Fuming cupboard matched with chemical vapor deposition equipment

Abstract

The utility model provides a fuming cupboard matched with chemical vapor deposition equipment, and relates to the field of fuming cupboards for vapor deposition equipment, the fuming cupboard comprises a fuming cupboard assembly and a vapor deposition furnace, the fuming cupboard assembly comprises a cupboard body, an electric sliding door, a lower cupboard door, a vertical sliding window, an exhaust hole and an LED illuminating lamp, the electric sliding door is installed at the upper end of the front face of the cupboard body, and the lower cupboard door is installed at the upper end of the front face of the cupboard body. Lower cabinet doors are installed at the lower ends of the front face and the back face of the cabinet body, and vertical sliding windows are installed at the upper ends of the two sides of the cabinet body. According to the fuming cupboard assembly, the cupboard body, the electric sliding door, the lower cupboard door, the vertical sliding window, the exhaust hole and the LED illuminating lamp are matched to form a relatively closed space to provide protection for the vapor deposition furnace, harmful gas can be effectively prevented from being directly diffused into air in a laboratory when emergency situations such as leakage occur, the fan cover is communicated with the inner cavity of the cupboard body, and therefore the safety of the fuming cupboard assembly is improved. The gas in the cabinet body can be effectively collected, and the ventilation quantity can be adjusted by the electric butterfly valve so as to adapt to different use scenes.

Description

Technical Field

[0001] This utility model belongs to the field of fume hoods for chemical vapor deposition equipment, specifically a fume hood adapted to chemical vapor deposition equipment. Background Technology

[0002] The main function of a fume hood in a laboratory is to protect laboratory personnel from harmful gases, vapors, dust and chemicals. The working principle of a fume hood is to provide an enclosed workspace to achieve effective spatial isolation. The exhaust system removes air and potentially harmful substances from the fume hood, thereby reducing or preventing the spread of harmful substances from the experiment to a larger space.

[0003] Chemical vapor deposition furnaces are sophisticated experimental devices that generate solid deposits by chemically reacting gaseous substances on a solid surface. These devices are widely used in scientific research and industry. However, there are some risks that may be encountered during the use of chemical vapor deposition furnaces, such as furnace tube rupture or leakage of harmful gases. These risks pose a threat to laboratory safety.

[0004] Currently, existing fume hoods are not well-designed to be compatible with chemical vapor deposition furnaces. This means that in the event of an emergency such as a leak, harmful gases can easily diffuse into the laboratory air, polluting the entire laboratory environment and increasing the risks faced by laboratory personnel.

[0005] In summary, this invention provides a fume hood adapted to chemical vapor deposition equipment to solve the above problems. Utility Model Content

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0007] A fume hood adapted for chemical vapor deposition (CVD) equipment includes a fume hood assembly and a CVD furnace. The fume hood assembly includes a cabinet, an electric sliding door, a lower cabinet door, a pull-out window, an exhaust vent, and an LED light. The electric sliding door is installed at the upper part of the front of the cabinet. Lower cabinet doors are installed at the lower parts of both the front and back of the cabinet. Pull-out windows are installed at the upper parts of both sides of the cabinet. Exhaust vents are provided at the lower parts of both sides of the cabinet. An LED light is fixedly connected to the top of the inner cavity of the cabinet. The CVD furnace is located in the inner cavity of the cabinet. The fume hood assembly is used to protect the CVD furnace. The lower cabinet door includes a door frame, a door panel, and a handle. The lower cabinet door is movably connected to the cabinet. A ventilation component and a control component are installed on the surface of the fume hood assembly. The ventilation component is used for ventilation, and the control component is used for monitoring and adjusting the airflow speed.

[0008] Furthermore, in this utility model, the ventilation component includes a fan hood, an electric butterfly valve, a duct, and a duct fan. The fan hood is located at the top of the cabinet and communicates with the inner cavity of the cabinet.

[0009] Furthermore, in this utility model, the electric butterfly valve is located at the top of the hood and communicates with the inner cavity of the hood, one end of the air duct is connected to the electric butterfly valve, and the duct fan is installed at the other end of the air duct.

[0010] Furthermore, in this utility model, the door frame is threadedly connected to the inner wall of the cabinet by bolts, the handle is fixed to the surface of the door panel, and the door panel is hinged to the door frame by hinges.

[0011] Furthermore, in this utility model, the control component includes a control panel, a human body sensor, an air volume sensor, a face velocity sensor, and a three-color alarm light. The air volume sensor is installed on the surface of the air duct, the control panel and the face velocity sensor are both fixed to one side of the front of the cabinet, and the three-color alarm light is fixed to the top of the cabinet.

[0012] Furthermore, in this utility model, the output terminals of the human body sensor, the air volume sensor, and the face speed sensor are all connected to the input terminal of the control panel, and the output terminal of the control panel is connected to the input terminals of the electric sliding door, the LED lighting, the electric butterfly valve, the duct fan, and the three-color alarm light, respectively.

[0013] Furthermore, in this utility model, the face wind speed sensor is Senstrol-SF35, the air volume sensor is AF410C1 hot film sensor, the human body sensor is Lottebox millimeter-wave radar sensor, and the control panel model can be YS-LFL2001.

[0014] Beneficial effects: This utility model has the following beneficial effects:

[0015] This invention utilizes a fume hood assembly, comprising a cabinet, electric sliding door, lower cabinet door, pull-out window, exhaust vent, and LED lighting, to create a relatively enclosed space. This provides protection for the chemical vapor deposition furnace (CVD) and isolates it from other areas of the laboratory. In case of leaks or other emergencies, it effectively prevents harmful gases from directly diffusing into the laboratory air. The fume hood connects to the inner cavity of the cabinet, effectively collecting gases within the cabinet. The electric butterfly valve adjusts the ventilation volume to adapt to different usage scenarios, and the duct fan provides strong suction, expelling gases through the ductwork to ensure effective ventilation, reduce the accumulation of harmful gases within the cabinet, and protect the safety of operators. The control assembly includes a human body sensor, airflow sensor, and face velocity sensor, which transmit data to the control panel. The control panel uses this data to control the operation of the electric sliding door, LED lighting, electric butterfly valve, duct fan, and three-color alarm light. Through the coordinated operation of the fume hood assembly, ventilation assembly, and control assembly, a complete system of protection, ventilation, and monitoring and regulation is formed. This system is well-suited for chemical vapor deposition furnaces, effectively solving the problem of harmful gas diffusion and reducing the risks faced by laboratory personnel. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the rear view structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the connection structure between the fume hood assembly and the vapor deposition furnace of this utility model;

[0019] Figure 4 This is a schematic diagram of the system flow of this utility model.

[0020] In the picture:

[0021] 1. Fume hood assembly; 11. Cabinet body; 12. Electric sliding door; 13. Lower cabinet door; 131. Door frame; 132. Door panel; 133. Handle; 14. Pull-out window; 15. Exhaust vent; 16. LED lighting; 2. Ventilation assembly; 21. Ventilation hood; 22. Electric butterfly valve; 23. Air duct; 24. Duct fan; 3. Control assembly; 31. Control panel; 32. Human body sensor; 33. Air volume sensor; 34. Face velocity sensor; 35. Three-color alarm light; 4. Vapor deposition furnace. Detailed Implementation

[0022] To better understand the technical content of this utility model, specific embodiments are described below in conjunction with the accompanying drawings. Various aspects of this utility model are described in this disclosure with reference to the accompanying drawings, which illustrate numerous illustrative embodiments. The embodiments of this disclosure are not necessarily defined to include all aspects of this utility model. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in this utility model are not limited to any particular implementation. Furthermore, some aspects of this utility model can be used alone or in any suitable combination with other aspects disclosed in this utility model.

[0023] Example 1

[0024] like Figure 1-4 As shown, this is the first embodiment of the present invention. This embodiment provides a fume hood adapted to a chemical vapor deposition (CVD) equipment, including a fume hood assembly 1 and a CVD furnace 4. The fume hood assembly 1 includes a cabinet 11, an electric sliding door 12, a lower cabinet door 13, a pull-out window 14, an exhaust vent 15, and an LED lighting fixture 16. The electric sliding door 12 is installed at the upper end of the front of the cabinet 11. Lower cabinet doors 13 are installed at the lower ends of both the front and back of the cabinet 11. Pull-out windows 14 are installed at the upper ends of both sides of the cabinet 11. Vent holes 15 are provided at the lower ends of both sides of the cabinet 11. An LED light 16 is fixedly connected to the top of the inner cavity of the cabinet 11. The vapor deposition furnace 4 is located in the inner cavity of the cabinet 11. The fume hood assembly 1 is used to provide protection for the vapor deposition furnace 4. The lower cabinet door 13 includes a door frame 131, a door panel 132 and a handle 133. The lower cabinet door 13 is movably connected to the cabinet 11. A ventilation assembly 2 and a control assembly 3 are installed on the surface of the fume hood assembly 1. The ventilation assembly 2 is used for ventilation, and the control assembly 3 is used to monitor and adjust the airflow speed.

[0025] like Figure 1-4As shown, the combination of cabinet 11, electric sliding door 12, lower cabinet door 13, pull-out window 14, and exhaust vent 15 forms a relatively enclosed space, providing protection for the vapor deposition furnace 4 and isolating it from other areas of the laboratory. In case of emergencies such as leaks, it can effectively prevent harmful gases from directly diffusing into the laboratory air. The electric sliding door 12 is located at the upper front and forms a tiered protection with the lower cabinet door 13, adapting to the operation needs of equipment at different heights. The lower cabinet door 13 is movably connected to the cabinet 11 and has an overall detachable design for easy equipment access. The electric sliding door 12 uses a glass panel, and the operator can adjust its height to control the opening size of the fume hood, which helps optimize airflow, ensures the safety of the experimenters, and facilitates operation. The pull-out window 14 not only facilitates the loading and unloading of samples but also allows for the adjustment of the air intake path. Together with the lower exhaust vent 15, it forms a bottom-in, top-out airflow circulation, preventing the escape of harmful gases during the deposition process. The LED lighting 16 is used to provide lighting inside the fume hood for experimental operation and observation.

[0026] Example 2

[0027] Reference Figure 1-4 This is the second embodiment of the present invention, which is based on the previous embodiment.

[0028] In this embodiment, the ventilation component 2 includes a fan hood 21, an electric butterfly valve 22, a duct 23, and a duct fan 24. The fan hood 21 is located on the top of the cabinet 11 and communicates with the inner cavity of the cabinet 11.

[0029] The electric butterfly valve 22 is located on the top of the hood 21 and is connected to the inner cavity of the hood 21. One end of the duct 23 is connected to the electric butterfly valve 22, and the duct fan 24 is installed at the other end of the duct 23.

[0030] The door frame 131 is threadedly connected to the inner wall of the cabinet 11 by bolts, and the handle 133 is fixed to the surface of the door panel 132. The door panel 132 is hinged to the door frame 131 by hinges.

[0031] The control component 3 includes a control panel 31, a human body sensor 32, an air volume sensor 33, a face velocity sensor 34, and a three-color alarm light 35. The air volume sensor 33 is installed on the surface of the air duct 23. The control panel 31 and the face velocity sensor 34 are both fixed to one side of the front of the cabinet 11. The three-color alarm light 35 is fixed to the top of the cabinet 11.

[0032] The outputs of the human body sensor 32, the air volume sensor 33, and the face speed sensor 34 are all connected to the input of the control panel 31. The output of the control panel 31 is connected to the input of the electric sliding door 12, the LED lighting 16, the electric butterfly valve 22, the duct fan 24, and the tri-color alarm light 35, respectively.

[0033] The face speed sensor 34 is Senstrol-SF35, the air volume sensor 33 is AF410C1 hot film sensor, the human body sensor 32 is Lottebox millimeter-wave radar sensor, and the control panel 31 can be YS-LFL2001.

[0034] like Figure 1-4 As shown, the hood 21 is connected to the inner cavity of the cabinet 11. When the duct fan 24 is started, it can discharge the gas in the cabinet 11 through the hood 21, the electric butterfly valve 22 and the air duct 23. The electric butterfly valve 22 can adjust the ventilation volume according to actual needs to ensure that harmful gases can be discharged in a timely and effective manner under various conditions, reducing the possibility of harmful gases accumulating in the cabinet 11 and spreading to the laboratory. The human body sensor 32 can detect the approach or departure of personnel, thereby controlling the opening and closing of the electric sliding door 12 and the LED lighting 16. The air volume sensor 33 can monitor the ventilation volume in real time, and the face velocity sensor 34 can detect the wind speed at the opening of the fume hood. These sensors transmit data to the control panel 31. The control panel 31 makes judgments based on preset parameters. When it detects insufficient ventilation or face velocity that does not meet the requirements, it will adjust the electric butterfly valve 22 and the duct fan 24 in a timely manner to ensure the ventilation effect. If an abnormal situation occurs, the three-color alarm light 35 will also issue a warning to remind the experimental personnel to take appropriate measures.

[0035] When in use, the cabinet 11 of the fume hood assembly 1 provides a relatively independent working space for the vapor deposition furnace 4 and serves as a protective function. The electric sliding door 12 is installed on the upper front of the cabinet 11, which is convenient for operators to open or close for the operation of the vapor deposition furnace 4. The lower cabinet doors 13 are distributed on the lower front and back of the cabinet 11 and are composed of a door frame 131, a door panel 132 and a handle 133. They can be used to store related items or to perform maintenance inside the cabinet 11. The pull-out windows 14 on both sides facilitate ventilation adjustment when necessary, and the exhaust vents 15 help with natural ventilation. The LED lighting 16 provides lighting for the inside of the cabinet 11.

[0036] Ventilation component 2 is responsible for air exchange in the fume hood, ensuring the exhaust of harmful gases. The hood 21 is located at the top of the cabinet 11 and communicates with the inner cavity, collecting the gas inside the cabinet 11. The electric butterfly valve 22 is installed on the top of the hood 21 and can adjust the gas flow. The duct 23 connects the electric butterfly valve 22 and the duct fan 24. When the duct fan 24 is working, it generates suction, exhausting the gas inside the cabinet 11 to the outside through the hood 21, the electric butterfly valve 22 and the duct 23. The opening degree of the electric butterfly valve 22 can be adjusted according to the actual ventilation needs to control the ventilation volume.

[0037] Human body sensor 32 can detect whether an operator is approaching the fume hood. When a human body is detected, a signal is transmitted to control panel 31. Control panel 31 controls the electric sliding door 12 to open and the LED lighting 16 to turn on, making it convenient for the operator to operate. When the person leaves, the electric sliding door 12 closes and the LED lighting 16 turns off, achieving energy saving and safety protection. Air volume sensor 33 monitors the air volume of the ventilation system in real time. If the air volume does not meet the set value, control panel 31 will adjust the opening of electric butterfly valve 22 or the speed of duct fan 24 to ensure ventilation effect. Face velocity sensor 34 monitors the face velocity at the opening of the fume hood. When an abnormal face velocity is detected, control panel 31 will also adjust the operating parameters of ventilation component 2 accordingly to ensure that harmful gases do not leak into the surrounding environment. When the ventilation system malfunctions or the air volume or face velocity is abnormal, control panel 31 controls the tri-color alarm light 35 to emit different colored lights to warn the operator and remind them to deal with the situation in time.

[0038] All standard parts used in this application can be purchased from the market, and can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. The control method is automatic control through a controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art and is common knowledge in the field. Since this application is mainly used to protect mechanical devices, the control method and circuit connection will not be explained in detail in this application.

[0039] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Those skilled in the art to which this invention pertains can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this invention shall be determined by the claims.

Claims

1. A fume hood adapted to a chemical vapor deposition (CVD) apparatus, comprising a fume hood assembly (1) and a CVD furnace (4), characterized in that: The fume hood assembly (1) includes a cabinet (11), an electric sliding door (12), a lower cabinet door (13), a pull-out window (14), an exhaust vent (15), and an LED light (16). The electric sliding door (12) is installed on the upper part of the front of the cabinet (11). The lower cabinet door (13) is installed on the lower part of both the front and back of the cabinet (11). The upper part of both sides of the cabinet (11) is installed with a pull-out window (14). The lower part of both sides of the cabinet (11) is provided with an exhaust vent (15). The top of the inner cavity of the cabinet (11) is fixedly connected to... The furnace has an LED light (16), the vapor deposition furnace (4) is located in the inner cavity of the cabinet (11), the fume hood assembly (1) is used to protect the vapor deposition furnace (4), the lower cabinet door (13) includes a door frame (131), a door panel (132) and a handle (133), the lower cabinet door (13) is movably connected to the cabinet (11), the surface of the fume hood assembly (1) is equipped with a ventilation assembly (2) and a control assembly (3), the ventilation assembly (2) is used for ventilation, and the control assembly (3) is used to monitor and adjust the airflow speed.

2. The fume hood adapted to the chemical vapor deposition equipment as described in claim 1, characterized in that: The ventilation assembly (2) includes a hood (21), an electric butterfly valve (22), a duct (23), and a duct fan (24). The hood (21) is located on the top of the cabinet (11) and communicates with the inner cavity of the cabinet (11).

3. The fume hood adapted to the chemical vapor deposition equipment as described in claim 2, characterized in that: The electric butterfly valve (22) is located at the top of the hood (21) and is connected to the inner cavity of the hood (21). One end of the air duct (23) is connected to the electric butterfly valve (22), and the duct fan (24) is installed at the other end of the air duct (23).

4. The fume hood adapted to the chemical vapor deposition equipment as described in claim 1, characterized in that: The door frame (131) is threadedly connected to the inner wall of the cabinet (11) by bolts, the handle (133) is fixed to the surface of the door panel (132), and the door panel (132) is hinged to the door frame (131) by hinges.

5. The fume hood adapted to the chemical vapor deposition equipment as described in claim 1, characterized in that: The control component (3) includes a control panel (31), a human body sensor (32), an air volume sensor (33), a face velocity sensor (34), and a three-color alarm light (35). The air volume sensor (33) is installed on the surface of the air duct (23). The control panel (31) and the face velocity sensor (34) are both fixed to one side of the front of the cabinet (11). The three-color alarm light (35) is fixed to the top of the cabinet (11).

6. The fume hood adapted to the chemical vapor deposition equipment as described in claim 5, characterized in that: The outputs of the human body sensor (32), the air volume sensor (33), and the face wind speed sensor (34) are all connected to the input of the control panel (31). The output of the control panel (31) is connected to the input of the electric sliding door (12), the LED lighting lamp (16), the electric butterfly valve (22), the duct fan (24), and the three-color alarm light (35), respectively.

7. The fume hood adapted to the chemical vapor deposition equipment as described in claim 5, characterized in that: The face wind speed sensor (34) is Senstrol-SF35, the air volume sensor (33) is AF410C1 hot film sensor, the human body sensor (32) is Lottebox millimeter-wave radar sensor, and the control panel (31) can be YS-LFL2001.

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