A kind of evaporation equipment

Abstract

The utility model belongs to vacuum evaporation machine technical field, concretely relates to a kind of evaporation equipment, including rack and base, control host, evaporation boat and vacuum coating tank are installed on rack, vacuum coating tank includes jar body, the inner tube body in diffusion pipe and vacuum pipeline are relatively installed in jar body inside, multiple through-holes are set in diffusion pipe both sides, the outlet end of evaporation boat is connected by the connecting head set in the side of jar body with diffusion pipe inner chamber, multiple through-holes are set on the inner tube body, inner tube body is connected fixed pipe, fixed pipe is connected through filter air inlet, filter air outlet is connected connecting pipe, vacuum valve is installed in connecting pipe one end, vacuum pump is connected with vacuum valve, jar body bottom is also connected with inflation pipeline and is equipped with rotating mechanism.The position adjustment of vacuum pipeline and evaporation boat is set again in cooperation with the use of rotating mechanism, so that evaporation source material evenly flows along the surface of base material, effectively guarantee the uniformity of coating;The use of filter effectively avoids evaporation source material to escape to environment.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum evaporation deposition technology, specifically relating to an evaporation deposition device. Background Technology

[0002] Vacuum evaporation technology, as an important technique that heats and evaporates source materials in a vacuum environment, causing their atoms or molecules to deposit on the surface of a substrate to form a thin film, has wide applications in many fields such as electronics, optics, and materials. However, existing vacuum evaporation equipment still faces many problems that urgently need to be solved in practical use.

[0003] Firstly, regarding coating uniformity, the distribution and flow of the evaporation source material are difficult to control precisely in traditional vacuum evaporation equipment. Due to improper relative positioning of the evaporation boat and vacuum tubing, and the lack of effective guiding structures, the flow of the evaporation source material within the vacuum coating tank is chaotic. During vacuum replenishment, the evaporation source material cannot uniformly cover the substrate surface, resulting in uneven film thickness and affecting product quality and performance. For example, in the preparation of optical thin films, uneven film thickness leads to inconsistent light transmittance, reducing the imaging quality of optical devices; in the electronics field, uneven coating may affect the conductivity and stability of electronic components, thereby impacting the normal operation of the entire circuit system.

[0004] Secondly, from an environmental safety perspective, existing vacuum evaporation equipment, during the vacuuming process, directly extracts evaporation source materials that are not deposited on the substrate and releases them into the environment. These evaporation source materials often possess a certain degree of toxicity or corrosiveness, posing a threat not only to the health of operators but also to the surrounding environment. Even if some equipment is equipped with simple filtration devices, their filtration effect is poor and cannot effectively intercept the evaporation source materials, making it difficult to meet increasingly stringent environmental protection requirements. Utility Model Content

[0005] To address the above problems, the purpose of this utility model is to provide a vapor deposition equipment that solves the problems of uneven coating and significant environmental safety hazards in the existing technology.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a vapor deposition equipment, comprising a frame and a base, wherein a control host, an evaporation boat, and a vacuum coating tank are mounted on the frame, the vacuum coating tank comprising a tank body, a tank lid connected to the top of the tank body by a hinge, and a locking body and a locking buckle respectively installed on the tank lid and the tank body; a diffuser tube and an inner tube of a vacuum pipeline are installed opposite each other inside the tank body, and multiple through holes are opened on both sides of the diffuser tube; the inner cavity of the diffuser tube is connected to the evaporation boat through a connector opened on the side of the tank body. At the outlet end of the boat, multiple through holes are opened on the curved side of the inner tube. The inner tube is connected to a fixed pipe installed at the bottom of the tank. The fixed pipe is connected to the air inlet of the filter. The air outlet of the filter is connected to a connecting pipe. A vacuum valve is installed at one end of the connecting pipe and the vacuum valve is connected to the air inlet of the vacuum pump. The bottom of the tank is also connected to an air filling pipeline and a rotating disk in a rotating mechanism is rotatably installed thereon. The rotating disk is fixed on a rotating shaft. The bottom end of the rotating shaft is connected to the output shaft of a geared motor. The geared motor is mounted on a frame.

[0007] The beneficial effects of this utility model are as follows: by setting the vacuum pipeline and evaporation boat in a suitable relative position in the vacuum coating tank and guiding them fully, and with the use of the rotating mechanism, the evaporation source material can flow evenly along the surface of the substrate material during the vacuum replenishment process, effectively ensuring the uniformity of the coating; the use of the filter effectively prevents the evaporation source material from escaping into the environment.

[0008] In order to ensure that the evaporation source material is evenly covered on the surface of the substrate material;

[0009] As a further improvement to the above technical solution: the diffuser tube is a vertically installed square cap structure, and the through holes on both sides of the diffuser tube are equidistantly spaced in the axial direction of the tank.

[0010] The beneficial effect of this improvement is that the evaporation source material sprayed from the evaporation boat can be evenly sprayed and distributed inside the tank through multiple through holes opened on the diffuser.

[0011] In order to ensure that the evaporation source material is evenly covered on the surface of the substrate material during the vacuum filling process;

[0012] As a further improvement to the above technical solution: the through holes opened on the inner tube are equidistantly spaced in the axial direction of the tank and the inner tube.

[0013] The beneficial effect of this improvement is that the evaporation source material ejected from both sides of the diffuser tube can flow uniformly along the surface of the substrate material during the process of being drawn into the inner tube body during vacuum replenishment.

[0014] To further improve the uniformity of the coating by using a rotating mechanism;

[0015] As a further improvement to the above technical solution: the axis of the rotating shaft is collinear with the axis of the tank.

[0016] The beneficial effect of this improvement is that the evaporation source material ejected from both sides of the diffuser tube is drawn into the inner tube body during the vacuum replenishment process, and flows uniformly along the surface of the rotating base material.

[0017] To effectively ensure the sealing of the rotating mechanism;

[0018] As a further improvement to the above technical solution: a dynamic sealing ring is provided between the base and the rotating shaft.

[0019] The beneficial effect of this improvement is that the design of the dynamic sealing mechanism can effectively ensure the sealing performance of the rotating mechanism.

[0020] To prevent the evaporation source material from being extracted under negative pressure and affecting environmental safety;

[0021] As a further improvement to the above technical solution: the filter includes an outer shell, the outer shell is a three-way pipe structure, one end of the outer shell is threaded with an internal threaded cap, the internal threaded cap is connected to one end of the filter cartridge, the other end of the filter cartridge is flatly fitted to the inner end face of the outer shell, the end of the outer shell opposite to the internal threaded cap is connected to a connecting pipe, and the other end of the outer shell is connected to a fixing pipe.

[0022] The beneficial effect of this improvement is that when the evaporation source material flows towards the connecting pipe, it can be effectively isolated and filtered by the filter cartridge in the filter.

[0023] To facilitate and safely cool the substrate and film;

[0024] As a further improvement to the above technical solution: a nitrogen valve is installed at one end of the inflation pipeline, the nitrogen valve is connected to a nitrogen pipeline, and the inflation pipeline is arranged on the tanks on both sides of the rotating mechanism opposite to the fixed pipe.

[0025] The beneficial effects of this improvement are: after opening the nitrogen valve, high-purity nitrogen can be slowly introduced into the vacuum coating tank, so that the gas can fully contact the thin film and the substrate surface and then be discharged through the vacuum pipeline, carrying away the heat.

[0026] The parts of the device not covered herein are the same as or can be implemented using existing technologies. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of the present invention. Figure 1 ;

[0028] Figure 2 This is a schematic diagram of the structure of the present invention. Figure 2 ;

[0029] Figure 3 This is a cross-sectional view of the vacuum coating tank in this utility model;

[0030] Figure 4 This is an enlarged view of A in this utility model;

[0031] In the diagram: 1. Frame; 2. Control unit; 3. Evaporation boat; 4. Vacuum coating tank; 41. Tank body; 42. Tank lid; 43. Lock; 44. Connector; 45. Diffuser tube; 46. Glass window; 5. Rotating mechanism; 51. Base; 52. Rotating shaft; 53. Gear motor; 54. Rotating disk; 6. Vacuum pipeline; 61. Inner tube; 62. Fixing tube; 63. Vacuum valve; 60. Filter; 64. Outer shell; 65. Filter cartridge; 66. Internal threaded cap; 67. Connecting pipe; 7. Gas filling pipeline; 71. Nitrogen valve. Detailed Implementation

[0032] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not be used to limit the scope of protection of the present invention in any way. Example 1

[0033] like Figure 1As shown in Figure 4: A vapor deposition apparatus includes a frame 1 and a base 51. A control host 2, an evaporation boat 3, and a vacuum coating tank 4 are mounted on the frame 1. The vacuum coating tank 4 includes a tank body 41. A tank cover 42 is hinged to the top of the tank body 41. Locking bodies and latches of latches 43 are respectively installed on the tank cover 42 and the tank body 41. A diffuser tube 45 and an inner tube 61 of a vacuum pipeline 6 are installed opposite each other inside the tank body 41. Multiple through holes are provided on both sides of the diffuser tube 45. The inner cavity of the diffuser tube 45 is connected to the outlet end of the evaporation boat 3 via a connector 44 located on the side of the tank body 41. Multiple through holes are provided on the curved side of the inner tube 61, and the inner tube 61 is connected to a fixed pipe 6 installed at the bottom of the tank body 41. 2. The fixed pipe 62 is connected to the air inlet of the filter 60, and the air outlet of the filter 60 is connected to the connecting pipe 67. A vacuum valve 63 is installed at one end of the connecting pipe 67, and the vacuum valve 63 is connected to the air inlet of the vacuum pump. The bottom of the tank 41 is also connected to the gas filling pipe 7 and a rotating disk 54 in the rotating mechanism 5 is rotatably installed thereon. The rotating disk 54 is fixed on the rotating shaft 52, and the bottom end of the rotating shaft 52 is connected to the output shaft of the reduction motor 53. The reduction motor 53 is installed on the frame 1. The vacuum pipe 6 and the evaporation boat 3 are placed in a suitable relative position in the vacuum coating tank 4 and fully guided. With the use of the rotating mechanism 5, the evaporation source material can flow evenly along the surface of the substrate material during the vacuum filling process, effectively ensuring the coating. To ensure uniformity, the diffuser tube 45 is a vertically installed square cap structure. The through holes on both sides of the diffuser tube 45 are equidistantly spaced along the axial direction of the tank body 41. The evaporation source material ejected from the evaporation boat 3 can be evenly distributed inside the tank body 41 through the multiple through holes on the diffuser tube 45. The through holes on the inner tube body 61 are equidistantly spaced along the axial direction of the tank body 41 and the inner tube body 61. The evaporation source material ejected from both sides of the diffuser tube 45 can flow evenly along the surface of the substrate material during the vacuum replenishment process when it is drawn towards the inner tube body 61. The axis of the rotating shaft 52 is collinear with the axis of the tank body 41. During the vacuum replenishment process, the evaporation source material ejected from both sides of the diffuser tube 45 is drawn towards the inner tube body 61 and flows evenly along the surface of the rotating substrate material. The flow of the evaporation source material is effectively isolated and filtered by the filter cartridge 65 in the filter 60. A dynamic sealing ring is provided between the base 51 and the rotating shaft 52. The design of the dynamic sealing mechanism effectively ensures the sealing performance of the rotating mechanism 5. The filter 60 includes a housing 64, which is a three-way pipe structure. One end of the housing 64 is threadedly connected to an internally threaded cap 66, which is connected to one end of a filter cartridge 65. The other end of the filter cartridge 65 is flush with the inner end face of the housing 64. The end of the housing 64 opposite to the internally threaded cap 66 is connected to a connecting pipe 67, and the other end of the housing 64 is connected to a fixing pipe 62. When the evaporation source material flows towards the connecting pipe 67, it can be effectively isolated and filtered by the filter cartridge 65 in the filter 60. A nitrogen valve 71 is installed at one end of the gas filling pipe 7.The nitrogen valve 71 is connected to a nitrogen pipeline. The filling pipeline 7 and the fixed pipe 62 are respectively arranged on the tanks 41 on both sides of the rotating mechanism 5. After opening the nitrogen valve 71, high-purity nitrogen can be slowly introduced into the vacuum coating tank 4, allowing the gas to fully contact the film and substrate surface before being discharged through the vacuum pipeline 6, carrying away heat.

[0034] The working principle of this technical solution is as follows: When using this vacuum evaporation equipment for coating, first open the tank cover 42, place the cleaned substrate material on the rotating disk 54, and fix it with clamps to ensure that the substrate material will not shift during rotation. Then close the tank cover 42 and lock the tank cover 42 to the tank body 41 with the latch 43 to ensure the airtightness of the vacuum coating tank 4. Next, start the control host 2 and turn on the vacuum pump. The vacuum pipeline 6, composed of vacuum valve 63, connecting pipe 67, filter 60, fixing pipe 62, and inner tube 61, performs a vacuuming operation on the vacuum coating tank 4. During the vacuuming process, due to the uniformly distributed through holes on the curved side of the inner tube 61, the gas inside the tank 41 can be uniformly extracted, ensuring that a uniform vacuum environment is formed inside the tank 41. When the vacuum coating tank 4 reaches the required vacuum level... Then, the heating device of the evaporation boat 3 is activated, causing the evaporation source material inside the evaporation boat 3 to evaporate. The evaporation source material enters the diffuser tube 45 through the connector 44. Since the diffuser tube 45 is a vertically installed square cap structure and the through holes on both sides are equidistantly spaced in the axial direction of the tank body 41, the evaporation source material will be evenly sprayed out from these through holes and distributed inside the tank body 41. At this time, the reduction motor 53 is activated, driving the rotating shaft 52 and the rotating disk 54 to rotate. The substrate material rotates at a uniform speed. During the vacuum replenishment process, since the through holes on the inner tube 61 are equidistantly spaced in the axial direction of the tank body 41 and the inner tube 61, and the axis of the rotating shaft 52 is collinear with the axis of the tank body 41, the evaporation source material sprayed from both sides of the diffuser tube 45 will flow evenly along the surface of the rotating substrate material under the action of negative pressure and gradually deposit on the substrate material to form a uniform thin film.

[0035] After the vapor deposition is completed, the heating device and vacuum pump of the evaporation boat 3 are turned off, and the nitrogen valve 71 is opened. High-purity nitrogen is slowly introduced into the vacuum coating tank 4 through the gas filling pipe 7. The nitrogen fully contacts the surface of the film and the substrate, removes heat, and cools the substrate and film. The cooled gas is discharged from the tank 41 through the vacuum pipe 6. During the entire vacuuming and degassing process, the evaporation source material that is not deposited on the substrate will flow with the gas and enter the filter 60 through the fixed pipe 62. Due to the isolation and filtration effect of the filter cartridge 65 in the filter 60, the evaporation source material is effectively intercepted, preventing it from being discharged from the equipment and polluting the environment. The filtered gas is then extracted by the vacuum pump through the connecting pipe 67 and the vacuum valve 63. After the substrate and film have cooled to a suitable temperature, the nitrogen valve 71 is closed, the tank cover 42 is opened, and the coated substrate material is taken out, completing the entire vacuum vapor deposition process.

[0036] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0037] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only for the purpose of helping to understand the method and core ideas of the present invention. The above descriptions are only preferred embodiments of the present invention. It should be noted that due to the limitations of textual expression, there are objectively infinite specific structures. For those skilled in the art, several improvements, modifications, or changes can be made without departing from the principles of the present invention, and the above technical features can also be combined in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of the present invention.

Claims

1. A vapor deposition apparatus, characterized in that: The system includes a frame (1) and a base (51). The frame (1) is equipped with a control host (2), an evaporation boat (3), and a vacuum coating tank (4). The vacuum coating tank (4) includes a tank body (41). The top of the tank body (41) is connected to a tank cover (42) by a hinge. The tank cover (42) and the tank body (41) are respectively equipped with a lock body and a lock buckle (43). Inside the tank body (41), a diffuser tube (45) and an inner tube (61) of a vacuum pipeline (6) are installed opposite each other. Multiple through holes are opened on both sides of the diffuser tube (45). The inner cavity of the diffuser tube (45) is connected to the outlet end of the evaporation boat (3) through a connector (44) opened on the side of the tank body (41). The inner tube (61) Multiple through holes are provided on the curved side of the inner tube (61). The inner tube (61) is connected to the fixed tube (62) installed at the bottom of the tank (41). The fixed tube (62) is connected to the air inlet of the filter (60). The air outlet of the filter (60) is connected to the connecting tube (67). A vacuum valve (63) is installed at one end of the connecting tube (67) and the vacuum valve (63) is connected to the air inlet of the vacuum pump. The bottom of the tank (41) is also connected to the air filling pipeline (7) and the rotating disk (54) in the rotating mechanism (5) is rotatably installed. The rotating disk (54) is fixed on the rotating shaft (52). The bottom end of the rotating shaft (52) is connected to the output shaft of the geared motor (53). The geared motor (53) is installed on the frame (1).

2. The vapor deposition equipment according to claim 1, characterized in that: The diffuser tube (45) is a vertically installed square cover structure, and the through holes on both sides of the diffuser tube (45) are equidistantly spaced in the axial direction of the tank body (41).

3. The vapor deposition equipment according to claim 1, characterized in that: The through holes opened on the inner tube (61) are equidistantly spaced in the axial direction of the tank (41) and the inner tube (61).

4. The vapor deposition equipment according to claim 1, characterized in that: The axis of the rotating shaft (52) is collinear with the axis of the tank body (41).

5. The vapor deposition equipment according to claim 1, characterized in that: A dynamic sealing ring is provided between the base (51) and the rotating shaft (52).

6. The vapor deposition equipment according to claim 1, characterized in that: The filter (60) includes an outer shell (64), which is a three-way pipe structure. One end of the outer shell (64) is threaded with an inner thread cap (66), which is connected to one end of a filter cartridge (65). The other end of the filter cartridge (65) is flatly fitted to the inner end face of the outer shell (64). The end of the outer shell (64) opposite to the inner thread cap (66) is connected to a connecting pipe (67), and the other end of the outer shell (64) is connected to a fixing pipe (62).

7. The vapor deposition equipment according to claim 1, characterized in that: A nitrogen valve (71) is installed at one end of the inflation pipeline (7), and the nitrogen valve (71) is connected to a nitrogen pipeline. The inflation pipeline (7) and the fixed pipe (62) are arranged opposite to each other on the tanks (41) on both sides of the rotating mechanism (5).

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