A stable taking-out device for a crucible of a silicon carbide single crystal growth furnace

Abstract

The utility model discloses a kind of silicon carbide single crystal growth furnace crucible stable extraction devices, specifically in the technical field of silicon carbide single crystal growth furnace, including several skeletons, several skeletons lower part are uniformly fixed and installed with universal wheel, several skeleton upper part are fixed and installed with guide rail assembly, the left side front of guide rail assembly is fixed and installed with lifting assembly, the middle part of guide rail assembly is fixed and installed with pressing mechanism.The utility model discloses a kind of silicon carbide single crystal growth furnace crucible stable extraction devices, lifting assembly can be set when lifting crucible, greatly reduce the impact of crucible and internal crystal when lifting crucible, can effectively protect the integrity of silicon carbide crystal, significantly improve product yield, reduce the production cost waste due to crystal damage, provide reliable guarantee for high quality, high efficiency of silicon carbide single crystal production.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide single crystal growth furnace technology, and in particular to a crucible stabilization and removal device for a silicon carbide single crystal growth furnace. Background Technology

[0002] Silicon carbide (SiC), as a typical representative of third-generation semiconductor materials, plays an irreplaceable role in fields such as new energy vehicles, 5G communications, and aerospace due to its excellent wide bandgap, high breakdown field strength, and high thermal conductivity. In the silicon carbide single crystal growth process, the crucible, as the core component that holds the raw materials and enables crystal growth, is crucial in its removal. This step not only directly affects the integrity and quality of the crystal but is also a key step in ensuring the efficient and safe operation of the entire production process.

[0003] Currently, existing crucible removal devices for silicon carbide single crystal growth furnaces on the market have revealed numerous problems in practical applications. Some devices employ power units with excessively rapid start-up and shutdown processes, resulting in significant impacts during crucible lifting. This can easily cause crucible breakage or internal crystal fragmentation, severely impacting product yield.

[0004] Therefore, a stable crucible removal device for silicon carbide single crystal growth furnace is needed. Utility Model Content

[0005] The main objective of this invention is to provide a stable crucible removal device for silicon carbide single crystal growth furnaces, which can effectively solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A crucible stabilization and removal device for a silicon carbide single crystal growth furnace includes several frames, each frame having universal wheels fixedly installed at its lower part, a guide rail assembly fixedly installed at the upper part of the frames, a lifting component fixedly installed at the front left side of the guide rail assembly, and a pressing mechanism fixedly installed in the middle of the guide rail assembly.

[0008] Preferably, the guide rail assembly includes a plurality of slide rails, each slide rail being fixedly installed on the upper end of a plurality of frames. Each slide rail has a trolley slidably installed in its inner cavity. Each trolley has a fixing plate fixedly installed on one side of its upper part that is close to each other. A slide rod is fixedly installed between the opposing surfaces of two horizontally arranged fixing plates and between the opposing surfaces of two vertically arranged fixing plates. A controller and a synchronous operation sensor are fixedly installed on the upper ends of each trolley.

[0009] Preferably, the two slide bars are arranged vertically.

[0010] Preferably, the lifting assembly includes a ramp motor, which is fixedly installed on the left rear side of the front slide rail. A second fixing plate is fixedly installed on the upper end of the slide rail, and a turntable is rotatably installed on the upper end of the second fixing plate. A first guide block is fixedly installed on the upper end of the turntable.

[0011] Preferably, a steel wire rope is wound inside the ramp motor, and the end of the steel wire rope away from the ramp motor passes through the inside of the guide block and extends to the outside.

[0012] Preferably, the pressing mechanism includes a slider, which is slidably connected to the outer surface of two slide rods. A guide block is rotatably installed on the upper end of the slider away from the axis. The end of the wire rope away from the inclined motor is wound and connected to the upper end of the slider and extends to the outside. A tension sensor is fixedly connected to the end of the wire rope away from the inclined motor. A pull wire is fixedly installed at the lower part of the tension sensor. A quick-connect buckle is fixedly installed at the lower end of the pull wire.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. During use, the lifting component of this utility model can greatly reduce the impact on the crucible and internal crystals when lifting the crucible, effectively protect the integrity of the silicon carbide crystal, significantly improve the product yield, reduce the production cost waste caused by crystal damage, and provide a reliable guarantee for high quality and high efficiency in silicon carbide single crystal production.

[0015] 2. During use, the present invention can easily move the crucible to any designated position within the frame plane through the set guide rail assembly, which greatly improves the convenience and adaptability of operation. At the same time, it can ensure that the movement process is flexible and stable, effectively avoid vertical deviation, achieve precise horizontal positioning, reduce the potential damage risk to the crucible and internal crystals caused by movement deviation, and ensure the stability of silicon carbide single crystal production process. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic cross-sectional view of the guide rail assembly of this utility model;

[0018] Figure 3 This is a schematic cross-sectional view of the lifting component of this utility model;

[0019] Figure 4 This is a schematic diagram of the cross-sectional structure of the turntable of this utility model;

[0020] Figure 5 This is a schematic cross-sectional view of the pressing mechanism of this utility model;

[0021] Figure 6 This is a schematic diagram of the overall structure of this utility model from another perspective.

[0022] In the diagram: 1. Frame; 2. Guide rail assembly; 21. Slide rail; 22. Trolley; 23. Fixing plate one; 24. Slide rod; 25. Controller; 26. Synchronous operation sensor; 3. Caster wheel; 4. Pressing mechanism; 41. Slider; 42. Guide block two; 43. Tension sensor; 44. Pull cable; 45. Quick-connect buckle; 5. Lifting assembly; 51. Inclined motor; 52. Steel wire rope; 53. Fixing plate two; 54. Turntable; 55. Guide block one. Detailed Implementation

[0023] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0024] Example 1, as Figures 1 to 6 As shown, a crucible stabilization and removal device for a silicon carbide single crystal growth furnace includes several frames (1), each frame (1) is fixedly equipped with casters (3) at its lower part, and a guide rail assembly (2) is fixedly installed on the upper part of the frame (1). A lifting assembly (5) is fixedly installed on the front left side of the guide rail assembly (2), and a pressing mechanism (4) is fixedly installed in the middle of the guide rail assembly (2).

[0025] In the specific implementation process of this utility model, the entire device is first moved above the growth furnace by the universal wheels (3). Then, the internal drive structure of the guide rail assembly (2) is activated, causing the internal structure of the guide rail assembly (2) to move the pressing mechanism (4) at any position between the guide rail assemblies (2). Then, the internal structure of the guide rail assembly (2) drives the pressing mechanism (4) to move above the crucible inside the growth furnace. Then, the internal structure of the lifting assembly (5) is activated, causing the internal structure of the pressing mechanism (4) to slowly descend into the growth furnace. Finally, the internal structure of the pressing mechanism (4) is fixed above the crucible. Then, by activating the lifting component (5), the internal structure of the pressing mechanism (4) is driven to rise. During the process of lifting the crucible, a uniform and appropriate force is applied to the insulation felt under the precise control of its internal structure to ensure the stability of the insulation felt and avoid damage caused by improper pressure. When the crucible is lifted to a certain height, the internal structure of the guide rail component (2) starts to operate, so that the crucible can move flexibly and stably to any specified position within the skeleton (1), while effectively avoiding vertical deviation and achieving precise horizontal positioning, making it convenient for operators to move the crucible to the position required for subsequent processing.

[0026] Example 2: In order to achieve the purpose of driving the internal structure of the pressing mechanism (4) to descend and lift the crucible, refer to Figure 3 and Figure 4 The lifting component (5) includes a ramp motor (51), which is fixedly installed on the left rear of the slide rail (21) on the front side. A second fixing plate (53) is fixedly installed on the upper end of the slide rail (21), and a turntable (54) is rotatably installed on the upper end of the second fixing plate (53). A first guide block (55) is fixedly installed on the upper end of the turntable (54).

[0027] Furthermore, a steel wire rope (52) is wound inside the ramp motor (51), and the end of the steel wire rope (52) away from the ramp motor (51) extends from the inside of the guide block (55) to the outside.

[0028] In the above, the inclined motor (51) is started first, and the wire rope (52) is driven to unwind slowly and smoothly under the action of the inclined motor (51), thereby driving the internal structure of the pressing mechanism (4) to descend or rise. At the same time, under the action of the set turntable (54) and the fixed plate two (53), the internal structure of the pressing mechanism (4) can move between the skeleton (1) through the guide rail assembly (2), while the surface of the wire rope (52) is pressed against the guide block one (55), so that the guide block one (55) drives the turntable (54) to rotate on the surface of the fixed plate two (53), thereby guiding the wire rope (52) while it swings around, ensuring that the wire rope (52) will not be twisted or jammed.

[0029] The ramp motor (51) mentioned above has the characteristics of slow and uniform start-up and stop, smooth operation, low elastic deformation of the wire rope (52) after being pulled, and small impact of lifting crucible on crucible and crystal inside crucible.

[0030] Specifically, in order to achieve the purpose of lifting the crucible by causing the internal structure of the pressing mechanism (4) to descend, refer to Figure 5 In this scheme, the pressing mechanism (4) includes a slider (41), which is slidably connected to the outer surface of two slide rods (24). A guide block (42) is rotatably installed on the side of the upper end of the slider (41) away from the axis. The end of the wire rope (52) away from the ramp motor (51) is wound and connected to and extends through the upper end of the slider (41) to the outside. The end of the wire rope (52) away from the ramp motor (51) is fixedly connected to a tension sensor (43). A pull wire (44) is fixedly installed at the lower part of the tension sensor (43). A quick-connect buckle (45) is fixedly installed at the lower end of the pull wire (44).

[0031] In the above process, the inclined motor (51) unwinds the wire rope (52), causing the wire rope (52) to drive the tension sensor (43) to descend, thereby causing the pull wire (44) to drive the quick-connect buckle (45) to descend and contact the crucible. Then, the quick-connect buckle (45) is fixed above the crucible. Then, the inclined motor (51) drives the wire rope (52) to rewind, and at the same time, the wire rope (52) pulls the tension sensor (43) upward, thereby causing the tension sensor (43) to pull the pull wire (44) upward, thus achieving the purpose of stably lifting the crucible upward.

[0032] The concentric ring main structure of the quick-connect buckle (45) mentioned above applies uniform and appropriate pressure to the insulation felt under the precise control of the tension sensor (43), ensuring the stability of the insulation felt and avoiding damage caused by improper pressure.

[0033] Specifically, in order to move the lifted crucible to a designated position, refer to... Figure 2 In this scheme, the guide rail assembly (2) includes several slide rails (21), which are fixedly installed on the upper end of several frames (1). Each slide rail (21) has a trolley (22) slidably installed in its inner cavity. Each trolley (22) has a fixing plate (23) fixedly installed on the upper side of each other. A slide rod (24) is fixedly installed between the opposite faces of two horizontally arranged fixing plates (23) and between the opposite faces of two vertically arranged fixing plates (23). A controller (25) and a synchronous operation sensor (26) are fixedly installed on the upper end of each trolley (22).

[0034] Furthermore, the two slide bars (24) are arranged vertically.

[0035] In the above, when the steel wire rope (52) lifts the crucible to a certain height, the controller (25) controls the trolley (22) to move. Then, under the action of the set synchronous operation sensor (26), the trolley (22) can slide smoothly inside the slide rail (21), effectively avoiding vertical deviation and achieving precise horizontal positioning. While the slide bar (24) is moving, the slider (41) slides on the surface of another slide bar (24), so that it can drive the crucible to move arbitrarily between several skeletons (1), thereby lifting the crucible away from the growth furnace and moving it to the preset position.

[0036] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A crucible stabilization and removal device for a silicon carbide single crystal growth furnace, comprising several skeletons (1), characterized in that: A universal wheel (3) is fixedly installed on the lower part of several of the skeletons (1), and a guide rail assembly (2) is fixedly installed on the upper part of several of the skeletons (1). A lifting assembly (5) is fixedly installed on the front left side of the guide rail assembly (2), and a pressing mechanism (4) is fixedly installed in the middle of the guide rail assembly (2).

2. The crucible stabilization and removal device for a silicon carbide single crystal growth furnace according to claim 1, characterized in that: The guide rail assembly (2) includes several slide rails (21), which are fixedly installed on the upper end of several frames (1). Each slide rail (21) has a trolley (22) slidably installed in its inner cavity. Each trolley (22) has a fixing plate (23) fixedly installed on one side of its upper part that is close to each other. A slide rod (24) is fixedly installed between the opposite faces of two horizontally arranged fixing plates (23) and between the opposite faces of two vertically arranged fixing plates (23). A controller (25) and a synchronous operation sensor (26) are fixedly installed on the upper end of each trolley (22).

3. The crucible stabilization and removal device for a silicon carbide single crystal growth furnace according to claim 2, characterized in that: The two slide bars (24) are arranged vertically.

4. The crucible stabilization and removal device for a silicon carbide single crystal growth furnace according to claim 2, characterized in that: The lifting assembly (5) includes a ramp motor (51), which is fixedly installed on the left rear side of the slide rail (21) on the front side. A second fixing plate (53) is fixedly installed on the upper end of the slide rail (21), and a turntable (54) is rotatably installed on the upper end of the second fixing plate (53). A first guide block (55) is fixedly installed on the upper end of the turntable (54).

5. The crucible stabilization and removal device for a silicon carbide single crystal growth furnace according to claim 4, characterized in that: The ramp motor (51) is internally wound with a steel wire rope (52), and the end of the steel wire rope (52) away from the ramp motor (51) extends from the inside of the guide block (55) to the outside.

6. The crucible stabilization and removal device for a silicon carbide single crystal growth furnace according to claim 5, characterized in that: The pressing mechanism (4) includes a slider (41), which is slidably connected to the outer surface of two slide rods (24). A guide block (42) is rotatably installed on the side of the upper end of the slider (41) away from the axis. The end of the wire rope (52) away from the ramp motor (51) is wound and connected to the upper end of the slider (41) and extends to the outside. A tension sensor (43) is fixedly connected to the end of the wire rope (52) away from the ramp motor (51). A pull wire (44) is fixedly installed at the lower part of the tension sensor (43). A quick-connect buckle (45) is fixedly installed at the lower end of the pull wire (44).

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