Double-sided plane grinding and polishing machine

Abstract

The utility model discloses a double-sided plane grinding and polishing machine, which relates to the technical field of grinding and polishing equipment, aims to solve the technical problem that ultrathin or fragile products are easily damaged by the current double-sided lapping machine, and comprises a double-sided lapping machine, an outer matching ring, a lower grinding disc, a butt joint seat and a wandering star wheel. The wandering star wheel is composed of the hollowed-out ring and the butt joint gear ring, the reinforcing frame is arranged in the hollowed-out ring, on the premise that the strength of the wandering star wheel is guaranteed, unnecessary materials are removed, the mass of the wandering star wheel is reduced, and therefore inertia is reduced, meanwhile, a composite buffering structure is arranged in the wandering star wheel, and the service life of the wandering star wheel is prolonged. The first buffer layer of the composite buffer structure is made of elastic rubber and can absorb most impact force generated by inertia of the wandering star wheel, the damping layer is made of viscoelastic damping materials and can effectively restrain transmission of vibration, and the second buffer layer is made of silica gel and further buffers and disperses acting force on a product. And the phenomenon that ultrathin or fragile products are damaged in the machining process can be effectively avoided.

Description

Technical Field

[0001] This utility model relates to the field of grinding and polishing equipment technology, and more specifically, to a double-sided flat grinding and polishing machine. Background Technology

[0002] Double-sided surface grinding and polishing machines, also known as double-sided precision grinding machines, are mainly used for precision double-sided processing of parts such as silicon wafers, quartz crystals, glass, ceramics, sapphire, gallium arsenide, and lithium niobate. They are also suitable for precision double-sided processing of valve plates, valve discs, optical fibers, computer storage disks, and other sheet-like metal and non-metal parts. The main feature of this equipment is four-drive double-sided precision grinding, with the upper and lower diamond grinding discs rotating in opposite directions. The workpiece undergoes a planetary motion within the carrier, which involves both revolution and rotation. The upper and lower surfaces are ground uniformly at the same time, and the rotation direction of the planetary wheel can be changed.

[0003] In existing double-sided polishing machines, when polishing ultra-thin or fragile products on both sides, the planetary wheel is a component that rotates at high speed and drives the product's movement. Due to its mass and rotational speed, according to the principle of inertia, an object has the property of maintaining its original state of motion. When the planetary wheel starts, stops, or its speed changes, it will resist the change in its state of motion due to its own inertia. This inertia will impact the product and may cause damage. In view of this, we propose a double-sided planar grinding and polishing machine. Utility Model Content

[0004] The purpose of this utility model is to overcome the shortcomings of the existing technology, adapt to the needs of reality, and provide a double-sided flat grinding and polishing machine to solve the technical problem that current double-sided fine grinding machines are prone to damaging ultra-thin or fragile products.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a double-sided surface grinding and polishing machine, comprising a double-sided precision grinding machine, an outer mating ring, a lower grinding disc, a docking seat, and a planetary wheel. The outer mating ring, the lower grinding disc, the docking seat, and the planetary wheel are all arranged on the double-sided precision grinding machine base. The docking seat is located inside the outer mating ring and is coaxial with the outer mating ring. The lower grinding disc is located between the outer mating ring and the docking seat. The planetary wheel is placed on the lower grinding disc. The planetary wheel includes a hollow ring and a docking toothed ring. The docking toothed ring is arranged outside the hollow ring. A composite buffer structure is arranged inside the hollow ring. The composite buffer structure consists of a first buffer layer, a damping layer, and a second buffer layer from the outside to the inside.

[0006] The second buffer layer is divided into an outer ring and an inner ring. The outer ring has a honeycomb structure, and the inner ring has a corrugated structure.

[0007] This utility model's planetary wheel is composed of a hollow ring and a mating gear ring, with a reinforcing frame set in the hollow ring. While ensuring the planetary wheel's strength, unnecessary materials are removed, reducing its mass and thus inertia. Simultaneously, a composite buffer structure is incorporated within the planetary wheel. The first buffer layer is made of elastic rubber, absorbing most of the impact force generated by the planetary wheel's inertia. The damping layer is made of viscoelastic damping material, effectively suppressing vibration propagation. The second buffer layer is made of silicone, further buffering and dispersing the force on the product, preventing damage during the processing of ultra-thin or fragile products. The second buffer layer of this utility model consists of an outer ring and an inner ring. The outer ring has a honeycomb structure, and the inner ring has a wave-like structure. With multiple undulations and bends, these undulations can undergo elastic deformation when subjected to external impact, increasing the contact time and contact area between the cushioning pad and the product. According to the momentum theorem, under a certain impulse, extending the action time of the force can reduce the average force, thereby buffering the impact force. Moreover, the wave-like structure can disperse the impact force along the shape of the wave. The honeycomb structure is a highly efficient energy absorption structure, and it can evenly distribute the impact force across the entire honeycomb plane. Therefore, the wave-like structure and the hexagonal honeycomb structure can better buffer and diffuse the impact force, thereby further improving the protection effect for ultra-thin or fragile products and preventing damage during the processing of ultra-thin or fragile products.

[0008] Preferably, the inner wall of the outer mating ring is provided with a mating gear ring, and the mating seat is provided with a drive gear disk, wherein the mating gear ring and the drive gear disk mesh with the mating gear ring.

[0009] Preferably, a number of reinforcing frames are arranged equidistantly inside the hollow ring, and the reinforcing frames are respectively connected to the arc-shaped shields on both sides inside the hollow ring.

[0010] Preferably, the reinforcing frame consists of two sets of X-braces, and both sets of X-braces are arranged at a 45-degree angle.

[0011] Preferably, the honeycomb holes of the outer ring are hexagonal.

[0012] Preferably, the first buffer layer is made of elastic rubber, the damping layer is made of viscoelastic damping material, and the second buffer layer is made of silicone.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. The planetary wheel of this utility model is composed of a hollow ring and a mating toothed ring, and a reinforcing frame is set in the hollow ring. While ensuring the strength of the planetary wheel, unnecessary materials are removed to reduce the mass of the planetary wheel, thereby reducing inertia. At the same time, a composite buffer structure is set in the planetary wheel. The first buffer layer of the composite buffer structure is made of elastic rubber, which can absorb most of the impact force generated by the inertia of the planetary wheel. The damping layer is made of viscoelastic damping material, which can effectively suppress the propagation of vibration. The second buffer layer is made of silicone, which further buffers and disperses the force on the product. This can avoid damage during the processing of ultra-thin or fragile products, and solve the technical problem that current double-sided precision grinding machines are prone to damaging ultra-thin or fragile products. Therefore, this utility model has the advantage of not easily damaging ultra-thin or fragile products during processing.

[0015] 2. The second buffer layer of this utility model is divided into an outer ring and an inner ring. The outer ring has a honeycomb structure, and the inner ring has a wave-like structure. The wave-like structure has multiple undulations and bends. When subjected to external impact, these undulations can undergo elastic deformation, increasing the contact time and contact area between the buffer pad and the product. According to the momentum theorem, under a certain impulse, extending the action time of the force can reduce the average force, thereby playing a role in buffering the impact force. Moreover, the wave-like structure can disperse the impact force along the shape of the wave. The honeycomb structure is a highly efficient energy absorption structure, and it can evenly distribute the impact force across the entire honeycomb plane. Therefore, the wave-like structure and the hexagonal honeycomb structure can better buffer and diffuse the impact force, thereby further improving the protection effect for ultra-thin or fragile products and preventing damage to ultra-thin or fragile products during processing. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the planetary wheel structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the cross-sectional structure of the planetary wheel of this utility model;

[0019] Figure 4 This is a schematic diagram of the reinforcing frame structure of this utility model;

[0020] Figure 5 This is a schematic diagram of the second buffer layer structure of this utility model;

[0021] Figure 6 For the present utility model Figure 5 Enlarged structural diagram at point A in the middle.

[0022] Explanation of the labels in the diagram:

[0023] 1. Double-sided precision grinding machine; 2. Outer mating ring; 201. Mating gear ring; 3. Lower grinding disc; 4. Dating seat; 401. Drive gear disc; 5. Planetary wheel; 501. Hollowed-out ring; 502. Dating gear ring; 503. Reinforcing frame; 6. Composite buffer structure; 601. First buffer layer; 602. Damping layer; 603. Second buffer layer; 604. Outer ring; 605. Inner ring. Detailed Implementation

[0024] like Figures 1 to 6 As shown, this utility model relates to a double-sided surface grinding and polishing machine, including a double-sided precision grinding machine 1, an outer mating ring 2, a lower grinding disc 3, a docking seat 4, and a planetary wheel 5. The outer mating ring 2, the lower grinding disc 3, the docking seat 4, and the planetary wheel 5 are all arranged on the base of the double-sided precision grinding machine 1. The docking seat 4 is located inside the outer mating ring 2 and is coaxial with the outer mating ring 2. The lower grinding disc 3 is located between the outer mating ring 2 and the docking seat 4. The planetary wheel 5 is placed on the lower grinding disc 3. The planetary wheel 5 includes a hollow ring 501 and a docking toothed ring 502. The docking toothed ring 502 is arranged outside the hollow ring 501. The hollow ring 501 is arranged with a composite toothed ring inside. The composite buffer structure 6 consists of a first buffer layer 601, a damping layer 602, and a second buffer layer 603, arranged from the outside to the inside. A mating gear ring 201 is arranged on the inner wall of the outer mating ring 2, and a drive gear disk 401 is arranged on the mating seat 4. The mating gear ring 201 meshes with the drive gear disk 401 and the mating gear ring 502. Several sets of reinforcing frames 503 are arranged at equal intervals inside the hollow ring 501, and the reinforcing frames 503 are respectively connected to the arc-shaped shields on both sides inside the hollow ring 501. The first buffer layer 601 is made of elastic rubber, the damping layer 602 is made of viscoelastic damping material, and the second buffer layer 603 is made of silicone.

[0025] When processing ultra-thin or fragile products, the product is directly placed into the planetary wheel 5, and then the double-sided grinding machine 1 drives the upper grinding disc to descend, which works with the lower grinding disc 3 to press the product together. The upper grinding disc will also be inserted into the docking seat 4. At this time, the double-sided grinding machine 1 controls the docking seat 4 to rotate forward, and the lower grinding disc 3 to rotate in reverse. The docking seat 4 drives the upper grinding disc to rotate forward. At this time, with the cooperation of the drive gear disc 401 and the mating gear ring 201, the product makes a planetary motion that both revolves and rotates within the carrier. Then, the lower grinding disc 3 and the upper grinding disc simultaneously achieve double-sided grinding and polishing of the product.

[0026] Because the hollow ring 501 and the mating toothed ring 502 form the planetary wheel 5, and a reinforcing frame 503 is set inside the hollow ring 501, unnecessary materials are removed and the mass of the planetary wheel 5 is reduced while ensuring the strength of the planetary wheel 5, thereby reducing inertia. At the same time, the first buffer layer 601, made of elastic rubber, inside the planetary wheel 5 can absorb most of the impact force generated by the inertia of the planetary wheel 5. The damping layer 602, made of viscoelastic damping material, can effectively suppress the propagation of vibration. The second buffer layer 603, made of silicone, can further buffer and disperse the force on the product, which can prevent damage during the processing of ultra-thin or fragile products.

[0027] Specifically, the reinforcing frame 503 consists of two sets of X-braces, both of which are arranged at a 45-degree angle. The two sets of X-braces arranged at a 45-degree angle can provide multi-point stress reinforcement to the inner wall of the hollow ring 501, ensuring the overall strength of the hollow ring 501.

[0028] In an embodiment of this utility model, the second buffer layer 603 is divided into an outer ring 604 and an inner ring 605. The outer ring 604 has a honeycomb structure, and the inner ring 605 has a corrugated structure. The honeycomb holes of the outer ring 604 are hexagonal.

[0029] The corrugated inner ring 605 has multiple undulations and bends. When subjected to external impact, these undulations can undergo elastic deformation, increasing the contact time and area between the second buffer layer 603 and the product. According to the momentum theorem, under a constant impulse, extending the action time of the force can reduce the average force, thereby buffering the impact. Moreover, when the impact force acts on the peaks or troughs of the wave, the force will propagate along the curved surface of the wave to adjacent parts, allowing the impact force to be diffused over a larger area, preventing the impact force from concentrating on a certain point or a small area, thus reducing the local pressure on the product and lowering the risk of product damage. The hexagonal honeycomb structure of the outer ring 604... To efficiently absorb energy, when subjected to external force, the honeycomb cells will be squeezed and deformed, absorbing energy through the bending and twisting of the cell walls. This structure can provide a large amount of deformation in a small space, thus effectively buffering the impact force. Due to the regular arrangement and interconnection of the honeycomb cells, the impact force is dispersed to each cell when it propagates in the honeycomb structure, so that the entire second buffer layer 603 can bear the impact force evenly, avoiding local stress concentration. At the same time, the three-dimensional characteristics of the honeycomb structure can also diffuse the impact force to a certain extent in the direction perpendicular to the surface of the buffer pad, further improving the buffering effect of the impact force, thus achieving a better protection effect for ultra-thin or fragile products.

[0030] Working principle: This embodiment provides a double-sided planar grinding and polishing machine. First, when processing ultra-thin or fragile products, the product is directly placed into the planetary wheel 5. Then, the double-sided grinding machine 1 drives the upper grinding disc to descend, which works with the lower grinding disc 3 to press the product together. The upper grinding disc will also be inserted into the docking seat 4. At this time, the double-sided grinding machine 1 controls the docking seat 4 to rotate forward, and the lower grinding disc 3 to rotate in reverse. The docking seat 4 drives the upper grinding disc to rotate forward. At this time, with the cooperation of the drive gear disc 401 and the mating gear ring 201, the product makes a planetary motion that both revolves and rotates within the carrier. Then, the lower grinding disc 3 and the upper grinding disc simultaneously achieve double-sided grinding and polishing of the product.

[0031] Secondly, since the hollow ring 501 and the mating toothed ring 502 form the planetary wheel 5, and a reinforcing frame 503 is set inside the hollow ring 501, unnecessary materials are removed and the mass of the planetary wheel 5 is reduced while ensuring the strength of the planetary wheel 5, thereby reducing inertia. At the same time, the first buffer layer 601, made of elastic rubber, inside the planetary wheel 5 can absorb most of the impact force generated by the planetary wheel 5 due to inertia. The damping layer 602, made of viscoelastic damping material, can effectively suppress the propagation of vibration. The second buffer layer 603, made of silicone, can further buffer and disperse the force on the product, which can prevent damage during the processing of ultra-thin or fragile products.

[0032] Finally, the inner ring 605 of the corrugated structure has multiple undulations and bends. When subjected to external impact, these undulations can undergo elastic deformation, increasing the contact time and contact area between the second buffer layer 603 and the product. According to the momentum theorem, under a constant impulse, extending the action time of the force can reduce the average force, thereby buffering the impact force. Moreover, when the impact force acts on the peaks or troughs of the wave, the force will propagate along the curved surface of the wave to adjacent parts, allowing the impact force to be diffused over a larger area, avoiding the impact force from concentrating on a certain point or a small area, thus reducing the local pressure on the product and lowering the risk of product damage. The outer ring 604 of the hexagonal honeycomb structure... It can efficiently absorb energy. When subjected to external force, the honeycomb cells will be squeezed and deformed, absorbing energy through the bending and twisting of the cell walls. This structure can provide a large amount of deformation in a small space, thus effectively buffering the impact force. Due to the regular arrangement and interconnection of the honeycomb cells, the impact force is dispersed to each cell when it propagates in the honeycomb structure, so that the entire second buffer layer 603 can bear the impact force evenly and avoid local stress concentration. At the same time, the three-dimensional characteristics of the honeycomb structure can also diffuse the impact force to a certain extent in the direction perpendicular to the surface of the buffer pad, further improving the buffering effect of the impact force, thus achieving a better protection effect for ultra-thin or fragile products.

[0033] The embodiments disclosed herein are preferred embodiments, but are not limited thereto. Those skilled in the art can readily grasp the spirit of this utility model based on the above embodiments and make different extensions and variations. However, as long as they do not depart from the spirit of this utility model, they are all within the protection scope of this utility model.

Claims

1. A double-sided planar grinding and polishing machine, characterized in that, The assembly includes a double-sided grinding machine (1), an outer mating ring (2), a lower grinding disc (3), a mating seat (4), and a planetary wheel (5). The outer mating ring (2), the lower grinding disc (3), the mating seat (4), and the planetary wheel (5) are all arranged on the base of the double-sided grinding machine (1). The mating seat (4) is located inside the outer mating ring (2) and is coaxial with the outer mating ring (2). The lower grinding disc (3) is located between the outer mating ring (2) and the mating seat (4). Between, the planetary wheel (5) is placed on the lower grinding disk (3). The planetary wheel (5) includes a hollow ring (501) and a mating tooth ring (502). The mating tooth ring (502) is arranged outside the hollow ring (501). A composite buffer structure (6) is arranged inside the hollow ring (501). The composite buffer structure (6) consists of a first buffer layer (601), a damping layer (602), and a second buffer layer (603) from the outside to the inside. The second buffer layer (603) is divided into an outer ring (604) and an inner ring (605). The outer ring (604) has a honeycomb structure, and the inner ring (605) has a corrugated structure.

2. The double-sided planar grinding and polishing machine according to claim 1, characterized in that, The inner wall of the outer mating ring (2) is provided with a mating gear ring (201), and the mating seat (4) is provided with a drive gear disk (401). The mating gear ring (201) meshes with the drive gear disk (401) and the mating gear ring (502).

3. The double-sided planar grinding and polishing machine according to claim 1, characterized in that, The hollow ring (501) has several sets of reinforcing frames (503) arranged at equal intervals inside, and the reinforcing frames (503) are respectively connected to the arc-shaped shields on both sides inside the hollow ring (501).

4. A double-sided planar grinding and polishing machine according to claim 3, characterized in that, The reinforcing frame (503) consists of two sets of X-braces, and both sets of X-braces are arranged at a 45-degree angle.

5. A double-sided planar grinding and polishing machine according to claim 1, characterized in that, The honeycomb holes of the outer ring (604) are hexagonal.

6. A double-sided planar grinding and polishing machine according to claim 1, characterized in that, The first buffer layer (601) is made of elastic rubber, the damping layer (602) is made of viscoelastic damping material, and the second buffer layer (603) is made of silicone.

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