Detection device

Abstract

The utility model provides detection equipment, which comprises a rotating base body, a rotating shaft, a rotating shaft and a driving device, and is characterized in that a through hole is formed in the rotating base body; the lifting assembly comprises a lifting frame and a plurality of ejector pins, the ejector pins are located in the through holes and used for conducting lifting motion in the through holes, the lifting frame is used for supporting the ejector pins in the ascending process and disengaging from the ejector pins after descending, and the lifting frame and the rotating base body are arranged in a separated mode. The operation stability of the detection equipment is improved.

Description

Technical Field

[0001] This utility model relates to the field of detection technology, specifically to a detection device. Background Technology

[0002] In semiconductor processing and testing, samples need to be fixed on a carrier device, which is equipped with a lifting component to lift the sample, so that a robotic arm can place or remove the sample.

[0003] Because the wafer needs to be rotated during processing or inspection, the related technology places the lifting pins on the outside of the wafer, and the drive mechanism only rotates the wafer while the lifting device remains stationary. This results in the wafer edge being suspended in the air, the wafer position being unstable, and the wafer being incompatible with multiple sizes. Furthermore, the robot can only load and unload wafers in the gaps between the lifting pins. Utility Model Content

[0004] This application provides a testing device for improving the operational stability of the testing device.

[0005] This utility model provides a testing device, including: a rotating base having a through hole; a lifting assembly including a lifting frame and a plurality of pins, wherein the pins are located in the through hole and are used for lifting and lowering within the through hole, the lifting frame is used to support the pins during the lifting process and detach from the pins after the descent, and the lifting frame and the rotating base are separately disposed.

[0006] Optionally, the surface of the lifting frame facing the ejector pin is a plane.

[0007] Optionally, it may also include a drive mechanism for driving the lifting frame to perform lifting movements.

[0008] Optionally, the sidewall of the through hole is stepped along the central axis of the rotating base, and the sidewall of the ejector pin is stepped in a shape corresponding to the through hole.

[0009] Optionally, the ejector pin includes a first rod and a second rod fixedly connected, the second rod being located on the side of the first rod facing the lifting frame, and the diameter of the first rod being larger than the diameter of the second rod; the through hole includes a first hole area and a second hole area, the second hole area being located on the side of the first hole area facing the lifting frame; the diameter of the first rod is larger than the diameter of the second hole area; wherein, the detection device further includes: a blocking member, located between the sidewall of the second hole area and the second rod, the blocking member being located on the edge region of the first rod facing the lifting frame.

[0010] Optionally, the elastic modulus of the first member is greater than that of the second member.

[0011] Optionally, the rotating matrix includes multiple adsorption regions; wherein each adsorption region is provided with the through hole; or, the rotating matrix includes a first adsorption region to an Mth adsorption region, the (m+1)th adsorption region surrounds the mth adsorption region, M is an integer greater than or equal to 2, and m is an integer greater than or equal to 1 and less than or equal to M-1; the first adsorption region is provided with the through hole.

[0012] Optionally, it may also include: a rotating mechanism for driving the rotating base to rotate, wherein the rotating base drives the ejector pin to rotate during the rotation.

[0013] Optionally, it may also include: a transfer component for transferring a sample onto the ejector pin, the transfer component also being used to remove a sample from the ejector pin.

[0014] Optionally, the surface of the lifting frame facing the ejector pin is a plane; the detection device further includes: a rotating mechanism for driving the rotating base to rotate, wherein the rotating base drives the ejector pin to rotate during the rotation; and a controller for controlling the rotating base to rotate so that the transmission component is aligned with the gap between the ejector pins if the transmission component is not aligned with the gap between the ejector pins when the lifting frame is disengaged from the ejector pins.

[0015] The technical solution of this utility model has the following beneficial effects:

[0016] The testing equipment provided by this utility model features a detachable lifting frame and ejector pin, allowing the rotating substrate to carry the ejector pin during rotation without needing to rotate the lifting frame, thereby improving the operational stability of the testing equipment.

[0017] Furthermore, the elastic modulus of the first member is greater than that of the second member. Because the first member has a larger elastic modulus, its elastic deformation is greater during its contact with the blocking member after falling, resulting in less damage to the first member. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the drawings used in the description of the prior art, it is obvious that the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 A perspective view of a testing device provided in an embodiment of this utility model;

[0020] Figure 2 for Figure 1 A cross-sectional schematic diagram of one state of the testing equipment;

[0021] Figure 3 for Figure 1 A cross-sectional schematic diagram of another state of the detection equipment;

[0022] Figure 4 for Figure 1 A schematic diagram of the through hole, ejector pin, and blocking component in the testing equipment. Detailed Implementation

[0023] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0027] One embodiment of this utility model provides a detection device, see reference. Figures 1 to 3 ,include:

[0028] Rotating base 1, wherein the rotating base 1 has a through hole 5;

[0029] The lifting assembly includes a lifting frame 4 and a plurality of ejector pins 2. The ejector pins 2 are located in the through hole 5 and are used for lifting and lowering within the through hole 5. The lifting frame 4 is used to support the ejector pins 2 during the lifting process and to detach from the ejector pins 2 after the descent. The lifting frame 4 and the rotating base 1 are separately disposed.

[0030] In this embodiment, by setting the lifting frame 4 to be separable from the ejector pin 2, the rotating base 1 carries the ejector pin 2 to rotate during the rotation process without having to rotate the lifting frame 4, thereby improving the operational stability of the detection equipment.

[0031] In this embodiment, the rotating base 1 can rotate around its central axis. The rotating base 1 has a first surface and a second surface arranged opposite to each other, and a through hole 5 penetrates the rotating base 1 from the first surface to the second surface. The central axis of the rotating base 1 is perpendicular to the first surface and the second surface. The second surface is located between the first surface and the lifting frame 4.

[0032] The first surface is used to support the sample. The sample can be, for example, a wafer. The sample can also be other semiconductor structures.

[0033] In this embodiment, the ejector pin 2 is located in the through hole 5 in the rotating base 1 and is used for vertical movement within the through hole 5. The ejector pin 2 is used to place the sample on the first surface of the rotating base 1. The diameter of the rotating base 1 can be larger than the diameter of the sample, so that the edge of the sample can be supported by the rotating base 1, and the edge of the sample does not need to be suspended. The position of the sample is stable when it is on the first surface of the rotating base 1. Furthermore, the first surface of the rotating base 1 can accommodate samples of multiple sizes.

[0034] In this embodiment, the surface of the lifting frame 4 facing the ejector pin 2 is a plane. This allows any position on the surface of the lifting frame 4 facing the ejector pin 2 to contact the ejector pin 2. The positional accuracy requirement for the lifting frame 4 is relatively low.

[0035] In this embodiment, the lifting frame 4 includes a lifting platform and a support member. The support member is located on the edge region of the lifting platform, away from the rotating base 1, and is fixedly connected to the lifting platform. The lifting platform is used to contact the ejector pin 2. The lifting platform is used to support the ejector pin 2 during the upward movement and to detach from the ejector pin 2 after the downward movement.

[0036] In this embodiment, the number of support members is one or more. When there is only one support member, it can be a ring-shaped structure. When there are multiple support members, they are spaced apart and arranged at intervals along the edge area of ​​the lifting platform.

[0037] In this embodiment, the detection device further includes a drive mechanism 3, which drives the lifting frame 4 to move up and down. Specifically, the drive mechanism 3 drives the support members of the lifting frame 4 to move up and down.

[0038] In this embodiment, the detection device further includes a rotating mechanism (not shown), which drives the rotating base 1 to rotate, and the rotating base 1 drives the ejector pin 2 to rotate during the rotation. The rotating mechanism can drive the rotating base 1 to rotate by a certain angle by clamping it against the side wall of the rotating base 1.

[0039] In this embodiment, the detection device further includes a transfer component (not shown), which is used to transfer the sample onto the ejector pin 2 and to remove the sample from the ejector pin 2. The transfer component includes a robotic arm.

[0040] In this embodiment, the rotating base 1 rotates by a certain angle, aligning the transmission component with the gap between the ejector pins 2. This eliminates the need for significant adjustments to the position of the transmission component when picking up or placing samples. Specifically, the ejector pins 2 rise to lift the sample, the rotating base 1 rotates by a certain angle, and the transmission component extends below the sample, aligning with the gap between the ejector pins 2. The transmission component then removes the sample from the ejector pins 2. The rotating base 1 rotates by a certain angle, the transmission component transfers the sample to the top of the rotating base 1, the ejector pins 2 rise to support the sample, the transmission component is withdrawn from the gap between the ejector pins 2, and the ejector pins 2 descend to place the sample on the first surface of the rotating base 1.

[0041] In this embodiment, the sidewall of the through hole 5 is stepped along the central axis of the rotating base 1, and the sidewall of the ejector pin 2 is stepped in a manner corresponding to the through hole 5.

[0042] In this embodiment, reference Figure 4 The ejector pin 2 includes a first rod 21 and a second rod 22 fixedly connected. The second rod 22 is located on the side of the first rod 21 facing the lifting frame 4, and the diameter of the first rod 21 is larger than the diameter of the second rod 22. The through hole 5 includes a first hole area and a second hole area. The second hole area is located on the side of the first hole area facing the lifting frame 4, and the diameter of the first rod 21 is larger than the diameter of the second hole area. The detection device also includes a blocking member 7, which is located between the side wall of the second hole area and the second rod 22. The blocking member 7 is located on the edge area of ​​the first rod 21 facing the lifting frame 4.

[0043] In this embodiment, the dimension of the first rod 21 along the central axis of the rotating base 1 is smaller than that of the second rod 22 along the central axis of the rotating base 1. This reduces the overall volume of the ejector pin 2 and decreases material costs.

[0044] In this embodiment, the elastic coefficient of the first member 21 is greater than that of the second member 22. Because the elastic coefficient of the first member 21 is larger, its elastic deformation is greater during the contact process with the blocking member 7 after it falls, resulting in less damage to the first member 21.

[0045] In other embodiments of this application, there are no restrictions on the elastic coefficient of the first member 21 and the elastic coefficient of the second member 22.

[0046] In this embodiment, the first member 21 is made of aluminum alloy or polyethylene. The second member 22 is made of alloy. In other embodiments of this application, the materials of the first member 21 and the second member 22 are not limited.

[0047] In this embodiment, the detection device further includes a fastener 6, which is used to fasten the first rod 21 and the second rod 22. The fastener 6 includes screws.

[0048] In this embodiment, the drive mechanism 3 drives the lifting frame 4 to perform lifting and lowering movements. During the lifting process, the lifting frame 4 drives the ejector pin 2 to move upward (see reference). Figure 2 During the descent of the lifting frame 4 driven by the drive mechanism 3, the ejector pin 2 descends under the influence of gravity. When the ejector pin 2 reaches a certain position, it is blocked by the blocking component 7. The lifting frame 4 continues to descend, and the ejector pin 2 disengages from the lifting frame 4 (see reference). Figure 3 ).

[0049] In this embodiment, the lifting frame 4 is separate from the rotating mechanism. The effect of the lifting frame 4 on the ejector pin 2 and the effect of the rotating mechanism on the rotating base 1 are independent of each other, and the lifting frame 4 is not affected during the action of the rotating mechanism on the rotating base 1.

[0050] In this embodiment, the rotating substrate 1 includes multiple adsorption zones; each adsorption zone is provided with a through hole 5.

[0051] In other embodiments of this application, through holes 5 may be provided in a portion of the adsorption zones.

[0052] In other embodiments of this application, the rotating substrate 1 includes a first adsorption region to an Mth adsorption region, and the (m+1)th adsorption region surrounds the mth adsorption region, where M is an integer greater than or equal to 2, and m is an integer greater than or equal to 1 and less than or equal to M-1; the first adsorption region is provided with a through hole 5, and exemplaryly, only the first adsorption region is provided with a through hole 5.

[0053] In this embodiment, the detection device further includes a controller. If the transmission component is not aligned with the gap between the ejector pins 2, the controller is used to control the rotating base 1 to rotate so that the transmission component is aligned with the gap between the ejector pins 2 when the lifting frame 4 is disengaged from the ejector pins 2.

[0054] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A testing device, characterized in that, include: A rotating matrix having through holes; The lifting assembly includes a lifting frame and a plurality of ejector pins, the ejector pins being located in the through hole and used for lifting and lowering within the through hole, the lifting frame being used to support the ejector pins during the lifting process and to detach from the ejector pins after the descent, the lifting frame and the rotating base being separately disposed.

2. The detection device according to claim 1, characterized in that, The surface of the lifting frame facing the ejector pin is a plane.

3. The detection device according to claim 1, characterized in that, Also includes: A drive mechanism is used to drive the lifting frame to perform lifting movements.

4. The detection device according to claim 1, characterized in that, The sidewall of the through hole is stepped along the central axis of the rotating base, and the sidewall of the ejector pin is stepped in a shape corresponding to the through hole.

5. The detection device according to claim 4, characterized in that, The ejector pin includes a first rod and a second rod that are fixedly connected. The second rod is located on the side of the first rod facing the lifting frame, and the diameter of the first rod is larger than the diameter of the second rod. The through hole includes a first hole area and a second hole area. The second hole area is located on the side of the first hole area facing the lifting frame, and the diameter of the first rod is larger than the diameter of the second hole area. The detection device further includes a blocking member located between the side wall of the second hole area and the second rod, wherein the blocking member is located on the side of the edge area of ​​the first rod facing the lifting frame.

6. The detection device according to claim 5, characterized in that, The elastic modulus of the first member is greater than that of the second member.

7. The detection device according to claim 1, characterized in that, The rotating matrix includes multiple adsorption zones; wherein each adsorption zone is provided with the through hole; Alternatively, the rotating matrix includes a first adsorption region to an Mth adsorption region, with the (m+1)th adsorption region surrounding the mth adsorption region, where M is an integer greater than or equal to 2, and m is an integer greater than or equal to 1 and less than or equal to M-1; the first adsorption region is provided with the through hole.

8. The detection device according to claim 1, characterized in that, Also includes: A rotating mechanism is used to drive the rotating base to rotate, and the rotating base drives the ejector pin to rotate during the rotation.

9. The testing equipment according to any one of claims 1, 3 to 8, characterized in that, Also includes: A transfer component is used to transfer a sample onto the ejector pin, and the transfer component is also used to remove a sample from the ejector pin.

10. The detection device according to claim 9, characterized in that, The surface of the lifting frame facing the ejector pin is a plane; The testing equipment further includes: a rotating mechanism for driving the rotating base to rotate, wherein the rotating base drives the ejector pin to rotate during the rotation; and a controller for controlling the rotating base to rotate so that the transmission component is aligned with the gap between the ejector pins if the transmission component is not aligned with the gap between the ejector pins, provided that the lifting frame is disengaged from the ejector pins.

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