High-precision PCB detection device

Abstract

The utility model relates to the technical field of PCB detection, in particular to a high-precision PCB detection device which comprises a sample table, an electronic lens adjusting mechanism fixedly connected to the upper end of one side of the sample table, an electronic gun fixedly connected to one side of the electronic lens adjusting mechanism, and an electromagnetic lens fixedly connected to the outer side of the lower end of the electronic gun. One side of the upper end of the sample table is fixedly connected with a wiping cleaning device; the wiping cleaning device comprises supporting plates, vertical grooves are formed in one sides of the two supporting plates, threaded rods are rotatably connected to the bottoms of the inner sides of the vertical grooves, adjusting plates are in threaded connection to the outer sides of the threaded rods, sliding grooves are formed in the middles of the upper ends of the adjusting plates, and electric telescopic rods are fixedly connected to the sides, away from the electromagnetic lens, of the supporting plates. According to the utility model, through the arrangement of the wiping and cleaning device, pollutants on the lens can be effectively removed, and the imaging quality of the electromagnetic lens is ensured, so that the accuracy and stability of high-precision PCB detection are improved.

Description

Technical Field

[0001] This utility model relates to the field of PCB inspection technology, specifically a high-precision PCB inspection device. Background Technology

[0002] A high-precision PCB inspection device is a device used to perform high-precision inspection on printed circuit boards. It typically consists of a mechanical motion system, an image acquisition system, an illumination system, a control system, and image processing and analysis software. The image acquisition system includes a high-resolution camera and an electromagnetic lens. The electromagnetic lens uses a magnetic field to act on the electron beam, causing the electron beam to form a small spot on the sample surface to improve resolution.

[0003] In equipment such as electron microscopes in image acquisition systems, electromagnetic lenses are usually in a vacuum environment. Since there are almost no gas molecules in a vacuum to conduct heat, heat is easily accumulated, causing the temperature to rise. High temperatures make it easier for substances in the sample to evaporate. When these evaporated substances encounter the relatively cool surface of the electromagnetic lens, they are more likely to condense and adhere to it. If the surface of the electromagnetic lens is adsorbed with substances evaporated from the sample or contaminants in the vacuum system, it will change the magnetic field distribution of the lens, affecting the focusing of the electron beam and the imaging effect.

[0004] Therefore, a high-precision PCB inspection device is proposed to address the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a high-precision PCB inspection device to solve the problem that when these evaporated substances encounter the relatively cold electromagnetic lens surface, they are more likely to condense and adhere to it. If the electromagnetic lens surface is adsorbed with evaporated substances from the sample or contaminants from the vacuum system, it will change the magnetic field distribution of the lens and affect the focusing and imaging effect of the electron beam.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A high-precision PCB inspection device includes a sample stage. An electronic lens adjustment mechanism is fixedly connected to the upper end of one side of the sample stage. An electron gun is fixedly connected to one side of the electronic lens adjustment mechanism. An electromagnetic lens is fixedly connected to the outer side of the lower end of the electron gun. A wiping and cleaning device is fixedly connected to one side of the upper end of the sample stage. The wiping and cleaning device includes a support plate. A vertical groove is formed on one side of the two support plates. A threaded rod is rotatably connected to the bottom of the inner side of the vertical groove. An adjustment plate is threadedly connected to the outer side of the threaded rod. A sliding groove is formed in the middle of the upper end of the adjustment plate. An electric telescopic rod is fixedly connected to the side of the support plate away from the electromagnetic lens. A wiping plate is fixedly connected to one end of the telescopic rod. The wiping plate includes a movable plate. A guide rod is slidably connected to the inner side of one end of the movable plate. A compression spring is fixedly connected to the outer side of the other end of the guide rod. A rubber plate is fixedly connected to the other end of the compression spring. A wiping cloth is fixedly connected to the upper end of the rubber plate by adhesive.

[0008] As a further optimization of this utility model, the electronic lens adjustment mechanism is vertically fixedly connected to the upper end of one side of the sample stage, the electron gun is horizontally fixedly connected to one side of the electronic lens adjustment mechanism, the electromagnetic lens is set directly above the center of the sample stage, and the wiping and cleaning device is located on the upper end of the sample stage away from the electron gun.

[0009] As a further optimization of this utility model, the two support plates are symmetrically distributed around the center line of the sample stage, the vertical groove is elongated and longitudinally opened along one side of the support plate, the threaded rod is vertically arranged at the bottom of the inner side of the vertical groove, and the two ends of the adjustment plate are threadedly connected to the outer side of the threaded rod.

[0010] As a further optimization of this utility model, the slide groove is a rectangular groove, two electric telescopic rods are provided, one end of the telescopic rod of the electric telescopic rod is set as U-shaped, the wiping plate is horizontally fixed to one end of the U-shaped telescopic rod of the electric telescopic rod, and the wiping plate is slidably connected to the inside of the slide groove.

[0011] As a further optimization of this utility model, the movable plate is a rectangular plate structure, the guide rod slides horizontally on the inner side of one end of the movable plate, the compression spring is arranged around the outer side of the other end of the guide rod, and the inner side of one end of the movable plate is a hollow structure.

[0012] As a further optimization of this utility model, the wiping cloth completely covers the upper surface of the rubber plate, the guide rod and the compression spring are both perpendicular to one end of the rubber plate and the wiping cloth, and the outer side of the rubber plate is slidably connected to the inner side of the hollow structure at one end of the moving plate.

[0013] As a further optimization of this utility model, the upper surface of the wiping cloth is located on the same horizontal plane as the surface of the electromagnetic lens, the area of ​​the wiping cloth is 1.5 times the surface area of ​​the electromagnetic lens, and the wiping cloth is set with rounded corners.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] In this invention, a support plate provides a stable lifting track for the adjustment plate, ensuring precise height adjustment of the wiping plate. The special connection between the slide and the electric telescopic rod allows the wiping plate to move smoothly and be accurately positioned. The moving plate, guide rod, and compression spring work together to ensure that the wiping cloth adheres to the lens with uniform pressure, improving the cleaning effect. The wiping cloth area is larger than the lens and the edges are rounded, ensuring thorough cleaning while avoiding scratches on the lens. This effectively removes contaminants from the lens, ensuring the imaging quality of the electromagnetic lens, thereby improving the accuracy and stability of high-precision PCB inspection. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the overall structure of the wiping and cleaning device of this utility model;

[0018] Figure 3 This is a schematic diagram of the installation position of the adjustment plate of this utility model;

[0019] Figure 4 This is a schematic diagram of the overall structure of the adjusting plate of this utility model;

[0020] Figure 5 This is a schematic diagram of the overall structure of the wiping plate of this utility model;

[0021] Figure 6 This is a schematic cross-sectional view of the movable plate structure of this utility model.

[0022] In the diagram: 1. Electron lens adjustment mechanism; 2. Electron gun; 3. Electromagnetic lens;

[0023] 4. Wiping and cleaning device; 41. Support plate; 42. Vertical groove; 43. Threaded rod; 44. Adjusting plate; 45. Slide groove; 46. Electric telescopic rod; 47. Wiping plate; 471. Moving plate; 472. Guide rod; 473. Compression spring; 474. Rubber plate; 475. Wiping cloth; 5. Sample stage. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0026] Please see Figure 1-6 This utility model provides a technical solution:

[0027] A high-precision PCB inspection device includes a sample stage 5. An electronic lens adjustment mechanism 1 is fixedly connected to the upper end of one side of the sample stage 5. An electron gun 2 is fixedly connected to one side of the electronic lens adjustment mechanism 1. An electromagnetic lens 3 is fixedly connected to the outer side of the lower end of the electron gun 2. A wiping and cleaning device 4 is fixedly connected to the upper side of the sample stage 5. The wiping and cleaning device 4 includes support plates 41. Vertical grooves 42 are formed on one side of the two support plates 41. A threaded rod 43 is rotatably connected to the bottom of the inner side of the vertical groove 42. An adjusting plate 44 is threadedly connected to the outer side of the threaded rod 43. A sliding groove 45 is provided in the middle of the upper end of the section plate 44. An electric telescopic rod 46 is fixedly connected to the side of the support plate 41 away from the electromagnetic lens 3. A wiping plate 47 is fixedly connected to one end of the telescopic rod of the electric telescopic rod 46. The wiping plate 47 includes a movable plate 471. A guide rod 472 is slidably connected to the inner side of one end of the movable plate 471. A compression spring 473 is fixedly connected to the outer side of the other end of the guide rod 472. A rubber plate 474 is fixedly connected to the other end of the compression spring 473. A wiping cloth 475 is fixedly connected to the upper end of the rubber plate 474 by adhesive.

[0028] As a further implementation of the above technical solution: the upper surface of the wiping cloth 475 is on the same horizontal plane as the surface of the electromagnetic lens 3, the area of ​​the wiping cloth 475 is 1.5 times the surface area of ​​the electromagnetic lens 3, and the wiping cloth 475 is set with rounded corners around its perimeter, so that it fits tightly during wiping, improves cleaning efficiency, reduces the number of wiping times, and prevents the lens from being scratched during wiping, thus protecting the lens surface from damage.

[0029] As a further implementation of the above technical solution: the slide groove 45 is a rectangular groove, and two electric telescopic rods 46 are provided. One end of the telescopic rod of the electric telescopic rod 46 is set as a U-shape. The wiping plate 47 is horizontally fixed to one end of the U-shape of the telescopic rod of the electric telescopic rod 46. The wiping plate 47 is slidably connected to the inside of the slide groove 45. The slide groove 45 provides a stable sliding track for the wiping plate 47, ensuring the linearity of the movement of the wiping plate 47. The two electric telescopic rods 46 make the movement of the wiping plate 47 more stable and the force more balanced, ensuring accurate positioning of the wiping position.

[0030] As a further implementation of the above technical solution: two support plates 41 are symmetrically distributed around the center line of the sample stage 5. The vertical groove 42 is long and narrow, and is opened longitudinally along one side of the support plate 41. The threaded rod 43 is vertically set at the bottom of the inner side of the vertical groove 42. The two ends of the adjusting plate 44 are threadedly connected to the outer side of the threaded rod 43, so that the structure of the wiping and cleaning device 4 is stable, the overall force is uniform, and a stable lifting guide is provided for the adjusting plate 44, so that the height of the wiping plate 47 is adjusted smoothly and the shaking or deviation during the adjustment process is prevented.

[0031] As a further implementation of the above technical solution: the movable plate 471 is a rectangular plate structure, the guide rod 472 slides horizontally on the inner side of one end of the movable plate 471, and the compression spring 473 is arranged around the outer side of the other end of the guide rod 472. The inner side of one end of the movable plate 471 is a hollow structure. The horizontal sliding of the guide rod 472, in conjunction with the hollow structure of the movable plate 471, provides stable guidance for the rubber plate 474 and the wiping cloth 475, ensuring accurate positioning during wiping. The compression spring 473 is arranged around the blade to distribute pressure evenly, ensuring that the wiping cloth 475 adheres evenly to the lens surface and improving the cleaning effect.

[0032] As a further implementation of the above technical solution: the electron lens adjustment mechanism 1 is vertically fixed to the upper side of the sample stage 5, the electron gun 2 is horizontally fixed to the side of the electron lens adjustment mechanism 1, the electromagnetic lens 3 is set directly above the center of the sample stage 5, and the wiping and cleaning device 4 is located on the upper side of the sample stage 5 away from the electron gun 2. This ensures the spatial accuracy of the electron gun 2 and the electromagnetic lens 3, stabilizes the electron beam emission and focusing direction, and facilitates the acquisition of accurate detection images. The position of the wiping and cleaning device 4 is determined, which facilitates its cooperation with other components, and its distance from the electron gun 2 can avoid interference with the electron beam emission.

[0033] As a further implementation of the above technical solution: the wiping cloth 475 completely covers the upper surface of the rubber plate 474. The guide rod 472 and the compression spring 473 are both perpendicular to one end of the rubber plate 474 and the wiping cloth 475. The outer side of the rubber plate 474 is slidably connected to the inner side of the hollow structure at one end of the moving plate 471, ensuring sufficient wiping area for comprehensive cleaning of the lens. The vertical setting of the guide rod 472 and the compression spring 473 ensures uniform pressure transmission, enhances wiping stability, and ensures that the wiping cloth 475 moves smoothly during movement, preventing deviation from affecting the cleaning effect.

[0034] Workflow: Place the PCB to be inspected on the sample stage 5, ensuring stable and accurate placement. Initially adjust the parameters of the electron gun 2 and electromagnetic lens 3 using the electron lens adjustment mechanism 1. Start the electron gun 2 to emit an electron beam. After being focused and adjusted by the electromagnetic lens 3, the electron beam irradiates the PCB sample. The signal generated by the interaction between the electron beam and the PCB is received by the corresponding detector and transmitted to the subsequent signal processing and imaging system to form an electron microscopic image of the PCB, which is used to detect whether there are defects or other problems on the PCB. If contamination is found on the surface of the electromagnetic lens 3 during or after the inspection, affecting the image quality, start the wiping and cleaning device 4 for cleaning.

[0035] Based on the height of the electromagnetic lens 3, the operator simultaneously rotates two threaded rods 43. Since the threaded rods 43 are threadedly connected to the adjusting plate 44, the adjusting plate 44 moves up and down along the threaded rods 43 within the vertical groove 42, thereby adjusting the height of the wiping plate 47. This ensures that the wiping cloth 475 is at a suitable relative height to the electromagnetic lens 3. Power is supplied via an external wire to activate the electric telescopic rod 46. The telescopic rod 46 moves the wiping plate 47 along the sliding groove 45 on the adjusting plate 44, positioning it directly below the electromagnetic lens 3 to ensure the wiping cloth 475 accurately covers it. For the lens area that needs cleaning, ensure that the wiping cloth 475 adheres to the lens surface with appropriate pressure. Then, control the electric telescopic rod 46 to stop moving. The operator will manually move the guide rod 472 slightly and repeatedly. At this time, the guide rod 472 slides within the moving plate 471, and the compression spring 473 is compressed, causing the wiping cloth 475 to move and wipe along the surface of the electromagnetic lens 3 to thoroughly clean the contaminants on the lens surface. After wiping, control the electric telescopic rod 46 to retract, causing the wiping cloth 475 to detach from the surface of the electromagnetic lens 3. Then, move the wiping plate 47 back to the initial position, waiting for the next cleaning instruction.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-precision PCB inspection device, comprising a sample stage (5), characterized in that: An electronic lens adjustment mechanism (1) is fixedly connected to the upper end of one side of the sample stage (5), an electron gun (2) is fixedly connected to one side of the electronic lens adjustment mechanism (1), an electromagnetic lens (3) is fixedly connected to the outer side of the lower end of the electron gun (2), and a wiping and cleaning device (4) is fixedly connected to one side of the upper end of the sample stage (5). The wiping and cleaning device (4) includes a support plate (41). A vertical groove (42) is provided on one side of the two support plates (41). A threaded rod (43) is rotatably connected to the bottom of the inner side of the vertical groove (42). An adjusting plate (44) is threadedly connected to the outer side of the threaded rod (43). A sliding groove (45) is provided in the middle of the upper end of the adjusting plate (44). An electric telescopic rod (46) is fixedly connected to the side of the support plate (41) away from the electromagnetic lens (3). A wiping plate (47) is fixedly connected to one end of the telescopic rod of the electric telescopic rod (46). The wiping plate (47) includes a moving plate (471). A guide rod (472) is slidably connected to the inner side of one end of the moving plate (471). A compression spring (473) is fixedly connected to the outer side of the other end of the guide rod (472). A rubber plate (474) is fixedly connected to the other end of the compression spring (473). A wiping cloth (475) is fixedly connected to the upper end of the rubber plate (474) by adhesive.

2. The high-precision PCB inspection device according to claim 1, characterized in that: The electron lens adjustment mechanism (1) is vertically fixed to the upper side of the sample stage (5), the electron gun (2) is horizontally fixed to the side of the electron lens adjustment mechanism (1), the electromagnetic lens (3) is set directly above the center of the sample stage (5), and the wiping and cleaning device (4) is located on the upper side of the sample stage (5) away from the electron gun (2).

3. The high-precision PCB inspection device according to claim 1, characterized in that: The two support plates (41) are symmetrically distributed around the center line of the sample stage (5). The vertical groove (42) is long and narrow. The vertical groove (42) is longitudinally opened along one side of the support plate (41). The threaded rod (43) is vertically arranged at the bottom inside the vertical groove (42). The two ends of the adjusting plate (44) are threadedly connected to the outside of the threaded rod (43).

4. The high-precision PCB inspection device according to claim 1, characterized in that: The chute (45) is a rectangular chute. There are two electric telescopic rods (46). One end of the telescopic rod of the electric telescopic rod (46) is set as U-shaped. The wiping plate (47) is horizontally fixed to one end of the U-shaped telescopic rod of the electric telescopic rod (46). The wiping plate (47) is slidably connected to the inside of the chute (45).

5. The high-precision PCB inspection device according to claim 1, characterized in that: The movable plate (471) is a rectangular plate structure. The guide rod (472) slides horizontally on the inner side of one end of the movable plate (471). The compression spring (473) is arranged around the outer side of the other end of the guide rod (472). The inner side of one end of the movable plate (471) is a hollow structure.

6. The high-precision PCB inspection device according to claim 1, characterized in that: The wiping cloth (475) completely covers the upper surface of the rubber plate (474). The guide rod (472) and the compression spring (473) are both perpendicular to one end of the rubber plate (474) and the wiping cloth (475). The outer side of the rubber plate (474) is slidably connected to the inner side of the hollow structure at one end of the moving plate (471).

7. The high-precision PCB inspection device according to claim 1, characterized in that: The upper surface of the wiping cloth (475) is on the same horizontal plane as the surface of the electromagnetic lens (3). The area of ​​the wiping cloth (475) is 1.5 times the surface area of ​​the electromagnetic lens (3). The wiping cloth (475) is set with rounded corners around its perimeter.

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