Device for treating gate valve pollution in vacuum cavity

Abstract

The utility model relates to the technical field of vacuum cavity equipment, in particular to a device for treating gate valve pollution in a vacuum cavity. The utility model provides a movable small manipulator device with sweeping and suction functions in a vacuum cavity. The movable small manipulator device comprises a suction pipeline and pump set system, a small manipulator, an extension arm, an angle adjusting and locking mechanism, a vacuum three-way flange, a small manipulator shaft lever, a supporting and telescopic control mechanism and a three-piece flange ball valve. According to the device, residual source material pollutants on the surface of the gate valve and the like can be cleaned under the conditions that a cavity is not opened and vacuum is not damaged, the sealing performance and stability of the gate valve can be effectively ensured, and the number of times of shutdown caused by opening the cavity to treat the residual source material pollutants can be effectively reduced; therefore, the service life of the gate valve is prolonged, the replacement cost of the gate valve is reduced, and the maintenance cost of vacuum cavity equipment is further reduced.

Description

Technical Field

[0001] This utility model relates to the field of vacuum chamber equipment technology, specifically to a device for treating gate valve contamination in a vacuum chamber. Background Technology

[0002] In vacuum chamber equipment, gate valves are critical control components, widely used in vacuum equipment for semiconductor material preparation such as thermal evaporation equipment, magnetron sputtering equipment, and molecular beam epitaxy equipment. By opening and closing gate valves, different vacuum chambers can be effectively connected and isolated, thereby effectively maintaining and regulating the vacuum level of different chambers, ensuring the normal operation of the equipment and meeting various process requirements. The precise control capability, good sealing performance, and stability of gate valves are crucial to ensuring the smooth operation of the process.

[0003] In the vacuum growth chamber, residual source material evaporated or sputtered during sample growth will deposit on the surface of the gate valve, the gap between the gate valve and the valve base, etc., thus contaminating the sample and causing gas leakage, which directly affects the stability of the entire vacuum system and the process effect.

[0004] Currently, the common method for dealing with gate valves contaminated by residual source materials is to periodically shut down the machine to open the chamber for inspection and cleaning of the gate valve plate surface, the gap between the gate valve and the valve base, etc. However, this can lead to production interruptions and may even cause a decline in the quality of the grown sample material, resulting in economic losses. This method also increases the number of downtimes and maintenance workload in addition to equipment failures. Furthermore, if the gate valve cleaning method is not appropriate, it will increase the cost of maintenance and replacement. Utility Model Content

[0005] In response to the work requirements and existing problems in the aforementioned background technology, the inventors have considered and innovated in order to provide a device for treating gate valve contamination in a vacuum chamber, which can clean the source material contaminants of the gate valve without opening the vacuum chamber.

[0006] To solve the above problems and achieve the above objectives, the present invention adopts the following technical solution:

[0007] A device for treating gate valve contamination in a vacuum chamber includes a pump system that provides suction force. The device consists of four parts: a small manipulator, a suction pipeline, a small manipulator shaft, and an external rotating strong magnetic sleeve.

[0008] The small robotic arm is located inside the vacuum chamber. It is detachably connected to the suction pipeline and has a small robotic arm shaft fixedly connected inside. The small robotic arm has a cylindrical structure, with a sweeping ring and several suction slots at one end, which have sweeping and suction functions. The small robotic arm is also fixedly connected to a small robotic arm flange.

[0009] The suction line is detachably connected to the vacuum chamber wall through hole located on the side of the gate valve. One end of the line is detachably connected to the small manipulator via a small manipulator flange, and the other end is connected to the pump system via a pipeline to provide suction force to the small manipulator.

[0010] One end of the small robotic arm's shaft is fixedly connected to the small robotic arm, and the other end has an internal strong magnetic rotating shaft; the small robotic arm's shaft is installed in a magnetic coupling fixing sleeve through a first bearing and a second bearing.

[0011] The external rotating strong magnetic sleeve is installed outside the magnetic sleeve coupling fixing sleeve through a bearing. It forms a magnetic coupling rotation control with the internal strong magnetic rotating shaft. The rotation of the small manipulator shaft is controlled by rotating the strong magnetic sleeve.

[0012] Preferably, the suction slits are rectangular and radially and evenly distributed at one end of the main body of the small robotic arm.

[0013] Preferably, the suction pipe consists of four parts: an extension arm, an angle adjustment and locking mechanism, a vacuum tee flange, and a flange ball valve. The extension arm is detachably connected to the angle adjustment and locking mechanism. One end of the angle adjustment and locking mechanism is detachably connected to the extension arm, and the other end is detachably connected to the vacuum tee flange. One end of the vacuum tee flange is detachably connected to the angle adjustment and locking mechanism, and the other end is detachably connected to the flange ball valve. The flange ball valve is connected to the pump system via a pipeline.

[0014] Preferably, the extension arm consists of three parts: a small manipulator docking flange, a first bellows, and a mounting flange, and has axial telescopic function; the small manipulator docking flange is detachably connected to the small manipulator; the mounting flange is detachably connected to the angle adjustment and locking mechanism, and the mounting flange is also detachably connected to the vacuum chamber through a flange on the vacuum chamber wall through hole.

[0015] Preferably, the angle adjustment and locking mechanism consists of four parts: a second bellows front flange, a second bellows, a second bellows rear flange, and an adjusting screw assembly. Several first ear plates are distributed on the second bellows front flange. One end of the second bellows is fixedly connected to the second bellows front flange, and the other end is fixedly connected to the second bellows rear flange. Several second ear plates are distributed on the second bellows rear flange, and the number of second ear plates is the same as the number of first ear plates. The adjusting screw assembly has an array of arrays, and the number of arrays is the same as the number of first ear plates and second ear plates.

[0016] Preferably, the adjusting screw assembly consists of five parts: a first adjusting screw, a nut, a locking sleeve, a first limiting ball, and a second limiting ball. The first adjusting screw is detachably connected to the first ear plate via the locking sleeve and passes through the second ear plate and the second limiting ball. There are two nuts, which are respectively connected to the first adjusting screw and to both sides of the second ear plate. The locking sleeve is detachably connected to the first ear plate. The first limiting ball is fixedly connected to the first adjusting screw. The second limiting ball is connected inside the second ear plate.

[0017] Preferably, the flange ball valve is a three-piece flange ball valve.

[0018] Preferably, it further includes a support and telescopic control mechanism and an adapter flange. The support and telescopic control mechanism is detachably connected to the suction pipeline via the adapter flange and consists of six parts: a third bellows front flange, a second adjusting screw, a support rod, a third bellows, a third bellows rear flange, and a fixing block. One end of the second adjusting screw is fixedly connected to the third bellows front flange, and the other end is fixedly connected to the fixing block. There are several support rods, one end of which is fixedly connected to the third bellows front flange, and the other end is fixedly connected to the fixing block. One end of the third bellows is fixedly connected to the third bellows front flange, and the other end is fixedly connected to the third bellows rear flange. The third bellows is located at the center of the second adjusting screw and the support rod. A through hole is provided on the fixing block, and the rotating handle passes through the through hole and connects to the second adjusting screw.

[0019] Preferably, a third bearing is connected to the center of the front flange of the third bellows.

[0020] Preferably, the third bellows rear flange has a through hole, which passes through the second adjusting screw and the support rod and can slide on the second adjusting screw and the support rod.

[0021] The working principle of this utility model is as follows:

[0022] This device connects to the flange on the through-hole of the vacuum chamber wall via the mounting flange on the extension arm, allowing the small robotic arm and extension arm to be placed inside the vacuum chamber. This enables the small robotic arm to clean source material contamination at the gate valve without opening the chamber. The angle adjustment and locking mechanism, along with the support and telescopic control mechanism, allow the device to extend and retract axially within the vacuum chamber, as well as deflect at a certain angle (e.g., ...). Figure 5 , Figure 11 As shown), furthermore, the small robot arm's internal shaft is supported and mounted via bearings, and its rotation is magnetically coupled to an external rotating magnetic sleeve via an internal strong magnetic rotating shaft. This allows the external rotating magnetic sleeve to control the rotation of the small robot arm connected to the small robot arm's shaft around the shaft (as shown). Figure 6 , Figure 12 As shown in the figure, this allows the small robotic arm to have a certain degree of freedom in the vacuum chamber. Combined with the suction pipeline and pump system that provide suction force, it can achieve comprehensive cleaning of source material contamination at various locations of the gate valve.

[0023] In the growth chamber of a vacuum chamber device, maintenance is usually carried out by stopping liquid nitrogen and shutting down some vacuum pumps to create a low vacuum environment in the chamber. This device is used in this low vacuum environment. A suitable pump system is selected so that the pump inlet pressure is lower than the chamber pressure, forming an effective pressure difference, so that residual source material can be drawn into the pump.

[0024] The beneficial effects of this utility model are:

[0025] 1. This utility model reduces production interruptions and improves production efficiency. The traditional method of periodically stopping the machine to open the vacuum chamber to clean the gate valve will cause production interruptions and affect the production schedule. However, this device can clean the source material contamination at the gate valve without opening the chamber, using a movable small robotic arm with sweeping and suction functions. This avoids production interruptions caused by stopping the machine to open the chamber for cleaning and improves production efficiency.

[0026] 2. This invention ensures the production quality of samples. Traditional cavity cleaning processes may cause changes in the cavity environment, such as variations in temperature and pressure, potentially leading to equipment damage and secondary contamination, thus affecting subsequent sample production. This device can clean the gate valve in a low-vacuum maintenance environment without completely disrupting the vacuum, reducing external interference with the cavity environment and thus ensuring the production quality of samples.

[0027] 3. This utility model is flexible and convenient to operate, reducing maintenance workload. The angle adjustment and locking mechanism, as well as the support and telescopic control mechanism, allow the device to extend and retract axially and deflect at a certain angle within the vacuum chamber. Simultaneously, the small robotic arm can rotate around its axis via magnetic coupling, giving it a certain degree of freedom within the vacuum chamber and enabling it to easily and flexibly reach various contaminated parts of the gate valve for cleaning. Furthermore, this design reduces the complex operation of manual chamber opening for cleaning, thus reducing maintenance workload. Attached Figure Description

[0028] Figure 1 This is one of the installation diagrams of this utility model;

[0029] Figure 2 This is the second installation diagram of this utility model;

[0030] Figure 3 This is the third installation diagram of this utility model;

[0031] Figure 4 This is the fourth installation diagram of this utility model;

[0032] Figure 5 This is one of the schematic diagrams of the working state of this utility model;

[0033] Figure 6 This is the second schematic diagram of the working state of this utility model;

[0034] Figure 7 yes Figure 2 Side view of the installation diagram shown;

[0035] Figure 8 yes Figure 7 The sectional view at point AA in the side view shown, and the schematic diagram of the principle of suction in this utility model;

[0036] Figure 9 This is one of the three-dimensional assembly drawings of this utility model;

[0037] Figure 10 This is the second three-dimensional assembly drawing of this utility model;

[0038] Figure 11 This is a schematic diagram illustrating the principle of axial telescopic extension of this utility model;

[0039] Figure 12 This is a schematic diagram illustrating the principle of a small robotic arm rotating around an axis;

[0040] Figure 13 This is a three-dimensional structural diagram of the support and telescopic control mechanism;

[0041] Figure 14 yes Figure 13 Side view of the schematic diagram of the three-dimensional structure shown;

[0042] Figure 15 yes Figure 14 The sectional view at point BB in the side view shown;

[0043] Figure 16 This is a 3D structural diagram of a small robotic arm;

[0044] Figure 17 This is one of the schematic diagrams illustrating the working principle of the angle adjustment and locking mechanism;

[0045] Figure 18 This is the second schematic diagram illustrating the working principle of the angle adjustment and locking mechanism;

[0046] Figure 19 It is a 3D assembly drawing of the angle adjustment and locking mechanism;

[0047] The numbers in the diagram are:

[0048] 1—Small robotic arm, 11—Brushing ring, 12—Suction seam, 13—Small robotic arm flange;

[0049] 2—Suction pipe; 21—Extension arm; 211—Small manipulator docking flange; 212—First bellows; 213—Mounting flange; 22—Angle adjustment and locking mechanism; 221—Second bellows front flange; 2211—First ear plate; 222—Second bellows; 223—Second bellows rear flange; 2231—Second ear plate; 224—Adjusting screw assembly; 2241—First adjusting screw; 2242—Nut; 2243—Locking sleeve; 2244—First limit ball; 2245—Second limit ball; 23—Vacuum tee flange; 24—Flange ball valve;

[0050] 3—Small robotic arm shaft, 31—Internal strong magnetic rotating shaft, 32—First bearing, 33—Second bearing, 34—Magnetic sleeve coupling fixing sleeve;

[0051] 4—External rotating strong magnetic sleeve;

[0052] 5—Support and telescopic control mechanism; 51—Third bellows front flange; 511—Third bearing; 52—Second adjusting screw; 53—Support rod; 54—Third bellows; 55—Third bellows rear flange; 56—Fixing block; 57—Rotating handle.

[0053] 6—Transition flange;

[0054] 7—Vacuum cavity, 71—Vacuum cavity wall through hole, 72—Gate valve. Detailed Implementation

[0055] The present utility model patent will be further described in detail below with reference to the accompanying drawings and specific embodiments; it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present utility model patent.

[0056] Example

[0057] In this embodiment, the main body of the small robotic arm 1 is made of stainless steel material with high temperature stability, wear resistance and low outgassing rate. The part where it is connected to the sweeping ring 11 is processed with femtosecond laser to form a honeycomb micropore to form a nano-textured structure, so as to increase the surface area and roughness, and deposit a 2nm ultrathin Al2O3 layer to enhance the adhesion. The sweeping ring 11 is made of fluororubber material with flexibility, baking temperature resistance and low outgassing rate. In this embodiment, perfluoroether rubber material is selected and it is bonded to the small robotic arm 1 through dynamic vulcanization process.

[0058] like Figure 1 — Figure 19 The apparatus shown is for treating gate valve contamination in a vacuum chamber, including a pump system that provides suction force, a small manipulator 1, a suction pipeline 2, a small manipulator shaft 3, an external rotating strong magnetic sleeve 4, a support and telescopic control mechanism 5, and a transition flange 6.

[0059] like Figure 8 , Figure 9 , Figure 16 As shown, the small robotic arm 1 is detachably connected to the extension arm 21, and a small robotic arm shaft 3 is fixedly connected inside. The small robotic arm 1 has a cylindrical structure, with a sweeping ring 11 and several suction slits 12 at one end. The suction slits 12 are rectangular and evenly distributed radially. During operation, the sweeping ring 11 of the small robotic arm 1 can sweep the surface of the gate valve 72 to remove residual source material contaminants from its surface. At the same time, the pump system provides suction force to the device through the suction pipe 2. Under the action of suction force, the residual source material contaminants are sucked into the pump system through the suction slits 12 at one end of the small robotic arm 1, and then collected and processed.

[0060] like Figure 4 As shown, the suction line 2 consists of an extension arm 21, an angle adjustment and locking mechanism 22, a vacuum tee flange 23, and a flange ball valve 24.

[0061] like Figure 5 , Figure 9 As shown, the extension arm 21 is used to extend the working range of the small manipulator 1 within the vacuum chamber 7. It is composed of a small manipulator docking flange 211, a first bellows 212, and a mounting flange 213, which are fixedly connected. The small manipulator docking flange 211 is detachably connected to the small manipulator 1, and the mounting flange 213 is detachably connected to the angle adjustment and locking mechanism 22. The mounting flange 213 can also be detachably connected to the vacuum chamber 7 through the flange on the vacuum chamber wall through hole 71. Thus, the device can be fixed on the vacuum chamber 7, and mechanical motion can be transmitted from the outside to the small manipulator 1 without opening the chamber.

[0062] like Figure 9 , Figure 19 As shown, the angle adjustment and locking mechanism 22 consists of a second bellows front flange 221, a second bellows 222, a second bellows rear flange 223, and an adjusting screw assembly 224. Several first ear plates 2211 are distributed on the second bellows front flange 221, and the same number of second ear plates 2231 as the first ear plates 2211 are distributed on the second bellows rear flange 223. The number of adjusting screw assemblies 224 is the same as the number of first ear plates 2211 and second ear plates 2231. The adjusting screw assembly 224 includes a first adjusting screw 2241, a nut 2242, a locking sleeve 2243, a first limiting ball 2244, and a second limiting ball 2245. The first limiting ball 2244 is fixedly connected to the first adjusting screw 2241, and the second limiting ball 2245 is connected to the second ear plate 2231. The first adjusting screw 2241 is detachably connected to the first ear plate 2211 through the locking sleeve 2243 and passes through the second ear plate 2231 and the second limiting ball 2245. It can be locked and fixed by the two nuts 2242.

[0063] like Figure 5 , Figure 17 , Figure 18 As shown, when the nut 2242 is rotated away from the second ear plate 2231 to loosen it, the second bellows front flange 221, the second bellows 222, and the second bellows rear flange 223 can change angles, and the small manipulator 1 inside the cavity also gains a certain degree of freedom; when the nut 2242 is rotated close to the second ear plate 2231 to tighten it, the angle change of this device is locked.

[0064] like Figure 9 As shown, the vacuum tee flange 23 is used to integrate the gas path and mechanical structure. One end of the vacuum tee flange 23 is detachably connected to the angle adjustment and locking mechanism 22, the other end is detachably connected to the adapter flange 6, and the third end is detachably connected to the flange ball valve 24.

[0065] like Figure 9 , Figure 10 , Figure 12 As shown, one end of the small manipulator shaft 3 is fixedly connected to the small manipulator 1, and the other end is connected to the support and telescopic control mechanism 5 through a bearing. The small manipulator shaft 3 is a cylindrical rod, and one end of it is fixedly connected to an internal strong magnetic rotating shaft 31. The small manipulator shaft 3 is connected to the inside of the magnetic coupling fixing sleeve 34 through the first bearing 32 and the second bearing 33 inside the magnetic coupling fixing sleeve 34. An external rotating strong magnetic sleeve 4 is installed on the outside of the magnetic coupling fixing sleeve 34 through a bearing. The small manipulator shaft 3 is supported and installed by the bearing, and the internal strong magnetic rotating shaft 31 and the external rotating strong magnetic sleeve 4 form a magnetic coupling rotation control, so that the external rotating strong magnetic sleeve 4 can control the small manipulator 1 connected to the small manipulator shaft 3 to rotate around the axis, thereby further expanding the degree of freedom of the small manipulator 1 in the vacuum cavity 7.

[0066] like Figure 9 , Figure 13 , Figure 14 , Figure 15As shown, the support and telescopic control mechanism 5 includes a third bellows front flange 51, a second adjusting screw 52, ​​a support rod 53, a third bellows 54, a third bellows rear flange 55, a fixing block 56, and a rotating handle 57. A third bearing 511 is centrally connected to the third bellows front flange 51. One end of the second adjusting screw 52 is fixedly connected to the third bellows front flange 51, and the other end is fixedly connected to the fixing block 56. One end of the support rod 53 is fixedly connected to the third bellows front flange 51, and the other end is fixedly connected to the fixing block 56. The third bellows 54 is located at the center of the second adjusting screw 52 and the support rod 53, with one end fixedly connected to the third bellows front flange 51 and the other end fixedly connected to the third bellows rear flange 55. A through hole is provided on the third bellows rear flange 55, through which the second adjusting screw 52 and the support rod 53 pass and can slide. A through hole is provided on the fixing block 56, through which the rotating handle 57 passes and connects to the second adjusting screw 52.

[0067] like Figure 5 , Figure 11 As shown, by rotating the rotary handle 57, the second adjusting screw 52 is driven to rotate, causing the third bellows rear flange 55 to slide on the second adjusting screw 52 and the support rod 53. Then, the small manipulator 1 is controlled to extend and retract by the small manipulator shaft 3, so that it can penetrate into the cavity for cleaning.

[0068] like Figure 2 , Figure 7 , Figure 9 As shown, flange ball valve 24 is a three-piece flange ball valve, which is connected to the pump system through suction pipe 2 to provide suction force for the small manipulator device.

[0069] In summary, the specific usage process of this utility model is as follows:

[0070] First, after assembling all the components of the device, fix the device to the vacuum chamber 7 by connecting the mounting flange 213 to the flange on the vacuum chamber wall through hole 71; then, rotate the nut 2242 away from the second ear plate 2231 to loosen it, and the second bellows front flange 221, the second bellows 222, and the second bellows rear flange 223 can change angles, and the small manipulator 1 in the chamber also gains a certain degree of freedom.

[0071] Furthermore, close the flange ball valve 24 and start the pump unit to pre-pump the pipeline between the flange ball valve 24 and the pump unit.

[0072] Furthermore, by extending, deflecting, and rotating the small robotic arm 1, residual source material contaminants on the surface of the gate valve 72 and other parts are swept away.

[0073] Furthermore, by extending and rotating the small manipulator 1, its suction seam 12 is pressed tightly against the surface of the gate valve 72 and other parts to be treated; then the flange ball valve 24 is opened to create a negative pressure environment inside the main body of the small manipulator 1, and the residual source material contaminants on the surface of the gate valve 72 and other parts are suctioned.

[0074] Finally, after cleaning all the parts to be cleaned, retract the small robotic arm 1, and then rotate the nut 2242 close to the second ear plate 2231 to tighten and lock the device.

Claims

1. An apparatus for treating gate valve contamination in a vacuum chamber, comprising a pump system providing suction force, characterized in that, The device consists of four parts: a small robotic arm (1), a suction tube (2), a small robotic arm shaft (3), and an external rotating strong magnetic sleeve (4). The small manipulator (1) is located inside the vacuum chamber (7), and is detachably connected to the suction pipe (2) and has a small manipulator shaft (3) fixedly connected inside; the small manipulator (1) is a cylindrical structure, with a sweeping ring (11) and several suction slots (12) at one end, and has sweeping and suction functions; the small manipulator (1) is also fixedly connected to a small manipulator flange (13). The suction pipeline (2) is detachably connected to the vacuum cavity wall through hole (71) of the vacuum cavity (7) located on the side of the gate valve (72), and one end of it is detachably connected to the small manipulator (1) through the small manipulator flange (13), and the other end is connected to the pump group system through the pipeline to provide suction force to the small manipulator (1); One end of the small manipulator shaft (3) is fixedly connected to the small manipulator (1), and the other end has an internal strong magnetic rotating shaft (31); the small manipulator shaft (3) is installed in the magnetic coupling fixing sleeve (34) through the first bearing (32) and the second bearing (33); The external rotating strong magnetic sleeve (4) is installed outside the magnetic sleeve coupling fixed sleeve (34) through a bearing. It forms a magnetic coupling rotation control with the internal strong magnetic rotating shaft (31). The rotation of the small manipulator shaft (3) is controlled by rotating the strong magnetic sleeve (4).

2. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 1, characterized in that, The suction slit (12) is rectangular and is evenly distributed radially at one end of the small manipulator (1).

3. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 1, characterized in that, The suction pipeline (2) consists of four parts: an extension arm (21), an angle adjustment and locking mechanism (22), a vacuum tee flange (23), and a flange ball valve (24). The extension arm (21) is detachably connected to the angle adjustment and locking mechanism (22); The angle adjustment and locking mechanism (22) is detachably connected at one end to the extension arm (21) and detachably connected at the other end to the vacuum tee flange (23); One end of the vacuum tee flange (23) is detachably connected to the angle adjustment and locking mechanism (22), and the other end is detachably connected to the flange ball valve (24); The flange ball valve (24) is connected to the pump system via a pipeline.

4. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 3, characterized in that, The extension arm (21) consists of three parts: a small robotic arm docking flange (211), a first bellows (212), and a mounting flange (213), and has axial telescopic function; The small robotic arm docking flange (211) is detachably connected to the small robotic arm (1); The mounting flange (213) is detachably connected to the angle adjustment and locking mechanism (22), and the mounting flange (213) is also detachably connected to the vacuum chamber (7) through the flange on the vacuum chamber wall through hole (71).

5. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 3, characterized in that, The angle adjustment and locking mechanism (22) consists of four parts: the second bellows front flange (221), the second bellows (222), the second bellows rear flange (223), and the adjusting screw assembly (224). Several first lugs (2211) are distributed on the second bellows front flange (221); One end of the second bellows (222) is fixedly connected to the front flange (221) of the second bellows, and the other end is fixedly connected to the rear flange (223) of the second bellows; The second bellows rear flange (223) has several second ear plates (2231) distributed on it, and the number of second ear plates (2231) is the same as that of the first ear plate (2211); The adjusting screw assembly (224) has an array, the number of which is the same as that of the first ear plate (2211) and the second ear plate (2231).

6. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 5, characterized in that, The adjusting screw assembly (224) consists of five parts: a first adjusting screw (2241), a nut (2242), a locking sleeve (2243), a first limiting ball (2244), and a second limiting ball (2245). The first adjusting screw (2241) is detachably connected to the first ear plate (2211) via the locking sleeve (2243) and passes through the second ear plate (2231) and the second limiting ball (2245). There are two nuts (2242), which are respectively connected to the first adjusting screw (2241) and the two sides of the second ear plate (2231); The locking sleeve (2243) is detachably connected to the first ear plate (2211); The first limiting ball (2244) is fixedly connected to the first adjusting screw (2241); The second limiting ball (2245) is connected to the second ear plate (2231).

7. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 3, characterized in that, The flange ball valve (24) is a three-piece flange ball valve.

8. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 1, characterized in that, It also includes a support and telescopic control mechanism (5) and a transition flange (6). The support and telescopic control mechanism (5) is detachably connected to the suction pipeline (2) through the transition flange (6). It consists of six parts: the front flange of the third corrugated pipe (51), the second adjusting screw (52), the support rod (53), the third corrugated pipe (54), the rear flange of the third corrugated pipe (55), and the fixing block (56). One end of the second adjusting screw (52) is fixedly connected to the front flange (51) of the third bellows, and the other end is fixedly connected to the fixing block (56); The support rod (53) has several ends, one end of which is fixedly connected to the front flange (51) of the third bellows, and the other end is fixedly connected to the fixing block (56); One end of the third bellows (54) is fixedly connected to the front flange (51) of the third bellows, and the other end is fixedly connected to the rear flange (55) of the third bellows. The third bellows (54) is located at the center of the second adjusting screw (52) and the support rod (53). The fixing block (56) has a through hole, and the rotating handle (57) passes through the through hole and is connected to the second adjusting screw (52).

9. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 8, characterized in that, The third bellows front flange (51) is connected to the center of the third bearing (511).

10. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 8, characterized in that, The third bellows rear flange (55) has a through hole, which passes through the second adjusting screw (52) and the support rod (53) and can slide on the second adjusting screw (52) and the support rod (53).

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