lens and the second window lens breaks off when its internal stress reaches a stress threshold, so that the third window lens falls off.
7. The window lens device according to claim 6, characterized in that, The number of the third window lenses is multiple, and the multiple third window lenses are arranged sequentially along the light emission direction. Adjacent third window lenses are connected by the support structure. Whenever the support structure between two adjacent third window lenses is broken, the multiple third window lenses fall off in sequence.
8. The window lens device according to claim 6, characterized in that, The first window lens, the second window lens, and the third window lens are endoscopic lenses or Brewster lenses.
9. A laser, characterized in that, The device includes a laser body, a fixed bracket disposed within the laser body, and a window lens device as described in any one of claims 1 to 8, wherein the second window lens is mounted on one end of the fixed bracket near the light outlet of the laser body.
10. The laser according to claim 9, characterized in that, The fixing bracket is made of quartz glass, alumina ceramic, or beryllium oxide ceramic.