Coating equipment

Abstract

The utility model discloses a coating device. The coating equipment comprises a die head, the die head comprises at least two runners, each runner is provided with a hole in the coating end of the die head to form an opening, each opening is in a slit shape and is arranged in the coating direction, and projections of the adjacent openings in the coating direction at least partially coincide in the coating direction. The coating direction is a moving direction of the die head relative to the base material when coating is performed. The contact probability of the easily oxidized slurry extruded by the coating equipment and air is low, so that the stability of the prepared functional layer is favorably improved. When the coating equipment provided by the embodiment of the utility model is applied to the preparation of the perovskite solar cell, the photoelectric conversion efficiency and the stability of the perovskite solar cell can be improved.

Description

Technical Field

[0001] This application relates to the field of battery manufacturing technology, and in particular to coating equipment used in the battery manufacturing process. Background Technology

[0002] In recent years, solar cells have received increasing attention as an ideal renewable energy source. Solar cells, also known as photovoltaic cells, are devices that directly convert light energy into electrical energy through the photoelectric effect or photochemical effect.

[0003] Perovskite solar cells are solar cells that utilize perovskite materials as light-absorbing materials. Compared with other solar cells, perovskite solar cells stand out in the field of solar cells due to their advantages such as low cost, high efficiency, and simple manufacturing process.

[0004] In the production of perovskite solar cells, coating equipment can form a functional layer containing perovskite material (e.g., tin-lead perovskite) on a substrate using an open-coating principle. However, some perovskite materials are easily oxidized pastes (e.g., tin-lead perovskite). Easily oxidized pastes have poor oxygen stability. During the coating process, the unstable perovskite material will undergo an oxidation reaction upon contact with air, resulting in a decrease in the photoelectric conversion efficiency and stability of the solar cell. Therefore, providing a coating equipment that can reduce the oxidation probability of easily oxidized pastes during the coating process has become an urgent technical problem to be solved. Utility Model Content

[0005] To address the aforementioned technical problems, this application provides a coating device that can reduce the oxidation probability of easily oxidized slurries during the coating process. When applied to the fabrication process of perovskite solar cells, it can produce perovskite solar cells with high photoelectric conversion efficiency and stability.

[0006] This application is achieved through the following technical solution.

[0007] This application provides a coating apparatus for forming a functional layer on the surface of a substrate. The coating apparatus includes a die head, which includes at least two flow channels. Each flow channel has an opening at the coating end of the die head. Each opening is formed as a slit and arranged along the coating direction. The projections of adjacent openings along the coating direction at least partially overlap. The coating direction is the direction in which the die head moves relative to the substrate during coating.

[0008] In this application, the coating equipment is provided with at least two flow channels. Based on this, the coating equipment can use different flow channels to transport easily oxidizable slurry and oxidation-resistant slurry respectively, so that the easily oxidizable slurry and the oxidation-resistant slurry are extruded through different openings. Since the projections of adjacent openings in the coating direction partially overlap, when the two slurries are coated onto the substrate, the oxidation-resistant slurry can cover at least a portion of the surface of the easily oxidizable slurry, thereby preventing the easily oxidizable slurry from contacting air and reducing its oxidation. This is beneficial to improving the stability of the prepared functional layer. Applying the coating equipment provided in this application to the fabrication of perovskite solar cells can improve the photoelectric conversion efficiency and stability of perovskite solar cells.

[0009] In some embodiments, at least two flow channels include a first flow channel and a second flow channel; the first flow channel has an opening at the coating end of the die head to form a first opening, and the second flow channel has an opening at the coating end of the die head to form a second opening, the first opening and the second opening are arranged along the coating direction and the second opening is located in front of at least a portion of the first opening along the coating direction.

[0010] This design helps ensure that the slurry extruded from the first opening at least covers the upper surface of the slurry extruded from the second opening. As a result, the upper surface of the slurry extruded from the second opening has a lower chance of contact with oxygen, reducing the likelihood of the slurry being oxidized and thus improving the stability of the formed functional layer.

[0011] In some embodiments, the projection of the second opening in the coating direction falls within the range of the projection of the first opening in the coating direction.

[0012] In this embodiment, the projection relationship between the second opening and the first opening in the coating direction is beneficial to ensure that the slurry extruded from the first opening can completely cover the upper surface of the slurry extruded from the second opening. This helps to further reduce the probability of the upper surface of the slurry extruded from the second opening coming into contact with oxygen, thereby further improving the stability of the formed functional layer.

[0013] In some embodiments, the minimum distance W between the end of the projection of the second opening in the coating direction and the end of the projection of the first opening in the coating direction is 0 mm to 10 mm.

[0014] In this embodiment, by controlling W to be 0mm-10mm, it is possible to balance reducing the oxidation level of the slurry extruded from the second opening and the amount of slurry extruded from the first opening.

[0015] In some embodiments, the second opening extends along a first direction, which is consistent with the length direction of the second opening and perpendicular to the coating direction.

[0016] The aforementioned second opening provides a continuous and uniform extrusion channel for the slurry. When the slurry is conveyed to the second opening, it can be evenly distributed along the entire length of the opening. This allows the slurry to be extruded from the second opening at a relatively consistent flow rate and volume, effectively avoiding the probability of localized slurry accumulation or uneven extrusion, thus facilitating a smooth coating process.

[0017] In some embodiments, the second opening is located in front of the entire first opening along the coating direction.

[0018] This design helps to ensure that the slurry extruded from the first opening covers the upper surface of the slurry extruded from the second opening, thereby reducing the degree of oxidation of the slurry extruded from the second opening.

[0019] In some embodiments, the first opening extends along a first direction, which is consistent with the length direction of the first opening and perpendicular to the coating direction.

[0020] The aforementioned first opening provides a continuous and uniform extrusion channel for the slurry. When the slurry is conveyed to the first opening, it can be distributed relatively evenly along the length of the first opening. This facilitates the slurry to be extruded from the first opening at a relatively consistent flow rate and volume, thereby reducing the probability of local slurry accumulation or uneven extrusion and promoting the preparation of functional layers with uniform properties.

[0021] In some embodiments, the first opening includes: a first segment; a second segment disposed opposite to the first segment; a third segment extending along a first direction, the first direction being consistent with the length direction of the third segment and perpendicular to the coating direction, the first segment and the second segment being respectively connected to the two ends of the third segment and both communicating with the third segment; the second opening along the coating direction is located at least in front of the third segment.

[0022] In this embodiment, the first opening can guide the slurry (e.g., oxidation-resistant slurry) extruded therefrom to cover the upper surface and both ends of the slurry extruded through the second opening, thereby increasing the protection range of the slurry extruded through the second opening.

[0023] In some embodiments, the first opening is an annular opening, which surrounds the second opening. In this embodiment, the structural layout of the annular opening surrounding the second opening is beneficial for the slurry extruded from the first opening to cover the slurry extruded from the second opening in all directions, greatly expanding the coverage area of ​​the slurry extruded from the first opening to the slurry extruded from the second opening.

[0024] In some embodiments, the coating apparatus further includes a first slurry supply device and a second slurry supply device, the first slurry supply device being connected to a first flow channel and used to supply an oxidation-resistant slurry to the first flow channel, and the second slurry supply device being connected to a second flow channel and used to supply an easily oxidized slurry to the second flow channel.

[0025] In this embodiment, the oxidation-resistant slurry provided by the first slurry supply device can pass through the first flow channel and finally be extruded from the first opening. The easily oxidizable slurry provided by the second slurry supply device can pass through the second flow channel and finally be extruded from the second opening. The second opening is located in front of at least part of the first opening along the coating direction, which is beneficial for covering the upper surface of the easily oxidizable slurry with the oxidation-resistant slurry, thereby reducing the probability of the upper surface of the easily oxidizable slurry coming into contact with oxygen, reducing the probability of the easily oxidizable slurry being oxidized, and thus improving the stability of the formed functional layer.

[0026] In some embodiments, at least two flow channels further include a third flow channel, which forms a third opening by opening a hole at the coating end of the die head, and the third opening is disposed on the side of the second opening away from the first opening along the coating direction.

[0027] By creating a third opening on the side of the second opening away from the first opening, the material extruded from the third opening can be coated onto the substrate surface. This helps reduce the likelihood of contact between oxygen adhering to the substrate surface and the easily oxidized slurry, thereby reducing the chance of the easily oxidized slurry being oxidized. Alternatively, creating a third opening at this location facilitates the formation of multiple functional layers in a single coating process, improving coating efficiency.

[0028] In some embodiments, the coating apparatus further includes a first slurry supply device, a second slurry supply device, and a media supply device. The first slurry supply device is connected to a first flow channel and is used to supply an oxidation-resistant slurry to the first flow channel. The second slurry supply device is connected to a second flow channel and is used to supply an easily oxidized slurry to the second flow channel. The media supply device is connected to a third flow channel and is used to supply any one of an oxidation-resistant slurry, an oxidation-resistant gas, and a passivating slurry to the third flow channel.

[0029] In an embodiment where the media supply device provides oxidation-resistant slurry to the third flow channel, the oxidation-resistant slurry provided by the first slurry supply device is conveyed through the first flow channel and then extruded from the first opening; simultaneously, the oxidation-resistant slurry provided by the media supply device is conveyed through the third flow channel and extruded from the third opening. The extruded oxidation-resistant slurry can respectively cover the upper and lower surfaces of the easily oxidized slurry. This significantly reduces the probability of contact between the upper and lower surfaces of the easily oxidized slurry and oxygen, thereby reducing the likelihood of oxidation of the easily oxidized slurry and ultimately improving the stability of the formed functional layer.

[0030] In an embodiment where the dielectric supply device provides oxidation-resistant gas to the third flow channel, the oxidation-resistant gas supplied by the dielectric supply device is transmitted through the third flow channel and finally output through the third opening. The output oxidation-resistant gas can reduce the oxygen content adhering to the substrate surface, thereby reducing the contact between oxygen and the lower surface of the reducing slurry, which is beneficial to further improve the stability of the prepared functional layer. Furthermore, in the functional layer prepared in this embodiment, the easily oxidized slurry is only coated with oxidation-resistant slurry on one side, which reduces the thickness of the functional layer to some extent. When this functional layer is applied to solar cells, it helps to achieve lightweight solar cells.

[0031] In some embodiments, the third opening extends along a first direction, which is consistent with the length direction of the third opening and perpendicular to the coating direction.

[0032] The aforementioned third opening provides a continuous and uniform extrusion channel, which facilitates the extrusion of the medium (any one of oxidation-resistant slurry, oxidation-resistant gas, or passivating slurry) from the third opening at a relatively consistent flow rate and volume. This improves the stability of the medium supply, thereby reducing the probability of easily oxidized slurry being oxidized, and further enhancing the stability of the prepared functional layer.

[0033] In some embodiments, the projection of the second opening in the coating direction falls within the range of the projection of the third opening in the coating direction. In this embodiment, the projection relationship between the second and third openings in the coating direction helps to further reduce the probability of the easily oxidized slurry extruded from the second opening coming into contact with oxygen, thereby further improving the stability of the prepared functional layer.

[0034] In some embodiments, the minimum distance between the end of the projection of the second opening in the coating direction and the end of the projection of the third opening in the coating direction is 0 mm to 10 mm. This arrangement achieves a balance between reducing the oxidation level of the slurry extruded through the second opening and reducing the amount of slurry extruded through the third opening.

[0035] In some embodiments, the width of the second opening in the coating direction is greater than the width of the first opening in the coating direction.

[0036] The relatively narrow design of the first opening can reduce the amount of slurry extruded from the first opening, thereby reducing production costs while ensuring the protective effect.

[0037] In some embodiments, the width of the second opening in the coating direction is 0.04 mm to 1.5 mm. This helps to reduce problems such as inconsistent flow rate and uneven distribution of the slurry during extrusion caused by an excessively wide second opening; on the other hand, it helps to reduce problems such as line breakage caused by excessive flow resistance of the slurry due to an excessively narrow second opening.

[0038] In some embodiments, the coating apparatus further includes a transmission component for moving the substrate. Using a transmission component to move the substrate facilitates a thin and uniform coating of the slurry extruded from the second opening onto the substrate.

[0039] In some embodiments, the second slurry supply device is used to supply tin-lead perovskite material to the second flow channel. Tin-lead perovskite has ideal narrow bandgap characteristics, which allows it to be combined with lead-based perovskite, which has a wide bandgap, to form an all-perovskite tandem solar cell. Attached Figure Description

[0040] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0041] Figure 1 This is a schematic diagram of the solar cell shown in this application;

[0042] Figure 2 This is a schematic diagram of the coating equipment shown in this application;

[0043] Figure 3 for Figure 1 A cross-sectional view of the coating equipment shown on the A-A' plane;

[0044] Figure 4 This is a cross-sectional view of the coating equipment during the coating process;

[0045] Figure 5 A cross-sectional view of a coating apparatus provided in another embodiment of this application;

[0046] Figure 6 This is a schematic diagram of the coating end provided in one embodiment of this application;

[0047] Figure 7 A schematic diagram of the coating end provided in an embodiment of this application. Figure 2 ;

[0048] Figure 8 A schematic diagram of the coating end provided in an embodiment of this application. Figure 3 ;

[0049] Figure 9 A schematic diagram of the coating end provided in an embodiment of this application. Figure 4 ;

[0050] Figure 10 A schematic diagram of the coating end provided in an embodiment of this application. Figure 5 .

[0051] Figure label:

[0052] 1000 - Perovskite solar cell; 101 - First electrode; 102 - Second electrode; 103 - Functional layer; 131 - Hole transport layer; 132 - Light absorption layer; 133 - Hole blocking layer; 134 - Electron transport layer;

[0053] 10-Coating equipment; 100-Die head; 200-Substrate; 300-Transmission components; 100A-Coating end;

[0054] 110 - Opening; 120 - Flow channel

[0055] 11-First opening; 1A-Oxidation-resistant slurry; 11A-First section; 11B-Second section; 11C-Third section; 12-First flow channel; 13-First slurry supply device;

[0056] 21-Second opening; 2A-Easily oxidized slurry; 22-Second flow channel; 23-Second slurry supply device;

[0057] 31-Third opening; 32-Third flow channel; 33-Media supply device;

[0058] Y - Coating direction; X - First direction;

[0059] F1 - Projection of the second opening in the coating direction; F2 - Projection of the first opening in the coating direction; F3 - Projection of the third opening in the coating direction. Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0061] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having," and any variations thereof, in the description, claims, and accompanying drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the description, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy.

[0062] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.

[0063] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0064] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0065] In the embodiments of this application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width, and other dimensions of various components in the embodiments of this application shown in the accompanying drawings, as well as the overall thickness, length, width, and other dimensions of the integrated device, are merely illustrative and should not constitute any limitation on this application.

[0066] In this application, "multiple" means two or more (including two).

[0067] In recent years, global energy shortages and environmental pollution have become increasingly prominent, leading to growing attention on solar cells as an ideal renewable energy source. Solar cells, also known as photovoltaic cells, are devices that directly convert light energy into electrical energy through the photoelectric effect or photochemical effect.

[0068] Perovskite solar cells (PSCs) are solar cells that utilize perovskite materials as light-absorbing materials. Compared with other solar cells, perovskite solar cells stand out in the field of solar cells due to their advantages such as low cost, high efficiency, and simple manufacturing process.

[0069] Perovskite solar cells may include multilayer stacked functional layers 103. Among the materials used in the aforementioned functional layers 103, some materials are easily oxidizable pastes 2A (e.g., tin-lead perovskite materials). During the formation of functional layers 103 using a coating method, the easily oxidizable paste 2A will undergo an oxidation reaction upon contact with air, resulting in a decrease in the photoelectric conversion efficiency and stability of the all-perovskite tandem solar cell.

[0070] For example, tin-lead perovskite possesses ideal narrow bandgap characteristics, which allows it to be combined with lead-based perovskites, which have wide bandgap, to form all-perovskite tandem solar cells. However, tin-lead perovskite materials have poor oxygen stability (i.e., they are easily oxidized). During the coating process, tin-lead perovskite materials undergo oxidation reactions upon contact with air, resulting in a decrease in the photoelectric conversion efficiency and stability of all-perovskite tandem solar cells.

[0071] Therefore, providing a coating device that can reduce the oxidation probability of easily oxidized materials (tin-lead perovskite materials) during the coating process has become an urgent technical problem to be solved.

[0072] To address the aforementioned problems, this application proposes a coating apparatus 10. The coating apparatus 10 is used to form a functional layer 103 on the surface of a substrate 200. The coating apparatus 10 includes a die head 100, which includes at least two flow channels. Each flow channel has an opening formed at its coating end 100A. Each opening is slit-shaped and arranged along the coating direction Y. The projections of adjacent openings along the coating direction Y at least partially overlap. The coating direction Y is the direction of movement of the die head 100 relative to the substrate 200 during coating.

[0073] In this application, the coating equipment 10 is provided with at least two flow channels. Based on this, the coating equipment 10 can use different flow channels to transport the easily oxidizable slurry 2A and the oxidation-resistant slurry 1A respectively, so that the easily oxidizable slurry 2A and the oxidation-resistant slurry 1A are extruded through different openings. Since the projections of adjacent openings 110 in the coating direction Y partially overlap, when the two slurries are coated onto the substrate 200, the oxidation-resistant slurry 1A can cover at least a portion of the surface of the easily oxidizable slurry 2A, thereby preventing the easily oxidizable slurry 2A from contacting air and reducing the oxidation of the easily oxidizable slurry 2A, which is beneficial to improving the stability of the prepared functional layer 103. Applying the coating equipment 10 provided in this application embodiment to the preparation of perovskite solar cells can improve the photoelectric conversion efficiency and stability of perovskite solar cells.

[0074] The coating apparatus 10 in this application can be used to fabricate the functional layer 103 of a solar cell. The functional layer 103 includes, but is not limited to, a hole transport layer, a light absorption layer, a hole blocking layer, and an electron transport layer.

[0075] The "solar cell" involved in the embodiments of this application includes, but is not limited to, a single cell unit, a tandem solar cell consisting of at least two stacked cell units, etc. The following description uses a solar cell as an example of a cell unit.

[0076] Figure 1 This is a schematic diagram of a solar cell according to an embodiment of this application. Figure 1 As shown, the solar cell 1000 includes: a first electrode 101 and a second electrode 102; a hole transport layer 131, a light absorption layer 132, a hole blocking layer 133, and an electron transport layer 134 disposed between the first electrode 101 and the second electrode 102.

[0077] It is important to note that Figure 1 This is merely an example of the arrangement of the hole transport layer 131, light absorption layer 132, hole blocking layer 133, and electron transport layer 134. The above arrangement does not constitute a specific limitation. In some embodiments, the arrangement order of the hole transport layer 131, light absorption layer 132, hole blocking layer 133, and electron transport layer 134 can be adjusted as needed.

[0078] In this application, the first electrode 101, also referred to as the bottom electrode, is the electrode that first receives incident light and is used to collect electrons / holes. The material used for the first electrode 101 includes a transparent conductive material. This application does not impose any particular limitation on the transparent conductive material used in the first electrode 101. Exemplarily, the transparent conductive material includes at least one of the following: tin oxide, indium tin oxide (ITO), fluorine-doped tin oxide (FTO), indium-doped zinc oxide (IZO), aluminum-doped zinc oxide (AZO), boron-doped zinc oxide (BZO), antimony-doped tin oxide, and indium-doped tungsten oxide.

[0079] In this application, the second electrode 102, also referred to as the top electrode, is the electrode that last receives incident light and is used to collect electrons / holes. The material used for the second electrode 102 includes conductive materials. This application does not impose any particular limitation on the conductive materials used in the second electrode 102. For example, the conductive material includes at least one of organic conductive materials and inorganic conductive materials, wherein the inorganic conductive material includes at least one of the aforementioned transparent conductive materials, metals and their alloys, and elemental carbon materials. Exemplarily, metals and their alloys include at least one of gold, silver, copper, aluminum, nickel, chromium, bismuth, platinum, magnesium, molybdenum, and tungsten. Exemplarily, elemental carbon materials include at least one of graphite, graphene, and carbon nanotubes. Exemplarily, organic conductive materials include at least one of poly(3,4-ethylenedioxythiophene), polythiophene, and polyacetylene. The following provides further description of each functional layer 103:

[0080] In this application, the hole transport layer 131 includes a hole transport material. There is no particular limitation on the hole transport material included in the hole transport layer 131 in this application. For example, the hole transport layer 131 includes at least one of an inorganic hole transport material and an organic hole transport material. Exemplarily, the inorganic hole transport material includes at least one of metal oxides and cuprous thiocyanate. Exemplarily, the metal oxides include: tin oxide (SnOx, where 1 < x < 2), nickel oxide (NiOx, 1 ≤ x ≤ 2), and cuprous oxide (Cu2O). Exemplarily, the organic hole transport materials include: [2-(3,6-dimethoxy-9H-carbazol-9-yl)butyl]phosphonic acid, poly(3,4-ethylenedioxythiophene), poly(styrenesulfonic acid), polystyrene sulfonic acid, poly(3-hexylthiophene), triphenylene-based triphenylamine, 3,4-ethylenedioxythiophenemethoxytriphenylamine, N-(4-anilino)carbazolospirobifluorene, and at least one of polythiophene.

[0081] In this application, in the light absorption layer 132, under the action of an electric field, electron-hole pairs are dissociated into carriers (electrons, holes). The directional movement of the dissociated carriers forms an electric current. The presence of the carrier transport layer can enhance the dissociation effect of electrons and holes, thereby effectively improving the photoelectric conversion efficiency of the battery. The light absorption layer 132 uses a light-absorbing material. In some embodiments, the light-absorbing material includes a perovskite material. Exemplarily, the perovskite material includes a tin-lead perovskite material. The lead perovskite material includes, but is not limited to, methyl tin-lead mixed halide perovskite, all-inorganic tin-lead binary perovskite, tin-lead-based perovskite composite materials, and other types of tin-lead perovskite materials. Exemplarily, the methyl tin-lead mixed halide perovskite includes: CH3NH3PbSnBr3, CH3NH3PbSnI3, CH3NH3PbSnI 3-x Br x . Exemplarily, the all-inorganic tin-lead binary perovskite includes: CsPbSnBr3, CsPbSnI3, CsPbSn(Br, I)3. Exemplarily, the tin-lead-based perovskite composite materials include: CsPbSnBr3 / TiO2, CsPbSnBr3 / Si3N4, CsPbSnBr3@SiO2@Al2O3, CsPbSnBr3 / graphene. Exemplarily, the other types of tin-lead perovskite materials include: SnPbBr3, SnPbI3, SnPb(Br, I)3.

[0082] In this application, the hole-blocking layer 133 includes a hole-blocking material. Exemplarily, the hole-blocking material is selected from 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline (BCP), SnO2, 1,3,5-tris(1-phenyl-1H-benzimidazol-2-yl)benzene (TPBI), 1,3-bis(3,5-dipyridin-3-ylphenyl)benzene (B3PyPB), diphenyl[4-(triphenylsilyl)phenyl]oxyphosphine (TSPO1), 2,7-bis(2,2'-bipyridin-5-yl)triphenylene (BPy-TP2), bis(8- At least one of the following: (hydroxy-2-methylquinoline)-(4-phenylphenoxy)aluminum, (6-(1,10-phenanthroline-3-yl)naphth-2-yl)diphenylphosphine oxide (Phen-NaDPO), 3-(biphenyl-4-yl)-5-(4-tert-butylphenyl)-4-phenyl-4H-1,2,4-triazole, 2-(4-tert-butylphenyl)-5-(4-biphenyl)-1,3,4-oxadiazole, 3,5-diphenyl-4-(1-naphthyl)-1H-1,2,4-triazole, and benzophenanthrene.

[0083] In this application, the electron transport layer 134 includes an electron transport material. This application does not impose any particular limitation on the electron transport material included in the electron transport layer 134. Exemplarily, the electron transport material includes at least one of: fullerenes and their derivatives (e.g., C60), metal oxides (such as oxides containing at least one of magnesium, cadmium, zinc, indium, lead, tungsten, bismuth, mercury, titanium, silver, manganese, iron, and vanadium), silicon oxide, strontium titanate, calcium titanate, lithium fluoride, and calcium fluoride.

[0084] This application provides a coating apparatus for forming a functional layer on the surface of a substrate, particularly suitable for forming a light-absorbing layer containing tin-lead perovskite materials. (See below) Figures 2 to 10 Some embodiments of this application will be described in detail.

[0085] Figure 2 This is a schematic diagram of the coating equipment shown in this application; Figure 3 for Figure 1 A cross-sectional view of the coating equipment shown on the A-A' plane; Figure 4 This is a cross-sectional view of the coating equipment during the coating process; Figure 5 A cross-sectional view of a coating apparatus provided in another embodiment of this application; Figure 6 This is a schematic diagram of the coating end provided in one embodiment of this application; Figure 7 A schematic diagram of the coating end provided in an embodiment of this application. Figure 2 ; Figure 8 A schematic diagram of the coating end provided in an embodiment of this application. Figure 3 ; Figure 9 A schematic diagram of the coating end provided in an embodiment of this application. Figure 4 ; Figure 10 A schematic diagram of the coating end provided in an embodiment of this application. Figure 5 .

[0086] Please see Figures 2 to 4 The coating apparatus 10 includes a die head 100. The die head 100 includes at least two flow channels 120, each flow channel 120 having an opening 110 formed at the coating end 100A of the die head 100. Each opening 110 is formed in a slit shape and arranged along the coating direction Y. The projections of adjacent openings along the coating direction Y at least partially overlap in the coating direction Y, which is the direction of movement of the die head 100 relative to the substrate 200 during coating.

[0087] In this application, the "die head 100" is the core component, and its interior is carefully designed with flow channels, with each independent flow channel corresponding to at least one opening. Before the coating operation begins, the slurry needs to be introduced into the flow channels inside the die head 100. The slurry reaches the opening through the flow channels, and finally is extruded through the opening and evenly coated on the surface of the substrate 200. As the substrate 200 continues to move, a functional layer 103 is eventually formed on the surface of the substrate 200.

[0088] In this application, "flow channel" is a channel provided inside the die head 100 for guiding and transporting fluids (such as slurry and gas in this application).

[0089] In this application, "opening" refers to a narrow opening formed at the bottom of the die head 100. In some embodiments, the opening is typically composed of two precision-machined metal plates or other material components, with a width generally between tens of micrometers and a few millimeters, and a length depending on the width requirements of the coating, which may range from a few centimeters to several meters.

[0090] In this application, "coating direction Y" refers to the direction of movement of the die head 100 relative to the substrate 200 during coating.

[0091] In this application, "easily oxidizable slurry 2A" refers to a mixed fluid containing easily oxidizable materials and possessing a certain degree of fluidity. The oxidizing material refers to a material that readily loses electrons upon contact with oxygen and has the ability to reduce other substances. Oxidizing materials include, but are not limited to, tin-lead perovskite materials.

[0092] In this application, "oxidation-resistant slurry 1A" refers to a mixed fluid containing oxidation-resistant materials and possessing a certain degree of fluidity. The oxidation-resistant material, under certain environmental conditions, resists the oxidation of oxygen, is not easily chemically reacted with oxygen, or reacts extremely slowly when in contact with oxygen, and can maintain relatively stable chemical and physical properties for a long time. Exemplarily, oxidation-resistant materials include, but are not limited to, alumina (Al2O3), titanium dioxide (TiO2), silicon nitride (Si3N4), and silicon carbide (SiC).

[0093] In this application, the coating equipment 10 is provided with at least two flow channels 120. Based on this, the coating equipment 10 can use different flow channels to transport the easily oxidizable slurry 2A and the oxidation-resistant slurry 1A respectively, so that the easily oxidizable slurry 2A and the oxidation-resistant slurry 1A are extruded through different openings. Since the projections of adjacent openings 110 in the coating direction Y partially overlap, when the two slurries are coated onto the substrate 200, the oxidation-resistant slurry 1A can cover at least a portion of the surface of the easily oxidizable slurry 2A, thereby preventing the easily oxidizable slurry 2A from contacting air and reducing the oxidation of the easily oxidizable slurry 2A, which is beneficial to improving the stability of the prepared functional layer 103. Applying the coating equipment 10 provided in this application embodiment to the preparation of perovskite solar cells can improve the photoelectric conversion efficiency and stability of perovskite solar cells.

[0094] See Figure 3 In some embodiments, at least two flow channels 120 include a first flow channel 12 and a second flow channel 22; the first flow channel 12 has an opening at the coating end 100A of the die head 100 to form a first opening 11, and the second flow channel 22 has an opening at the coating end 100A of the die head 100 to form a second opening 21. The first opening 11 and the second opening 21 are arranged along the coating direction Y, and the second opening 21 is located in front of at least a portion of the first opening 11 along the coating direction Y.

[0095] This design helps to ensure that the slurry extruded from the first opening 11 (e.g., oxidation-resistant slurry 1A) at least covers the upper surface of the slurry extruded from the second opening 21 (e.g., easily oxidized slurry 2A), reducing the probability that the upper surface of the slurry extruded from the second opening 21 comes into contact with oxygen and reducing the probability that the slurry extruded from the second opening 21 is oxidized, thereby improving the stability of the formed functional layer 103.

[0096] The following is combined Figure 4 The coating process implemented in the coating apparatus 10 based on this embodiment will be described:

[0097] During the coating process, since the second opening 21 is located in front of the first opening 11 along the coating direction Y, when the die head 100 moves, the easily oxidizable slurry 2A extruded from the second opening 21 will first coat the surface of the substrate 200, while the oxidation-resistant slurry 1A extruded from the first opening 11 will cover the upper surface of the easily oxidizable slurry 2A. This covering method avoids the upper surface of the easily oxidizable slurry 2A from being directly exposed to the air, effectively reducing the probability of the upper surface of the easily oxidizable slurry 2A coming into contact with oxygen, thereby reducing the possibility of the easily oxidizable slurry 2A being oxidized.

[0098] Please see Figure 6 In some embodiments, the projection F2 of the second opening 21 in the coating direction Y falls within the range of the projection F1 of the first opening 11 in the coating direction Y.

[0099] In this embodiment, the projection relationship between the second opening 21 and the first opening 11 in the coating direction Y is beneficial to ensure that the slurry extruded from the first opening 11 can completely cover the upper surface of the slurry extruded from the second opening 21. This helps to further reduce the probability of the slurry extruded from the second opening 21 being oxidized, thereby further improving the stability of the formed functional layer 103.

[0100] See also Figure 6 In some embodiments, the minimum distance W between the end of the projection F2 of the second opening 21 in the coating direction Y and the end of the projection F1 of the first opening 11 in the coating direction Y is 0mm-10mm.

[0101] In this embodiment, by controlling W to be between 0mm and 10mm, both the oxidation level of the slurry extruded from the second opening 21 and the amount of slurry extruded from the first opening 11 can be reduced. For example, W can be a value between 0mm, 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, or any two of these values.

[0102] The coating process implemented by the coating equipment 10 based on this embodiment will be described below, taking the easily oxidized slurry 2A extruded through the second opening 21 and the oxidation-resistant slurry 1A extruded through the first opening 11 as an example:

[0103] When W is greater than 0, the oxidation-resistant slurry 1A extruded from the first opening 11 not only covers the upper surface of the easily oxidizable slurry 2A extruded from the second opening 21, but also, due to the fluid properties of the oxidation-resistant slurry 1A itself, after covering the upper surface of the easily oxidizable slurry 2A, the excess oxidation-resistant slurry 1A will naturally flow to and cover the ends of the easily oxidizable slurry 2A. This method of covering the upper surface and both ends of the easily oxidizable slurry 2A helps to enhance the protective effect on the easily oxidizable slurry 2A and further reduce the probability of the easily oxidizable slurry 2A being oxidized.

[0104] Please see Figures 6 to 10 In some embodiments, the second opening 21 extends along the first direction X, which is consistent with the length direction of the second opening 21 and perpendicular to the coating direction Y.

[0105] The aforementioned second opening 21 provides a continuous and uniform extrusion channel for the slurry. When the slurry is conveyed to the second opening 21, it can be evenly distributed along the entire length of the second opening 21. This allows the slurry to be extruded from the second opening 21 at a relatively consistent flow rate and volume, effectively avoiding the probability of localized slurry accumulation or uneven extrusion, thus facilitating a smooth coating process.

[0106] Please see Figure 6 In some embodiments, the second opening 21 is located in front of the entire first opening 11 along the coating direction Y. This design facilitates the coating of the slurry extruded from the first opening 11 onto the upper surface of the slurry extruded from the second opening 21, thereby reducing the degree of oxidation of the slurry extruded from the second opening 21.

[0107] Please see Figure 6 The first opening 11 extends along the first direction X, which is consistent with the length direction of the first opening 11 and perpendicular to the coating direction Y.

[0108] The aforementioned first opening 11 provides a continuous and uniform extrusion channel for the slurry. When the slurry is conveyed to the first opening 11, it can be distributed relatively evenly along the length of the first opening 11. This facilitates the slurry to be extruded from the first opening 11 at a relatively consistent flow rate and volume, thereby reducing the probability of local slurry accumulation or uneven extrusion, and is beneficial for preparing a functional layer 103 with uniform properties. In particular, in the embodiment where oxidation-resistant slurry 1A is extruded from the first opening 11, it is beneficial for the oxidation-resistant slurry 1A to uniformly cover the upper surface of the easily oxidized slurry 2A, which in turn further improves the stability of the prepared functional layer 103.

[0109] Please see Figure 7 In some embodiments, the first opening 11 includes a first segment 11A, a second segment 11B, and a third segment 11C. The second segment 11B is disposed opposite to the first segment 11A; the third segment 11C extends along a first direction X, the first direction X is consistent with the length direction of the third segment 11C and perpendicular to the coating direction Y, the first segment 11A and the second segment 11B are respectively connected to the two ends of the third segment 11C and are both in communication with the third segment 11C; the second opening 21 along the coating direction Y is located at least in front of the third segment 11C.

[0110] In this embodiment, the first opening 11 can guide the extruded slurry (e.g., oxidation-resistant slurry 1A) to cover the upper surface and both ends of the slurry extruded from the second opening 21, thereby increasing the protection range for the slurry extruded from the second opening 21. In particular, in the embodiment where the second opening 21 extrudes easily oxidizable slurry 2A, it is beneficial to further reduce the probability of easily oxidizable slurry 2A being oxidized during the coating process, improve the stability of easily oxidizable slurry 2A, and thus improve the stability of the prepared functional layer 103.

[0111] Please see Figure 8 In some embodiments, the first opening 11 is an annular opening, which surrounds the second opening 21. In this embodiment, the structural layout of the annular opening surrounding the second opening 21 is beneficial for the slurry extruded from the first opening 11 to cover the slurry extruded from the second opening 21 in all directions, thereby expanding the coverage / protection range of the slurry extruded from the first opening 11 to the slurry extruded from the second opening 21.

[0112] See Figure 5 In some embodiments, the coating apparatus 10 further includes a first slurry supply device 13 and a second slurry supply device 23. The first slurry supply device 13 is connected to the first flow channel 12 and is used to supply the first flow channel 12 with an oxidation-resistant slurry 1A. The second slurry supply device 23 is connected to the second flow channel 22 and is used to supply the second flow channel 22 with an easily oxidized slurry 2A.

[0113] In this embodiment, the oxidation-resistant slurry 1A provided by the first slurry supply device 13 can pass through the first flow channel 12 and finally be extruded from the first opening 11. The easily oxidizable slurry 2A provided by the second slurry supply device 23 can pass through the second flow channel 22 and finally be extruded from the second opening 21. The second opening 21 is located in front of at least part of the first opening 11 along the coating direction Y, which is beneficial for covering the upper surface of the easily oxidizable slurry 2A with the oxidation-resistant slurry 1A, thereby reducing the probability of the upper surface of the easily oxidizable slurry 2A coming into contact with oxygen, thereby reducing the probability of the easily oxidizable slurry 2A being oxidized and improving the stability of the formed functional layer 103.

[0114] Please see Figure 9 and Figure 10 In some embodiments, at least two flow channels 120 further include a third flow channel 32, which forms a third opening 31 by opening a hole at the coating end 100A of the die head 100. The third opening 31 is disposed on the side of the second opening 21 away from the first opening 11 along the coating direction Y.

[0115] By creating a third opening 31 on the side of the second opening 21 away from the first opening 11, the material extruded from the third opening 31 can be coated onto the surface of the substrate 200. This helps reduce the probability of contact between oxygen adhering to the surface of the substrate 200 and the easily oxidized slurry 2A, thereby reducing the probability of the easily oxidized slurry 2A being oxidized. Alternatively, creating a third opening 31 at this location facilitates the formation of a multi-layered functional layer 103 in a single coating process, improving coating efficiency.

[0116] This application does not specifically limit the material extruded from the third opening 31. In some embodiments, the material extruded from the third opening 31 may be any one of oxidation-resistant slurry 1A, oxidation-resistant gas, or passivation slurry.

[0117] In this application, "passivating slurry" refers to a mixed fluid containing passivating materials and having a certain degree of fluidity. Passivating materials include, but are not limited to, metal oxides, small organic molecules, polymers, and metal halides. Exemplarily, metal oxides include alumina and zinc oxide; exemplarily, small organic molecules include triethoxyphosphorus fluoride; exemplarily, polymers include polyvinylpyrrolidone; exemplarily, metal halides include CsF.

[0118] In this application, "oxidation-resistant gas" refers to a gas that does not readily react with oxygen. This includes, but is not limited to, inert gases and reducing gases. For example, reducing gases include, but are not limited to, H2 and NH3.

[0119] See Figure 5 In some embodiments, the coating apparatus 10 further includes a first slurry supply device 13, a second slurry supply device 23, and a medium supply device 33. The first slurry supply device 13 is connected to the first flow channel 12 and is used to supply the first flow channel 12 with an oxidation-resistant slurry 1A. The second slurry supply device 23 is connected to the second flow channel 22 and is used to supply the second flow channel 22 with an easily oxidizable slurry 2A. The medium supply device 33 is connected to the third flow channel 32 and is used to supply the third flow channel 32 with any one of the following: oxidation-resistant slurry 1A, oxidation-resistant gas, and passivating slurry.

[0120] In an embodiment where the media supply device 33 provides the oxidation-resistant slurry 1A to the third flow channel 32, the oxidation-resistant slurry 1A provided by the first slurry supply device 13 is transported through the first flow channel 12 and then extruded from the first opening 11; simultaneously, the oxidation-resistant slurry 1A provided by the media supply device 33 is transported through the third flow channel 32 and extruded from the third opening 31. The extruded oxidation-resistant slurry 1A can respectively cover the upper and lower surfaces of the easily oxidizable slurry 2A. In this way, the probability of contact between the upper and lower surfaces of the easily oxidizable slurry 2A and oxygen is significantly reduced, thereby reducing the probability of contact between the upper and lower surfaces of the easily oxidizable slurry 2A and oxygen, and thus reducing the possibility of oxidation of the easily oxidizable slurry 2A, ultimately improving the stability of the formed functional layer 103.

[0121] In the embodiment where the dielectric supply device 33 provides an oxidation-resistant gas to the third flow channel 32, the oxidation-resistant gas provided by the dielectric supply device 33 is transmitted through the third flow channel 32 and finally output through the third opening 31. The output oxidation-resistant gas can reduce the oxygen content attached to the surface of the substrate 200, thereby reducing the probability of oxygen contacting the lower surface of the easily oxidized paste 2A, which is beneficial to further improving the stability of the prepared functional layer 103. In addition, in the functional layer 103 prepared in this embodiment, the easily oxidized paste 2A is only provided with the oxidation-resistant paste 1A on one side surface, which reduces the thickness of the functional layer 103 to a certain extent. When this functional layer 103 is applied to a solar cell, it helps to achieve the lightweighting of the solar cell.

[0122] In an embodiment where the medium supply device 33 is used to supply passivation slurry to the third flow channel 32, multi-layer coating can be achieved in a single coating process, which is beneficial to improving coating efficiency.

[0123] In some embodiments, the third opening 31 extends along the first direction X, which is consistent with the length direction of the third opening 31 and perpendicular to the coating direction Y.

[0124] The aforementioned third opening 31 can provide a continuous and uniform extrusion channel, which is conducive to the media being extruded from the third opening 31 at a relatively consistent flow rate and volume, which is conducive to the stability of the media supply, thereby reducing the probability of easily oxidized slurry 2A being oxidized, and further improving the stability of the prepared functional layer 103.

[0125] In some embodiments, the projection F2 of the second opening 21 in the coating direction Y falls within the range of the projection F3 of the third opening 31 in the coating direction Y. In this embodiment, the projection relationship between the second opening 21 and the third opening 31 in the coating direction Y is beneficial to further reduce the probability of the slurry extruded from the second opening 21 coming into contact with oxygen, thereby further improving the stability of the prepared functional layer 103.

[0126] In some embodiments, the third opening 31 can extrude an oxidation-resistant slurry 1A. Since the projection F2 of the second opening 21 in the coating direction Y falls within the range of the projection F3 of the third opening 31 in the coating direction Y, this means that the oxidation-resistant slurry 1A extruded from the third opening 31 can isolate the easily oxidized slurry 2A extruded from the second opening 21 from direct contact with the substrate 200, thereby protecting the stability of the easily oxidized slurry 2A and further improving the stability of the prepared functional layer 103.

[0127] See Figure 9In some embodiments, the minimum distance S between the end of the projection F2 of the second opening 21 in the coating direction Y and the end of the projection F3 of the third opening 31 in the coating direction Y is 0mm-10mm. By controlling S within the above range, it is possible to reduce both the degree of oxidation of the slurry extruded from the second opening 21 and the amount of slurry extruded from the third opening 31. Exemplarily, S is a value between 0mm, 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, or any two of these values.

[0128] See Figure 9 In some embodiments, at least one opening includes a first opening 11, a second opening 21, and a third opening 31, with the second opening 21 disposed between the first opening 11 and the third opening 31. During the coating process, the oxidation-resistant slurry 1A extruded from the first opening 11 can cover the upper surface of the easily oxidized slurry 2A, and the oxidation-resistant slurry 1A extruded from the third opening 31 can cover the lower surface of the easily oxidized slurry 2A, thereby achieving coverage of the upper and lower surfaces of the easily oxidized slurry 2A and reducing the probability of the easily oxidized slurry 2A being oxidized.

[0129] See Figure 10 In some embodiments, at least one opening includes a first opening 11, a second opening 21, and a third opening 31. The first opening 11 includes a first segment 11A, a second segment 11B, and a third segment 11C. The first segment 11A and the second segment 11B are positioned opposite each other, the third segment 11C connects the first segment 11A and the second segment 11B, and the third opening 31 is located on the side of the second opening 21 away from the third segment 11C. During the coating process, the oxidation-resistant slurry 1A extruded from the third segment 11C can cover the upper surface of the easily oxidized slurry 2A, while the oxidation-resistant slurry 1A extruded from the first segment 11A and the second segment 11B respectively covers both ends of the easily oxidized slurry 2A. The oxidation-resistant slurry 1A extruded from the third opening 31 can cover the lower surface of the easily oxidized slurry 2A, thereby achieving omnidirectional coverage of the easily oxidized slurry 2A and reducing the probability of oxidation of the easily oxidized slurry 2A.

[0130] See Figure 6 In some embodiments, the width H1 of the first opening 11 in the coating direction Y is smaller than the width H2 of the second opening 21 in the coating direction Y. The relatively narrow design of the first opening 11 can reduce the amount of slurry extruded from the first opening 11, thereby reducing production costs while ensuring the protective effect.

[0131] In the embodiment where perovskite material (easily oxidizable slurry 2A) is extruded through the second opening 21, the wider second opening 21 can increase the mass proportion of perovskite material in the prepared light-absorbing layer. Perovskite material is a key material in the light-absorbing layer; increasing its mass proportion means that more light can be effectively absorbed and converted into electrical energy, thereby improving photoelectric conversion efficiency.

[0132] In some embodiments, the width of the second opening 21 in the coating direction Y is between 0.04 mm and 1.5 mm. By controlling the width of the second opening 21 in the coating direction Y within the above range, it helps to reduce problems such as inconsistent flow rate and uneven distribution of the slurry during extrusion caused by an excessively wide second opening 21; on the other hand, it helps to reduce problems such as line breakage caused by excessive flow resistance of the slurry due to an excessively narrow second opening 21. For example, the width of the second opening 21 in the coating direction Y is 0.04 mm, 0.05 mm, 0.06 mm, 0.07 mm, 0.08 mm, 0.09 mm, 0.10 mm, 0.11 mm, 0.12 mm, 0.13 mm, 0.14 mm, 0.15 mm, or any value within a range of two such values.

[0133] In some embodiments, the coating apparatus 10 further includes a transmission component 300 for moving the substrate 200. Using the transmission component 300 to move the substrate 200 facilitates a thin and uniform coating of the slurry extruded from the second opening 21 onto the substrate 200.

[0134] In this embodiment, the transmission component 300 is not specifically limited; it can be any component conventionally used in the art that can move the substrate 200. For example, the transmission component 300 may include a conveyor belt. During coating, the substrate 200 can be fixed on the conveyor belt, and the conveyor belt can move the substrate 200 along the coating direction Y.

[0135] In some embodiments, the second slurry supply device 23 is used to supply tin-lead perovskite material to the second flow channel 22. Tin-lead perovskite has ideal narrow bandgap characteristics, which allows it to be combined with lead-based perovskite with wide bandgap to form an all-perovskite tandem solar cell.

[0136] In some embodiments, the functional layer 103 prepared according to the present application includes a layered body and a coating layer disposed on at least a portion of the surface of the layered body, wherein the layered body includes a tin-lead perovskite material. Since at least a portion of the surface of the layered body is covered by the coating layer, the coating layer can, to a certain extent, block oxygen from contacting the tin-lead perovskite material contained in the layered body, thereby improving the stability of the layered body and thus improving the stability of the prepared functional layer 103.

[0137] See Figures 2 to 4 and Figure 6 In one specific embodiment, the coating apparatus 10 includes a die head 100 and a transmission component 300. The die head 100 includes a first flow channel 12 and a second flow channel 22. The first flow channel 12 has an opening 11 formed at the coating end 100A of the die head 100, and the second flow channel 22 has an opening 21 formed at the coating end 100A of the die head 100. The first opening 11 and the second opening 21 are arranged along the coating direction Y, and the projection of the second opening 21 in the coating direction Y falls within the range of the projection of the first opening 11 in the coating direction Y. The second opening 21 is located in front of at least a portion of the first opening 11 along the coating direction Y. The projection F2 of the second opening 21 in the coating direction Y falls within the range of the projection F1 of the first opening 11 in the coating direction Y. The substrate 200 is fixed to the transmission component 300.

[0138] The first slurry supply device 13 provides an oxidation-resistant slurry, which is transported through the first flow channel 12 and finally extruded from the first opening 11. The second slurry supply device 23 provides an easily oxidizable slurry, which is transported through the second flow channel 22 and extruded from the second opening 21. Based on this opening layout, during the extrusion process of the easily oxidizable slurry 2A and the oxidation-resistant slurry 1A, the easily oxidizable slurry 2A is coated onto the surface of the substrate 200. The oxidation-resistant slurry 1A covers the upper surface of the easily oxidizable slurry 2A, forming a physical barrier that prevents oxygen from the surrounding environment from contacting the upper surface of the easily oxidizable slurry 2A, further reducing the probability of contact between the upper surface of the easily oxidizable slurry 2A and oxygen.

[0139] The above embodiments are merely illustrative of the technical solutions of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A coating apparatus for forming a functional layer on a substrate surface, characterized in that, include: A die head, the die head including at least two flow channels, each flow channel having an opening formed by a hole at the coating end of the die head, each opening being formed as a slit and arranged along the coating direction, the projections of adjacent openings along the coating direction at least partially overlapping in the coating direction, the coating direction being the direction of movement of the die head relative to the substrate during coating.

2. The coating equipment according to claim 1, characterized in that, The at least two flow channels include a first flow channel and a second flow channel; The first flow channel forms a first opening by opening a hole at the coating end of the die head, and the second flow channel forms a second opening by opening a hole at the coating end of the die head. The first opening and the second opening are arranged along the coating direction, and the second opening is located in front of at least a portion of the first opening along the coating direction.

3. The coating equipment according to claim 2, characterized in that, The projection of the second opening in the coating direction falls within the range of the projection of the first opening in the coating direction.

4. The coating equipment according to claim 2 or 3, characterized in that, The minimum distance between the end of the projection of the second opening in the coating direction and the end of the projection of the first opening in the coating direction is 0 mm to 10 mm.

5. The coating equipment according to any one of claims 2 to 4, characterized in that, The second opening extends along a first direction, which is consistent with the length direction of the second opening and perpendicular to the coating direction.

6. The coating apparatus according to any one of claims 2 to 5, characterized in that, The second opening is located in front of the entire first opening along the coating direction.

7. The coating apparatus according to any one of claims 2 to 6, characterized in that, The first opening extends along a first direction, which is consistent with the length direction of the first opening and perpendicular to the coating direction.

8. The coating apparatus according to any one of claims 2 to 5, characterized in that, The first opening includes a first segment; The second segment is positioned opposite to the first segment; The third segment extends along a first direction, which is consistent with the length direction of the third segment and perpendicular to the coating direction. The first segment and the second segment are respectively connected to the two ends of the third segment and are both connected to the third segment. The second opening is located at least in front of the third segment along the coating direction.

9. The coating apparatus according to any one of claims 2 to 5, characterized in that, The first opening is configured as an annular opening, which surrounds the second opening.

10. The coating apparatus according to any one of claims 2 to 9, characterized in that, Also includes: A first slurry supply device is connected to the first flow channel and is used to supply oxidation-resistant slurry to the first flow channel; The second slurry supply device is connected to the second flow channel and is used to supply easily oxidizable slurry to the second flow channel.

11. The coating apparatus according to any one of claims 2 to 8, characterized in that, The at least two flow channels also include a third flow channel, which forms a third opening by having an opening at the coating end of the die head. The third opening is located on the side of the second opening away from the first opening along the coating direction.

12. The coating equipment according to claim 11, characterized in that, Also includes: A first slurry supply device is connected to the first flow channel and is used to supply oxidation-resistant slurry to the first flow channel; The second slurry supply device is connected to the second flow channel and is used to supply easily oxidizable slurry to the second flow channel; A medium supply device, which is connected to the third flow channel, is used to supply the third flow channel with any one of an oxidation-resistant slurry, an oxidation-resistant gas, and a passivation slurry.

13. The coating equipment according to claim 11 or 12, characterized in that, The third opening extends along a first direction, which is consistent with the length direction of the third opening and perpendicular to the coating direction.

14. The coating apparatus according to any one of claims 11 to 13, characterized in that, The projection of the second opening in the coating direction falls within the range of the projection of the third opening in the coating direction.

15. The coating apparatus according to any one of claims 11 to 14, characterized in that, The minimum distance between the end of the projection of the second opening in the coating direction and the end of the projection of the third opening in the coating direction is 0 mm to 10 mm.

16. The coating apparatus according to any one of claims 2 to 15, characterized in that, The width of the second opening in the coating direction is greater than the width of the first opening in the coating direction.

17. The coating apparatus according to any one of claims 2 to 16, characterized in that, The width of the second opening in the coating direction is 0.04 mm to 1.5 mm.

18. The coating apparatus according to any one of claims 1 to 17, characterized in that, It also includes transmission components; The transmission component is used to drive the substrate to move.

19. The coating apparatus according to claim 10 or 12, characterized in that, The second slurry supply device is used to supply tin-lead perovskite material to the second flow channel.

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