An apparatus for purifying and filtering to produce high purity silane

Abstract

The utility model discloses a kind of purified filtration preparation high-purity silane's device, including air inlet pipe, air outlet pipe, shell and filter assembly, the shell includes sleeve and the two groups of sealing seats symmetrically arranged on the upper and lower ends of sleeve, two groups of sealing seat are all equipped with the gas cavity and connecting hole of intercommunication, the air inlet pipe and air outlet pipe are respectively arranged on two groups of sealing seat and respectively with corresponding gas cavity communication, the air outlet end of air inlet pipe is equipped with gas distributor, the filter assembly includes filter cartridge, spring and filter basket, one end of filter cartridge is open, and the other end is equipped with connecting pipe, the connecting pipe is connected in connecting hole by screw thread, the spring is arranged in filter cartridge, the filter basket includes air-permeable mesh plate, connecting rod and sealing plate. The utility model relates to the technical field of silane production, specifically provides a kind of purified filtration preparation high-purity silane's device, which is convenient to replace adsorbent, and helps gas distribution.

Description

Technical Field

[0001] This utility model relates to the field of silane production technology, specifically to an apparatus for purifying and filtering to prepare high-purity silane. Background Technology

[0002] Purification and filtration are essential steps in the preparation of high-purity silanes, and a filtration device is required when purifying and filtering silanes. For example, the existing Chinese utility model patent with publication number "CN211328241U" discloses a filtration device for silane purification, including a sealed tank, an end cap, a flange, an upper perforated plate, a lower perforated plate, a filter tube, an inlet pipe, a U-shaped tube, and an outlet pipe. The top of the sealed tank is fixedly connected to a flange, and the upper end of the flange is fixedly connected to an end cap by bolts. An outlet pipe is provided on the end cap. The sealed tank contains a filter tube, an upper perforated plate, and a lower perforated plate. The upper and lower perforated plates have through holes for the filter tube to pass through. The top and bottom ends of the filter tube pass through the through holes of the upper and lower perforated plates, respectively. The inlet pipe extends into the sealed tank from the upper part of the side wall and connects to the top end of the filter tube extending out of the side wall of the sealed tank. The bottom end of the filter tube connects to the inlet on one side of the U-shaped tube, and the outlet on the other side of the U-shaped tube is located below the lower perforated plate inside the sealed tank. In summary, this utility model has the advantages of effectively utilizing the internal space of the sealed tank, increasing the filtration area, and achieving good filtration effect.

[0003] However, the above-mentioned filtration device still has some shortcomings: the filter tube is fixed to the upper and lower perforated plates by flanges, and the replacement of the adsorbent requires disassembling the entire flange structure, which is cumbersome; the air inlet pipe is directly connected to the top of the filter tube, which may cause the gas to be relatively concentrated and difficult to enter the filter tube fully and evenly, resulting in rapid local saturation of the adsorbent and insufficient utilization. Utility Model Content

[0004] In view of the above situation and to overcome the defects of the prior art, this utility model provides an apparatus for preparing high-purity silane by purifying and filtering gas through easy replacement of the adsorbent and promoting uniform gas distribution.

[0005] The technical solution adopted by this utility model is as follows: This utility model provides an apparatus for purifying and filtering high-purity silane, comprising an inlet pipe, an outlet pipe, a shell, and a filter assembly. The shell includes a sleeve and two sets of sealing seats symmetrically arranged at the upper and lower ends of the sleeve. Each set of sealing seats has an interconnected air chamber and a connecting hole. The inlet pipe and the outlet pipe are respectively arranged on the two sets of sealing seats and are respectively connected to the corresponding air chambers. A gas distributor is provided on the outlet end of the inlet pipe. The filter assembly includes a filter cartridge, a spring, and a filter basket. One end of the filter cartridge is open, and the other end is provided with a connecting pipe. The connecting pipe is threaded into the connecting hole. The spring is located inside the filter cartridge. The filter basket includes a breathable mesh plate, a connecting rod, and a sealing plate. The breathable mesh plate is located on the spring and has a second vent hole. The connecting rod is located on the breathable mesh plate and the sealing plate is located on the connecting rod. The sealing plate is fixed to the filter cartridge by positioning screws. A filter cavity is formed between the breathable mesh plate, the sealing plate, and the filter cartridge. The filter cavity is filled with adsorbent. A first vent hole is located on the side of the filter cartridge near the sealing plate. The filter cavity communicates with the interior of the outer shell through the first vent hole.

[0006] Furthermore, the filter assembly is provided in two sets, and the two sets of filter assemblies are respectively disposed on two sets of sealing seats.

[0007] Furthermore, the sealing plate is provided with a handle.

[0008] Furthermore, the sealing plate is provided with an adding tube, and a sealing cap is connected to the adding tube by threads.

[0009] Furthermore, the sealing seat is provided with a connector, and the sealing seat is threadedly connected to the sleeve through the connector.

[0010] Furthermore, the air cavity is composed of a cylindrical cavity in the middle and frustum cavities on both sides.

[0011] The beneficial effects of this utility model using the above structure are as follows: This solution makes it easier to disassemble and assemble the filter components and to replace the adsorbent; This solution allows the gas to enter the filter cartridge more evenly, thereby avoiding rapid local saturation of the adsorbent and allowing the adsorbent to be utilized more fully; This solution, by setting two sets of filter components, can achieve the purpose of multi-stage filtration of silane, thus improving the filtration effect. Attached Figure Description

[0012] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0013] Figure 1 This is a perspective view of an embodiment of the present utility model;

[0014] Figure 2 This is an exploded view of an embodiment of the present utility model;

[0015] Figure 3 This is a front view of an embodiment of the present utility model;

[0016] Figure 4 This is a top view of an embodiment of the present utility model;

[0017] Figure 5 for Figure 4 A sectional view along section AA;

[0018] Figure 6 for Figure 5 Enlarged view of section A;

[0019] Figure 7 for Figure 5 Enlarged view of section B.

[0020] The components are as follows: 1. Inlet pipe, 2. Outlet pipe, 3. Outer shell, 4. Filter assembly, 5. Gas distributor, 6. Sleeve, 7. Sealing seat, 8. Air chamber, 9. Connecting hole, 10. Filter cartridge, 11. Spring, 12. Filter basket, 13. Positioning screw, 14. Connecting pipe, 15. First vent hole, 16. Ventilation mesh plate, 17. Connecting rod, 18. Sealing plate, 19. Second vent hole, 20. Handle, 21. Adding pipe, 22. Sealing cover, 23. Connector, 24. Filter chamber. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0022] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0023] like Figures 1-7As shown, this utility model discloses an apparatus for purifying and filtering high-purity silane, comprising an inlet pipe 1, an outlet pipe 2, a shell 3, and a filter assembly 4. The shell 3 includes a sleeve 6 and two sets of sealing seats 7 symmetrically arranged at the upper and lower ends of the sleeve 6. Each set of sealing seats 7 is provided with an interconnected gas chamber 8 and a connecting hole 9. The inlet pipe 1 and the outlet pipe 2 are respectively arranged on the two sets of sealing seats 7 and are respectively connected to the corresponding gas chamber 8. A gas distributor 5 is provided on the outlet end of the inlet pipe 1. The filter assembly 4 is provided in two sets, and the two sets of filter assemblies 4 are respectively arranged on the two sets of sealing seats 7. A connector 23 is provided on the sealing seat 7, and the sealing seat 7 is threadedly connected to the sleeve 6 through the connector 23. The gas chamber 8 is composed of a cylindrical cavity in the middle and frustum cavities on both sides.

[0024] Filter assembly 4 includes a filter cartridge 10, a spring 11, and a filter basket 12. One end of the filter cartridge 10 is open, and the other end is provided with a connecting pipe 14. The connecting pipe 14 is threaded into a connecting hole 9. The spring 11 is located inside the filter cartridge 10. The filter basket 12 includes a breathable mesh plate 16, a connecting rod 17, and a sealing plate 18. The breathable mesh plate 16 is located on the spring 11 and has a second breathable hole 19. The connecting rod 17 is located on the breathable mesh plate 16, and the sealing plate 18 is located on the connecting rod 17. The sealing plate 18 is fixed to the filter cartridge 10 by positioning screws 13. The air-permeable mesh plate 16, the sealing plate 18 and the filter cartridge 10 form a filter cavity 24. The filter cavity 24 is filled with adsorbent. The filter cartridge 10 is provided with a first air vent 15 on the side near the sealing plate 18. The filter cavity 24 is connected to the inside of the outer shell 3 through the first air vent 15. The sealing plate 18 is provided with a handle 20. The sealing plate 18 is provided with an addition tube 21. A sealing cap 22 is connected to the addition tube 21 by threads.

[0025] In practical use, first install the two sets of filter components 4 onto the two sets of sealing seats 7 respectively. The detailed installation steps are as follows: install the connecting pipe 14 into the connecting hole 9 through the thread, so that the filter cartridge 10 can be installed on the sealing seat 7. Then open the sealing cover 22 and fill the filter chamber 24 with adsorbent through the adding pipe 21. After filling with adsorbent, close the sealing cover 22. After installing the two sets of filter components 4, connect the two sets of sealing seats 7 to the two ends of the sleeve 6 through the connector 23. This completes the installation of the device, making the operation simpler and more convenient.

[0026] During silane filtration, the silane enters the gas chamber 8 evenly through the inlet pipe 1 and gas distributor 5, then flows evenly into the upper filter cartridge 10 through the connecting pipe 14. After passing through the second vent 19 and being purified by the adsorbent, it enters the outer shell 3 through the first vent 15, thus completing the first filtration of the silane. The silane in the outer shell 3 then passes through the first vent 15 again into the lower filter cartridge 10 for a second filtration, and finally exits through the outlet pipe 2. Multiple filtrations of the silane improve the filtration efficiency.

[0027] When the adsorbent needs to be replaced, simply remove the sealing seat 7 from the sleeve 6, then remove the positioning screw 13, and with the sealing plate 18 facing downwards, pull down the handle 20 to move the sealing plate 18 out from the open side of the filter cartridge 10. The old adsorbent can then be removed. This operation is simpler and more convenient for adsorbent replacement. After removing the adsorbent, allow the sealing plate 18 to return to its original position under the force of the spring 11, and tighten the positioning screw 13 to fix the position of the sealing plate 18. Then, add new adsorbent through the adding tube 21.

[0028] In summary, this solution makes it easier to disassemble and assemble the filter assembly 4 and to replace the adsorbent. This solution allows the gas to enter the filter cartridge 10 more evenly, thereby avoiding rapid local saturation of the adsorbent and enabling the adsorbent to be utilized more fully. By setting two sets of filter assemblies 4, this solution can achieve multi-stage filtration of silane and improve the filtration effect.

[0029] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0030] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0031] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An apparatus for purifying and filtering to prepare high-purity silane, comprising an inlet pipe (1), an outlet pipe (2), a shell (3), and a filter assembly (4), characterized in that: The outer shell (3) includes a sleeve (6) and two sets of sealing seats (7) symmetrically arranged at the upper and lower ends of the sleeve (6). Each set of sealing seats (7) is provided with an interconnected air chamber (8) and a connecting hole (9). The air inlet pipe (1) and the air outlet pipe (2) are respectively provided on the two sets of sealing seats (7) and are respectively connected to the corresponding air chamber (8). A gas distributor (5) is provided on the air outlet end of the air inlet pipe (1). The filter assembly (4) includes a filter cylinder (10), a spring (11) and a filter basket (12). One end of the filter cylinder (10) is open, and the other end is provided with a connecting pipe (14). The connecting pipe (14) is threaded into the connecting hole (9). The spring (11) is located inside the filter cylinder (10). The filter basket (12) includes a breathable mesh. The filter cartridge (10) consists of a plate (16), a connecting rod (17), and a sealing plate (18). The breathable mesh plate (16) is mounted on a spring (11). The breathable mesh plate (16) has a second vent hole (19). The connecting rod (17) is mounted on the breathable mesh plate (16). The sealing plate (18) is mounted on the connecting rod (17). The sealing plate (18) is fixed to the filter cartridge (10) by a positioning screw (13). The breathable mesh plate (16), the sealing plate (18), and the filter cartridge (10) form a filter cavity (24). The filter cavity (24) is filled with an adsorbent. The filter cartridge (10) has a first vent hole (15) on the side near the sealing plate (18). The filter cavity (24) is connected to the interior of the outer shell (3) through the first vent hole (15).

2. The apparatus for purifying and filtering to prepare high-purity silane according to claim 1, characterized in that: The filter assembly (4) is provided in two sets, and the two sets of filter assemblies (4) are respectively provided on two sets of sealing seats (7).

3. The apparatus for purifying and filtering to prepare high-purity silane according to claim 1, characterized in that: The sealing plate (18) is provided with a handle (20).

4. The apparatus for purifying and filtering to prepare high-purity silane according to claim 1, characterized in that: The sealing plate (18) is provided with an adding tube (21), and a sealing cap (22) is connected to the adding tube (21) by a thread.

5. The apparatus for purifying and filtering to prepare high-purity silane according to claim 1, characterized in that: The sealing seat (7) is provided with a connector (23), and the sealing seat (7) is threadedly connected to the sleeve (6) through the connector (23).

6. The apparatus for purifying and filtering to prepare high-purity silane according to claim 1, characterized in that: The air cavity (8) is composed of a cylindrical cavity in the middle and frustum cavities on both sides.

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