Clamping mechanism, mechanical arm and carrying robot

Abstract

The utility model relates to the technical field of clamping mechanisms, and discloses a clamping mechanism, a mechanical arm and a transfer robot, the clamping mechanism comprises a supporting arm and a clamping jaw device, a first motor is arranged on the supporting arm, and the supporting arm is used for being connected with the mechanical arm; the clamping jaw device comprises a mounting bracket, a second motor and a clamping jaw assembly, one end of the mounting bracket is connected with the first motor, and the first motor is used for driving the clamping jaw device to rotate relative to the supporting arm; the clamping jaw assembly is arranged at the other end of the mounting support and comprises a first clamping jaw and a second clamping jaw, the second motor is arranged in the mounting support, and the second motor is used for driving the first clamping jaw and the second clamping jaw to be close to each other or away from each other. The technical problems that a mechanical arm cannot flexibly swing in a small space, the clamping difficulty is large, and the carrying efficiency of a carrying robot is low are solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of clamping mechanisms, in particular to a clamping mechanism, a mechanical arm and a carrying robot. BACKGROUND

[0002] In the semiconductor manufacturing industry, a wafer box is a carrier for carrying and protecting wafers. The stability of the wafer box is related to the quality of the wafers during carrying operations. The traditional wafer box carrying method mainly relies on manual operation, which is labor-intensive and low in efficiency. Moreover, it is affected by human factors, increasing the risk of wafer damage.

[0003] In the related art, a wafer box is carried by a carrying robot, which includes a mechanical arm. The mechanical arm is provided with a clamping mechanism for clamping the wafer box. Since the clamping mechanism is fixedly connected to the mechanical arm, the clamping direction of the clamping mechanism can only be adjusted by rotating the mechanical arm. When the mechanical arm performs complex multi-axis linkage, it will swing greatly. However, the mechanical arm cannot swing flexibly in a small space, which increases the difficulty of clamping and reduces the carrying efficiency of the robot. CONTENT OF THE UTILITY MODEL

[0004] The present application aims to provide a clamping mechanism, a mechanical arm and a carrying robot to solve the technical problem that the mechanical arm cannot swing flexibly in a small space, which increases the difficulty of clamping and reduces the carrying efficiency of the robot.

[0005] In a first aspect, the present application provides a clamping mechanism applied to a carrying robot, wherein the carrying robot includes a mechanical arm, and the clamping mechanism includes:

[0006] a support arm provided with a first motor, wherein the support arm is used to be connected to the mechanical arm;

[0007] a clamping jaw device including a mounting bracket, a second motor and a clamping jaw assembly, wherein one end of the mounting bracket is connected to the first motor, and the first motor is used to drive the clamping jaw device to rotate relative to the support arm;

[0008] the clamping jaw assembly is arranged at the other end of the mounting bracket, the clamping jaw assembly includes a first clamping jaw and a second clamping jaw, the second motor is arranged inside the mounting bracket, and the second motor is used to drive the first clamping jaw and the second clamping jaw to move towards or away from each other.

[0009] In the clamping mechanism of the present application, the support arm includes a first arm body and a second arm body, the first arm body and the second arm body are arranged at intervals, and at least part of the mounting bracket extends between the first arm body and the second arm body;

[0010] The first arm body or the second arm body is provided with a shell, the first motor is installed in the shell, and a main shaft of the first motor extends from the shell to between the first arm body and the second arm body and is fixedly assembled with the mounting bracket.

[0011] In the clamping mechanism, the shell is arranged on the second arm body, and a mounting groove is arranged on one side of the first arm body facing the second arm body; or the shell is arranged on the first arm body, and a mounting groove is arranged on one side of the second arm body facing the first arm body.

[0012] The mounting bracket is provided with a rotating shaft, the rotating shaft is fixedly assembled with the main shaft of the first motor, and the rotating shaft is partially rotationally connected in the mounting groove.

[0013] In the clamping mechanism, a limiting piece is arranged between the first arm body and the second arm body, the limiting piece is arranged on the first arm body or the second arm body, and the limiting piece is used for limiting a rotation range of the clamping jaw device relative to the support arm.

[0014] In the clamping mechanism, a position sensor is arranged between the first arm body and the second arm body, the position sensor is arranged on the first arm body or the second arm body, and the position sensor is used for detecting whether the clamping jaw device is located at an initial position.

[0015] In the clamping mechanism, the clamping jaw device comprises a first driving block, a second driving block, a first transmission member and a second transmission member, the first driving block and the second driving block are in transmission connection with the second motor.

[0016] One end of the first transmission member close to the second transmission member is fixedly connected with the first driving block, and the other end of the first transmission member away from the second transmission member is fixedly connected with the first clamping jaw.

[0017] One end of the second transmission member close to the first transmission member is fixedly connected with the second driving block, and the other end of the second transmission member away from the first transmission member is fixedly connected with the second clamping jaw.

[0018] In the clamping mechanism, the mounting bracket is further provided with a material detection device, and the material detection device is used for detecting whether there is material in front of the first clamping jaw and the second clamping jaw.

[0019] In the clamping mechanism, the support arm is further provided with a counterweight, and the counterweight is arranged at one end of the support arm away from the clamping jaw device.

[0020] In the clamping mechanism, the support arm is further provided with an identification device, and the identification device is used for identifying coding information of the material.

[0021] In a second aspect, the present application provides a mechanical arm, comprising a mechanical arm body and the gripping mechanism, wherein the mechanical arm body is connected to the support arm.

[0022] In a third aspect, the present application provides a carrying robot, comprising a robot body and the mechanical arm, wherein the mechanical arm is connected to the robot body.

[0023] The present application provides a gripping mechanism, which has the advantages of:

[0024] The gripping mechanism comprises a support arm and a gripper device, one end of the support arm is connected to the gripper device, the other end of the support arm is connected to the end of the mechanical arm, a first motor is installed on the support arm, the main shaft of the first motor is fixedly assembled with the gripper device, and the gripper device is driven to rotate relative to the support arm by the first motor. A second motor is installed in the mounting bracket, the first gripper and the second gripper are driven to approach each other by the second motor to realize the gripping action of the gripper, or the first gripper and the second gripper are driven to move away from each other by the second motor to realize the release action of the gripper.

[0025] When gripping wafers or other materials, the mechanical arm does not need to perform complex multi-axis linkage and large amplitude swinging, only needs to move the end of the mechanical arm into the material storage space, controls the gripper device to rotate relative to the support arm by the first motor to adjust the gripping direction of the gripper device, and controls the first gripper and the second gripper to approach each other by the second motor to realize the gripping function of the gripper device. The present application sets the gripping mechanism at the end of the mechanical arm, the gripper device can rotate relative to the support arm and perform gripping, reduces the overall swinging amplitude of the mechanical arm, makes the mechanical arm applicable in a narrow space, reduces the gripping difficulty of the mechanical arm, and improves the carrying efficiency of the robot. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0027] Figure 1 The structural schematic diagram of the mechanical arm provided by the embodiment of the present application is shown in the figure;

[0028] Figure 2 The structural schematic diagram of the carrying robot provided by the embodiment of the present application is shown in the figure;

[0029] Figure 3 The structural schematic diagram of the gripping mechanism provided by the embodiment of the present application is shown in the figure;

[0030] Figure 4Another structural schematic view of the clamping mechanism provided by the embodiment of the present application;

[0031] Figure 5 An explosion schematic view of the clamping mechanism provided by the embodiment of the present application;

[0032] Figure 6 Another explosion schematic view of the clamping mechanism provided by the embodiment of the present application;

[0033] Figure 7 An explosion schematic view of the clamping jaw device provided by the embodiment of the present application;

[0034] Figure 8 A structural schematic view of the support arm provided by the embodiment of the present application;

[0035] Figure 9 Another explosion schematic view of the clamping mechanism provided by the embodiment of the present application.

[0036] The signs in the figure are as follows:

[0037] 10, support arm; 11, first motor; 12, first arm body; 13, second arm body; 14, shell; 15, mounting groove; 16, limiting piece; 17, position sensor; 20, clamping jaw device; 21, mounting bracket; 22, second motor; 23, first clamping jaw; 24, second clamping jaw; 25, rotating shaft; 26, first driving block; 27, second driving block; 28, first transmission member; 29, second transmission member; 30, material detection device; 40, counterweight; 50, identification device; 60, zero position pin; 100, clamping mechanism; 101, mechanical arm main body; 200, mechanical arm; 201, robot main body. DETAILED DESCRIPTION

[0038] The specific embodiments of the present application will be further described in detail below in conjunction with the drawings and examples. The following examples are used to illustrate the present application, but are not used to limit the scope of the present application.

[0039] In the description of the present application, it should be explained that the positions or location relationships indicated by the terms "upper", "lower", "front", "rear", "inner", "outer" and the like in the present application are the position relationships based on the position relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices and elements referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present application.

[0040] In the description of the present application, it should be understood that the terms "first", "second" and the like are used in the present application to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, the "first" information can also be referred to as "second" information without departing from the scope of the present application, and similarly, the "second" information can also be referred to as "first" information.

[0041] As shown in Figure 1 , Figure 1 is a structural schematic diagram of a carrying robot, the carrying robot (AGV, Automated Guided Vehicle) is an automatic carrying device with autonomous navigation capability, which can automatically complete the transportation of goods or materials without direct manual operation through built-in sensors, navigation algorithms or preset paths. The carrying robot has functions of precise positioning, path planning, obstacle avoidance and the like, and is suitable for scenes such as factories, warehouses and logistics centers, which can improve carrying efficiency, reduce labor cost and reduce human errors.

[0042] The carrying robot includes a mechanical arm 200, which simulates complex actions such as grabbing, carrying, assembling and stacking of human arms. The robot can identify the position, shape and weight of the target object, adjust the clamping force and grabbing posture, and realize stable grabbing and carrying of the material.

[0043] In the related art, as shown in Figure 2 , a clamping mechanism 100 is installed at the end of the mechanical arm 200 to clamp a wafer box. Since the clamping mechanism 100 is fixedly connected with the mechanical arm 200, the clamping direction of the clamping mechanism 100 can only be adjusted by rotating the whole mechanical arm 200, which requires complex multi-axis linkage of the mechanical arm 200, resulting in large amplitude swing of the mechanical arm 200. However, in a small space, the mechanical arm 200 is limited by the space and cannot swing flexibly, resulting in great difficulty in clamping and reducing the carrying efficiency of the carrying robot.

[0044] As shown in Figures 3 to 7As shown, the embodiment of the present application provides a clamping mechanism 100 applied to a carrying robot, the carrying robot comprising a mechanical arm 200, the clamping mechanism 100 comprising a support arm 10 and a clamping jaw device 20, the support arm 10 being provided with a first motor 11, the support arm 10 being used for being connected with the mechanical arm 200; the clamping jaw device 20 comprising a mounting bracket 21, a second motor 22 and a clamping jaw assembly, one end of the mounting bracket 21 being connected with the first motor 11, the first motor 11 being used for driving the clamping jaw device 20 to rotate relative to the support arm 10; the clamping jaw assembly being arranged at the other end of the mounting bracket 21, the clamping jaw assembly comprising a first clamping jaw 23 and a second clamping jaw 24, the second motor 22 being arranged inside the mounting bracket 21, the second motor 22 being used for driving the first clamping jaw 23 and the second clamping jaw 24 to move close to or away from each other.

[0045] In the embodiment, the clamping mechanism 100 comprises the support arm 10 and the clamping jaw device 20, one end of the support arm 10 being connected with the clamping jaw device 20, the other end of the support arm 10 being connected with the end of the mechanical arm 200, the clamping jaw device 20 being used for clamping a wafer box. The first motor 11 is mounted on the support arm 10, the main shaft of the first motor 11 being fixedly assembled with the clamping jaw device 20, the clamping jaw device 20 being driven to rotate relative to the support arm 10 by the first motor 11. The second motor 22 is mounted in the mounting bracket 21, the first clamping jaw 23 and the second clamping jaw 24 being driven to move close to each other by the second motor 22 to realize the clamping action of the clamping jaws; or the first clamping jaw 23 and the second clamping jaw 24 being driven to move away from each other by the second motor 22 to realize the releasing action of the clamping jaws.

[0046] Based on the above technical solution, when clamping a wafer box or other materials, the mechanical arm 200 does not need to perform complex multi-axis linkage and large amplitude swing, only needs to move the end of the mechanical arm 200 into the material storage space, controls the clamping jaw device 20 to rotate relative to the support arm 10 by the first motor 11, adjusts the clamping direction of the clamping jaw device 20, controls the first clamping jaw 23 and the second clamping jaw 24 to move close to each other by the second motor 22, and realizes the clamping of the clamping jaw device 20 on the materials. The embodiment sets the clamping mechanism 100 at the end of the mechanical arm 200, the clamping jaw device 20 can rotate relative to the support arm 10 and clamp, reduces the overall swing amplitude of the mechanical arm 200, makes the mechanical arm 200 applicable in a narrow space, reduces the clamping difficulty of the mechanical arm 200, and improves the carrying efficiency of the carrying robot.

[0047] Exemplarily, the first motor 11 is used for controlling the clamping jaw device 20 to rotate in a first plane (such as a horizontal plane) relative to the support arm 10, when the wafer box is placed on the horizontal plane, the clamping jaw device 20 can be rotated to a suitable position in the horizontal plane to facilitate clamping.

[0048] For example, the first motor 11 is used to control the gripper device 20 to rotate relative to the support arm 10 in a second plane (e.g., a vertical plane). When the wafer cassette is placed in the vertical plane, the gripper device 20 can rotate to a suitable position in the vertical plane to facilitate gripping.

[0049] For example, the gripper device 20 can also rotate relative to the support arm 10 in three-dimensional space, that is, the gripper device 20 can rotate relative to the support arm 10 in different planes, so that the gripper device 20 can adjust the gripping angle up and down and left and right.

[0050] In some embodiments, such as Figures 4 to 6 As shown, the support arm 10 includes a first arm body 12 and a second arm body 13, which are spaced apart. At least part of the mounting bracket 21 extends between the first arm body 12 and the second arm body 13. A housing 14 is provided on the first arm body 12 or the second arm body 13. A first motor 11 is installed in the housing 14. The main shaft of the first motor 11 extends from the housing 14 to the space between the first arm body 12 and the second arm body 13 and is assembled and fixed with the mounting bracket 21.

[0051] Specifically, the first arm body 12 is the upper arm body, and the second arm body 13 is the lower arm body; or the first arm body 12 is the lower arm body, and the second arm body 13 is the upper arm body. The housing 14 is mounted on either the first arm body 12 or the second arm body 13. The main body of the first motor 11 is installed inside the housing 14, and the main shaft of the first motor 11 extends to be assembled and fixed with the mounting bracket 21. The first arm body 12 and the second arm body 13 clamp and support the gripper device 20. The housing 14 serves to install and protect the first motor 11, reducing vibration during operation.

[0052] In this embodiment, by installing the first motor 11 inside the housing 14 and having its main shaft extend between the first arm 12 and the second arm 13 and assembled with the mounting bracket 21, the clamping mechanism 100 is made more compact and occupies less space by utilizing the space between the support arms 10. The mounting bracket 21, with its main shaft fixedly mounted on the first motor 11, enhances the connection stability between the gripper device 20 and the support arm 10, reducing the shaking of the gripper device 20 during clamping and handling, and improving the accuracy and stability of clamping.

[0053] For example, the first arm body 12 is the upper arm body, the second arm body 13 is the lower arm body, the first arm body 12 and the second arm body 13 extend in the horizontal direction, the mounting bracket 21 extends between the first arm body 12 and the second arm body 13, and the first motor 11 drives the mounting bracket 21 to rotate in the horizontal plane.

[0054] Exemplarily, the first arm body 12 is a left arm body, the second arm body 13 is a right arm body, the mounting bracket 21 extends between the first arm body 12 and the second arm body 13, and the first motor 11 drives the mounting bracket 21 to rotate in a vertical plane.

[0055] In some embodiments, as shown in Figures 5 to 8 The housing 14 is arranged on the second arm body 13, and the first arm body 12 is provided with a mounting groove 15 on a side facing the second arm body 13; or the housing 14 is arranged on the first arm body 12, and the second arm body 13 is provided with a mounting groove 15 on a side facing the first arm body 12; the mounting bracket 21 is provided with a rotating shaft 25, the rotating shaft 25 is fixedly assembled with the main shaft of the first motor 11, and the rotating shaft 25 is partially rotationally connected in the mounting groove 15.

[0056] Specifically, the mounting bracket 21 is provided with a mounting portion extending between the first arm body 12 and the second arm body 13, the mounting portion is provided with the rotating shaft 25, one of the first arm body 12 and the second arm body 13 is provided with the first motor 11, and the other of the first arm body 12 and the second arm body 13 is provided with the mounting groove 15, the rotating shaft 25 on the mounting portion is fixedly assembled with the main shaft of the first motor 11 and rotationally connected with the mounting groove 15, that is, the mounting bracket 21 is rotationally connected with the first arm body 12 and the second arm body 13 at the same time, the rotating stability of the clamping jaw device 20 relative to the support arm 10 is enhanced, the clamping jaw device 20 is more stable during rotation, vibration during rotation of the clamping jaw device 20 is reduced, and the clamping precision of the clamping jaw device 20 is improved.

[0057] It can be understood that during the carrying of the wafer box, the mechanical arm 200 is affected by various external forces, and the clamping jaw device 20 can ensure that the wafer box will not fall or be damaged during clamping and carrying, improve the reliability and safety of carrying, and thus improve the carrying efficiency.

[0058] In some embodiments, as shown in Figure 4 and Figure 9 A limiting piece 16 is arranged between the first arm body 12 and the second arm body 13, the limiting piece 16 is arranged on the first arm body 12 or the second arm body 13, and the limiting piece 16 is used to limit the rotation range of the clamping jaw device 20 relative to the support arm 10.

[0059] Specifically, the limiting piece 16 is arranged between the first arm body 12 and the second arm body 13, and is used to abut against the mounting bracket 21 during rotation of the clamping jaw device 20, so as to limit excessive rotation of the mounting bracket 21 and prevent the rotation angle of the clamping jaw device 20 from being too large.

[0060] Exemplarily, the limiting member 16 includes a first limiting portion and a second limiting portion, and is arranged on an end surface of the second arm body 13 facing the first arm body 12. When the clamping jaw device 20 is in line with the support arm 10, the clamping jaw device 20 is in an initial position. When the clamping jaw device 20 rotates relative to the support arm 10 in a clockwise direction to abut against the first limiting portion, the first limiting portion prevents the clamping jaw device 20 from continuing to rotate, and the clamping jaw device 20 is in a first limit position. When the clamping jaw device 20 rotates relative to the support arm 10 in a counterclockwise direction to abut against the second limiting portion, the second limiting portion prevents the clamping jaw device 20 from continuing to rotate, and the clamping jaw device 20 is in a second limit position.

[0061] In some embodiments, the limiting member 16 includes a first limiting column and a second limiting column, and the first limiting column and the second limiting column are arranged at intervals. The first limiting column is used to abut the clamping jaw device 20 against the first limit position, and the second limiting column is used to abut the clamping jaw device 20 against the second limit position.

[0062] In some embodiments, as shown in Figure 9 A position sensor 17 is arranged between the first arm body 12 and the second arm body 13, and the position sensor 17 is arranged on the first arm body 12 or the second arm body 13. The position sensor 17 is used to detect whether the clamping jaw device 20 is in the initial position.

[0063] Specifically, the position sensor 17 detects whether the clamping jaw device 20 is in the initial position, and provides position feedback information for a control system of the carrying robot. The control system determines the current state of the clamping jaw device 20 according to the position feedback information, and then decides the next operation, such as starting the mechanical arm 200, controlling the clamping jaw device 20 to clamp, or adjusting the clamping direction.

[0064] Further, during the carrying process, when the clamping jaw device 20 deviates from the set position, the position sensor 17 detects the change of the position state and generates a corresponding signal, and the control system takes corresponding measures, such as adjusting the position of the clamping jaw device 20 or stopping the carrying operation.

[0065] Exemplarily, the position sensor 17 includes an origin sensor arranged on the second arm body 13. When the clamping jaw device 20 rotates to the initial position, the origin sensor is triggered to send a signal to the control system, indicating that the clamping jaw device 20 rotates to the initial position.

[0066] In some embodiments, as shown in Figure 7As shown, the clamping jaw device 20 comprises a first driving block 26, a second driving block 27, a first transmission member 28 and a second transmission member 29, the first driving block 26 and the second driving block 27 are in transmission connection with the second motor 22; one end of the first transmission member 28 close to the second transmission member 29 is fixedly connected with the first driving block 26, and the other end of the first transmission member 28 away from the second transmission member 29 is fixedly connected with the first clamping jaw 23; one end of the second transmission member 29 close to the first transmission member 28 is fixedly connected with the second driving block 27, and the other end of the second transmission member 29 away from the first transmission member 28 is fixedly connected with the second clamping jaw 24.

[0067] Specifically, the first driving block 26 and the first clamping jaw 23 are connected by the two ends of the first transmission member 28 respectively, and the second driving block 27 and the second clamping jaw 24 are connected by the two ends of the second transmission member 29 respectively, when the second motor 22 drives the first driving block 26 and the second driving block 27 to move close to or away from each other, the first driving block 26 drives the first transmission member 28 to move synchronously, the second driving block 27 drives the second transmission member 29 to move synchronously, and then the first transmission member 28 drives the first clamping jaw 23 to move, and the second transmission member 29 drives the second clamping jaw 24 to move, so that the first clamping jaw 23 and the second clamping jaw 24 move close to or away from each other, to realize the clamping function of the clamping jaw device 20.

[0068] In the embodiment, the first transmission member 28 and the first driving block 26 are fixed by screwing, and the second transmission member 29 and the second driving block 27 are fixed by screwing.

[0069] The shape and structure of the first clamping jaw 23 and the second clamping jaw 24 are not limited, which can be the same structure or different structure. According to the specific shape, size and clamping requirement of the wafer box, the structure of the clamping jaw can be flexibly selected or designed, so that the clamping jaw device 20 can be applied to more wafer boxes of different specifications and types, and the application range of the clamping jaw device 20 is increased.

[0070] In some embodiments, as shown, Figure 7 As shown, the mounting bracket 21 is provided with a material detection device 30, which is used to detect whether there is material in front of the first clamping jaw 23 and the second clamping jaw 24.

[0071] Specifically, before the first clamping jaw 23 and the second clamping jaw 24 perform the clamping operation, the material detection device 30 is used to determine whether there is a wafer box in front of the clamping jaw device 20, so as to avoid empty clamping or clamping error of the clamping jaw. In the case of no wafer box, the clamping action of the clamping jaw is stopped, so as to avoid potential damage to surrounding equipment or personnel, and improve the safety of the operation process. If there is a wafer box in front of the first clamping jaw 23 and the second clamping jaw 24, the material detection device 30 responds quickly, and the clamping jaw device 20 will perform the clamping operation after detecting the wafer box, so as to shorten the waiting and judging time and improve the clamping efficiency.

[0072] In some embodiments, as shown in Figure 4 and Figure 6 A counterweight 40 is further arranged on the support arm 10, and the counterweight 40 is arranged at the end of the support arm 10 away from the gripper device 20.

[0073] Specifically, one end of the support arm 10 is connected to the gripper device 20, and the other end of the support arm 10 is connected to the counterweight 40. When the gripper device 20 clamps a wafer box, the weight of the gripper device 20 increases, resulting in an imbalance in the weight distribution of the two ends of the support arm 10. In this embodiment, the counterweight 40 is arranged at the end of the support arm 10 away from the gripper device 20, and the counterweight 40 can balance the weight distribution of the two ends of the support arm 10, so that the support arm 10 and the mechanical arm 200 are more stable during rotation.

[0074] In some embodiments, as shown in Figure 2 A recognition device 50 is further arranged on the support arm 10, and the recognition device 50 is used to identify the coding information of the material.

[0075] Specifically, the recognition device 50 is a camera, which is used to read the information of a two-dimensional code label. In this embodiment, a two-dimensional code label is arranged on the wafer box, and when the mechanical arm 200 drives the gripper device 20 to move to the position of the wafer box, the camera can read the information of the two-dimensional code label on the wafer box, so as to accurately grasp the specific wafer box.

[0076] In another embodiment, the two-dimensional code label can be replaced by other codes, such as an RFID (Radio Frequency Identification) label or a bar code label, and the recognition device 50 can be replaced by an RFID reader. Compared with the two-dimensional code, the RFID label has a faster reading speed.

[0077] In some embodiments, as shown in Figure 4 and Figure 6 A zero position pin 60 is further arranged on the second arm body 13, and the zero position pin 60 can be used as a reference point for assembly during assembly of the clamping mechanism 100, helping workers to quickly and accurately install each component to the correct position. At the same time, the zero position pin 60 can also be used as a reference for calibration during system calibration, and by cooperating with other detection devices, the position of the gripper device 20 can be adjusted to achieve the best working state.

[0078] In a second aspect, as shown in Figure 2 and Figure 3 The embodiment of the present application provides a mechanical arm 200, which comprises a mechanical arm body 101 and a clamping mechanism 100, and the mechanical arm body 101 is connected to the support arm 10.

[0079] Specifically, one end of the mechanical arm body 101 is connected with the robot body 201, and the other end (the end) of the mechanical arm body 101 is connected with the support arm 10, the mechanical arm body 101 drives the clamping mechanism 100 to move flexibly in the three-dimensional space, and the clamping jaw device 20 can rotate relative to the support arm 10, so as to realize multi-angle and multi-position clamping of the clamping jaw device 20.

[0080] In a third aspect, as shown in the figure, the embodiment of the present application provides a carrying robot, which comprises a robot body 201 and a mechanical arm 200. Figure 1

[0081] Specifically, the carrying robot performs diversified tasks through the mechanical arm 200, and the clamping mechanism 100 at the end of the mechanical arm 200 can realize operations such as grabbing, placing and rotating, which greatly enhances the functionality and flexibility of the carrying robot. The bottom of the robot body 201 is also provided with a chassis (not shown in the figure), which is driven by driving wheels on the chassis to realize the spatial movement of the carrying robot.

[0082] It should be understood that the term "and / or" used in the present application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes these combinations. It should be noted that in this document, the term "comprise", "include" or any other variant thereof is intended to cover non-exclusive inclusion, so that the process, method, article or system including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or system.

[0083] The above-mentioned serial numbers of the embodiments of the present application are only for description, and do not represent the advantages and disadvantages of the embodiments. The above description is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed in the present application, and these modifications or replacements should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.​

Claims

1. A gripping mechanism applied to a handling robot, the handling robot including a robotic arm, characterized in that, The clamping mechanism includes: A support arm is provided with a first motor, and the support arm is used to connect to the robotic arm; A gripper device includes a mounting bracket, a second motor, and a gripper assembly. One end of the mounting bracket is connected to the first motor, which drives the gripper device to rotate relative to the support arm. The gripper assembly is located at the other end of the mounting bracket. The gripper assembly includes a first gripper and a second gripper. The second motor is located inside the mounting bracket and is used to drive the first gripper and the second gripper to move closer to each other or further away from each other.

2. The clamping mechanism according to claim 1, characterized in that, The support arm includes a first arm body and a second arm body, the first arm body and the second arm body are spaced apart, and at least part of the mounting bracket extends between the first arm body and the second arm body; The first arm or the second arm is provided with a housing, the first motor is installed in the housing, the main shaft of the first motor extends from the housing to between the first arm and the second arm, and is assembled and fixed with the mounting bracket.

3. The clamping mechanism according to claim 2, characterized in that, The housing is disposed on the second arm body, and the first arm body has a mounting groove on the side facing the second arm body; or the housing is disposed on the first arm body, and the second arm body has a mounting groove on the side facing the first arm body. The mounting bracket is provided with a rotating shaft, which is assembled and fixed to the main shaft of the first motor, and the rotating shaft is rotatably connected in the mounting groove.

4. The clamping mechanism according to claim 2, characterized in that, A limiting member is provided between the first arm and the second arm. The limiting member is provided on the first arm or the second arm and is used to limit the rotation range of the gripper device relative to the support arm.

5. The clamping mechanism according to claim 2, characterized in that, A position sensor is provided between the first arm and the second arm. The position sensor is located on the first arm or the second arm and is used to detect whether the gripper device is in the initial position.

6. The clamping mechanism according to claim 1, characterized in that, The gripper device includes a first drive block, a second drive block, a first transmission component, and a second transmission component, wherein the first drive block and the second drive block are connected to the second motor via transmission. The first drive block is fixedly connected to the end of the first transmission member closer to the second transmission member, and the first gripper is fixedly connected to the end of the first transmission member away from the second transmission member. The second drive block is fixedly connected to the end of the second transmission member closest to the first transmission member, and the second gripper is fixedly connected to the end of the second transmission member furthest from the first transmission member.

7. The clamping mechanism according to claim 1, characterized in that, The mounting bracket is also equipped with a material detection device, which is used to detect whether there is material in front of the first gripper and the second gripper.

8. The clamping mechanism according to claim 1, characterized in that, The support arm is also provided with a counterweight, which is located at the end of the support arm away from the gripper device.

9. The clamping mechanism according to claim 1, characterized in that, The support arm is also equipped with an identification device, which is used to identify the material's coding information.

10. A robotic arm, characterized in that, It includes a robotic arm body and a gripping mechanism as described in any one of claims 1 to 9, wherein the robotic arm body is connected to the support arm.

11. A transport robot, characterized in that, It includes a robot body and a robotic arm as described in claim 10, wherein the robotic arm is connected to the robot body.

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