A new condensing system for ultra-pure ammonia gas

Abstract

The utility model relates to a novel condensing system for ultrapure ammonia gas, including buffer module, condensing module, analysis module, recovery module, exhaust module and pressure relief module. Its advantage lies in, through setting buffer module between ammonia gas source and condensing module, make buffer module can buffer ammonia gas that enters the condensing module, can solve the unstable situation of ammonia gas pressure that enters the condensing module, avoid ammonia gas pressure to increase suddenly and drop suddenly, provide more stable and continuous gas source for condensing module, thereby avoid the danger that the pressure in pipeline increases suddenly for a short time, through setting analysis module in buffer module, thereby can analyze ammonia gas that enters buffer module, judge whether ammonia gas is contaminated, thereby deliver the ammonia gas that reaches the standard to condensing module, deliver the ammonia gas that is contaminated to exhaust module, through setting recovery module, for the liquid ammonia or ammonia gas that is contaminated in buffer module carries out recovery, still for too much liquid ammonia carries out recovery.

Description

Technical Field

[0001] This utility model relates to the field of condensation technology in NH3 purification processes, and in particular to a novel condensation system for ultrapure ammonia. Background Technology

[0002] Ultrapure ammonia is the main material for silicon nitride masking films in microelectronics. Adding trace amounts of impurity elements to pure semiconductor products can cause a huge change in the resistivity of the products. Therefore, the semiconductor industry has extremely high requirements for the purity of chemical materials.

[0003] In the prior art, Chinese utility model patent (CN218248580U) discloses an ultrapure ammonia distillation device, including a distillation kettle shell, a heating box, a receiving box, a stirring mechanism, and a condensation assembly. The main principle of this device is to pump ammonia gas to a condenser block, where the condenser block condenses the ammonia gas flowing through it. A U-shaped tube in the condenser block has an opening at its bottom to receive the gas through a manifold and valve. The condensed liquid ammonia then flows through a collection pipe to a finished product collection box. However, this solution has the following drawbacks:

[0004] 1) The existing technical solution does not have detection and analysis functions. Ammonia / water may be contaminated at various stages of condensation. Without detection and analysis functions, it is impossible to detect contaminated liquid ammonia in real time, and it is also impossible to know whether the finished liquid ammonia has been contaminated.

[0005] 2) The existing technical solution does not have the function of recovering contaminated liquid ammonia / ammonia gas and treating tail gas. If the contaminated liquid ammonia / ammonia gas cannot be recovered or discharged, it will lead to contamination of the finished product tank.

[0006] 3) The existing technical solution uses a pump to transport ammonia gas. Pump transport is pulsed, which may result in instantaneous excessive pressure, posing a potential risk to the system.

[0007] 4) The existing technical solution lacks pressure detection and pressure relief functions. Liquid ammonia is prone to vaporization. If some special circumstances occur, the system pressure may become too high, which is dangerous.

[0008] Currently, no effective solutions have been proposed for the problems existing in the relevant technologies, such as the inability to determine whether ammonia / water is contaminated at each stage of condensation, the inability to recover or discharge contaminated ammonia, and the possibility of instantaneous excessive pressure in pipelines during ammonia transportation. Utility Model Content

[0009] The purpose of this invention is to address the shortcomings of existing technologies by providing a novel condensation system for ultrapure ammonia, thereby solving problems such as the inability to determine whether ammonia / water is contaminated at each stage of condensation, the inability to recover or discharge contaminated ammonia, and the potential for instantaneous excessive pressure in pipelines during ammonia transport.

[0010] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0011] This utility model provides a novel condensation system for ultrapure ammonia, comprising:

[0012] A buffer module, which is connected to an ammonia source, is used to acquire and buffer ammonia.

[0013] A condensation module, which is connected to the buffer module, is used to condense ammonia gas to obtain liquid ammonia.

[0014] An analysis module, which is connected to the buffer module, is used to analyze ammonia gas;

[0015] A recovery module, which is connected to the buffer module, is used to recover liquid ammonia and ammonia gas;

[0016] A waste discharge module, which is connected to the buffer module, is used to discharge waste gas from the buffer module;

[0017] A pressure relief module, which is connected to the buffer module, is used to relieve pressure when the pressure in the buffer module reaches a preset pressure threshold.

[0018] An evaporation module, which is connected to the condensation module, the analysis module, the recovery module, the waste discharge module, and the pressure relief module, is used to acquire and transfer liquid ammonia to the finished product tank.

[0019] In some embodiments, the buffer module includes:

[0020] A buffer component is connected to an ammonia source, a condensation module, an analysis module, a recovery module, a waste discharge module, and a pressure relief module, respectively, and is used to obtain ammonia, buffer ammonia, and transfer ammonia to the condensation module;

[0021] A first heating component, which is connected to the buffer component, is used to heat and vaporize the liquid ammonia generated by the condensation of ammonia gas in the buffer component.

[0022] In some embodiments, the buffer module further includes:

[0023] A liquid level monitoring component is disposed in the buffer component and is used to monitor the liquid ammonia level in the buffer component.

[0024] In some embodiments, the condensation module includes:

[0025] A condensation component, which is connected to and located downstream of the buffer module, is used to condense ammonia gas to obtain liquid ammonia.

[0026] In some embodiments, the analysis module includes:

[0027] A first analysis component, which is connected to the buffer module, is used to analyze the ammonia gas in the buffer module.

[0028] In some embodiments, the analysis module further includes:

[0029] The second analysis component is disposed in the evaporation module and is used to analyze the liquid ammonia in the evaporation module.

[0030] In some embodiments, the recycling module includes:

[0031] The first recovery component connects the buffer module to the recovery tank and is used to recover the liquid ammonia in the buffer module;

[0032] The second recovery component connects the buffer module to the primary condensation system and the tertiary condensation system, and is used to recover ammonia gas in the buffer module.

[0033] In some embodiments, the recycling module further includes:

[0034] The third recovery component connects the evaporation module to the recovery tank and is used to transport the liquid ammonia in the evaporation module to the recovery tank.

[0035] The fourth recovery component connects the evaporation module to the primary condensation system and the tertiary condensation system, and is used to transport the gas from the evaporation module to the primary condensation system or the tertiary condensation system.

[0036] In some embodiments, the recycling module further includes:

[0037] A first pressure monitoring component is disposed in the pipeline connected to the second recovery component and is used to monitor the pressure of the pipeline.

[0038] In some embodiments, the waste discharge module includes:

[0039] The first waste discharge component connects the buffer module to the exhaust gas treatment tank and is used to discharge the contaminated ammonia gas from the buffer module.

[0040] In some embodiments, the waste discharge module further includes:

[0041] The second waste discharge component connects the pipeline between the evaporation module and the finished product tank to the tail gas treatment pool, and is used to discharge the contaminated ammonia gas in the pipeline.

[0042] In some embodiments, the pressure relief module includes:

[0043] A first pressure relief component, which is connected to the buffer module, is used to relieve pressure when the pressure in the buffer module reaches a preset pressure threshold.

[0044] In some embodiments, the pressure relief module further includes:

[0045] A second pressure monitoring component is installed in a pipeline connected to the buffer module to monitor the pressure within the pipeline.

[0046] In some embodiments, the pressure relief module further includes:

[0047] The second pressure relief component is connected to the evaporation module and is used to relieve pressure when the pressure of the evaporation module reaches a preset pressure threshold.

[0048] The third pressure relief component is connected to the pipeline between the evaporation module and the finished product tank, and is used to relieve pressure when the pressure in the pipeline reaches a preset pressure threshold.

[0049] In some embodiments, the pressure relief module further includes:

[0050] A third pressure monitoring component is installed in the pipeline connected to the evaporation module and is used to monitor the pressure of the evaporation module and the pipeline.

[0051] In some of these embodiments, it also includes:

[0052] A purging module, which is connected to the evaporation module, is used to purge the evaporation module and pipelines.

[0053] In some embodiments, the purging module includes:

[0054] A first purging assembly is connected to the input pipeline of the evaporation module and is used to purge the evaporation module.

[0055] The second purging assembly is connected to the output pipeline of the evaporation module and is used to purge the entire device.

[0056] In some embodiments, the purging module further includes:

[0057] A fourth pressure monitoring component is disposed in a pipeline that is connected to the first purging component and the second purging component respectively, and is used to monitor the pressure of the pipeline.

[0058] The present invention adopts the above technical solution and has the following technical effects compared with the prior art:

[0059] 1. A buffer module is installed between the ammonia source and the condensation module. This buffer module can buffer the ammonia entering the condensation module, which can solve the problem of unstable ammonia pressure entering the condensation module, avoid rapid increases and decreases in ammonia pressure, and provide a more stable and continuous gas source for the condensation module, thereby avoiding the danger caused by short-term pressure surges in the pipeline.

[0060] 2. An analysis module is set up in the buffer module to analyze the ammonia gas entering the buffer module, determine whether the ammonia gas is contaminated, and then send the qualified ammonia gas to the condensation module and the contaminated ammonia gas to the waste discharge module.

[0061] 3. By setting up a recovery module, liquid ammonia is transferred to the recovery tank when the liquid ammonia in the buffer module is contaminated or when there is too much liquid ammonia in the buffer module. It is also used to transfer the contaminated ammonia in the buffer module to the primary condensation system or the tertiary condensation system.

[0062] 4. By setting up a pressure relief module, pressure is released when the pressure in the buffer module and pipeline exceeds the preset pressure, ensuring the safety of the entire device. Attached Figure Description

[0063] Figure 1 This is a schematic diagram of the framework of a novel condensation system according to an embodiment of the present utility model (I);

[0064] Figure 2 This is a schematic diagram of a buffer module according to an embodiment of the present utility model;

[0065] Figure 3 This is a schematic diagram of the condensation module and the analysis module according to an embodiment of the present utility model;

[0066] Figure 4 This is a schematic diagram of the recycling module and the waste discharge module according to an embodiment of the present utility model;

[0067] Figure 5 This is a schematic diagram of a pressure relief module according to an embodiment of the present utility model;

[0068] Figure 6 This is a schematic diagram of an evaporation module according to an embodiment of the present utility model;

[0069] Figure 7This is a schematic diagram (II) of the framework of a novel condensation system according to an embodiment of the present utility model;

[0070] Figure 8 This is a schematic diagram of the purging module according to an embodiment of the present utility model;

[0071] Figure 9 This is a specific embodiment of the novel condensation system according to the present utility model.

[0072] The reference numerals in the attached drawings are as follows: 100, buffer module; 110, buffer assembly; 120, first heating assembly; 130, first valve assembly; 140, second valve assembly; 150, liquid level monitoring assembly;

[0073] 200. Condensation module; 210. Condensation assembly;

[0074] 300. Analysis Module; 310. First Analysis Component; 320. Second Analysis Component;

[0075] 400. Recovery module; 410. First recovery component; 420. Second recovery component; 430. Third valve assembly; 440. Fourth valve assembly; 450. First pressure monitoring component; 460. Third recovery component; 470. Fourth recovery component; 480. Ninth valve assembly; 490. Tenth valve assembly;

[0076] 500. Waste discharge module; 510. First waste discharge assembly; 520. Fifth valve assembly; 530. Second waste discharge assembly; 540. Eleventh valve assembly;

[0077] 600, Pressure relief module; 610, First pressure relief assembly; 620, Sixth valve assembly; 630, Second pressure monitoring assembly; 640, Second pressure relief assembly; 650, Third pressure relief assembly; 660, Twelfth valve assembly; 670, Thirteenth valve assembly; 680, Third pressure monitoring assembly;

[0078] 700. Evaporation module; 710. Evaporation assembly; 720. Second heating assembly; 730. Seventh valve assembly; 740. Eighth valve assembly;

[0079] 800, Purge module; 810, First purge assembly; 820, Second purge assembly; 830, Fourteenth valve assembly; 840, Fifteenth valve assembly; 850, Fourth pressure monitoring assembly. Detailed Implementation

[0080] To make the objectives, technical solutions, and advantages of this application clearer, the application is described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0081] Obviously, the accompanying drawings described below are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without any inventive effort. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, any changes to design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as insufficient disclosure of the content of this application.

[0082] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0083] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms “a,” “an,” “an,” “the,” and similar words used in this application do not indicate quantity limitation and may indicate singular or plural. The terms “comprising,” “including,” “having,” and any variations thereof used in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or device that includes a series of steps or modules (modules) is not limited to the listed steps or modules but may also include steps or modules not listed, or may include other steps or modules inherent to these processes, methods, products, or devices. The terms “connected,” “linked,” “coupled,” and similar words used in this application are not limited to physical or mechanical connections but may include electrical connections, whether direct or indirect. “Multiple” used in this application refers to two or more. “And / or” describes the relationship between related objects, indicating that three relationships may exist; for example, “A and / or B” can represent: A alone, A and B simultaneously, and B alone. The character " / " generally indicates that the preceding and following objects are in an "or" relationship. The terms "first," "second," and "third" used in this application are merely to distinguish similar objects and do not represent a specific ordering of the objects.

[0084] Example 1

[0085] This embodiment relates to a novel condensation system of this utility model.

[0086] An illustrative embodiment of this utility model, such as Figure 1 As shown, a novel condensation system for ultrapure ammonia includes a buffer module 100, a condensation module 200, an analysis module 300, a recovery module 400, a waste discharge module 500, a pressure relief module 600, and an evaporation module 700. The system comprises the following modules: a buffer module 100 connected to an ammonia source for acquiring and buffering ammonia; a condensation module 200 connected to a buffer module 100 for condensing ammonia to obtain liquid ammonia; an analysis module 300 connected to a buffer module 100 for analyzing ammonia; a recovery module 400 connected to a buffer module 100 for recovering liquid ammonia and ammonia gas; a waste discharge module 500 connected to a buffer module 100 for discharging waste gas from the buffer module 100; a pressure relief module 600 connected to a buffer module 100 for releasing pressure when the pressure in the buffer module 100 reaches a preset pressure threshold; and an evaporation module 700 connected to the condensation module 200, analysis module 300, recovery module 400, waste discharge module 500, and pressure relief module 600 for acquiring and transferring liquid ammonia to the finished product tank.

[0087] like Figure 2As shown, the buffer module 100 includes a buffer component 110 and a first heating component 120. The buffer component 110 is connected to an ammonia source, a condensation module 200, an analysis module 300, a recovery module 400, a waste discharge module 500, and a pressure relief module 600, respectively, and is used to obtain ammonia, buffer ammonia, and transfer ammonia to the condensation module 200. The first heating component 120 is connected to the buffer component 110 and is used to heat and vaporize the liquid ammonia condensed from the ammonia in the buffer component 110.

[0088] It should be noted that the buffer component 110 can buffer the ammonia gas entering the condensing module 200, which can solve the problem of unstable ammonia gas pressure entering the condensing module 200, avoid rapid increase and decrease of ammonia gas pressure, provide a more stable and continuous gas source for the condensing module 200, and thus avoid the danger caused by a short-term pressure surge in the pipeline.

[0089] It should be noted that after ammonia enters the buffer assembly 110, the ammonia may condense into liquid and deposit at the bottom of the buffer assembly 110 due to heat exchange. The first heating assembly 120 can vaporize the liquid ammonia at the bottom of the buffer assembly 110, which can reduce the occurrence of a large amount of liquid ammonia depositing at the bottom of the buffer assembly 110.

[0090] It should be noted that the buffer assembly 110 is connected to the ammonia source via an inlet pipe. There can be several inlet pipes, connected in parallel. The number of inlet pipes can be set according to the ammonia input rate, and no further restrictions are imposed here. It should be noted that the number of inlet pipes can be 2, 3, 4, etc.

[0091] Specifically, the buffer assembly 110 includes a buffer tank, a first buffer port, a second buffer port, a third buffer port, a fourth buffer port, a fifth buffer port, and a sixth buffer port. The first buffer port is located on the side of the buffer tank and is connected to an ammonia source (i.e., a purification device); the second buffer pipe is located at the top of the buffer tank and is connected to a condensation module 200; the third buffer port is located on the side of the buffer tank and is connected to an analysis module 300; the fourth buffer port is located on the side of the buffer tank and is connected to a first heating assembly 120 for supplying liquid ammonia to the first heating assembly 120; the fifth buffer port is located on the side of the buffer tank and is connected to the first heating assembly 120 for receiving ammonia gas supplied by the first heating assembly 120; and the sixth buffer port is located at the bottom of the buffer tank and is connected to a recovery module 400.

[0092] It should be noted that the number of first buffer ports matches the number of intake pipes. Generally, the number of first buffer ports equals the number of intake pipes, meaning there is a one-to-one correspondence between the first buffer ports and the intake pipes. It should also be noted that the number of first buffer ports can be 2, 3, 4, etc.

[0093] Specifically, the first heating assembly 120 includes a first heating element, a first heating pipe, and a second heating pipe. The two ends of the first heating pipe are connected to a fourth buffer port and the first heating element, respectively; the pipe of the second heating pipe is connected to a fifth buffer port and the first heating element, respectively.

[0094] In some of these embodiments, the first heating element includes, but is not limited to, a heater.

[0095] In some embodiments, the first heating pipe and the second heating pipe include, but are not limited to, an INS pipe. Further, the buffer module 100 also includes a first valve assembly 130. The first valve assembly 130 is disposed in the pipe connecting the ammonia source and the buffer module 100, and is used to control the opening or closing of the connection between the ammonia source and the buffer module 100.

[0096] It should be noted that the first valve assembly 130 is located in the intake pipe.

[0097] In some embodiments, the first valve assembly 130 includes a first manual diaphragm valve. The first manual diaphragm valve is located in the intake line and is used to open or close the connection between the ammonia source and the buffer assembly 110.

[0098] It should be noted that the number of first manual diaphragm valves matches the number of intake pipes. Generally, the number of first manual diaphragm valves equals the number of intake pipes, meaning there is a one-to-one correspondence between the first manual diaphragm valves and the intake pipes. It should also be noted that the number of first manual diaphragm valves can be 2, 3, 4, etc.

[0099] Furthermore, the buffer module 100 also includes a second valve assembly 140. The second valve assembly 140 is disposed in the pipeline connecting the buffer assembly 110 and the first heating assembly 120, and is used to control the opening or closing of the buffer assembly 110 and the first heating assembly 120.

[0100] Specifically, the second valve assembly 140 includes a second manual diaphragm valve and a third manual diaphragm valve. The second manual diaphragm valve is located in the first heating pipeline and is used to open or close the connection between the buffer assembly 110 and the first heating element; the third manual diaphragm valve is located in the second heating pipeline and is used to open or close the connection between the buffer assembly 110 and the first heating element.

[0101] Furthermore, the buffer module 100 also includes a liquid level monitoring component 150. The liquid level monitoring component 150 is disposed in the buffer component 110 and is used to monitor the liquid ammonia level inside the buffer component 110.

[0102] Specifically, the liquid level monitoring component 150 is located at the bottom of the side wall of the buffer component 110, and is used to control the recovery module 400 to open when the liquid ammonia in the buffer component 110 reaches a preset volume, so as to recover the liquid ammonia in the buffer component 110 into the recovery tank.

[0103] By setting up the liquid level monitoring component 150, the volume of liquid ammonia at the bottom of the buffer component 110 can be monitored. If there is too much liquid ammonia in the buffer component 110, the system controls the recovery module 400 to open and recover the excess liquid ammonia at the bottom of the buffer component 110 into the recovery tank.

[0104] In some of these embodiments, the level monitoring component 150 includes, but is not limited to, a level gauge.

[0105] Furthermore, the pressure relief module 600 also includes a second pressure monitoring component 630. The second pressure monitoring component 630 is disposed in a pipeline connected to the buffer component 110 and is used to monitor the pressure in the pipeline.

[0106] Specifically, the second pressure monitoring component 630 includes a first pressure gauge and a first pressure sensor. The first pressure gauge and the first pressure sensor are disposed in a pipeline connected to the buffer component 110.

[0107] It should be noted that if the pressure in the buffer component 110 monitored by the second pressure monitoring component 630 exceeds 1.3 MPa, the system can activate the device's early warning module to issue an early warning; if the pressure in the buffer component 110 monitored by the second pressure monitoring component 630 exceeds 1.5 MPa, the system will open the pressure relief module 600 to relieve pressure on the buffer component 110 and pipelines, ensuring the safety of the overall device.

[0108] In addition, the second pressure monitoring component 630 also includes a sixth manual diaphragm valve. The fourth manual diaphragm valve is located in the pipeline connected to the second pressure monitoring component 630 and is used to open or close the connection between the second pressure monitoring component 630 and the buffer component 110.

[0109] By setting a second pressure monitoring component 630, the pressure in the buffer component 110 is monitored in real time. If the pressure in the buffer component 110 and the pipeline is too high, the system can open the pressure relief module 600 to relieve the pressure in the buffer component 110 and the pipeline, thereby ensuring the safety of the entire device.

[0110] like Figure 3As shown, the condensation module 200 includes a condensation component 210. The condensation component 210 is connected to and located downstream of the buffer module 100, and is used to condense ammonia gas to obtain liquid ammonia.

[0111] Specifically, the condensation component 210 is connected to the buffer component 110 and is located downstream of the buffer component 110.

[0112] Specifically, the condensation assembly 210 includes a condenser element, a first condensation pipe, and a second condensation pipe. The first end of the first condensation pipe is connected to the condenser element, and the second end of the first condensation pipe is connected to the second buffer port of the buffer assembly 110. The first end of the second condensation pipe is connected to the condenser element, and the second end of the second condensation pipe is connected to the finished product tank, used for filling the tank with liquid ammonia.

[0113] In some of these embodiments, the condensing element includes, but is not limited to, a condenser.

[0114] In some embodiments, the first condenser line and the second condenser line include, but are not limited to, the INS line.

[0115] like Figure 3 As shown, the analysis module 300 includes a first analysis component 310. The first analysis component 310 is connected to the buffer module 100 and is used to analyze the ammonia gas in the buffer module 100.

[0116] Specifically, the first analysis component 310 is connected to the buffer component 110 and is used to analyze the ammonia gas in the buffer component 110.

[0117] Specifically, the first analysis component 310 includes a first analysis element and a first analysis pipeline. The first end of the first analysis pipeline is connected to the third buffer port of the buffer component 110, and the second end of the first analysis pipeline is connected to the first analysis element.

[0118] It should be noted that the first analysis component 310 can detect the purity of ammonia in the buffer component 110. That is, if the purity of ammonia in the buffer component 110 meets the standard, the ammonia can be transported to the condensation component 210 for condensation. If the purity of ammonia in the buffer component 110 does not meet the standard, the ammonia can be recovered to the three-stage condensation system through the recovery module 400.

[0119] In some of these embodiments, the first analytical element includes, but is not limited to, a purity analyzer.

[0120] In some of these embodiments, the first analysis line includes, but is not limited to, an INS tube.

[0121] Furthermore, the analysis module 300 also includes a second analysis component 320. The second analysis component 320 is disposed in the evaporation module 700 and is used to analyze the liquid ammonia in the evaporation module 700.

[0122] Specifically, the second analysis component 320 is disposed in the evaporation component 710 and is used to analyze the liquid ammonia in the evaporation component 710.

[0123] Specifically, the second analytical assembly 320 includes a second analytical element and a second analytical pipeline. The first end of the second analytical pipeline is connected to the second evaporation port, and the second end of the second analytical pipeline is connected to the second analytical element.

[0124] It should be noted that the second analysis component 320 can detect the purity of the liquid ammonia in the evaporation component 710. That is, if the purity of the liquid ammonia in the evaporation component 710 meets the standard, the liquid ammonia can be transferred to the finished product tank; if the purity of the liquid ammonia in the evaporation component 710 does not meet the standard, the system starts the second heating component 720 to heat and vaporize the liquid ammonia in the evaporation component 710, and transfers the vaporized liquid ammonia to the primary condensation system and the tertiary condensation system for condensation; in addition, if there is too much liquid ammonia in the evaporation component 710, the liquid ammonia in the evaporation component 710 can also be transferred to the recovery tank.

[0125] In some of these embodiments, the second analytical element includes, but is not limited to, a purity analyzer.

[0126] In some of these embodiments, the second analysis line includes, but is not limited to, an INS tube.

[0127] It should be noted that the number of second analytical components 320 is matched with the number of evaporation components 710. Generally, the number of second analytical components 320 is equal to the number of evaporation components 710, that is, there is a one-to-one correspondence between the second analytical components 320 and the evaporation components 710.

[0128] like Figure 4 As shown, the recovery module 400 includes a first recovery component 410 and a second recovery component 420. The first recovery component 410 connects the buffer module 100 to the recovery tank and is used to recover liquid ammonia in the buffer module 100; the second recovery component 420 connects the buffer module 100 to the primary condensation system and the tertiary condensation system and is used to recover ammonia gas in the buffer module 100.

[0129] Specifically, the first recovery component 410 connects the buffer component 110 to the recovery tank for recovering liquid ammonia in the buffer component 110; the second recovery component 420 connects the buffer component 110 to the primary condensation system and the tertiary condensation system for recovering ammonia gas in the buffer component 110.

[0130] Specifically, the first recovery assembly 410 includes a first recovery pipeline. A first end of the first recovery pipeline is connected to a sixth buffer port, and a second end of the first liquid recovery pipeline is connected to a recovery tank.

[0131] In some of these embodiments, the first recovery line includes, but is not limited to, an INS line.

[0132] Specifically, the second recovery assembly 420 includes a second recovery pipeline and a third recovery pipeline. The first end of the second recovery pipeline is connected to the first condensation pipeline, and the second end of the second recovery pipeline is connected to the tertiary condensation system; the first end of the third recovery pipeline is connected to the first recovery pipeline, and the second end of the third recovery pipeline is connected to the primary condensation system.

[0133] In some embodiments, the second and third recovery lines include, but are not limited to, INS lines.

[0134] Furthermore, the recycling module 400 also includes a third valve assembly 430. The third valve assembly 430 is disposed in the first recycling pipeline and is used to control the connection between the buffer assembly 110 and the recycling tank.

[0135] Specifically, the third valve assembly 430 includes a fourth manual diaphragm valve, a first pneumatic diaphragm valve, and a first check valve. The fourth manual diaphragm valve is located in the first recovery pipeline and is used by personnel to manually close or open the connection between the buffer assembly 110 and the recovery tank. The first pneumatic diaphragm valve is located in the first recovery pipeline and downstream of the third manual diaphragm valve, and is used to switch the connection between the buffer assembly 110 and the first recovery pipeline on or off.

[0136] The first check valve is installed in the first recovery pipeline and is located downstream of the first pneumatic diaphragm valve to prevent backflow of liquid ammonia entering the first recovery pipeline.

[0137] Furthermore, the recovery module 400 also includes a fourth valve assembly 440. The fourth valve assembly 440 is disposed in the second recovery pipeline and the third recovery pipeline, and is used to control the connection between the buffer assembly 110 and the primary condensation system and the tertiary condensation system.

[0138] Specifically, the fourth valve assembly 440 includes a second check valve, a second pneumatic diaphragm valve, and a third check valve. The second check valve is located in the second recovery pipeline to prevent backflow of ammonia gas entering the second recovery pipeline; the second pneumatic diaphragm valve is located in the third recovery pipeline to open or close the connection between the second and third recovery pipelines; and the third check valve is located in the third recovery pipeline downstream of the second pneumatic diaphragm valve to prevent backflow of ammonia gas entering the third recovery pipeline.

[0139] Furthermore, the recovery module 400 also includes a first pressure monitoring component 450. The first pressure monitoring component 450 is disposed in a pipeline connected to the second recovery component 420 and is used to monitor the pressure in that pipeline.

[0140] Specifically, the first pressure monitoring component 450 includes a second pressure gauge and a second pressure sensor. The second pressure gauge and the second pressure sensor are located in the second recovery pipeline.

[0141] In addition, the first pressure monitoring component 450 also includes a seventh manual diaphragm valve. This seventh manual diaphragm valve is located in the second recovery pipeline and is used to open or close the connection between the second pressure monitoring component 630 and the first recovery component 410.

[0142] Furthermore, the recovery module 400 also includes a third recovery component 460 and a fourth recovery component 470. The third recovery component 460 connects the evaporation module 700 to the recovery tank, and is used to transfer the liquid ammonia in the evaporation module 700 to the recovery tank. The fourth recovery component 470 connects the evaporation module 700 to the primary condensation system and the tertiary condensation system, and is used to transfer the gas in the evaporation module 700 to either the primary or tertiary condensation system.

[0143] Specifically, the third recovery component 460 connects the evaporation component 710 to the recovery tank; the fourth recovery component 470 connects the evaporation component 710 to the primary condensation system and the tertiary condensation system.

[0144] Specifically, the third recovery assembly 460 includes a fourth recovery pipeline. The first end of the fourth recovery pipeline is connected to the fourth evaporation port at the bottom of the evaporation assembly 710, and the second end of the fourth recovery pipeline is connected to a recovery tank.

[0145] In some of these embodiments, the fourth recovery line includes, but is not limited to, an INS line.

[0146] It should be noted that the number of the third recovery components 460 is matched with the number of the evaporation components 710. Generally, the number of the third recovery components 460 is equal to the number of the evaporation components 710, that is, the third recovery components 460 and the evaporation components 710 correspond one-to-one.

[0147] Specifically, the fourth recovery assembly 470 includes a fifth recovery pipeline and a sixth recovery pipeline. The first end of the fifth recovery pipeline is connected to the fourth evaporation port at the top of the evaporation assembly 710, and the second end of the fifth recovery pipeline is connected to the three-stage condensation system; the first end of the sixth recovery pipeline is connected to the fifth recovery pipeline, and the second end of the sixth recovery pipeline is connected to the first-stage condensation system.

[0148] In some embodiments, the fifth and sixth recovery lines include, but are not limited to, INS lines.

[0149] It should be noted that the number of the fourth recovery components 470 is matched with the number of the evaporation components 710. Generally, the number of the fourth recovery components 470 is equal to the number of the evaporation components 710, that is, the fourth recovery components 470 and the evaporation components 710 correspond one-to-one.

[0150] Furthermore, the recovery module 400 also includes a ninth valve assembly 480. The ninth valve assembly 480 is located in the fourth recovery pipeline and is used to control the connection between the evaporation assembly 710 and the recovery tank.

[0151] Specifically, the ninth valve assembly 480 includes a tenth manual diaphragm valve, a seventh pneumatic diaphragm valve, and a sixth check valve. The tenth manual diaphragm valve is located in the fourth recovery pipeline and is used by personnel to manually close or open the connection between the buffer assembly 110 and the fourth recovery pipeline. The seventh pneumatic diaphragm valve is located in the fourth recovery pipeline and downstream of the sixth manual diaphragm valve, and is used to open or close the connection between the buffer assembly 110 and the fourth recovery pipeline. The sixth check valve is located in the fourth recovery pipeline and downstream of the seventh pneumatic diaphragm valve, and is used to prevent backflow of liquid ammonia entering the fourth pipeline.

[0152] It should be noted that the number of the ninth valve assembly 480 is matched with the number of the third recovery assembly 460. Generally, the number of the ninth valve assembly 480 is equal to the number of the third recovery assembly 460, that is, there is a one-to-one correspondence between the ninth valve assembly 480 and the third recovery assembly 460.

[0153] Furthermore, the recovery module 400 also includes a tenth valve assembly 490. The tenth valve assembly 490 is located in the fifth and sixth recovery lines and is used to control the connection between the evaporation assembly 710 and the primary condensation system and the tertiary condensation system.

[0154] Specifically, the tenth valve assembly 490 includes an eighth pneumatic diaphragm valve, a seventh check valve, a ninth pneumatic diaphragm valve, and an eighth check valve. The eighth pneumatic diaphragm valve is located in the fifth recovery line and is used to open or close the connection between the evaporator assembly 710 and the tertiary condensation system. The seventh check valve is located in the fifth recovery line and downstream of the eighth pneumatic diaphragm valve, and is used to prevent ammonia backflow into the fifth recovery line. The ninth pneumatic diaphragm valve is located in the sixth recovery line and is used to open or close the connection between the evaporator assembly 710 and the primary condensation system. The eighth check valve is located in the sixth recovery line and downstream of the ninth pneumatic diaphragm valve, and is used to prevent ammonia backflow into the sixth recovery line.

[0155] It should be noted that the number of tenth valve assemblies 490 is matched with the number of fourth recovery assemblies 470. Generally, the number of tenth valve assemblies 490 is equal to the number of fourth recovery assemblies 470, that is, there is a one-to-one correspondence between the tenth valve assemblies 490 and the fourth recovery assemblies 470.

[0156] like Figure 4 As shown, the waste discharge module 500 includes a first waste discharge component 510. The first waste discharge component 510 connects the buffer module 100 to the exhaust gas treatment tank and is used to discharge the contaminated ammonia gas from the buffer module 100.

[0157] Specifically, the first waste discharge component 510 connects the buffer component 110 to the exhaust gas treatment pool and is used to discharge the contaminated ammonia gas from the buffer component 110.

[0158] Specifically, the first waste discharge assembly 510 includes a first waste discharge pipeline. The first end of the first waste discharge pipeline is connected to the buffer assembly 110, and the second end of the first waste discharge pipeline is connected to the exhaust gas treatment tank.

[0159] In some of these embodiments, the first waste discharge line includes, but is not limited to, an INS pipe.

[0160] Furthermore, the waste discharge module 500 also includes a waste gas treatment component. This waste gas treatment component is located in the first waste discharge pipeline and is used to treat the contaminated ammonia gas within the buffer module 100.

[0161] In some of these embodiments, the exhaust gas treatment components include, but are not limited to, NH3 wet scrubbers.

[0162] Furthermore, the waste discharge module 500 also includes a fifth valve assembly 520. The fifth valve assembly 520 is disposed in the first waste discharge pipeline and is used to control the connection between the buffer assembly 110 and the exhaust gas treatment tank.

[0163] Specifically, the fifth valve assembly 520 includes a third pneumatic diaphragm valve and a fourth check valve. The third pneumatic diaphragm valve is located in the first waste discharge line and is used to open or close the connection between the first waste discharge line and the buffer assembly 110. The fourth check valve is located in the first waste discharge line and downstream of the third pneumatic diaphragm valve and is used to prevent backflow of gas entering the first waste discharge line.

[0164] Furthermore, the waste discharge module 500 also includes a second waste discharge component 530. The second waste discharge component 530 connects the pipeline between the evaporation module 700 and the finished product tank to the tail gas treatment pool, and is used to discharge the contaminated ammonia gas in the pipeline.

[0165] Specifically, the second waste discharge component 530 connects the pipeline between the evaporation component 710 and the finished product tank to the exhaust gas treatment pool.

[0166] Specifically, the second waste disposal assembly 530 includes a second waste disposal pipeline. The first end of the second waste disposal pipeline is connected to the pipeline between the evaporation assembly 710 and the finished product tank, and the second end of the second waste disposal pipeline is connected to the exhaust gas processor.

[0167] In some of these embodiments, the second waste line includes, but is not limited to, an INS pipe.

[0168] Furthermore, the waste discharge module 500 also includes an eleventh valve assembly 540. The eleventh valve assembly 540 is located on the second waste discharge pipeline and is used to control the connection between the pipeline between the evaporation module 700 and the finished product tank and the exhaust gas processor.

[0169] Specifically, the eleventh valve assembly 540 includes a tenth pneumatic diaphragm valve and a ninth check valve. The tenth pneumatic diaphragm valve is located in the second waste discharge line and is used to open or close the pipeline connection between the second waste discharge line and the evaporation assembly 710 and the finished product tank. The ninth check valve is located in the second waste discharge line and downstream of the seventh manual diaphragm valve, and is used to prevent backflow of gas entering the second waste discharge line.

[0170] like Figure 5 As shown, the pressure relief module 600 includes a first pressure relief component 610. The first pressure relief component 610 is connected to the buffer module 100 and is used to relieve pressure when the pressure in the buffer module 100 reaches a preset pressure threshold.

[0171] Specifically, the first pressure relief component 610 is connected to the buffer component 110 and is used to relieve pressure when the pressure of the buffer component 110 reaches a preset pressure threshold.

[0172] Specifically, the first pressure relief assembly 610 includes a first pressure relief pipeline and a first pressure relief component. The first end of the first pressure relief pipeline is connected to the buffer assembly 110, and the second end of the first pressure relief pipeline is connected to the exhaust gas treatment tank. The first pressure relief component is disposed in the first pressure relief pipeline, and the first pressure relief component can relieve pressure on the buffer assembly 110 and the pipeline when the pressure inside the buffer assembly 110 and the pipeline exceeds 1.5 MPa.

[0173] In some of these embodiments, the first pressure relief line includes, but is not limited to, an INS line.

[0174] In some of these embodiments, the first pressure relief element includes, but is not limited to, a safety valve.

[0175] Furthermore, the pressure relief module 600 also includes a sixth valve assembly 620. The sixth valve assembly 620 is disposed in the first pressure relief pipeline and is used to control the connection between the buffer assembly 110 and the exhaust gas treatment tank.

[0176] Specifically, the sixth valve assembly 620 includes a fifth pneumatic diaphragm valve and a fifth check valve. The fifth pneumatic diaphragm valve is located in the first pressure relief line and is used to open or close the connection between the buffer assembly 110 and the first pressure relief line. The fifth check valve is located in the first pressure relief line and downstream of the fourth pneumatic diaphragm valve, and is used to prevent backflow of gas entering the first pressure relief line.

[0177] Furthermore, the pressure relief module 600 also includes a second pressure monitoring component 630. The second pressure monitoring component 630 is disposed in a pipeline connected to the buffer component 110 and is used to monitor the pressure in the pipeline.

[0178] Specifically, the second pressure monitoring component 630 includes a first pressure gauge and a first pressure sensor. The first pressure gauge and the first pressure sensor are disposed in a pipeline connected to the buffer component 110.

[0179] It should be noted that if the pressure in the buffer component 110 monitored by the second pressure monitoring component 630 exceeds 1.3 MPa, the system can activate the device's early warning module to issue an early warning; if the pressure in the buffer component 110 monitored by the second pressure monitoring component 630 exceeds 1.5 MPa, the system will open the pressure relief module 600 to relieve pressure on the buffer component 110 and pipelines, ensuring the safety of the overall device.

[0180] In addition, the second pressure monitoring component 630 also includes a thirteenth manual diaphragm valve. The thirteenth manual diaphragm valve is located in the pipeline connected to the third pressure monitoring component 680 and is used to open or close the connection between the third pressure monitoring component 680 and the evaporation component 710.

[0181] Furthermore, the pressure relief module 600 also includes a second pressure relief component 640 and a third pressure relief component 650. The second pressure relief component 640 is connected to the evaporation module 700 and is used to relieve pressure when the pressure in the evaporation module 700 reaches a preset pressure threshold. The third pressure relief component 650 is connected to the pipeline between the evaporation module 700 and the finished product tank and is used to relieve pressure when the pressure in that pipeline reaches a preset pressure threshold.

[0182] Specifically, the second pressure relief assembly 640 includes a second pressure relief pipeline and a second pressure relief component. The first end of the second pressure relief pipeline is connected to the seventh evaporation port of the evaporation assembly 710, and the second end of the second pressure relief pipeline is connected to the exhaust gas treatment tank. The second pressure relief component is disposed in the second pressure relief pipeline, and can relieve pressure on the evaporation assembly 710 and the pipeline when the pressure inside the evaporation assembly 710 and the pipeline exceeds 1.5 MPa.

[0183] In some of these embodiments, the second pressure relief line includes, but is not limited to, an INS line.

[0184] In some of these embodiments, the second pressure relief element includes, but is not limited to, a safety valve.

[0185] It should be noted that the number of second pressure relief components 640 is matched with the number of evaporation components 710. Generally, the number of second pressure relief components 640 is equal to the number of evaporation components 710, that is, there is a one-to-one correspondence between the second pressure relief components 640 and the evaporation components 710.

[0186] Furthermore, the pressure relief module 600 also includes a twelfth valve assembly 660. The twelfth valve assembly 660 is disposed in the second pressure relief pipeline and is used to control the connection between the evaporation assembly 710 and the exhaust gas processor.

[0187] Specifically, the twelfth valve assembly 660 includes an eleventh manual diaphragm valve and a tenth check valve. The eleventh manual diaphragm valve is located in the second pressure relief line and is used to open or close the connection between the evaporator assembly 710 and the second pressure relief line. The tenth check valve is located in the second pressure relief line and downstream of the eleventh manual diaphragm valve, and is used to prevent backflow of gas entering the second pressure relief line.

[0188] It should be noted that the number of twelfth valve assemblies 660 is matched with the number of second pressure relief assemblies 640. Generally, the number of twelfth valve assemblies 660 is equal to the number of second pressure relief assemblies 640, that is, there is a one-to-one correspondence between the twelfth valve assemblies 660 and the second pressure relief assemblies 640.

[0189] Specifically, the third pressure relief assembly 650 includes a third pressure relief pipeline, a third pressure relief component, and a rupture disc. The first end of the third pressure relief pipeline is connected to the pipeline between the evaporation module 700 and the finished product tank, and the second end of the third pressure relief pipeline is connected to the exhaust gas treatment tank. The third pressure relief component is installed in the third pressure relief pipeline, and can relieve pressure in the pipeline when the pressure inside the pipeline exceeds 1.5 MPa. The rupture disc is installed in the third pressure relief pipeline and located upstream of the third pressure relief component. When the pressure inside the pipeline exceeds 1.5 MPa, the rupture disc is ruptured, thereby triggering the system to open the third pressure relief component.

[0190] In some of these embodiments, the third pressure relief line includes, but is not limited to, an INS line.

[0191] In some of these embodiments, the third pressure relief component includes, but is not limited to, a safety valve.

[0192] Furthermore, the pressure relief module 600 also includes a thirteenth valve assembly 670. The thirteenth valve assembly 670 is located in the third pressure relief pipeline and is used to control the connection between the pipeline between the evaporation module 700 and the finished product tank and the exhaust gas processor.

[0193] Specifically, the thirteenth valve assembly 670 includes a twelfth manual diaphragm valve and an eleventh check valve. The twelfth manual diaphragm valve is located in the third pressure relief line and is used to open or close the connection between the pipeline between the evaporation module 700 and the finished product tank and the exhaust gas processor. The eleventh check valve is located in the third pressure relief line and downstream of the twelfth manual diaphragm valve, and is used to prevent backflow of gas entering the third pressure relief line.

[0194] Furthermore, the pressure relief module 600 also includes a third pressure monitoring component 680. The third pressure monitoring component 680 is disposed in a pipeline connected to the evaporation component 710 and is used to monitor the pressure in the evaporation component 710 and the pipeline.

[0195] Specifically, the third pressure monitoring component 680 includes a third pressure gauge and a third pressure sensor. The third pressure gauge and the third pressure sensor are disposed in a pipeline connected to the evaporation component 710.

[0196] It should be noted that if the pressure inside the evaporation component 710 monitored by the third pressure monitoring component 680 exceeds 1.3 MPa, the system can activate the device's early warning module to issue an early warning; if the pressure inside the evaporation component 710 monitored by the third pressure monitoring component 680 exceeds 1.5 MPa, the system will open the second pressure relief component 640 to relieve pressure on the evaporation component 710, ensuring the safety of the entire device.

[0197] like Figure 6 As shown, the evaporation module 700 includes at least one evaporation component 710 and a second heating component 720. The evaporation component 710 is connected to the condensation module 200 and is used to store liquid ammonia; the second heating component 720 is connected to the evaporation component 710 and is used to vaporize the liquid ammonia in the evaporation component 710.

[0198] Specifically, the evaporation component 710 is connected to the condensation component 210.

[0199] Specifically, the evaporation assembly 710 includes an evaporator, a first evaporation port, a second evaporation port, a third evaporation port, a fourth evaporation port, a fifth evaporation port, a sixth evaporation port, and a seventh evaporation port. The first evaporation port is located on the side of the evaporator and is connected to the condensation module 200; the second evaporation port is located on the side of the evaporator and is connected to the analysis module 300; the third evaporation port is located at the bottom of the evaporator and is connected to the second heating assembly 720, used to deliver ammonia gas to the evaporator; the fourth evaporation port is located on the side of the evaporator and is connected to the second heating assembly 720, used to deliver liquid ammonia to the second heating assembly 720; the fifth evaporation port is located at the bottom of the evaporator and is connected to the recovery module 400; the sixth evaporation port is located at the top of the evaporator and is connected to the recovery module 400; and the seventh evaporation port is located at the top of the evaporator and is connected to the pressure relief module 600.

[0200] In addition, there are two evaporation components 710, and each of the two evaporation components 710 is connected to the condensation module 200, the analysis module 300, the recovery module 400, the waste discharge module 500, and the pressure relief module 600, respectively.

[0201] In some embodiments, the number of evaporation components 710 may also be 3, 4, etc., that is, the number of evaporation components 710 can be set according to actual needs, and no further restrictions are imposed here.

[0202] Specifically, the second heating assembly 720 includes a second heating element, a third heating pipe, and a fourth heating pipe. The first end of the third heating pipe is connected to the second heating element, and the second end of the third heating pipe is connected to the third evaporation port of the evaporator. The first end of the fourth heating pipe is connected to the second heating element, and the second end of the fourth heating pipe is connected to the fourth evaporation port of the evaporator.

[0203] In some of these embodiments, the second heating element includes, but is not limited to, a heater.

[0204] In some embodiments, the third heating line and the fourth heating line include, but are not limited to, the INS tube.

[0205] It should be noted that there is only one second heating element 720. The one second heating element 720 is connected to several evaporation elements 710.

[0206] Furthermore, the evaporation module 700 also includes a seventh valve assembly 730. The seventh valve assembly 730 is disposed in a pipeline connected to the evaporation module 710 and is used to control the connection between the condensation module 210, the finished product tank and the evaporation module 710.

[0207] Specifically, the seventh valve assembly 730 includes a fifth pneumatic diaphragm valve and a sixth pneumatic diaphragm valve. The fifth pneumatic diaphragm valve is located in the second condensation pipeline and is used to open or close the connection between the condensation assembly 210 and the evaporation assembly 710; the sixth pneumatic diaphragm valve is located in the connection pipeline between the evaporation assembly 710 and the finished product tank and is used to open or close the connection between the evaporation assembly 710 and the finished product tank.

[0208] Furthermore, the evaporation module 700 also includes an eighth valve assembly 740. The eighth valve assembly 740 is disposed on the second heating pipe and is used to control the connection between the evaporation module 710 and the second heating module 720.

[0209] Specifically, the eighth valve assembly 740 includes an eighth manual diaphragm valve and a ninth manual diaphragm valve. The eighth manual diaphragm valve is located in the third heating line and is used to open or close the connection between the evaporation assembly 710 and the second heating element; the ninth manual diaphragm valve is located in the fourth heating line and is used to open or close the connection between the evaporation assembly 710 and the second heating element.

[0210] The usage method of this embodiment is as follows:

[0211] (I) Gas Supply

[0212] Manually open the first valve assembly 130 to connect the ammonia source with the buffer assembly 110, thereby allowing ammonia to enter the buffer assembly 110.

[0213] (II) Ammonia Analysis

[0214] The system starts the first analysis component 310, which analyzes the ammonia gas in the buffer component 110 to determine whether the ammonia gas in the buffer component 110 is contaminated.

[0215] (III) First Liquid Ammonia Vaporization

[0216] The second valve assembly 140 is manually opened, allowing the liquid ammonia at the bottom of the buffer assembly 110 to enter the first heating assembly 120. The system then starts the first heating assembly 120 to heat and vaporize the liquid ammonia and re-transport it into the buffer assembly 110.

[0217] (iv) Ammonia condensation

[0218] If the ammonia gas in the buffer assembly 110 is not contaminated, the system starts the condenser assembly 210 to condense the ammonia gas entering the condenser assembly 210 and obtain liquid ammonia.

[0219] (V) First Liquid Ammonia Recovery

[0220] If the liquid ammonia in the buffer assembly 110 is contaminated or there is too much liquid ammonia in the buffer assembly 110, the third valve assembly 430 is opened so that the liquid ammonia can flow into the recovery tank.

[0221] (vi) First gas recovery

[0222] By opening the fourth valve assembly 440, the qualified ammonia gas in the buffer assembly 110 can be passed into the primary condensation system and the tertiary condensation system for re-condensation, thereby realizing the recovery of qualified ammonia gas.

[0223] (vii) First gas emission

[0224] If the ammonia gas in the buffer assembly 110 is contaminated, the fifth valve assembly 520 is opened, allowing the contaminated ammonia gas to pass into the exhaust gas processor.

[0225] (VIII) First pressure relief

[0226] If the pressure in the buffer assembly 110 and the pipeline exceeds the preset pressure, the system opens the sixth valve assembly 620 to release the gas in the buffer assembly 110 and the pipeline.

[0227] The advantages of this embodiment are as follows: By setting a buffer module between the ammonia source and the condensation module, the buffer module can buffer the ammonia entering the condensation module, solving the problem of unstable ammonia pressure entering the condensation module, avoiding rapid increases and decreases in ammonia pressure, and providing a more stable and continuous gas source for the condensation module, thereby avoiding the danger caused by short-term pressure surges in the pipeline; by setting an analysis module, the ammonia entering the buffer module can be analyzed to determine whether the ammonia is contaminated, thereby delivering qualified ammonia to the condensation module and contaminated ammonia to the waste discharge module; by setting a recovery module, liquid ammonia is delivered to the recovery tank when there is contaminated liquid ammonia in the buffer module or when there is too much liquid ammonia in the buffer module, and contaminated ammonia in the buffer module is also delivered to the primary or tertiary condensation system; by setting a pressure relief module, pressure is released when the pressure in the buffer module and pipeline exceeds the preset pressure, ensuring the safety of the overall device.

[0228] Example 2

[0229] This embodiment is a modified embodiment of embodiment 1.

[0230] like Figure 7 As shown, the new condensation system also includes a purging module 800. The purging module 800 is connected to the evaporation module 700 and is used to purge the evaporation module 700 and its piping.

[0231] like Figure 8As shown, the purging module 800 includes a first purging assembly 810 and a second purging assembly 820. The first purging assembly 810 is connected to the input pipeline of the evaporation module 700 and is used to purge the evaporation module 700; the second purging assembly 820 is connected to the output pipeline of the evaporation module 700 and is used to purge the entire device.

[0232] Specifically, the first purging assembly 810 is connected to the input pipeline of the evaporation assembly 710; the second purging assembly 820 is connected to the output pipeline of the evaporation assembly 710.

[0233] Specifically, the first purging assembly 810 includes a first gas supply component and a first purging pipeline. A first end of the first purging pipeline is connected to the first gas supply component, and a second end of the first purging pipeline is connected to the evaporation assembly 710. The first gas supply component is used to supply purging gas.

[0234] It should be noted that the purging gas supplied by the first gas supply unit is GN2.

[0235] It should be noted that the number of first purge lines is matched with the number of evaporation components 710. Generally, the number of first purge lines is equal to the number of evaporation components 710, that is, there is a one-to-one correspondence between the first purge lines and the evaporation components 710.

[0236] Specifically, the second purging assembly 820 includes a second gas supply component and a second purging pipeline. The first end of the second purging pipeline is connected to the second gas supply component, and the second end of the second purging pipeline is connected to the evaporation assembly 710. The second gas supply component is used to supply purging gas.

[0237] It should be noted that the purging gas supplied by the second gas supply unit is PHe.

[0238] Furthermore, the purging module 800 also includes a fourteenth valve assembly 830. The fourteenth valve assembly 830 is disposed in the first purging pipeline and is used to control the connection between the first gas supply unit and the evaporation assembly 710.

[0239] Specifically, the fourteenth valve assembly 830 includes a twelfth check valve. The twelfth check valve is provided with a first purge line for opening or closing the connection between the first gas supply unit and the evaporation assembly 710.

[0240] It should be noted that the number of the fourteenth valve assembly 830 is matched with the number of the first purge lines. Generally, the number of the fourteenth valve assembly 830 is equal to the number of the first purge lines, that is, the fourteenth valve assembly 830 corresponds one-to-one with the first purge lines.

[0241] Furthermore, the purging module 800 also includes a fifteenth valve assembly 840. The fifteenth valve assembly 840 is disposed in the second purging line and is used to control the connection between the second gas supply unit and the evaporation assembly 710.

[0242] Specifically, the fifteenth valve assembly 840 includes an eleventh pneumatic diaphragm valve and a thirteenth check valve. The eleventh pneumatic diaphragm valve is located in the second purge line and is used to open or close the connection between the second gas supply unit and the evaporation assembly 710. The thirteenth check valve is located in the second purge line and downstream of the eleventh pneumatic diaphragm valve, and is used to prevent backflow of gas entering the second purge line.

[0243] Furthermore, the purging module 800 also includes a fourth pressure monitoring component 850. The fourth pressure monitoring component 850 is disposed in a pipeline connected to the first purging component 810 and the second purging component 820, and is used to monitor the pressure in the pipeline.

[0244] Specifically, the fourth pressure monitoring component 850 includes a fourth pressure gauge and a fourth pressure sensor. The fourth pressure gauge and the fourth pressure sensor are disposed in a conduit connected to the second purging component 820.

[0245] It should be noted that if the pressure in the second purge line monitored by the fourth pressure monitoring component 850 exceeds 1.3 MPa, the system can activate the device's early warning module to issue an early warning; if the pressure in the second purge line monitored by the fourth pressure monitoring component 850 exceeds 1.5 MPa, the system will open the third pressure relief component 650 to relieve pressure in the second purge line, ensuring the safety of the entire device.

[0246] In addition, the fourth pressure monitoring assembly 850 also includes a fourteenth manual diaphragm valve. The fourteenth manual diaphragm valve is located in the pipeline connected to the fourth pressure monitoring assembly 850 and is used to open or close the connection between the fourth pressure monitoring assembly 850 and the second purge pipeline.

[0247] The usage method of this embodiment is as follows:

[0248] (ix) Liquid Ammonia Analysis

[0249] The system opens the seventh valve assembly 730 to connect the condenser assembly 210 and the evaporator assembly 710, allowing liquid ammonia to enter the evaporator assembly 710;

[0250] Manually open the ninth valve assembly 480 to connect the second analysis assembly 320 with the evaporation assembly 710, thereby enabling the second analysis assembly 320 to analyze the liquid ammonia in the evaporation assembly 710.

[0251] (x) Liquid ammonia transportation

[0252] If the liquid ammonia meets the standards, the system opens the seventh valve assembly 730 to connect the evaporation assembly 710 with the finished product tank, allowing the compliant liquid ammonia to be filled into the finished product tank.

[0253] (xi) Second liquid ammonia vaporization

[0254] If the liquid ammonia does not meet the standard, the system opens the eighth valve assembly 740 to open the connection between the evaporation assembly 710 and the second heating assembly 720;

[0255] The system activates the second heating component 720, thereby vaporizing the liquid ammonia in the evaporation component 710.

[0256] (xii) Second liquid ammonia recovery

[0257] If there is too much liquid ammonia or the evaporation assembly 710 is contaminated, the system opens the ninth valve assembly 480 to connect the recovery tank and the evaporation assembly 710, so that the liquid ammonia in the evaporation assembly 710 is transported to the recovery tank.

[0258] (XIII) Second Gas Recovery

[0259] If the liquid ammonia does not meet the standards, the system opens the ninth valve assembly 480 to connect the primary condensation system, the tertiary condensation system, and the evaporation assembly 710, so that the gas vaporized by the second heating assembly 720 can be delivered to the primary condensation system or the tertiary condensation system for condensation.

[0260] (xiv) Second gas emissions

[0261] If the liquid ammonia does not meet the standards, the system opens the tenth valve assembly 490, allowing the gas in the pipeline between the evaporation assembly 710 and the finished product tank to be discharged to the exhaust gas processor through the second waste discharge assembly 530.

[0262] (XV) Second pressure relief

[0263] When the pressure inside the evaporation assembly 710 exceeds the preset pressure threshold, the system opens the eleventh valve assembly 540, allowing the second pressure relief assembly 640 to relieve pressure on the evaporation assembly 710.

[0264] If the pressure in the pipeline between the evaporation assembly 710 and the finished product tank exceeds the preset pressure threshold, the system opens the twelfth valve assembly 660, allowing the third pressure relief assembly 650 to relieve pressure in the pipeline.

[0265] (XVI) Blowing

[0266] When it is necessary to purge the evaporation assembly 710, the system starts the first purging assembly 810 and opens the fourteenth valve assembly 830 so that the purging gas can purge the evaporation assembly 710.

[0267] When the entire device needs to be purged, the system activates the second purging assembly 820 and opens the fifteenth valve assembly 840, allowing the purging gas to purge the entire device.

[0268] The advantages of this embodiment are that by setting up an evaporation component, liquid ammonia obtained from the condensation component can be introduced into the evaporation component, allowing the second analysis component to analyze the liquid ammonia in the evaporation component. If the liquid ammonia in the evaporation component does not meet the standards, the second heating component can be activated to vaporize the liquid ammonia in the evaporation component. The gas can then be re-transported to the primary or tertiary condensation system for condensation via a recovery module. The liquid ammonia in the evaporation component can also be recovered to a recovery tank, thus recovering and repurifying the liquid ammonia in case of contamination during the condensation process. By setting up a second and a third pressure relief component to relieve pressure on the evaporation component and pipelines, the safety of the entire device can be ensured.

[0269] Example 3

[0270] This embodiment is a specific implementation of the present invention, corresponding to Embodiments 1 to 2.

[0271] like Figure 9 As shown, a condensation system includes a buffer module, a condensation module, an analysis module, a recovery module, a waste discharge module, a pressure relief module, an evaporation module, and a purging module.

[0272] The buffer module includes a buffer column (BUFFER-1), a heater (H-01), manual diaphragm valves (MV01, MV02, MV03, MV04), a level gauge (LS01), a pressure gauge (PG01), and a pressure sensor (PT01).

[0273] The condensation module includes a condenser (C-1211).

[0274] The analysis module includes analyzers (TIA01, TIA02).

[0275] The recovery module includes manual diaphragm valves (MV05, MV011, MV19), pneumatic diaphragm valves (AV01, AV04, AV06, AV07, AV08, AV12, AV13, AV015), check valves (CV04, CV06, CV08, CV09, CV010, CV13, CV14, CV15, CV19), pressure gauges (PG02), and pressure sensors (PT02).

[0276] The waste discharge module includes a pneumatic diaphragm valve (AV02), a check valve (CV02, CV17), and a manual diaphragm valve (MV27).

[0277] The pressure relief module includes manual diaphragm valves (MV07, MV15, MV23, MV26), safety valves (SV01, SV02, SV03, SV04), check valves (CV03, CV07, CV11, CV16), and rupture discs (PRD).

[0278] The evaporation module includes an evaporator (V-1212A, V-1212B), a heater (H-02), manual diaphragm valves (MV10, MV12, MV18, MV20), pneumatic diaphragm valves (AV05, AV09, AV11, AV14), pressure gauges (PG03, PG04), and pressure sensors (PT03, PT04).

[0279] The purging module includes purging gas (1ST REBOILER ZONE, ABSORBER ZONE), pneumatic diaphragm valve (AV17), check valve (CV05, CV12, CV18), pressure gauge (PG05), and pressure sensor (PT05).

[0280] The usage method of this embodiment is as follows:

[0281] (1) Start the ST REBOILER ZONE and ABSORBER ZONE, and open AV17, MV10 and MV18 so that the purging gas can enter V-1212A, V-1212B and pipeline through CV05, CV12 and CV18 to purge V-1212A, V-1212B and the entire device.

[0282] (2) Manually open MV01 and MV02 to connect ABSORBER PACKAGE with BUFFER-1, so that ammonia gas can enter BUFFER-1.

[0283] (3) The system starts TIA01, which analyzes the ammonia in BUFFER-1 to determine whether the ammonia in BUFFER-1 is contaminated.

[0284] (4) Manually open MV03 and MV04 to allow the liquid ammonia at the bottom of BUFFER-1 to enter H-01. The system starts H-01 to heat and vaporize the liquid ammonia and then transport it back into BUFFER-1.

[0285] (5) If the ammonia gas in BUFFER-1 is not contaminated, the system starts C-1211 to condense the ammonia gas entering C-1211 and obtain liquid ammonia.

[0286] (6) If the liquid ammonia in BUFFER-1 is contaminated or there is too much liquid ammonia in BUFFER-1, open MV05 and AV01 so that the liquid ammonia can flow into the recovery tank through CV19.

[0287] (7) Excess ammonia gas that meets the standards in BUFFER-1 can be introduced into the three-stage condensation system through CV04 for re-condensation, thereby realizing the recovery of ammonia gas that meets the standards.

[0288] (8) Open AV06, and the qualified ammonia gas in the buffer component 110 can be introduced into the primary condensation system through CV10 for re-condensation.

[0289] (9) If the ammonia in BUFFER-1 is contaminated, turn on AV02 so that the contaminated ammonia can pass through CV02 to the exhaust gas processor.

[0290] (10) When the pressure in BUFFER-1 and the pipeline exceeds the preset pressure, the system opens MV07 so that the gas in the buffer assembly 110 and the pipeline can be depressurized through SV01 and CV03.

[0291] (11) If the ammonia gas detected by TIA01 meets the standard, the system opens AV09 to open the connection between C-1211 and V-1212A and V-1212B, so that liquid ammonia enters V-1212A and V-1212B.

[0292] The system starts TIA02, enabling TIA02 to analyze the liquid ammonia in V-1212A and V-1212B.

[0293] (12) When the liquid ammonia meets the standard, the system opens AV14 to open the connection between V-1212A, V-1212B and the finished product tank, so that the liquid ammonia that meets the standard can be filled into the finished product tank.

[0294] (13) If the liquid ammonia does not meet the standard, the system opens MV10, MV12, MV18, MV20 and starts H-02 to open the connection between V-1212A, V-1212B and H-02, thereby vaporizing the liquid ammonia in V-1212A and V-1212B.

[0295] (14) If there is too much liquid ammonia in V-1212A or V-1212B or if the liquid ammonia is contaminated, the system opens MV11, AV04, MV19 and AV15 to open the connection between the recovery tank and V-1212A and V-1212B, so that the liquid ammonia in V-1212A and V-1212B can be transported to the recovery tank through CV06 and CV13.

[0296] (15) If the liquid ammonia does not meet the standard, the system opens AV08 to open the connection between the three-stage condensation system and V-1212A and V-1212B, so that the gas vaporized by H-02 can be transported to the three-stage condensation system for condensation through CV08;

[0297] AV08 and AV07 can also be opened to connect the primary condensation system with V-1212A and V-1212B, so that the gas vaporized by H-02 can be transported to the tertiary condensation system for condensation through CV09.

[0298] (16) If the liquid ammonia does not meet the standard, the system opens AV16 so that the gas in the pipeline between V-1212A, V-1212B and the finished product tank can be discharged to the exhaust gas processor through CV17.

[0299] (17) When the pressure in V-1212A and V-1212B exceeds the preset pressure threshold, the system opens MV15 and MV23, and the evaporation component 710 can be depressurized through SV02, CV07, SV03 and CV11.

[0300] (18) When the pressure in the pipeline between V-1212A, V-1212B and the finished product tank exceeds the preset pressure threshold, the system opens MV26, the PRD is broken down, and thus SV04 and CV16 release the pipeline.

[0301] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0302] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A novel condensation system for ultrapure ammonia, characterized in that, include: A buffer module, which is connected to an ammonia source, is used to acquire and buffer ammonia. A condensation module, which is connected to the buffer module, is used to condense ammonia gas to obtain liquid ammonia. An analysis module, which is connected to the buffer module, is used to analyze ammonia gas; A recovery module, which is connected to the buffer module, is used to recover liquid ammonia and ammonia gas; A waste discharge module, which is connected to the buffer module, is used to discharge waste gas from the buffer module; A pressure relief module, which is connected to the buffer module, is used to relieve pressure when the pressure in the buffer module reaches a preset pressure threshold. An evaporation module, which is connected to the condensation module, the analysis module, the recovery module, the waste discharge module, and the pressure relief module, is used to acquire and transfer liquid ammonia to the finished product tank.

2. The novel condensation system according to claim 1, characterized in that, The buffer module includes: A buffer component is connected to an ammonia source, a condensation module, an analysis module, a recovery module, a waste discharge module, and a pressure relief module, respectively, and is used to obtain ammonia, buffer ammonia, and transfer ammonia to the condensation module; A first heating component, connected to the buffer component, is used to heat and vaporize the liquid ammonia generated by the condensation of ammonia gas in the buffer component; and / or The condensation module includes: A condensation assembly, connected to and located downstream of the buffer module, is used to condense ammonia gas to obtain liquid ammonia; and / or The analysis module includes: A first analytical component, connected to the buffer module, is used to analyze the ammonia gas in the buffer module; and / or The recycling module includes: A first recovery component connects the buffer module to the recovery tank and is used to recover the liquid ammonia from the buffer module. The second recovery component connects the buffer module to the primary condensation system and the tertiary condensation system, and is used to recover ammonia from the buffer module; and / or The waste discharge module includes: A first waste discharge component connects the buffer module to the exhaust gas treatment tank and is used to discharge contaminated ammonia gas from the buffer module; and / or The pressure relief module includes: A first pressure relief component, connected to the buffer module, is used to relieve pressure when the pressure in the buffer module reaches a preset pressure threshold; and / or The evaporation module includes: At least one evaporation assembly, which is connected to the condensation module, is used to store liquid ammonia; The second heating component is connected to the evaporation component and is used to heat and vaporize the liquid ammonia in the evaporation component.

3. The novel condensation system according to claim 2, characterized in that, The buffer module also includes: A liquid level monitoring component is disposed in the buffer component and is used to monitor the liquid ammonia level in the buffer component.

4. The novel condensation system according to claim 2, characterized in that, The pressure relief module also includes: A second pressure monitoring component is installed in a pipeline connected to the buffer module to monitor the pressure of the pipeline.

5. The novel condensation system according to claim 2, characterized in that, The recycling module also includes: A first pressure monitoring component is disposed in the pipeline connected to the second recovery component and is used to monitor the pressure of the pipeline.

6. The novel condensation system according to claim 2, characterized in that, The analysis module also includes: A second analytical component, disposed in the evaporation module, is used to analyze the liquid ammonia in the evaporation module; and / or The recycling module also includes: The third recovery component connects the evaporation module to the recovery tank and is used to transport the liquid ammonia in the evaporation module to the recovery tank. The fourth recovery component connects the evaporation module to the primary condensation system and the tertiary condensation system, and is used to transport the gas from the evaporation module to the primary condensation system or the tertiary condensation system; and / or The waste discharge module also includes: The second waste discharge component connects the pipeline between the evaporation module and the finished product tank to the tail gas treatment tank, and is used to discharge the contaminated ammonia gas in the pipeline; and / or The pressure relief module also includes: The second pressure relief component is connected to the evaporation module and is used to relieve pressure when the pressure of the evaporation module reaches a preset pressure threshold. The third pressure relief component is connected to the pipeline between the evaporation module and the finished product tank, and is used to relieve pressure when the pressure in the pipeline reaches a preset pressure threshold.

7. The novel condensation system according to claim 6, characterized in that, The pressure relief module also includes: A third pressure monitoring component is installed in the pipeline connected to the evaporation module and is used to monitor the pressure of the evaporation module and the pipeline.

8. The novel condensation system according to any one of claims 1 to 7, characterized in that, Also includes: A purging module, which is connected to the evaporation module, is used to purge the evaporation module and its pipelines.

9. The novel condensation system according to claim 8, characterized in that, The purging module includes: A first purging assembly is connected to the input pipeline of the evaporation module and is used to purge the evaporation module. The second purging assembly is connected to the output pipeline of the evaporation module and is used to purge the entire device.

10. The novel condensation system according to claim 9, characterized in that, The purging module further includes: A fourth pressure monitoring component is disposed in a pipeline that is connected to the first purging component and the second purging component respectively, and is used to monitor the pressure in the pipeline.

Images