Automatic photoresist filling device

Abstract

The utility model relates to the field of filling equipment, concretely to a photoresist automatic filling device, it includes: the positive pressure explosion -proof cabinet, separates and sets up the material taking area and filling area in it, is provided with the material taking door in material taking area front side, is provided with filling area observation door and two glove box in filling area front side, the lifting door is along the vertical direction and is used for separating material taking area and filling area to set up in the positive pressure explosion -proof cabinet, the electronic scale is set up in the filling area bottom, the first filling device is set up in the filling area and is located the electronic scale directly above, the first filling device is used to fill the photoresist into the gallon bottle on the electronic scale, and the clamping mechanism is along the transverse sliding and sets up in the positive pressure explosion -proof cabinet, sets up the translation mechanism in the positive pressure explosion -proof cabinet with the clamping mechanism lateral movement, and the clamping mechanism is used to clamp the gallon bottle placed on material taking area and electronic scale. Solve domestic 1 gallon's photoresist tank filling machine from nothing to have, can reduce the cost, the delivery period shortens, thereby maintains the improvement efficiency.

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