Silicon wafer correction mechanism driven by cylindrical cam

Abstract

The utility model relates to the technical field of silicon wafer correction mechanisms, in particular to a silicon wafer correction mechanism driven by a cylindrical cam, and mainly solves the technical problems of low correction precision, low correction efficiency, short service life and easy pollution to silicon wafers in the conventional silicon wafer correction mechanism. The mechanism comprises a rack, a transmission shaft, a driving assembly, a cylindrical cam, correction clamps and a linkage piece, the driving assembly drives the transmission shaft to rotate so as to drive the cylindrical cam to rotate, and then the correction clamps get close to each other or get away from each other under the cooperation of the cylindrical cam and the linkage piece. According to the mechanism, reciprocating motion of the correcting clamp can be achieved through one-way rotation of the cylindrical cam, the correcting clamp can accurately reach the preset position, and meanwhile the correcting efficiency can be improved; the cylindrical cam and the linkage piece of the mechanism are in hard contact, abrasion is small, and the service life can be guaranteed; and meanwhile, dust caused by abrasion is avoided, so that the silicon wafer can be prevented from being polluted.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer straightening mechanism technology, and in particular to a silicon wafer straightening mechanism driven by a cylindrical cam. Background Technology

[0002] The silicon wafer straightening mechanism is an important component of photovoltaic automation equipment. It is widely used on the silicon wafer transport track of various automated equipment. Its function is to straighten the silicon wafers during transport by using clamps to ensure that the silicon wafers do not get stuck or blocked when entering the buffer, basket, or other carriers.

[0003] The existing silicon wafer straightening mechanism includes a DC stepper motor, a synchronous belt, pulleys, and straightening fixtures. The output shaft of the DC stepper motor is arranged vertically. The synchronous belt is wound around two pulleys, one of which is fixedly sleeved on the output shaft of the DC stepper motor. There are two straightening fixtures, which are respectively fixed on two straight sections of the synchronous belt. The rotation of the output shaft of the DC stepper motor drives the pulleys to rotate, thereby driving the synchronous belt to run. This causes the two straightening fixtures to move closer to each other to straighten the silicon wafer or move further apart to avoid transporting the silicon wafer. This structure has the following drawbacks: First, the approach or distance between the two straightening fixtures is achieved by the forward and reverse rotation of the DC stepper motor. Frequent forward and reverse rotation can cause the DC stepper motor to fail due to missed steps and error accumulation, affecting the straightening accuracy and preventing the straightening fixtures from reaching the preset position. This results in the two straightening fixtures being too far apart to straighten or too close to crush the silicon wafer. In addition, the speed must start from zero during both forward and reverse rotations, which takes a long time for the straightening process and has low straightening efficiency, failing to meet the cycle time requirements of high-production scenarios. Second, the synchronous belt needs to use a toothed belt to drive the movement of the straightening fixtures, and the synchronous belt needs to be arranged horizontally. Due to the inherent characteristics of the toothed belt and the lack of a fixed reference, the toothed belt is prone to frictional contact with components such as the pulley edge, resulting in rapid wear, short service life, and dust generated by wear that can easily contaminate the silicon wafer. Utility Model Content

[0004] To overcome the technical defects of existing silicon wafer straightening mechanisms, such as low straightening accuracy, low straightening efficiency, short lifespan, and easy contamination of silicon wafers, this utility model provides a cylindrical cam-driven silicon wafer straightening mechanism.

[0005] The cylindrical cam-driven silicon wafer straightening mechanism provided by this utility model includes:

[0006] frame;

[0007] A drive shaft, which is arranged in the left-right direction and rotatably mounted on the frame;

[0008] A drive assembly, which is mounted on the frame and used to drive the drive shaft to rotate;

[0009] Two cylindrical cams are provided and fixedly sleeved at both ends of the transmission shaft. The two cylindrical cams are symmetrically distributed on the left and right, and a curved track is formed on the circumference of each cylindrical cam.

[0010] The straightening fixture has two sets corresponding to the cylindrical cam and is symmetrically distributed on the left and right. Each set of straightening fixtures is mounted on the frame and can slide in the left and right direction.

[0011] The linkage component has two corresponding correction fixtures. The linkage component is fixedly connected to the corresponding correction fixture and is movably engaged on the curved track of the corresponding cylindrical cam.

[0012] Optionally, the rack includes:

[0013] The uprights are provided in two sections, one on the left and one on the right.

[0014] The crossbeams are lapped and fixed to the two vertical plates to form a gantry support structure.

[0015] The drive shaft is located directly below the crossbeam and its two ends are rotatably mounted on two vertical plates respectively. The straightening fixture is slidably mounted on the crossbeam. The upper end of the linkage is fixedly connected to the corresponding straightening fixture and the lower end is movably engaged on the curved track of the corresponding cylindrical cam.

[0016] Optionally, the drive shaft extends through the vertical plate to form an extended drive end, and the drive assembly includes:

[0017] A rotary motor, the housing of which is fixed on the frame and the output shaft is arranged in the left-right direction;

[0018] The drive pulley is fixedly sleeved on the output shaft of the rotary motor;

[0019] The driven pulley is fixedly sleeved on the extended drive end;

[0020] A timing belt is wound around the driving pulley and the driven pulley.

[0021] Optionally, the drive shaft passes through the upright plate to form an extended detection end. A metal baffle is fixed on the extended detection end. A slotted photoelectric sensor is installed on the upright plate corresponding to the extended detection end. The metal baffle can be placed inside the slotted photoelectric sensor by rotating the drive shaft to obtain the origin position signal. When at the origin position, the two correction fixtures are furthest apart. The slotted photoelectric sensor is communicatively connected to the drive assembly to control the drive assembly to stop operating when it receives the origin position signal.

[0022] Optionally, the curved track is elliptical.

[0023] Optionally, a curved groove is formed on the circumferential surface of the cylindrical cam to form the curved trajectory, and a rotating component is installed on the side of the linkage near the cylindrical cam. The rotating component is placed in the curved groove and its rotation axis is perpendicular to the transmission shaft.

[0024] Optionally, the rotating component is a bolt-type roller bearing.

[0025] Optionally, the corrective clamp includes:

[0026] A sliding seat, which is slidably mounted on the frame;

[0027] A strip-shaped mounting plate, which is fixed on the sliding seat and arranged in the front-to-back direction;

[0028] At least two straightening rollers are provided and are spaced apart in the front-to-back direction on the strip mounting plate. The straightening rollers extend out of the strip plate to contact the silicon wafer.

[0029] Optionally, the left-right and front-back positions of the strip mounting plate relative to the sliding seat are adjustable.

[0030] Optionally, the strip mounting plate has multiple strip holes spaced apart in the front-to-back direction, each strip hole being arranged in the left-to-right direction, and the strip mounting plate is fixed to the sliding seat by bolts passing through the strip holes.

[0031] The technical solution provided by this utility model has the following advantages compared with the prior art:

[0032] 1) This mechanism achieves the reciprocating motion of the straightening fixture through the unidirectional rotation of the cylindrical cam. The limit position of the reciprocating motion is determined by the curved track of the cylindrical cam. Therefore, through structural design, the straightening fixture can accurately reach the preset position, avoiding the situation where the two straightening fixtures are too far apart to straighten or too close to crush the silicon wafer. At the same time, the rotation speed does not need to drop to zero to change direction during the whole process, so the straightening efficiency can be improved, thereby meeting the cycle time requirements of high-production scenarios.

[0033] 2) The cylindrical cam and the linkage of this mechanism have a hard contact, resulting in less wear and ensuring service life; at the same time, there will be no dust caused by wear, so it can avoid contamination of silicon wafers. Attached Figure Description

[0034] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the present invention and, together with the description, serve to explain the principles of the present invention.

[0035] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a first-view perspective perspective view of the silicon wafer correction mechanism in an embodiment of the present invention;

[0037] Figure 2 This is a second-view perspective perspective view of the silicon wafer correction mechanism in an embodiment of the present invention;

[0038] Figure 3 This is an assembly drawing showing the transmission shaft and related components in an embodiment of the present invention;

[0039] Figure 4 This is an assembly diagram showing the straightening fixture and linkage components in an embodiment of this utility model.

[0040] In the picture:

[0041] 1. Frame; 11. Vertical plate; 12. Crossbeam; 13. Mounting plate; 2. Drive shaft; 21. Extended drive end; 22. Extended detection end; 23. Rotary bearing; 24. Shoulder; 25. Retaining ring; 3. Drive assembly; 31. Rotary motor; 32. Drive pulley; 33. Driven pulley; 34. Synchronous belt; 4. Cylindrical cam; 41. Curved track; 5. Correcting fixture; 51. Sliding seat; 52. Strip mounting plate; 521. Strip hole; 53. Correcting wheel; 6. Linkage component; 61. Rotating component; 71. Metal baffle; 72. Slotted photoelectric sensor. Detailed Implementation

[0042] To better understand the above-mentioned objectives, features, and advantages of this utility model, the solution of this utility model will be further described below. It should be noted that, unless otherwise specified, the embodiments of this utility model and the features thereof can be combined with each other.

[0043] Many specific details are set forth in the following description in order to provide a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein; obviously, the embodiments in the specification are only some embodiments of the present invention, and not all embodiments.

[0044] The following is combined Figures 1 to 4 The specific embodiments of this utility model will be described in detail below.

[0045] This embodiment provides a silicon wafer straightening mechanism driven by a cylindrical cam, including a frame 1, a transmission shaft 2, a drive assembly 3, a cylindrical cam 4, a straightening fixture 5, and a linkage 6.

[0046] Among them, rack 1 is mainly used to provide hardware support for other components.

[0047] Specifically, the frame 1 includes upright plates 11 and crossbeams 12. There are two upright plates 11, which are distributed on the left and right. The crossbeams 12 are overlapped and fixed on the two upright plates 11 to form a gantry support structure.

[0048] The drive shaft 2 is arranged in the left-right direction and rotatably mounted on the frame 1.

[0049] Specifically, the drive shaft 2 is located directly below the crossbeam 12, with both ends rotatably mounted on two vertical plates 11. One end of the drive shaft 2 extends outward from the vertical plate 11 to form an extended drive end 21, and the other end extends outward from the vertical plate 11 to form an extended detection end 22. The extended drive end 21 is used to connect to the drive assembly 3, and the extended detection end is used to install detection-related structures, resulting in a more rational spatial arrangement. Of course, the extended drive end 21 and the extended detection end 22 can also be placed on the same side.

[0050] More specifically, the drive shaft 2 is mounted inside the vertical plate 11 via a rotating bearing 23 to make the rotation smoother and reduce rotational resistance.

[0051] The drive assembly 3 is mounted on the frame 1 and is used to drive the drive shaft 2 to rotate.

[0052] Specifically, the drive assembly 3 includes a rotary motor 31, a drive pulley 32, a driven pulley 33, and a synchronous belt 34. The housing of the rotary motor 31 is fixed on the frame 1, and its output shaft is arranged in the left-right direction. The drive pulley 32 is fixedly sleeved on the output shaft of the rotary motor 31, and the driven pulley 33 is fixedly sleeved on the extended drive end 21. The synchronous belt 34 is wound around the drive pulley 32 and the driven pulley 33. During operation, the output shaft of the rotary motor 31 rotates, driving the drive pulley 32 to rotate. The drive pulley 32 drives the driven pulley 33 to rotate via the synchronous belt 34, thereby driving the transmission shaft 2 to rotate.

[0053] More specifically, a mounting plate 13 is fixed below the upright plate 11 corresponding to the extended drive end 21. The housing of the rotary motor 31 is fixed on the mounting plate 13, and the output shaft of the rotary motor 31 extends out of the mounting plate 13 to form an extended section. The drive pulley 32 is fixedly sleeved on the extended section.

[0054] Preferably, the rotary motor 31 is a DC stepper motor.

[0055] It should be noted that although a synchronous belt 34 is also present in this mechanism, the synchronous belt 34 is used to drive the drive shaft 2 to rotate and does not directly drive the movement of the straightening fixture 5. Therefore, even if the rotary motor 31 fails, it will only affect the origin position of the straightening fixture 5 and will not affect the straightening accuracy. At the same time, since the synchronous belt 34 is only used to realize the transmission between the rotary motor 31 and the drive shaft 2, the synchronous belt 34 can be designed to be shorter, with a smaller friction area, and is arranged vertically, making it less likely to rub against the pulley edge. In addition, the synchronous belt 34 is located below the straightening fixture 5 and at a greater distance, so even if dust is generated by friction, the impact on the silicon wafer is minimal and can be ignored.

[0056] Among them, there are two cylindrical cams 4, which are respectively fixedly sleeved on the two ends of the transmission shaft 2. The two cylindrical cams 4 are symmetrically distributed on the left and right, and a curved track 41 is formed on the circumference of each cylindrical cam 4.

[0057] It is easy to understand that the cylindrical cam 4 is a mature structure in the field, that is, a structure formed by opening curved grooves or curved protrusions on the cylindrical surface, and the curved grooves or curved protrusions form the aforementioned curved track 41. For example, in this embodiment, curved grooves are opened on the circumferential surface of the cylindrical cam 4 to form a curved trajectory.

[0058] Specifically, the curved track 41 is elliptical, forming a peak and a trough, with the peak and trough distributed at a 180° central angle. Rotating the drive shaft 2 by 180° achieves the alternation of the peak and trough, thus alternating the corrective and avoidance actions of the straightening fixture 5, making the movement of the straightening fixture 5 smoother. Of course, the curved track 41 can also be designed in an irregular or other curved shape, but regardless of the shape, it will have peaks and troughs, thus enabling the reciprocating motion of the straightening fixture 5. The actual design can be determined based on the required number of corrections and the adaptability of the movement requirements of the straightening fixture 5.

[0059] Specifically, the drive shaft 2 is designed as a stepped shaft, and the cylindrical cam 4 is sleeved on the stepped shaft. One end of the cam is positioned axially by a shoulder 24, and the other end is positioned by a retaining ring 25 abutting against the inner ring of the rotating bearing 23. The circumferential direction is positioned by a key. Of course, the cylindrical cam 4 can also be directly interference-fitted onto the drive shaft 2.

[0060] Among them, the straightening fixture 5 is provided in two sets corresponding to the cylindrical cam 4 and is symmetrically distributed on the left and right. Each set of straightening fixture 5 is installed on the frame 1 and can slide in the left and right direction.

[0061] Specifically, the straightening clamp 5 is slidably mounted on the crossbeam 12.

[0062] More specifically, the crossbeam 12 is fixed with guide rails arranged on the left and right, and the straightening clamp 5 is slidably installed on the guide rails.

[0063] Specifically, the straightening fixture 5 includes a sliding seat 51, a strip mounting plate 52, and straightening wheels 53. The sliding seat 51 is slidably mounted on the frame 1. The strip mounting plate 52 is fixed on the sliding seat 51 and arranged in the front-to-back direction. There are at least two straightening wheels 53, which are spaced apart on the strip mounting plate 52 in the front-to-back direction. The straightening wheels 53 extend out of the strip plate to contact the silicon wafer.

[0064] Furthermore, the left-right and front-back positions of the strip mounting plate 52 relative to the sliding seat 51 are adjustable. Adjusting the left-right position allows for the alignment of silicon wafers of different specifications, while adjusting the front-back position allows for the alignment of different positions on the silicon wafer.

[0065] Specifically, the strip mounting plate 52 has multiple strip holes 521 spaced apart along the front-to-back direction, and each strip hole 521 is arranged along the left-to-right direction. The strip mounting plate 52 is fixed to the sliding seat 51 by bolts passing through the strip holes 521. The front-to-back position can be adjusted by installing bolts in the strip holes 521 at different positions, and the left-to-right position can be adjusted by installing bolts at different positions in the strip holes 521.

[0066] Among them, there are two linkage components 6 corresponding to the correction fixture 5. The linkage component 6 is fixedly connected to the corresponding correction fixture 5 and is movably engaged on the curved track 41 of the corresponding cylindrical cam 4.

[0067] It is easy to understand that the so-called active locking means that the linkage 6 can generate relative movement with the curved track 41, but will not detach from the curved track 41.

[0068] Specifically, the upper end of the linkage 6 is fixedly connected to the corresponding straightening clamp 5, and the lower end is movably engaged on the curved track 41 of the corresponding cylindrical cam 4.

[0069] Specifically, a rotating component 61 is mounted on the side of the linkage 6 near the cylindrical cam 4. The rotating component 61 is placed in the curved groove and its axis of rotation is perpendicular to the transmission shaft 2. Since the cylindrical cam 4 and the rotating component 61 will generate relative motion when linked, the rolling contact between the rotating component 61 and the groove wall of the curved groove can reduce frictional resistance and reduce wear by replacing the sliding contact.

[0070] More specifically, the rotating component 61 is a bolt-type roller bearing. Bolt-type roller bearings are a mature structure in this field, that is, a structure formed by replacing the inner ring of a regular bearing with a bolt shaft. Installation is completed by passing the bolt shaft through the vertical plate 11 and then locking it with a nut.

[0071] Furthermore, in this embodiment, a metal baffle 71 is fixed on the extended detection end 22, and a slotted photoelectric sensor 72 is installed on the vertical plate 11 corresponding to the extended detection end 22. The metal baffle 71 can be rotated by the drive shaft 2 to be placed inside the slotted photoelectric sensor 72 to obtain the origin position signal. At the origin position, the two correction fixtures 5 are furthest apart. The slotted photoelectric sensor 72 is communicatively connected to the drive assembly 3 to control the drive assembly 3 to stop its operation when it receives the origin position signal. During operation, the drive shaft 2 rotates to drive the correction fixtures 5 to correct the silicon wafer. After correction, when the drive shaft 2 drives the metal baffle 71 to rotate into the slotted photoelectric sensor 72, the slotted photoelectric sensor 72 receives the origin position signal and controls the drive assembly 3 to stop its operation, keeping the two correction fixtures 5 at the furthest apart position, waiting for the next silicon wafer to arrive. This setting can re-determine the origin each time correction is performed, avoiding the deviation of the correction fixtures 5 from the origin position due to the failure of the drive assembly 3.

[0072] It is easy to understand that the slot-shaped photoelectric sensor 72 is a mature structure in the field. That is, a light emitter and a light receiver are mounted face to face on the two side walls of a slot to form a slot-shaped photoelectric sensor. The emitter can emit infrared light or visible light, and the light receiver can receive the light when there is no obstruction. However, when an obstruction (i.e., the metal baffle 71 in this embodiment) passes through the slot, the light is blocked, and the photoelectric switch is activated, outputting a switch control signal to cut off or connect the load current, thereby completing a control action.

[0073] It should be noted that in actual use, the slotted photoelectric sensor 72 needs to be used in conjunction with a PLC or other controller to complete the control action. That is, after the slotted photoelectric sensor 72 receives the signal, it sends it to the controller, and the controller controls the drive component 3 to stop operating. This is something that those skilled in the art can easily design.

[0074] It should be noted that the start command of the drive component 3 can be set according to the silicon wafer transmission cycle. The drive component 3 is started when the silicon wafer is about to be in place. Specifically, the start can be set by the program with a delay or by the sensor. The stop command of the drive component 3 is controlled by the slotted photoelectric sensor 72.

[0075] The working principle of the cylindrical cam-driven silicon wafer straightening mechanism in this embodiment is as follows:

[0076] The drive assembly 3 starts, driving the transmission shaft 2 to rotate, which in turn drives the cylindrical cam 4 to rotate. Guided by the curved track 41, the linkage 6 moves left and right along the curved track 41, driving the straightening fixture 5 to move left and right. Since the two sets of cylindrical cams 4 are arranged symmetrically, the two sets of straightening fixtures 5 move in opposite directions. The two sets of straightening fixtures 5 are driven to move closer to each other, and when they are closest, they straighten the silicon wafer. After the straightening is completed, the drive assembly 3 continues to operate, and the two sets of straightening fixtures 5 move away from each other under the action of the curved track 41. When they are furthest apart, they move back to the origin position. At this time, the metal baffle 71 rotates into the slotted photoelectric sensor 72. The slotted photoelectric sensor 72 receives the origin position signal and outputs a stop command to control the drive assembly 3 to stop moving. The two sets of straightening fixtures 5 remain at the origin position. When the next silicon wafer is about to reach the straightening position, the drive assembly 3 receives a start command and starts, repeating the above process, thus completing the automatic straightening of each silicon wafer.

[0077] The above are merely specific embodiments of this utility model, enabling those skilled in the art to understand or implement this utility model. Although detailed descriptions have been provided with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments, and they should all be covered by the protection scope of the claims.

Claims

1. A cylindrical cam-driven silicon wafer straightening mechanism, characterized in that, include: Rack (1); A drive shaft (2) is arranged in the left-right direction and rotatably mounted on the frame (1); A drive assembly (3) is mounted on the frame (1) and is used to drive the drive shaft (2) to rotate; Two cylindrical cams (4) are provided and are respectively fixedly sleeved on the two ends of the transmission shaft (2). The two cylindrical cams (4) are symmetrically distributed on the left and right, and a curved track (41) is formed on the circumference of each cylindrical cam (4). The straightening fixture (5) has two sets of corresponding cylindrical cams (4) and is symmetrically distributed on the left and right. Each set of straightening fixtures (5) is installed on the frame (1) and can slide in the left and right direction. The linkage (6) has two corresponding correction fixtures (5). The linkage (6) is fixedly connected to the corresponding correction fixture (5) and is movably engaged on the curved track (41) of the corresponding cylindrical cam (4).

2. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 1, characterized in that, The rack (1) includes: The upright plate (11) has two parts, which are distributed on the left and right sides; A crossbeam (12) is lapped and fixed on two vertical plates (11) to form a gantry support structure; The drive shaft (2) is located directly below the crossbeam (12) and its two ends are rotatably mounted on the two vertical plates (11). The straightening clamp (5) is slidably mounted on the crossbeam (12). The upper end of the linkage (6) is fixedly connected to the corresponding straightening clamp (5) and the lower end is movably engaged on the curved track (41) of the corresponding cylindrical cam (4).

3. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 2, characterized in that, The drive shaft (2) passes through the vertical plate (11) to form an extended drive end (21), and the drive assembly (3) includes: A rotary motor (31) has its housing fixed on the frame (1) and its output shaft arranged in the left-right direction; The drive pulley (32) is fixedly sleeved on the output shaft of the rotary motor (31); Driven pulley (33) is fixedly sleeved on the extended drive end (21); A timing belt (34) is wound around the driving pulley (32) and the driven pulley (33).

4. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 2 or 3, characterized in that, The drive shaft (2) passes through the upright plate (11) to form an extended detection end (22). A metal baffle (71) is fixed on the extended detection end (22). A slotted photoelectric sensor (72) is installed on the upright plate (11) corresponding to the extended detection end (22). The metal baffle (71) can be placed inside the slotted photoelectric sensor (72) by rotating the drive shaft (2) to obtain the origin position signal. When the origin position is reached, the two correction fixtures (5) are furthest apart. The slotted photoelectric sensor (72) is connected to the drive assembly (3) to control the drive assembly (3) to stop operating when the origin position signal is received.

5. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 1, characterized in that, The curved track (41) is elliptical.

6. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 1, characterized in that, The cylindrical cam (4) has a curved groove on its circumferential surface to form the curved trajectory. The linkage (6) has a rotating component (61) installed on the side of the cylindrical cam (4). The rotating component (61) is placed in the curved groove and its rotation axis is perpendicular to the transmission shaft (2).

7. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 6, characterized in that, The rotating component (61) is a bolt-type roller bearing.

8. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 1, characterized in that, The corrective clamp (5) includes: A sliding seat (51) is slidably mounted on the frame (1); A strip mounting plate (52) is fixed on the sliding seat (51) and arranged in the front-back direction; At least two straightening wheels (53) are provided and are spaced apart on the strip mounting plate (52) in the front-rear direction. The straightening wheels (53) extend out of the strip plate to contact the silicon wafer.

9. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 8, characterized in that, The left-right and front-back positions of the strip mounting plate (52) relative to the sliding seat (51) are adjustable.

10. The cylindrical cam-driven silicon wafer straightening mechanism according to claim 9, characterized in that, The strip mounting plate (52) has multiple strip holes (521) spaced apart in the front-to-back direction. Each strip hole (521) is arranged in the left-to-right direction. The strip mounting plate (52) is fixed to the sliding seat (51) by bolts passing through the strip holes (521).

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