Rotary sputtering target nozzle protection device

Abstract

The utility model belongs to the field of protection device, concretely relates to a kind of rotary sputtering target material pipe orifice protection device, including pipeline, the upper end fixed mounting of pipeline has threaded orifice, the upper end fixed connection of pipeline has installation ring, the outside hinged of installation ring has two symmetrical distribution's protective cover, protective cover is provided with sealing mechanism, the front middle upper portion of pipeline is fixedly connected with fixed plate, the inside sliding connection of fixed plate has connecting frame, the upper end fixed connection of connecting frame has limit frame, the front lower portion of protective cover is fixedly connected with limit ear.The utility model is equipped with installation ring, protective cover and sealing frame and other structures on pipeline, the threaded orifice can be protected by the hinging between installation ring and protective cover during use, when protective cover is stressed, it can directly impact on pipeline, cannot act on the thread of threaded orifice, so that the threaded orifice damage can be effectively avoided.

Description

Technical Field

[0001] This utility model relates to the field of protection device technology, specifically a protective device for the nozzle of a rotating sputtering target. Background Technology

[0002] In a rotating sputtering target system, the design and maintenance of the nozzle (usually referring to the cooling water inlet / outlet or the connection point of the target) are crucial to the stability of the sputtering process and the lifespan of the target. According to the patent authorization announcement number: CN216103725U, a rotating sputtering target nozzle protection device is provided. This utility model provides a rotating sputtering target nozzle protection device, including a pipe body and a ring cover. Both ends of the pipe body are connected to pipe openings. The outer wall of the pipe opening is connected to the ring cover. The inner wall of the right side of the ring cover is provided with an arc-shaped groove. The outer wall of the right side of the pipe opening is connected to a protective pad. The protective pad is in contact with the outer wall of the pipe body and fits into the arc-shaped groove.

[0003] However, most existing protective devices use threaded connections, which can easily damage the bolts when the pipeline is subjected to impact. Furthermore, the threaded connection requires rotating the protective cover for disassembly, hindering quick removal. Therefore, improvements to the existing technology are necessary. Utility Model Content

[0004] The purpose of this invention is to provide a protective device for the nozzle of a rotating sputtering target, which solves the problems that the protective cover is easily damaged by impact and that it is not easy to open quickly.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a rotating sputtering target nozzle protection device, comprising a pipeline, a threaded nozzle fixedly installed at the upper end of the pipeline, an installation ring fixedly connected to the upper end of the pipeline, two symmetrically distributed protective covers hinged to the outer side of the installation ring, a sealing mechanism provided on the protective covers, a fixing plate fixedly connected to the upper center of the front of the pipeline, a connecting frame slidably connected inside the fixing plate, a limit frame fixedly connected to the upper end of the connecting frame, a limit ear fixedly connected to the lower front of the protective cover, and a spring provided on the outer side of the connecting frame.

[0006] Preferably, the sealing mechanism includes a sealing ring, a sealing ring is fixedly connected to the outer side of the mounting ring, a sealing frame is fixedly connected to the outer side of the protective cover, the sealing ring is fixedly connected to the pipeline, the sealing ring contacts the protective cover, and the sealing ring can seal the connection between the protective cover and the mounting ring.

[0007] Preferably, the two sealing frames are in contact with each other, the sealing frames are made of silicone material, the sealing ring is in contact with the sealing frames, and the sealing frames can seal the connection between the two protective covers.

[0008] Preferably, the limiting frame is slidably connected to the limiting ear, the threaded tube opening is located inside the mounting ring, and the limiting frame can position the protective cover through the limiting ear.

[0009] Preferably, one end of the spring is fixedly connected to the connecting frame, and the other end of the spring is fixedly connected to the fixing plate. The spring can support the connecting frame through its elastic force.

[0010] Preferably, a handle is fixedly connected to the lower end of the connecting frame, the handle is in contact with the fixed plate, and the handle can drive the connecting frame to move.

[0011] Preferably, the protective cover is made of stainless steel, and the threaded port is located inside the two protective covers. Stainless steel has good corrosion resistance.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] 1. This utility model adds a mounting ring, a protective cover, and a sealing frame to the pipeline. During use, the threaded pipe opening can be protected by the hinge between the mounting ring and the protective cover. When the protective cover is subjected to force, it can directly impact the pipeline and cannot act on the threads of the threaded pipe opening, thus effectively avoiding damage to the threaded pipe opening.

[0014] 2. This utility model adds a fixing plate, a limiting frame, and a handle to the pipeline. During use, the spring force can drive the limiting frame to slide into the limiting ear of the protective cover to limit the protective cover. When it is needed, simply pull the handle to move the limiting frame away from the limiting ear to release the limitation on the protective cover, so that the protective cover can be easily unfolded. Attached Figure Description

[0015] Figure 1 This is a perspective view of the overall structure of this utility model;

[0016] Figure 2 For the present utility model Figure 1 The unfolded diagram of the protective cover;

[0017] Figure 3 For the present utility model Figure 1 A three-dimensional view of the mounting ring;

[0018] Figure 4 For the present utility model Figure 1 A 3D view of the protective cover;

[0019] Figure 5 For the present utility model Figure 1 Enlarged view of the A-section structure;

[0020] Figure 6 For the present utility model Figure 5 A magnified 3D view of the limit frame.

[0021] In the diagram: 1. Pipeline; 2. Threaded pipe opening; 3. Mounting ring; 4. Sealing mechanism; 5. Protective cover; 6. Fixing plate; 7. Connecting bracket; 8. Limiting bracket; 9. Limiting ear; 10. Spring; 11. Handle; 41. Sealing ring; 42. Sealing frame. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-6 A rotating sputtering target nozzle protection device includes a pipeline 1, a threaded nozzle 2 fixedly installed at the upper end of the pipeline 1, an installation ring 3 fixedly connected to the upper end of the pipeline 1, two symmetrically distributed protective covers 5 hinged to the outer side of the installation ring 3, a sealing mechanism 4 provided on the protective cover 5, a fixing plate 6 fixedly connected to the upper middle part of the front of the pipeline 1, a connecting frame 7 slidably connected inside the fixing plate 6, a limit frame 8 fixedly connected to the upper end of the connecting frame 7, a limit ear 9 fixedly connected to the lower front of the protective cover 5, and a spring 10 provided on the outer side of the connecting frame 7.

[0024] Please see Figure 1-6 The sealing mechanism 4 includes a sealing ring 41. The sealing ring 41 is fixedly connected to the outside of the mounting ring 3. The sealing frame 42 is fixedly connected to the outside of the protective cover 5. The sealing ring 41 is fixedly connected to the pipeline 1 and contacts the protective cover 5. The sealing ring 41 can seal the connection between the protective cover 5 and the mounting ring 3. The two sealing frames 42 are in contact with each other. The sealing frame 42 is made of silicone material. The sealing ring 41 contacts the sealing frame 42, and the sealing frame 42 can seal the connection between the two protective covers 5.

[0025] Please see Figure 1-6The limiting frame 8 and the limiting ear 9 are slidably connected. The threaded pipe port 2 is located inside the mounting ring 3. The limiting frame 8 can position the protective cover 5 through the limiting ear 9. One end of the spring 10 is fixedly connected to the connecting frame 7, and the other end of the spring 10 is fixedly connected to the fixing plate 6. The spring 10 can support the connecting frame 7 through its elasticity. The lower end of the connecting frame 7 is fixedly connected to a handle 11. The handle 11 contacts the fixing plate 6 and can drive the connecting frame 7 to move. The protective cover 5 is made of stainless steel. The threaded pipe port 2 is located inside the two protective covers 5. Stainless steel has good corrosion resistance.

[0026] The specific implementation process of this utility model is as follows: When protecting the threaded pipe opening 2, the threaded pipe opening 2 can be protected by the protective cover 5, which can effectively prevent the thread from being stressed and effectively improve the protection of the threaded pipe opening 2. When the threaded pipe opening 2 needs to be used, pull down the handle 11. The handle 11 drives the limiting frame 8 to move through the connecting frame 7. During the movement, the connecting frame 7 can compress the spring 10. When the limiting frame 8 is disengaged from the limiting ear 9, the limiting ear 9 and the protective cover 5 can be released. Then, the protective cover 5 is flipped over to expose the threaded pipe opening 2, so that the protective cover 5 can be opened quickly.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A rotating sputtering target nozzle protection device, comprising a pipeline (1), characterized in that: A threaded pipe opening (2) is fixedly installed at the upper end of the pipe (1). An installation ring (3) is fixedly connected to the upper end of the pipe (1). Two symmetrically distributed protective covers (5) are hinged to the outside of the installation ring (3). A sealing mechanism (4) is provided on the protective cover (5). A fixing plate (6) is fixedly connected to the upper middle part of the front of the pipe (1). A connecting frame (7) is slidably connected inside the fixing plate (6). A limit frame (8) is fixedly connected to the upper end of the connecting frame (7). A limit ear (9) is fixedly connected to the lower part of the front of the protective cover (5). A spring (10) is provided on the outside of the connecting frame (7).

2. The rotating sputtering target nozzle protection device according to claim 1, characterized in that: The sealing mechanism (4) includes a sealing ring (41), the outer side of the mounting ring (3) is fixedly connected to the sealing ring (41), the outer side of the protective cover (5) is fixedly connected to the sealing frame (42), the sealing ring (41) is fixedly connected to the pipeline (1), and the sealing ring (41) is in contact with the protective cover (5).

3. The rotating sputtering target nozzle protection device according to claim 2, characterized in that: The two sealing frames (42) are in contact with each other. The sealing frames (42) are made of silicone material. The sealing ring (41) is in contact with the sealing frames (42).

4. The rotating sputtering target nozzle protection device according to claim 1, characterized in that: The limiting bracket (8) is slidably connected to the limiting ear (9), and the threaded pipe opening (2) is located inside the mounting ring (3).

5. The rotating sputtering target nozzle protection device according to claim 1, characterized in that: One end of the spring (10) is fixedly connected to the connecting frame (7), and the other end of the spring (10) is fixedly connected to the fixing plate (6).

6. The rotating sputtering target nozzle protection device according to claim 1, characterized in that: A handle (11) is fixedly connected to the lower end of the connecting frame (7), and the handle (11) is in contact with the fixing plate (6).

7. The rotating sputtering target nozzle protection device according to claim 1, characterized in that: The protective cover (5) is made of stainless steel, and the threaded port (2) is located inside the two protective covers (5).

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