Temperature control device and reaction equipment

Abstract

The utility model provides a temperature control device and reaction equipment, and the temperature control device comprises a plurality of detection units, each detection unit comprises a detection part and a compensation wire, each compensation wire is connected with the corresponding detection part, and each detection part is used for being connected with a reaction furnace and detecting the temperature in the reaction furnace; the temperature collector is connected with the plurality of compensation wires so as to realize communication connection with the plurality of detection pieces, and the temperature collector is used for receiving the first detection information of the plurality of detection pieces and outputting second detection information; the temperature collector is arranged on one side of the reaction furnace; and the processing unit is in communication connection with the temperature collector, and the processing unit is used for receiving the second detection information. According to the temperature control device and the reaction equipment provided by the invention, the length of the compensation wire connected with the detection piece can be reduced, the probability that information transmitted by the compensation wire is interfered is reduced, and the accuracy of receiving the detection information by the temperature control device and controlling the reaction furnace to adjust the temperature in the reaction furnace can be improved.

Description

Technical Field

[0001] This application relates to the technical field of temperature monitoring, and in particular to a temperature control device and reaction equipment. Background Technology

[0002] In the production of photovoltaic and semiconductor products, sheet materials need to be coated using a reactor. This process requires heating the sheet materials within the reactor and maintaining the temperature within the range required by the processing technology. Therefore, multiple thermocouples are typically installed on the reactor to monitor the temperature. These thermocouples are connected to a temperature controller via compensating wires. The temperature controller uses the thermocouples to determine the reactor temperature and adjusts the power of the reactor's heating mechanism based on the current temperature to regulate the overall temperature.

[0003] Currently, in order to shorten the length of the wires connecting the temperature controller and other electronic devices, the temperature controller and other related electronic devices are usually placed in a location far away from the reactor. This results in a longer compensation wire connecting the thermocouple to the temperature controller. The increased length of the compensation wire increases the risk of interference during signal transmission, affecting the accuracy of the temperature controller in receiving the detection information from the thermocouple and adjusting the temperature inside the reactor. Utility Model Content

[0004] In view of the above, it is necessary to provide a temperature control device and a reaction apparatus to solve the above-mentioned defects.

[0005] In a first aspect, embodiments of this application provide a temperature control device, comprising: multiple detection units, each detection unit including a detection element and a compensating wire, each compensating wire being connected to a corresponding detection element, each detection element being used to connect to a reactor and to detect the temperature inside the reactor; a temperature acquisition unit, the temperature acquisition unit being connected to the multiple compensating wires to achieve a communication connection with the multiple detection elements, the temperature acquisition unit being used to receive first detection information from the multiple detection elements and output second detection information; the temperature acquisition unit being used to be disposed on one side of the reactor; and a processing unit, the processing unit being communicatively connected to the temperature acquisition unit, the processing unit being used to receive the second detection information.

[0006] Optionally, the distance between the temperature acquisition device and the reactor is less than the distance between the temperature acquisition device and the processing unit.

[0007] Optionally, the processing unit is also used to output adjustment information. The reactor includes a heating element for heating the space inside the reactor. The temperature control device also includes an adjustment unit that is communicatively connected to the processing unit. The adjustment unit is used to connect to the heating element and to receive adjustment information and adjust the operation of the heating element to regulate the temperature inside the reactor.

[0008] Optionally, the processing unit is a processor, which is wired to the temperature acquisition unit via a bus or wirelessly connected to the temperature acquisition unit via the TCP protocol.

[0009] Optionally, the processing unit includes: a temperature controller, which is wired to the temperature acquisition unit via a bus or wirelessly connected to the temperature acquisition unit via a TCP protocol; and a processor, which is communicatively connected to the temperature controller, and the temperature controller is used to output second detection information and / or regulation information to the processor, so that the processor can monitor the operation of the temperature acquisition unit and the temperature controller.

[0010] Secondly, embodiments of this application provide a reaction apparatus, including a reaction furnace and a temperature control device. The reaction furnace includes a furnace body and a heating element connected to the furnace body. The furnace body is used to contain multiple sheet materials, and the heating element is used to heat the space inside the furnace body to heat the multiple sheet materials. The temperature control device includes: multiple detection units, each detection unit including a detection element and a compensation wire, each compensation wire connected to a corresponding detection element, each detection element connected to the furnace body, and used to detect the temperature inside the furnace body; a temperature acquisition unit, the temperature acquisition unit being connected to the multiple compensation wires to achieve a communication connection with the multiple detection elements, the temperature acquisition unit being used to receive first detection information from the multiple detection elements and output second detection information; the temperature acquisition unit being disposed on one side of the furnace body; and a processing unit, the processing unit being communicatively connected to the temperature acquisition unit, the processing unit being used to receive the second detection information.

[0011] Optionally, the distance between the temperature acquisition device and the reactor is less than the distance between the temperature acquisition device and the processing unit.

[0012] Optionally, the processing unit is also used to output adjustment information; the temperature control device further includes: an adjustment unit, which is communicatively connected to the processing unit, the adjustment unit is used to connect to the heating element, the adjustment unit is used to receive adjustment information, and adjust the operation of the heating element to regulate the temperature inside the reactor.

[0013] Optionally, the processing unit is a processor, which is wired to the temperature acquisition unit via a bus or wirelessly connected to the temperature acquisition unit via the TCP protocol.

[0014] Optionally, the processing unit includes: a temperature controller, which is wired to the temperature acquisition unit via a bus or wirelessly connected to the temperature acquisition unit via a TCP protocol; and a processor, which is communicatively connected to the temperature controller, and the temperature controller is used to output second detection information and / or regulation information to the processor, so that the processor can monitor the operation of the temperature acquisition unit and the temperature controller.

[0015] The reaction equipment and temperature control device provided in this application have a temperature acquisition unit located on one side of the reactor. This temperature acquisition unit is connected to multiple detection elements via multiple compensating wires, reducing the length of the compensating wires connecting the multiple detection elements. This allows the processing unit to adjust the operation of the heating elements based on the detection results from multiple detection units, thereby regulating the temperature inside the reactor. Simultaneously, it reduces the cost of the compensating wires and lowers the probability of interference with the transmitted information. This improves the accuracy of the temperature control device in receiving detection information and in controlling the reactor's temperature regulation. Attached Figure Description

[0016] Figure 1 This is a first schematic diagram of the reaction apparatus in an embodiment of this application.

[0017] Figure 2 This is a second schematic diagram of the reaction apparatus in an embodiment of this application.

[0018] Explanation of key component symbols:

[0019] 100. Reaction equipment; 101. Reactor; 10. Furnace body; 11. Housing space; 20. Heating element; 102. Temperature control device; 30. Detection unit; 31. Detection element; 32. Compensating wire; 40. Temperature acquisition device; 50. Processing unit; 51. Processor; 52. Temperature controller; 60. Adjustment unit. Detailed Implementation

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments.

[0021] The term "multiple" in this application refers to two or more. Furthermore, it should be understood that the terms "first," "second," etc., used in the description of this application are used only for descriptive purposes and should not be construed as indicating or implying relative importance, nor as indicating or implying order.

[0022] In the description of the embodiments in this application, the words "exemplary" or "for example" are used to indicate that they are examples, illustrations, or descriptions. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design options. Specifically, the use of the words "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0023] Please see Figure 1 , Figure 1 An embodiment of the present application provides a reaction apparatus 100.

[0024] In embodiments of this application, the reaction apparatus 100 may include a reactor 101 and a temperature control device 102. A receiving space 11 may be formed within the reactor 101, which may contain multiple sheet materials (not shown). The reactor 101 may heat the receiving space 11 to heat the sheet materials. The reactor 101 may also be connected to a reaction gas, allowing the reaction gas to enter the receiving space 11, thereby enabling the reactor 101 to perform a coating process on the sheet materials.

[0025] The temperature control device 102 can monitor the temperature of the containment space 11 and trigger the reactor 101 to adjust the temperature inside the containment space 11 so that the temperature inside the containment space 11 is maintained within the temperature range required when the sheet material is coated.

[0026] In the embodiments of this application, the type of sheet material is not specifically limited. For example, the sheet material may be a silicon wafer, a silicon carbide wafer, or a silicon wafer.

[0027] In the embodiments of this application, the principle of coating sheet materials by the reactor 101 is not specifically limited. For example, the reactor 101 can achieve coating of sheet materials by processes such as chemical vapor deposition, boron diffusion, and phosphorus diffusion.

[0028] In one embodiment, the reactor 101 may include a furnace body 10 and a heating element 20. A receiving space 11 may be provided inside the furnace body 10. The heating element 20 may be disposed on the outside of the furnace body 10 and may be fixed relative to the furnace body 10.

[0029] The heating element 20 can heat the receiving space 11 by means of electric heating. For example, the heating element 20 can be a heating wire arranged around the furnace body 10.

[0030] In some embodiments, the temperature control device 102 may include a detection unit 30, a temperature acquisition unit 40, and a processing unit 50.

[0031] The number of detection units 30 can be multiple. Each detection unit 30 may include a detection element 31 and a compensating wire 32. The detection element 31 may be a thermocouple, and each detection element 31 may be fixedly connected to a corresponding compensating wire 32. Each detection element 31 may at least partially enter the containing space 11 to detect the temperature within the containing space 11 and output corresponding first detection information through the compensating wire 32.

[0032] The temperature acquisition device 40 can be installed on one side of the furnace body 10. The temperature acquisition device 40 is fixedly connected to multiple compensating wires 32. The temperature acquisition device 40 can achieve wired communication connection with multiple detection elements 31 through the multiple compensating wires 32. The temperature acquisition device 40 can receive the first detection information from the multiple detection elements 31 through the multiple compensating wires 32, and generate second detection information by summarizing and / or packaging the first detection information.

[0033] The processing unit 50 is communicatively connected to the temperature acquisition unit 40. The temperature acquisition unit 40 can output second detection information to the processing unit 50. The processing unit 50 can receive the second detection information and adjust the operation of the heating element 20 according to the second detection information, thereby adjusting the temperature within the housing space 11. The distance between the temperature acquisition unit 40 and the furnace body 10 can be less than the distance between the processing unit 50 and the furnace body 10.

[0034] In some embodiments, the temperature sensor 40 can be fixedly installed on a fixed bracket (not shown), which can be fixedly installed on the ground where the furnace body 10 is located or on a machine platform (not shown) located on one side of the furnace body 10.

[0035] In some embodiments, the furnace body 10 is a horizontal furnace, and the length direction of the furnace body 10 can be parallel to the ground or the table surface of the machine. The fixed bracket is located on one side of the furnace body 10 along the length direction.

[0036] In other embodiments, the furnace body 10 has a circular cross-section, and the fixing bracket is located on one side of the furnace body 10 in the radial direction.

[0037] In the embodiments of this application, the fixing method for fixed installation and fixed connection is not specifically limited. For example, the fixing method may include, but is not limited to, bolt fixing, screw fixing, welding fixing, integral molding fixing, and interference fixing.

[0038] In the embodiments of this application, the positional relationship between the detection element 31 and the receiving space 11 is not specifically limited.

[0039] For example, among the multiple detection units 30, some detection elements 31 can penetrate the furnace body 10, and the detection end of the detection element 31 can enter the containment space 11 to detect the temperature inside the containment space 11 as an external thermocouple; the remaining detection elements 31 can be completely encased in a metal or ceramic shell and then enter the containment space 11 to detect the temperature inside the containment space 11 as an internal thermocouple.

[0040] It is understandable that the principle by which the temperature acquisition device 40 summarizes and / or packages multiple first detection information pairs to form second detection information is a common principle in the relevant field.

[0041] For example, the detection element 31 is a thermocouple. The first detection information output by each detection element 31 can indicate the temperature difference between the cold end (e.g., the part located outside the containment space 11) and the hot end (e.g., the part located inside the containment space 11) of the detection element 31. After receiving multiple first detection information, the temperature acquisition unit 40 can directly summarize the multiple first detection information to obtain the second detection information; or, based on the ambient temperature where the reactor 101 is located and the temperature difference indicated by the multiple first detection information, it can generate temperature values ​​corresponding to the multiple first detection information respectively, and then summarize the multiple temperature values ​​to obtain the second detection information.

[0042] In some cases, the temperature acquisition unit 40 can achieve wired communication connection with the processing unit 50 via a bus. For example, the temperature acquisition unit 40 can achieve communication connection with the processing unit 50 via a 485 bus.

[0043] In other cases, the temperature sensor 40 can establish a wireless communication connection with the processing unit 50 via a wireless network port. For example, the temperature sensor 40 can establish a communication connection with the processing unit 50 via the TCP protocol.

[0044] It is understandable that staff can adaptively adjust the structure and type of the second detection information output by the temperature acquisition unit 40 according to the connection method between the processing unit 50 and the temperature acquisition unit 40.

[0045] It is understandable that since the temperature acquisition unit 40 can connect to the processing unit 50 via a bus or wireless network port, it does not need to be connected to the processing unit 50 via a compensation line; and since the temperature acquisition unit 40 is located on one side of the furnace body 10, the length of the compensation wires 32 connecting the multiple detection units 31 can be reduced. In this way, while maintaining the processing unit 50's ability to adjust the operation of the heating element 20 based on the detection results of the multiple detection units 30, thereby regulating the temperature within the containment space 11, the cost of the compensation wires 32 is reduced and the probability of interference with the information transmitted by the compensation wires 32 (such as the first detection information) is lowered. This improves the accuracy of the temperature control device 102 in receiving detection information and the accuracy of controlling the reactor 101 to regulate the temperature of the containment space 11.

[0046] In some embodiments, the temperature control device 102 may further include an adjustment unit 60. The adjustment unit 60 may be communicatively connected to the processing unit 50 and to the heating element 20. After receiving the second detection information, the processing unit 50 may output corresponding adjustment information. The adjustment information may indicate the adjustment required for the operation of the heating element 20. The processing unit 50 may output the adjustment information to the adjustment unit 60. The adjustment unit 60 may control the operation of the heating element 20 according to the adjustment information, so that the heat generated by the heating element 20 is adjusted according to the adjustment information, that is, the temperature within the receiving space 11 may be adjusted based on the detection results of multiple detection units 30.

[0047] For example, the processing unit 50 can determine the current temperature of the containment space 11 through the first detection information, and then input the current temperature into the PID algorithm and execute the PID algorithm to obtain a manipulated variable (MV), which is related to the content of the adjustment information.

[0048] The PID control algorithm is an algorithm that calculates the deviation value input to the algorithm according to the functional relationship corresponding to preset PID control parameters (such as proportional parameters, integral parameters, and derivative parameters), and obtains an operational variable result that can adjust the deviation value. In the embodiments of this application, the deviation value input to the PID algorithm can be the difference between the current temperature and the preset temperature.

[0049] It is understood that the preset temperature can be a preset value within the temperature range that the containing space 11 needs to maintain when the reaction equipment 100 processes the sheet material. For example, the preset temperature can be the midpoint of the temperature range.

[0050] It is understood that the adjustment unit 60 and the processing unit 50 can be connected via wired or wireless communication, and the embodiments of this application do not limit this.

[0051] It is understandable that, depending on the different adjustment units 60, staff can make adaptive adjustments to the content and structure of the adjustment information.

[0052] In one scenario, the regulating unit 60 can be a solid-state relay (SSR). The regulating information can be a percentage value obtained after the processing unit 50 performs TPout time-division processing on the operated variable, and the regulating information is digital.

[0053] In another scenario, the regulating unit 60 can be a silicon controlled rectifier (SCR). The content of the regulating information can be an operational variable, and the processing unit 50 can output the regulating information to the regulating unit 60 using 4-20mA analog information.

[0054] It is understood that the adjustment unit 60 and the heating element 20 can be connected by wired or wireless communication; and the adjustment unit 60 and the heating element 20 can be directly connected or indirectly connected through other electronic devices. The embodiments of this application do not limit this.

[0055] It is understandable that when an SSR or SCR is used as the adjustment unit 60, the principle by which the adjustment unit 60 adjusts the temperature of the heating environment of the heating element 20 after receiving the adjustment information can be a general principle in the relevant field, and will not be elaborated here.

[0056] In some embodiments, the processing unit 50 may be a processor 51. The processor 51 may be communicatively connected to the temperature acquisition unit 40 and the adjustment unit 60. The processor 51 may execute a PID algorithm to calculate the operating variable using the difference between the current temperature and a preset temperature.

[0057] For example, the processor 51 can establish a communication connection with the temperature acquisition unit 40 via a 485 bus or TCP protocol.

[0058] In the embodiments of this application, the type of processor 51 is not specifically limited. For example, processor 51 may be, but is not limited to, a general-purpose central processing unit (CPU), a microprocessor, a programmable logic controller (PLC), an application-specific integrated circuit (ASIC), or one or more integrated circuits used to control the execution of the above-mentioned program. For example, processor 51 may be a PLC.

[0059] It is understood that the processor 51 can store the received second detection information and / or the output adjustment information while executing the PID algorithm to obtain the operating variables, and mark the time of receipt or generation of the stored second detection information and / or adjustment information, thereby realizing the monitoring of the operation of the temperature control device 102.

[0060] It is understandable that PLCs are commonly installed in automated production equipment. When the processor 51 uses a commonly installed PLC to execute the PID algorithm to output adjustment information based on the second detection information, it can save the cost of setting up other devices to perform PID calculations; it can also reduce the number of components required for the temperature control device 102, improving the ease of installation. At the same time, since operators are more proficient in operating commonly installed PLCs than other devices, using a PLC to execute the process of generating adjustment information can improve the ease of operation for operators.

[0061] Please see Figure 2 In other embodiments, the processing unit 50 may include a temperature controller 52 and a processor 51. The temperature controller 52 may be wired to the processor 51, and the temperature controller 52 may be arranged adjacent to the processor 51 to shorten the length of the wiring harness connecting the temperature controller 52 and the processor 51. The temperature controller 52 may be communicatively connected to the temperature acquisition unit 40 and may receive second detection information; after receiving the second detection information, the temperature controller 52 may execute a PID algorithm to obtain the operating variable, and output adjustment information to the adjustment unit 60 according to the operating variable.

[0062] The temperature controller 52 can output both the received second detection information and the generated adjustment information to the processor 51. The processor 51 can store the received second detection information and / or adjustment information, and mark the time of receipt or generation of the stored second detection information and / or adjustment information, thereby realizing the monitoring of the operation of the temperature control device 102. For example, the processor 51 can be a PLC.

[0063] It is understandable that PLCs are commonly installed in automated production equipment, and PLCs can be widely used to monitor the operation of various devices. The processing unit 50 can use a PLC commonly installed in relevant scenarios to monitor the operation of the temperature control device 102. By setting the temperature controller 52 in an adjacent position to the processor 51 to execute the process of outputting adjustment information based on the second detection information, the cost of the wiring harness between the processor 51 and the temperature controller 52 can be reduced, while also reducing the need for operators to adjust the PLC program and lowering the difficulty for operators to set up the temperature control device 102 in the reaction equipment 100.

[0064] In some embodiments, the temperature control device 102 may further include an electrical cabinet, in which the temperature controller 52 and the processor 51 are both disposed.

[0065] The reaction apparatus 100 and temperature control device 102 provided in the embodiments of this application include a temperature acquisition device 40 disposed on one side of the furnace body 10. The temperature acquisition device 40 is connected to multiple detection elements 31 via multiple compensation wires 32, which reduces the length of the compensation wires 32 connecting the multiple detection elements 31. This allows the processing unit 50 to adjust the operation of the heating element 20 based on the detection results of the multiple detection units 30, thereby regulating the temperature within the containment space 11. Simultaneously, it reduces the cost of the compensation wires 32 and lowers the probability of interference with the information transmitted by the compensation wires 32 (e.g., the first detection information). This improves the accuracy of the temperature control device 102 in receiving detection information and the accuracy of controlling the reactor 101 to regulate the temperature of the containment space 11.

[0066] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments described above should be considered exemplary and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application.

Claims

1. A temperature control device, characterized in that, include: Multiple detection units, each detection unit includes a detection element and a compensation wire, each compensation wire is connected to the corresponding detection element, each detection element is used to connect to the reactor and is used to detect the temperature inside the reactor; A temperature acquisition device is provided, which is connected to multiple compensation wires to achieve communication with multiple detection devices. The temperature acquisition device is used to receive first detection information from the multiple detection devices and output second detection information. The temperature acquisition device is installed on one side of the reactor. The processing unit is communicatively connected to the temperature acquisition unit and is used to receive the second detection information.

2. The temperature control device as described in claim 1, characterized in that, The distance between the temperature acquisition device and the reactor is less than the distance between the temperature acquisition device and the processing unit.

3. The temperature control device as described in claim 1, characterized in that, The processing unit is also used to output adjustment information, and the reactor includes a heating element for heating the space inside the reactor; The temperature control device also includes: An adjustment unit is communicatively connected to the processing unit. The adjustment unit is used to connect to the heating element, receive the adjustment information, and adjust the operation of the heating element to regulate the temperature inside the reactor.

4. The temperature control device as described in claim 1, characterized in that, The processing unit is a processor, which is wired to the temperature acquisition unit via a bus or wirelessly connected to the temperature acquisition unit via the TCP protocol.

5. The temperature control device as described in claim 3, characterized in that, The processing unit includes: A temperature controller, wherein the temperature controller is wired to the temperature acquisition unit via a bus, or wirelessly connected to the temperature acquisition unit via a TCP protocol; The processor is communicatively connected to the temperature controller, and the temperature controller is used to output the second detection information and / or the adjustment information to the processor, so that the processor can monitor the operation of the temperature acquisition device and the temperature controller.

6. A reaction apparatus, characterized in that, The device includes a reactor and a temperature control device. The reactor includes a furnace body and a heating element. The heating element is connected to the furnace body. The furnace body is used to contain multiple sheet materials. The heating element is used to heat the space inside the furnace body to heat the multiple sheet materials. The temperature control device includes: Multiple detection units, each detection unit includes a detection element and a compensation wire, each compensation wire is connected to the corresponding detection element, each detection element is connected to the furnace body and is used to detect the temperature inside the furnace body; A temperature acquisition device is connected to multiple compensation wires to achieve communication with multiple detection devices. The temperature acquisition device is used to receive first detection information from the multiple detection devices and output second detection information. The temperature acquisition device is disposed on one side of the furnace body. The processing unit is communicatively connected to the temperature acquisition unit and is used to receive the second detection information.

7. The reaction apparatus as described in claim 6, characterized in that, The distance between the temperature acquisition device and the reactor is less than the distance between the temperature acquisition device and the processing unit.

8. The reaction apparatus as described in claim 6, characterized in that, The processing unit is also used to output adjustment information; the temperature control device further includes: An adjustment unit is communicatively connected to the processing unit. The adjustment unit is used to connect to the heating element, receive the adjustment information, and adjust the operation of the heating element to regulate the temperature inside the reactor.

9. The reaction apparatus as described in claim 6, characterized in that, The processing unit is a processor, which is wired to the temperature acquisition unit via a bus or wirelessly connected to the temperature acquisition unit via the TCP protocol.

10. The reaction apparatus as described in claim 8, characterized in that, The processing unit includes: A temperature controller, wherein the temperature controller is wired to the temperature acquisition unit via a bus, or wirelessly connected to the temperature acquisition unit via a TCP protocol; The processor is communicatively connected to the temperature controller, and the temperature controller is used to output the second detection information and / or the adjustment information to the processor, so that the processor can monitor the operation of the temperature acquisition device and the temperature controller.

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