Device for measuring insulation resistance of heater and semiconductor processing system

Abstract

The utility model discloses a heater insulation resistance measuring device and a semiconductor processing system, and relates to the technical field of insulation resistance measurement. The measuring device comprises a frame, a fixing plate, a driving part and a measuring part. The frame comprises a first supporting part and a second supporting part which are oppositely arranged. One end of the fixing plate is fixedly connected with the first supporting part, the other end of the fixing plate is fixedly connected with the second supporting part, and a containing hole is formed in the fixing plate and used for containing a heater; the driving part is contained in the containing cavity and corresponds to the containing hole, and the driving part comprises a driving mechanism and a contact part. One end of the driving mechanism is fixedly connected with the lower surface of the top plate of the frame; one end of the contact part is slidably connected with the other end of the driving mechanism, and the other end of the contact part is provided with at least one test probe group; the measuring part comprises a driving control loop, a main control loop and a measuring loop. The measuring device can realize the automatic and standardized test of the insulation resistance of the heater.

Description

Technical Field

[0001] This application relates to the field of insulation resistance measurement technology, and more specifically, to a device for measuring the insulation resistance of a heater and a semiconductor manufacturing system. Background Technology

[0002] In the semiconductor industry, insulation resistance testing is commonly used to confirm whether heaters meet production requirements. Qualified heaters undergo soldering, wiring, and potting before being installed on the machine. If quality control is not maintained during the incoming heater assembly process, subsequent rework becomes difficult, time-consuming, and extremely challenging.

[0003] However, the applicant of this application has found that the current measuring device for the insulation resistance of heaters is manually operated, and the measurement process requires human intervention. The degree of automation and standardization is low, which may cause false detection of insulation resistance and increase the probability of rework.

[0004] The content of the background section is merely technology known to the public and does not necessarily represent existing technology in the field. Utility Model Content

[0005] This application aims to provide a device for measuring the insulation resistance of a heater and a semiconductor manufacturing system to solve the aforementioned technical problems.

[0006] According to one aspect of this application, a measuring device for the insulation resistance of a heater is provided. The measuring device includes a frame, a fixing plate, a driving part, and a measuring part. The frame includes a first support part and a second support part disposed opposite to each other, forming a receiving cavity between the first support part and the second support part; the fixing plate is horizontally disposed, one end of the fixing plate is fixedly connected to the first support part, and the other end of the fixing plate is fixedly connected to the second support part, and the fixing plate is provided with a receiving hole for placing the heater; the driving part is accommodated in the receiving cavity and is disposed corresponding to the receiving hole, and the driving part includes a driving mechanism and a contact part. One end of the driving mechanism is fixedly connected to the lower surface of the top plate of the frame; one end of the contact part is slidably connected to the other end of the driving mechanism, and the other end of the contact part is provided with at least one set of test probes; the measuring part includes a driving control circuit, a main control circuit, and a measuring circuit. One end of the drive control circuit is connected to the drive mechanism, and the other end of the drive control circuit is connected to the other end of the drive mechanism; the input end of the main control circuit is connected to the power distribution line, one end of the output end of the main control circuit is connected to one end of the drive control circuit, and the other end of the output end of the main control circuit is connected to the other end of the drive control circuit; one end of the measurement circuit is connected in parallel with at least one set of test probes, and one end of the measurement circuit is connected to one end of the output end of the main control circuit, and the other end of the measurement circuit is connected to the housing of the contact part, and the other end of the measurement circuit is connected to the other end of the output end of the main control circuit.

[0007] According to some embodiments of this application, the fixing plate is provided with at least two receiving holes at intervals; the measuring device includes at least two driving parts, and the driving parts correspond one-to-one with the receiving holes.

[0008] According to some embodiments of this application, the driving mechanism is a cylinder.

[0009] According to some embodiments of this application, when the heater is placed in the receiving hole, the heater is fixedly connected to the fixing plate by a pin structure.

[0010] According to some embodiments of this application, the drive control circuit includes at least one set of drive control sub-circuits, each set of drive control sub-circuits corresponding one-to-one with each drive mechanism; the drive control sub-circuit includes a drive solenoid valve, an air inlet sub-pipeline, and an air outlet sub-pipeline; one end of the drive solenoid valve is connected to one end of the air inlet sub-pipeline; the other end of the air inlet sub-pipeline is connected to the air inlet drive end of the drive mechanism; the other end of the drive solenoid valve is connected to one end of the air outlet sub-pipeline; the other end of the air outlet sub-pipeline is connected to the air outlet drive end of the drive mechanism.

[0011] According to some embodiments of this application, the main control circuit includes a power supply, an emergency stop switch, a start switch, a stop switch, a first relay, and an insulation module. The input terminal of the power supply is connected to the power distribution line. The power supply obtains a first voltage from the power distribution line through its input terminal and converts the first voltage into a second voltage. The output terminal of the power supply outputs the second voltage. The first terminal of the emergency stop switch is connected to the negative terminal of the power supply output, the second terminal is connected to the positive terminal of the power supply output, the third terminal is the positive output terminal of the second voltage, and the fourth terminal is the negative output terminal of the second voltage. One terminal of the start switch is connected to the third terminal of the emergency stop switch. One terminal of the stop switch is connected to the other terminal of the start switch. The first relay includes a first coil and a first normally open switch. One terminal of the first coil is connected to the stop switch. The other end of the stop switch is connected, and the other end of the first coil is connected to the fourth end of the emergency stop switch; the first normally open switch includes a first normally open sub-switch, a second normally open sub-switch, and a third normally open sub-switch; one end of the first normally open sub-switch is connected to the power distribution line; one end of the second normally open sub-switch is connected to the power distribution line; one end of the third normally open sub-switch is connected to the third end of the emergency stop switch, and the other end of the third normally open sub-switch is connected to the other end of the start switch, so that the third normally open sub-switch and the start switch are connected in parallel; one end of the insulation module is connected to the other end of the first normally open switch, and the other end of the insulation module is electrically connected to the other end of the second normally open switch.

[0012] According to some embodiments of this application, the measurement circuit includes a controller group and a measurement sub-circuit; the controller group may include a main controller, an input controller group, and an output controller group; the main controller is communicatively connected to the input controller group, the main controller is communicatively connected to the output controller group, and the input controller group is communicatively connected to the output controller group; the input controller group includes a first input controller and a second input controller; the output controller group includes a first output controller, a second output controller, and a third output controller; the measurement sub-circuit includes a second relay group, a reset switch, and a limit switch; the drive solenoid valve includes an extension drive solenoid valve and a retraction drive solenoid valve; the extension drive solenoid valve includes an extension solenoid coil and an extension-to-position switch; the retraction drive solenoid valve includes a retraction solenoid coil and a retraction-to-position switch; the power input terminal of the main controller is connected to the power output terminal to obtain a second voltage; one end of the reset switch is connected to the positive terminal of the power output terminal, and the other end of the reset switch is connected to a signal output terminal of the main controller; one end of the limit switch is connected to the positive terminal of the power output terminal, and the other end of the limit switch is connected to another signal output terminal of the main controller. A signal output terminal is connected; a limit switch is fixed on a mounting plate, and the limit switch corresponds to the receiving hole; one end of the extended-to-position switch is connected to the positive terminal of the power supply output, and the other end of the extended-to-position switch is connected to an input terminal of the first input controller; one end of the retracted-to-position switch is connected to the positive terminal of the power supply output, and the other end of the extended-to-position switch is connected to an input terminal of the second input controller; one end of the extended electromagnetic coil is connected to the positive terminal of the power supply output, and the other end of the extended electromagnetic coil is connected to an output terminal of the first output controller; one end of the retracted electromagnetic coil is connected to the positive terminal of the power supply output, and the other end of the retracted electromagnetic coil is connected to an output terminal of the second output controller; the second relay group includes a first sub-relay; the first sub-relay includes a first sub-coil and a first sub-inductive normally open switch; one end of the first sub-coil is connected to the negative terminal of the power supply output, and the other end of the first sub-coil is connected to an output terminal of the third output controller; one end of the first sub-inductive normally open switch is connected to the positive terminal of the insulation module output, and the other end of the first sub-inductive normally open switch is connected in parallel with the test probe group.

[0013] According to some embodiments of this application, the main control circuit further includes a residual current device (RCD). A first terminal of the RCD is connected to the power distribution line, a second terminal of the RCD is connected to one end of the power input terminal, and the second terminal of the RCD is connected to one end of a first normally open sub-switch. A third terminal of the RCD is connected to the power distribution line, a fourth terminal of the RCD is connected to the other end of the power input terminal, and the fourth terminal of the RCD is connected to one end of a second normally open sub-switch.

[0014] According to one aspect of this application, a semiconductor manufacturing system is provided. The semiconductor manufacturing system includes the measurement device described above.

[0015] This application supplies power to the drive control circuit and the measurement circuit through the main control circuit. When the heater is placed in the receiving hole, the drive control circuit controls the extension of the drive mechanism, thereby driving the contact part to move downward in the vertical direction.

[0016] This application achieves automated and standardized insulation resistance testing by ensuring good contact between the test probe group located in the drive unit and the test holes of the heater. The test probe group, measurement circuit, and heater form a circuit for measuring the heater's insulation resistance. This automated and standardized testing of the heater's insulation resistance improves measurement accuracy. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of a measuring device according to an embodiment of this application is shown;

[0019] Figure 2 This invention provides another schematic diagram of the measuring device according to an embodiment of the present application.

[0020] Figure 3 This invention provides another schematic diagram of the measuring device according to an embodiment of the present application.

[0021] Figure 4 This invention provides a schematic diagram of the structure of a drive unit according to an embodiment of the present application.

[0022] Figure 5 This invention provides a schematic diagram of the structure of a limit switch according to an embodiment of the present application.

[0023] Figure 6 This invention provides a schematic diagram showing a heater placed in a receiving hole according to an embodiment of the present application.

[0024] Figure 7 This invention provides another structural schematic diagram showing the heater of one embodiment of the present application placed in the receiving hole;

[0025] Figure 8 This invention provides a schematic diagram of the main control circuit according to an embodiment of the present application.

[0026] Figure 9 This invention provides a schematic diagram of the structure of a measurement circuit according to an embodiment of the present application.

[0027] Figure 10This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0028] Figure 11 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0029] Figure 12 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0030] Figure 13 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0031] Figure 14 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0032] Figure 15 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0033] Figure 16 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0034] Figure 17 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0035] Figure 18 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0036] Figure 19 This invention provides another schematic diagram of the measurement circuit according to an embodiment of the present application.

[0037] Figure 20 A schematic diagram of a drive control loop according to an embodiment of this application is shown.

[0038] Figure Labels

[0039] Measuring device 100; heater 200; frame 11; fixing plate 12; drive unit 13; measuring unit 14; human-machine interface module 15; electrical cabinet 16; first support unit 111; second support unit 112; receiving hole 121; pin structure 122; drive mechanism 131; contact part 132; test probe group 1321; test probe 13211; drive control circuit 141; main control circuit 142; measuring circuit 143; drive control sub-circuit 1401; drive solenoid valve 1411; air inlet sub-pipe 1412; air outlet sub-pipe 1413; extension drive solenoid valve 14111; Retractable solenoid valve 14112; Extendable solenoid coil 14111a; Extendable stop switch 14111b; Retractable solenoid coil 14112a; Retractable stop switch 14112b; Inlet threaded straight-through 14121; Inlet throttle valve 14122; Outlet threaded straight-through 14131; Outlet throttle valve 14132; Power supply 1421; Emergency stop switch 1422; Start switch 1423; Stop switch 1424; First relay 1425; Insulation module 1426; Residual current device 1427; Working indicator light 1428; First coil 14251; First normally open switch 142 52; First normally open sub-switch 14252a, second normally open sub-switch 14252b; third normally open sub-switch 14252c; controller group 1431; measurement sub-circuit 1432; first test switch 1433; second test switch 1434; main controller 14311; input controller group 14312; output controller group 14313; first input controller 14312a; second input controller 14312b; first output controller 14313a; second output controller 14313b; third output controller 14313c; fourth output controller 14313d Fifth output controller 14313e; Sixth output controller 14313f; Second relay group 14321; Reset switch 14322; Limit switch 14323; Test result indicator light 14324; First sub-relay 14321a; Second sub-relay 14321b; Third sub-relay 14321c; Second sub-coil 14321a1; Second sub-inductive normally open switch 14321a2; Second sub-coil 14321b1; Second sub-inductive normally open switch 14321b2; Third sub-coil 14321c1; Third sub-inductive normally open switch 14321c2. Detailed Implementation

[0040] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0041] According to one aspect of this application, a measuring device 100 for measuring the insulation resistance of a heater is provided. See also... Figure 1 and Figure 2 The measuring device 100 includes a frame 11, a fixing plate 12, a driving unit 13, and a measuring unit 14. Figure 1 and Figure 2 (Not shown in the image).

[0042] See Figures 1-2 The frame 11 includes a first support portion 111 and a second support portion 112 disposed opposite to each other, forming a receiving cavity between the first support portion 111 and the second support portion 112. For example, the first support portion 111 may include two oppositely disposed support legs, one end of which is fixedly connected to one side of the top plate of the frame 11. The second support portion 112 may include two oppositely disposed support legs, one end of which is fixedly connected to the other opposite side of the top plate of the frame 11.

[0043] See Figures 1-2 The fixing plate 12 is a horizontally arranged structure. One end of the fixing plate 12 is fixedly connected to the first support part 111, and the other end of the fixing plate 12 is fixedly connected to the second support part 112. For example, one end of the fixing plate 12 can be fixedly connected to the two support legs of the first support part 111, and the other end of the fixing plate 12 can be fixedly connected to the two support legs of the second support part 112. The distance between the fixing plate 12 and the top plate of the frame 11 can be set according to the needs of the heater, and this application does not impose any restrictions.

[0044] See Figures 1-3 The fixing plate 12 may be provided with a receiving hole 121. For example, the receiving hole 121 may be a U-shaped hole with one side open. The receiving hole 121 may be used to place a heater.

[0045] See Figures 1-3 The drive unit 13 can be housed within the receiving cavity. Furthermore, the drive unit 13 is disposed corresponding to the receiving hole 121. The drive unit 13 includes a drive mechanism 131 and a contact portion 132.

[0046] See Figures 1-3 One end of the drive mechanism 131 is fixedly connected to the lower surface of the top plate of the frame 11. For example, one end of the drive mechanism 131 can be fixed to the lower surface of the top plate of the frame 11 by screws.

[0047] Optionally, the drive mechanism 131 can be a cylinder. The cylinder's inlet or outlet sub-pipe is connected to the cylinder, thereby controlling the sliding of the other end of the cylinder.

[0048] See Figures 1-3One end of the contact portion 132 is slidably connected to the other end of the drive mechanism 131. The drive mechanism 131 can drive the contact portion 132 to slide up and down in the vertical direction. At least one test probe group 1321 can be provided at the other end of the contact portion 132.

[0049] For example, see Figure 4 Three sets of test probe groups 1321 can be provided at the other end of the contact portion 132. Each set of test probe groups 1321 includes two test probes 13211. One test probe 13211 in one set of test probe groups 1321 can be connected to one end of a resistance wire inside the heater 200, and the other test probe 13211 can be connected to the other end of the same resistance wire inside the heater 200. The heater 200 has three resistance wires inside, and the three sets of test probe groups 1321 are connected to the three resistance wires respectively.

[0050] With the heater placed in the receiving hole 121, the drive mechanism 131 can drive the contact portion 132 to slide downwards in the vertical direction until the test probe contacts the test hole of the heater, thereby forming a circuit for measuring the insulation resistance of the heater. After the test is completed, the drive mechanism 131 can drive the contact portion 132 to slide upwards in the vertical direction until the contact portion 132 returns to its initial position.

[0051] See Figures 1-2 An electrical cabinet 16 can also be installed on the outside of the second support 112, and the measuring unit 14 can be installed in the electrical cabinet 16. The measuring unit 14 includes a drive control circuit 141, a main control circuit 142, and a measuring circuit 143.

[0052] One end of the drive control circuit 141 is connected to the drive mechanism 131, and the other end of the drive control circuit 141 is connected to the other end of the drive mechanism 131. The drive control circuit 141 can control the extension or retraction of the drive mechanism 131. When the drive control circuit 141 controls the drive mechanism 131 to extend, the drive mechanism 131 drives the contact portion 132 to move downward in the vertical direction. When the drive control circuit 141 controls the drive mechanism 131 to retract, the drive mechanism 131 drives the contact portion 132 to move upward in the vertical direction.

[0053] The input terminal of the main control circuit 142 is connected to the power distribution line, one end of the output terminal of the main control circuit 142 is connected to one end of the drive control circuit 141, and the other end of the output terminal of the main control circuit 142 is connected to the other end of the drive control circuit 141.

[0054] For example, the main control circuit 142 can provide electrical control power to the drive mechanism 131, and control the connection between the intake sub-pipe 1412 and the drive mechanism 131 (i.e., cylinder) or the exhaust sub-pipe 1413 and the drive mechanism 131 (i.e., cylinder) through the electrical control power.

[0055] One end of the measurement circuit 143 is connected to the positive terminal of at least one test probe group 1321, and one end of the measurement circuit 143 is connected to one end of the output terminal of the main control circuit 142. The other end of the measurement circuit 143 is connected to the housing of the contact portion 132, and the other end of the measurement circuit 143 is connected to the other end of the output terminal of the main control circuit 142.

[0056] The main control circuit 142 can supply power to the measurement circuit 143. The measurement circuit 143 can form a circuit for measuring the insulation resistance of the heater by means of the test probe group 1321 and the housing of the contact portion 132.

[0057] Through the above embodiments, this application supplies power to the drive control circuit 141 and the measurement circuit 143 through the main control circuit 142. When the heater is placed in the receiving hole 121, the drive control circuit 141 controls the extension of the drive mechanism 131, thereby driving the contact part 132 to move downward in the vertical direction.

[0058] This application enables automated and standardized insulation resistance testing by ensuring good contact between the test probe group 1321 provided in the drive unit 13 and the test hole of the heater. This allows the test probe group 1321, the measurement circuit 143, and the heater to form a circuit for measuring the insulation resistance of the heater. Through automated and standardized testing of the heater's insulation resistance, this application improves measurement accuracy.

[0059] Optionally, see Figures 1-2 The fixing plate 12 is provided with at least two receiving holes 121 spaced apart. The measuring device 100 includes at least two driving parts 13. Each driving part 13 corresponds to one receiving hole 121.

[0060] For example, see Figures 1-2 The measuring device 100 may include 12 drive units 13. The fixing plate 12 may have two sets of receiving holes 121 spaced apart, and the two sets of receiving holes 121 may be arranged in parallel. Each set of receiving holes 121 may have 6 receiving holes 121 spaced apart. Each drive unit 13 corresponds one-to-one with each receiving hole 121. Each set of receiving holes 121 may be configured with...

[0061] Each drive mechanism 131 is electrically connected in parallel, and the air inlet sub-pipes 1412 of each drive mechanism 131 are connected in parallel, as are the air outlet sub-pipes 1413 of each drive mechanism 131. Each set of test probe groups 1321 can also be electrically connected in parallel.

[0062] For this setting, see Figure 6 and Figure 7 This application enables automated batch testing of heaters 200.

[0063] Optionally, see Figure 3 When the heater 200 is placed in the receiving hole 121, the heater 200 is fixedly connected to the fixing plate 12 by the pin structure 122. The pin structure 122 can be fixed on both sides of the receiving hole 121, so that the heater 200 does not undergo relative displacement when placed in the receiving hole 121. Furthermore, the placement position of the heater 200 can be fixed each time, improving testing efficiency.

[0064] See Figures 1-2 The measuring device 100 also includes a human-machine interaction module 15. The human-machine interaction module 15 can be fixed to the outside of the first support part 111.

[0065] Optionally, see Figure 20 The drive control circuit 141 may include at least one set of drive control sub-circuits 1401, and each set of drive control sub-circuits 1401 corresponds one-to-one with each drive mechanism 131.

[0066] The drive control sub-circuit 1401 includes a drive solenoid valve 1411, an air inlet sub-pipe 1412, and an air outlet sub-pipe 1413.

[0067] One end of the drive solenoid valve 1411 is connected to one end of the air intake sub-pipe 1412.

[0068] The other end of the intake sub-pipe 1412 is connected to the intake drive end of the drive mechanism 131.

[0069] The other end of the drive solenoid valve 1411 is connected to one end of the gas outlet sub-pipe 1413.

[0070] The other end of the exhaust sub-pipe 1413 is connected to the exhaust drive end of the drive mechanism 131.

[0071] An intake threaded straight-through 14121 and an intake throttle valve 14122 can be installed on the intake sub-pipe 1412. One end of the intake threaded straight-through 14121 is connected to one end of the drive solenoid valve 1411. One end of the intake throttle valve 14122 is connected to the other end of the intake threaded straight-through 14121. The other end of the intake throttle valve 14122 is connected to the intake drive end of the drive mechanism 131.

[0072] An outlet threaded straight-through 14131 and an outlet throttle valve 14132 can be installed on the outlet sub-pipe 1413. One end of the outlet threaded straight-through 14131 is connected to the other end of the drive solenoid valve 1411. One end of the outlet throttle valve 14132 is connected to the other end of the outlet threaded straight-through 14131. The other end of the outlet throttle valve 14132 is connected to the outlet drive end of the drive mechanism 131.

[0073] With this configuration, the extension and retraction of the drive mechanism 131 can be controlled by driving the solenoid valve 1411, thereby driving the contact part 132 to move in the vertical direction.

[0074] Optionally, see Figure 8 The main control circuit 142 may include a power supply 1421, an emergency stop switch 1422, a start switch 1423, a stop switch 1424, a first relay 1425, and an insulation module 1426.

[0075] The input terminal of power supply 1421 is connected to the power distribution line. Power supply 1421 obtains a first voltage from the power distribution line through the input terminal and converts the first voltage into a second voltage. The output terminal of power supply 1421 outputs the second voltage.

[0076] According to the example embodiment, the first voltage can be the AC voltage output from the power distribution line, typically AC 220V or AC 380V. The second voltage can be the DC voltage suitable for the operation of the measurement circuit 143.

[0077] The first terminal of emergency stop switch 1422 is connected to the negative terminal of the output of power supply 1421, and the second terminal of emergency stop switch 1422 is connected to the positive terminal of the output of power supply 1421. The third terminal of emergency stop switch 1422 is the positive output of the second voltage, and the fourth terminal of emergency stop switch 1422 is the negative output of the second voltage. The operator can turn on emergency stop switch 1422 by releasing it.

[0078] See Figure 2 The start switch 1423 can be installed on the human-machine interface module 15. One end of the start switch 1423 is connected to the third end of the emergency stop switch 1422. The start switch 1423 can be a normally open switch.

[0079] The stop switch 1424 can be installed on the human-machine interface module 15. One end of the stop switch 1424 is connected to the other end of the start switch 1423. The stop switch 1424 can be a normally closed switch.

[0080] The first relay 1425 includes a first coil 14251 and a first normally open switch 14252. One end of the first coil 14251 is connected to the other end of the stop switch 1424. The other end of the first coil 14251 is connected to the fourth end of the emergency stop switch 1422.

[0081] The first normally open switch 14252 can be the moving contact of the first relay 1425. The first normally open switch 14252 includes a first normally open sub-switch 14252a, a second normally open sub-switch 14252b, and a third normally open sub-switch 14252c.

[0082] One end of the first normally open sub-switch 14252a is connected to the power distribution line.

[0083] One end of the second normally open sub-switch 14252b is connected to the power distribution line.

[0084] One end of the third normally open sub-switch 14252c is connected to the third end of the emergency stop switch 1422, and the other end of the third normally open sub-switch 14252c is connected to the other end of the start switch 1423, so that the third normally open sub-switch 14252c and the start switch 1423 are connected in parallel.

[0085] One end of the insulation module 1426 is connected to the other end of the first normally open sub-switch 14252a, and the other end of the insulation module 1426 is electrically connected to the other end of the second normally open sub-switch 14252b.

[0086] For example, insulation module 1426 can be an insulation resistance meter.

[0087] The start switch 1423, stop switch 1424, first coil 14251 and third normally open sub-switch 14252c can form a self-locking circuit.

[0088] With the first voltage of the power distribution line connected, release the emergency stop switch 1422, making it conduct. Press the start switch 1423, making it conduct. Since the stop switch 1424 is a normally closed switch, the first coil 14251 is energized, and then the first normally open sub-switch 14252a, the second normally open sub-switch 14252b, and the third normally open sub-switch 14252c are closed, allowing the insulation module 1426 to obtain the first voltage of the power distribution line.

[0089] When the stop switch 1424 is pressed, the first coil 14251 is de-energized, and the first normally open sub-switch 14252a, the second normally open sub-switch 14252b and the third normally open sub-switch 14252c are opened. The insulation module 1426 stops acquiring the first voltage of the power distribution line, thereby stopping the measurement of insulation resistance.

[0090] Optionally, seeFigure 8 The main control circuit 142 may further include a residual current device (RCD) 1427. A first terminal of the RCD 1427 is connected to the power distribution line, a second terminal of the RCD 1427 is connected to one end of the input terminal of the power supply 1421, and also to one end of a first normally open sub-switch 14252a. A third terminal of the RCD 1427 is connected to the power distribution line, a fourth terminal of the RCD 1427 is connected to the other end of the input terminal of the power supply 1421, and also to one end of a second normally open sub-switch 14252b. The RCD 1427 provides leakage protection for the measuring device 100.

[0091] See Figure 8 The main control circuit 142 may include a working indicator light 1428. One end of the working indicator light 1428 is connected to the other end of the stop switch 1424. The other end of the working indicator light 1428 is connected to the fourth terminal of the emergency stop switch 1422. The working indicator light 1428 illuminates when the start button switch is pressed. The working indicator light 1428 indicates whether the main control circuit 142 of the measuring device 100 is operating normally. See also... Figure 2 The working indicator light 1428 can be set on the human-computer interaction module 15.

[0092] Optionally, see Figures 9-19 The measurement loop 143 may include a controller group 1431 and a measurement sub-loop 1432.

[0093] The controller group 1431 may include a main controller 14311, an input controller group 143121431, and an output controller group 143131431. For example, the main controller 14311 may be a central processing unit (CPU). Both the input controller group 143121431 and the output controller group 143131431 may be programmable logic controllers (PLCs). The human-machine interface module 15 may be communicatively connected to the controller group 1431.

[0094] The main controller 14311 can communicate with the input controller group 143121431, and the main controller 14311 can communicate with the output controller group 143131431. The input controller group 143121431 can communicate with the output controller group 143131431.

[0095] The input controller group 143121431 may include a first input controller 14312a and a second input controller 14312b.

[0096] The output controller group 143131431 may include a first output controller 14313a, a second output controller 14313b and a third output controller 14313c.

[0097] Input type PNP indicates that the input is high. Output type PNP indicates that the output is high.

[0098] The measurement sub-circuit 1432 may include a second relay group 14321, a reset switch 14322, and a limit switch 14323. The drive solenoid valve 1411 may include an extension drive solenoid valve 14111 and a retraction drive solenoid valve 14112. The extension drive solenoid valve 14111 may include an extension solenoid coil and an extension-to-position switch 14111b. The retraction drive solenoid valve 14112 may include a retraction solenoid coil 14112a and a retraction-to-position switch 14112b.

[0099] The power input terminal of the main controller 14311 is connected to the output terminal of the power supply 1421 to obtain a second voltage.

[0100] One end of the reset switch 14322 is connected to the positive terminal of the power supply 1421, that is, one end of the reset switch 14322 is connected to the positive terminal of the second voltage output. The other end of the reset switch 14322 is connected to a signal output terminal of the main controller 14311. The reset switch 14322 can be installed in the human-machine interface module 15.

[0101] One end of the limit switch 14323 is connected to the positive terminal of the power supply 1421, that is, one end of the limit switch 14323 is connected to the positive terminal of the second voltage output. The other end of the limit switch 14323 is connected to another signal output terminal of the main controller 14311.

[0102] See Figures 1-3 and Figure 5 Limit switch 14323 can be fixed on the mounting plate 12, and limit switch 14323 corresponds to receiving hole 121. When heater 200 is placed in receiving hole 121, heater 200 can activate limit switch 14323, causing the travel of limit switch 14323 to shorten.

[0103] One end of the extended position switch 14111b is connected to the positive terminal of the output of the power supply 1421, that is, one end of the extended position switch 14111b is connected to the positive terminal of the output of the second voltage. The other end of the extended position switch 14111b is connected to one input terminal of the first input controller 14312a.

[0104] One end of the retracted switch 14112b is connected to the positive terminal of the output of the power supply 1421, that is, one end of the retracted switch 14112b is connected to the positive terminal of the output of the second voltage. The other end of the extended switch 14111b is connected to one input terminal of the second input controller 14312b.

[0105] One end of the extended electromagnetic coil 14111a is connected to the positive terminal of the output terminal of the power supply 1421, that is, one end of the extended electromagnetic coil 14111a is connected to the positive terminal of the output terminal of the second voltage. The other end of the extended electromagnetic coil 14111a is connected to one output terminal of the first output controller 14313a.

[0106] One end of the retractable electromagnetic coil 14112a is connected to the positive terminal of the output of the power supply 1421, that is, one end of the retractable electromagnetic coil 14112a is connected to the positive terminal of the output of the second voltage. The other end of the retractable electromagnetic coil 14112a is connected to one output terminal of the second output controller 14313b.

[0107] The second relay group 14321 may include a first sub-relay 14321a. The first sub-relay 14321a may include a first sub-coil and a first sub-inductive normally open switch.

[0108] One end of the first sub-coil is connected to the negative terminal of the output of the power supply 1421, that is, one end of the first sub-coil is connected to the negative terminal of the output of the second voltage. The other end of the first sub-coil is connected to an output terminal of the third output controller 14313c.

[0109] One end of the first normally open inductive switch is connected to the positive terminal of the output of the insulation module 1426 (i.e.) Figure 18 and Figure 19 The HV+ terminal of the first sub-inductive normally open switch is connected in parallel with the test probe group 1321. The negative terminal of the output of the insulation module 1426 (i.e.,...) Figure 18 and Figure 19 The HV-) in the middle is connected to the housing of the contact portion 132 so that when the heater 200 is placed in the receiving hole 121, the negative output terminal of the insulation module 1426 can be connected to the housing of the heater 200. For example, the negative output terminal of the insulation module 1426 can be connected to the housing of the contact portion 132 through a metal measuring stud.

[0110] The power input terminal of the first input controller 14312a is connected to the output terminal of the power supply 1421 to obtain a second voltage. The power input terminal of the second input controller 14312b is also connected to the output terminal of the power supply 1421 to obtain a second voltage. The power input terminal of the first output controller 14313a is connected to the output terminal of the power supply 1421 to obtain a second voltage. The power input terminal of the second output controller 14313b is connected to the output terminal of the power supply 1421 to obtain a second voltage. The power input terminal of the third output controller 14313c is connected to the output terminal of the power supply 1421 to obtain a second voltage.

[0111] Pressing the reset switch 14322 will close the reset switch 14322. The main controller 14311, the input controller group 143121431, and the output controller group 143131431 can output signals through logic control.

[0112] After the first voltage of the power distribution line is connected, the emergency stop switch 1422 is released, the start switch 1423 is pressed, and the reset switch 14322 is pressed, the measuring device 100 can enter the measurement mode.

[0113] With the heater 200 placed in the receiving hole 121, the heater 200 presses the limit switch 14323. The main controller 14311 can receive the signal output by the limit switch 14323, thereby energizing the extending electromagnetic coil 14111a through the logic control of the first output controller 14313a. After the extending electromagnetic coil 14111a is energized, the other end of the drive mechanism 131 extends, thereby driving the contact part 132 to move downward in the vertical direction. After the other end of the drive mechanism 131 extends to a preset distance, it can be considered that the contact part 132 has descended into place, that is, it can be considered that the test probe group 1321 of the contact part 132 has made contact with the test hole of the heater 200.

[0114] When the other end of the drive mechanism 131 extends to a preset distance, i.e., when the other end of the drive mechanism 131 is fully extended, the extension-to-position switch 14111b can be closed by the logic control of the first input controller 14312a. After the extension-to-position switch 14111b is closed, the limit switch 14323 can be closed by the logic control of the main controller 14311. After the limit switch 14323 is closed, the first sub-coil can be energized by the logic control of the third output controller 14313c. After the first sub-coil is energized, the first sub-induction normally open switch is closed, thus completing the complete circuit for measuring the insulation resistance of the heater 200.

[0115] Upon completion of the measurement, the retractable electromagnetic coil 14112a can be energized via the second output controller 14313b. After the retractable electromagnetic coil 14112a is energized, the other end of the drive mechanism 131 retracts, thereby causing the contact portion 132 to move upwards in the vertical direction. Once the other end of the drive mechanism 131 has retracted to a preset distance, the contact portion 132 can be considered to have descended to its designated position, meaning that the test probe assembly 1321 of the contact portion 132 has completed contact with the test hole of the heater 200.

[0116] When the other end of the drive mechanism 131 extends to a preset distance, i.e., when the other end of the drive mechanism 131 is fully extended, the extension-to-position switch 14111b can be closed by the logic control of the first input controller 14312a. After the extension-to-position switch 14111b is closed, the limit switch 14323 can be closed by the logic control of the main controller 14311. After the limit switch 14323 is closed, the first sub-coil can be energized by the logic control of the third output controller 14313c. After the first sub-coil is energized, the first sub-induction normally open switch is closed, thus completing the complete circuit for measuring the insulation resistance of the heater 200.

[0117] The measurement circuit 143 may also include a first test switch 1433 and a second test switch 1434. See also Figure 2 The first test switch 1433 and the second test switch 1434 can be set on the human-computer interaction module 15.

[0118] One end of the first test switch 1433 is connected to the positive terminal of the output of the power supply 1421, that is, one end of the first test switch 1433 is connected to the positive terminal of the output of the second voltage. The other end of the first test switch 1433 is connected to a signal output terminal of the main controller 14311.

[0119] One end of the second test switch 1434 is connected to the positive terminal of the output of the power supply 1421, that is, one end of the second test switch 1434 is connected to the positive terminal of the output of the second voltage. The other end of the second test switch 1434 is connected to a signal output terminal of the main controller 14311.

[0120] When the first test switch 1433 is pressed, it closes, allowing the main controller 14311 to initiate the measurement, causing the insulation module 1426 to output a high voltage for testing the insulation resistance. When the first test switch 1433 is released, it opens, and the measuring device 100 enters the test-ready mode.

[0121] When the second test switch 1434 is pressed, it closes, allowing the main controller 14311 to initiate the measurement, causing the insulation module 1426 to output a high voltage for testing the insulation resistance. When the second test switch 1434 is released, it opens, and the measuring device 100 enters the test-ready mode.

[0122] The first test switch 1433 can control the first group of heaters 200 (e.g., Figure 6 The measurement of the six heaters (200) on the left side of the middle.

[0123] The second test switch 1434 can control the second group of heaters 200 (e.g., Figure 6 The measurement of the six heaters (200) on the right side of the image.

[0124] For example, heater 200 (such as heater 200) has three resistance wires inside, and three sets of test probes 1321 are connected to the three resistance wires respectively.

[0125] Optionally, the output controller group 143131 may further include a fourth output controller 14313d and a fifth output controller. The second relay group 14321 may further include a second sub-relay 14321b and a third sub-relay 14321c.

[0126] The second sub-relay 14321b may include a second sub-coil 14321a1 and a second sub-inductive normally open switch 14321b2 or 14321a2.

[0127] One end of the second sub-coil 14321a1 is connected to the negative terminal of the output terminal of the power supply 1421, that is, one end of the second sub-coil 14321a1 is connected to the negative terminal of the output terminal of the second voltage. The other end of the second sub-coil 14321a1 is connected to one output terminal of the fourth output controller 14313d.

[0128] One end of the second sub-inductive normally open switch 14321b214321a2 is connected to the positive output terminal of the insulation module 1426, and the other end of the second sub-inductive normally open switch 14321b214321a2 is connected in parallel to another set of test probes 1321. The negative output terminal of the insulation module 1426 is connected to the housing of the contact portion 132, so that when the heater 200 is placed in the receiving hole 121, the negative output terminal of the insulation module 1426 can be connected to the housing of the heater 200.

[0129] The third sub-relay 14321c may include a third sub-coil 14321c1 and a third sub-inductive normally open switch 14321c2.

[0130] One end of the third sub-coil 14321c1 is connected to the negative terminal of the output of the power supply 1421, that is, one end of the third sub-coil 14321c1 is connected to the negative terminal of the output of the second voltage. The other end of the third sub-coil 14321c1 is connected to one output terminal of the fifth output controller.

[0131] One end of the third sub-inductive normally open switch 14321c2 is connected to the positive output terminal of the insulation module 1426, and the other end of the third sub-inductive normally open switch 14321c2 is connected in parallel to another set of test probes 1321. The negative output terminal of the insulation module 1426 is connected to the housing of the contact portion 132, so that when the heater 200 is placed in the receiving hole 121, the negative output terminal of the insulation module 1426 can be connected to the housing of the heater 200.

[0132] The power input terminal of the fourth output controller 14313d is connected to the output terminal of the power supply 1421 to obtain the second voltage. The power input terminal of the fifth output controller is connected to the output terminal of the power supply 1421 to obtain the second voltage.

[0133] For example, the first normally open sub-switch 14252a can be connected in parallel with the first group of test probes 1321. The second normally open sub-switch 14252b can be connected in parallel with the second group of test probes 1321. The third normally open sub-switch 14252c can be connected in parallel with the third group of test probes 1321.

[0134] The insulation resistance between different internal resistance wires of heater 200 and the outer shell of heater 200 can be switched through the logic control of main controller 14311, third output controller 14313c, fourth output controller 14313d and fifth output controller.

[0135] Optionally, see Figure 17 The output controller group 143131 may further include a sixth output controller 14313f. The measurement sub-loop 1432 may further include a test result indicator light 14324. The test result indicator light 14324 may be located on one side of the top plate of the frame 11, and may correspond to the receiving hole 121. The power input terminal of the sixth output controller 14313f is connected to the output terminal of the power supply 1421 to obtain a second voltage.

[0136] See Figure 17 One end of the test result indicator light 14324 is connected to the negative terminal of the output terminal of the power supply 1421, that is, one end of the test result indicator light 14324 is connected to the negative terminal of the output terminal of the second voltage. The other end of the test result indicator light 14324 is connected to a signal output terminal of the sixth output controller 14313f.

[0137] The measurement result can be controlled via the logic of the sixth output controller 14313f, and an indicator light can be used to indicate whether the measurement result is qualified. For example, if the insulation resistance measurement result is qualified, the indicator light will be green. If the insulation resistance measurement result is unqualified, the indicator light will be red. This setting makes the display of measurement results more convenient.

[0138] For example, if the measuring device 100 may include 12 drive units 13, then the drive control circuit 141 may accordingly include 12 sets of drive control sub-circuits 1401. The 12 sets of drive control sub-circuits 1401 are connected in parallel.

[0139] The measurement circuit 143 includes 12 sets of measurement sub-circuits 1432. Each of the 12 sets of measurement sub-circuits 1432 corresponds one-to-one with one of the 12 drive units 13, so that each of the 12 sets of measurement sub-circuits 1432 can measure one of the 12 heaters 200. The 12 sets of measurement sub-circuits 1432 are connected in parallel. The components in each of the 12 sets of measurement sub-circuits 1432 are also arranged in parallel.

[0140] With this setup, the measuring device 100 can automatically measure multiple heaters 200 in batches, and the tests between different heaters 200 are independent.

[0141] The test procedure for measuring insulation resistance is as follows:

[0142] 1. Connect the power and air supply to the measuring device 100.

[0143] 2. Release the emergency stop switch 1422, press the start switch 1423 and the reset switch 14322, and the measuring device 100 can enter the measurement mode.

[0144] 3. Place the heater 200 in the first set of receiving holes 121 (e.g., Figure 6 The six receiving holes 121 on the left side of the heater 200 trigger the limit switch 14323 at the corresponding position of the receiving hole 121. At the same time, the drive mechanism 131 at the corresponding position of the receiving hole 121 automatically controls the contact part 132 to move downward. After the contact part 132 moves to a preset distance, the measuring probe group of the contact part 132 makes contact with the heater 200.

[0145] 4. After pressing the first test switch 1433, perform the test. Figure 6 The six heaters 200 are on the left side of the middle.

[0146] 5. Place the heater 200 in the second set of receiving holes 121 (e.g., Figure 6The six receiving holes 121 on the right side of the heater 200 trigger the limit switch 14323 at the corresponding position of the receiving hole 121. At the same time, the drive mechanism 131 at the corresponding position of the receiving hole 121 automatically controls the contact part 132 to move downward. After the contact part 132 moves to a preset distance, the measuring probe group of the contact part 132 makes contact with the heater 200.

[0147] 6. After pressing the second test switch 1434, perform the test. Figure 6 The six heaters on the right side of the middle are 200.

[0148] 7. The measurement result indicator lights above the six drive mechanisms 131 on the left side show whether the measurement is qualified.

[0149] 8. Release the first test switch 1433, and the measuring device 100 can enter the measurement mode.

[0150] 9. The measurement result indicator lights above the six drive mechanisms 131 on the right side show whether the measurement is qualified.

[0151] 10. Release the second test switch 1434, and the measuring device 100 can enter the measurement mode.

[0152] 11. Remove heater 200 according to measurement requirements.

[0153] The measurement results of insulation resistance can be saved to the touch screen of the human-machine interaction module 15, and the measurement results can be saved and traced.

[0154] Through the above embodiments, this application can establish a standardized measurement process by automatically measuring heaters 200 in batches, thereby improving the accuracy of measurement results and reducing errors caused by individual differences in manual measurement. At the same time, this application can improve measurement efficiency.

[0155] According to one aspect of this application, a semiconductor manufacturing system is provided. The semiconductor manufacturing system includes the measuring device 100 described above.

[0156] Finally, it should be noted that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A device for measuring the insulation resistance of a heater, characterized in that, The measuring device includes: The frame includes a first support portion and a second support portion disposed opposite to each other, and a receiving cavity is formed between the first support portion and the second support portion; A fixing plate is horizontally arranged, one end of which is fixedly connected to the first support part, and the other end of which is fixedly connected to the second support part. The fixing plate is provided with a receiving hole for placing a heater. A driving unit, housed within the receiving cavity and correspondingly disposed to the receiving hole, includes: The drive mechanism is fixedly connected at one end to the lower surface of the top plate of the frame; The contact portion has one end slidably connected to the other end of the drive mechanism, and the other end of the contact portion is provided with at least one set of test probes; The measuring unit includes: A drive control loop, one end of which is connected to the drive mechanism, and the other end of the drive control loop is connected to the other end of the drive mechanism; The main control circuit has its input end connected to the power distribution line, one end of the output end of the main control circuit is connected to one end of the drive control circuit, and the other end of the output end of the main control circuit is connected to the other end of the drive control circuit. The measurement circuit has one end connected in parallel with the at least one test probe group, and one end of the measurement circuit is connected to one end of the output terminal of the main control circuit. The other end of the measurement circuit is connected to the housing of the contact portion, and the other end of the measurement circuit is connected to the other end of the output terminal of the main control circuit.

2. The measuring device according to claim 1, characterized in that, The fixing plate is provided with at least two receiving holes at intervals; The measuring device includes at least two driving units, each of which corresponds to one of the receiving holes.

3. The measuring device according to claim 1, characterized in that, The driving mechanism is a cylinder.

4. The measuring device according to claim 1, characterized in that, When the heater is placed in the receiving hole, the heater is fixedly connected to the fixing plate by a pin structure.

5. The measuring device according to claim 1, characterized in that, The drive control loop includes: At least one set of drive control sub-loops, each set of drive control sub-loops corresponding one-to-one with each drive mechanism; The drive control sub-circuit includes a drive solenoid valve, an intake sub-pipeline, and an exhaust sub-pipeline; One end of the drive solenoid valve is connected to one end of the air intake sub-pipe; The other end of the intake sub-pipe is connected to the intake drive end of the drive mechanism; The other end of the drive solenoid valve is connected to one end of the outlet sub-pipeline; The other end of the exhaust sub-pipe is connected to the exhaust drive end of the drive mechanism.

6. The measuring device according to claim 5, characterized in that, The main control loop includes: The power supply has its input terminal connected to the power distribution line. The power supply obtains a first voltage from the power distribution line through its input terminal and converts the first voltage into a second voltage. The output terminal of the power supply outputs the second voltage. An emergency stop switch has its first terminal connected to the negative terminal of the power supply's output, its second terminal connected to the positive terminal of the power supply's output, its third terminal being the positive output terminal of the second voltage, and its fourth terminal being the negative output terminal of the second voltage. Start the switch, with one end connected to the third end of the emergency stop switch; A stop switch, one end of which is connected to the other end of the start switch; The first relay includes: The first coil has one end connected to the other end of the stop switch, and the other end of the first coil is connected to the fourth end of the emergency stop switch. The first normally open switch includes: The first normally open sub-switch is connected at one end to the power distribution line; The second normally open sub-switch is connected at one end to the power distribution line; The third normally open sub-switch has one end connected to the third end of the emergency stop switch, and the other end of the third normally open sub-switch is connected to the other end of the start switch, so that the third normally open sub-switch and the start switch are connected in parallel. An insulating module is connected at one end to the other end of the first normally open sub-switch, and the other end of the insulating module is electrically connected to the other end of the second normally open sub-switch.

7. The measuring device according to claim 6, characterized in that, The measurement loop includes a controller group and a measurement sub-loop; The controller group includes a main controller, an input controller group, and an output controller group; The main controller is communicatively connected to the input controller group, the main controller is communicatively connected to the output controller group, and the input controller group is communicatively connected to the output controller group; The input controller group includes a first input controller and a second input controller; The output controller group includes a first output controller, a second output controller, and a third output controller; The measurement sub-circuit includes a second relay group, a reset switch, and a limit switch; The drive solenoid valve includes an extension drive solenoid valve and a retraction drive solenoid valve. The extension drive solenoid valve includes an extension solenoid coil and an extension position switch; The retraction drive solenoid valve includes a retraction solenoid coil and a retraction switch. The power input terminal of the main controller is connected to the output terminal of the power supply to obtain a second voltage; One end of the reset switch is connected to the positive terminal of the power supply output, and the other end of the reset switch is connected to a signal output terminal of the main controller. One end of the limit switch is connected to the positive terminal of the power supply output, and the other end of the limit switch is connected to another signal output terminal of the main controller; The limit switch is fixed to the mounting plate, and the limit switch corresponds to the receiving hole; One end of the extended position switch is connected to the positive terminal of the power supply output, and the other end of the extended position switch is connected to an input terminal of the first input controller; One end of the retractable switch is connected to the positive terminal of the power supply output, and the other end of the extended switch is connected to one input terminal of the second input controller. One end of the extended electromagnetic coil is connected to the positive terminal of the power supply output, and the other end of the extended electromagnetic coil is connected to an output terminal of the first output controller. One end of the retractable electromagnetic coil is connected to the positive terminal of the power supply output, and the other end of the retractable electromagnetic coil is connected to one output terminal of the second output controller. The second relay group includes a first sub-relay; The first sub-relay includes a first sub-coil and a first sub-inductive normally open switch; One end of the first sub-coil is connected to the negative terminal of the power supply output, and the other end of the first sub-coil is connected to one output terminal of the third output controller; One end of the first sub-inductive normally open switch is connected to the positive output terminal of the insulation module, and the other end of the first sub-inductive normally open switch is connected in parallel to the test probe group.

8. The measuring device according to claim 6, characterized in that, The main control loop also includes: The residual current device (RCD) has a first terminal connected to the power distribution line, a second terminal connected to one end of the power input terminal, and a third terminal connected to the power distribution line, a fourth terminal connected to the other end of the power input terminal, and a fifth terminal connected to one end of the second normally open sub-switch.

9. A semiconductor manufacturing system, characterized in that, The semiconductor manufacturing system includes the measuring device as described in any one of claims 1-8.

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