Multi-stage filtering device for photoresist production

Abstract

The utility model discloses a multi-stage filtering device for photosensitive resist production, which comprises a filter cartridge seat, a cover plate hermetically covers the filter cartridge seat, a feed port is arranged at the center of the cover plate, an annular gear is mounted on the periphery of the filter cartridge seat, and one side of the annular gear is meshed with a gear driven and connected by a motor. A plurality of filter screens wound into a ring shape are upwards arranged on the inner diameter of the filter cartridge seat, the filter hole diameter of the filter screen on the opposite outer side is smaller, the bottom of the filter cartridge seat sinks downwards to form a conical discharging base, a ventilation seat is arranged on one side of the feeding port, and the ventilation seat pumps pressurized gas into the filter cartridge seat through an outer side pressurizing pipe. According to the multi-stage filtering device for producing the photosensitive resist, centrifugal force is formed through rotation of the filtering cylinder seat to drive the photosensitive resist in the filtering cylinder seat to flow in an accelerated manner towards the direction of the filtering net, and meanwhile, flowing of the photosensitive resist filtered in each stage is further accelerated in a manner of introducing external gas for pressurization, so that the filtering efficiency of the filtering device is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of photoresist filtration equipment, specifically a multi-stage filtration device for photosensitive adhesive production. Background Technology

[0002] Photoresist filtering devices are typically used to filter photoresist after its use and during recycling, removing impurities that adhere to the photoresist during its application to enable reuse. However, due to the inherent properties of photoresist, its flow efficiency under natural conditions is poor, resulting in limited filtration efficiency.

[0003] This case arose in order to resolve the aforementioned issues. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the shortcomings of existing technologies, this invention provides a multi-stage filtration device for photosensitive adhesive production, which solves the problems mentioned in the background section.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model is implemented through the following technical solution: a multi-stage filtration device for photosensitive adhesive production, including a filter cylinder seat, a cover plate sealed on the filter cylinder seat, an inlet located at the center of the cover plate, a ring gear installed on the outer periphery of the filter cylinder seat, one side of which meshes with a gear connected by a motor drive, multiple ring-shaped filter screens are arranged radially inside the filter cylinder seat, the filter screens on the outer side having smaller filtration apertures, a cone-shaped discharge base recessed at the bottom of the filter cylinder seat, and a vent seat located on one side of the inlet. The vent seat pumps pressurized gas into the filter cylinder seat through an outer pressurization pipe, wherein the output end of the pressurization pipe is not connected to the inlet end of the vent seat, but only contacts it through a butt joint contact method.

[0008] Preferably, the filter screen includes a first filter screen and a second filter screen, with a downwardly recessed conical discharge seat disposed between the first filter screen and the second filter screen, and the discharge seat is completely wrapped by the outer discharge base while being separated from the discharge base.

[0009] Preferably, a downward-through return channel is provided between the first filter screen and the second filter screen, and a discharge channel is provided between the second filter screen and the outer wall of the filter cylinder seat.

[0010] Preferably, the cover plate is provided with a plurality of first exhaust grooves at radial intervals, wherein the first exhaust grooves are respectively located inside the first filter screen, inside the first filter screen and the second filter screen, and inside the second filter screen and the filter cylinder seat.

[0011] Preferably, the vent seat has a second vent groove that corresponds to the first vent groove in the longitudinal direction, and an air hole is provided in the axial direction. The air hole passes through each second vent groove, and when the air hole is in its original position, it is connected to the pressurization pipe.

[0012] (III) Beneficial Effects

[0013] After adopting the above technical solution, this utility model has the following advantages compared with the prior art: This utility model provides a multi-stage filtration device for the production of photosensitive adhesive. The centrifugal force generated by the rotation of the filter cylinder seat drives the photosensitive adhesive inside to flow towards the filter screen at an accelerated speed. At the same time, the external gas is introduced to pressurize and further accelerate the flow of photosensitive adhesive in each stage of filtration, so as to improve its filtration efficiency. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the present invention;

[0015] Figure 2 This is a schematic diagram of the interior of the filter cartridge holder in this utility model;

[0016] Figure 3 This is a schematic cross-sectional view of the filter cartridge seat of this utility model;

[0017] Figure 4 This is a top view of the cover plate of this utility model.

[0018] In the diagram: 1. Filter cartridge base; 2. Feed inlet; 3. Discharge base; 4. Ventilation seat; 5. Ring gear; 6. Motor; 7. Gear; 8. Booster pump; 9. Pressurization pipe; 10. Cover plate; 11. Air inlet slot; 12. Limiting seat; 13. First exhaust slot; 14. Second exhaust slot; 15. Air hole; 16. First filter screen; 17. Second filter screen; 18. Baffle; 19. Discharge base; 20. Return channel; 21. Discharge channel. Detailed Implementation

[0019] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0020] like Figure 1-2 As shown: A multi-stage filtration device for photosensitive adhesive production includes a filter cartridge base 1, a cover plate 10 sealed on the filter cartridge base 1, a feed inlet 2 at the center of the cover plate 10, and a cone-shaped discharge base 3 recessed at the bottom of the filter cartridge base 1. A ring gear 57 is installed on the outer periphery of the filter cartridge base 1, and a gear 7 driven by a motor 6 meshes on one side of the ring gear 57, enabling the filter cartridge base 1 to rotate.

[0021] See appendix Figure 2As shown, to achieve multi-stage filtration, the filter cartridge 1 has multiple ring-shaped filter screens arranged from the inside to the outside. This embodiment only shows two, namely the first filter screen 16 and the second filter screen 17, with the outer filter screen having a smaller pore size. The continuously rotating filter cartridge 1 generates centrifugal force inside, which drives the colloid inside to continuously swirl towards the outer ring filter screen for filtration.

[0022] As attached Figure 3 As shown, a downward-sloping conical discharge seat 19 can be provided between the first filter screen 16 and the second filter screen 17, and it is completely wrapped by and separated from the outer discharge base 3. A downward-through return channel 20 is opened between the first filter screen 16 and the second filter screen 17, and the unfiltered impurities are discharged from the lower discharge seat 19 through the return channel 20. A discharge channel 21 is opened between the second filter screen 17 and the outer wall of the filter cylinder seat 1. The photosensitive emulsion filtered by the second filter screen 17 flows out and is collected from the lower discharge seat 19 through the discharge base 3.

[0023] To better secure the first filter screen 16 and the second filter screen 17, annular limiting seats 12 are respectively provided on the bottom inner walls of the cover plate 10 and the filter cartridge seat 1 for filter screen insertion. Since the filter screen is annular, its contact area is too large and it is prone to deformation under stress; therefore, vertically upward-pointing blocks 18 are provided on the outer circumference of the slot for support. The filter screen uses a conventional structure without modification. When using high-precision nanofiltration membranes, metal mesh supports can be provided on its inner and outer sides.

[0024] A vent seat 4 is provided on one side of the feed inlet 2. The vent seat 4 is pumped with pressurized gas (output by the booster pump 8, which can be pressurized with inert gas) through the outer pressurization pipe 9 into the filter cartridge seat 1. Since the filter cartridge seat 1 needs to rotate rapidly during use, the output end of the pressurization pipe 9 is not connected to the air inlet end of the vent seat 4. It is only connected by a butt joint. After the filter cartridge seat 1 is paused and reset (initial position), it is connected for pumping and pressurization.

[0025] Further details are attached. Figure 4 As shown, a plurality of first exhaust grooves 13 are radially spaced on the cover plate 10. The first exhaust grooves 13 are respectively located inside the first filter screen 16, inside the first filter screen 16 and the second filter screen 17, and inside the second filter screen 17 and the filter cylinder seat 1, thereby achieving sufficient pressurization. The vent seat 4 has a second exhaust groove 14 that corresponds to the first exhaust grooves 13 longitudinally, and an air hole 15 is axially provided. The air hole 15 passes through each second exhaust groove 14, and when the air hole 15 is in its original position, it is connected to the pressurization pipe 9.

[0026] The above-described embodiments are provided for illustrative purposes. Based on the above description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this utility model is not limited to the contents of the specification; its protection scope must be determined according to the claims.

Claims

1. A multi-stage filtration device for photosensitive adhesive production, comprising a filter cartridge base, wherein a cover plate is sealed and closed on the filter cartridge base, and a feed inlet is provided at the center of the cover plate, characterized in that: A ring gear is installed on the outer periphery of the filter cylinder seat, and a gear connected by a motor is meshed on one side of the ring gear. Multiple ring-shaped filter screens are arranged radially inside the filter cylinder seat, with smaller pore sizes on the outer side of the filter screens. A cone-shaped discharge base is recessed at the bottom of the filter cylinder seat. A vent seat is provided on one side of the inlet. Pressurized gas is pumped into the filter cylinder seat through an outer pressurized pipe. The output end of the pressurized pipe is not connected to the inlet end of the vent seat, but only makes contact through a butt joint.

2. The multi-stage filtering device for producing photosensitive adhesive according to claim 1, characterized in that: The filter screen includes a first filter screen and a second filter screen. A downwardly recessed conical discharge seat is provided between the first filter screen and the second filter screen, and the entire discharge seat is wrapped by the outer discharge base while being separated from the discharge base.

3. The multi-stage filtering device for producing photosensitive adhesive according to claim 2, characterized in that: A downward-through return channel is provided between the first filter screen and the second filter screen, and a discharge channel is provided between the second filter screen and the outer wall of the filter cylinder seat.

4. The multi-stage filtering device for producing photosensitive adhesive according to claim 2, characterized in that: The cover plate is provided with a plurality of first exhaust grooves at radial intervals, wherein the first exhaust grooves are respectively located inside the first filter screen, inside the first filter screen and the second filter screen, and inside the second filter screen and the filter cylinder seat.

5. The multi-stage filtering device for producing photosensitive adhesive according to claim 4, characterized in that: The vent seat has a second exhaust groove that corresponds to the first exhaust groove in the longitudinal direction, and an air hole is provided in the axial direction. The air hole passes through each second exhaust groove, and when the air hole is in its original position, it is connected to the pressurization pipe.

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