Self-limiting type coating platform deck, coating device and film production system

Abstract

The utility model relates to the field of film coating equipment, in particular to a self-limiting type coating platform deck, a coating device and a film production system. A self-limiting groove is formed in the upper surface of the substrate bearing platform; a waste liquid guide groove is formed in the self-limiting groove, and a waste liquid guide hole communicated with the waste liquid guide groove is formed in the substrate bearing platform; a vacuum adsorption chamber located below the self-limiting groove is formed in the substrate bearing platform; a plurality of vacuum adsorption holes are formed in the self-limiting groove and communicate with the vacuum adsorption cavity. The substrate bearing platform is provided with a vacuum exhaust hole communicated with the vacuum adsorption chamber. According to the utility model, the automatic positioning and rapid placement of the substrate can be realized, the working efficiency is improved, waste liquid is prevented from being retained on the surface of the substrate to influence the coating quality, the substrate is kept in a stable state in the coating process, the coating uniformity and consistency are improved, and the device is suitable for large-area continuous preparation and production.

Description

Technical Field

[0001] This utility model relates to the field of film coating equipment, specifically to a self-limiting coating platform, coating device and film production system. Background Technology

[0002] The laboratory-certified efficiency of single-cell perovskite solar cells has reached 26%, and the industrial-scale large-area efficiency has also exceeded 16%, demonstrating rapid development. Its low cost and high efficiency give it broad commercial prospects. Perovskite solar cells mainly consist of a transparent conductive substrate, an electron transport layer, a perovskite light-absorbing layer, a charge transport layer, a back electrode, and various functional modification layers. Among these, the perovskite light-absorbing layer is crucial for photoelectric conversion, making its fabrication method and process particularly important.

[0003] Currently, there are numerous devices available for preparing large-area perovskite thin films, including slot coating devices, doctor blade coating devices, inkjet printing devices, and spray coating devices. Among these, slot coating and doctor blade coating are the mainstream preparation methods. However, existing devices typically require manual alignment of the substrate and coating head for vertical positioning. This process is time-consuming, and for large-area substrates with long length and width travel, any misalignment at the front end will lead to even greater misalignment at the rear end after coating, resulting in a lower coating yield.

[0004] In related technologies, utility model patent CN221753710U discloses a battery electrode liquid coating device, belonging to the field of battery processing technology. It includes a coating table, a support fixedly connected to the coating table, a spray head disposed within the support, and a storage tank for supplying spraying liquid to the spray head fixedly mounted on the support. A groove is formed within the coating table, and a negative pressure machine is disposed on one side of the coating table. A negative pressure pipe is connected to the working end of the negative pressure machine, and the negative pressure pipe communicates with the groove. A positioning groove is formed on the coating table, and a negative pressure hole communicating with the groove is formed at the bottom of the positioning groove. A lifting plate is slidably disposed within the groove, and a push rod corresponding to the negative pressure hole is fixedly connected to the lifting plate. This application, by setting a negative pressure machine, can fix the electrode without contacting it, and the positioning groove facilitates the placement and removal of the electrode, solving the problems of inconvenient electrode fixing operations and easy damage or contamination of the electrode in existing battery electrode liquid coating devices. However, the above-mentioned device still has the following problems: 1. Waste liquid generated during the coating process is prone to deposit in the groove, which can easily contaminate the coating stage and the lower surface of the coated substrate; 2. It uses a motor to drive the lifting plate to raise the push rod until the push rod inserts into the negative pressure hole and pushes the electrode out of the positioning groove, which has the disadvantages of complex structure and large space occupation; 3. It does not have a heating function and cannot perform in-situ annealing of the wet film. Utility Model Content

[0005] To overcome the shortcomings of existing technologies, the purpose of this utility model is to provide a self-limiting coating stage, coating device, and thin film production system. Through the design of the self-limiting groove, it achieves automatic positioning and rapid placement of the substrate, improving operational efficiency. The design of the waste liquid guide channel and waste liquid guide hole ensures that waste liquid can be quickly discharged, preventing waste liquid from remaining on the substrate surface and affecting coating quality. The vacuum adsorption system provides uniform adsorption force, ensuring that the substrate remains stable during the coating process, improving coating uniformity and consistency, and making it suitable for large-area continuous production.

[0006] The first aspect of this utility model is to provide a self-limiting coating stage, including a substrate support platform;

[0007] The substrate support platform has a self-limiting groove on its upper surface. Its length and width are greater than the corresponding dimensions of the substrate to be coated, and its depth is less than or equal to the thickness of the substrate to be coated.

[0008] The self-limiting groove is provided with a waste liquid guide channel, and the substrate bearing platform is provided with a waste liquid guide hole that communicates with the waste liquid guide channel.

[0009] The substrate support platform has a vacuum adsorption chamber located below the self-limiting groove; the self-limiting groove is provided with a plurality of vacuum adsorption holes, which are respectively connected to the vacuum adsorption chamber; the substrate support platform is provided with a vacuum evacuation hole connected to the vacuum adsorption chamber.

[0010] In a preferred embodiment of the first aspect of this utility model, there are two waste liquid guide channels, which are symmetrically distributed on opposite sides of the self-limiting groove along the long axis of the substrate; there are two waste liquid guide holes, which are respectively connected to the two waste liquid guide channels one by one.

[0011] In a preferred embodiment of the first aspect of this utility model, the width of the waste liquid guide channel is 1-3 mm, the depth is 0.5-1.5 mm, and the bottom of the channel is inclined downward at 2°-6°; the waste liquid guide hole is inclined downward at 10°-20°.

[0012] In a preferred embodiment of the first aspect of this utility model, the self-limiting groove has a chamfered edge with a radius of 0.2-0.5 mm; the length difference between the self-limiting groove and the substrate to be coated is 0.5-1 mm, and the width difference between the self-limiting groove and the substrate to be coated is 0.5-1 mm.

[0013] In a preferred embodiment of the first aspect of this utility model, four electromagnetic pillars are further included. The four electromagnetic pillars are respectively disposed on the substrate support platform and located at the four corners of the self-limiting groove. The four electromagnetic pillars are configured to switch between an ascending state and a descending state by electromagnetic system control. When the four electromagnetic pillars are in the descending state, the top surface of the four electromagnetic pillars is flush with the bottom surface of the self-limiting groove. When the four electromagnetic pillars are in the ascending state, the four electromagnetic pillars push the substrate to be coated out of the self-limiting groove.

[0014] In a preferred embodiment of the present invention, a heating module is further included, which is disposed below the vacuum adsorption chamber or at the bottom of the coating stage; the heating module adopts heat conduction, heat radiation or microwave heating.

[0015] The second aspect of this utility model is to provide a coating device, including a counterweight base; and further comprising:

[0016] The self-limiting coating platform described in the first aspect of this utility model is mounted on the counterweight base;

[0017] The coating mechanism is mounted on the counterweight base and located above the substrate support platform.

[0018] In a second aspect of this utility model, as a preferred embodiment, the coating mechanism includes a three-axis displacement device and a coating head. The three-axis displacement device enables the coating head to move in the up-down, front-back, or left-right directions by manual or digital control.

[0019] In a second aspect of this utility model, as a preferred embodiment, the coating mechanism further includes:

[0020] The differential display head set on the triaxial displacement device is used to monitor the distance between the coating head and the substrate in real time.

[0021] The foreign object detection and protection system installed on the three-axis displacement device is configured to automatically stop and lock when a foreign object is detected.

[0022] A third aspect of this invention is to provide a thin film production system, including the coating apparatus described in the second aspect of this invention.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] 1. In the operation of this invention, the substrate to be coated is first gently placed into the self-limiting groove. Under the action of gravity, the substrate automatically positions itself and adheres to the bottom of the self-limiting groove. The vacuum pumping device is activated, and air is pumped out of the vacuum adsorption chamber through the vacuum pumping port, creating a negative pressure environment inside the vacuum adsorption chamber. At this time, the vacuum adsorption holes in the self-limiting groove generate suction, firmly adsorbing the substrate to the bottom of the self-limiting groove. With the substrate firmly fixed, the coating operation is performed. Waste liquid generated during the coating process is discharged to the external waste liquid collection system through the waste liquid guide channel and waste liquid guide hole. After the coating operation is completed, the vacuum pumping device is turned off, releasing the vacuum adsorption state. At this time, the substrate can be easily removed from the self-limiting groove. This invention, through the design of the self-limiting groove, achieves automatic positioning and rapid placement of the substrate, improving work efficiency. It eliminates the need for manual adjustment of the coating head and the substrate to be coated, improving production efficiency and coating yield. The design of the waste liquid diversion channel and waste liquid diversion holes ensures that the waste liquid can be discharged quickly, avoiding the waste liquid from remaining on the substrate surface and affecting the coating quality. The vacuum adsorption system provides uniform adsorption force, ensuring that the substrate remains stable during the coating process, improving coating uniformity and consistency, and is suitable for large-area continuous preparation and production.

[0025] 2. The four electromagnetic columns of this invention achieve upward / downward switching through an electromagnetic system, reducing manual operation and improving production efficiency. It also boasts advantages such as simple structure and small footprint. In the downward state, the top surface of the column is flush with the bottom surface of the groove, preventing scratching the substrate; in the upward state, the substrate is ejected for easy removal.

[0026] 3. This utility model performs in-situ annealing of the wet film through a heating module, eliminating the need to transfer the wet film, thus saving equipment investment and floor space. In-situ annealing reduces mechanical damage during the transfer of the wet film, which can significantly improve the efficiency and quality of thin film preparation. It is especially suitable for fields with extremely high requirements for process consistency (such as perovskite solar cells and OLED displays).

[0027] 4. The coating mechanism of this utility model includes a three-axis displacement device and a coating head. The three-axis displacement device enables the coating head to move in the up-down, back-and-forth, or left-and-right directions through manual or digital control. Thus, the three-axis displacement device supports both manual and digital control, enabling precise movement of the coating head in three-dimensional space. Attached Figure Description

[0028] Figure 1 This is a top view of the self-limiting coating stage of the present invention.

[0029] Figure 2 This is a front view of the self-limiting coating stage of the present invention.

[0030] Figure 3This is a side view of the self-limiting coating stage of the present invention.

[0031] Figure 4 This is a top view of the coating apparatus of the present invention;

[0032] Figure 5 This is a front view schematic diagram of the coating apparatus of the present invention;

[0033] Figure 6 This is a side view of the coating apparatus of the present invention.

[0034] In the diagram: 1. Substrate support platform; 2. Self-limiting groove; 3. Electromagnetic column; 4. Vacuum adsorption hole; 5. Waste liquid guide channel; 6. Waste liquid guide hole; 7. Vacuum adsorption chamber; 8. Heating module; 9. Vacuum extraction hole; 10. Counterweight base; 11. Vertical displacement manual control knob; 12. Horizontal displacement manual control knob; 13. Connecting mechanism; 14. Slider; 15. Slide rail; 15a. Inverted trapezoidal slide rail; 15b. Rectangular slide rail; 16. Coating head; 17. Liquid injection hole; 18. Differential display head. Detailed Implementation

[0035] The utility model will now be further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments. Unless otherwise specified, the materials and equipment used in this embodiment are all commercially available. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0036] In the description of this application, it should be understood that the terms "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In the description of this application, "a plurality of" means two or more, unless otherwise precisely specified.

[0037] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected," "linked," and "connected" should be interpreted broadly. For example, they can refer to a connection, a link between two elements through an intermediary, the internal connection of two elements, or the interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0038] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or apparatus.

[0039] Example 1

[0040] Please refer to Figure 1-6 As shown, this embodiment provides a self-limiting coating stage, including a substrate support platform 1;

[0041] The substrate carrier platform 1 has a self-limiting groove 2 on its upper surface. Its length and width are greater than the corresponding dimensions of the substrate to be coated, and its depth is less than or equal to the thickness of the substrate to be coated.

[0042] A waste liquid guide channel 5 is provided inside the self-limiting groove 2, and a waste liquid guide hole 6 is provided inside the substrate bearing platform 1, which is connected to the waste liquid guide channel 5. The waste liquid guide hole 6 is used to connect to an external waste liquid collection system.

[0043] The substrate carrier platform 1 has a vacuum adsorption chamber 7 located below the self-limiting groove 2 inside; the self-limiting groove 2 is provided with a plurality of vacuum adsorption holes 4, which are respectively connected to the vacuum adsorption chamber 7; the substrate carrier platform 1 is provided with a vacuum extraction hole 9 connected to the vacuum adsorption chamber 7, which is used to connect to an external vacuum extraction device.

[0044] Based on the above structure, during operation, the substrate to be coated is first gently placed into the self-limiting groove 2 using a conveying device or robotic arm. Under gravity, the substrate automatically positions itself and adheres to the bottom of the self-limiting groove 2. The vacuum pump is then activated, evacuating the vacuum adsorption chamber 7 through the vacuum extraction port 9, creating a negative pressure environment within the chamber. At this time, the vacuum adsorption holes 4 within the self-limiting groove 2 generate suction, firmly adsorbing the substrate to the bottom of the groove 2. With the substrate firmly fixed, the coating process is performed. Waste liquid generated during coating is discharged to an external waste liquid collection system through the waste liquid guide channel 5 and waste liquid guide hole 6. After coating is completed, the vacuum pump is turned off, releasing the vacuum adsorption state. The substrate can then be easily removed from the self-limiting groove 2. This invention, through the design of the self-limiting groove 2, achieves automatic positioning and rapid placement of the substrate, improving operational efficiency. The design of the waste liquid guide channel 5 and waste liquid guide hole 6 ensures that the waste liquid can be discharged quickly, avoiding the waste liquid from remaining on the substrate surface and affecting the coating quality. The vacuum adsorption system provides uniform adsorption force, ensuring that the substrate remains stable during the coating process and improving the uniformity and consistency of the coating.

[0045] It should be noted that the substrate carrier platform 1 is a good conductor of heat, such as metal or ceramic.

[0046] In a preferred embodiment of this invention, there are two waste liquid guide channels 5, which are symmetrically distributed on opposite sides of the self-limiting groove 2 along the long axis of the substrate; there are two waste liquid guide holes 6, which are respectively connected to the two waste liquid guide channels 5 in a one-to-one correspondence. In this way, the double guide channel design ensures that the overflowing coating liquid is discharged from both sides simultaneously, reducing liquid film residue and reducing or avoiding contamination of the self-limiting groove 2.

[0047] In a preferred embodiment of this utility model, the waste liquid guide channel 5 has a width of 1-3mm and a depth of 0.5-1.5mm, with the bottom of the channel inclined downward at 2°-6° to promote the flow of waste liquid; the waste liquid guide hole 6 is inclined downward at 10°-20° to prevent waste liquid backflow.

[0048] In a preferred embodiment of this invention, the self-limiting groove 2 features a chamfered edge design to prevent stress concentration or scratches on the substrate edge. The chamfer radius is 0.2-0.5 mm. The length difference between the self-limiting groove 2 and the substrate to be coated is 0.5-1 mm, and the width difference is also 0.5-1 mm. This slight difference in size (0.5-1 mm) between the self-limiting groove 2 and the substrate ensures a 0.25-0.5 mm gap between the substrate edge and the groove sidewall, providing room for fine-tuning while preventing significant substrate movement.

[0049] In a preferred embodiment of this utility model, four electromagnetic pillars 3 are further included. The four electromagnetic pillars 3 are respectively disposed on the substrate carrying platform 1 and located at the four corners of the self-limiting groove 2. The four electromagnetic pillars 3 are configured to switch between an ascending state and a descending state by electromagnetic system control. When the four electromagnetic pillars 3 are in the descending state, the top surface of the four electromagnetic pillars 3 is flush with the bottom surface of the self-limiting groove 2. When the four electromagnetic pillars 3 are in the ascending state, the four electromagnetic pillars 3 push the substrate to be coated out from the self-limiting groove 2.

[0050] Thus, the electromagnetic column 3 achieves upward / downward switching through an electromagnetic system, reducing manual operation and improving production efficiency, while also having the advantages of simple structure and small footprint. In the downward state, the top surface of the electromagnetic column 3 is flush with the bottom surface of the groove, avoiding scratching the substrate; in the upward state, it pushes out the substrate, making it easy to remove.

[0051] In a preferred embodiment of this invention, a heating module 8 is further included, which is disposed below the vacuum adsorption chamber 7 or at the bottom of the coating stage; the heating module 8 employs heat conduction, heat radiation, or microwave heating. The heating modules 8 are evenly distributed to ensure that the temperature difference between different temperature zones is within 1℃, and the temperature control accuracy is ±1℃.

[0052] Thus, this invention performs in-situ annealing of the wet film using the heating module 8, eliminating the need to transfer the wet film, saving equipment investment and floor space. In-situ annealing reduces mechanical damage during the wet film transfer process, significantly improving the efficiency and quality of thin film preparation, and is especially suitable for fields with extremely high requirements for process consistency (such as perovskite solar cells and OLED displays).

[0053] Example 2:

[0054] Please refer to Figure 1-6 This embodiment provides a coating device, including a counterweight base 10; and further including:

[0055] The self-limiting coating stage of Example 1 is mounted on the counterweight base 10;

[0056] The coating mechanism is mounted on the counterweight base 10 and located above the substrate support platform 1.

[0057] In a preferred embodiment of this utility model, the counterweight base 10 can be made of stone, such as marble, or metal, such as stainless steel, or a composite structure of both, without any specific limitation, in order to ensure the stability of the equipment during operation.

[0058] Based on the above structure, the self-limiting coating stage and coating mechanism are integrated into the counterweight base 10, which reduces the equipment footprint and improves system stability.

[0059] In a preferred embodiment of this invention, the coating mechanism includes a three-axis displacement device and a coating head 16. The three-axis displacement device enables the coating head 16 to move in the up-down, front-back, or left-right directions via manual or digital control. Thus, the three-axis displacement device supports both manual and digital control, enabling precise movement of the coating head 16 in three-dimensional space.

[0060] The displacement can be driven by any of the following: guide rail, lead screw, hinge, belt, etc., without any specific restrictions. It moves along the slide rail 15 in the front-back direction, along the slider 14 in the vertical direction, and along the connecting piece in the left-right direction.

[0061] Furthermore, a slide rail 15 is provided along the coating direction and installed on both sides of the upper surface of the counterweight base 10. The two slide rails 15 are parallel to each other, and the parallel spacing is greater than or equal to the width of the coating platform. The slider 14 is installed on the slide rail 15. Furthermore, the slide rail 15 has an inverted trapezoidal structure design, with an inverted trapezoidal slide rail track 15a and a rectangular slide rail track 15b, which makes the slide rail 15 and the slider 14 more tightly and firmly connected, less prone to shaking, and ensures operational stability.

[0062] Furthermore, a vertical displacement manual adjustment knob 11 is installed on the side of the slider 14, allowing for vertical movement. The knobs on both sides of the slider 14 can be used for fine-tuning the left and right positions respectively. A horizontal displacement manual adjustment knob 12 is installed on the upper end of the slider 14, allowing for horizontal movement. Both knobs can independently achieve horizontal movement. The horizontal movement is achieved through a connecting mechanism 13, which connects the slider 14 to the coating head 16.

[0063] In a preferred embodiment of this invention, the coating mechanism further includes:

[0064] The differential display head 18, mounted on the triaxial displacement device, is used to monitor the distance between the coating head 16 and the substrate in real time to ensure consistent coating thickness. Preferably, the differential display head 18 is mounted above or to the side of the connector to visually display the distance between the coating head 16 and the substrate to be coated. The differential display head 18 has a zeroing function, and the numerical display can be either positive or negative.

[0065] The foreign object detection and protection system installed on the triaxial displacement device is configured to automatically stop and lock when a foreign object is detected, in order to protect the coating device and avoid equipment damage or substrate scrap.

[0066] In a preferred embodiment of this utility model, the coating head 16 is mounted on the connecting mechanism 13 and connected to the triaxial displacement device, which enables the coating head 16 to move up and down, left and right, and forward and backward, and is continuously adjustable. The width of the coating head 16 is adjustable according to the size of the substrate, and it moves along the slide rail 15 to achieve wet film coating.

[0067] Furthermore, the coating head 16 is provided with a liquid injection hole 17. Specifically, the liquid injection hole 17 is connected to an external liquid injection system, which can be controlled manually or through digital circuitry.

[0068] Example 3:

[0069] This embodiment provides a thin film production system, including the coating apparatus of Embodiment 2.

[0070] In a preferred embodiment of the present invention, the thin film production system may further include an external liquid injection system, an external air extraction device, etc., and may also include a precursor solution preparation and storage unit, forming a complete thin film production system (such as a perovskite thin film production system).

[0071] Although only certain components and embodiments of this application have been illustrated and described, many modifications and alterations will be apparent to those skilled in the art without actually departing from the scope and spirit of the claims, such as variations in the size, dimensions, structure, shape and proportion of the various elements, installation arrangement, material use, color, orientation, etc.

[0072] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A self-limiting coating stage, comprising a substrate support platform; characterized in that, The substrate support platform has a self-limiting groove on its upper surface. Its length and width are greater than the corresponding dimensions of the substrate to be coated, and its depth is less than or equal to the thickness of the substrate to be coated. The self-limiting groove is provided with a waste liquid guide channel, and the substrate bearing platform is provided with a waste liquid guide hole that communicates with the waste liquid guide channel. The substrate support platform has a vacuum adsorption chamber located below the self-limiting groove; the self-limiting groove is provided with a plurality of vacuum adsorption holes, which are respectively connected to the vacuum adsorption chamber; the substrate support platform is provided with a vacuum evacuation hole connected to the vacuum adsorption chamber.

2. The self-limiting coating stage as described in claim 1, characterized in that, There are two waste liquid guide channels, which are symmetrically distributed on opposite sides of the self-limiting groove along the long axis of the substrate; there are two waste liquid guide holes, which are connected to the two waste liquid guide channels one by one.

3. The self-limiting coating stage as described in claim 1, characterized in that, The waste liquid guide channel has a width of 1-3mm and a depth of 0.5-1.5mm, with the bottom of the channel inclined downwards at 2°-6°; the waste liquid guide hole is inclined downwards at 10°-20°.

4. The self-limiting coating stage as described in claim 1, characterized in that, The self-limiting groove has a chamfered edge with a radius of 0.2-0.5mm; the length difference between the self-limiting groove and the substrate to be coated is 0.5-1mm, and the width difference between the self-limiting groove and the substrate to be coated is 0.5-1mm.

5. The self-limiting coating stage as described in claim 1, characterized in that, It also includes four electromagnetic pillars, which are respectively disposed on the substrate support platform and located at the four corners of the self-limiting groove. The four electromagnetic pillars are configured to switch between an ascending state and a descending state by electromagnetic system control. When the four electromagnetic pillars are in the descending state, the top surface of the four electromagnetic pillars is flush with the bottom surface of the self-limiting groove. When the four electromagnetic pillars are in the ascending state, the four electromagnetic pillars push the substrate to be coated out of the self-limiting groove.

6. The self-limiting coating stage as described in claim 1, characterized in that, It also includes a heating module, which is located below the vacuum adsorption chamber or at the bottom of the coating stage; the heating module adopts heat conduction, heat radiation or microwave heating.

7. A coating apparatus, comprising a counterweight base; characterized in that, Also includes: The self-limiting coating stage as described in any one of claims 1-6 is mounted on the counterweight base; The coating mechanism is mounted on the counterweight base and located above the substrate support platform.

8. The coating apparatus as claimed in claim 7, characterized in that, The coating mechanism includes a three-axis displacement device and a coating head. The three-axis displacement device enables the coating head to move in the up-down, back-and-forth, or left-and-right directions through manual or digital control.

9. The coating apparatus as claimed in claim 8, characterized in that, The coating mechanism further includes: The differential display head set on the triaxial displacement device is used to monitor the distance between the coating head and the substrate in real time. The foreign object detection and protection system installed on the three-axis displacement device is configured to automatically stop and lock when a foreign object is detected.

10. A thin film production system, characterized in that, Includes the coating apparatus as described in any one of claims 7-9.

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