Flat scanning device and atomic force microscope scanning system

Abstract

The utility model provides a flat scanning device and an atomic force microscope scanning system. The flat-panel scanning device comprises a flat-panel scanner, and the flat-panel scanner comprises a positioning platform body and a moving platform which are connected through a weak area, so that the moving platform can move relative to the positioning platform body. The system also comprises an adapter plate, two sides of the adapter plate are respectively provided with a flat-panel scanner, the flat-panel scanners are respectively marked as a first flat-panel scanner and a second flat-panel scanner, a motion platform of the first flat-panel scanner is connected with the adapter plate, and a positioning platform body of the second flat-panel scanner is connected with the adapter plate. The flat-plate scanning device is configured in a way that the motion platform of the first flat-plate scanner drives the adapter plate and the second flat-plate scanner to horizontally move along a first direction, and the motion platform of the second flat-plate scanner can horizontally move along a second direction perpendicular to the first direction. In the technical scheme, the motion of the motion platform of the first flat-plate scanner and the motion of the motion platform of the second flat-plate scanner are mutually independent, so that parasitic motion can be reduced.

Description

Technical Field

[0001] This application relates to the field of atomic force microscopy, and more specifically, to a flatbed scanning device and an atomic force microscopy scanning system. Background Technology

[0002] A flatbed scanner is a key component of an atomic force microscope (AFM), used to move a sample horizontally in the X and Y directions to detect different positions on the sample. In existing flatbed scanners, the piezoelectric ceramics are connected in parallel. For example, in a macro-micro stage disclosed in CN207282156U, a first piezoelectric ceramic and a second piezoelectric ceramic are respectively disposed in a first groove 22 and a second groove 24, and the first and second piezoelectric ceramics drive the stage 10 to move in the X and Y directions in parallel. Because the first and second piezoelectric ceramics are connected in parallel and act on the same stage 10, the stage 10 may exhibit parasitic motion in the Y direction while being driven by the first piezoelectric ceramic in the X direction; similarly, the stage 10 may exhibit parasitic motion in the X direction while being driven by the second piezoelectric ceramic in the Y direction, thus leading to inaccurate sample detection results. Utility Model Content

[0003] The purpose of this application is to provide a flatbed scanning device and an atomic force microscope scanning system to reduce parasitic movement.

[0004] The embodiments of this application are implemented as follows:

[0005] In a first aspect, embodiments of this application provide a flatbed scanning device, including a flatbed scanner. The flatbed scanner includes a positioning platform body and a motion platform connected by a weak area, so that the motion platform can move relative to the positioning platform body.

[0006] It also includes an adapter plate, on each side of which is a flatbed scanner, referred to as the first flatbed scanner and the second flatbed scanner, respectively. The motion platform of the first flatbed scanner is connected to the adapter plate, and the positioning platform body of the second flatbed scanner is connected to the adapter plate.

[0007] The flatbed scanning device is configured such that: the motion platform of the first flatbed scanner drives the adapter plate and the second flatbed scanner to move horizontally along a first direction, and the motion platform of the second flatbed scanner can move horizontally along a second direction perpendicular to the first direction.

[0008] In the above technical solution, the first flatbed scanner and the second flatbed scanner are respectively installed on both sides of the adapter plate. The movement of the motion platform of the first flatbed scanner and the movement of the motion platform of the second flatbed scanner are independent of each other. Therefore, when the motion platform of the first flatbed scanner moves horizontally in the first direction, it is difficult for parasitic movement in the second direction to occur; when the motion platform of the second flatbed scanner moves horizontally in the second direction, it is difficult for parasitic movement in the first direction to occur, which can make the detection results of the sample more accurate.

[0009] In some alternative implementations, the positioning platform body is provided with a drive unit, the output end of which contacts the motion platform to drive the motion platform to move relative to the positioning platform body; the output end acts on the motion platform at the middle part of the thickness direction of the flatbed scanner.

[0010] In the above technical solution, the output end of the drive unit acts on the middle part of the motion platform in the thickness direction of the flatbed scanner, which can reduce the tendency of the motion platform to deflect during movement, thereby reducing the parasitic movement of the motion platform.

[0011] In some alternative implementations, a mounting groove is provided on one side of the positioning platform body, and a through hole is provided at the bottom of the mounting groove facing the motion platform. The drive unit is disposed in the mounting groove and the output end is connected to the motion platform through the through hole.

[0012] In the above technical solution, the mounting slot is set on one side of the positioning platform body, which makes it easy to install the drive unit into the mounting slot; since the through hole at the bottom of the slot is set towards the motion platform, the output end of the drive unit can act on the middle part of the motion platform in the thickness direction of the flatbed scanner, so as to reduce the parasitic movement of the motion platform in the thickness direction of the flatbed scanner.

[0013] In some optional implementations, the positioning platform body is further provided with a detection unit, the detection end of the detection unit abutting against the side of the motion platform away from the output end, so as to detect the displacement of the motion platform; the detection unit is signal connected to the drive unit.

[0014] In the above technical solution, the displacement of the motion platform is detected by the detection unit, and the detection unit is connected to the drive unit by signal, which can realize closed-loop control of the motion platform's motion process and improve the position accuracy of the motion platform during the motion process.

[0015] In some optional embodiments, the adapter plate has a first through slot extending in a first direction on the side facing the first flatbed scanner, and the signal lines of the detection unit and / or the drive unit in the first flatbed scanner are disposed in the first through slot; the adapter plate has a second through slot extending in a second direction on the side facing the second flatbed scanner, and the signal lines of the detection unit and / or the drive unit in the second flatbed scanner are disposed in the second through slot.

[0016] In the above technical solution, the detection end of the detection unit abuts against the side of the motion platform away from the output end of the drive unit. That is, the detection end of the detection unit and the output end of the drive unit are located on opposite sides of the motion platform. By setting the first through slot and the second through slot on the adapter plate, it is convenient to arrange the signal lines of the detection unit and the signal lines of the drive unit in the flatbed scanner.

[0017] In some alternative implementations, the drive unit includes a displacement amplifier and a piezoelectric ceramic, with the output terminal located at the displacement amplifier; the displacement amplifier is connected to a threaded fastener; the threaded fastener is configured to contact the end of the piezoelectric ceramic in the expansion direction during rotation; the drive unit is configured such that the piezoelectric ceramic expands, causing the output terminal to move closer to or further away from the motion platform.

[0018] In the above technical solution, the piezoelectric ceramic is expanded to drive the motion platform to move. By using threaded fasteners to contact the end of the piezoelectric ceramic in the expansion direction, a pre-tightening force can be applied to the piezoelectric ceramic, making the connection between the layers in the piezoelectric ceramic less prone to failure, thereby improving the service life of the piezoelectric ceramic.

[0019] In some optional embodiments, the flatbed scanner includes a first side and a second side, the motion platform having a first protrusion on the first side; and the positioning platform body having a second protrusion on the second side. An adapter plate is connected to the first protrusion of the first flatbed scanner, creating a gap between the positioning platform body of the first flatbed scanner, the weak area, and the adapter plate; the second protrusion of the second flatbed scanner is connected to the adapter plate, creating a gap between the motion platform of the second flatbed scanner, the weak area, and the adapter plate.

[0020] In the above technical solution, there is relative movement between the positioning platform body and the adapter plate in the first flatbed scanner, and there is relative movement between the motion platform and the adapter plate in the second flatbed scanner. Therefore, by setting the first protrusion and the second protrusion in the flatbed scanner, gaps are formed between the positioning platform body and the weak area in the first flatbed scanner and the adapter plate, and between the motion platform and the weak area in the second flatbed scanner and the adapter plate. This can reduce the resistance of the connecting plate when it moves relative to the first and second flatbed scanners, and can also reduce the interference caused by the contact between the connecting plate and the weak area, which makes it difficult for the weak area to deform, thereby making it difficult for the positioning platform body and the motion platform to move relative to each other.

[0021] In some alternative implementations, the weak zone includes two U-shaped structures arranged opposite each other, with the output end located between the two U-shaped structures in a direction perpendicular to the movement of the motion platform; one end of each U-shaped structure is connected to the motion platform and the other end is connected to the positioning platform body; the U-shaped structure is configured to deform when the motion platform moves relative to the positioning platform body.

[0022] In the above technical solution, the deformation of the U-shaped structure allows the motion platform to move relative to the positioning platform body. The output end being located between the two U-shaped structures ensures that the forces on the motion platform are relatively symmetrical. Therefore, the displacement direction of the motion platform is consistent with the displacement direction output by the output end, thereby reducing parasitic motion of the motion platform.

[0023] In some alternative implementations, the first flatbed scanner has the same structure as the second flatbed scanner.

[0024] Secondly, embodiments of this application provide an atomic force microscope scanning system, including the flatbed scanning device provided in the first aspect, wherein the motion platform of the second flatbed scanner is connected to the sample stage. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 A schematic diagram of a flatbed scanner provided in an embodiment of this application on the first side;

[0027] Figure 2 A schematic diagram of the flatbed scanner provided in an embodiment of this application on the second side;

[0028] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0029] Figure 4 A schematic diagram of the overall composition of the positioning platform body, motion platform, and weak area provided in the embodiments of this application;

[0030] Figure 5 A schematic diagram of the flatbed scanning device provided in the embodiments of this application;

[0031] Figure 6 A cross-sectional view of a flatbed scanner provided in an embodiment of this application;

[0032] Figure 7 This is a schematic diagram of a driving unit provided in an embodiment of this application.

[0033] Icons: 10-Plate scanning device; 100-Plate scanner; 110-Positioning platform body; 111-Mounting slot; 112-Second boss; 120-Motion platform; 121-First boss; 130-Weak area; 131-U-shaped structure; 210-First plate scanner; 220-Second plate scanner; 300-Adapter plate; 310-First through slot; 320-Second through slot; 400-Drive unit; 410-Displacement amplifier; 411-Base; 412-First input part; 4121-Threaded hole; 413-Second input part; 414-Output part; 415-First connection part; 416-Second connection part; 420-Piezoelectric ceramic; 500-Detection unit; Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0036] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0037] In the description of this application, it should be noted that the terms "center," "upper," "lower," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0038] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0039] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0040] This application provides an atomic force microscope (AFM) scanning system, including a flatbed scanning device 10. The flatbed scanning device 10 is used to set a sample stage, on which a sample to be tested is placed. The flatbed scanning device 10 can move the sample stage in the horizontal direction to change the position of the sample, thereby enabling the analysis of the sample surface structure through the microcantilever tip of the AFM scanning system.

[0041] In some embodiments, the flatbed scanning device 10 includes a flatbed scanner 100, such as Figures 1 to 4 As shown, the flatbed scanner 100 includes a positioning platform body 110 and a motion platform 120 connected by a weak region 130. The weak region 130 is a structure that can deform under external force and return to its original shape after the external force is removed, accommodating the movement of the motion platform 120 relative to the positioning platform body 110. In an atomic force microscopy scanning system, the movement of the motion platform 120 is very small; therefore, the deformation of the weak region 130 is also relatively small.

[0042] like Figure 5As shown, the flatbed scanning device 10 also includes an adapter plate 300. A flatbed scanner 100 is disposed on each side of the adapter plate 300, referred to as a first flatbed scanner 210 and a second flatbed scanner 220, respectively. The structures of the first flatbed scanner 210 and the second flatbed scanner 220 may be identical or different. The motion platform 120 of the first flatbed scanner 210 is connected to the adapter plate 300, and the positioning platform body 110 of the second flatbed scanner 220 is connected to the adapter plate 300. The flatbed scanning device 10 is configured such that the motion platform 120 of the first flatbed scanner 210 drives the adapter plate 300 and the second flatbed scanner 220 along a first direction (e.g., ...). Figure 5 The second flatbed scanner 220 can move horizontally in a second direction perpendicular to the first direction (as indicated by the middle arrow X), and the motion platform 120 of the second flatbed scanner 220 can move horizontally in a second direction perpendicular to the first direction (as indicated by the middle arrow X). Figure 5 (In the direction indicated by the middle arrow Y) Horizontal movement; The sample stage is connected to the motion platform 120 of the second flatbed scanner 220.

[0043] When analyzing the surface structure of a sample on a sample stage using the flatbed scanning device 10 provided in this application, the first flatbed scanner 210 can be used to move the sample stage on the adapter plate 300 and the second flatbed scanner 220 horizontally along the first direction, thereby analyzing the surface structure of the sample at different positions in the first direction; the second flatbed scanner 220 can be used to move the sample stage horizontally along the second direction, thereby analyzing the surface structure of the sample at different positions in the second direction. Since the movement of the sample stage along the first direction is achieved by the first flatbed scanner 210 and the movement along the second direction is achieved by the second flatbed scanner 220, and the movements of the sample stage in the first direction and the second direction are independent of each other and perpendicular to each other, no parasitic movement occurs in the second direction when the sample stage moves in the first direction. Parasitic movement refers to movement that occurs in another direction while an object moves in one direction; for example, movement along the second direction that occurs while the sample stage moves in the first direction is parasitic movement.

[0044] Furthermore, the positioning platform body 110, the motion platform 120, and the weak area 130 can be fabricated as a single integrated structure. For example... Figure 4 As shown, the positioning platform body 110, the motion platform 120, and the weak area 130 can be machined from a single piece of steel using wire cutting. The positioning platform body 110 is located outside the motion platform 120. Figure 3As shown, the weak area 130 includes a cut U-shaped structure 131, one end of which is connected to the positioning platform body 110 and the other end to the motion platform 120. When the motion platform 120 moves from its initial position relative to the positioning platform body 110, the weak area 130 will adaptively deform. After the external force acting on the motion platform 120 is removed, the weak area 130 returns to its original shape, causing the motion platform 120 to also return to its initial position. In other embodiments, materials other than steel or processing methods other than wire cutting can be used to manufacture the positioning platform body 110, the motion platform 120, and the weak area 130. Of course, in other embodiments, the platform body, the motion platform 120, and the weak area 130 can also be separately manufactured components, connected by connectors or welding.

[0045] Furthermore, the weak area 130 includes two U-shaped structures 131 arranged opposite to each other. In the direction of movement perpendicular to the motion platform 120, the output end is located between the two U-shaped structures 131. Preferably, the two U-shaped structures 131 of the weak area 130 are symmetrically arranged on both sides of the output end so that the force on the motion platform 120 is more symmetrical, and the direction of movement of the motion platform 120 is consistent with the direction of displacement output by the output end, thereby reducing the parasitic movement that occurs in the motion platform 120 during the movement.

[0046] In some implementations, such as Figure 6 As shown, the flatbed scanning device 10 also includes a drive unit 400 for driving the motion platform 120, which is disposed on the positioning platform body 110. The output end of the drive unit 400 contacts the motion platform 120 to drive the motion platform 120 to move relative to the positioning platform body 110; the output end acts on the middle part of the motion platform 120 in the thickness direction of the flatbed scanner 100, therefore, the force exerted on the motion platform 120 is also located in the middle part of the thickness direction of the flatbed scanner 100, and this force is unlikely to cause the motion platform 120 to deflect, thus making parasitic motion unlikely. That is, as Figure 5 As shown, the motion direction of the motion platform 120 is either the first or second horizontal direction. The thickness direction of the flatbed scanner 100 is parallel to the vertical direction (perpendicular to the first and second directions). The force exerted by the output end of the drive unit 400 on the middle part of the thickness direction of the flatbed scanner 100 is unlikely to cause the motion platform 120 to exhibit parasitic vertical motion.

[0047] Furthermore, the drive unit 400 can be disposed within the gap between the positioning platform body 110 and the motion platform 120; or it can be disposed within the positioning platform body 110, such as... Figure 4 and Figure 6As shown, a mounting groove 111 is provided on one side of the positioning platform body 110. The bottom of the mounting groove 111 has a through hole facing the motion platform 120. The drive unit 400 is disposed in the mounting groove 111 and its output end is connected to the motion platform 120 through the through hole to apply force to the motion platform 120. By placing the mounting groove 111 on one side of the positioning platform body 110, it is convenient to install the drive unit 400 into the mounting groove 111.

[0048] In some embodiments, the connection between the output terminal and the motion platform 120 may be a detachable connection such as contact; in other embodiments, the connection between the output terminal and the motion platform 120 may be an inseparable connection such as adhesive bonding.

[0049] Furthermore, to achieve more precise control over the motion of the motion platform 120, a detection unit 500 is also provided on the positioning platform body 110. The detection unit 500 and the drive unit 400 are located on opposite sides of the motion platform 120 in the direction of motion, and are signal-connected to the drive unit 400. For example, both the detection unit 500 and the drive unit 400 are signal-connected to the control unit of the atomic force microscope scanning system. That is, the drive unit 400 pushes or pulls the motion platform 120 from one side according to the preset displacement stored in the control unit, and the detection unit 500 detects the displacement of the motion platform 120 from the other opposite side and transmits the detected displacement to the control unit. The control unit then compares the detected displacement with the preset displacement to ensure that the actual displacement of the motion platform 120 matches the preset displacement, thus achieving closed-loop control of the motion platform 120.

[0050] Furthermore, in such Figure 1 and Figure 6 In the embodiment shown, there are two weak areas 130 between the positioning platform body 110 and the motion platform 120. One weak area 130 is located near the detection unit 500 and the other weak area 130 is located near the drive unit 400.

[0051] In some embodiments, to facilitate the configuration of the signal lines of the detection unit 500 and / or the drive unit 400, such as Figure 5 As shown, the adapter plate 300 has a first through slot 310 extending in a first direction on the side facing the first flatbed scanner 210, and a second through slot 320 extending in a second direction on the side facing the second flatbed scanner 220. The signal lines of the detection unit 500 and / or the drive unit 400 in the first flatbed scanner 210 can be disposed in the first through slot 310; the signal lines of the detection unit 500 and / or the drive unit 400 in the second flatbed scanner 220 can be disposed in the second through slot 320.

[0052] In some implementations, such as Figure 7 As shown, the drive unit 400 includes a displacement amplifier 410 and a piezoelectric ceramic 420. The output terminal of the drive unit 400 is located on the displacement amplifier 410, and the piezoelectric ceramic 420 is mounted on the displacement amplifier 410. When the piezoelectric ceramic 420 is energized, it will expand slightly. The displacement amplifier 410 is used to amplify the expansion amount of the piezoelectric ceramic 420 to a preset displacement amount of the motion platform 120, and the motion platform 120 is moved through the output terminal located on the displacement amplifier 410. That is, during the process of the piezoelectric ceramic 420 expanding when energized, the output terminal can move towards or away from the motion platform 120.

[0053] In other embodiments, the drive unit 400 may also include only the piezoelectric ceramic 420, that is, the movement of the motion platform 120 is directly driven by the expansion of the piezoelectric ceramic 420 after it is energized. Alternatively, the drive unit 400 may also use other devices capable of driving the motion platform 120 to perform minute movements.

[0054] Furthermore, in some embodiments, the displacement amplification element 410 is also connected to a threaded fastener, which, during rotation, allows the fastener to contact the end of the piezoelectric ceramic 420 in the expansion direction. The piezoelectric ceramic 420 is composed of multiple layers of stacked ceramic sheets. When energized, the piezoelectric ceramic 420 expands in the stacking direction and contracts when de-energized. The expansion direction of the piezoelectric ceramic 420 is the same as the stacking direction of the ceramic sheets. In this embodiment, a preload can be applied to the end of the piezoelectric ceramic 420 in the expansion direction using the threaded fastener, making the connection between the multiple layers of ceramic sheets within the piezoelectric ceramic 420 less prone to failure during expansion or contraction, thus improving the service life of the piezoelectric ceramic 420.

[0055] In some implementations, such as Figure 6 and Figure 7 As shown, the displacement amplification component 410 has a symmetrical structure, including a base 411, a first input portion 412, a second input portion 413, an output portion 414, a first connecting portion 415, and a second connecting portion 416. The output end of the drive unit 400 is located in the first output portion 414; the piezoelectric ceramic 420 is installed in the receiving space between the first input portion 412 and the second input portion 413. During the expansion of the piezoelectric ceramic 420, the first input portion 412 and the second input portion 413 move away from each other, and the output portion 414 is pulled towards the receiving space by the first connecting portion 415 and the second connecting portion 416. The first input portion 412 is provided with a through threaded hole 4121, through which a threaded fastener can be screwed to apply a preload to the end of the piezoelectric ceramic 420.

[0056] In some embodiments, the flatbed scanner 100 includes a first side and a second side, such as Figure 1 and Figure 2 As shown, the motion platform 120 has a first protrusion 121 on its first side; the positioning platform body 110 has a second protrusion 112 on its second side. Figure 5 As shown, the adapter plate 300 is connected to the first boss 121 of the first flatbed scanner 210, so that there is a gap between the positioning platform body 110 and the weak area 130 of the first flatbed scanner 210 and the adapter plate 300; the second boss 112 of the second flatbed scanner 220 is connected to the adapter plate 300, so that there is a gap between the motion platform 120 and the weak area 130 of the second flatbed scanner 220 and the adapter plate 300. In this embodiment, no friction occurs when there is relative movement between the positioning platform body 110 and the weak area 130 of the first flatbed scanner 210 and the adapter plate 300; no friction occurs when there is relative movement between the motion platform 120 and the weak area 130 of the second flatbed scanner 220 and the adapter plate 300, so the deformation of the weak area 130 is not hindered, and thus the relative movement between the positioning platform body 110 and the motion platform 120 is not affected.

[0057] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A flatbed scanning device, characterized in that, The flat panel scanner includes a positioning platform body and a motion platform connected by a weak area, such that the motion platform can move relative to the positioning platform body. It also includes an adapter plate, on each side of which is provided a flatbed scanner, referred to as the first flatbed scanner and the second flatbed scanner, respectively. The motion platform of the first flatbed scanner is connected to the adapter plate, and the positioning platform body of the second flatbed scanner is connected to the adapter plate. The flatbed scanning device is configured such that: the motion platform of the first flatbed scanner drives the adapter plate and the second flatbed scanner to move horizontally along a first direction, and the motion platform of the second flatbed scanner can move horizontally along a second direction perpendicular to the first direction.

2. The flatbed scanning device according to claim 1, characterized in that, The positioning platform body is provided with a driving unit, the output end of which contacts the motion platform to drive the motion platform to move relative to the positioning platform body; the output end acts on the middle part of the motion platform in the thickness direction of the flatbed scanner.

3. The flatbed scanning device according to claim 2, characterized in that, The positioning platform body has a mounting groove on one side, and the bottom of the mounting groove has a through hole facing the motion platform. The drive unit is located in the mounting groove and its output end is connected to the motion platform through the through hole.

4. The flatbed scanning device according to claim 2, characterized in that, The positioning platform body is also provided with a detection unit. The detection end of the detection unit abuts against the side of the motion platform away from the output end to detect the displacement of the motion platform. The detection unit is signal-connected to the drive unit.

5. The flatbed scanning device according to claim 4, characterized in that, The adapter plate has a first through slot extending along a first direction on the side facing the first flatbed scanner, and the signal lines of the detection unit and / or the driving unit in the first flatbed scanner are disposed in the first through slot; the adapter plate has a second through slot extending along a second direction on the side facing the second flatbed scanner, and the signal lines of the detection unit and / or the driving unit in the second flatbed scanner are disposed in the second through slot.

6. The flatbed scanning device according to claim 2, characterized in that, The drive unit includes a displacement amplifier and a piezoelectric ceramic, with the output terminal located at the displacement amplifier; the displacement amplifier is connected to a threaded fastener; the threaded fastener is configured to contact the end of the piezoelectric ceramic in the expansion direction during rotation; The drive unit is configured such that the piezoelectric ceramic expands, causing the output terminal to move closer to or further away from the motion platform.

7. The flatbed scanning device according to claim 1, characterized in that, The flatbed scanner includes a first side and a second side, the motion platform is provided with a first protrusion on the first side; the positioning platform body is provided with a second protrusion on the second side; The adapter plate is connected to the first boss of the first flatbed scanner so that there is a gap between the positioning platform body of the first flatbed scanner and the weak area and the adapter plate; the second boss of the second flatbed scanner is connected to the adapter plate so that there is a gap between the motion platform of the second flatbed scanner and the weak area and the adapter plate.

8. The flatbed scanning device according to claim 2, characterized in that, The weak zone includes two U-shaped structures arranged opposite each other. In the direction perpendicular to the movement of the motion platform, the output end is located between the two U-shaped structures. One end of the U-shaped structure is connected to the motion platform, and the other end is connected to the positioning platform body. The U-shaped structure is configured to deform when the motion platform moves relative to the positioning platform body.

9. The flatbed scanning device according to any one of claims 1-8, characterized in that, The first flatbed scanner has the same structure as the second flatbed scanner.

10. An atomic force microscope scanning system, characterized in that, The device includes the flatbed scanning apparatus according to any one of claims 1-9, wherein the motion platform of the second flatbed scanner is connected to the sample stage.

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