Hollow membrane filament degassing device for photoresist

Abstract

The utility model discloses a hollow membrane filament degasser for photoresist, which comprises a shell provided with an accommodating cavity, a liquid inlet, a liquid outlet and an extraction opening; a hollow membrane tow; the connecting assembly is used for communicating the hollow membrane tows with the pipeline; the connecting component comprises a connecting piece which is positioned in the accommodating cavity and is connected with the end part of the hollow membrane filament bundle; the adapter penetrates through the liquid inlet and the liquid outlet in a sealed mode, the adapter and the connecting piece are arranged in a split mode, the adapter comprises a first connector located in the containing cavity and a second connector extending out of the shell, and the first connector is detachably connected with the connecting piece in a sealed mode; a flow guide gap is formed between the supporting part and the slope. A leak detection part is arranged on the bottom end face of the shell. According to the utility model, the leaked photoresist at the joint of the adapter and the connecting piece enters the accommodating cavity and is detected by the leakage detection part, so that the leakage can be conveniently detected in time.

Description

Technical Field

[0001] This utility model relates to the field of hollow membrane fiber technology for gas-liquid separation, and in particular to a hollow membrane fiber degassing device for photoresist. Background Technology

[0002] In the production processes of fine patterning for display panels, integrated circuits, and discrete semiconductor devices, the photoresist used needs to be exposed to light of a specific wavelength for a specific time, allowing it to undergo photochemical reactions that cause different chemical structural changes in various substances. When photoresist is coated onto a circuit board, if residual air bubbles are present within the photoresist, it can lead to decreased coating accuracy, quality defects on the circuit board, or photoresist development defects. To prevent this, a hollow fiber degassing assembly for gas-liquid separation is installed before the process.

[0003] Existing patents CN217068408U and CN217068407U both disclose the aforementioned hollow membrane filament degassing device for photoresist gas-liquid separation. The connectors at both ends of the hollow membrane filament bundle are connected to the external pipeline via adapters. To ensure the diversity of adapters, improve the adaptability of connectors, and facilitate installation and disassembly, the adapters and connectors are detachably and sealed.

[0004] However, photoresist leakage often occurs at the disassembly and connection points of adapters and connectors. This is because during the screwing process of adapters and connectors, especially during repeated disassembly and assembly, the wall thickness of the corresponding part of the tapered thread hole inside the connector will deform, which can easily lead to the failure of the sealing connection between the adapter and connector. At the same time, there will be a certain pressure when photoresist is introduced into the flow channel of the connector. The long-term pressure will cause the wall thickness of the corresponding part of the tapered thread hole inside the connector to deviate from the axis and expand outward, which will increase the risk of sealing connection failure between the adapter and connector, causing photoresist liquid leakage at the connection point between the adapter and connector. The improvement direction of existing technology often focuses on how to enhance the sealing reliability between adapters and connectors.

[0005] Because hollow fiber degassing devices are typically installed in a closed machine, the connection points between the adapters and connectors are contained within the machine's internal cavity. Although staff periodically open the machine for inspection, the long intervals between inspections mean that photoresist leaks at these connection points are not visible to the naked eye during normal use. This means that photoresist leaking onto the end cap of the degassing device housing cannot be detected in time, resulting in significant photoresist waste. Furthermore, prolonged leakage can cause photoresist to flow back into the connector's flow channel at the point of seal failure, contaminating the flow channel and subsequently contaminating newly introduced photoresist. This can even affect the operation of other internal components, significantly impacting the entire flow path system. Utility Model Content

[0006] In order to overcome the shortcomings of the prior art, this utility model provides a hollow film filament degassing device for photoresist, which sets the detachable sealed connection of the adapter and connector that are prone to leakage inside the housing, and the leaked photoresist can be detected in time through the leak detection part.

[0007] The technical solution adopted by this utility model to solve its technical problem is: a hollow film filament degassing device for photoresist, comprising:

[0008] The housing has a receiving cavity, and is provided with a liquid inlet, a liquid outlet and an air extraction port;

[0009] Hollow membrane fiber bundles are disposed within the receiving cavity;

[0010] A connecting assembly for connecting the hollow membrane fiber bundle and the tubing; the connecting assembly includes:

[0011] A connector is located within the receiving cavity and is connected to the end of the hollow membrane fiber bundle;

[0012] The adapter is sealed through the inlet and outlet and is separately disposed from the connector. The adapter includes a first connector located in the receiving cavity and a second connector extending out of the housing for connection with the pipeline. The first connector is detachably and sealedly connected to the connector.

[0013] The inner surface of the bottom end of the housing has a slope that is inclined relative to the horizontal plane. The hollow membrane fiber bundle is coiled and includes a coiled part and a support part that abuts against the slope. The coiled part protrudes radially from the connection point between the first connector and the connector. A flow guiding gap is formed between the support part and the slope. The bottom end face of the housing is provided with a leak detection part that communicates with the flow guiding gap. The leak detection part is connected to the lowest position of the slope.

[0014] The degassing device provided by this utility model, through the combined effect of placing the detachable sealed connection of the easily leaking adapter and connector inside the housing, the radial protrusion of the spiral part at the connection between the first connector and the connector, the guide gap formed by the support part and the slope, and the leak detection part, ensures that even if a leak occurs at the connection between the first connector and the connector, the leaked photoresist remains within the housing cavity and will not flow into the machine tool and damage internal components. Furthermore, while maintaining the high cleanliness of the first connector and the connector, the leaked photoresist will not be contaminated by the outside of the housing or the inside of the machine tool. Even if a leak occurs at the connection point... The leaked photoresist flows back into the connector's channel without causing contamination from newly introduced photoresist. Furthermore, the design of the hollow film wire bundle's spiral section protruding radially from the connection point between the first connector and the connector not only increases the overall length of the hollow film wire bundle, lengthening the flow path of the photoresist within the wires and improving degassing, but also allows most of the photoresist leaking from the connection point to be caught by the hollow film wire bundle and flow along the spiral section to the bottom of the housing. Since the outermost ring of the spiral section is located radially inward at the connection point, the photoresist leaks directly into the housing. The hollow membrane fiber bundle, by supporting the photoresist, can more concentratedly guide the photoresist to the bottom of the housing. When leaked photoresist flows to the bottom of the housing, due to the inclined slope relative to the horizontal plane, the support part abuts against the slope, preventing the hollow membrane fiber bundle from shaking due to the liquid flow inside, thus increasing the stability of the hollow membrane fiber bundle installation. Furthermore, a flow guiding gap is formed between the support part and the slope, and the leak detection part communicates with the flow guiding gap and connects to the lowest point of the slope. That is, the leak detection part is located at the very bottom of the slope, reducing the contact area between the hollow membrane fiber bundle and the inner surface of the bottom end of the housing. The photoresist carried on the hollow membrane fiber bundle can quickly and smoothly enter the flow guiding gap for final absorption. The system quickly guides the leaking photoresist to the leak detection section, preventing excessive contact area between the hollow fiber bundle and the bottom of the housing, which could hinder the flow of the photoresist or even cause leaking photoresist to flow to the leak detection section in time due to its high viscosity and slow speed due to obstruction by the support. It also prevents the photoresist from drying out and clogging the outer surface of the fiber bundle over time, thus reducing the degassing effect of the hollow fiber bundle. This helps to quickly guide the leaking photoresist from the guide gap to the leak detection section and reduces the chance of the hollow fiber bundle blocking the leak detection section due to installation deviation. This allows the operator to detect and quickly handle photoresist leaks without opening the machine, ensuring the normal operation of the entire degassing device.

[0015] Furthermore, the slope is annular and its height gradually decreases from the outside to the inside. The hollow membrane filament bundle is spirally coiled to form a hollow part that communicates with the flow guiding gap. The leak detection part is located within the area covered by the hollow part.

[0016] This design results in the inner surface of the bottom of the housing having an overall conical shape, wider at the top and narrower at the bottom. The leak detection section is located at the very bottom of this cone. Regardless of where the photoresist leaks within the cavity, it can quickly flow towards the leak detection section through the slope, preventing localized accumulation and ensuring proper drainage. The gradually decreasing height of the slope from the outside to the inside also increases the axial height of the cavity, further increasing the length of the hollow membrane bundle and ultimately improving its degassing effect. The leak detection section's location within the hollow section's coverage area ensures that it will not be obstructed after the hollow membrane bundle is installed. Leaked photoresist flows towards the hollow section through the guide gaps and is then discharged more concentratedly through the leak detection section, facilitating rapid detection of photoresist leaks.

[0017] Furthermore, the support portion is arranged at an angle relative to the horizontal plane, and the support portion abuts against the slope portion.

[0018] With this configuration, compared to the support having a ring structure and horizontally abutting against the slope, the contact area between the support and the slope is greatly reduced, avoiding obstruction of the photoresist flow and preventing the photoresist on the outer periphery of the support from being blocked outside the flow guide gap, thus facilitating the smooth flow and discharge of the photoresist to the leak detection section.

[0019] Furthermore, the adapter includes a mounting portion located between the first connector and the second connector. The mounting portion is located below the top wall of the housing. A sealing element is provided between the mounting portion and the top wall of the housing. A locking element that presses against the top wall of the housing is connected to the outer periphery of the second connector. The locking element and the mounting portion clamp the sealing element in opposite directions, so that the sealing element seals the liquid inlet and the liquid outlet.

[0020] This design provides positioning guidance for the installation of the housing and adapter. Furthermore, the mounting part and the locking part can form compression on the inner and outer surfaces of the housing top wall. Based on the locking part's fixed connection between the adapter and the housing, the locking part and the mounting part work together to achieve a sealed assembly of the adapter and the housing. The structural design is reasonable, and the sealed assembly of the housing and the adapter can be achieved with fewer parts, simplifying the assembly process.

[0021] Furthermore, the inner wall of the connector is formed with an internal tapered thread, and the outer wall of the first connector has an external tapered thread. The first connector extends into the connector for threaded connection. The connecting assembly also includes a limiting member sleeved on the outer periphery of the connector. The limiting member and the first connector at least partially overlap in the axial direction.

[0022] With this configuration, the limiting component and the first connector cooperate with each other to clamp and support the flow channel wall thickness of the connector, so that the wall thickness of the connector will not deform inward or outward from the axis, thereby ensuring the liquid seal between the connector and the adapter.

[0023] Furthermore, the adapter includes a mounting portion located between the first connector and the second connector. The mounting portion is located below the top wall of the housing and abuts against the top wall of the housing. The adapter is welded to the housing to seal the inlet and outlet. This structure eliminates the locking component, reduces the number of installation parts, facilitates installation, and provides excellent sealing performance.

[0024] Furthermore, the outer wall of the first connector is provided with external threads, the connector extends into the first connector, and a nut for sealing the first connector and the connector is connected to the external threads.

[0025] This design provides more mounting and sealing structures for adapters and connectors, adapting to different installation scenarios and offering greater application flexibility.

[0026] Furthermore, the inner wall of the first connector has a stepped portion, and the connector has a tube portion that abuts against the end face of the stepped portion. A retaining sleeve that abuts against the first connector is fitted around the outer periphery of the tube portion. The nut and the first connector clamp the retaining sleeve so that the retaining sleeve and the first connector abut and seal, and the retaining sleeve and the tube portion abut and seal.

[0027] With this design, the entire connection structure is simple, the sealing effect is excellent, and there is virtually no photoresist accumulation on the uneven surfaces of the flow channel, reducing dead zones and maximizing the utilization of photoresist.

[0028] Furthermore, the leak detection unit includes a leak detection connector integrally formed with the housing, the leak detection connector being used to seal the connection of the pipeline for installing the detection sensor.

[0029] With this setup, the photoresist leaking from the connection between the adapter and connector inside the cavity flows through the leak detection connector and pipeline to the detection sensor. The detection sensor then transmits a signal indicating whether a photoresist leak has been detected. The entire detection process is simple, the flow path of the photoresist is short, and it is convenient for staff to detect photoresist leaks as quickly as possible.

[0030] Furthermore, the housing includes a cylindrical body and a cover that seals over the top of the cylindrical body. The liquid inlet, liquid outlet, and air extraction port are located on the top surface of the cover, and the leak detection part is located on the bottom surface of the cylindrical body. Alternatively, the connector is made of fluororesin material, and the adapter is made of metal material. The housing is formed by the sealed connection of the cylindrical body and the cover, which facilitates the installation and disassembly of the connecting components. The leak detection part is located on the bottom surface of the cylindrical body, so that the photoresist in the accommodating cavity flows to the leak detection part as quickly and centrally as possible, which facilitates rapid detection. Alternatively, the connector is made of fluororesin material, and the adapter is made of metal material. The selection of materials for the connector and the adapter facilitates their sealed connection with the hollow membrane bundle and the housing, and extends the overall service life.

[0031] The beneficial effects of this utility model are as follows: By placing the detachable sealed connection of the easily leaking adapter and connector inside the housing, the radial protrusion of the spiral part at the connection between the first connector and the connector, the guiding gap formed by the support part and the slope, and the combined effect of the leak detection part, even if a leak occurs at the connection between the first connector and the connector, the leaked photoresist remains within the housing cavity and will not flow into the machine tool and damage internal components. Furthermore, while ensuring the high cleanliness of the first connector and the connector, the leaked photoresist will not be contaminated by the outside of the housing or the inside of the machine tool. Even if a leak occurs at the connection point... The photoresist flows back into the connector's channel without causing contamination from newly introduced photoresist. Furthermore, because the spiral section of the hollow film bundle is designed to protrude radially from the connection point between the first connector and the connector, this not only increases the overall length of the hollow film bundle, lengthening the flow path of the photoresist within the bundle and improving degassing, but also allows most of the photoresist leaking from the connection point to be caught by the hollow film bundle and flow along the spiral section to the bottom of the housing. In contrast, the outermost ring of the spiral section is located radially inward at the connection point, preventing direct photoresist leakage into the housing. The hollow membrane fiber bundle, used to receive photoresist, allows for more concentrated flow of the photoresist to the bottom of the housing. When leaked photoresist flows to the bottom of the housing, the sloped surface relative to the horizontal plane, with the support abutting against it, prevents the hollow membrane fiber bundle from shaking due to the liquid flow inside, increasing the stability of the hollow membrane fiber bundle installation. A flow-guiding gap is formed between the support and the slope, and the leak detection unit communicates with this gap and connects to the lowest point of the slope. This means the leak detection unit is located at the very bottom of the slope, reducing the contact area between the hollow membrane fiber bundle and the inner surface of the bottom of the housing. The photoresist carried on the hollow membrane fiber bundle can quickly and smoothly enter the flow-guiding gap for final absorption. The system quickly guides the leaking photoresist to the leak detection section, preventing excessive contact area between the hollow fiber bundle and the bottom of the housing, which could hinder the flow of the photoresist or even cause leaking photoresist to flow to the leak detection section in time due to its high viscosity and slow speed due to obstruction by the support. It also prevents the photoresist from drying out and clogging the outer surface of the fiber bundle over time, thus reducing the degassing effect of the hollow fiber bundle. This helps to quickly guide the leaking photoresist from the guide gap to the leak detection section and reduces the chance of the hollow fiber bundle blocking the leak detection section due to installation deviation. This allows the operator to detect and quickly handle photoresist leaks without opening the machine, ensuring the normal operation of the entire degassing device. Attached Figure Description

[0032] Figure 1 A three-dimensional sectional view of the hollow membrane fiber degassing device provided by this utility model.

[0033] Figure 2 for Figure 1 Enlarged view of the structure at point A in the image.

[0034] Figure 3 This is a top-section view of the hollow membrane fiber degassing device provided by this utility model.

[0035] Figure 4 This is a partial cross-sectional view of the hollow membrane fiber degassing device provided by this utility model.

[0036] Figure 5 This is a cross-sectional view of the connecting components in the hollow membrane degassing device provided by this utility model.

[0037] Figure 6 This is a schematic diagram of the cooperation structure between the connecting component and the cover in the hollow membrane filament degassing device provided by this utility model.

[0038] Figure 7 This is a cross-sectional view of the connection structure between the connecting component and the cover in the hollow membrane degassing device provided by this utility model.

[0039] Among them, 1-shell, 11-receiving cavity, 12-liquid inlet, 13-liquid outlet, 14-air extraction port, 15-slope, 16-cylinder, 17-cover, 2-hollow membrane fiber bundle, 21-coiling part, 22-support part, 23-hollow part, 3-connector, 31-internal tapered thread, 32-pipe part, 33-ferrule, 34-flow channel, 4-adapter, 41-first connector, 411-external tapered thread, 412-step part, 42-second connector, 43-mounting part, 44-seal, 45-locking part, 46-limiting part, 47-nut, 5-guide gap, 6-leak detection part, 61-leak detection connector. Detailed Implementation

[0040] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort should fall within the scope of protection of the present invention.

[0041] like Figure 1As shown, a hollow fiber degassing device for photoresist is used to remove gas entrained in the photoresist solution. The degassing device includes a housing 1, a hollow fiber bundle 2 located within the housing 1, and a connecting assembly for connecting the hollow fiber bundle 2 to an external pipeline (not shown). In this embodiment, the housing 1 includes a cylindrical body 16 and a cover 17 sealingly covering the top of the cylindrical body 16. The cylindrical body 16 and the cover 17 are assembled to form a receiving cavity 11. The hollow fiber bundle 2 is spirally coiled within the receiving cavity 11. The top surface of the cover 17 of the housing 1 has an inlet 12, an outlet 13, and an exhaust port 14, all of which are through holes.

[0042] The connecting assembly includes two separately arranged connectors 3 and adapters 4. The two connectors 3 are located within the receiving cavity 11 and are respectively welded and fixed to both ends of the hollow membrane bundle 2 via a perforated plate. The two adapters 4 are respectively sealed and inserted through the inlet 11 and outlet 12. One end of the hollow membrane bundle 2 is welded to the connector 3, and the two are sealed together at the adapter 4 below the inlet 12. The other end of the bundle is welded to the connector 3, and the two are sealed together at the other adapter 4 below the outlet 12. This constructs the hollow membrane bundle 2 within the receiving cavity 11 as shown in the figure, providing a longer path for the membrane fibers. The hollow membrane bundle 2 is made of PTFE, and its manufacturing and formation are existing technologies, which will not be described further here.

[0043] Connector 3 and adapter 4 cooperate to form a through flow channel 34. That is, one part of the flow channel 34 is formed by the hollow interior of connector 3, and the other part of the flow channel 34 is formed by the hollow interior of adapter 4. The flow channel 34 is used to connect the hollow membrane bundle 2 and the external pipeline (not shown in the figure). When the photoresist enters the flow channel 34 in the liquid inlet 12 from the external pipeline, the liquid flows from inside the multiple tubular membrane filaments of the hollow membrane bundle 2. Then, a vacuum is drawn into the inner cavity of the housing 1 from the evacuation port 14, and the gas of the liquid in the tubular membrane filaments is drawn away through the micropores in the tube wall of the tubular membrane filaments. The degassed photoresist liquid comes out from the flow channel 33 of the liquid outlet 13. The above degassed principle is also existing technology and will not be described in detail.

[0044] like Figure 4 , Figure 5 As shown, the adapter 4 includes a first connector 41 located in the receiving cavity 11 and a second connector 42 extending out of the housing 1. The second connector 42 is used to connect to an external pipeline, and the first connector 41 is used to detachably seal with the connector 3.

[0045] like Figure 1 , Figure 2As shown, the inner surface of the bottom end of the housing 1 has a slope 15 inclined relative to the horizontal plane. The hollow membrane fiber bundle 2 is coiled and includes a coiled portion 21 and a support portion 22 that abuts against the slope 15. The portion of the hollow membrane fiber bundle 2 that bends and extends within the receiving cavity 11 is defined as the coiled portion 21. The coiled portion 21 protrudes radially from the connection point between the first connector 41 and the connector 3. For a specific example, refer to [reference needed]. Figure 1 As shown, the outer boundary of the membrane fiber at the weld between the hollow membrane fiber bundle 2 and the connector 3 is located on the vertical plane where line L is located (taking one end of the liquid inlet 12 as an example). Also refer to... Figure 4 The connection point between the first connector 41 and the connector 3 is located radially inside the axis where the hollow membrane fiber bundle 2 and the connector 3 are welded. Therefore, the combination... Figure 1 and Figure 4 The connection point between the first connector 41 and the connector 3 is located on the right side of line L, while the coiled portion 21 is located on the left side of line L, indicating that the coiled portion 21 protrudes radially beyond the connection point between the first connector 41 and the connector 3. The portion of the hollow membrane fiber bundle 2 that abuts against the inner surface of the bottom end of the housing 1 is defined as the support portion 22. A flow guiding gap 5 is formed between the support portion 22 and the slope 15. The bottom end face of the housing 1 is provided with a leak detection portion 6 communicating with the flow guiding gap 5, and this leak detection portion 6 is connected to the lowest position of the slope 15. It should be noted that the leak detection portion 6 is a leak detection channel or leak detection hole, or a connector component with a flow channel as described below; the specific design is not limited, for example... Figure 2 The top of the leak detection channel shown is directly connected to the lowest point of the slope 15.

[0046] The degassing device of this utility model designs the connecting component for connecting the hollow membrane fiber bundle 2 and the pipeline as two separate parts: a connector 3 and an adapter 4. The adapter 4 includes a first connector 41 and a second connector 42. The second connector 42 is located outside the housing 1 and is used to seal the connection to the external pipeline. The first connector 41 is located inside the housing 1 and is used to detachably seal the connection to the connector 3 located in the receiving cavity 11. The connection between the first connector 41 and the connector 3 is prone to leakage.

[0047] In other words, compared to the prior art where the adapter 4 is entirely located on the outside of the housing 1 and the connector 3 is inserted through the liquid inlet 12 or liquid outlet 13 of the housing 1 for easy disassembly and assembly, the degassing device of this invention overcomes the design bias in this field by placing the detachable sealed connection of the adapter 4 and connector 3, which are prone to leakage, on the inside of the housing 1. This allows the easily disassembled and replaceable adapter 4 to be fixedly inserted into the housing, while the connector 3 is accommodated within the inner cavity of the housing 1. Even if leakage occurs at the connection between the first connector 41 and the connector 3, the leaked photoresist will still be contained within the housing. Within the housing cavity 11 of body 1, and because the coiled portion 21 of the hollow film wire bundle 2 is designed to protrude radially from the connection point between the first connector 41 and the connector 3, most of the photoresist leaking from the connection point between the first connector 41 and the connector 3 can be collected by the hollow film wire bundle 2 and flow along the coiled portion 21 of the hollow film wire bundle 2 to the bottom of the housing 1. Compared to the outermost ring of the coiled portion 21 being located radially inward at the connection point between the first connector 41 and the connector 3, where the photoresist leaks directly into the housing 1, the hollow film wire bundle 2's collection of photoresist allows for a more concentrated flow of photoresist to the bottom of the housing 1. The photoresist on the membrane fiber surface will not dry out and clog the micropores in the tube wall due to an excessively long flow path, thus affecting degassing. Simultaneously, when leaked photoresist flows to the bottom of the housing 1, the support 22 abuts against the slope 15, which is inclined relative to the horizontal plane, forming a flow guide gap 5. The leak detection part 6 communicates with the flow guide gap 5 and connects to the lowest point of the slope 15, meaning the leak detection part 6 is located at the very bottom of the slope 15. The leak detection part 6 is positioned at the very bottom of the bottom end face of the cylinder 16, reducing the contact area between the hollow membrane fiber bundle 2 and the inner surface of the bottom end of the housing 1, thus preventing the hollow membrane fiber bundle 2 from colliding with the housing. 1. The excessively large contact area at the bottom hinders the flow of photoresist, causing the photoresist to flow to the leak detection section 6 at a slower speed. In some cases, the leaked photoresist may not be able to flow to the leak detection section 6 in time due to its high viscosity and obstruction by the support section 22. Over time, this will also cause the photoresist to dry out and block the outer surface of the film filaments, thereby reducing the degassing effect of the hollow film filament bundle 2. Of course, the inclined design of the slope 15 also allows the leaked photoresist to flow to the leak detection section 6 more quickly and in a more concentrated manner along the slope 15, making it easier for staff to detect and quickly deal with the photoresist leak without opening the machine.

[0048] On the other hand, the radial protrusion of the spiral portion 21 at the connection between the first connector 41 and the connector 3 increases the overall length of the hollow membrane fiber bundle 2, thus lengthening the flow path of the photoresist within the membrane fiber and improving the degassing effect. Furthermore, the relatively small contact area between the support portion 22 and the inner surface of the bottom end of the housing 1 results in a larger flow guide gap 5, reducing the obstruction to the flow of photoresist on the inner surface of the bottom end of the housing 1. This facilitates faster flow of the photoresist to the leak detection portion 6 and reduces the likelihood of the hollow membrane fiber bundle 2 obstructing the leak detection portion 6 due to installation errors.

[0049] In summary, once photoresist leaks at the connection between adapter 4 and connector 3, the spiral portion 21, which protrudes radially from the first connector 41 and connector 3, can catch the leaked photoresist and guide it to flow quickly and centrally towards the bottom of the housing 1. Furthermore, due to the small contact area between the support portion 22 and the inclined slope 15, as much photoresist as possible can flow from the guide gap 5 along the slope 15 to the leak detection portion 6. The leaked photoresist will flow to the leak detection portion 6 more quickly and centrally, allowing staff to detect and handle the leak promptly.

[0050] In this embodiment, the leak detection unit 6 includes a leak detection connector 61 integrally formed with the housing 1. The leak detection connector 61 is used to seal the connection of the pipeline on which the detection sensor is installed, so that the photoresist leaking inside the containment cavity 11 flows through the leak detection connector 61 and the pipeline (not shown in the figure) to the photoelectric detection sensor. The detection sensor transmits a signal to the outside indicating whether a photoresist leak has been detected. Its specific working principle can be achieved with existing technology and will not be described in detail. Of course, the leak detection unit 6 can also be a simple photoresist discharge port.

[0051] The specific structure of the slope 15 is not limited in the above structure. It can be a portion extending the inner surface of the bottom end of the housing 1, or it can extend the entire inner surface of the bottom end of the housing 1. In this embodiment, the slope 15 is annular, and its height gradually decreases from the outside to the inside. That is, the slope 15 extends the entire inner surface of the bottom end of the housing 1, making the slope of the inner surface of the bottom end of the housing 1 into a cone shape that is larger at the top and smaller at the bottom. The leak detection part 6 is located at the bottom of the cone. No matter where the photoresist leaks in the circumferential direction within the receiving cavity 11, it can flow quickly to the leak detection part 6 through the slope 15, avoiding the accumulation of photoresist in a localized area that would prevent it from being discharged smoothly. The gradual decrease in height from the outside to the inside of the slope 15 increases the axial height of the receiving cavity 11, thereby increasing the overall height of the hollow membrane bundle 2, which means increasing the length of the hollow membrane bundle 2, ultimately resulting in better degassing effect.

[0052] like Figure 3 As shown, the hollow membrane fiber bundle 2 is spirally coiled to form a hollow portion 23 communicating with the flow guiding gap 5. The leak detection part 6 is located within the coverage area of ​​the hollow portion 23 in a top view projection. The hollow portion 23 ensures that the hollow membrane fiber bundle 2 will not obstruct the leak detection part 6 after installation, and will not cause the membrane fiber to block the leak detection part 6 due to installation deviation. It is also beneficial to connect the hollow portion 23 and the flow guiding gap 5. Leaked photoresist flows through the flow guiding gap 5 to the hollow portion 23, and then is discharged more concentratedly through the leak detection part 6, which facilitates rapid detection of photoresist leakage and prevents the photoresist from drying inside the housing 1.

[0053] like Figure 1As shown, the support part 22 is arranged at an angle relative to the horizontal plane, and the support part 22 and the slope 15 are partially in contact. Compared with the support part 22 having a ring structure and being horizontally in contact with the slope 15, this arrangement greatly reduces the contact area between the support part 22 and the slope 15, avoiding obstruction of the flow of photoresist and preventing the photoresist on the outer periphery of the support part 22 from being blocked outside the flow guide gap 5, so that the photoresist can flow smoothly to the leak detection part 6 for discharge.

[0054] like Figure 4 , Figure 5 As shown, the adapter 4 includes a mounting portion 43 located between the first connector 41 and the second connector 42. The mounting portion 43 is located below the top wall of the housing 1. The two adapters 4 are respectively provided with mounting portions 43, so that the two mounting portions 43 are spaced apart below the top wall of the housing 1. A sealing element 44 is provided between the mounting portion 43 and the top wall of the housing 1. A locking element 45 that presses against the top wall of the housing 1 is connected to the outer periphery of the second connector 42. The locking element 45 and the mounting portion 43 clamp the sealing element 44 towards each other, so that the sealing element 44 seals the liquid inlet 12 and the liquid outlet 13. The sealing element 44 can be a gasket or an O-ring.

[0055] During installation, the second connector 42 of the adapter 4 extends from the inlet 12 or outlet 13 until the mounting part 43 is blocked by the top wall of the housing 1. The locking member 45 and the mounting part 43 then clamp the top wall of the housing 1, specifically clamping the cover 17, thereby achieving a sealed assembly of the adapter 4 and the housing 1. The mounting part 43 provides positioning guidance for the installation of the housing 1 and the adapter 4. Furthermore, the mounting part 43 and the locking member 45 can form compression on the inner and outer surfaces of the top wall of the housing 1. Based on the fixed connection between the adapter 4 and the housing 1 by the locking member 45, the locking member 45 and the mounting part 43 cooperate to achieve a sealed assembly of the adapter 4 and the housing 1. The structural design is reasonable, and the sealed assembly of the housing 1 and the adapter 4 can be achieved using fewer parts, simplifying the assembly process.

[0056] like Figure 4 , Figure 5 As shown, the inner wall of the connector 3 has an internal tapered thread 31, and the outer wall of the first connector 41 has an external tapered thread 411. The first connector 41 extends into the connector 3 for threaded connection. The connecting assembly also includes a limiting member 46 sleeved on the outer periphery of the connector 3. The limiting member 46 and the first connector 41 at least partially overlap in the axial direction. With this configuration, the limiting member 46 and the first connector 41 cooperate with each other to clamp and support the wall thickness of the flow channel 34 of the connector 3, so that the wall thickness of the connector 3 will not undergo inward or outward deformation deviating from the axis, thereby ensuring the liquid seal between the connector 3 and the adapter 4.

[0057] like Figure 6 , Figure 7As shown, the adapter 4 includes a mounting portion 43 located between the first connector 41 and the second connector 42. The mounting portion 43 is located below the top wall of the housing 1. The two adapters 4 are respectively provided with mounting portions 43, so that the two mounting portions 43 are spaced apart below the top wall of the housing 1 and abut against the top wall of the housing 1. The adapter 4 is welded to the top wall of the housing 1, specifically to the cover 17, thereby achieving a seal for the liquid inlet 12 and the liquid outlet 13.

[0058] During installation, the second connector 42 of the adapter 4 extends from the inlet 12 or outlet 13 until the mounting part 43 is blocked by the top wall of the housing 1. Then, the adapter 4 is welded to the top wall of the housing 1, specifically by welding a welding rod to the annular gap on the outer surface of the cover 17. This structure is compared to... Figure 4 , Figure 5 The structure omits the locking component 45, reducing the number of installation parts, making installation convenient, and providing excellent sealing performance.

[0059] like Figure 7 As shown, the outer wall of the first connector 41 is provided with external threads. The connector 3 extends into the first connector 41, and a nut 47 is connected to the external threads. The nut 47 is used to seal the connection between the first connector 41 and the connector 3. Specifically, the inner wall of the first connector 41 has a stepped portion 412. The connector 3 has a tube portion 32 that abuts against the end face of the stepped portion 412. The nut 47 is fixedly connected to the tube portion 32. A retaining sleeve 33 that abuts against the first connector 41 is fitted around the outer periphery of the tube portion 32. The retaining sleeve 33 is located inside the nut 47.

[0060] During installation, the nut 47 is threaded into the external thread of the first connector 41, thereby clamping the sleeve 33 with the nut 47 and the first connector 41 facing each other. At this time, the first connector 41, the nut 47, and the tube 32 compress the sleeve 33, making the sleeve 33 and the first connector 41 abut and seal, and the sleeve 33 and the tube 32 abut and seal. The end face of the tube 32 abuts tightly with the stepped part 412, finally achieving the sealed installation of the adapter 4 and the connector 3. At this time, the inner wall of the tube 32 is flush with the inner wall of the adapter 4, that is, the inner wall of the flow channel 34 is smoothly transitioned. The entire connection structure is simple, the sealing effect is good, and there is basically no photoresist accumulation on the uneven parts of the inner wall of the flow channel 34, reducing flow dead angles and high utilization of photoresist. In this embodiment, the connector 3 is made of fluoropolymer material, the adapter 4 is made of metal material, the ferrule 33 can be made of an elastic material, and the material of the nut 47 is not limited; it can be made of metal or fluoropolymer material.

[0061] The above specific embodiments are used to explain and illustrate the present utility model, and are not intended to limit the present utility model. Any modifications and changes made to the present utility model within the spirit and scope of the claims shall fall within the protection scope of the present utility model.

Claims

1. A hollow fiber degassing device for photoresist, comprising: The housing has a receiving cavity, and is provided with a liquid inlet, a liquid outlet and an air extraction port; Hollow membrane fiber bundles are disposed within the receiving cavity; A connecting assembly for connecting the hollow membrane fiber bundle and the tubing; characterized in that the connecting assembly comprises: A connector is located within the receiving cavity and is connected to the end of the hollow membrane fiber bundle; The adapter is sealed through the inlet and outlet and is separately disposed from the connector. The adapter includes a first connector located in the receiving cavity and a second connector extending out of the housing for connection with the pipeline. The first connector is detachably and sealedly connected to the connector. The inner surface of the bottom end of the housing has a slope that is inclined relative to the horizontal plane. The hollow membrane fiber bundle is coiled and includes a coiled part and a support part that abuts against the slope. The coiled part protrudes radially from the connection point between the first connector and the connector. A flow guiding gap is formed between the support part and the slope. The bottom end face of the housing is provided with a leak detection part that communicates with the flow guiding gap. The leak detection part is connected to the lowest position of the slope.

2. The hollow membrane fiber degassing device according to claim 1, characterized in that: The slope is annular and gradually decreases in height from the outside to the inside. The hollow membrane filament bundle is spirally coiled to form a hollow part that communicates with the flow guide gap. The leak detection part is located within the area covered by the hollow part.

3. The hollow membrane fiber degassing device according to claim 1, characterized in that: The support is arranged at an angle relative to the horizontal plane, and the support and the slope portion abut against each other.

4. The hollow membrane fiber degassing device according to claim 1, characterized in that: The adapter includes a mounting portion located between the first connector and the second connector. The mounting portion is located below the top wall of the housing. A sealing element is provided between the mounting portion and the top wall of the housing. A locking element that presses against the top wall of the housing is connected to the outer periphery of the second connector. The locking element and the mounting portion clamp the sealing element in opposite directions so that the sealing element seals the liquid inlet and liquid outlet.

5. The hollow membrane fiber degassing device according to claim 1, characterized in that: The inner wall of the connector has an internal tapered thread, and the outer wall of the first connector has an external tapered thread. The first connector extends into the connector for threaded connection. The connecting assembly also includes a limiting member sleeved on the outer periphery of the connector. The limiting member and the first connector at least partially overlap in the axial direction.

6. The hollow membrane fiber degassing device according to claim 1, characterized in that: The adapter includes a mounting portion located between the first connector and the second connector. The mounting portion is located below the top wall of the housing and abuts against the top wall of the housing. The adapter is welded to the housing to seal the inlet and outlet.

7. The hollow membrane fiber degassing device according to claim 1, characterized in that: The outer wall of the first connector is provided with an external thread, the connector extends into the first connector, and a nut is connected to the external thread to seal the first connector and the connector.

8. The hollow membrane fiber degassing device according to claim 7, characterized in that: The inner wall of the first connector has a stepped portion, and the connector has a tube portion that abuts against the end face of the stepped portion. A retaining sleeve is fitted around the outer periphery of the tube portion that abuts against the first connector. The nut and the first connector clamp the retaining sleeve so that the retaining sleeve and the first connector abut and seal, and the retaining sleeve and the tube portion abut and seal.

9. The hollow membrane fiber degassing device according to claim 1, characterized in that: The leak detection unit includes a leak detection connector integrally formed with the housing, which is used to seal the pipeline in which the detection sensor is installed.

10. The hollow membrane fiber degassing device according to claim 1, characterized in that: The housing includes a cylindrical body and a cover that seals the top of the cylindrical body. The liquid inlet, liquid outlet and air extraction port are located on the top surface of the cover, and the leak detection part is located on the bottom surface of the cylindrical body; or, the connector is made of fluororesin material and the adapter is made of metal material.

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