Diverter for coating equipment

Abstract

The utility model relates to the field of coating equipment, and discloses a flow divider for coating equipment, which is arranged below a central air inlet hole of a coating vacuum chamber. The flow divider comprises a disc body, a first flow dividing area to a fifth flow dividing area are sequentially distributed on the disc body from the center to the periphery, the first flow dividing area is a solid conical disc, and a plurality of first vent holes are formed in the conical disc; vent grooves and vent baffles are uniformly distributed on the second to fifth diversion areas, and the vent grooves are distributed in a manner of radiating from the middle to the periphery and are distributed in a mutually staggered manner. The ventilation grooves in the second flow dividing area and the fourth flow dividing area account for 30%-35% of the areas of the flow dividing areas respectively, the ventilation grooves in the third flow dividing area and the fourth flow dividing area account for 25%-30% of the areas of the flow dividing areas respectively, the number of the ventilation grooves from the second flow dividing area to the fifth flow dividing area is sequentially increased, and the lengths of the ventilation grooves from the second flow dividing area to the fifth flow dividing area are sequentially increased. And the baffles on the second to fifth shunting areas are respectively corresponding to the next baffle along the diameter direction.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment, and in particular to a distributor for coating equipment. Background Technology

[0002] PECVD equipment is a device that uses plasma-enhanced chemical vapor deposition technology to prepare thin films. In a low-pressure environment, a low-temperature plasma generates a glow discharge on the cathode of the process chamber, while a heating element simultaneously heats the sample to a predetermined temperature. Then, a suitable amount of process gas is introduced. Under the influence of the electric field excited by the radio frequency source, these gases decompose into electrons, ions, and active groups, which undergo a series of chemical and plasma reactions to ultimately form a solid thin film on the sample surface. Therefore, the uniformity of the introduced process gas within the deposition chamber directly affects the uniformity of the deposited layer.

[0003] Currently, most PECVD inlet systems lack a flow divider assembly. Gas typically enters the chamber directly from the inlet pipe into the distribution box. While convenient, this method suffers from uneven gas distribution. Due to gas density distribution characteristics, gas descending from the top of the pipe struggles to diffuse outwards after reaching the bottom. This results in the highest gas concentration at the outlet, decreasing with distance, leading to uneven gas distribution. Uneven plasma gas entry into the chamber reduces the quality of subsequent coatings. A small number of PECVD inlet systems incorporate flow dividers, but existing designs widely employ a large central circle with radial strips. This structure causes most gas to flow out from the two strips, preventing gas concentration in the center but still resulting in uneven distribution. Therefore, the market urgently needs a flow divider that improves intracavity gas uniformity and provides stable flow distribution to enhance coating quality. Utility Model Content

[0004] The purpose of this invention is to provide a distributor for coating equipment, which is located below the central air inlet of the coating vacuum chamber to solve the problem of uneven air distribution in existing coating equipment.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model discloses a flow divider for a coating equipment, wherein the flow divider is disposed below the central air inlet of the coating vacuum chamber. The flow divider includes a disc body, on which the following are arranged sequentially from the center to the periphery:

[0007] The first diversion zone is a solid conical disk with a plurality of first vent holes.

[0008] The second diversion zone has several second venting slots and second baffles evenly distributed on it, and the second venting slots occupy 30%-35% of the area of ​​the second diversion zone.

[0009] The third diversion zone has several third vent slots and third baffles evenly distributed on it, and the third vent slots occupy 25%-30% of the area of ​​the third diversion zone.

[0010] The fourth diversion zone is provided with several fourth vent slots and fourth baffles evenly spaced on it, and the fourth vent slots occupy 30%-35% of the area of ​​the fourth diversion zone.

[0011] The fifth diversion zone has several fifth vent slots and fifth baffles evenly distributed on it, and the fifth vent slots occupy 25%-30% of the area of ​​the fifth diversion zone.

[0012] The second to fifth diversion zones are all annular; the number of ventilators in the second to fifth diversion zones increases sequentially, and the length of the ventilators increases sequentially; the second to fifth ventilators are staggered along the diameter of the main body of the disc; each second baffle corresponds to a third baffle along the diameter; each third baffle corresponds to a fourth baffle along the diameter; and each fourth baffle corresponds to a fifth baffle along the diameter.

[0013] Furthermore, the second diversion zone is provided with n second vent slots and n second baffles, the third diversion zone is provided with 2n third vent slots and 2n third baffles, the fourth diversion zone is provided with 4n fourth vent slots and 4n fourth baffles, and the fifth diversion zone is provided with 8n fifth vent slots and 8n fifth baffles; wherein n = 5, 6, or 7.

[0014] Furthermore, the top angle α of the conical disk in the first diversion zone is 155°-175°.

[0015] Furthermore, the diameter of the first vent is 1.5mm-2mm.

[0016] Furthermore, a fixing area is provided between the fourth and fifth diversion areas, and the fixing area is provided with a plurality of fixing holes for fixing to the coating vacuum chamber. The fixing holes are offset from the fourth baffle along the diameter direction.

[0017] Furthermore, the second baffle is inclined, with the end connected to the third diversion zone being higher than the end connected to the first diversion zone. The upper surfaces of the third, fourth, and fifth diversion zones are on the same plane and are higher than the upper surface of the first diversion zone.

[0018] Furthermore, an anti-corrosion layer is provided on the outer surface of the disk body.

[0019] Furthermore, the main body of the disk is an aluminum alloy disk.

[0020] The advantages of this utility model are:

[0021] 1. The distributor of this utility model is distributed into five distribution zones. Each distribution zone has alternating venting grooves and baffles, radiating outwards from the center. This allows gas entering from the inlet to encounter the first distribution zone of the distributor, where it is radially distributed under the action of the conical disc. Simultaneously, a small portion of the gas enters the gas distribution box directly below the distributor through the first vent. Most of the gas is blocked by the baffles and diffuses outwards, flowing along the radial strip baffles towards the edge of the distributor. During this flow, some gas also flows down from both sides of the strip baffles, thus achieving gas diversion and uniform flow while preventing excessive gas concentration in the central area.

[0022] 2. Simultaneously, based on the gas flow pattern, the number of ventilation slots in each diversion zone of the distributor increases sequentially from the center outwards, becoming denser and longer. Different proportions of ventilation slots are designed according to the experimental setup to ensure more uniform gas distribution. When designing the positions of the baffles in each diversion zone, the baffles are positioned as close as possible to each other, which helps the gas diffuse to areas farther from the inlet, overcoming the problem of thin gas at the corners of the coating chamber.

[0023] 3. The surface of the distributor is equipped with an anti-corrosion layer to prevent the components from being corroded by plasma gas and extend their service life; it is made of aluminum alloy, which has a certain strength, is lightweight, and is easier to use. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of this embodiment.

[0026] Figure 2 This is the front view of this embodiment.

[0027] Figure 3 yes Figure 2 Cross-sectional view along AA.

[0028] Figure 4 yes Figure 3 A magnified view of a section at point B in the middle.

[0029] Explanation of key component symbols:

[0030] 1. First diversion zone; 11. First vent.

[0031] 2. Second diversion zone; 21. Second ventilation duct; 22. Second baffle.

[0032] 3. Third diversion zone; 31. Third ventilation duct; 32. Third baffle.

[0033] 4. Fourth diversion zone; 41. Fourth ventilation slot; 42. Fourth baffle.

[0034] 5. Fifth diversion zone; 51. Fifth ventilation duct; 52. Fifth baffle.

[0035] 6. Fixed area, 61. Fixed hole. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0037] In this utility model, unless otherwise stated, directional terms such as "up," "down," "left," and "right" are generally understood in conjunction with the accompanying drawings and the directions shown in actual applications.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0039] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0040] The endpoints and any values ​​of the ranges disclosed herein are not limited to the precise ranges or values, and should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of the various ranges, the endpoint values ​​of the various ranges and individual point values, and individual point values ​​can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed herein. The terms "optional" and "discretionary" mean that they may or may not be included (or may or may not be present).

[0041] like Figure 1 As shown, this utility model discloses a flow divider for a coating equipment, which is located below the central air inlet of the coating vacuum chamber. The flow divider includes a disc body with five flow divider zones distributed sequentially from the center to the periphery: first flow divider zone 1, second flow divider zone 2, third flow divider zone 3, fourth flow divider zone 4, and fifth flow divider zone 5. Several ventilation slots and baffles are alternately distributed on the five flow divider zones, with the ventilation slots radiating outwards from the center. When gas enters from the air inlet, most of it is blocked by the baffles and diffuses outwards along the baffles. The gas flows along the radial strip baffles towards the edge of the flow divider. During the flow, some gas flows down from both sides of the strip baffles, thus achieving gas diversion and uniform flow while preventing excessive gas concentration in the central area.

[0042] like Figures 2 to 4 As shown, specifically, the first diversion zone 1 is a solid conical disk. Through comparative experiments, it was found that the diffusion effect is better when the top angle α of the conical disk is 155°-175°. Several first vent holes 11 are provided on the conical disk, arranged in a ring. The purpose of these first vent holes 11 is to allow a small portion of the airflow to pass through and enter the lower part of the diverter. After multiple experiments, the optimal diameter of the first vent holes is found to be 1.5mm-2mm. A diverter without first vent holes 11 was also compared, and it was found that the diversion effect of the diverter was slightly reduced. The conclusion is that the center should not be completely blocked; first vent holes 11 are necessary to allow gas to pass through.

[0043] The second diversion zone 2 has several second ventilation slots 21 and second baffles 22 evenly spaced. The second ventilation slots 21 occupy 30%-35% of the area of ​​the second diversion zone 2. The second baffles 22 are inclined, meaning the end connecting to the third diversion zone 3 is higher than the end connecting to the first diversion zone 1. The upper surfaces of the third diversion zone 3, fourth diversion zone 4, and fifth diversion zone 5 are on the same plane and are higher than the upper surface of the first diversion zone 1. When gas impacts the first diversion zone 1, the gas pressure is high, and the gas will rebound upwards. The inclined arrangement of the second baffles 22 ensures that the upper planes of the third diversion zone 3, fourth diversion zone 4, and fifth diversion zone 5 are higher than those of the first diversion zone 1, matching the rebounding gas and facilitating its diffusion to distant locations.

[0044] Several third venting slots 31 and third baffles 32 are evenly distributed on the third diversion zone 3. The third venting slots 31 occupy 25%-30% of the area of ​​the third diversion zone 3.

[0045] Several fourth venting slots 41 and fourth baffles 42 are evenly distributed on the fourth diversion zone 4. The fourth venting slots 41 occupy 30%-35% of the area of ​​the fourth diversion zone 4.

[0046] Several fifth venting slots 51 and fifth baffles 52 are evenly distributed on the fifth diversion zone 5. The fifth venting slots 51 occupy 25%-30% of the area of ​​the fifth diversion zone 5.

[0047] The ventilation slots in the second and third diversion zones 2 and 3 are arranged in a large-small-large-small pattern, which helps the gas entering from the ventilation slots to complement and evenly distribute during gas diffusion. The proportion of ventilation slots is smaller than that of baffles, allowing most of the gas to diffuse further along the baffles.

[0048] The second to fifth diversion zones 2 and 5 are all annular. The number of ventilation slots in the second to fifth diversion zones 2 and 5 increases sequentially, becoming denser and longer. Different proportions of ventilation slots are designed according to the experimental setup to ensure more uniform gas distribution. When designing the positions of the baffles in each diversion zone, the baffles are positioned as close as possible to each other, which helps the gas diffuse to areas farther from the inlet, overcoming the problem of thin gas at the corners of the coating cavity. Specifically, the second diversion zone 2 has n second ventilation slots 21 and n second baffles 22; the third diversion zone 3 has 2n third ventilation slots 31 and 2n third baffles 32; the fourth diversion zone 4 has 4n fourth ventilation slots 41 and 4n fourth baffles 42; and the fifth diversion zone 5 has 8n fifth ventilation slots 51 and 8n fifth baffles 52; where n = 5, 6, or 7. In this embodiment, n=5. The second diversion zone 2 has 5 second venting slots 21 and 5 second baffles 22; the third diversion zone 3 has 10 third venting slots 31 and 10 third baffles 32; the fourth diversion zone 4 has 20 fourth venting slots 41 and 20 fourth baffles 42; and the fifth diversion zone 5 has 40 fifth venting slots 51 and 40 fifth baffles 52. The number of baffles increases exponentially from the inside out, ensuring that each second baffle 22 corresponds to a third baffle 32 along its diameter; each third baffle 32 corresponds to a fourth baffle 42 along its diameter; and each fourth baffle 42 corresponds to a fifth baffle 52 along its diameter. This allows sufficient gas to diffuse along the baffles to the far end, while also allowing some gas to enter the lower part of the diverter from the venting slots. Furthermore, the second venting slots 21 to the fifth venting slots 51 are staggered along the diameter of the main body of the disc, making the gas entering the lower part of the diverter more uniform.

[0049] To better fix the flow divider, a fixing area 6 is provided between the fourth flow divider 4 and the fifth flow divider 5. The fixing area 6 is provided with several fixing holes 61 for fixing to the coating vacuum chamber. In order to prevent the fixing holes 61 from affecting the gas diffusion to the far end along the baffle, the fixing holes 61 are staggered from the fourth baffle 42 along the diameter direction.

[0050] Through multiple tests, it has been verified that the non-uniformity of the coating on existing splitters on the market reaches about 12%, while the non-uniformity of the coating on the splitter using this embodiment can be reduced to about 6%. If the first vent is not provided, the non-uniformity of the coating increases to about 7.6%.

[0051] Because the process gas is corrosive, an anti-corrosion layer is provided on the outer surface of the main body of the disc to improve the service life of the distributor.

[0052] To reduce the overall weight of the distributor, the main body of the disc is made of aluminum alloy, which not only has a certain strength but is also lightweight and easier to use.

[0053] In summary, this invention distributes the ventilation slots in a radial pattern from the center outwards. The number of ventilation slots increases progressively from the center to the periphery, becoming denser and longer. Different proportions of ventilation slots are designed according to experimental specifications to ensure more uniform gas distribution. Simultaneously, the baffles in each distribution zone are aligned as closely as possible, facilitating gas diffusion to areas farther from the air inlet.

[0054] The preferred embodiments of this utility model have been described in detail above; however, this utility model is not limited thereto. Within the scope of the technical concept of this utility model, various simple modifications can be made to the technical solution of this utility model, including combining the various technical features in any other suitable manner. These simple modifications and combinations should also be considered as the content disclosed by this utility model and are all within the protection scope of this utility model.

Claims

1. A flow divider for a coating equipment, the flow divider being disposed below the central air inlet of the coating vacuum chamber, characterized in that: The distributor includes a disk body, on which the following are distributed sequentially from the center to the periphery: The first diversion zone is a solid conical disk, and the conical disk is provided with a plurality of first vent holes; The second diversion zone has several second vent slots and second baffles evenly distributed on it, and the second vent slots occupy 30%-35% of the area of ​​the second diversion zone; The third diversion zone has a plurality of third vent slots and third baffles evenly distributed on it, and the third vent slots occupy 25%-30% of the area of ​​the third diversion zone; The fourth diversion zone is provided with a number of fourth vent slots and fourth baffles evenly spaced on it, and the fourth vent slots occupy 30%-35% of the area of ​​the fourth diversion zone. The fifth diversion zone is provided with a plurality of fifth vent slots and fifth baffles evenly spaced on it, and the fifth vent slots occupy 25%-30% of the area of ​​the fifth diversion zone. The second to fifth diversion zones are all annular; the number of ventilators in the second to fifth diversion zones increases sequentially, and the length of the ventilators increases sequentially; the second to fifth ventilators are staggered along the diameter of the main body of the disc; each second baffle corresponds to a third baffle along the diameter; each third baffle corresponds to a fourth baffle along the diameter; and each fourth baffle corresponds to a fifth baffle along the diameter.

2. The distributor for coating equipment according to claim 1, characterized in that: The second diversion zone is provided with n second vent slots and n second baffles, the third diversion zone is provided with 2n third vent slots and 2n third baffles, the fourth diversion zone is provided with 4n fourth vent slots and 4n fourth baffles, and the fifth diversion zone is provided with 8n fifth vent slots and 8n fifth baffles; where n = 5, 6, or 7.

3. The distributor for coating equipment according to claim 1, characterized in that: The top angle α of the conical disk in the first diversion zone is 155°-175°.

4. The distributor for coating equipment according to claim 1, characterized in that: The diameter of the first vent is 1.5mm-2mm.

5. The distributor for coating equipment according to claim 1, characterized in that: A fixing area is provided between the fourth and fifth diversion zones. The fixing area is provided with a plurality of fixing holes for fixing to the coating vacuum chamber. The fixing holes are offset from the fourth baffle along the diameter direction.

6. The distributor for coating equipment according to claim 1, characterized in that: The second baffle is inclined, with the end connected to the third diversion zone being higher than the end connected to the first diversion zone. The upper surfaces of the third, fourth, and fifth diversion zones are on the same plane and are higher than the upper surface of the first diversion zone.

7. The distributor for coating equipment according to claim 1, characterized in that: An anti-corrosion layer is provided on the outer surface of the main body of the disk.

8. The distributor for coating equipment according to claim 1, characterized in that: The main body of the disc is an aluminum alloy disc.

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