A micro-motion slit assembly for a monochromator and the monochromator

Abstract

This invention relates to the field of monochromator design technology, specifically providing a micro-motion slit assembly and monochromator for use in a monochromator. The slit plates of the micro-motion slit assembly are connected to a slit mounting plate and slidably connected to a slit base via a guide rail. A micrometer screw converts rotation into linear motion of a gap cone, and the gap cone adjusts the width of the slit between the two slit plates. The micrometer screw and gap cone enable large-range, high-precision adjustment of the slit width. This micro-motion slit assembly serves as both the output and input slit assemblies of the monochromator, and a vacuum transmission environment is provided by the housing. Spectral scanning or fixed-point wavelength output is achieved by rotating the beam splitter. This invention achieves continuous coverage of the entire 100-435nm wavelength band through vacuum design and improves the resolution adjustment accuracy of the monochromator's output light through the micro-motion slit design.

Description

Technical Field

[0001] This utility model belongs to the field of monochromator design technology, and particularly relates to a micro-motion slit assembly for a monochromator and a monochromator. Background Technology

[0002] As a fundamental spectroscopic instrument, the core function of a monochromator is to decompose polychromatic light into quasi-monochromatic light through dispersive elements. This instrument can output independent monochromatic light sequences with extremely narrow spectral widths and is widely used in spectroscopic research fields such as material composition detection and optical property characterization. Its typical structure consists of three core modules: an entrance / exit slit assembly, a dispersive system, and a motion control unit. The working principle is as follows: the composite light beam introduced through the entrance slit is dispersed by the dispersive elements, forming a spectral distribution at the focal plane of the exit end. By adjusting the spatial angle of the dispersive elements through a precision drive mechanism, specific wavelength monochromatic light is directionally output through the exit slit, thus completing the spectral scanning and monochromatic light extraction functions. Ultraviolet light with wavelengths below 250nm is strongly absorbed by the atmosphere; therefore, ultraviolet monochromators require a vacuum chamber for the optical components, allowing the optical components to perform the dispersive process in a vacuum environment during instrument operation.

[0003] Monochromator systems are primarily based on prism-based dispersive configurations, offering spectral coverage across the entire spectrum from ultraviolet to far-infrared. To adapt to the transmission characteristics of different wavelengths, specialized optical prisms are required: quartz prisms are often used to construct the optical path in the ultraviolet domain, while crystalline materials such as NaCl, LiF, or KBr are chosen for efficient dispersion in the infrared domain. However, due to the intrinsic properties of these materials, such devices face two major technical bottlenecks: firstly, the bandgap characteristics of the materials limit their applicability in the vacuum ultraviolet band; secondly, the incoherent stray light generated during dispersion is difficult to completely suppress, leading to a significant deterioration in the purity of the output spectrum and the accuracy of wavelength positioning.

[0004] The slit unit is a crucial component in a monochromator, affecting spectral resolution and energy; its sealing performance determines the overall sealing performance of the instrument. However, the vacuum chamber of a vacuum ultraviolet monochromator has a complex internal support structure and numerous through-chamber installation structures, making sealing design and system integration difficult. Furthermore, the slit unit has a limited width adjustment range and low adjustment accuracy, making it difficult to achieve sub-millimeter level precision adjustment, and it is challenging to balance high precision with vacuum dynamic sealing. Utility Model Content

[0005] In view of this, the present invention aims to provide a micro-motion slit assembly for a monochromator and a monochromator, which realizes a wide range and high-precision quantitative adjustment of the slit through a spiral micrometer and a gap cone. It is used as the exit slit assembly and entrance slit assembly of the monochromator, which effectively improves the resolution adjustment range and accuracy of the monochromator. Furthermore, its vacuum sealing effect has been specially designed to improve the dynamic sealing effect of the system.

[0006] To achieve the above objectives, the technical solution created by this utility model is implemented as follows:

[0007] This invention provides a micro-motion slit assembly for a monochromator, comprising:

[0008] Two slit plates, two slit mounting plates, two distance limiting posts, as well as a slit base, a micrometer screw, and a gap cone;

[0009] The two slit plates are respectively connected to the corresponding slit mounting plates, and the two slit mounting plates are slidably connected to the slit base;

[0010] The outer sides of the two slit mounting plates are respectively equipped with springs for pushing the two slit mounting plates closer together;

[0011] The inner sides of the two slit mounting plates are respectively provided with distance limiting posts, and the distance limiting posts are stationary relative to the slit mounting plates;

[0012] The micrometer screw is connected to the gap cone, which is located between two distance limiting posts. The cross-sectional width of the gap cone gradually changes along the axis. The micrometer screw is used to drive the gap cone to move along the centerline of the two distance limiting posts by rotation, thereby adjusting the width of the slit formed between the two slits.

[0013] Preferably, the slit mounting plate is slidably connected to the slit base via a guide rail.

[0014] Preferably, when the distance limiting post abuts at the position with the minimum width of the gap cone section, the gap width between the two slits is 0.

[0015] Preferably, the gap cone has a conical structure.

[0016] Preferably, the side of the slit base has a through hole for the extension of the micrometer screw, and at least three layers of fluororubber rings are provided between the through hole and the gap between the micrometer screw and the slit base to achieve a dynamic seal between the micrometer screw and the slit base.

[0017] Preferably, it also includes two height adjustment plates, which are slidably connected to the slit base. The height of the slit can be changed by driving the height adjustment plates to move relative to each other.

[0018] This invention also provides a monochromator, comprising:

[0019] The outer casing, which is used to provide an internal vacuum environment;

[0020] And the exit slit assembly, the entrance slit assembly, and the beam splitter are located within the housing;

[0021] Among them, the beam-splitting element can rotate along the axis;

[0022] Both the exit slit assembly and the entrance slit assembly adopt the micro-motion slit assembly used in monochromators.

[0023] Preferably, it also includes a drive unit for controlling the rotation of the beam splitter.

[0024] Preferably, the outer shell includes a vacuum chamber, the beam splitter is disposed inside the vacuum chamber, the exit slit assembly and the entrance slit assembly are disposed on the outer wall of the vacuum chamber, and the outer wall of the vacuum chamber is also provided with a vacuum pump interface for connecting a vacuum pump.

[0025] Preferably, the beam-splitting element is a concave grating.

[0026] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0027] This invention features a novel micro-motion slit assembly that innovatively uses a micrometer screw and a gap cone to adjust the slit width. It converts the high precision and large-range rotational inertia of the micrometer screw into high precision and wide-range width adjustment of the slit, enabling continuous high-precision adjustment of the slit width in a vacuum environment. Furthermore, the apex angle of the gap cone can be changed as needed, controlling the conversion coefficient between the vertical movement of the gap cone and the horizontal movement of the positioning column. This amplifies or reduces the adjustment precision of the micrometer screw, thereby controlling the slit adjustment precision and range. Using this micro-motion slit assembly as the entrance and exit slit assemblies of a monochromator, a double micro-motion slit is designed based on a single-grating fixed slit configuration. Through high-precision control of the slit width, high-precision adjustment of the monochromator's output light resolution can be achieved.

[0028] Furthermore, this invention employs a vacuum chamber design to ensure that the internal optical path transmission environment is a vacuum environment, and uses a three-layer fluororubber ring design for the micro-motion slit assembly to achieve dynamic sealing transition, effectively ensuring the sealing effect of the vacuum chamber and providing a high-quality vacuum environment for optical path transmission. This solves the problems of traditional monochromators having a small band coverage width and being unable to continuously cover the vacuum ultraviolet band, and achieves full band coverage of 100-435nm.

[0029] In addition, based on the slit width adjustment function, this utility model designs a structural component for adjusting the slit height, thereby achieving adaptation to different light sources by adjusting the slit height. Attached Figure Description

[0030] The accompanying drawings, which form part of this invention, are used to provide a further understanding of this invention. The illustrative embodiments and descriptions of this invention are used to explain this invention and do not constitute an undue limitation of this invention. In the drawings:

[0031] Figure 1This is a structural schematic diagram of the micro-motion slit assembly for a monochromator according to an embodiment of the present invention;

[0032] Figure 2 This is a structural schematic diagram of a monochromator provided according to an embodiment of the present utility model;

[0033] Figure 3 This is a schematic diagram of the working principle of a monochromator provided according to an embodiment of the present utility model.

[0034] The reference numerals in the figures include:

[0035] 1. Slit base; 2. Slit mounting plate; 3. Slit plate; 4. Upper slide rail; 5. Lower slide rail; 6. Spring; 7. Distance limiting post; 8. Micrometer screw; 9. First fluororubber ring; 10. Second fluororubber ring; 11. Third fluororubber ring; 12. Vacuum sealant; 13. Gap cone; 14. Orthogonal limiting post.

[0036] Housing 100, vacuum chamber 101, entrance slit assembly 200, exit slit assembly 300, beam splitter 400, drive unit 500, host computer 501, drive control card 502, drive motor 503, drive mechanism 504. Detailed Implementation

[0037] To make the purpose, technical solution, and advantages of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and do not constitute a limitation thereof. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of this utility model. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, some operations related to this utility model are not shown or described in the specification. This is to avoid obscuring the core parts of this utility model with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0038] It should be noted that, without conflict, the embodiments and features in the embodiments of this utility model can be combined with each other to form various implementation methods. Furthermore, the steps or actions in the method description can be rearranged or adjusted in a manner readily apparent to those skilled in the art. Therefore, the various orders in the specification and drawings are merely for the clear description of a particular embodiment and do not imply a mandatory order, unless otherwise stated that a particular order must be followed.

[0039] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0040] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0041] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0042] Please see Figure 1In one embodiment of this utility model, a micro-motion slit assembly for a monochromator is provided, comprising: a slit base 1, a slit mounting plate 2, a slit plate 3, an upper slide rail 4, a lower slide rail 5, a spring 6, a distance limiting post 7, a micrometer screw 8, a first fluororubber ring 9, a second fluororubber ring 10, a third fluororubber ring 11, vacuum sealant 12, a gap cone 13, and an orthogonal limiting post 14. Two slit plates 3 are provided, and the gap between the two slit plates 3 forms the monochromator slit. The two slit plates 3 are respectively mounted on two slit mounting plates 2, and during slit adjustment, the slit plates 3 remain relatively stationary with respect to their corresponding slit mounting plates 2.

[0043] Two slit mounting plates 2 are slidably connected to the slit base 1 via slide rails. Specifically, an upper slide rail 4 and a lower slide rail 5 are fixed on the slit base 1 in parallel. The two slit mounting plates 2 are slidably connected to the upper slide rail 4 and the lower slide rail 5 via sliders, and can slide left and right along the upper slide rail 4 and the lower slide rail 5. During the sliding process, the slit mounting plates 2 drive the slit pieces 3 to move, thereby adjusting the gap between the two slit pieces 3, that is, the slit width.

[0044] A spring 6 is installed on the outer side of each slit mounting plate 2. One end of the spring 6 abuts against the side of the slit mounting plate 2, and the other end of the spring 6 is fixed to the slit base 1. The spring 6 is in a compressed state, constantly pushing the two slit mounting plates 2 from the left and right to the middle. The elastic force design of the spring 6 needs to take into account the range of slit movement, striving to ensure uniform and stable output throughout the entire range of movement.

[0045] A distance limiting post 7 is provided on the inner side of each slit mounting plate 2, and the distance limiting post 7 is fixedly connected to the slit mounting plate 2. During the slit adjustment process, the slit mounting plate 2 and the corresponding distance limiting post 7 remain relatively stationary. The distance limiting post 7 has a cylindrical structure.

[0046] A gap cone 13 is also provided between the two distance limiting posts 7, and the top of the gap cone 13 is connected to the micrometer head 8. The micrometer head 8 is used to adjust the slit width, so a through hole is opened on the side of the slit base 1 to allow the micrometer head 8 to extend. The gap between the micrometer head 8 and the through hole should be as small as possible. Since the micro-motion slit assembly of this utility model needs to be used in a vacuum ultraviolet monochromator, it needs to have good dynamic sealing characteristics to avoid poor overall airtightness due to the micro-motion slit assembly, which would affect the vacuum degree of the monochromator. To improve the sealing degree between the micrometer head 8 and the slit base 1, three layers of sealing rings are provided between the micrometer head 8 and the through hole on the slit base 1, namely the first fluororubber ring 9, the second fluororubber ring 10, and the third fluororubber ring 11. The setting of the three fluororubber rings can ensure that there is a vacuum / atmosphere transition zone between the atmosphere and the vacuum environment. This low vacuum environment in the transition zone has a significant effect on maintaining the high vacuum degree inside the instrument. Vacuum sealant 12 is further applied to the outside of the through hole (the gap between the micrometer head 8 and the slit base 1) to achieve vacuum dynamic sealing of the micro-movement slit assembly throughout the process.

[0047] The micrometer screw head 8 converts rotational motion into linear motion. Specifically, by manually rotating the portion of the micrometer screw head 8 extending from the slit base 1, the micrometer screw head 8 converts this rotational inertia into vertical linear motion at its bottom, which in turn drives the gap cone 13 to move up and down along the centerline of the two distance limiting posts 7. A distance scale is engraved on the micrometer screw head 8; by manually rotating and adjusting the scale, the distance by which the bottom of the micrometer screw head 8 drives the gap cone 13 to move up and down can be adjusted.

[0048] The cross-sectional width of the gap cone 13 gradually changes along the axis. Typically, the gap cone 13 can be an upright or inverted cone. The distance limiting post 7, under the elastic force of the spring 6, adheres to both sides of the gap cone 13. Since the diameter of the cone varies at different heights, the slit width between the two slit plates 3 can be changed by adjusting the gap cone 13 up and down. When the distance limiting post 7 is in contact with the gap cone 13 at its minimum cross-sectional width, the slit width between the two slit plates 3 is 0. The adjustment resolution and adjustable range of the slit are related not only to the adjustable range and resolution of the micrometer head 8, but also to the size of the apex angle of the gap cone 13. The size of the apex angle of the gap cone 13 affects the conversion coefficient between the vertical movement of the gap cone 13 and the horizontal movement of the distance limiting post 7, thus amplifying or reducing the adjustment accuracy of the micrometer head 8.

[0049] In addition, an orthogonal limiting post 14 is provided on the inner side of each slit mounting plate 2. The orthogonal limiting post 14 mainly ensures that the slit mounting plate 2 is always orthogonally perpendicular to the upper slide rail 4 and the lower slide rail 5, thereby ensuring the parallelism of the two slit pieces 3 during left and right movement and preventing the slit opening from tilting. The rotation of the micrometer screw 8 drives the gap cone 13 to move up and down, thereby adjusting the distance between the two limiting posts 7 and pushing the slit mounting plate 2 to move left and right along the upper slide rail 4 and the lower slide rail 5. The slit width between the two slit pieces 3 on the slit mounting plate 2 also changes continuously accordingly. The three-layer fluororubber ring and vacuum sealant 12 seal the gap between the high-precision micrometer screw 8 and the slit base 1, realizing the high-vacuum dynamic sealing of the micro-moving slit assembly throughout the process.

[0050] As an optional embodiment, two height adjustment plates are also installed on the slit base 1. The two height adjustment plates are slidably connected to the slit base 1 and are respectively located on the upper and lower sides of the slit. By driving the two height adjustment plates to move relative to each other, i.e., move closer or further away, the height of the slit can be changed, which is convenient for adapting to different incident light sources.

[0051] Based on the aforementioned micro-motion slit assembly for monochromators, please refer to Figure 2 This invention also proposes a monochromator covering the entire 100-435nm wavelength range, comprising a housing 100, an entrance slit assembly 200, an exit slit assembly 300, a beam splitter 400, and a drive unit 500. The housing 100 has a semi-vacuum, semi-atmospheric structure design, with a vacuum chamber 101 at the top and a mechanical support frame at the bottom, directly exposed to air. The vacuum chamber 101 provides a vacuum environment for optical transmission, facilitating the monochromator's application in the vacuum ultraviolet band. Two light-transmitting windows are provided on the outer wall of the vacuum chamber 101 for mounting the entrance slit assembly 200 and the exit slit assembly 300, respectively. In this invention, both the entrance slit assembly 200 and the exit slit assembly 300 employ the aforementioned micro-motion slit assembly used in monochromators to achieve slit adjustment. The beam splitter 400 uses a concave grating and is driven by a rotating shaft. The upper end of the rotating shaft is connected to the beam splitter 400, and the lower end is connected to the drive unit 500. The rotating shaft passes through the vacuum chamber 101 and has a dynamic sealing design at the part in contact with the vacuum chamber 101 to ensure the airtightness of the vacuum chamber 101.

[0052] In addition, the vacuum chamber 101 also includes a vacuum pump interface and an assembly / adjustment window. The assembly / adjustment window facilitates system integration, and after integration, it is sealed with a vacuum cover plate. Maintenance and replacement of components within the vacuum chamber 101 can also be achieved through the assembly / adjustment window. The vacuum pump interface is used to connect a vacuum pump, which is used to evacuate the vacuum chamber 101, creating a vacuum region in the optical path area.

[0053] The monochromator of this invention adopts a single-grating fixed-slit configuration. During spectral scanning or fixed-point wavelength output, the positions of the entrance slit assembly 200 and the exit slit assembly 300 remain fixed. Spectral scanning or output wavelength adjustment is achieved by rotating the beam splitter 400, and the angle between the incident and exit rays is a fixed value. The beam splitter 400 is driven by the drive unit 500 to change its spatial angle. The control unit 500 includes a host computer 501, a drive control card 502, a drive motor 503, and a drive structure 504. The host computer 501 stores computer program control instructions. During application, control information is output to the host computer 501 manually or automatically. The host computer 501 outputs control commands to the drive motor 503 through the drive control card 502, controlling the drive motor 503 to move. The drive motor 503 is connected to the beam splitter 400 through the drive structure 504. The drive motor 503 drives the beam splitter 400 to rotate through the drive structure 504 to complete the spectral scanning and fixed-point wavelength output.

[0054] When the monochromator is working, the vacuum system is first started, and the vacuum pump is used to evacuate the inside of the vacuum chamber 101 until the vacuum level inside the vacuum chamber 101 reaches 10. -5 After Pa, the conditions for spectral dispersion are met. An external light source for providing polychromatic light is opened and placed on the entrance slit assembly 200. The incident light emitted from this source enters the vacuum chamber 101 through the entrance slit and illuminates the spectroscopic element 400. The spectroscopic element 400 diffracts and disperses the incident light, forming a continuous spectral band at the position of the exit slit assembly 300. Based on the required monochromatic light band, the host computer 501 issues a command, and the control unit 500 drives the spectroscopic element 400 to rotate. Light of different wavelengths in the spectral band sequentially exits through the exit slit. When the spectroscopic assembly 400 rotates to a specific angle, the desired preset wavelength monochromatic light exits from the exit slit, thus realizing the process of obtaining monochromatic light from polychromatic light.

[0055] According to the requirements for monochromatic light resolution, the entrance slit assembly 200 and the exit slit assembly 300 can be adjusted. By changing the corresponding entrance slit and exit slit, the resolution of the monochromator can be adjusted, thereby balancing the resolution and signal intensity of the output monochromatic light.

[0056] In summary, the above description is merely a preferred embodiment of this specification and is not intended to limit the scope of protection of this specification. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this specification should be included within the scope of protection of this specification.

[0057] The systems, apparatuses, modules, or units described in one or more of the above embodiments may be implemented by a computer chip or entity, or by a product having a certain function. A typical implementation device is a computer. Specifically, a computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smartphone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or any combination of these devices.

[0058] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0059] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.

Claims

1. A micro-motion slit assembly for a monochromator, characterized in that, include: Two slit plates, two slit mounting plates, two distance limiting posts, as well as a slit base, a micrometer screw, and a gap cone; The two slit plates are respectively connected to the corresponding slit mounting plates, and the two slit mounting plates are slidably connected to the slit base; The outer sides of the two slit mounting plates are respectively provided with springs for pushing the two slit mounting plates closer together; The inner sides of the two slit mounting plates are respectively provided with distance limiting posts, and the distance limiting posts are stationary relative to the slit mounting plates; The micrometer screw is connected to the gap cone, which is located between the two distance limiting posts. The cross-sectional width of the gap cone gradually changes along the axis. The micrometer screw is used to drive the gap cone to move along the centerline of the two distance limiting posts by rotation, thereby adjusting the width of the slit formed between the two slit plates.

2. The micromotion slit assembly for a monochromator of claim 1, wherein, The slit mounting plate is slidably connected to the slit base via a guide rail.

3. The micromotion slit assembly for a monochromator of claim 1, wherein, When the distance limiting post abuts against the minimum position of the gap cone cross-section, the gap width between the two slits is 0.

4. The micromotion slit assembly for a monochromator of claim 1, wherein, The gap cone has a conical structure.

5. The micromotion slit assembly for a monochromator of claim 1, wherein, The slit base has a through hole on its side for the extension of the micrometer screw, and at least three layers of fluororubber rings are provided between the through hole and the gap between the micrometer screw and the slit base to achieve a dynamic seal between the micrometer screw and the slit base.

6. The micromotion slit assembly for a monochromator of claim 1, wherein, It also includes two height adjustment plates, which are slidably connected to the slit base. The height of the slit can be changed by driving the height adjustment plates to move relative to each other.

7. A monochromator characterized by include: The outer casing, which is used to provide an internal vacuum environment; And the exit slit assembly, the entrance slit assembly, and the beam splitter are located within the housing; The beam splitter can rotate along the axis; Both the exit slit assembly and the entrance slit assembly employ the micro-motion slit assembly for a monochromator as described in any one of claims 1 to 6.

8. The monochromator according to claim 7, characterized in that, Also includes: A drive unit for controlling the rotation of the beam splitter.

9. The monochromator of claim 7, wherein, The outer shell includes a vacuum chamber, the beam splitter is located inside the vacuum chamber, the exit slit assembly and the entrance slit assembly are located on the outer wall of the vacuum chamber, and a vacuum pump interface is also provided on the outer wall of the vacuum chamber for connecting a vacuum pump.

10. The monochromator of claim 7, wherein, The beam splitter is a concave grating.

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