Tray and coating deposition equipment
By using a tray with a combination of movable clamping blocks and tensioning elastic elements in the coating deposition equipment, the problem of glass substrates detaching or breaking during thermal expansion is solved, achieving stable clamping and rapid heat dissipation, thereby improving production efficiency and yield.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI UTMOST LIGHT TECH CO LTD
- Filing Date
- 2025-04-18
- Publication Date
- 2026-05-15
AI Technical Summary
During the coating deposition process, existing trays are prone to excessive compression when the glass substrate expands due to heat, leading to detachment or breakage.
A tray is designed with a combination of movable clamps and tensioning elastic elements. The movable clamps hold the glass substrate from the side, and the tensioning elastic elements provide tension toward the center of the tray. The elastic elements can be extended to accommodate glass expansion. Combined with inclined surfaces and guide components, the clamping is stable. The clamping force is adjusted by a tension adjustment component, and heat dissipation fins are provided at the bottom of the tray for rapid cooling.
It effectively prevents the glass substrate from detaching or breaking, improves production stability and yield, reduces glass edge warping caused by thermal expansion and contraction, and improves production efficiency.
Smart Images
Figure CN224243205U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating deposition technology, specifically to a tray and coating deposition equipment. Background Technology
[0002] In atomic layer deposition (ALD) equipment, the substrate is placed on a tray. The reaction precursor is periodically introduced into the reaction chamber and deposited onto the substrate surface, ensuring that only one layer is fully reacted at a time, thus obtaining a high-quality monolayer material. ALD temperatures are typically between 100°C and 200°C. At these temperatures, some substrate materials, such as glass substrates, experience thermal expansion and contraction, resulting in a dimensional expansion of approximately 0.1% to 1%. This means that when the original size of a glass substrate is on the order of meters, it may undergo a dimensional change of several millimeters or even centimeters after heating. Existing trays use a fixed clamping structure. When the glass substrate undergoes significant dimensional expansion, it can be excessively compressed by the clamping blocks, causing the substrate to detach from the blocks or break. Utility Model Content
[0003] In view of this, the present invention provides a tray and a coating deposition equipment to solve the problem in the prior art that the tray is prone to excessively squeezing the substrate when the deposition substrate is heated and expanded, causing the substrate to fall out of the tray slot or even break.
[0004] In a first aspect, this utility model provides a tray, comprising:
[0005] The tray body has an embedding groove on its upper surface, the embedding groove extending from the middle region of the tray body toward the edge of the tray body;
[0006] The movable clamping assembly includes at least two movable clamping blocks arranged in a clamping manner and tensioning elastic members corresponding to each of the movable clamping blocks. The two movable clamping blocks are movably disposed on the tray body along the extension direction of the embedded groove. The two ends of the tensioning elastic members are respectively connected to the movable clamping blocks and the middle region of the tray body. The movable clamping blocks are adapted to engage with the edges of the clamped parts. The tensioning elastic members apply a pulling force toward the middle region of the tray body toward the movable clamping blocks.
[0007] Beneficial effects: This tray structure is used in film deposition equipment. The clamped component is a glass substrate. The movable clamp holds the glass substrate from the side, and the tensioning elastic element pulls the movable clamp inward, so that the movable clamp applies a clamping force to the glass substrate towards the middle area of the tray body. This can effectively clamp and fix the glass substrate and prevent the glass substrate from coming out of the movable clamp. When the glass substrate expands and deforms due to heat, the tensioning elastic element has elastic deformation capability and can extend along the extension direction of the embedded groove. The movable clamp moves outward simultaneously, so that the tray can adapt to the expanded and deformed glass substrate. Compared with the fixed clamp, it can reduce the pressure on the expanded glass substrate and prevent the glass substrate from being subjected to excessive force and coming out of the movable clamp or breaking.
[0008] In one alternative embodiment, the movable latch is inclined to the side facing the middle of the tray body, with the top of the inclined surface positioned relative to its bottom near the middle region of the tray body; the movable latch restricts the degree of freedom of the clamped component in a direction away from the tray body.
[0009] Beneficial effects: The upper part of the inwardly inclined surface presses down on the glass substrate, which better secures the glass substrate and effectively prevents it from detaching from the movable clamp due to thermal expansion, movement, or vibration. This ensures the glass substrate remains stably held on the tray body. Furthermore, because the movable clamp and the glass substrate are elastically clamped, when the glass substrate warps or deforms, the edges of the glass substrate automatically adjust their contact position relative to the inclined surface, thus avoiding damage to the glass substrate from hard compression.
[0010] In one optional embodiment, a guide component is further included, which is disposed within the mounting groove and extends along the extension direction of the mounting groove, and the movable block is disposed on the guide component.
[0011] Beneficial effects: The moving block is guided by the guide component, which can ensure the smoothness of the moving block and make it stably clamp the glass substrate.
[0012] In one optional embodiment, the guide assembly includes a guide rail and a slider. The guide rail is fixedly disposed in the mounting groove. One side of the slider is slidably connected to the guide rail, and the other side of the slider is connected to the movable locking block. One end of the tensioning elastic member is connected to the slider.
[0013] In one optional embodiment, the device further includes a tension adjustment component and a positioning part. A clearance groove is provided in the middle area of the top surface of the tray body. The tension adjustment component is at least partially rotatably mounted on the tray body. One end of the tensioning elastic member away from the movable locking block is connected to the rotatable part of the tension adjustment component. After the rotatable part of the tension adjustment component rotates into place, it is circumferentially positioned on the tray body by the positioning part.
[0014] Beneficial effects: The tension adjustment assembly is used to adjust the tightness of the tensioning elastic element. When it is necessary to increase or decrease the clamping force on the glass substrate by moving the movable block, the rotatable part of the tension adjustment assembly is slightly rotated to wrap the tensioning elastic element around the tension adjustment assembly or to release the tensioning elastic element outward, thereby tightening or loosening the tensioning elastic element. The positioning part circumferentially positions the tension adjustment assembly to keep the rotatable part of the tension adjustment assembly in the position after rotation.
[0015] In one optional embodiment, the tension adjustment assembly includes a first disc, a second disc, a connecting elastic element, and a rotating shaft. The first disc is fixedly mounted on the tray body, the second disc is disposed above the first disc, and the rotating shaft is axially limited and circumferentially rotatable on the second disc. The two ends of the connecting elastic element are respectively connected to the rotating shaft and the first disc, and the connecting elastic element applies a pulling force toward the second disc toward the first disc. The end of the tensioning elastic element away from the movable latch is connected to the second disc.
[0016] In one optional embodiment, the positioning part includes positioning teeth disposed on opposite sides of the first disc and the second disc.
[0017] In one optional embodiment, a clearance groove is provided in the central region of the top surface of the tray body, the second tray body is disposed in the clearance groove, and the outer peripheral wall of the second tray body is spaced apart from the side wall of the clearance groove.
[0018] In one alternative embodiment, the bottom surface of the tray body is provided with heat dissipation fins.
[0019] Beneficial effects: The heat dissipation fins can accelerate the heat dissipation of the tray. When the tray is removed from the coating deposition equipment after the process is completed, it can cool down quickly, so that when a new glass substrate is loaded, it is not easy to cause excessive deformation due to the high temperature of the tray. This can reduce the degree of edge warping of the glass substrate, thus facilitating the loading of the glass substrate and ensuring production efficiency. At the same time, it can prevent the glass substrate from breaking due to deformation.
[0020] Secondly, this utility model also provides a coating deposition apparatus, comprising:
[0021] reaction chamber;
[0022] The tray described in any one of the above embodiments is disposed within the reaction chamber. The coating deposition equipment includes a tray and has the same technical effects as the tray, and will not be described further here. Attached Figure Description
[0023] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0024] Figure 1 This is a schematic diagram of a tray according to an embodiment of the present utility model;
[0025] Figure 2 Place the glass substrate Figure 1 The diagram shown is of the tray shown.
[0026] Figure 3 for Figure 1 A schematic diagram showing the engagement of the movable locking assembly, guide assembly, and tension adjustment assembly;
[0027] Figure 4 for Figure 3 A longitudinal sectional view of the active card block;
[0028] Figure 5 for Figure 1 A schematic diagram of the tension adjustment component;
[0029] Figure 6 This is a schematic diagram showing the engagement of the tension adjustment component with the tray body.
[0030] Figure 7 for Figure 1 A schematic diagram of the bottom structure of the tray.
[0031] Explanation of reference numerals in the attached figures:
[0032] 1. Tray body; 11. Clearance groove; 12. Heat dissipation fins; 2. Movable clamping assembly; 21. Movable locking block; 211. Inclined surface; 22. Tensioning elastic element; 3. Guide assembly; 31. Guide rail; 32. Slider; 4. Tension adjustment assembly; 41. First tray body; 42. Second tray body; 43. Connecting elastic element; 44. Rotary shaft; 45. Positioning part; 5. Glass substrate. Detailed Implementation
[0033] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0034] The following is combined with Figures 1 to 7 The following describes embodiments of the present invention.
[0035] According to an embodiment of the present invention, a tray is provided, including a tray body 1 and a movable clamping assembly 2.
[0036] The pallet body 1 has an embedded groove on its upper surface, which extends from the middle region of the pallet body 1 toward the edge of the pallet body 1. The movable clamping assembly 2 includes at least two movable clamping blocks 21 arranged in a clamping manner and tensioning elastic members 22 corresponding to the movable clamping blocks 21. The two movable clamping blocks 21 are movably disposed on the pallet body 1 along the extension direction of the embedded groove. The two ends of the tensioning elastic members 22 are respectively connected to the movable clamping blocks 21 and the middle region of the pallet body 1. The movable clamping blocks 21 are adapted to engage with the edge of the clamped part. The tensioning elastic members 22 apply a pulling force toward the middle region of the pallet body 1 toward the movable clamping blocks 21.
[0037] This tray structure is used in a film deposition equipment. The clamped component is a glass substrate 5. The movable clamping block 21 clamps the glass substrate 5 from the side. The tensioning elastic member 22 pulls the movable clamping block 21 inward, so that the movable clamping block 21 applies a clamping force to the glass substrate 5 toward the middle area of the tray body 1, which can effectively clamp and fix the glass substrate 5 and prevent the glass substrate 5 from coming out of the movable clamping block 21. When the glass substrate 5 is heated and expands and deforms, the tensioning elastic member 22 has elastic deformation capability and can extend along the extension direction of the embedded groove. The movable clamping block 21 moves outward at the same time, so that the tray can adapt to the expanded and deformed glass substrate 5. Compared with the fixed clamping block, it can reduce the pressure on the expanded glass substrate 5 and prevent the glass substrate 5 from coming out of the movable clamping block 21 or breaking due to excessive force.
[0038] In some embodiments, the glass substrate 5 has a rectangular cross-section; the embedding groove extends along the diagonal direction of the plane containing the cross-section of the clamped part, and the movable locking block 21 is an L-shaped locking block. The two sides of the L-shaped locking block are respectively engaged with the adjacent two sides at the corners of the glass substrate 5, so that the glass substrate 5 can be stably positioned on the tray body 1.
[0039] like Figure 3 and Figure 4As shown, in some embodiments, the movable latch 21 has an inclined surface 211 on the side facing the middle of the tray body 1. The top of the inclined surface 211 is positioned relative to its bottom near the middle area of the tray body 1. The movable latch 21 restricts the degree of freedom of the clamped component in a direction away from the tray body 1. When the glass substrate 5 is placed on the tray body 1, the movable latch 21 engages with the corners of the glass substrate 5. The movable latch 21 has an inclined surface 211 on the side facing the glass substrate 5, and the upper part of the inwardly inclined surface 211 presses against the glass substrate 5. This better fixes the glass substrate 5 and effectively prevents it from coming off the movable latch 21 due to thermal expansion, movement, or vibration, thus ensuring that the glass substrate 5 is stably held on the tray body 1. Furthermore, since the movable latch 21 and the glass substrate of the clamped component are elastically clamped, when the glass substrate warps or deforms, the edge of the glass substrate can automatically adjust its contact position relative to the inclined surface, thereby avoiding damage to the glass substrate due to hard compression.
[0040] In some alternative embodiments, such as Figure 4 As shown, the tilt angle of the inclined surface 211 relative to the vertical surface is θ, 3°≤θ≤15°. Within this tilt angle range, the tilt angle of the inclined surface 211 is moderate and not too small. It can effectively clamp and press the glass substrate 5, while avoiding the operation of inserting the glass substrate 5 into the movable card block 21 due to the excessive tilt angle.
[0041] like Figure 3 and Figure 4 As shown, in some embodiments, the top and bottom surfaces of the movable block 21 are horizontally extending planes, and its outer side wall opposite to the inclined surface 211 is a vertically extending vertical surface. The movable block 21 has an overall strip-shaped block structure that is thicker at the top and thinner at the bottom.
[0042] like Figure 1 As shown, in some embodiments, there are two sets of embedding slots. The two sets of embedding slots extend along the two diagonal directions of the plane containing the cross-section of the clamped part. Four movable locking blocks 21 are correspondingly provided on the tray body 1 at the end of the embedding slot. After the glass substrate 5 is placed in, the four movable locking blocks 21 respectively engage with the four corners of the glass substrate 5, which can stably clamp the glass substrate 5.
[0043] In other embodiments, a set of embedding slots is provided, which extends along one of the diagonal directions of the glass substrate 5, and two movable blocks 21 are engaged at two corners of the glass substrate 5 along the diagonal direction.
[0044] In other embodiments, the movable card block 21 may also be strip-shaped, with two opposite strip-shaped card blocks snapping onto the edge of the glass substrate 5.
[0045] In some alternative embodiments, the tensioning elastic element 22 includes a heat-resistant spring that can be used for a long time at 200°C, ensuring its normal operation in the high-temperature environment of the coating deposition equipment.
[0046] like Figure 3 As shown, in some embodiments, the tray also includes a guide component 3 disposed in the embedding groove and extending along the extension direction of the embedding groove. The movable block 21 is disposed on the guide component 3. When the movable block 21 moves, it is guided by the guide component 3, which can ensure the smoothness of the movement of the movable block 21 so that the movable block 21 can stably clamp the glass substrate 5.
[0047] In some optional embodiments, the guide assembly 3 includes a guide rail 31 and a slider 32. The guide rail 31 is fixedly disposed in the mounting groove. One side of the slider 32 is slidably connected to the guide rail 31, and the other side of the slider 32 is connected to the movable locking block 21. One end of the tensioning elastic member 22 is connected to the slider 32. The tensioning elastic member 22 pulls the movable locking block 21 inward. When the glass substrate 5 is heated and expands, the movable locking block 21 and the slider 32 slide outward. The slider 32 slides along the guide rail 31, which allows the movable locking block 21 to move smoothly.
[0048] like Figure 3 As shown, both the guide rail 31 and the slider 32 are rectangular strips. The guide rail 31 is fixedly connected in the embedded groove, and the top surface of the guide rail 31 is provided with a sliding groove. The slider 32 is set at the corner of the bottom of the movable block 21. The slider 32 is fixed to the movable block 21 by screws. The bottom of the slider 32 is provided with a strip-shaped protrusion, which slides in the sliding groove.
[0049] In some optional embodiments, the slider 32 has a length of 10cm-20cm, a width of 1cm, and a thickness of 0.1cm-0.3cm. The guide rail 31 is longer than the slider 32. This arrangement ensures that the slider 32 has sufficient length, width, and thickness, which ensures the stability of the slider 32 structure and the stable sliding of the slider 32 on the guide rail 31, thereby ensuring the stable sliding of the movable block 21.
[0050] In some embodiments, the height of the strip-shaped protrusion at the bottom of the slider 32 is 0.1cm-0.3cm. After the slider 32 is installed, its top surface is not higher than the top surface of the tray body 1, which ensures that the glass substrate 5 is placed stably on the tray body 1.
[0051] In some embodiments, the groove includes a dovetail groove or a trapezoidal groove, and the shape of the strip protrusion at the bottom of the slider 32 is adapted to the cross-sectional shape of the groove. This can prevent the slider 32 from coming off the guide rail 31 and ensure the reliability of the connection between the slider 32 and the guide rail 31.
[0052] In some embodiments, such as Figure 3 , Figure 5 and Figure 6 As shown, the tray also includes a tension adjustment assembly 4 and a positioning part 45. The tension adjustment assembly 4 is at least partially rotatably mounted on the tray body 1. The end of the tensioning elastic member 22 away from the movable latch 21 is connected to the rotatable part of the tension adjustment assembly 4. After the rotatable part of the tension adjustment assembly 4 rotates into position, it is circumferentially positioned on the tray body 1 by the positioning part 45. The tension adjustment assembly 4 is used to adjust the tightness of the tensioning elastic member 22. When it is necessary for the movable latch 21 to increase or decrease the clamping force on the glass substrate 5, the rotatable part of the tension adjustment assembly 4 is slightly rotated to wrap the tensioning elastic member 22 around the tension adjustment assembly 4 or to release the tensioning elastic member 22 outward, thereby tightening or loosening the tensioning elastic member 22. The positioning part 45 circumferentially positions the tension adjustment assembly 4 so that the rotatable part of the tension adjustment assembly 4 is kept in the position after rotation. The rotation angle of the tension adjustment assembly 4 is small, and the slight twist of the tensioning elastic member 22 does not affect its tightening effect on the movable latch 21.
[0053] Alternatively, in some embodiments, such as Figure 5 and Figure 6 As shown, the tension adjustment assembly 4 includes a first disc 41, a second disc 42, a connecting elastic element 43, and a rotating shaft 44. The first disc 41 is fixedly mounted on the tray body 1, and the second disc 42 is located on the upper part of the first disc 41. The rotating shaft 44 is axially limited and circumferentially rotatable on the second disc 42. The two ends of the connecting elastic element 43 are respectively connected to the rotating shaft 44 and the first disc 41. The connecting elastic element 43 applies a pulling force toward the second disc 42 toward the first disc 41. The end of the tensioning elastic element 22 away from the movable latch 21 is connected to the second disc 42.
[0054] When it is necessary to tighten or loosen the tension of the elastic element 22, release the positioning part 45, pull up the second disc 42 so that the second disc 42 is separated from the first disc 41, and rotate the second disc 42 clockwise or counterclockwise. The second disc 42 drives the tension elastic element 22 to rotate, thereby adjusting the tension of the tension elastic element 22 and the position of the movable locking block 21, facilitating the loading and unloading of the glass substrate 5, and providing tolerance when there are dimensional errors in the glass substrate 5. After adjustment, under the action of the restoring force of the connecting elastic element 43, the second disc 42 moves down to achieve docking of the two discs, and the positioning part 45 circumferentially positions the second disc 42 on the second disc 42. The rotating shaft 44 is axially limited and circumferentially rotatable on the second disc 42. The upper end of the connecting elastic element 43 is fixedly connected to the rotating shaft 44. When the second disc 42 rotates, it will not drive the connecting elastic element 43 to rotate synchronously, which can prevent the connecting elastic element 43 from twisting.
[0055] In some optional embodiments, the positioning part 45 includes positioning teeth on the opposite side of the first disc 41 and the second disc 42. When it is necessary to adjust the tension of the tensioning elastic member, the second disc 42 is pulled upward, so that the positioning teeth at the bottom of the second disc 42 disengage from the positioning teeth on the top surface of the first disc 41, allowing the second disc 42 to rotate relative to the first disc 41. Rotating the second disc 42 clockwise or counterclockwise causes the tensioning elastic member 22 to rotate, thereby adjusting the tension of the tensioning elastic member 22 and the position of the movable locking block 21, facilitating the loading and unloading of the glass substrate 5, and providing tolerance when there are dimensional errors in the glass substrate 5. After adjustment, under the restoring force of the connecting elastic member 43, the second disc 42 moves downward, and the positioning teeth of the two discs engage to circumferentially position the second disc 42 on the first disc 42.
[0056] In some embodiments, a clearance groove 11 is provided in the middle area of the top surface of the tray body 1, and the second tray body 42 is disposed in the clearance groove 11 and the outer peripheral wall of the second tray body 42 is spaced apart from the side wall of the clearance groove 11. This arrangement makes it convenient to pull the second tray body 42 upward from the clearance groove 11 outside the second tray body 42 to separate it from the first tray body 41, which facilitates operation.
[0057] like Figure 5 and Figure 6 As shown, in some embodiments, grooves are respectively provided on the opposite sides of the first disc 41 and the second disc 42. The upper and lower parts of the connecting elastic member 43 are respectively disposed in the grooves of the first disc 41 and the second disc 42, so that the connecting elastic member 43 can be stably held between the two discs. In this embodiment, the rotating shaft 44 is disposed at the bottom of the groove of the second disc 42.
[0058] When the glass substrate 5 is placed on the tray body 1, the top surface of the second tray 42 is not higher than the top surface of the tray body 1.
[0059] In some alternative embodiments, the positioning teeth include ratchet teeth disposed circumferentially on the first disc body 41 and the second disc body 42. The ratchet teeth of the two disc bodies engage to effectively position the second disc body 42 circumferentially on the first disc body 41.
[0060] In some alternative embodiments, the connecting elastic element 43 includes a spring.
[0061] In continuous production processes, such as in atomic layer deposition equipment, the tray temperature is usually maintained above 80°C. Large-sized glass substrates 5 are in direct contact with the tray, which can easily lead to the bottom of the glass substrate 5 being hotter than the top, the middle being hotter than the edges, and the edges of the glass substrate 5 being colder. This can cause the edges of the glass substrate 5 to warp, affecting the alignment of the glass substrate 5 with the movable latch 21, resulting in reduced production efficiency. It can also make the glass substrate 5 more prone to breakage due to deformation, thereby reducing the yield of the product.
[0062] To solve this problem, such as Figure 7 As shown, in some embodiments, the bottom surface of the tray body 1 is provided with heat dissipation fins 12. The heat dissipation fins 12 can accelerate the heat dissipation of the tray, and can quickly cool down when the tray is removed from the coating deposition equipment after the process is completed. This makes it less likely for the new glass substrate 5 to be excessively deformed due to the high temperature of the tray when it is loaded, thereby reducing the degree of edge warping of the glass substrate 5, which facilitates the loading of the glass substrate 5 and can ensure production efficiency; at the same time, it can prevent the glass substrate 5 from breaking due to deformation.
[0063] According to an embodiment of the present invention, another aspect provides a coating deposition apparatus, including a reaction chamber and the tray described in the above embodiment, wherein the tray is disposed inside the reaction chamber.
[0064] In this coating deposition equipment, the movable locking block 21 applies a clamping force to the glass substrate 5 toward the middle region of the tray body 1, which can effectively clamp and fix the glass substrate 5 and prevent the glass substrate 5 from falling out of the movable locking block 21. When the glass substrate 5 expands and deforms due to heat, the tensioning elastic element 22 has elastic deformation capability and can extend along the extension direction of the embedded groove. The movable locking block 21 moves outward synchronously, so that the tray can adapt to the expanded and deformed glass substrate 5. Compared with the fixed locking block, it can reduce the pressure on the expanded glass substrate 5 and prevent the glass substrate 5 from falling out of the movable locking block 21 or breaking due to excessive force.
[0065] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.
Claims
1. A tray, characterized in that, include: The tray body (1) has an embedding groove on its upper surface, the embedding groove extending from the middle region of the tray body (1) toward the edge of the tray body (1); The movable clamping assembly (2) includes at least two movable clamping blocks (21) arranged in a clamping manner and tensioning elastic members (22) corresponding to each movable clamping block (21). The two movable clamping blocks (21) are movably disposed on the tray body (1) along the extension direction of the insertion groove. The two ends of the tensioning elastic members (22) are respectively connected to the movable clamping blocks (21) and the middle region of the tray body (1). The movable clamping blocks (21) are adapted to engage with the edge of the clamped part. The tensioning elastic members (22) apply a pulling force toward the middle region of the tray body (1) toward the movable clamping blocks (21).
2. The pallet according to claim 1, characterized in that, The movable latch (21) is inclined (211) on the side facing the middle of the tray body (1), and the top of the inclined surface (211) is positioned relative to its bottom near the middle region of the tray body (1); the movable latch (21) restricts the degree of freedom of the clamped part in the direction away from the tray body (1).
3. The tray according to claim 1 or 2, characterized in that, It also includes a guide component (3) disposed in the mounting groove and extending along the extension direction of the mounting groove, and the movable block (21) is disposed on the guide component (3).
4. The tray according to claim 3, characterized in that, The guide assembly (3) includes a guide rail (31) and a slider (32). The guide rail (31) is fixedly disposed in the mounting groove. One side of the slider (32) is slidably connected to the guide rail (31), and the other side of the slider (32) is connected to the movable locking block (21). One end of the tensioning elastic element (22) is connected to the slider (32).
5. The pallet according to claim 1 or 2, characterized in that, It also includes a tension adjustment component (4) and a positioning part (45). The tension adjustment component (4) is at least partially rotatably disposed on the tray body (1). The end of the tensioning elastic member (22) away from the movable latch (21) is connected to the rotatable part of the tension adjustment component (4). After the rotatable part of the tension adjustment component (4) rotates into place, it is circumferentially positioned on the tray body (1) by the positioning part (45).
6. The pallet according to claim 5, characterized in that, The tension adjustment assembly (4) includes a first disc (41), a second disc (42), a connecting elastic element (43), and a rotating shaft (44). The first disc (41) is fixedly mounted on the tray body (1). The second disc (42) is located on the upper part of the first disc (41). The rotating shaft (44) is axially limited and rotatably mounted on the second disc (42). The two ends of the connecting elastic element (43) are respectively connected to the rotating shaft (44) and the first disc (41). The connecting elastic element (43) applies a pulling force toward the second disc (42) toward the first disc (41). The end of the tensioning elastic element (22) away from the movable latch (21) is connected to the second disc (42).
7. The pallet according to claim 6, characterized in that, The positioning part (45) includes positioning teeth provided on opposite sides of the first disc body (41) and the second disc body (42).
8. The pallet according to claim 6, characterized in that, The pallet body (1) has a relief groove (11) in the middle area of its top surface. The second pallet body (42) is located in the relief groove (11) and the outer peripheral wall of the second pallet body (42) is spaced apart from the side wall of the relief groove (11).
9. The tray according to claim 1 or 2, characterized in that, The bottom surface of the tray body (1) is provided with heat dissipation fins (12).
10. A coating deposition apparatus, characterized in that, include: reaction chamber; The tray according to any one of claims 1 to 9, wherein the tray is disposed inside the reaction chamber.