Testing tool

Abstract

The utility model discloses a test tool, and belongs to the technical field of semiconductor test equipment. According to the technical key points, the device comprises a vacuum cavity; the friction force testing assembly comprises a second servo vertical linear lifting mechanism, a second spring, a second force measuring sensor, a connecting piece, a liftable pulley assembly and a connecting wire; a second guide rod of the second servo vertical linear lifting mechanism extends into the vacuum cavity, the second guide rod, a second spring, a second force transducer and a connecting piece are sequentially connected from top to bottom, and a liftable pulley assembly is arranged below the connecting piece; and the bearing table assembly is used for placing a test material. The utility model aims to provide the testing tool which can measure static friction force between different materials.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor testing equipment, and more specifically, to a testing fixture. Background Technology

[0002] Electrostatic discharge (ESD) testing is an important testing indicator in fields such as semiconductors and integrated circuits. Currently, ESD testing mainly focuses on measuring the electrostatic force between two components when they are vertically separated. For example:

[0003] Reference 1: CN2807475Y. It is used to test the electrostatic force between a wafer and an electrostatic chuck. The power unit is connected to the wafer, while the electrostatic chuck is fixed to a vacuum chamber. The power unit lifts the wafer, and a force gauge is used to test the electrostatic force between the wafer and the electrostatic chuck.

[0004] Reference 2: CN103376176B. Based on CN2807475Y, a ranging sensor is added, which is used to test the relationship curve between the gap between the wafer and the electrostatic chuck and the electrostatic force.

[0005] In the field of semiconductor materials, in addition to electrostatic force, horizontal friction is also an important testing factor. However, current technology lacks testing fixtures specifically for detecting horizontal friction (static friction). Utility Model Content

[0006] The purpose of this invention is to provide a testing fixture to address the shortcomings of the existing technology.

[0007] The technical solution of this utility model is:

[0008] A test fixture, comprising:

[0009] Vacuum cavity;

[0010] The friction force testing assembly includes: a second servo vertical linear lifting mechanism, a second spring, a second force sensor, a connector, a liftable pulley assembly, and a connecting line; the second guide rod of the second servo vertical linear lifting mechanism extends into the vacuum chamber, and the second guide rod, the second spring, the second force sensor, and the connector are connected in sequence from top to bottom, with the liftable pulley assembly located below the connector;

[0011] The support platform assembly is used to place the test materials.

[0012] Furthermore, the liftable pulley assembly includes: a lifting power component, two ear plates, and a pulley. One end of the two ear plates is connected to the lifting power component, and the pulley is rotatably connected to the other end of the two ear plates via a rotating shaft.

[0013] Furthermore, the electrostatic force testing assembly includes: a first servo vertical linear lifting mechanism, a first spring, a first force sensor, and a universal joint; the first guide rod of the first servo vertical linear lifting mechanism extends into the vacuum chamber, and the first guide rod, the first spring, the first force sensor, and the universal joint are connected sequentially from top to bottom.

[0014] Furthermore, the first servo vertical linear lifting mechanism and the second servo vertical linear lifting mechanism have the same structure.

[0015] Furthermore, the first servo vertical linear lifting mechanism includes: a vertical plate, a horizontal lifting plate, a lifting drive assembly, a first guide rod, and a bellows; the vertical plate is disposed on the top of the vacuum cavity; the lifting drive assembly is disposed on the vertical plate and is capable of driving the horizontal lifting plate to move up and down; the first guide rod is fixedly disposed on the lower side of the horizontal lifting plate; a bellows is disposed between the lower side of the horizontal lifting plate and the vacuum cavity, and the first guide rod is disposed inside the bellows.

[0016] The beneficial effects of this application are as follows:

[0017] (1) This application proposes a test fixture, which uses a "friction force test assembly, which includes: a second servo vertical linear lifting mechanism, a second spring, a second force sensor, a connector, a liftable pulley assembly, and a connecting line; the second guide rod of the second servo vertical linear lifting mechanism extends into the vacuum chamber, the second guide rod, the second spring, the second force sensor, and the connector are connected sequentially from top to bottom, and the liftable pulley assembly is located below the connector", to test the static friction force between a first material component (such as a wafer) and a second material component (such as an electrostatic chuck).

[0018] (2) The test fixture of this application is equipped with both friction force test component and electrostatic force test component, which can integrate electrostatic force and horizontal friction force into the same test fixture. Attached Figure Description

[0019] The present invention will be further described in detail below with reference to the embodiments shown in the accompanying drawings, but this does not constitute any limitation on the present invention.

[0020] Figure 1 This is a three-dimensional structural diagram of the test fixture in Example 1.

[0021] Figure 2 This is a three-dimensional structural diagram of the test fixture of Example 1 from another perspective.

[0022] Figure 3 This is a three-dimensional structural diagram of the electrostatic force testing component and the friction force testing component of Embodiment 1.

[0023] Figure 4This is a three-dimensional structural diagram of the first servo vertical linear lifting mechanism in Embodiment 1.

[0024] Figure 5 This is a three-dimensional structural diagram of the lifting pulley assembly in Embodiment 1.

[0025] Figure 6 This is a schematic diagram of the horizontal friction force test principle in Example 1.

[0026] Figures 1-6 The annotations in the accompanying drawings are explained as follows:

[0027] Test fixture 1000, vacuum chamber 100, electrostatic force test assembly 200, friction force test assembly 300, support platform assembly 400, first material component 500, second material component 600;

[0028] First servo vertical linear lifting mechanism 201, first spring 202, first force sensor 203, universal joint 204;

[0029] Vertical plate 2011, horizontal lifting plate 2012, lifting drive assembly 2013, first guide rod 2014, bellows 2015;

[0030] The components include: a second servo vertical linear lifting mechanism 301, a second spring 302, a second force sensor 303, a connector 304, a liftable pulley assembly 305, and a connecting line 306.

[0031] Lifting power assembly 3051, two ear plates 3052, pulley 3053. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0033] <Example 1: A Test Fixture>

[0034] from Figure 1 and Figure 2 It can be seen that a test fixture 1000 is used to control the electrostatic force and horizontal friction between a first material component 500 (such as a wafer) and a second material component 600 (such as an electrostatic chuck).

[0035] It includes:

[0036] a, Vacuum cavity 100;

[0037] b. Electrostatic force testing assembly 200, which is used to test electrostatic force;

[0038] c, Friction test assembly 300, which is used to test horizontal friction;

[0039] e, Platform assembly 400, which is used to place test materials.

[0040] Figure 3 The structural design diagrams of the electrostatic force testing assembly 200 and the friction force testing assembly 300 are shown. The electrostatic force testing assembly 200 includes: a first servo vertical linear lifting mechanism 201, a first spring 202, a first force sensor 203, and a universal joint 204; the first guide rod of the first servo vertical linear lifting mechanism 201 extends into the vacuum chamber 100 (the first guide rod is sealed by a bellows), and the first guide rod, the first spring 202, the first force sensor 203, and the universal joint 204 are connected sequentially from top to bottom.

[0041] The friction force testing assembly 300 includes: a second servo vertical linear lifting mechanism 301, a second spring 302, a second force sensor 303, a connector 304, a liftable pulley assembly 305, and a connecting line 306; the second guide rod of the second servo vertical linear lifting mechanism 301 extends into the vacuum chamber 100 (the second guide rod is sealed by a bellows); the second guide rod, the second spring 302, the second force sensor 303, and the connector 304 are connected sequentially from top to bottom; the liftable pulley assembly 305 is located below the connector 304; one end of the connecting line 306 is connected to the lower end of the connector 304; and the connecting line 306 changes from vertical to horizontal after passing through the liftable pulley assembly 305.

[0042] Figure 4 The structural design of the first servo vertical linear lifting mechanism 201 is illustrated. The first servo vertical linear lifting mechanism 201 and the second servo vertical linear lifting mechanism 301 have the same structure. The first servo vertical linear lifting mechanism 201 includes: a vertical plate 2011, a horizontal lifting plate 2012, a lifting drive assembly 2013, a first guide rod 2014, and a bellows 2015; the vertical plate 2011 is disposed at the top of the vacuum chamber 100; the lifting drive assembly 2013 is disposed on the vertical plate 2011 and can drive the horizontal lifting plate 2012 to move up and down; the first guide rod 2014 is fixedly disposed on the lower side of the horizontal lifting plate 2012; the bellows 2015 is disposed between the lower side of the horizontal lifting plate 2012 and the vacuum chamber 100, and the first guide rod 2014 is disposed inside the bellows 2015.

[0043] Figure 5The structural design of the liftable pulley assembly 305 is illustrated. The liftable pulley assembly 305 includes: a lifting power assembly 3051, two ear plates 3052, and a pulley 3053. One end of the two ear plates 3052 is connected to the lifting power assembly 3051, and the pulley 3053 is rotatably connected to the other end of the two ear plates 3052 via a rotating shaft.

[0044] It should be noted that the connecting cable 306 can pass between the two ear plates.

[0045] It should be noted that the support platform assembly 400 includes a support platform and a horizontal and vertical drive assembly, and the support platform can move horizontally and vertically in the horizontal plane.

[0046] Figure 6 A schematic diagram illustrating the horizontal friction force testing process is provided. The horizontal friction force testing process is as follows: S100, the second material component is placed on the support platform, and then the first material component is placed on the second material component; S200, the horizontal position of the support platform is adjusted; S300, the height of the liftable pulley assembly is adjusted, and then the connecting line 306 passes around the pulley 3053 and connects to the first material component; S400, the second servo vertical linear lifting mechanism is started, and the data-time curve of the second force sensor 303 is recorded. The maximum force value obtained by the second force sensor 303 corresponds to the maximum static friction force between the first material component and the second material component.

[0047] The electrostatic force testing process is as follows: S100, the second material component is placed on the support platform, and then the first material component is placed on the second material component; S200, the horizontal position of the support platform is adjusted; S300, the universal joint 204 is connected to the first material component; S400, the first servo vertical linear lifting mechanism is started, and the data-time curve of the first force sensor 203 is recorded. The maximum force value obtained by the first force sensor 203 corresponds to the sum of the electrostatic force between the first material component and the second material component and the self-weight of the first material component. The self-weight of the first material component is a known value (which can also be obtained through the testing equipment of this application), and the electrostatic force can be calculated accordingly.

[0048] It should be noted that the tests for horizontal friction and electrostatic force were conducted in a vacuum environment.

[0049] The above-described embodiments are preferred embodiments of the present utility model and are only used to facilitate the illustration of the present utility model. They are not intended to limit the present utility model in any way. Any person skilled in the art who makes partial modifications or alterations to the technical content disclosed in the present utility model without departing from the scope of the technical features of the present utility model shall still fall within the scope of the technical features of the present utility model.

Claims

1. A testing fixture, characterized in that, include: Vacuum cavity; The friction force testing assembly includes: a second servo vertical linear lifting mechanism, a second spring, a second force sensor, a connector, a liftable pulley assembly, and a connecting line; the second guide rod of the second servo vertical linear lifting mechanism extends into the vacuum chamber, and the second guide rod, the second spring, the second force sensor, and the connector are connected in sequence from top to bottom, with the liftable pulley assembly located below the connector; The support platform assembly is used to place the test materials.

2. The testing fixture as described in claim 1, characterized in that, The liftable pulley assembly includes: a lifting power component, two ear plates, and a pulley. One end of the two ear plates is connected to the lifting power component, and the pulley is rotatably connected to the other end of the two ear plates via a rotating shaft.

3. The testing fixture as described in claim 1, characterized in that, The electrostatic force testing assembly includes: a first servo vertical linear lifting mechanism, a first spring, a first force sensor, and a universal joint; the first guide rod of the first servo vertical linear lifting mechanism extends into the vacuum chamber, and the first guide rod, the first spring, the first force sensor, and the universal joint are connected sequentially from top to bottom.

4. The testing fixture as described in claim 3, characterized in that, The first servo vertical linear lifting mechanism and the second servo vertical linear lifting mechanism have the same structure.

5. A testing fixture as described in claim 3 or 4, characterized in that, The first servo vertical linear lifting mechanism includes: a vertical plate, a horizontal lifting plate, a lifting drive assembly, a first guide rod, and a bellows; the vertical plate is disposed on the top of the vacuum cavity; the lifting drive assembly is disposed on the vertical plate and is capable of driving the horizontal lifting plate to move up and down; the first guide rod is fixedly disposed on the lower side of the horizontal lifting plate; a bellows is disposed between the lower side of the horizontal lifting plate and the vacuum cavity, and the first guide rod is disposed inside the bellows.

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