Substrate bearing device

Abstract

The utility model discloses a substrate bearing device which is suitable for bearing a substrate and enabling the substrate to be immersed in a liquid tank. The substrate bearing device comprises a frame body, a movable frame, a positioning assembly and a plurality of abutting pieces. The frame body is divided into a submerging area and an operating area, and the submerging area is used for submerging into the liquid tank. And the operation area cannot be immersed into the liquid tank. The movable frame can be movably connected with the frame body. The positioning assembly is arranged in the operation area of the frame body and can be operated so that the movable frame can be switched between the abutting position and the non-abutting position. The abutting pieces are arranged on the movable frame and the frame body and used for jointly abutting against the base plate. When the positioning assembly is located at the abutting position, the multiple abutting pieces are used for abutting against the substrate. When the positioning assembly is located at the non-abutting position, the abutting piece arranged on the movable frame does not abut against the substrate any more.

Description

Technical Field

[0001] This utility model relates to a substrate carrier device, and more particularly to a substrate carrier device suitable for wet processes. Background Technology

[0002] Most common substrate carrier devices used in wet processes employ clamps to hold the substrate, allowing it to be immersed in a specific liquid bath. In this method, the area of ​​the substrate being held cannot react with the liquid in the bath, and the moving parts of the clamps immersed in the liquid are prone to reacting with the chemicals in the bath, ultimately rendering the moving parts of the clamps unusable.

[0003] In addition, when the substrate carrier holding the substrate leaves the liquid tank, some liquid remains on the clamp, and multiple residual liquids may flow onto the substrate, thereby forming tear-like marks on the substrate. Utility Model Content

[0004] This utility model discloses a substrate support device, which is mainly used to improve the problems existing in the existing substrate support devices that use clips to hold the substrate.

[0005] One embodiment of this utility model discloses a substrate carrying device suitable for carrying a substrate and immersing the substrate in a liquid tank. The substrate carrying device includes: a frame divided into an immersion area and an operation area, wherein the immersion area is immersed in the liquid tank and the operation area is not immersed in the liquid tank; at least one movable frame movably connected to the frame; at least one positioning component disposed in the operation area of ​​the frame, the positioning component being connected to the portion of the movable frame located in the operation area, the positioning component being operable to switch the movable frame between a contact position and a non-contact position; and at least one abutment member disposed in the movable frame, the abutment member being used to provide side contact of the substrate; wherein, when the positioning component is in the contact position, multiple abutment members jointly provide different side contact of the substrate; when the positioning component is in the non-contact position, the abutment member does not contact the substrate.

[0006] Optionally, multiple abutments are provided on the same side of the frame and the movable frame, and the multiple abutments are provided to protrude from the frame and the movable frame.

[0007] Optionally, the substrate carrying device includes two movable frames and two positioning components; the two movable frames are connected to the two positioning components; a plurality of abutting members are disposed on one of the movable frames for abutting one side of the substrate; a plurality of abutting members are disposed on the other movable frame for abutting the other side of the substrate.

[0008] Optionally, the frame is provided with a support member, both ends of which are fixed to the frame and the support member spans across the frame. The support member is used to divide the frame into an operating area and an insertion area. The positioning component includes: a fixed member, a movable member, and a limiting member. The two ends of the fixed member are respectively fixed to the frame and the support member. The movable member is connected to the movable frame and can be operated to move the movable frame towards or away from the frame, thereby switching the movable frame between a contact position and a non-contact position. The limiting member is connected to the movable member, a portion of which passes through the support member, and the limiting member has at least one limiting structure that can cooperate with the support member to position the movable member and the movable frame in the contact position or the non-contact position.

[0009] Optionally, the positioning assembly also includes multiple reset members, each with its two ends fixed to a movable member and a fixed member, respectively; when the movable member is operated to move toward the support member, the multiple reset members will generate a restoring force.

[0010] Optionally, the limiting member includes a column, one end of which is provided with two limiting structures, each of which is a columnar structure, and the two columnar structures are arranged alternately on the column; the fixing member has an auxiliary limiting structure and a receiving groove; the auxiliary limiting structure can engage with each of the limiting structures, and the receiving groove can accommodate each of the limiting structures; when the movable frame is in the abutting position, one of the limiting structures engages with one of the auxiliary limiting structures, while the other limiting structure is located in the receiving groove; when the movable frame is in the non-abutting position, one of the limiting structures engages with one of the auxiliary limiting structures, while the other limiting structure is located in the receiving groove.

[0011] Optionally, the abutment is made of plastic and has a groove; the abutment can be detachably fixed to an auxiliary fixing structure of the frame or an auxiliary fixing structure of the movable frame.

[0012] Optionally, multiple abutments are provided on the frame to abut against the lower edge of the substrate, and multiple abutments are provided on the movable frame to abut against the side of the substrate.

[0013] Optionally, a portion of the frame is provided to abut against the lower edge of the substrate, a portion of the frame is provided to abut against one side of the substrate, and a plurality of abutments provided on the movable frame are provided to abut against the other side of the substrate.

[0014] In summary, the substrate support device of this utility model, through the design of the frame, movable frame, positioning components and multiple abutment parts, combined with the design of the insertion area and the operation area, can effectively improve the problems existing in the existing substrate support devices that use clamps to hold substrates.

[0015] To further understand the features and technical content of this utility model, please refer to the following detailed description and drawings of this utility model. However, these descriptions and drawings are only used to illustrate this utility model and are not intended to limit the scope of protection of this utility model in any way. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the movable frame in the abutment position according to the first embodiment of the substrate support device of this utility model.

[0017] Figure 2 This is a schematic diagram of the movable frame in a non-adhesive position according to the first embodiment of the substrate support device of this utility model.

[0018] Figure 3 This is a schematic diagram of a second embodiment of the substrate carrier device of this utility model.

[0019] Figure 4 This is a schematic diagram of the movable frame in the un-aggregated position of the third embodiment of the substrate support device of this utility model.

[0020] Figure 5 This is a schematic diagram of the movable frame in the abutment position according to the third embodiment of the substrate support device of this utility model.

[0021] Figure 6 This is a partially enlarged schematic diagram of the movable frame in the non-contact position of the fourth embodiment of the substrate support device of this utility model.

[0022] Figure 7 This is a partially enlarged schematic diagram of the movable frame in the abutment position in the fourth embodiment of the substrate support device of this utility model.

[0023] Figure 8 for Figure 6 A magnified view of a portion of the image.

[0024] Figure 9 This is a schematic diagram of another embodiment of the abutment member of the substrate support device of this utility model.

[0025] Figure 10 This is a partial schematic diagram of another embodiment of the substrate carrier device of this utility model. Detailed Implementation

[0026] In the following description, if a specific drawing is indicated or shown in a specific drawing, it is only to emphasize that most of the relevant content mentioned in the following description appears in that specific drawing, but does not limit the following description to refer only to that specific drawing.

[0027] Please see Figure 1 And the picture, Figure 1The diagram shown illustrates the movable frame in the abutment position according to a first embodiment of the substrate support device of this utility model. Figure 2 The diagram shows the movable frame of the first embodiment of the substrate support device of this utility model in a non-adhesive position.

[0028] The substrate carrier device 100 of this invention is suitable for carrying a substrate A and immersing the substrate A in a liquid tank. The liquid tank can be, for example, a chemical tank in various wet processes, or it can be a cleaning tank of various kinds, without limitation. The substrate A is, for example, a circuit board, such as a rigid board or a flexible board.

[0029] The substrate support device 100 includes a frame 1, two movable frames 2, two positioning components 3, and multiple abutment members 4. In different embodiments, the substrate support device 100 may also include only a single movable frame 2 and a single positioning component 3. In practical applications, the number and position of the abutment members 4 included in the substrate support device 100 can be varied according to actual needs and are not limited to those shown in the figure.

[0030] The frame 1 can be a U-shaped structure. A support member 11 can be provided within the frame 1, with both ends of the support member 11 fixed to the inner side of the frame 1, and the support member 11 spanning across the frame 1. The support member 11 can be used to strengthen the overall structural strength of the frame 1, and the support member 11 divides the frame 1 into an operating area 1A and an insertion area 1B. The frame 1 and the support member 11 can be integrally formed, or the support member 11 can be fixed to the frame 1 by welding, screwing, or other methods.

[0031] The immersion area 1B refers to the area where the substrate carrier 100 is immersed in the liquid tank, while the operation area 1A is not immersed in the liquid tank. In other words, the components located in the operation area 1A are not immersed in the liquid tank, and the components located in the operation area 1A are not affected by the liquid in the liquid tank, thereby extending the service life of the components located in the operation area 1A.

[0032] Two movable frames 2 are movably disposed inside the frame 1, with a portion of each movable frame 2 located in the recessed area 1B and the other portion located in the operating area 1A. Each movable frame 2 can be operated to move toward or away from the frame 1.

[0033] Each positioning component 3 is located in the operating area 1A of the frame 1. Each movable frame 2 is located in the portion of the operating area 1A and is connected to each positioning component 3. Each positioning component 3 provides user operation to move the movable frame 2 to a stop position (e.g., ...). Figure 1 (as shown) and an unattached position (such as) Figure 2 Switch between (as shown).

[0034] A portion of the abutment members 4 are located in the recessed area 1B of the frame 1, at the bottom edge of the frame 1. Another portion of the abutment members 4 are located in the recessed areas 1B of the two movable frames 2. In other words, all the abutment members 4 are located in the recessed area 1B of the frame 1. The number of abutment members 4 on each movable frame 2 and their spacing, as well as the number of abutment members 4 on the frame 1 and their spacing, can be varied according to actual needs and are not limited to what is shown in the figure.

[0035] Multiple abutment members 4, disposed on one of the movable frames 2, provide abutment to one side of the substrate A; multiple abutment members 4, disposed on the other movable frame 2, provide abutment to the other side of the substrate A; multiple abutment members 4, disposed on the frame 1, provide abutment to the bottom edge of the substrate A; and multiple abutment members 4, disposed on both movable frames 2 and the frame 1, together provide abutment to three adjacent sides of the substrate A. In other words, the substrate carrying device 100 carries the substrate A through multiple abutment members 4.

[0036] like Figure 6 and Figure 7 As shown, each abutment 4 includes, for example, a groove 41. The substrate A is located within the grooves 41 of the abutments 4, but the abutments 4 do not clamp the substrate A; the substrate A merely rests against the grooves 41 of the abutments 4. Therefore, during the chemical reaction or cleaning process when the substrate A enters the liquid tank along with the substrate carrier 100, the liquid in the tank can flow through virtually all areas of the substrate A. In practice, the substrate carrier 100 can be connected to a vibrator, and during the process of the substrate carrier 100 carrying the substrate A and immersing it in the liquid tank, the vibrator can be activated to briefly detach the area of ​​the substrate A resting against the abutment 4, thus allowing the liquid to flow better through all areas of the substrate A. The specific shape of the groove 41 can be, for example, V-shaped, U-shaped, etc., and is not limited thereto.

[0037] In existing technology, the frame used to support the substrate uses clamps to hold the substrate in place. Therefore, the liquid in the liquid tank cannot flow over the area where the substrate is held by the clamps. In addition, when the substrate is held by clamps, the liquid accumulated on the clamps will flow down the substrate as it leaves a tear-like mark on the substrate.

[0038] In the substrate support device 100 of the present invention, the plurality of abutting members 4 only provide abutment for substrate A, and the abutting members 4 do not clamp substrate A. Therefore, substrate A will not have the problems existing in the prior art.

[0039] Please see Figure 3This diagram illustrates a second embodiment of the substrate support device of this invention. The biggest difference between this embodiment and the previous embodiments is that the substrate support device 100 includes only a single movable frame 2 and a single positioning component 3, and the side of the frame 1 facing the movable frame 2 is also provided with multiple abutment members 4. That is, when substrate A is placed in the substrate support device 100 of this embodiment, the lower edge and one side of substrate A abut against the grooves 41 of the multiple abutment members 4 provided in the frame 1, while the other side of substrate A abuts against the grooves 41 of the multiple abutment members 4 provided on the movable frame 2.

[0040] Please refer to the following: Figure 4 and Figure 5 , Figure 4 This is a schematic diagram of the movable frame in the un-aggregated position of the third embodiment of the substrate support device of this utility model. Figure 5 This is a schematic diagram of the movable frame in the abutment position according to the third embodiment of the substrate support device of this utility model. Figure 8 for Figure 6 A magnified view of a portion of the image.

[0041] In practical applications, each positioning component 3 includes, for example, a fixing member 31, a resetting member 34, a moving member 35, and a limiting member 36. The fixing member 31 is fixed to the support member 11 of the frame 1. The fixing member 31 includes a through hole. The moving member 35 is, for example, a rod structure. One end of the moving member 35 is connected to the movable frame 2, and a portion of the moving member 35 passes through the through hole of the fixing member 31. The end of the moving member 35 opposite to the movable frame 2 may have multiple limiting holes (e.g., through holes or screw holes). The limiting member 36 is, for example, a screw. The limiting member 36 can pass through one of the limiting holes of the moving member 35 and lock with a locking hole on the support member 11. When the limiting member 36 passes through one of the limiting holes of the moving member 35 and locks with a locking hole on the support member 11, the range of motion of the movable frame 2 will be limited, and the movable frame 2 will be restricted to either a contact position or a non-contact position. One end of the resetting member 34 is fixed to the movable frame 2, and the other end of the resetting member 34 is fixed to the frame 1. When the movable frame 2 moves relative to the frame 1, the reset member 34 will generate a restoring force. In one embodiment, the reset member 34 is, for example, a spring, but is not limited thereto; any component that can be used to reset the movable frame 2 is within the scope of what the reset member 34 can be implemented with.

[0042] like Figure 4 and Figure 5 As shown, when the user wants to move the movable shelf 2 from Figure 5 The position of contact was changed to Figure 6In the non-impact position shown, the user can remove the end of the limiting member 36 from the locking hole of the support member 11 and pull the limiting member 36 out of the limiting hole of the moving member 35, thereby allowing the movable frame 2 to move relative to the frame 1. When the movable frame 2 can move relative to the frame 1, the user can move the movable frame 2 to the non-impact position, then pass the limiting member 36 through another limiting hole of the moving member 35 and lock the end of the limiting member 36 into another locking hole of the support member 11, thereby fixing the movable frame 2 in the non-impact position.

[0043] Please refer to the following: Figures 6 to 8 , Figure 6 This is a partially enlarged schematic diagram of the movable frame in the non-contact position of the fourth embodiment of the substrate carrying device of this utility model. Figure 7 This is a partially enlarged schematic diagram of the movable frame in the abutment position in the fourth embodiment of the substrate support device of this utility model.

[0044] Each positioning component 3 may include: a fixing member 31, a movable member 32, a limiting member 33, and two resetting members 34. The two ends of the fixing member 31 are respectively fixed to the frame 1 and the support member 11. In one embodiment, the fixing member 31, the frame 1, and the support member 11 may also be integrally formed. The fixing member 31 may be, for example, a rectangular structure, and may include two movable through holes 311, each of which penetrates the rectangular structure.

[0045] The movable frame 2 is located in the portion of the operating area 1A, on one side of the fixed member 31. The movable member 32 includes, for example, a body 321 and two connecting rods 322. The body 321 is located on one side of the fixed member 31, and the movable frame 2, located in the portion of the operating area 1A, is located on the other side of the fixed member 31; that is, the two sides of the body 321 are respectively a portion of the body 321 of the movable member 32 and a portion of the movable frame 2.

[0046] One end of each connecting rod 322 is fixed to the body 321, a portion of each connecting rod 322 passes through the two movable through holes 311 of the fixing member 31, and the other end of each connecting rod 322 is fixed to the portion of the movable frame 2 located in the operating area 1A. That is, the body 321 of the movable member 32 is connected to the movable frame 2 through the two connecting rods 322, and the user can move the movable frame 2 towards or away from the frame 1 by operating the movable member 32.

[0047] The two reset members 34 can be sleeved on the two connecting rods 322, with one end of each reset member 34 fixed to the movable member 32 and the other end of each reset member 34 fixed to the fixed member 31. When the movable member 32 is operated by the user and moves towards the fixed member 31, the two reset members 34 will be compressed and elastically deformed; when the user no longer moves the movable member 32 towards the fixed member 31, the elastic restoring force generated by the compression of the reset members 34 will enable the movable member 32 to return to the unoperated position.

[0048] When the substrate carrier 100 carries the substrate A, the two movable frames 2 are in the abutting position. At this time, the three adjacent sides of the substrate A abut against the grooves 41 of the multiple abutting members 4 provided on the two movable frames 2 and the frame 1, respectively. The multiple grooves 41 can jointly restrict the range of motion of the substrate A. In this way, the substrate carrier 100 can carry the substrate A and immerse the substrate A in the liquid tank.

[0049] When the substrate carrier 100 carries the substrate A, when the user pushes the movable member 32 towards the frame 1, the movable member 32 will, through the connecting rod 322, drive the movable frame 2 to move towards the frame 1, thus moving the movable member 32 from the abutment position (e.g., Figure 7 As shown), move to the untouched position (e.g. Figure 6 As shown), at this time, the multiple abutments 4 located on the movable frame 2 will move away from the side of the substrate A, so that the side of the substrate A will no longer abut against the grooves 41 of the multiple abutments 4.

[0050] As described above, during the process of the user pushing the movable part 32 towards the frame 1, the two reset parts 34 will generate a restoring force. At this time, the user can operate the limiting part 33 to restrict the range of motion of the movable part 32 and the fixed part 31, so that the movable part 32 will not be affected by the restoring force of the reset part 34 and will return to its original position. When the user operates the movable part 32 and the limiting part 33 to make the two movable parts 32 be in the non-aggression position, the multiple abutting parts 4 located on the movable frame 2 will move away from the base plate A, and the two sides of the base plate A will no longer abut against the abutting parts 4 of the two movable frames 2. At this time, the user can easily remove the base plate A.

[0051] Conversely, when a user wants to place substrate A on substrate support device 100, the user can operate movable part 32 and limiting part 33 in sequence to fix the two movable frames 2 in the non-aggregate position. In this way, the user can easily place the lower edge of substrate A into the groove 41 of multiple abutting parts 4 provided on the frame 1.

[0052] The limiting member 33 may include, for example, a rod 331, a first limiting structure 332, and a second limiting structure 333. One end of the rod 331 is provided with the first limiting structure 332 and the second limiting structure 333, and the first limiting structure 332 and the second limiting structure 333 may each be a columnar structure. The first limiting structure 332 and the second limiting structure 333 are spaced apart from each other and are intersected at one end of the rod 331. The first limiting structure 332 and the second limiting structure 333 together form a three-dimensional structure similar to a cross.

[0053] The fixing member 31, located adjacent to one side of the movable frame 2, has an auxiliary limiting structure 312 and a receiving groove 313. The auxiliary limiting structure 312 can engage with the first limiting structure 332 and also with the second limiting structure 333. The receiving groove 313 can accommodate the first limiting structure 332 and the second limiting structure 333.

[0054] When the movable frame 2 is in the un-aggregated position, the first limiting structure 332 of the limiting member 33 can abut against the auxiliary limiting structure 312. At this time, the two reset members 34 can generate a slight restoring force. The restoring force generated by the reset members 34 will act on the movable member 32, so that the movable member 32 has a force in the direction away from the fixed member 31. This force will make the first limiting structure 332 tightly abut against the auxiliary limiting structure 312, thereby keeping the movable member 32 and the movable frame 2 connected to it in the un-aggregated position.

[0055] When the user rotates the limiting member 33 so that the first limiting structure 332 no longer abuts against the auxiliary limiting structure 312 and the first limiting structure 332 enters the receiving groove 313, the restoring force generated by the two reset members 34 will act on the movable member 32, so that the movable member 32 has a force in the direction away from the fixed member 31. This force will make the second limiting structure 333 tightly abut against the auxiliary limiting structure 312, thereby keeping the movable member 32 and the movable frame 2 connected to it in the abutting position.

[0056] As described above, through the design of the first limiting structure 332 and the second limiting structure 333 of the limiting member 33, and the auxiliary limiting structure 312 and the receiving groove 313 of the fixing member 31, in conjunction with the setting of the reset member 34, the user can easily keep the movable frame 2 in the contact position or the non-contact position according to actual needs, and the movable frame 2 will not easily change position when the user installs or removes the substrate A.

[0057] It should be noted that the components specifically included in the positioning component 3 and their interrelationships are not limited to those shown in the figure and described above. Any component that can be used to switch the movable frame 2 between the contact position and the non-contact position is within the scope of application of the positioning component 3.

[0058] It is particularly important to emphasize that all components included in the positioning assembly 3 are located in the operating area 1A of the frame 1, and none of the components in the positioning assembly 3 are immersed in the liquid tank. Therefore, even if the substrate support device 100 is used for a long time, the positioning assembly 3 will not be affected by the liquid in the tank. In other words, if the components used to move the movable frame 2 were also placed in the submerged area 1B, multiple components would be easily affected by the liquid in the tank, which could lead to problems such as reduced mobility. Furthermore, multiple components might even react chemically with the liquid, requiring additional cleaning of these components. In contrast, the positioning assembly 3 of this invention is located in the operating area 1A and is not immersed in the liquid tank; therefore, the positioning assembly 3 does not experience the aforementioned problems.

[0059] Please see Figure 9 The diagram shows another embodiment of the abutment member of the substrate support device of this utility model. In practical applications, the abutment member 4 may also include a U-shaped groove 41a.

[0060] Please see Figure 10 This is a partial schematic diagram of another embodiment of the substrate support device of this utility model. In practical applications, the frame 1 and each movable frame 2 may be provided with multiple auxiliary fixing structures 5, and each abutment 4 may be a plastic structure, and each abutment 4 may be detachably mounted on multiple auxiliary fixing structures 5. The frame 1 and the auxiliary fixing structures 5 mounted thereon may be integrally formed, for example, or the two may be fixed to each other by welding or other means. The movable frame 2 and the auxiliary fixing structures 5 mounted thereon may be integrally formed, for example, or the two may be fixed to each other by welding or other means. By designing that each abutment 4 may be detachably fixed to the auxiliary fixing structure 5, relevant personnel can replace different abutment 4 periodically or according to the characteristics of the liquid in the liquid tank, and relevant personnel can also replace abutment 4 with different shapes and depths according to the shape or thickness of the substrate A. In addition, the abutment 4 may wear out after long-term use, therefore, by designing that the abutment 4 may be detachably mounted on the auxiliary fixing structure 5, relevant personnel can also replace the abutment 4 as needed.

[0061] It is worth mentioning that, in one practical application, each of the abutment members 4 protrudes from one side of the frame 1 and the movable frame 2, and is not located inside the frame 1 or the movable frame 2. More specifically, some of the abutment members 4 are located on the movable frame 2... Figure 1 The outer side 2M parallel to the YZ plane, and the other part of the abutment 4 is set on the frame 1. Figure 1 The outer side of the substrate A is parallel to the YZ plane by 1M. This design facilitates the installation or removal of the substrate A by relevant personnel, and the user can install or remove the substrate A from either side of the substrate support device 100 as needed.

[0062] In summary, the substrate support device of this utility model, through the design of multiple abutment members, combined with the design of the insertion area, the operation area, and the positioning components, can effectively improve the problems existing in the substrate support device that uses clips to hold the substrate in the prior art.

[0063] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. Therefore, all equivalent technical changes made based on the contents of the present utility model specification and drawings are included within the protection scope of the present utility model.

Claims

1. A substrate carrier device, characterized in that, The substrate carrier is adapted to carry a substrate and immerse the substrate in a liquid tank, the substrate carrier comprising: A frame is divided into an immersion area and an operation area. The immersion area is immersed in the liquid tank, while the operation area is not immersed in the liquid tank. At least one movable frame is movably connected to the frame. At least one positioning component is disposed in the operating area of ​​the frame, the positioning component is connected to the portion of the movable frame located in the operating area, and the positioning component can be operated to switch the movable frame between a contact position and a non-contact position. At least one abutment is disposed on the movable frame, the abutment being used to provide side abutment of the substrate; When the positioning component is in the abutting position, multiple abutting members together provide abutment to different sides of the substrate; when the positioning component is in the non-abutting position, the abutting members do not contact the substrate.

2. The substrate carrier device according to claim 1, characterized in that, Multiple abutments are disposed on the same side of the frame and the movable frame, and the multiple abutments protrude from the frame and the movable frame.

3. The substrate carrier device according to claim 1, characterized in that, The substrate support device includes two movable frames and two positioning components; the two movable frames are connected to the two positioning components; a plurality of abutting members disposed on one of the movable frames are used to abut against one side of the substrate; The plurality of abutments disposed on another of the movable frames are used to abut against the other side of the substrate.

4. The substrate carrier device according to claim 1, characterized in that, The frame is provided with a support member, both ends of which are fixed to the frame and the support member spans across the frame. The support member is used to divide the frame into the operating area and the submerged area. The positioning component includes: a fixed member, a movable member, and a limiting member. Both ends of the fixed member are fixed to the frame and the support member, respectively. The movable member is connected to the movable frame and can be operated to move the movable frame towards or away from the frame, so that the movable frame switches between the contact position and the non-contact position. The limiting member is connected to the movable member, a portion of which passes through the support member, and the limiting member has at least one limiting structure that can cooperate with the support member to position the movable member and the movable frame in the contact position or the non-contact position.

5. The substrate carrier device according to claim 4, characterized in that, The positioning component also includes multiple reset members, each of which is fixed at both ends to the movable member and the fixed member respectively; when the movable member is operated to move toward the support member, the multiple reset members will generate a restoring force.

6. The substrate carrier device according to claim 4, characterized in that, The limiting member includes a column, one end of which is provided with two limiting structures, each of which is a columnar structure, and the two columnar structures are arranged alternately on the column. The fixing member has an auxiliary limiting structure and a receiving groove. The auxiliary limiting structure can engage with each of the limiting structures, and the receiving groove can accommodate each of the limiting structures. When the movable frame is in the abutting position, one of the limiting structures engages with one of the auxiliary limiting structures, while the other limiting structure is located in the receiving groove. When the movable frame is in the non-abutting position, one of the limiting structures engages with one of the auxiliary limiting structures, while the other limiting structure is located in the receiving groove.

7. The substrate carrier device according to claim 1, characterized in that, The abutment is made of plastic and has a groove; the abutment can be detachably fixed to an auxiliary fixing structure of the frame or an auxiliary fixing structure of the movable frame.

8. The substrate carrier device according to claim 1, characterized in that, The frame has a plurality of abutting members for abutting the lower edge of the substrate, and the movable frame has a plurality of abutting members for abutting the side of the substrate.

9. The substrate carrier device according to claim 1, characterized in that, The abutment members provided on the frame are used to abut against the lower edge of the substrate, the abutment members provided on the frame are used to abut against one side of the substrate, and the abutment members provided on the movable frame are used to abut against the other side of the substrate.

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